WO2017145768A1 - Dispositif de détection de particules - Google Patents

Dispositif de détection de particules Download PDF

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Publication number
WO2017145768A1
WO2017145768A1 PCT/JP2017/004662 JP2017004662W WO2017145768A1 WO 2017145768 A1 WO2017145768 A1 WO 2017145768A1 JP 2017004662 W JP2017004662 W JP 2017004662W WO 2017145768 A1 WO2017145768 A1 WO 2017145768A1
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WO
WIPO (PCT)
Prior art keywords
flow path
housing
particle
holder
flow cell
Prior art date
Application number
PCT/JP2017/004662
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English (en)
Japanese (ja)
Inventor
雅 古谷
太輔 小原
新吾 増本
Original Assignee
アズビル株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by アズビル株式会社 filed Critical アズビル株式会社
Publication of WO2017145768A1 publication Critical patent/WO2017145768A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/10—Investigating individual particles
    • G01N15/14—Optical investigation techniques, e.g. flow cytometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03—Cuvette constructions
    • G01N21/05—Flow-through cuvettes

Definitions

  • the present invention relates to a detection technique and relates to a particle detection apparatus.
  • a flow cell for flowing a fluid as a sample is used.
  • the flow cell is transparent, and when light is applied to the fluid flowing inside the flow cell, particles contained in the fluid emit fluorescence or scattered light is generated. Fluorescence and scattered light are collected and detected by a lens disposed next to the flow cell (see, for example, Patent Document 1).
  • the number and types of particles contained in the fluid can be specified from the number of detections of fluorescence and scattered light, the detection intensity, the detection wavelength, and the like. For example, it is possible to determine whether the particle is a biological particle, whether the particle is a resin, whether the particle is a bubble, or the like.
  • an object of the present invention is to provide a particle detection device that can be easily adjusted.
  • a housing provided with an opening and storing at least a part of the optical system, (b) a flow cell disposed in the optical system inside the housing, and (c) A flow path that passes through the housing through the opening and is connected to the flow cell; and (d) a fixing device that fixes the flow path to the housing, the fixing device being capable of adjusting the fixing position of the flow path with respect to the housing.
  • a particle detection device is provided.
  • the fixing device may include a flow path holder that holds the flow path and a shim set that is sandwiched between the flow path holder and the casing.
  • the fixing device may include a flow path holder that holds the flow path, and a set of shims that are sandwiched between a flange provided in the flow path and the flow path holder. .
  • the set of shims may include shims having different thicknesses, or may have shims having the same thickness.
  • the flow path holder may be pressed against the housing from a plurality of angles via at least one shim included in the shim set.
  • the flow path holder may include a surface that is pressed perpendicularly to the outer surface of the housing from a plurality of angles via at least one shim included in the shim set.
  • the flow path holder may be bent, and a plurality of regions of the flow path holder may be pressed against the housing via at least one shim included in the shim set.
  • the housing is provided with a female screw
  • the fixing device further includes a male screw that presses the flow path holder against the housing, and the shaft of the male screw is inserted into the flow path holder.
  • a hole may be provided.
  • the through hole provided in the flow path holder may have two opposing sides that are longer than the diameter of the male screw shaft.
  • the particle detection apparatus may further include a flow cell holder that holds the flow cell and connects the flow cell and the flow path.
  • the housing may be separable.
  • the flow cell, the flow path, and the flow path holder may be connected and can be pulled out from the opening of the housing. Further, the flow cell, the flow path, and the flow cell holder may be connected and can be pulled out from the opening of the housing.
  • FIG. 1 is a partial cross-sectional view of a particle detection device according to a first embodiment of the present invention. It is a partial assembly perspective view of the particle
  • the particle detection device As shown in FIG. 1, the particle detection device according to the first exemplary embodiment of the present invention is provided with an opening 101, a housing 2 that stores at least a part of the optical system, and an interior of the housing 2.
  • a flow cell 1 disposed in the optical system, a flow path 3A, 3B that passes through the housing 2 through the opening 101 and is connected to the flow cell 1, and a fixing device 104 that fixes the flow paths 3A, 3B to the housing 2.
