WO2017169548A1 - Inkjet head and inkjet recording apparatus - Google Patents

Inkjet head and inkjet recording apparatus Download PDF

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Publication number
WO2017169548A1
WO2017169548A1 PCT/JP2017/008880 JP2017008880W WO2017169548A1 WO 2017169548 A1 WO2017169548 A1 WO 2017169548A1 JP 2017008880 W JP2017008880 W JP 2017008880W WO 2017169548 A1 WO2017169548 A1 WO 2017169548A1
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WO
WIPO (PCT)
Prior art keywords
ink
head
inkjet head
inkjet
ink jet
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Application number
PCT/JP2017/008880
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French (fr)
Japanese (ja)
Inventor
與田　光宏
俊貴 渡辺
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コニカミノルタ株式会社
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Publication of WO2017169548A1 publication Critical patent/WO2017169548A1/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/17—Ink jet characterised by ink handling
    • B41J2/175—Ink supply systems ; Circuit parts therefor

Definitions

  • the present invention relates to an inkjet head and an inkjet recording apparatus.
  • an ink jet recording apparatus that forms an image on a recording medium by ejecting ink droplets from a plurality of nozzles provided in the ink jet head is known.
  • Patent Document 1 includes a movable carriage, a sub-tank for storing ink mounted on the carriage, an ink jet head attached to the lower part of the sub-tank, and the like, and the sub-tank is provided with a damper chamber.
  • An inkjet recording apparatus is disclosed. In such an ink jet recording apparatus, printing can be performed on a recording paper by ejecting ink from the nozzles of the ink jet head while the carriage moves.
  • the ink jet head is also required to be miniaturized. If the ink jet head is downsized, the flow path in the ink jet head tends to be narrowed, so that there is a problem that the flow path resistance increases and pressure fluctuations in the head are more likely to occur.
  • the present invention has been made in view of such a problem, and a problem to be solved is to provide an ink jet head and an ink jet recording apparatus that can suppress pressure fluctuations in the head during movement even if the size is reduced. .
  • the invention described in claim 1 is an inkjet head that is mounted on an inkjet recording apparatus and moves.
  • a plurality of nozzles for ejecting ink A plurality of pressure chambers respectively communicating with the plurality of nozzles;
  • the ink chamber wall that intersects the direction of movement of the inkjet head has a damper that can be elastically deformed according to pressure to change the volume of the ink chamber.
  • the invention according to claim 2 is the ink jet head according to claim 1, It is characterized by comprising pressure generating means for ejecting ink from the nozzles by causing a pressure change inside the plurality of pressure chambers.
  • the invention according to claim 3 is the ink jet head according to claim 1 or 2
  • the damper is provided on the wall of the ink chamber perpendicular to the moving direction of the inkjet head.
  • the inkjet head according to any one of the first to third aspects,
  • the wall is an outer peripheral wall of the ink chamber.
  • the invention according to claim 5 is the inkjet head according to any one of claims 1 to 4,
  • the moving direction of the inkjet head is a main scanning direction of the inkjet head.
  • the invention according to claim 6 is the inkjet head according to any one of claims 1 to 3,
  • the ink chamber is divided into a plurality of ink chambers.
  • the invention according to claim 7 is the inkjet head according to any one of claims 1 to 6,
  • a head chip including the plurality of nozzles, the plurality of pressure chambers, and the ink chamber;
  • An ink supply hole for supplying ink from the ink chamber to the plurality of pressure chambers is provided on the surface of the head chip opposite to the surface on which the plurality of nozzles are formed, with respect to each of the plurality of pressure chambers.
  • One by one is provided.
  • the invention according to claim 8 is the inkjet head according to any one of claims 1 to 7,
  • the damper is formed of metal or ceramic.
  • the invention according to claim 9 is the inkjet head according to any one of claims 1 to 7,
  • the damper is formed of an organic film.
  • the invention according to claim 10 is: An inkjet recording apparatus comprising the inkjet head according to any one of claims 1 to 9.
  • the invention according to claim 11 is the ink jet recording apparatus according to claim 10,
  • the ink jet recording apparatus is a serial head system.
  • an ink jet head and an ink jet recording apparatus that can suppress pressure fluctuation in the head during movement even if the apparatus is small.
  • a perspective view showing a schematic configuration of an ink jet recording apparatus Bottom view of head unit Perspective view from above of inkjet head Perspective view from below of inkjet head Sectional drawing which shows the principal part of the cross section of IV-IV of FIG. 3A
  • the ink jet recording apparatus 100 ejects ink by moving the ink jet head 1 in the main scanning direction (X direction), which is a direction orthogonal to the transport direction (Y direction), while transporting the recording medium, for example.
  • the serial head method forms an image.
  • the inkjet recording apparatus 100 according to the present invention is not limited to the serial head system as long as the inkjet head 1 mounted on the inkjet recording apparatus 100 moves, and other systems may be used.
  • the inkjet recording apparatus 100 includes a conveyance belt 101, a carriage rail 102, a carriage 103, an ink rack 104, and the like (FIG. 1).
  • the conveyance belt 101 supports the recording medium on the upper surface, and conveys the recording medium in the conveyance direction (Y direction) by driving a conveyance roller (not shown).
  • the carriage 103 is internally provided with a head unit 105 (see FIG. 2) provided with an inkjet head 1 capable of ejecting ink, and is indicated by an arrow X in FIG. 1 along the carriage rail 102. It reciprocates in the main scanning direction.
  • the in-crack 104 stores an ink tank that stores ink to be supplied to the inkjet head 1, and ink is supplied from the ink tank to the inkjet head 1 via, for example, a flexible tube (not shown). It has become so.
  • the head unit 105 is provided in the carriage 103 in parallel in the main scanning direction (X direction) orthogonal to the recording medium conveyance direction (Y direction) (FIG. 2).
  • FIG. 2 is a bottom view showing one of the head units 105 near the end in the main scanning direction (X direction), and shows a surface facing the recording medium.
  • the conveyance direction (Y direction) of the recording medium is also referred to as a sub-scanning direction.
  • a plurality of inkjet heads 1 are arranged and fixed in one dimension in the main scanning direction (X direction).
  • a plurality of ink jet heads 1 are provided so as to be parallel to two rows in the sub-scanning direction (Y direction), and are fixed in a positional relationship so as to be arranged in a staggered pattern as a whole.
  • the head unit 105 ejects, for example, cyan (C), magenta (M), yellow (Y), and black (K) ink from the inkjet head 1 arranged in this manner toward the recording medium.
  • the head unit 105 of the present embodiment is provided with, for example, the inkjet head 1 capable of ejecting two colors of ink.
  • the inkjet head 1 for example, an inkjet head 1 that can eject two colors of cyan (C) and magenta (M) or two colors of yellow (Y) and black (K) is provided.
  • the head unit 105 provided with the inkjet head 1 that ejects cyan (C) and magenta (M) ink, and the yellow (Y) and black (K) inks are ejected.
  • Two other head units 105 provided with the inkjet head 1 are mounted on the carriage 103 side by side.
  • the inkjet head 1 includes a head chip 2, a holding unit 90, an ink chamber 3, a connection member 4, and the like (see FIGS. 3A, 3B, and 4).
  • the head chip 2 is configured by laminating a plurality of substrates in the Z direction, and the lowermost substrate is provided with a large number of nozzles 11 for ejecting ink (see FIG. 2). Further, inside the head chip 2, a pressure chamber 311 for storing ink corresponding to each nozzle 11 and a piezoelectric element 42 as pressure generating means are provided. Corresponding to these pressure chambers 311, the uppermost surface (ink supply hole forming surface 600) of the head chip 2 is provided with a large number of ink supply holes 601 (see FIG. 7). Ink is supplied from the chamber 3 to the pressure chamber 311 through the ink supply hole 601. The ink stored in the pressure chamber 311 is pressurized by the displacement of the piezoelectric element 42, and ink droplets are ejected from the nozzle 11.
  • the ink chamber 3 is separated into two by an outer peripheral wall 3a and a separation wall 3b as walls of the ink chamber 3, and a holding portion 90, and cyan (C), magenta (M), yellow (Y), and black Two colors of (K) are stored in the separated ink chamber 3 one by one. Then, the ink chamber 3 separated into two passes through the ink supply hole 601 provided on the uppermost surface of the head chip 2 to the pressure chamber 311 provided in the ink ejection portions 7 and 8 inside the head chip 2. Ink is supplied.
  • the ink ejection unit 7 is shown as having a through electrode 55 connected to the piezoelectric element 42 on the wiring board 50.
  • a first wiring 57 is connected to the upper end of the through electrode 55, and the first wiring 57 extends in the horizontal direction along the upper surface of the wiring substrate 50 and is connected to the connection member 4.
  • the ink ejection unit 8 has a form in which the through electrode 55 is not provided, and the second wiring 58 connected to the piezoelectric element 42 extends in the horizontal direction along the lower surface of the wiring substrate 50, and is connected to the connection member 4. It is connected.
  • an ink supply unit 301 that supplies ink to the ink chamber 3 and an ink discharge unit 302 that discharges ink in the ink chamber 3 are provided.
  • a damper 3c is provided on the outer peripheral wall 3a perpendicular to the main scanning direction (X direction) of the ink chamber 3 so that the volume of the ink chamber can be changed by elastic deformation according to pressure.
  • the damper 3c slightly elastically deforms according to the pressure applied in the main scanning direction (X direction), and the ink in the ink chamber 3 Can suppress shaking. Therefore, the pressure fluctuation in the inkjet head 1 can be suppressed, and the ink ejection stability can be improved.
  • the damper 3c can be provided so as to be attached from the outside of the outer peripheral wall 3a (see FIG. 4 and FIG. 5), but is not limited thereto, and may be provided so as to be attached from the inside.
  • affixing the damper 3c to the outer peripheral wall 3a for example, it is preferable to affix using an elastic silicon-based adhesive that can absorb impact.
  • the material of the damper 3c is not particularly limited, but is preferably formed of metal or ceramic. By using metal or ceramic, the effect of providing the damper 3c can be obtained while ensuring the strength of the side surface of the ink chamber 3. Further, when the damper 3c is formed of metal or ceramic, the thickness of the damper 3c is not particularly limited as long as the effect of providing the damper 3c can be obtained, but is preferably in the range of 50 to 300 ⁇ m.
