WO2017122346A1

WO2017122346A1 - Ultrasonic measuring device

Info

Publication number: WO2017122346A1
Application number: PCT/JP2016/051130
Authority: WO
Inventors: 友則木村; 石津　文雄; 修三和高; 明弘坂本; 田中　洋次
Original assignee: 三菱電機株式会社
Priority date: 2016-01-15
Filing date: 2016-01-15
Publication date: 2017-07-20
Also published as: JPWO2017122346A1; JP6081028B1

Abstract

An ultrasonic measuring device (1) is provided with: an array probe (10) including a plurality of ultrasonic radiating elements disposed along an element array direction (Y-axis direction); an actuator (30) for moving the array probe (10) in a direction (X-axis direction) orthogonal to both a maximum radiation direction of the ultrasonic radiating elements and the element array direction; an ultrasonic control unit (21A) for controlling a first incident angle of an ultrasonic beam (Tw) as viewed in the circumferential direction of a test object (2); and a movement control unit (22) for controlling the operation of the actuator (30) to control a second incident angle (α_xz) of the ultrasonic beam (Tw) as viewed in the longitudinal direction (Y-axis direction) of the test object (2). The maximum radiation direction of the ultrasonic radiating elements of the array probe (10) is tilted with respect to the element array direction (Y-axis direction).

Description

Ultrasonic measuring device

The present invention relates to an ultrasonic measurement technique for nondestructively measuring the physical property or state (hereinafter also referred to as “property”) of the surface and inside of a specimen using ultrasonic waves.

In the ultrasonic measurement technique, an ultrasonic wave is incident on the inside of a test body, and an ultrasonic wave (hereinafter also referred to as a “reflected echo”) reflected by a defective part inside the test body is detected, thereby the defective part. Can be determined. In recent years, an ultrasonic measurement technique called a phased array method has attracted attention. The phased array method is a technique using an array probe including a large number of vibration elements arranged in a one-dimensional array or a two-dimensional array, and electronically controls the timing at which ultrasonic waves are emitted from the large number of vibration elements. This is a method for controlling the synthesized wave of the ultrasonic wave, that is, the wavefront of the ultrasonic beam. If the phased array method is used, for example, the propagation direction and spread of the ultrasonic beam can be controlled electronically, and the focal position of the ultrasonic beam inside the specimen can be controlled electronically.

The prior art relating to the phased array method is disclosed in, for example, Japanese Patent Application Laid-Open No. 2006-177845. Patent Document 1 discloses an ultrasonic flaw detection method that uses an array probe to detect oblique flaws in a test tube. Here, the diagonal flaw means a flaw extending in a direction inclined from the tube axis direction of the tube to be inspected in the tube to be inspected. In this ultrasonic flaw detection method, the incident angle in the tube circumferential direction and the incident angle in the tube axis direction of the ultrasonic beam are calculated by calculation using a predetermined formula. The incident angle in the tube axis direction of the ultrasonic beam is set to the calculated value by electronically controlling the oscillation timing of each vibration element constituting the array probe, and the array type ultrasonic probe is used. The incident angle in the tube circumferential direction of the ultrasonic beam is set to the calculated value by mechanically controlling the inclination in the entire tube circumferential direction or the amount of misalignment from the tube axis center. Thus, by setting the incident angle in the tube circumferential direction and the incident angle in the tube axis direction, the incident angle of the ultrasonic beam to the tube to be inspected is determined.

JP 2006-177845 A (paragraphs 0020 to 0021 and FIG. 1 and paragraphs 0023 to 0050)

Oblique flaws in the pipe to be inspected may occur within a range where the inclination angle of the oblique flaw is 0 ° to 90 °. However, in the prior art of Patent Document 1, since the radiation directivity of each vibration element constituting the array probe is not taken into account, if the inclination angle is large, there is a possibility that the detection accuracy of the oblique flaw is lowered.

That is, in the prior art of Patent Document 1, when the inclination angle of the oblique flaw is large, the maximum radiation direction (direction indicating the maximum radiation intensity) of the vibration elements constituting the array probe and the ultrasonic beam to the tube to be inspected. In some cases, the difference between the incident direction and the incident direction must be large. In this case, the incident intensity of the ultrasonic beam is lowered due to the radiation directivity of each vibration element, and thereby the reception intensity of the reflected echo is weakened. As a result, the SN ratio (signal-to-noise ratio) of the reflected echo is lowered, and there is a possibility that the detection accuracy of the oblique flaw is lowered.