  • the fixing device 104 which can adjust the fixing position of flow path 3A, 3B with respect to the housing
  • the casing 2 stores a concave mirror such as a parabolic mirror as at least a part of the optical system.
  • the housing 2 and the parabolic mirror may be integrated.
  • the housing 2 may store other optical systems arranged in the vicinity of the flow cell 1.
  • a block 5 shown in FIG. 1 is fixed to the side surface of the housing 2 with a male screw such as a bolt, and the block 5 forms a convex portion on the side surface of the housing 2.
  • the flow cell 1 is made of a transparent material such as quartz glass.
  • the flow cell 1 is provided with a through hole through which a fluid such as a liquid flows.
  • the through hole passes through the center of the flow cell 1, for example.
  • FIG. 1 which shows the assembly process of a particle
  • the flow cell 1 may have a spherical shape or a rectangular parallelepiped shape.
  • the center of the flow cell 1 coincides with the focal point of the parabolic mirror inside the housing 2 in consideration of the refractive index of the flow cell 1.
  • a metal thin film that reflects light may be provided on the outer surface of the flow cell 1 opposite to the side facing the parabolic mirror.
  • the flow cell 1 is irradiated with inspection light focused at the through-hole of the flow cell 1.
  • the center of the flow cell 1 coincides with the focus of the inspection light in consideration of the refractive index of the flow cell 1.
  • scattered light is generated in the particles irradiated with the inspection light.
  • the fluorescent particles pass through the flow cell 1, the fluorescent particles irradiated with the inspection light emit fluorescence including autofluorescence. Scattered light and fluorescence are collected by a parabolic mirror inside the housing 2 and detected by the photodetector 23.
  • the photodetector 23 is arranged at the second focal point of the parabolic mirror.
  • the upstream flow path 3A and the downstream flow path 3B shown in FIG. 1 are openings 101 provided on the upper surface and the lower surface of the casing 2 so as to penetrate the mirror surface of the parabolic mirror inside the casing 2, respectively. And is connected to the flow cell 1 through gaskets 10A and 10B.
  • the flow paths 3A and 3B are, for example, metal nozzles.
  • the fluid to be inspected for containing particles is supplied to the flow cell 1 via the upstream flow path 3A, and the fluid that has passed through the flow cell 1 is discharged via the downstream flow path 3B.
  • a flange 103A provided with a through hole for a male screw such as a bolt is provided in the flow path 3A.
  • the flow path 3B is provided with a flange 103B provided with a through hole for a male screw such as a bolt.
  • the outer diameters of the flow paths 3 ⁇ / b> A and 3 ⁇ / b> B are each smaller than the diameter of the opening 101 provided in the housing 2. Therefore, the flow paths 3A and 3B are predetermined in a plane (a plane including the X direction and the Z direction) perpendicular to the extending direction (Y direction) of the flow paths 3A and 3B before being fixed to the housing 2. It is possible to move within the range.
  • the fixing device 104 includes a flow path holder 4 that holds the flow paths 3 ⁇ / b> A and 3 ⁇ / b> B, and a set of shims 6, 7, and 8 sandwiched between the flow path holder 4 and the housing 2.
  • the flow path holder 4 is bent so as to be fitted with the housing 2.
  • the flow path holder 4 includes a top surface of the housing 2, a side surface of the housing 2, a side surface of the block 5 fixed to the side surface of the housing 2, and a portion parallel to the bottom surface of the housing 2. The surface which becomes. Therefore, the flow path holder 4 is fitted to the upper surface of the housing 2, the side surface of the housing 2, the side surface of the block 5 fixed to the side surface of the housing 2, and the lower surface of the housing 2.
  • the upstream flow path 3A is fixed to a portion of the flow path holder 4 parallel to the upper surface of the housing 2 by a male screw 13A such as a bolt via the flange 103A of the flow path 3A.
  • the downstream flow path 3B is fixed to a portion of the flow path holder 4 parallel to the lower surface of the housing 2 by a male screw 13B such as a bolt via the flange 103B of the flow path 3B.
  • the shim 7 is sandwiched between the flow path holder 4 and the upper surface of the housing 2.
  • grain detection apparatus which concerns on 1st Embodiment is provided with the set of the several shim 7 from which an upper surface is congruent and different in thickness.
  • grain detection apparatus which concerns on 1st Embodiment may be provided with the set of several shim 7 with the same upper surface and the same thickness.
  • the position of the flow cell 1 in the extending direction (Y direction) of the through hole of the flow cell 1 may be adjusted by the number of shims 7 sandwiched between the flow path holder 4 and the upper surface of the housing 2.