  • the metal for example, SUS, 42 alloy, nickel, kovar, invar, copper, aluminum die cast, aluminum, or the like can be used. Of these, SUS is preferably used from the viewpoint of excellent ink resistance.
  • the metal surface may be coated with an ink resistant film such as a fluororesin.
  • the ceramic is not particularly limited, but aluminum nitride, alumina, silicon nitride, silicon carbide and the like are preferably used from the viewpoint of low linear expansion and excellent ink resistance.
  • the damper 3c is also preferably formed of an organic film.
  • an organic film having a high elastic force By using an organic film having a high elastic force, the effect of providing the damper 3c for suppressing pressure fluctuation due to elastic deformation can be obtained more effectively.
  • limit especially as an organic film For example, the film which consists of resin, such as a polyimide, a liquid crystal polymer, an aramid, a polyethylene terephthalate, is mentioned.
  • the damper 3c is provided on the outer peripheral wall 3a perpendicular to the main scanning direction (X direction). However, if the damper 3c is provided in a direction crossing the moving direction of the inkjet head 1, the effect of the present invention can be obtained. I can expect.
  • the “direction intersecting the moving direction of the inkjet head 1” as used in this specification refers to a direction other than a direction parallel to the X direction when the inkjet head 1 moves in only one direction of the X direction, for example. It means that all are included. Further, for example, when the inkjet head 1 moves in two directions of the X direction and the Y direction, it is sufficient that the ink jet head 1 intersects one of the two directions, which means that it includes substantially all directions.
  • connection member 4 is a wiring member connected to the drive unit 5 made of, for example, FPC, and the first wiring 57 via the through electrode 55 on the upper surface of the wiring substrate 50 of the head chip 2 or the second lower surface of the wiring substrate 50.
  • the wiring 58 is connected. Then, electricity is supplied from the driving unit 5 to the piezoelectric element 42 through the connection member 4 and the first wiring 57 or the second wiring 58. Further, the connection member 4 connected to the lower surface of the wiring board 50 is routed to the upper surface of the holding part 90 from the through hole of the holding part 90 opened near the end of the wiring board 50 in the X direction.
  • the holding unit 90 is joined to the ink supply hole forming surface 600 in which the ink supply hole 601 on the upper side of the head chip 2 is formed, and holds the outer peripheral wall 3 a and the separation wall 3 b of the ink chamber 3. Further, the holding unit 90 includes a spacer unit 91 provided on the ink supply hole forming surface 600 and a support unit 92 provided on the upper surface of the spacer unit 91 (FIG. 7).
  • the spacer portion 91 is provided on the upper surface of the head chip 2 with high accuracy
  • the support portion 92 is provided on the upper surface of the spacer portion 91, and the outer periphery of the ink chamber 3 is used as the mark for the support portion 92.
  • a wall 3a and a separation wall 3b can be provided. With such a configuration, the ink chamber 3 can be separated with high accuracy with a simple configuration.
  • the support portion 92 includes an outer peripheral wall support portion 92 a that supports the outer peripheral wall 3 a of the ink chamber 3, and a separation wall support portion 92 b that supports the separation wall 3 b of the ink chamber 3.
  • the spacer part 91 includes a first spacer part 91b joined to the separation wall support part 92b, a second spacer part 91c having a communication hole 602 for communicating the ink supply hole 601 and the ink chamber 3, and an outer peripheral wall support part 92a. And a third spacer portion 91a to be joined.
  • outer peripheral wall support portion 92a and the third spacer portion 91a are collectively referred to as an outer peripheral wall holding portion 90a
  • separation wall support portion 92b and the first spacer portion 91b are collectively referred to as a separation wall holding portion 90b.
  • the first spacer portion 91 b is formed so that the surface joined to the separation wall support portion 92 b has a larger area than the surface joined to the ink supply hole forming surface 600.
  • the ink chamber 3 can be separated with higher accuracy.
  • the adhesive strength between the first spacer portion 91b and the separation wall support portion 92b can be improved.
  • the shape of the first spacer portion 91b is formed so as to expand stepwise from the surface joining the ink supply hole forming surface 600 toward the surface joining the separation wall support portion 92b from the viewpoint of manufacturing efficiency. It is preferable that Further, as the shape of the first spacer portion 91b, the cross-sectional area of the XY plane of the first spacer portion 91b gradually increases from the surface joined to the ink supply hole forming surface 600 toward the surface joined to the separation wall support portion 92b. It is good also as a form which becomes large.
  • the second spacer portion 91c is joined to the ink supply hole forming surface 600, has a communication hole 602 that communicates the ink supply hole 601 and the ink chamber 3, and is surrounded by the first spacer portion 91b and the third spacer portion 91a. It is arranged at the position.
  • the second spacer portion 91c is thinner in the ink ejection direction (Z direction) than the first spacer portion 91b, and the communication hole 602 adjacent to the first spacer portion 91b has at least two ink supply holes 601 and 601. 601 communicates.
  • the communication hole 602 adjacent to the first spacer portion 91b communicates with at least two ink supply holes 601 and 601, a wider space can be secured in the vicinity of the ink supply hole 601 adjacent to the first spacer portion 91b.
  • the third spacer portion 91a is joined on the ink supply hole forming surface 600, and the upper side is joined to the outer peripheral wall support portion 92a.
  • the height of the 1st spacer part 91b and the 3rd spacer part 91a is the same in the Z direction.
  • the outer peripheral wall support portion 92 a is joined on the third spacer portion 91 a and supports the outer peripheral wall 3 a of the ink chamber 3.
  • the separation wall support portion 92 b is joined on the first spacer portion 91 b and supports the separation wall 3 b of the ink chamber 3. Further, the separation wall support portion 92b is formed so that the surface joined to the separation wall 3b has a larger area than the surface joined to the first spacer portion 91b. Thereby, since the joint surface with the separation wall 3b can be made wider, the alignment of the separation wall 3b can be performed more accurately, and the ink chamber 3 can be separated with higher accuracy. Furthermore, the adhesive strength between the separation wall support portion 92b and the separation wall 3b can be improved.
  • the shape of the separation wall support portion 92b is formed so as to spread in a stepped manner from the surface joining the first spacer portion 91b toward the surface joining the separation wall 3b from the viewpoint of manufacturing efficiency. It is preferable. Further, as the shape of the separation wall support portion 92b, the cross sectional area of the XY plane of the separation wall support portion 92b gradually increases from the surface joining the first spacer portion 91b toward the surface joining the separation wall 3b. It is good also as a form.
  • the spacer portion 91 is preferably thinner in the Z direction than the support portion 92 from the viewpoint of performing alignment with high accuracy.
  • the spacer portions 91b and the third spacer portion 91a The thickness in the Z direction is preferably 0.05 to 0.5 mm, and more preferably 0.1 to 0.3 mm. By setting the thickness to 0.5 mm or less, the spacer portion 91 with high processing accuracy can be obtained, and the position can be adjusted with high accuracy. Moreover, sufficient intensity
  • the bonding of the spacer portion 91 to the head chip 2 is desirably performed by providing alignment marks on each of the spacer portion 91 and the head chip 2, and positioning and bonding each from the viewpoint of performing alignment with high accuracy.
  • the alignment method having the spacer portion 91 of the present invention is used, alignment with an error level of about ⁇ 5 ⁇ m is possible, and the ink supply hole forming surface 600 having the ink supply holes 601 with a narrow pitch of about 10 ⁇ m. However, it is possible to align with high accuracy.
  • the material for forming the spacer portion 91 is not particularly limited, but a material having a thermal expansion coefficient close to that of the material for forming the head chip 2 is preferable.
  • the spacer portion 91 is preferably formed of silicon, 42 alloy, glass, or the like. Of these, it is particularly preferable to use 42 alloy from the viewpoints of ink resistance, strength, and heat resistance.
  • the spacer portion 91 is preferably formed of SUS.
  • ink supply holes 601 are formed in the ink supply hole forming surface 600 at equal row intervals in the X direction corresponding to the nozzle arrangement.
  • the lower surface of the first spacer portion 91b is formed so as to pass between the columns of the ink supply holes 601 with equal column spacing in the Y direction.
  • the holding unit 90 has a larger area than the head chip 2 on the XY plane, and can suitably dissipate heat around the head chip 2.
  • the inkjet head 1 of the present invention is an inkjet head 1 that is mounted on the inkjet recording apparatus 100 and moves, and communicates with the plurality of nozzles 11 that eject ink and the plurality of nozzles 11, respectively.
  • Has a damper 3c capable of changing the volume of the ink chamber 3 by elastic deformation in accordance with the pressure.
  • the shaking of the ink in the ink chamber 3 can be suppressed, the pressure fluctuation in the inkjet head 1 can be suppressed, and the ejection stability of the ink can be improved. Further, even in the ink jet head 1 in which the flow path is narrow and the flow path resistance is likely to increase, the pressure fluctuation can be effectively suppressed, so that the ink jet head 1 can be reduced in size.
  • the inkjet head 1 of the present embodiment preferably includes a piezoelectric element 42 that ejects ink from the nozzle 11 by causing a pressure change in the plurality of pressure chambers 311.
  • the damper 3c is configured to provide the damper 3c on the wall (for example, the outer peripheral wall 3a) of the ink chamber 3 perpendicular to the moving direction of the inkjet head 1, so that the damper 3c Since it becomes easy to absorb, the pressure fluctuation in the inkjet head 1 can be suppressed effectively.
  • the wall of the ink chamber 3 where the damper 3 c is provided is preferably the outer peripheral wall 3 b of the ink chamber 3.
  • the damper 3c can easily absorb the pressure applied in the main scanning direction by providing the damper 3c on the outer peripheral wall 3a of the ink chamber 3 perpendicular to the main scanning direction of the inkjet head 1. Therefore, pressure fluctuations in the inkjet head 1 can be effectively suppressed.
  • the ink jet head 1 of the present embodiment can reduce the number of ink jet heads 1 required for the ink jet recording apparatus by separating the ink chamber 3 into a plurality of separation walls 3b, the ink jet recording apparatus can be downsized. can do.
  • the inkjet head 1 of this embodiment includes a head chip 2 including a plurality of nozzles 11, a plurality of pressure chambers 311, and an ink chamber 3, and the plurality of nozzles 11 of the head chip 2 are formed.
  • One ink supply hole 601 for supplying ink from the ink chamber 3 to the plurality of pressure chambers 311 is provided for each of the plurality of pressure chambers 311 on the surface opposite to the surface. Accordingly, ink can be directly supplied from the ink chamber 3 to the pressure chamber 311, and the configuration of the head chip 2 can be simplified and the inkjet head 1 can be downsized.