In view of the above, an object of the present invention is to provide a test body having a columnar structure such as a tube to be inspected, which is capable of accurately determining the property of a defect site extending obliquely with respect to the major axis direction of the test body. It is to provide a sound wave measuring device.

An ultrasonic measurement apparatus according to an aspect of the present invention is an ultrasonic measurement apparatus for determining the properties of a test body having a columnar structure, and includes a plurality of ultrasonic radiation elements arranged along a predetermined element arrangement direction. An array probe including: an actuator that moves the array probe in a direction orthogonal to both the maximum radiation direction of the plurality of ultrasonic radiation elements and the element arrangement direction; and the plurality of ultrasonic radiation elements Ultrasonically controlling the first incident angle of the ultrasonic beam incident on the specimen when viewed from the circumferential direction of the specimen by electronically controlling the timing at which the ultrasonic waves are emitted from each of the specimens A second control unit that controls the operation of the actuator and adjusts the amount of movement of the array probe to thereby adjust a second amount of the ultrasonic beam to the specimen when viewed from the longitudinal direction of the specimen. Enter And a movement control unit for controlling the angle, the maximum radiation direction of the plurality of ultrasound radiating element is characterized in that it is inclined with respect to the element array direction.

According to the present invention, since the decrease in detection sensitivity due to the radiation directivity of the ultrasonic radiation element is suppressed, it is possible to determine the property of the defective part inside the specimen with high accuracy.

It is a figure which shows schematic structure of the ultrasonic measurement apparatus of Embodiment 1 which concerns on this invention. 2 is a cross-sectional view schematically showing an array probe and a test body in Embodiment 1. FIG. 3 is a top view schematically showing an array probe and a test body in Embodiment 1. FIG. FIG. 4A is a diagram showing a state of transmission of ultrasonic waves between water and steel, and FIG. 4B is a graph showing a measurement result of a round-trip transmittance of ultrasonic transverse waves between water and steel. . 4 is a graph showing a relationship between an incident angle and an inclination angle according to the first embodiment. 3 is a flowchart illustrating an example of a procedure of the ultrasonic measurement method according to the first embodiment. 2 is a cross-sectional view schematically showing an array probe and a test body in Embodiment 1. FIG. FIG. 8 is a diagram showing a schematic cross section of an array probe and a test body taken along line VIII-VIII shown in FIG. 3 is a top view schematically showing an array probe and a test body in Embodiment 1. FIG. 2 is a cross-sectional view schematically showing an array probe and a test body in Embodiment 1. FIG. FIG. 11 is a diagram showing a schematic cross section of an array probe and a test body along the line XI-XI shown in FIG. 10. 3 is a top view schematically showing an array probe and a test body in Embodiment 1. FIG. It is a graph which shows the example of the measurement result of the radiation directivity of a single vibration element. It is sectional drawing which shows roughly the array probe and test body in a comparative example. FIG. 15 is a diagram showing a schematic cross section of an array probe and a test body along the XV-XV line shown in FIG. 14. It is sectional drawing which shows roughly the array probe and test body in a comparative example. FIG. 17 is a diagram showing a schematic cross section of an array probe and a test body taken along line XVII-XVII shown in FIG. 16. It is sectional drawing which shows roughly the array probe and test body in a comparative example. FIG. 20 is a diagram showing a schematic cross section of an array probe and a test body along the line XIX-XIX shown in FIG. It is a schematic sectional drawing of the array probe in Embodiment 2 which concerns on this invention. It is a figure which shows schematic structure of the ultrasonic measurement apparatus of Embodiment 3 which concerns on this invention. 6 is a schematic cross-sectional view of an array probe in a third embodiment. FIG. 6 is a cross-sectional view schematically showing an array probe and a test body in Embodiment 3. FIG. FIG. 10 is a top view schematically showing an array probe and a test body in a third embodiment. 6 is a cross-sectional view schematically showing an array probe and a test body in Embodiment 3. FIG. 6 is a cross-sectional view schematically showing an array probe and a test body in Embodiment 3. FIG. FIG. 10 is a top view schematically showing an array probe and a test body in a third embodiment. It is a graph which shows the example of the measurement result of the radiation directivity of a single vibration element. It is a schematic sectional drawing of the array probe in Embodiment 4 which concerns on this invention. FIG. 6 is a schematic cross-sectional view of an array probe in a fourth embodiment. FIG. 6 is a schematic cross-sectional view of an array probe in a fourth embodiment. FIG. 10 is a diagram schematically showing an example of an actuator and a drive mechanism in a fourth embodiment.