  • the shim 6 is sandwiched between the flow path holder 4 and the side surface of the housing 2.
  • the side surface of the housing 2 is perpendicular to the upper surface and the lower surface of the housing 2.
  • grain detection apparatus which concerns on 1st Embodiment is provided with the set of several shim 6 from which an upper surface is congruent and different in thickness.
  • the flow cell 1 has a through-hole extending direction (Y direction). It is possible to adjust the position of the flow cell 1 connected to the flow path 3A held by the flow path holder 4 in the long vertical direction (X direction) of the parabolic mirror.
  • grain detection apparatus which concerns on 1st Embodiment may be provided with the set of several shim 6 with the same upper surface and the same thickness.
  • the shim 8 is sandwiched between the flow path holder 4 and the side surface of the block 5 fixed to the side surface of the housing 2.
  • the side surface of the block 5 is perpendicular to the side surface of the housing 2.
  • grain detection apparatus which concerns on 1st Embodiment is provided with the set of the several shim 8 from which an upper surface is congruent and different in thickness.
  • the flow cell 1 extends in the through-hole direction (Y direction). It is possible to adjust the position of the flow cell 1 connected to the flow path 3A held by the flow path holder 4 in the vertical direction and in the short axis direction (Z direction) of the parabolic mirror.
  • grain detection apparatus which concerns on 1st Embodiment may be provided with the set of the several shim 8 with the same upper surface and the same thickness.
  • the position of the flow cell 1 in the direction (Z direction) perpendicular to the extending direction (Y direction) of the through hole of the flow cell 1 is determined by the number of shims 8 sandwiched between the flow path holder 4 and the side surface of the block 5. You may adjust.
  • the housing 2 is provided with a female screw. After the position of the flow cell 1 is appropriately adjusted with respect to the optical system including the parabolic mirror, the flow path holder 4 is fixed to the housing 2 with male screws 14A, 14B, and 14C such as bolts. Thereby, the flow path holder 4 is pressed perpendicularly to the outer surface of the housing 2 from a plurality of angles via the shims 6, 7, 8.
  • the flow path holder 4 is provided with through holes into which shafts of male screws 14A, 14B, 14C such as bolts are inserted.
  • the through hole provided in the flow path holder 4 is, for example, larger than the cross-sectional area of the shaft of the male screws 14A, 14B, and 14C so that the position of the flow path holder 4 with respect to the housing 2 can be adjusted. It is smaller than the cross-sectional area of the heads of 14B and 14C.
  • the through hole provided in the flow path holder 4 may include two opposing sides that are longer than the diameters of the shafts of the male screws 14A, 14B, and 14C.
  • the housing 2 including a part of the optical system such as a parabolic mirror can be divided from the housing 22 including the other part of the optical system such as the photodetector 23. May be.
  • casing 22 can be joined by each opening part. Since the housing 2 and the housing 22 can be divided, maintenance such as cleaning of the inside of the housing 2 and the housing 22 and replacement of the flow cell 1 can be performed.
  • the position of the flow cell 1 may deviate from the optical system after the particle detector is assembled or after maintenance.
  • the position of the flow cell 1 is the focus of the inspection light and deviates from the position of the focus of the parabolic mirror, the intensity of the inspection light applied to the particles is reduced, and the scattered light and fluorescence generated in the particles are reduced. The intensity also decreases, and the amount of scattered light and fluorescence collected by a condensing optical system including a parabolic mirror and the like also decreases.
  • the position of the flow cell 1 with respect to the optical system can be adjusted by adjusting the thickness of each of the shims 6, 7, and 8.
  • the positional displacement between the optical systems caused by the dimensional tolerance of the joint portion between the housing 1 and the housing 22 or the positional displacement of the flow cell 1 with respect to the housing 2 is large.
  • the shims 6, 7, and 8 are prepared in advance, with thicknesses adjusted according to individual differences in the dimensions of each part consisting of the housing 2, the fixing device 104, the housing 22, and the like. Also good. By using the shim set prepared in this way, it is possible to perform the position adjustment work when exchanging the flow cell 1 and the housing 2 in a short time.
  • the method of adjusting the position of the flow cell 1 in a X direction, a Y direction, and a Z direction by the shims 6, 7, and 8 was shown, it adjusts with a shim.