  • the damper 3c is provided on the outer peripheral wall 3a of the ink chamber 3 so that the inside of the ink jet head 1 can be provided. Can be effectively suppressed.
  • the damper effect can be obtained while the strength of the side surface of the ink chamber 3 is ensured by forming the damper 3c from metal or ceramic.
  • the damper effect of suppressing pressure fluctuation due to elastic deformation can be obtained more effectively by forming the damper 3c with an organic film.
  • the ink jet recording apparatus 100 including the ink jet head 1 of the present embodiment can effectively suppress pressure fluctuations in the ink jet head 1 due to the movement of the ink jet head 1.
  • the inkjet recording apparatus 100 of the present embodiment is preferably a serial head system.
  • the damper 3 c according to the present invention is provided on the wall of the ink chamber 3
  • the example in which the damper 3 c is provided on the outer peripheral wall 3 a is shown, but the present invention is not limited thereto, and is provided inside the ink chamber 3. It may be provided on the separation wall 3b, which is a provided wall.
  • the normal one-color inkjet head 1 that is not separated by the separation wall 3b may be used. Even when the ink chambers 3 are separated, the direction and number of separation can be appropriately changed. For example, the ink chambers may be separated into four in the X direction. Further, for example, cyan (C), magenta (M), yellow (Y), and black (K) inks are stored in each of the separated ink chambers 3 for each color. However, the same color ink may be stored.
  • the damper 3c is provided on the surface of the outer peripheral wall 3a of the ink chamber 3 perpendicular to the main scanning direction.
  • it may be provided in a direction slightly inclined with respect to the main scanning direction.
  • the spacer portion 91 is configured to avoid the ink supply hole 601 and includes a third spacer portion 91a joined to the outer peripheral wall support portion 92a and a first spacer portion 91b joined to the separation wall support portion 92b. If it has the structure which has, it can change suitably.
  • the piezoelectric element 42 is used as the pressure generating means, there is no particular limitation as long as a mechanism capable of ejecting ink is provided.
  • thermal electroactive conversion element
  • the present invention can be used for an inkjet head and an inkjet recording apparatus.

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Abstract

The present invention addresses the problem of providing an inkjet head and an inkjet recording apparatus that, although being small, allow suppression of pressure fluctuation in the head during movement. An inkjet head 1 according to the present invention is characterized by being mounted to an inkjet recording apparatus 100 so as to be moved and by being provided with: a plurality of nozzles 11 that eject ink; a plurality of pressure chambers 311 that are respectively connected with the plurality of nozzles 11; and an ink chamber 3 that stores ink to be supplied to the plurality of pressure chambers 311, wherein a damper 3c capable of changing the volume of the ink chamber 3 when being elastically deformed in accordance with pressure is provided to a wall, of the ink chamber 3, that crosses a movement direction of the inkjet head 1.

Description

インクジェットヘッド及びインクジェット記録装置Inkjet head and inkjet recording apparatus
　本発明は、インクジェットヘッド及びインクジェット記録装置に関する。 The present invention relates to an inkjet head and an inkjet recording apparatus.
　従来、インクジェットヘッドに備えられた複数のノズルからインクの液滴を射出して記録媒体に画像を形成するインクジェット記録装置が知られている。 Conventionally, an ink jet recording apparatus that forms an image on a recording medium by ejecting ink droplets from a plurality of nozzles provided in the ink jet head is known.
　例えば、特許文献１には、移動可能なキャリッジと、キャリッジに搭載されたインクを貯留するサブタンクと、当該サブタンクの下部に取り付けられたインクジェットヘッド等を備え、当該サブタンクにはダンパー室が設けられているインクジェット記録装置が開示されている。このようなインクジェット記録装置では、キャリッジが移動しながら、インクジェットヘッドのノズルからインクを射出することによって、記録用紙に印刷を行うことができる。 For example, Patent Document 1 includes a movable carriage, a sub-tank for storing ink mounted on the carriage, an ink jet head attached to the lower part of the sub-tank, and the like, and the sub-tank is provided with a damper chamber. An inkjet recording apparatus is disclosed. In such an ink jet recording apparatus, printing can be performed on a recording paper by ejecting ink from the nozzles of the ink jet head while the carriage moves.
特開２０１５－１８２４４４号公報Japanese Patent Laying-Open No. 2015-182444
　しかしながら、特許文献１の従来のインクジェット記録装置では、キャリッジが移動しながらインクの射出が行われるため、インクジェットヘッドのインク流路内で圧力変動が生じやすく、それによりインクの射出安定性が低下するという問題がある。
　ここで、特許文献１のインクジェット記録装置では、サブタンクにダンパー室が設けられているため、ダンパー室付近の圧力変動を抑えることは可能である。しかしながら、ダンパー室はインクジェットヘッドからは離れた位置にあり、かつキャリッジの移動方向と平行な位置に設けられているため、インクジェットヘッドのインク流路内での圧力変動を抑える効果は低い。 However, in the conventional ink jet recording apparatus of Patent Document 1, since ink is ejected while the carriage is moving, pressure fluctuation is likely to occur in the ink flow path of the ink jet head, thereby reducing ink ejection stability. There is a problem.
Here, in the ink jet recording apparatus of Patent Document 1, since the damper chamber is provided in the sub tank, it is possible to suppress the pressure fluctuation in the vicinity of the damper chamber. However, since the damper chamber is located at a position away from the inkjet head and parallel to the moving direction of the carriage, the effect of suppressing pressure fluctuations in the ink flow path of the inkjet head is low.
　ところで、近年のインクジェット記録装置の小型化により、インクジェットヘッドも小型にすることが求められている。インクジェットヘッドを小型にすると、インクジェットヘッド内の流路が狭くなりやすいため、流路抵抗が大きくなり、ヘッド内の圧力変動が生じやくなるという問題がある。 By the way, due to the recent miniaturization of the ink jet recording apparatus, the ink jet head is also required to be miniaturized. If the ink jet head is downsized, the flow path in the ink jet head tends to be narrowed, so that there is a problem that the flow path resistance increases and pressure fluctuations in the head are more likely to occur.
　本発明は、このような問題に鑑みてなされたものであり、その解決課題は、小型にしても、移動時におけるヘッド内の圧力変動が抑えられるインクジェットヘッド及びインクジェット記録装置を提供することである。 The present invention has been made in view of such a problem, and a problem to be solved is to provide an ink jet head and an ink jet recording apparatus that can suppress pressure fluctuations in the head during movement even if the size is reduced. .
　上記課題の解決のために、請求項１に記載の発明は、インクジェット記録装置に搭載されて移動するインクジェットヘッドであって、
　インクを射出する複数のノズルと、
　前記複数のノズルにそれぞれ連通する複数の圧力室と、
　前記複数の圧力室に供給するインクを貯留するインク室と、
　を備え、
　前記インクジェットヘッドの前記移動の方向と交差する前記インク室の壁に、圧力に応じて弾性変形して前記インク室の容積を変更可能なダンパーを有することを特徴とする。 In order to solve the above problems, the invention described in claim 1 is an inkjet head that is mounted on an inkjet recording apparatus and moves.
A plurality of nozzles for ejecting ink;
A plurality of pressure chambers respectively communicating with the plurality of nozzles;
An ink chamber for storing ink to be supplied to the plurality of pressure chambers;
With
The ink chamber wall that intersects the direction of movement of the inkjet head has a damper that can be elastically deformed according to pressure to change the volume of the ink chamber.
　請求項２に記載の発明は、請求項１に記載のインクジェットヘッドにおいて、
　前記複数の圧力室の内部の圧力変化を生じさせることにより、前記ノズルからインクを射出させる圧力発生手段を備えることを特徴とする。 The invention according to claim 2 is the ink jet head according to claim 1,
It is characterized by comprising pressure generating means for ejecting ink from the nozzles by causing a pressure change inside the plurality of pressure chambers.
　請求項３に記載の発明は、請求項１又は請求項２に記載のインクジェットヘッドにおいて、
　前記ダンパーは、前記インクジェットヘッドの移動方向に垂直な前記インク室の前記壁に設けられていることを特徴とする。 The invention according to claim 3 is the ink jet head according to claim 1 or 2,
The damper is provided on the wall of the ink chamber perpendicular to the moving direction of the inkjet head.
　請求項４に記載の発明は、請求項１から請求項３までのいずれか一項に記載のインクジェットヘッドにおいて、
　前記壁が、前記インク室の外周壁であることを特徴とする。 According to a fourth aspect of the invention, there is provided the inkjet head according to any one of the first to third aspects,
The wall is an outer peripheral wall of the ink chamber.
　請求項５に記載の発明は、請求項１から請求項４までのいずれか一項に記載のインクジェットヘッドにおいて、
　前記インクジェットヘッドの移動方向が、前記インクジェットヘッドの主走査方向であることを特徴とする。 The invention according to claim 5 is the inkjet head according to any one of claims 1 to 4,
The moving direction of the inkjet head is a main scanning direction of the inkjet head.
　請求項６に記載の発明は、請求項１から請求項３までのいずれか一項に記載のインクジェットヘッドにおいて、
　前記インク室は、複数に分離されていることを特徴とする。 The invention according to claim 6 is the inkjet head according to any one of claims 1 to 3,
The ink chamber is divided into a plurality of ink chambers.
　請求項７に記載の発明は、請求項１から請求項６までのいずれか一項に記載のインクジェットヘッドにおいて、
　前記複数のノズルと、前記複数の圧力室と、前記インク室とを備えたヘッドチップを備え、
　前記ヘッドチップの前記複数のノズルが形成された面と反対側の面に、前記複数の圧力室に前記インク室からインクを供給するためのインク供給孔が、前記複数の圧力室の各々に対して１つずつ設けられていることを特徴とする。 The invention according to claim 7 is the inkjet head according to any one of claims 1 to 6,
A head chip including the plurality of nozzles, the plurality of pressure chambers, and the ink chamber;
An ink supply hole for supplying ink from the ink chamber to the plurality of pressure chambers is provided on the surface of the head chip opposite to the surface on which the plurality of nozzles are formed, with respect to each of the plurality of pressure chambers. One by one is provided.
　請求項８に記載の発明は、請求項１から請求項７までのいずれか一項に記載のインクジェットヘッドにおいて、
　前記ダンパーは、金属又はセラミックによって形成されていることを特徴とする。 The invention according to claim 8 is the inkjet head according to any one of claims 1 to 7,
The damper is formed of metal or ceramic.
　請求項９に記載の発明は、請求項１から請求項７までのいずれか一項に記載のインクジェットヘッドにおいて、
　前記ダンパーは、有機フィルムによって形成されていることを特徴とする。 The invention according to claim 9 is the inkjet head according to any one of claims 1 to 7,
The damper is formed of an organic film.
　請求項１０に記載の発明は、
　請求項１から９までのいずれか一項に記載のインクジェットヘッドを備えることを特徴とするインクジェット記録装置である。 The invention according to claim 10 is:
An inkjet recording apparatus comprising the inkjet head according to any one of claims 1 to 9.
　請求項１１に記載の発明は、請求項１０に記載のインクジェット記録装置において、
　前記インクジェット記録装置が、シリアルヘッド方式であることを特徴とする。 The invention according to claim 11 is the ink jet recording apparatus according to claim 10,
The ink jet recording apparatus is a serial head system.
　本発明によれば、小型にしても、移動時におけるヘッド内の圧力変動が抑えられるインクジェットヘッド及びインクジェット記録装置を提供することができる。 According to the present invention, it is possible to provide an ink jet head and an ink jet recording apparatus that can suppress pressure fluctuation in the head during movement even if the apparatus is small.
インクジェット記録装置の概略構成を示す斜視図A perspective view showing a schematic configuration of an ink jet recording apparatus ヘッドユニットの底面図Bottom view of head unit インクジェットヘッドの上方からの斜視図Perspective view from above of inkjet head インクジェットヘッドの下方からの斜視図Perspective view from below of inkjet head 図３ＡのIV-IVの断面の要部を示す断面図Sectional drawing which shows the principal part of the cross section of IV-IV of FIG. 3A 図４の断面を示す斜視図The perspective view which shows the cross section of FIG. 図５の要部の拡大図Enlarged view of the main part of FIG. ヘッドチップ上に配置された保持部の分解斜視図Exploded perspective view of holding part arranged on head chip
　以下、図面を参照しながら、本発明の好ましい実施形態について説明する。但し、発明の範囲は図示例に限定されない。また、以下の説明において、同一の機能及び構成を有するものについては、同一の符号を付し、その説明を省略する。 Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings. However, the scope of the invention is not limited to the illustrated examples. Moreover, in the following description, about what has the same function and structure, the same code | symbol is attached | subjected and the description is abbreviate | omitted.
［インクジェット記録装置］
　本実施形態のインクジェット記録装置１００は、例えば、記録媒体を搬送しながら、その搬送方向（Ｙ方向）と直交する方向である主走査方向（Ｘ方向）にインクジェットヘッド１を移動させてインクを射出し、画像を形成するシリアルヘッド方式である。また、本発明に係るインクジェット記録装置１００は、当該インクジェット記録装置１００に搭載されたインクジェットヘッド１が移動するものであれば、シリアルヘッド方式に限られず、他の方式であってもよい。
　インクジェット記録装置１００は、搬送ベルト１０１と、キャリッジレール１０２と、キャリッジ１０３と、インクラック１０４等で構成されている（図１）。 [Inkjet recording apparatus]
The ink jet recording apparatus 100 according to the present embodiment ejects ink by moving the ink jet head 1 in the main scanning direction (X direction), which is a direction orthogonal to the transport direction (Y direction), while transporting the recording medium, for example. The serial head method forms an image. In addition, the inkjet recording apparatus 100 according to the present invention is not limited to the serial head system as long as the inkjet head 1 mounted on the inkjet recording apparatus 100 moves, and other systems may be used.
The inkjet recording apparatus 100 includes a conveyance belt 101, a carriage rail 102, a carriage 103, an ink rack 104, and the like (FIG. 1).
　搬送ベルト１０１は、上面に記録媒体を支持し、搬送ローラー（図示省略）の駆動により、当該記録媒体を搬送方向（Ｙ方向）に搬送する。
　キャリッジ１０３には、インクを射出することができるインクジェットヘッド１が備えられたヘッドユニット１０５（図２参照）が内部に備えられており、キャリッジレール１０２に沿って、図１中矢印Ｘで示される主走査方向に往復移動するようになっている。 The conveyance belt 101 supports the recording medium on the upper surface, and conveys the recording medium in the conveyance direction (Y direction) by driving a conveyance roller (not shown).
The carriage 103 is internally provided with a head unit 105 (see FIG. 2) provided with an inkjet head 1 capable of ejecting ink, and is indicated by an arrow X in FIG. 1 along the carriage rail 102. It reciprocates in the main scanning direction.
　インクラック１０４には、インクジェットヘッド１に供給するためのインクを貯蔵するインクタンクが格納されており、当該インクタンクから、例えば、フレキシブルチューブ（図示省略）を介してインクジェットヘッド１にインクが供給されるようになっている。 The in-crack 104 stores an ink tank that stores ink to be supplied to the inkjet head 1, and ink is supplied from the ink tank to the inkjet head 1 via, for example, a flexible tube (not shown). It has become so.
［ヘッドユニット］
　ヘッドユニット１０５は、キャリッジ１０３の内部に、記録媒体の搬送方向（Ｙ方向）に直交する主走査方向（Ｘ方向）に並列して設けられている（図２）。なお、図２は、ヘッドユニット１０５の１つを示した主走査方向（Ｘ方向）の端部付近の底面図であり、記録媒体と対向する面を示している。なお、以下の説明において、記録媒体の搬送方向（Ｙ方向）を副走査方向ともいう。 [Head unit]
The head unit 105 is provided in the carriage 103 in parallel in the main scanning direction (X direction) orthogonal to the recording medium conveyance direction (Y direction) (FIG. 2). FIG. 2 is a bottom view showing one of the head units 105 near the end in the main scanning direction (X direction), and shows a surface facing the recording medium. In the following description, the conveyance direction (Y direction) of the recording medium is also referred to as a sub-scanning direction.
　ヘッドユニット１０５には、インクジェットヘッド１が主走査方向（Ｘ方向）に１次元に複数配列されて取り付け固定されている。また、複数のインクジェットヘッド１が、副走査方向（Ｙ方向）に２列平行となるように設けられ、全体として千鳥格子状の配置となる位置関係で固定されている。ヘッドユニット１０５は、このように配置されたインクジェットヘッド１から、例えば、シアン（Ｃ），マゼンタ（Ｍ），イエロー（Ｙ），ブラック（Ｋ）のインクを記録媒体に向けて射出する。 In the head unit 105, a plurality of inkjet heads 1 are arranged and fixed in one dimension in the main scanning direction (X direction). A plurality of ink jet heads 1 are provided so as to be parallel to two rows in the sub-scanning direction (Y direction), and are fixed in a positional relationship so as to be arranged in a staggered pattern as a whole. The head unit 105 ejects, for example, cyan (C), magenta (M), yellow (Y), and black (K) ink from the inkjet head 1 arranged in this manner toward the recording medium.
　また、本実施形態のヘッドユニット１０５には、例えば、２色のインクを射出することができるインクジェットヘッド１が備えられている。インクジェットヘッド１としては、例えば、シアン（Ｃ）及びマゼンタ（Ｍ）の２色、又は、イエロー（Ｙ）及びブラック（Ｋ）の２色のインクを射出できるインクジェットヘッド１が設けられている。そして、例えば、インクジェット記録装置１００には、シアン（Ｃ）及びマゼンタ（Ｍ）のインクを射出するインクジェットヘッド１が設けられたヘッドユニット１０５と、イエロー（Ｙ）及びブラック（Ｋ）のインクを射出するインクジェットヘッド１が設けられた他のヘッドユニット１０５とが、２つ並んでキャリッジ１０３に搭載されている。 Further, the head unit 105 of the present embodiment is provided with, for example, the inkjet head 1 capable of ejecting two colors of ink. As the inkjet head 1, for example, an inkjet head 1 that can eject two colors of cyan (C) and magenta (M) or two colors of yellow (Y) and black (K) is provided. For example, in the inkjet recording apparatus 100, the head unit 105 provided with the inkjet head 1 that ejects cyan (C) and magenta (M) ink, and the yellow (Y) and black (K) inks are ejected. Two other head units 105 provided with the inkjet head 1 are mounted on the carriage 103 side by side.
［インクジェットヘッド］
　インクジェットヘッド１の構成について、図３～７に基づいて説明する。
　なお、以下の説明において、主走査方向（Ｘ方向）及び副走査方向（Ｙ方向）にそれぞれ直交する方向をＺ方向とする。なお、図３Ａ及び図３Ｂでは、説明の便宜上、接続部材４を透かして、ダンパー３ｃの位置が見えるように図示している。 [Inkjet head]
The configuration of the inkjet head 1 will be described with reference to FIGS.
In the following description, a direction perpendicular to the main scanning direction (X direction) and the sub-scanning direction (Y direction) is defined as the Z direction. In FIG. 3A and FIG. 3B, for convenience of explanation, the connection member 4 is seen through so that the position of the damper 3c can be seen.
　インクジェットヘッド１は、ヘッドチップ２、保持部９０、インク室３及び接続部材４等を備える（図３Ａ、図３Ｂ及び図４等参照）。 The inkjet head 1 includes a head chip 2, a holding unit 90, an ink chamber 3, a connection member 4, and the like (see FIGS. 3A, 3B, and 4).
　ヘッドチップ２は、Ｚ方向に複数の基板が積層されて構成されており、最下層の基板には、インクを射出する多数のノズル１１が高密度に設けられている（図２参照）。また、ヘッドチップ２の内部には、各ノズル１１に対応してインクが貯留される圧力室３１１及び圧力発生手段としての圧電素子４２が設けられている。また、これらの圧力室３１１に対応して、ヘッドチップ２の最上面（インク供給孔形成面６００）には、多数のインク供給孔６０１が高密度に設けられており（図７参照）、インク室３からインク供給孔６０１を通して圧力室３１１にインクが供給される。そして、圧電素子４２の変位によって、圧力室３１１に貯留されたインクが加圧され、ノズル１１からインクの液滴が射出される。 The head chip 2 is configured by laminating a plurality of substrates in the Z direction, and the lowermost substrate is provided with a large number of nozzles 11 for ejecting ink (see FIG. 2). Further, inside the head chip 2, a pressure chamber 311 for storing ink corresponding to each nozzle 11 and a piezoelectric element 42 as pressure generating means are provided. Corresponding to these pressure chambers 311, the uppermost surface (ink supply hole forming surface 600) of the head chip 2 is provided with a large number of ink supply holes 601 (see FIG. 7). Ink is supplied from the chamber 3 to the pressure chamber 311 through the ink supply hole 601. The ink stored in the pressure chamber 311 is pressurized by the displacement of the piezoelectric element 42, and ink droplets are ejected from the nozzle 11.