  • the direction of the position of the flow cell 1 to be performed may be less than or greater than three directions.
  • the position of the flow cell 1 in the oblique direction may be adjusted in addition to the orthogonal three-axis direction.
  • FIG. 1 shows an example in which shims 6, 7, and 8 are sandwiched between the flow path holder 4 and the housing 2, but each of the flanges 103A and 103B of the flow paths 3A and 3B and the flow path holder A shim may be sandwiched between the four.
  • the particle detection device As shown in FIGS. 3, 4, and 5, the particle detection device according to the second embodiment is provided with an opening 101, a housing 2 that stores at least a part of the optical system, and a housing
  • the flow cell 1 disposed in the optical system inside the body 2, the flow path 3 ⁇ / b> A, 3 ⁇ / b> B passing through the housing 2 through the opening 101 and connected to the flow cell 1, and the flow cell 1 are held.
  • the substantially rectangular parallelepiped flow cell holder 33 is provided with a recess for fitting with the flow cell 1.
  • the flow cell 1 in which the gaskets 10 ⁇ / b> A and 10 ⁇ / b> B are inserted at both ends of the through hole is disposed in a recess of the flow cell holder 33.
  • the flow cell holder 33 is provided with through holes into which the flow paths 3A and 3B are inserted.
  • the upstream flow path 3 ⁇ / b> A is inserted into the through hole on the upstream side of the flow cell holder 33 via the flow path holder 24 and connected to the flow cell 1.
  • the downstream flow path 3 ⁇ / b> B is inserted into the downstream through hole of the flow cell holder 33 and connected to the flow cell 1.
  • a flange 103A provided with a through hole for a male screw such as a bolt is provided.
  • the flow path holder 24 provided in the fixing device 204 is provided with a through hole into which the flow path 3A is inserted.
  • a shim 27 is disposed between the flange 103 ⁇ / b> A of the flow path 3 ⁇ / b> A and the flow path holder 24.
  • grain detection apparatus which concerns on 2nd Embodiment is provided with the set of the several shim 27 from which an upper surface is congruent and different in thickness.
  • the flow cell 1 is held by the flow path holder 24 and connected to the flow path 3A by selecting at least one shim 27 from a set of a plurality of shims 27 having different thicknesses and sandwiching it between the flange 103A and the flow path holder 24. It is possible to adjust the position of the flow cell 1 in the extending direction (Y direction) of the through holes.
  • grain detection apparatus which concerns on 2nd Embodiment may be provided with the set of several shim 27 with the same upper surface and the same thickness.
  • the position of the flow cell 1 in the extending direction (Y direction) of the through hole of the flow cell 1 may be adjusted by the number of shims 27 sandwiched between the flange 103A and the flow path holder 24.
  • the upstream flow path 3A is fixed to the flow path holder 24 by a male screw 43A such as a bolt via a flange 103A.
  • the through hole provided in the flange 103A is, for example, larger than the cross-sectional area of the shaft of the male screw 43A and smaller than the cross-sectional area of the head of the male screw 43A so that the position of the flow path 3A with respect to the flow path holder 24 can be adjusted.
  • the through hole provided in the flow path holder 24 may have two opposing sides that are longer than the diameter of the shaft of the male screw 43A.
  • a plane perpendicular to the extending direction (Y direction) of the through hole of the flow cell 1 (a plane including the X direction and the Z direction) ) Can adjust the position of the flow cell 1.
  • the flow path holder 24 is fixed to the housing 2 by a male screw 37A such as a bolt.
  • the arrangement of the flow path holder 24 with respect to the housing 2 may be determined by a positioning pin.
  • the opening provided in the housing 2 is larger than the flow cell holder 33 and smaller than the flow path holder 24. Therefore, the flow path 3A, the flow path holder 24, the flow cell holder 33, the flow cell 1, and the flow path 3B can be pulled out from the housing 2 while being connected. Therefore, in the particle detection apparatus according to the second embodiment, for example, when the flow cell 1 is replaced, the casing 2 that stores the parabolic mirror is separated from the casing that includes other parts of the optical system. Instead, the flow cell 1 can be pulled out of the housing 2.
  • the particle detection device may use only the fluorescence emitted by the particles as the detection target, or may use only the scattered light generated by the particles as the detection target.
  • the present invention includes various embodiments and the like not described herein.
  • the present invention can be used at the production site of purified water for pharmaceuticals, purified water for food, purified water for beverages, purified water for manufacturing semiconductor devices, and the like.