　インク室３は、インク室３の壁としての外周壁３ａ及び分離壁３ｂと、保持部９０とによって２つに分離されており、シアン（Ｃ）、マゼンタ（Ｍ）、イエロー（Ｙ）及びブラック（Ｋ）のうち２色が、分離されたインク室３内に、それぞれ１色ずつ貯留されている。そして、２つに分離されたインク室３から、ヘッドチップ２の最上面に設けられたインク供給孔６０１を通って、ヘッドチップ２内部のインク射出部７，８に設けられた圧力室３１１にインクが供給される。
　ここで、インク射出部７は、配線基板５０に、圧電素子４２に接続する貫通電極５５を備える形態を示している。その貫通電極５５の上端には第一配線５７が接続されており、第一配線５７は配線基板５０の上面に沿って水平方向に延在し、接続部材４に接続されている。また、インク射出部８は、貫通電極５５を備えない形態を示しており、圧電素子４２に接続する第二配線５８は配線基板５０の下面に沿って水平方向に延在し、接続部材４に接続されている。 The ink chamber 3 is separated into two by an outer peripheral wall 3a and a separation wall 3b as walls of the ink chamber 3, and a holding portion 90, and cyan (C), magenta (M), yellow (Y), and black Two colors of (K) are stored in the separated ink chamber 3 one by one. Then, the ink chamber 3 separated into two passes through the ink supply hole 601 provided on the uppermost surface of the head chip 2 to the pressure chamber 311 provided in the ink ejection portions 7 and 8 inside the head chip 2. Ink is supplied.
Here, the ink ejection unit 7 is shown as having a through electrode 55 connected to the piezoelectric element 42 on the wiring board 50. A first wiring 57 is connected to the upper end of the through electrode 55, and the first wiring 57 extends in the horizontal direction along the upper surface of the wiring substrate 50 and is connected to the connection member 4. In addition, the ink ejection unit 8 has a form in which the through electrode 55 is not provided, and the second wiring 58 connected to the piezoelectric element 42 extends in the horizontal direction along the lower surface of the wiring substrate 50, and is connected to the connection member 4. It is connected.
　また、２つに分離されたインク室３それぞれに対して、インク室３にインクを供給するインク供給部３０１と、インク室３のインクを排出するインク排出部３０２が設けられている。 For each of the two ink chambers 3 separated, an ink supply unit 301 that supplies ink to the ink chamber 3 and an ink discharge unit 302 that discharges ink in the ink chamber 3 are provided.
　また、インク室３の主走査方向（Ｘ方向）に垂直な外周壁３ａには、圧力に応じて弾性変形することによりインク室の容積を変更可能なダンパー３ｃが設けられている。これにより、主走査方向（Ｘ方向）にインクジェットヘッド１が移動した際に、主走査方向（Ｘ方向）にかかる圧力に応じてダンパー３ｃがわずかに弾性変形をして、インク室３内のインクの揺れを抑えることができる。したがって、インクジェットヘッド１内の圧力変動を抑え、インクの射出安定性を向上させることができる。また、流路が狭くて流路抵抗が大きくなりやすいインクジェットヘッド１でも、効果的に圧力変動を抑えることができるため、インクジェットヘッド１を小型化することができる。
　ダンパー３ｃは、例えば、外周壁３ａの外側から貼り付けるようにして設けることができるが（図４及び図５等参照）、これに限られず、内側から貼り付けるように設けてもよい。また、ダンパー３ｃを外周壁３ａに貼り付ける際には、例えば、衝撃を吸収可能な弾力のあるシリコン系接着剤等を用いて貼り付けることが好ましい。 A damper 3c is provided on the outer peripheral wall 3a perpendicular to the main scanning direction (X direction) of the ink chamber 3 so that the volume of the ink chamber can be changed by elastic deformation according to pressure. Thereby, when the inkjet head 1 moves in the main scanning direction (X direction), the damper 3c slightly elastically deforms according to the pressure applied in the main scanning direction (X direction), and the ink in the ink chamber 3 Can suppress shaking. Therefore, the pressure fluctuation in the inkjet head 1 can be suppressed, and the ink ejection stability can be improved. Further, even in the ink jet head 1 in which the flow path is narrow and the flow path resistance is likely to increase, the pressure fluctuation can be effectively suppressed, so that the ink jet head 1 can be reduced in size.
For example, the damper 3c can be provided so as to be attached from the outside of the outer peripheral wall 3a (see FIG. 4 and FIG. 5), but is not limited thereto, and may be provided so as to be attached from the inside. Moreover, when affixing the damper 3c to the outer peripheral wall 3a, for example, it is preferable to affix using an elastic silicon-based adhesive that can absorb impact.
　ダンパー３ｃの材料は特に限られないが、金属又はセラミックによって形成されることが好ましい。金属又はセラミックを用いることにより、インク室３の側面の強度を確保しつつ、ダンパー３ｃを設けた効果を得ることができる。
　また、金属又はセラミックによりダンパー３ｃを形成する場合には、ダンパー３ｃの厚さは、ダンパー３ｃを設けた効果が得られれば特に限られないが、５０～３００μｍの範囲内とすることが好ましい。
　金属としては、例えば、ＳＵＳ、４２アロイ、ニッケル、コバール、インバー、銅、アルミダイカスト、アルミニウム等を用いることができる。また、これらの中でも、耐インク性に優れるという観点から、ＳＵＳを用いることが好ましい。また、インク耐性に優れない金属を用いる際には、金属表面をフッ素樹脂等の耐インク膜でコーティングして用いることとしても良い。
　セラミックとしては、特に限られないが、低線膨張であり、耐インク性にも優れるという観点から、窒化アルミ、アルミナ、窒化珪素、炭化珪素等を用いることが好ましい。 The material of the damper 3c is not particularly limited, but is preferably formed of metal or ceramic. By using metal or ceramic, the effect of providing the damper 3c can be obtained while ensuring the strength of the side surface of the ink chamber 3.
Further, when the damper 3c is formed of metal or ceramic, the thickness of the damper 3c is not particularly limited as long as the effect of providing the damper 3c can be obtained, but is preferably in the range of 50 to 300 μm.
As the metal, for example, SUS, 42 alloy, nickel, kovar, invar, copper, aluminum die cast, aluminum, or the like can be used. Of these, SUS is preferably used from the viewpoint of excellent ink resistance. Further, when using a metal that is not excellent in ink resistance, the metal surface may be coated with an ink resistant film such as a fluororesin.
The ceramic is not particularly limited, but aluminum nitride, alumina, silicon nitride, silicon carbide and the like are preferably used from the viewpoint of low linear expansion and excellent ink resistance.
　また、ダンパー３ｃは、有機フィルムによって形成されることも好ましい。高い弾性力を有する有機フィルムを用いることにより、弾性変形による圧力変動の抑制というダンパー３ｃを設けた効果を、より効果的に得ることができる。
　有機フィルムとしては、特に限られないが、例えば、ポリイミド、液晶ポリマー、アラミド、ポリエチレンテレフタレート等の樹脂からなるフィルムが挙げられる。 The damper 3c is also preferably formed of an organic film. By using an organic film having a high elastic force, the effect of providing the damper 3c for suppressing pressure fluctuation due to elastic deformation can be obtained more effectively.
Although it does not restrict | limit especially as an organic film, For example, the film which consists of resin, such as a polyimide, a liquid crystal polymer, an aramid, a polyethylene terephthalate, is mentioned.
　また、ダンパー３ｃは、主走査方向（Ｘ方向）に垂直な外周壁３ａに設けることとしたが、インクジェットヘッド１の移動方向に交差する方向に設けられていれば本発明の効果を得ることが期待できる。
　ここで、本明細書でいう「インクジェットヘッド１の移動方向に交差する方向」とは、インクジェットヘッド１が、例えば、Ｘ方向の一方向のみに移動する場合には、Ｘ方向に平行な方向以外を全て含むことを意味する。また、インクジェットヘッド１が、例えば、Ｘ方向とＹ方向の２方向に移動する場合には、そのいずれかの方向に交差していればよいため、実質的に全方向を含むことを意味する。 The damper 3c is provided on the outer peripheral wall 3a perpendicular to the main scanning direction (X direction). However, if the damper 3c is provided in a direction crossing the moving direction of the inkjet head 1, the effect of the present invention can be obtained. I can expect.
Here, the “direction intersecting the moving direction of the inkjet head 1” as used in this specification refers to a direction other than a direction parallel to the X direction when the inkjet head 1 moves in only one direction of the X direction, for example. It means that all are included. Further, for example, when the inkjet head 1 moves in two directions of the X direction and the Y direction, it is sufficient that the ink jet head 1 intersects one of the two directions, which means that it includes substantially all directions.
　接続部材４は、例えばＦＰＣ等からなる駆動部５に接続する配線部材であり、ヘッドチップ２の配線基板５０の上面の貫通電極５５を介した第一配線５７又は配線基板５０の下面の第二配線５８に接続している。そして、駆動部５から、接続部材４と、第一配線５７又は第二配線５８とを通じて、圧電素子４２に電気が供給される。また、配線基板５０の下面に接続された接続部材４は、配線基板５０のＸ方向端部付近にあけられた保持部９０の貫通孔から保持部９０の上面に引き回されている。 The connection member 4 is a wiring member connected to the drive unit 5 made of, for example, FPC, and the first wiring 57 via the through electrode 55 on the upper surface of the wiring substrate 50 of the head chip 2 or the second lower surface of the wiring substrate 50. The wiring 58 is connected. Then, electricity is supplied from the driving unit 5 to the piezoelectric element 42 through the connection member 4 and the first wiring 57 or the second wiring 58. Further, the connection member 4 connected to the lower surface of the wiring board 50 is routed to the upper surface of the holding part 90 from the through hole of the holding part 90 opened near the end of the wiring board 50 in the X direction.
　保持部９０は、ヘッドチップ２の上側のインク供給孔６０１が形成されたインク供給孔形成面６００に接合されており、インク室３の外周壁３ａ及び分離壁３ｂを保持している。
　また、保持部９０は、インク供給孔形成面６００上に設けられたスペーサー部９１と、当該スペーサー部９１の上面に設けられた支持部９２と、を有している（図７）。これにより、スペーサー部９１をヘッドチップ２の上面に高精度に位置合わせして設けた後に、当該スペーサー部９１の上面に支持部９２を設け、当該支持部９２を目印として、インク室３の外周壁３ａと分離壁３ｂを設けることができる。このような構成とすることで、簡易な構成で高精度にインク室３を分離することができる。 The holding unit 90 is joined to the ink supply hole forming surface 600 in which the ink supply hole 601 on the upper side of the head chip 2 is formed, and holds the outer peripheral wall 3 a and the separation wall 3 b of the ink chamber 3.
Further, the holding unit 90 includes a spacer unit 91 provided on the ink supply hole forming surface 600 and a support unit 92 provided on the upper surface of the spacer unit 91 (FIG. 7). Thus, after the spacer portion 91 is provided on the upper surface of the head chip 2 with high accuracy, the support portion 92 is provided on the upper surface of the spacer portion 91, and the outer periphery of the ink chamber 3 is used as the mark for the support portion 92. A wall 3a and a separation wall 3b can be provided. With such a configuration, the ink chamber 3 can be separated with high accuracy with a simple configuration.
　支持部９２は、インク室３の外周壁３ａを支持する外周壁支持部９２ａと、インク室３の分離壁３ｂを支持する分離壁支持部９２ｂを有している。
　スペーサー部９１は、分離壁支持部９２ｂに接合する第１スペーサー部９１ｂと、インク供給孔６０１とインク室３とを連通する連通孔６０２を有する第２スペーサー部９１ｃと、外周壁支持部９２ａに接合する第３スペーサー部９１ａと、を有している。
　ここで、外周壁支持部９２ａと第３スペーサー部９１ａを合わせて外周壁保持部９０ａともいい、分離壁支持部９２ｂと第１スペーサー部９１ｂを合わせて分離壁保持部９０ｂともいう。 The support portion 92 includes an outer peripheral wall support portion 92 a that supports the outer peripheral wall 3 a of the ink chamber 3, and a separation wall support portion 92 b that supports the separation wall 3 b of the ink chamber 3.
The spacer part 91 includes a first spacer part 91b joined to the separation wall support part 92b, a second spacer part 91c having a communication hole 602 for communicating the ink supply hole 601 and the ink chamber 3, and an outer peripheral wall support part 92a. And a third spacer portion 91a to be joined.
Here, the outer peripheral wall support portion 92a and the third spacer portion 91a are collectively referred to as an outer peripheral wall holding portion 90a, and the separation wall support portion 92b and the first spacer portion 91b are collectively referred to as a separation wall holding portion 90b.
　第１スペーサー部９１ｂは、分離壁支持部９２ｂに接合する面が、インク供給孔形成面６００に接合する面よりも面積が大きくなるように形成されている。これにより、インク供給孔形成面６００との接着面を小さくしつつ、分離壁支持部９２ｂとの接合面をより広くとることができため、分離壁支持部９２ｂの位置合わせをより正確に行うことができ、インク室３をより高精度に分離できる。さらに、第１スペーサー部９１ｂと分離壁支持部９２ｂの接着強度を向上させることができる。
　また、第１スペーサー部９１ｂの形状としては、製造効率の観点から、インク供給孔形成面６００と接合する面から、分離壁支持部９２ｂに接合する面に向かうにつれ、階段状に広がるように形成されていることが好ましい。
　また、第１スペーサー部９１ｂの形状としては、インク供給孔形成面６００と接合する面から、分離壁支持部９２ｂと接合する面に向かうにつれ、第１スペーサー部９１ｂのＸＹ平面の断面積が徐々に大きくなる形態としても良い。 The first spacer portion 91 b is formed so that the surface joined to the separation wall support portion 92 b has a larger area than the surface joined to the ink supply hole forming surface 600. As a result, it is possible to make the bonding surface with the separation wall support portion 92b wider while reducing the adhesion surface with the ink supply hole forming surface 600, so that the alignment of the separation wall support portion 92b is performed more accurately. The ink chamber 3 can be separated with higher accuracy. Furthermore, the adhesive strength between the first spacer portion 91b and the separation wall support portion 92b can be improved.
Further, the shape of the first spacer portion 91b is formed so as to expand stepwise from the surface joining the ink supply hole forming surface 600 toward the surface joining the separation wall support portion 92b from the viewpoint of manufacturing efficiency. It is preferable that
Further, as the shape of the first spacer portion 91b, the cross-sectional area of the XY plane of the first spacer portion 91b gradually increases from the surface joined to the ink supply hole forming surface 600 toward the surface joined to the separation wall support portion 92b. It is good also as a form which becomes large.
　第２スペーサー部９１ｃは、インク供給孔形成面６００上に接合され、インク供給孔６０１とインク室３とを連通する連通孔６０２を有し、第１スペーサー部９１ｂと第３スペーサー部９１ａに囲まれた位置に配置されている。第２スペーサー部９１ｃは、第１スペーサー部９１ｂよりもインクの射出方向（Ｚ方向）の厚さが薄く、かつ第１スペーサー部９１ｂの隣の連通孔６０２が、少なくとも二つのインク供給孔６０１，６０１と連通している。このような第２スペーサー部９１ｃを設けた構成とすることで、スペーサー部９１の強度を向上させ、反りを防止することができる。また、第１スペーサー部９１ｂの隣の連通孔６０２を、少なくとも二つのインク供給孔６０１，６０１と連通させることで、第１スペーサー部９１ｂの隣のインク供給孔６０１付近により広いスペースを確保できるため、第１スペーサー部９１ｂや分離壁支持部９２ｂ付近の流路抵抗の上昇を抑え、インク供給孔６０１にかかる圧力をより均等に分散することができる。 The second spacer portion 91c is joined to the ink supply hole forming surface 600, has a communication hole 602 that communicates the ink supply hole 601 and the ink chamber 3, and is surrounded by the first spacer portion 91b and the third spacer portion 91a. It is arranged at the position. The second spacer portion 91c is thinner in the ink ejection direction (Z direction) than the first spacer portion 91b, and the communication hole 602 adjacent to the first spacer portion 91b has at least two ink supply holes 601 and 601. 601 communicates. By adopting a configuration in which such a second spacer portion 91c is provided, the strength of the spacer portion 91 can be improved and warpage can be prevented. Further, since the communication hole 602 adjacent to the first spacer portion 91b communicates with at least two ink supply holes 601 and 601, a wider space can be secured in the vicinity of the ink supply hole 601 adjacent to the first spacer portion 91b. In addition, it is possible to suppress an increase in the channel resistance in the vicinity of the first spacer portion 91b and the separation wall support portion 92b, and to distribute the pressure applied to the ink supply holes 601 more evenly.
　第３スペーサー部９１ａは、インク供給孔形成面６００上に接合され、上側が外周壁支持部９２ａに接合している。
　また、スペーサー部９１は、少なくとも第１スペーサー部９１ｂ及び第３スペーサー部９１ａが一体成形されていることが好ましく、第１スペーサー部９１ｂ、第２スペーサー部９１ｃ及び第３スペーサー部９１ａが一体成形されていることがより好ましい。また、第１スペーサー部９１ｂ及び第３スペーサー部９１ａのＺ方向の高さが同一であることが好ましい。このような構成とすることで、インク供給孔形成面６００上に高精度に接合することができ、さらには、スペーサー部９１上に支持部９２をより高精度に接合することができる。 The third spacer portion 91a is joined on the ink supply hole forming surface 600, and the upper side is joined to the outer peripheral wall support portion 92a.
In addition, it is preferable that at least the first spacer portion 91b and the third spacer portion 91a are integrally formed, and the first spacer portion 91b, the second spacer portion 91c, and the third spacer portion 91a are integrally formed. More preferably. Moreover, it is preferable that the height of the 1st spacer part 91b and the 3rd spacer part 91a is the same in the Z direction. With such a configuration, the ink supply hole forming surface 600 can be bonded with high accuracy, and further, the support portion 92 can be bonded with high accuracy on the spacer portion 91.
　外周壁支持部９２ａは、第３スペーサー部９１ａ上に接合され、インク室３の外周壁３ａを支持している。
　分離壁支持部９２ｂは、第１スペーサー部９１ｂ上に接合され、インク室３の分離壁３ｂを支持している。また、分離壁支持部９２ｂは、分離壁３ｂに接合する面が、第１スペーサー部９１ｂに接合する面よりも面積が大きくなるように形成されている。これにより、分離壁３ｂとの接合面をより広くとることができるため、分離壁３ｂの位置合わせをより正確に行うことができ、インク室３をより高精度に分離できる。さらに、分離壁支持部９２ｂと分離壁３ｂの接着強度を向上させることができる。 The outer peripheral wall support portion 92 a is joined on the third spacer portion 91 a and supports the outer peripheral wall 3 a of the ink chamber 3.
The separation wall support portion 92 b is joined on the first spacer portion 91 b and supports the separation wall 3 b of the ink chamber 3. Further, the separation wall support portion 92b is formed so that the surface joined to the separation wall 3b has a larger area than the surface joined to the first spacer portion 91b. Thereby, since the joint surface with the separation wall 3b can be made wider, the alignment of the separation wall 3b can be performed more accurately, and the ink chamber 3 can be separated with higher accuracy. Furthermore, the adhesive strength between the separation wall support portion 92b and the separation wall 3b can be improved.
　また、分離壁支持部９２ｂの形状としては、製造効率の観点から、第１スペーサー部９１ｂと接合する面から、分離壁３ｂに接合する面に向かうにつれ、階段状に広がるように形成されていることが好ましい。
　また、分離壁支持部９２ｂの形状としては、第１スペーサー部９１ｂと接合する面から、分離壁３ｂと接合する面に向かうにつれ、分離壁支持部９２ｂのＸＹ平面の断面積が徐々に大きくなる形態としても良い。 Further, the shape of the separation wall support portion 92b is formed so as to spread in a stepped manner from the surface joining the first spacer portion 91b toward the surface joining the separation wall 3b from the viewpoint of manufacturing efficiency. It is preferable.
Further, as the shape of the separation wall support portion 92b, the cross sectional area of the XY plane of the separation wall support portion 92b gradually increases from the surface joining the first spacer portion 91b toward the surface joining the separation wall 3b. It is good also as a form.