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  • Chemical & Material Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Dispersion Chemistry (AREA)
  • Optical Measuring Cells (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

L'invention concerne un dispositif de détection de particules comprenant : un boîtier (2) présentant une ouverture (101) et qui reçoit au moins une partie d'un système optique ; une cellule d'écoulement (1) disposée dans le système optique ; des trajectoires d'écoulement (3A, 3B) qui traversent le boîtier (2) via l'ouverture (101) et qui sont raccordées à la cellule d'écoulement (1) ; et un outil de fixation (104) pour fixer une trajectoire d'écoulement (3) sur le boîtier (2), et pour ajuster la position de fixation de la trajectoire d'écoulement (3) par rapport au boîtier (2).
PCT/JP2017/004662 2016-02-26 2017-02-09 Dispositif de détection de particules WO2017145768A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2016035866A JP2017151037A (ja) 2016-02-26 2016-02-26 粒子検出装置
JP2016-035866 2016-02-26

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Publication Number Publication Date
WO2017145768A1 true WO2017145768A1 (fr) 2017-08-31

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WO (1) WO2017145768A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6992699B2 (ja) * 2018-07-31 2022-01-13 株式会社島津製作所 光散乱検出装置

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61274242A (ja) * 1985-05-30 1986-12-04 Hitachi Electronics Eng Co Ltd 微粒子検出装置
JPH02213750A (ja) * 1989-02-14 1990-08-24 Japan Spectroscopic Co フローセル装置
JPH0572112A (ja) * 1991-09-11 1993-03-23 Hitachi Electron Eng Co Ltd 微粒子検出器のノズルの位置合わせ方法
JPH0572111A (ja) * 1991-09-11 1993-03-23 Hitachi Electron Eng Co Ltd 微粒子検出器のノズル固定方法
JPH0949981A (ja) * 1995-08-04 1997-02-18 Asahi Optical Co Ltd レーザー光源のビーム合成装置
JPH11269790A (ja) * 1998-03-20 1999-10-05 Yokogawa Electric Corp 繊維配向計
JP2001305048A (ja) * 2000-04-20 2001-10-31 Riken Keiki Co Ltd 吸光式ガス検出器、及びその製造方法
JP3684747B2 (ja) * 1997-02-28 2005-08-17 株式会社島津製作所 蛍光検出器
JP2008020619A (ja) * 2006-07-12 2008-01-31 Hitachi Cable Ltd レンズモジュール及び光学機器並びにレンズ取り付け方法
JP2011145232A (ja) * 2010-01-16 2011-07-28 Canon Inc 計測装置及び露光装置

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61274242A (ja) * 1985-05-30 1986-12-04 Hitachi Electronics Eng Co Ltd 微粒子検出装置
JPH02213750A (ja) * 1989-02-14 1990-08-24 Japan Spectroscopic Co フローセル装置
JPH0572112A (ja) * 1991-09-11 1993-03-23 Hitachi Electron Eng Co Ltd 微粒子検出器のノズルの位置合わせ方法
JPH0572111A (ja) * 1991-09-11 1993-03-23 Hitachi Electron Eng Co Ltd 微粒子検出器のノズル固定方法
JPH0949981A (ja) * 1995-08-04 1997-02-18 Asahi Optical Co Ltd レーザー光源のビーム合成装置
JP3684747B2 (ja) * 1997-02-28 2005-08-17 株式会社島津製作所 蛍光検出器
JPH11269790A (ja) * 1998-03-20 1999-10-05 Yokogawa Electric Corp 繊維配向計
JP2001305048A (ja) * 2000-04-20 2001-10-31 Riken Keiki Co Ltd 吸光式ガス検出器、及びその製造方法
JP2008020619A (ja) * 2006-07-12 2008-01-31 Hitachi Cable Ltd レンズモジュール及び光学機器並びにレンズ取り付け方法
JP2011145232A (ja) * 2010-01-16 2011-07-28 Canon Inc 計測装置及び露光装置

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