　また、スペーサー部９１は、位置合わせを高精度に行う観点から、支持部９２よりもＺ方向の厚さが薄いことが好ましく、具体的には、第１スペーサー部９１ｂ及び第３スペーサー部９１ａのＺ方向の厚さが０．０５～０．５ｍｍであることが好ましく、０．１～０．３ｍｍであることがさらに好ましい。０．５ｍｍ以下とすることによって、加工精度の高いスペーサー部９１とすることが可能であり、位置調整も高精度に行うことができる。また、０．０５ｍｍ以上とすることによって、スペーサーとして十分な強度を得ることができる。 In addition, the spacer portion 91 is preferably thinner in the Z direction than the support portion 92 from the viewpoint of performing alignment with high accuracy. Specifically, the spacer portions 91b and the third spacer portion 91a The thickness in the Z direction is preferably 0.05 to 0.5 mm, and more preferably 0.1 to 0.3 mm. By setting the thickness to 0.5 mm or less, the spacer portion 91 with high processing accuracy can be obtained, and the position can be adjusted with high accuracy. Moreover, sufficient intensity | strength as a spacer can be obtained by setting it as 0.05 mm or more.
　また、スペーサー部９１のヘッドチップ２への接合は、高精度に位置合わせを行う観点から、スペーサー部９１とヘッドチップ２のそれぞれにアライメントマークを設けて、それぞれを位置決めして接合することが望ましい。
　本発明のスペーサー部９１を有した位置合わせの方法を用いれば、±５μｍ程度の誤差レベルでの位置合わせが可能であり、１０μｍ程度の狭ピッチのインク供給孔６０１を有するインク供給孔形成面６００に対しても、高精度に位置合わせ可能である。 In addition, the bonding of the spacer portion 91 to the head chip 2 is desirably performed by providing alignment marks on each of the spacer portion 91 and the head chip 2, and positioning and bonding each from the viewpoint of performing alignment with high accuracy. .
If the alignment method having the spacer portion 91 of the present invention is used, alignment with an error level of about ± 5 μm is possible, and the ink supply hole forming surface 600 having the ink supply holes 601 with a narrow pitch of about 10 μm. However, it is possible to align with high accuracy.
　また、スペーサー部９１を形成する材料としては、特に限られないが、ヘッドチップ２を形成する材料と熱膨張係数の近い材料とすることが好ましい。具体的には、ヘッドチップ２の上面の基板をシリコンで形成した場合には、スペーサー部９１をシリコン、４２アロイ、又はガラス等によって形成することが好ましい。また、これらのうち、インク耐性、強度、及び耐熱性の観点から、４２アロイを使用することが特に好ましい。また、ヘッドチップ２上面の基板をＳＵＳで形成した場合には、スペーサー部９１をＳＵＳで形成することが好ましい。 The material for forming the spacer portion 91 is not particularly limited, but a material having a thermal expansion coefficient close to that of the material for forming the head chip 2 is preferable. Specifically, when the substrate on the upper surface of the head chip 2 is formed of silicon, the spacer portion 91 is preferably formed of silicon, 42 alloy, glass, or the like. Of these, it is particularly preferable to use 42 alloy from the viewpoints of ink resistance, strength, and heat resistance. Further, when the substrate on the upper surface of the head chip 2 is formed of SUS, the spacer portion 91 is preferably formed of SUS.
　また、図７に示すように、インク供給孔形成面６００には、ノズル配置に対応して、Ｘ方向に対して均等な列間隔でインク供給孔６０１が形成されている。そして、第１スペーサー部９１ｂの下面は、均等な列間隔のインク供給孔６０１の列間をＹ方向に通過するように形成されている。このような構成とすることにより、１色用のヘッドチップ２に分離壁保持部９０ｂ及び分離壁３ｂを設けることによって、インク室３を分離することができる。 Further, as shown in FIG. 7, ink supply holes 601 are formed in the ink supply hole forming surface 600 at equal row intervals in the X direction corresponding to the nozzle arrangement. The lower surface of the first spacer portion 91b is formed so as to pass between the columns of the ink supply holes 601 with equal column spacing in the Y direction. With such a configuration, the ink chamber 3 can be separated by providing the separation wall holding portion 90b and the separation wall 3b in the head chip 2 for one color.
　また、保持部９０は、ＸＹ平面上において、ヘッドチップ２よりも大きな面積を有しており、ヘッドチップ２周辺の熱を好適に放熱できるようになっている。 Further, the holding unit 90 has a larger area than the head chip 2 on the XY plane, and can suitably dissipate heat around the head chip 2.
［本発明における技術的効果］
　以上、説明した通り、本発明のインクジェットヘッド１は、インクジェット記録装置１００に搭載されて移動するインクジェットヘッド１であって、インクを射出する複数のノズル１１と、当該複数のノズル１１にそれぞれ連通する複数の圧力室３１１と、当該複数の圧力室３１１に供給するインクを貯留するインク室３と、を備え、当該インクジェットヘッド１の移動の方向と交差するインク室３の壁（例えば、外周壁３ａ）に、圧力に応じて弾性変形してインク室３の容積を変更可能なダンパー３ｃを有する。これにより、インク室３内のインクの揺れを抑えることができ、インクジェットヘッド１内の圧力変動を抑え、インクの射出安定性を向上させることができる。また、流路が狭くて流路抵抗が大きくなりやすいインクジェットヘッド１でも、効果的に圧力変動を抑えることができるため、インクジェットヘッド１を小型化することができる。 [Technical effects in the present invention]
As described above, the inkjet head 1 of the present invention is an inkjet head 1 that is mounted on the inkjet recording apparatus 100 and moves, and communicates with the plurality of nozzles 11 that eject ink and the plurality of nozzles 11, respectively. A plurality of pressure chambers 311 and an ink chamber 3 for storing ink to be supplied to the plurality of pressure chambers 311, and a wall (for example, outer peripheral wall 3 a) of the ink chamber 3 that intersects the direction of movement of the inkjet head 1. ) Has a damper 3c capable of changing the volume of the ink chamber 3 by elastic deformation in accordance with the pressure. Thereby, the shaking of the ink in the ink chamber 3 can be suppressed, the pressure fluctuation in the inkjet head 1 can be suppressed, and the ejection stability of the ink can be improved. Further, even in the ink jet head 1 in which the flow path is narrow and the flow path resistance is likely to increase, the pressure fluctuation can be effectively suppressed, so that the ink jet head 1 can be reduced in size.
　また、本実施形態のインクジェットヘッド１は、複数の圧力室３１１の内部に圧力変化を生じさせることにより、ノズル１１からインクを射出させる圧電素子４２を備えることが好ましい。 In addition, the inkjet head 1 of the present embodiment preferably includes a piezoelectric element 42 that ejects ink from the nozzle 11 by causing a pressure change in the plurality of pressure chambers 311.
　また、本実施形態のインクジェットヘッド１は、ダンパー３ｃを、インクジェットヘッド１の移動方向に垂直なインク室３の壁（例えば、外周壁３ａ）に設けることによって、移動方向にかかる圧力をダンパー３ｃが吸収しやすくなるため、インクジェットヘッド１内の圧力変動を効果的に抑えることができる。 Further, in the inkjet head 1 according to the present embodiment, the damper 3c is configured to provide the damper 3c on the wall (for example, the outer peripheral wall 3a) of the ink chamber 3 perpendicular to the moving direction of the inkjet head 1, so that the damper 3c Since it becomes easy to absorb, the pressure fluctuation in the inkjet head 1 can be suppressed effectively.
　また、本実施形態のインクジェットヘッド１は、ダンパー３ｃを設けるインク室３の壁が、インク室３の外周壁３ｂであることが好ましい。 In the inkjet head 1 of the present embodiment, the wall of the ink chamber 3 where the damper 3 c is provided is preferably the outer peripheral wall 3 b of the ink chamber 3.
　また、本実施形態のインクジェットヘッド１は、ダンパー３ｃを、インクジェットヘッド１の主走査方向に垂直なインク室３の外周壁３ａに設けることによって、主走査方向にかかる圧力をダンパー３ｃが吸収しやすくなるため、インクジェットヘッド１内の圧力変動を効果的に抑えることができる。 In the inkjet head 1 according to the present embodiment, the damper 3c can easily absorb the pressure applied in the main scanning direction by providing the damper 3c on the outer peripheral wall 3a of the ink chamber 3 perpendicular to the main scanning direction of the inkjet head 1. Therefore, pressure fluctuations in the inkjet head 1 can be effectively suppressed.
　また、本実施形態のインクジェットヘッド１は、インク室３を、分離壁３ｂによって複数に分離することによって、インクジェット記録装置に必要となるインクジェットヘッド１の数を減らせるため、インクジェット記録装置を小型化することができる。 In addition, since the ink jet head 1 of the present embodiment can reduce the number of ink jet heads 1 required for the ink jet recording apparatus by separating the ink chamber 3 into a plurality of separation walls 3b, the ink jet recording apparatus can be downsized. can do.
　また、本実施形態のインクジェットヘッド１は、複数のノズル１１と、複数の圧力室３１１と、インク室３とを備えたヘッドチップ２を備え、当該ヘッドチップ２の複数のノズル１１が形成された面と反対側の面に、複数の圧力室３１１にインク室３からインクを供給するためのインク供給孔６０１が、複数の圧力室３１１の各々に対して１つずつ設けられている。これにより、インク室３から圧力室３１１に直接インクを供給できる構成となっており、ヘッドチップ２の構成を単純化してインクジェットヘッド１を小型化することができる。また、ヘッドチップ２上のインク室３に、大容量のインクを保有可能な構成にすることができるため、このようなインク室３の外周壁３ａにダンパー３ｃを設けることで、インクジェットヘッド１内の圧力変動を効果的に抑えることができる。 In addition, the inkjet head 1 of this embodiment includes a head chip 2 including a plurality of nozzles 11, a plurality of pressure chambers 311, and an ink chamber 3, and the plurality of nozzles 11 of the head chip 2 are formed. One ink supply hole 601 for supplying ink from the ink chamber 3 to the plurality of pressure chambers 311 is provided for each of the plurality of pressure chambers 311 on the surface opposite to the surface. Accordingly, ink can be directly supplied from the ink chamber 3 to the pressure chamber 311, and the configuration of the head chip 2 can be simplified and the inkjet head 1 can be downsized. In addition, since the ink chamber 3 on the head chip 2 can be configured to hold a large volume of ink, the damper 3c is provided on the outer peripheral wall 3a of the ink chamber 3 so that the inside of the ink jet head 1 can be provided. Can be effectively suppressed.
　また、本実施形態のインクジェットヘッド１では、ダンパー３ｃを、金属又はセラミックによって形成することによって、インク室３の側面の強度を確保しつつ、ダンパーの効果を得ることができる。 Further, in the inkjet head 1 of the present embodiment, the damper effect can be obtained while the strength of the side surface of the ink chamber 3 is ensured by forming the damper 3c from metal or ceramic.
　また、本実施形態のインクジェットヘッド１では、ダンパー３ｃを、有機フィルムによって形成することによって、弾性変形による圧力変動の抑制というダンパーの効果を、より効果的に得ることができる。 Further, in the inkjet head 1 of the present embodiment, the damper effect of suppressing pressure fluctuation due to elastic deformation can be obtained more effectively by forming the damper 3c with an organic film.
　また、本実施形態のインクジェットヘッド１を備えたインクジェット記録装置１００は、インクジェットヘッド１の移動によるインクジェットヘッド１内の圧力変動を効果的に抑えることができる。 In addition, the ink jet recording apparatus 100 including the ink jet head 1 of the present embodiment can effectively suppress pressure fluctuations in the ink jet head 1 due to the movement of the ink jet head 1.
　また、本実施形態のインクジェット記録装置１００は、シリアルヘッド方式であることが好ましい。 In addition, the inkjet recording apparatus 100 of the present embodiment is preferably a serial head system.
［その他］
　本発明の今回開示された実施の形態は、全ての点で例示であって制限的なものではないと考えられるべきである。本発明の範囲は、上記した詳細な説明に限定されるものではなく特許請求の範囲によって示され、特許請求の範囲と均等の意味及び範囲内での全ての変更が含まれることが意図される。 [Others]
It should be thought that embodiment disclosed this time of this invention is an illustration and restrictive at no points. The scope of the present invention is not limited to the above detailed description, but is defined by the claims, and is intended to include all modifications within the meaning and scope equivalent to the claims. .
　例えば、本発明に係るダンパー３ｃが、インク室３の壁に設けられた例として、ダンパー３ｃが外周壁３ａに設けられた例を示したが、これに限られず、インク室３の内部に設けられた壁である分離壁３ｂに設けられていてもよい。 For example, as an example in which the damper 3 c according to the present invention is provided on the wall of the ink chamber 3, the example in which the damper 3 c is provided on the outer peripheral wall 3 a is shown, but the present invention is not limited thereto, and is provided inside the ink chamber 3. It may be provided on the separation wall 3b, which is a provided wall.
　また、インク室３が分離壁３ｂによって２つに分離した実施形態について説明したが、分離壁３ｂによって分離されていない通常の１色用のインクジェットヘッド１であってもよい。
　また、インク室３を分離する場合でも、分離する方向や数は適宜変更可能であり、例えば、インク室をＸ方向に４つに分離するように構成してもよい。
　また、分離されたインク室３内の各部屋には、例えば、シアン（Ｃ）、マゼンタ（Ｍ）、イエロー（Ｙ）及び黒（Ｋ）のインクが、それぞれ１色ずつ貯留されているとしたが、同色のインクが貯留されていてもよい。 Further, although the embodiment in which the ink chamber 3 is separated into two by the separation wall 3b has been described, the normal one-color inkjet head 1 that is not separated by the separation wall 3b may be used.
Even when the ink chambers 3 are separated, the direction and number of separation can be appropriately changed. For example, the ink chambers may be separated into four in the X direction.
Further, for example, cyan (C), magenta (M), yellow (Y), and black (K) inks are stored in each of the separated ink chambers 3 for each color. However, the same color ink may be stored.
　また、本実施形態では、ダンパー３ｃを、インク室３の外周壁３ａにおける主走査方向に垂直な面に設けた例を説明したが、インクジェットヘッド１の移動方向に交差する方向であればよく、例えば、インクジェットヘッド１のインク室３の形状によっては、主走査方向に対してわずかに傾斜する方向等に設けることとしてもよい。 In the present embodiment, the example in which the damper 3c is provided on the surface of the outer peripheral wall 3a of the ink chamber 3 perpendicular to the main scanning direction has been described. For example, depending on the shape of the ink chamber 3 of the inkjet head 1, it may be provided in a direction slightly inclined with respect to the main scanning direction.
　また、スペーサー部９１は、インク供給孔６０１を避けるように構成されており、かつ外周壁支持部９２ａに接合する第３スペーサー部９１ａと、分離壁支持部９２ｂに接合する第１スペーサー部９１ｂを有する構成となっていれば、適宜変更可能である。 The spacer portion 91 is configured to avoid the ink supply hole 601 and includes a third spacer portion 91a joined to the outer peripheral wall support portion 92a and a first spacer portion 91b joined to the separation wall support portion 92b. If it has the structure which has, it can change suitably.
　また、圧力発生手段として圧電素子４２を使用することとしたが、インクを射出できる機構を備えていれば特に限られることはなく、例えば、サーマル（電気熱変換素子）を使用することとしても良い。 Further, although the piezoelectric element 42 is used as the pressure generating means, there is no particular limitation as long as a mechanism capable of ejecting ink is provided. For example, thermal (electrothermal conversion element) may be used. .
　本発明は、インクジェットヘッド及びインクジェット記録装置に利用することができる。 The present invention can be used for an inkjet head and an inkjet recording apparatus.
１　　　インクジェットヘッド
２　　　ヘッドチップ
３　　　インク室
３ａ　　外周壁
３ｂ　　分離壁
３ｃ　　ダンパー
１１　　ノズル
４２　　圧電素子
１００　インクジェット記録装置
３１１　圧力室
６０１　インク供給孔 DESCRIPTION OF SYMBOLS 1 Inkjet head 2 Head chip 3 Ink chamber 3a Outer peripheral wall 3b Separation wall 3c Damper 11 Nozzle 42 Piezoelectric element 100 Inkjet recording device 311 Pressure chamber 601 Ink supply hole

Claims (11)

  1. 　インクジェット記録装置に搭載されて移動するインクジェットヘッドであって、
    　インクを射出する複数のノズルと、
    　前記複数のノズルにそれぞれ連通する複数の圧力室と、
    　前記複数の圧力室に供給するインクを貯留するインク室と、
    　を備え、
    　前記インクジェットヘッドの前記移動の方向と交差する前記インク室の壁に、圧力に応じて弾性変形して前記インク室の容積を変更可能なダンパーを有することを特徴とするインクジェットヘッド。     An inkjet head mounted on an inkjet recording apparatus and moving.
    A plurality of nozzles for ejecting ink;
    A plurality of pressure chambers respectively communicating with the plurality of nozzles;
    An ink chamber for storing ink to be supplied to the plurality of pressure chambers;
    With
    An ink jet head having a damper capable of changing a volume of the ink chamber by elastically deforming according to pressure on a wall of the ink chamber intersecting with the moving direction of the ink jet head.
  2. 　前記複数の圧力室の内部に圧力変化を生じさせることにより、前記ノズルからインクを射出させる圧力発生手段を備えることを特徴とする請求項１に記載のインクジェットヘッド。 2. The ink jet head according to claim 1, further comprising pressure generating means for injecting ink from the nozzle by causing a pressure change in the plurality of pressure chambers.
  3. 　前記ダンパーは、前記インクジェットヘッドの移動方向に垂直な前記インク室の前記壁に設けられていることを特徴とする請求項１又は請求項２に記載のインクジェットヘッド。 3. The ink jet head according to claim 1, wherein the damper is provided on the wall of the ink chamber perpendicular to the moving direction of the ink jet head.
  4. 　前記壁が、前記インク室の外周壁であることを特徴とする請求項１から請求項３までのいずれか一項に記載のインクジェットヘッド。 The inkjet head according to any one of claims 1 to 3, wherein the wall is an outer peripheral wall of the ink chamber.
  5. 　前記インクジェットヘッドの移動方向が、前記インクジェットヘッドの主走査方向であることを特徴とする請求項１から請求項４までのいずれか一項に記載のインクジェットヘッド。 The inkjet head according to any one of claims 1 to 4, wherein a moving direction of the inkjet head is a main scanning direction of the inkjet head.
  6. 　前記インク室は、複数に分離されていることを特徴とする請求項１から請求項５までのいずれか一項に記載のインクジェットヘッド。 The ink jet head according to any one of claims 1 to 5, wherein the ink chamber is separated into a plurality of ink chambers.
  7. 　前記複数のノズルと、前記複数の圧力室と、前記インク室とを備えたヘッドチップを備え、
    　前記ヘッドチップの前記複数のノズルが形成された面と反対側の面に、前記複数の圧力室に前記インク室からインクを供給するためのインク供給孔が、前記複数の圧力室の各々に対して１つずつ設けられていることを特徴とする請求項１から請求項６までのいずれか一項に記載のインクジェットヘッド。     A head chip including the plurality of nozzles, the plurality of pressure chambers, and the ink chamber;
    An ink supply hole for supplying ink from the ink chamber to the plurality of pressure chambers is provided on the surface of the head chip opposite to the surface on which the plurality of nozzles are formed, with respect to each of the plurality of pressure chambers. The inkjet head according to claim 1, wherein the inkjet head is provided one by one.
  8. 　前記ダンパーは、金属又はセラミックによって形成されていることを特徴とする請求項１から請求項７までのいずれか一項に記載のインクジェットヘッド。 The inkjet head according to any one of claims 1 to 7, wherein the damper is made of metal or ceramic.
  9. 　前記ダンパーは、有機フィルムによって形成されていることを特徴とする請求項１から請求項７までのいずれか一項に記載のインクジェットヘッド。 The inkjet head according to any one of claims 1 to 7, wherein the damper is formed of an organic film.
  10. 　請求項１から９までのいずれか一項に記載のインクジェットヘッドを備えることを特徴とするインクジェット記録装置。 An ink jet recording apparatus comprising the ink jet head according to any one of claims 1 to 9.
  11. 　前記インクジェット記録装置が、シリアルヘッド方式であることを特徴とする請求項１０に記載のインクジェット記録装置。 The ink jet recording apparatus according to claim 10, wherein the ink jet recording apparatus is a serial head type.
PCT/JP2017/008880 2016-03-30 2017-03-07 Inkjet head and inkjet recording apparatus WO2017169548A1 (en)

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