Hereinafter, various embodiments according to the present invention will be described in detail with reference to the drawings. In addition, the component to which the same code | symbol was attached | subjected in the whole drawing shall have the same structure and the same function.

Embodiment 1 FIG.
FIG. 1 is a diagram showing a schematic configuration of an ultrasonic measurement apparatus 1 according to the first embodiment of the present invention. The ultrasonic measurement apparatus 1 has a function of measuring the properties of a defective portion that may exist on the surface or inside of a test body having a columnar structure, using ultrasonic waves, in a nondestructive manner. As shown in FIG. 1, the ultrasonic measurement apparatus 1 includes an array probe 10, a transmitter / receiver 20, and an array probe 10 that are to be arranged facing the test body 2 in the X-axis direction of FIG. And an actuator 30 that is moved along.

FIG. 1 schematically shows an example of a cross-sectional structure of the array probe 10 and the test body 2 when viewed from the front direction of the test body 2. FIG. 2 is a schematic cross-sectional view of the array probe 10 and the test body 2 taken along the line II-II shown in FIG. FIG. 2 shows a schematic cross section of the array probe 10 and the test body 2 when viewed from the right side of the test body 2. 3 is an external view schematically showing the upper surfaces of the array probe 10 and the test body 2 shown in FIG. Although water exists as a contact medium interposed between the test body 2 and the array probe 3, this contact medium is not shown.

3, the Y-axis direction is a direction parallel to the central axis CA in the longitudinal direction of the test body 2. As shown in FIGS. 1 and 2, the test body 2 is a tubular structure having an outer peripheral surface 2a and an inner peripheral surface 2b extending along the Y-axis direction. The outer peripheral surface 2 a is curved along the circumferential direction of the test body 2. An example of this type of tubular structure is a steel pipe having a certain thickness. The measurement object of the ultrasonic measurement apparatus 1 may be a columnar structure that propagates ultrasonic waves, and is not limited to the tubular structure shown in FIGS.

The array probe 10 has a plurality of vibration elements Tr,..., Tr fixed to the main body 11 as ultrasonic radiation elements. Each vibration element Tr may be configured using, for example, a piezoelectric element that emits ultrasonic waves in response to a high-frequency excitation signal. Further, as shown in FIG. 2, the vibration elements Tr,..., Tr are arranged along a predetermined element arrangement direction (in the Y-axis direction in the case of FIG. 2) and have the same radiation directivity. . The maximum radiation direction (direction indicating the maximum radiation intensity) of these vibration elements Tr,..., Tr is inclined at an angle of 90 ° −α _{0 with} respect to the element arrangement direction (hereinafter, α ₀ is referred to as an offset angle). .) Such an array probe 10 is arranged so that the element arrangement direction is parallel to the central axis CA of the test body 2.

Actuator 30 is a mechanism for moving holder 31 that holds array probe 10. That is, the actuator 30 has a circumferential direction of the test body 2 that is orthogonal to both the maximum radiation direction of the vibration elements Tr,..., Tr and the element arrangement direction (Y-axis direction). ) To move the array probe 10.

On the other hand, referring to FIG. 1, the transceiver 20 includes a main control unit 21, a movement control unit 22 that controls the operation of the actuator 30 according to the control by the main control unit 21, and the control by the main control unit 21. The signal generator 23 for generating the excitation signal group, the transmission amplifier 24 for amplifying the excitation signal group, and the excitation signal group amplified by the transmission amplifier 24 are converted into the vibration elements Tr, .., Tr, a wiring group 28, a receiving amplifier 25 for amplifying a receiving analog signal group input from the wiring group 28, and a receiving analog signal group amplified by the receiving amplifier 25 as a receiving digital signal group And an A / D converter 26 for converting the received digital signal group and a memory 27 for storing the received digital signal group. Note that, when the intensity of the reception analog signal group is large, the reception amplifier 25 may be omitted.

The main control unit 21 includes an ultrasonic control unit 21A and a property determination unit 21B. The ultrasonic control unit 21A supplies a command signal for exciting the vibration elements Tr,..., Tr in the array probe 10 to the signal generator 23 in accordance with the phased array method. Based on this command signal, the signal generator 23 generates a plurality of excitation signals respectively corresponding to the vibration elements Tr,... The transmission amplifier 24 amplifies these excitation signals and supplies the amplified excitation signals to the vibration elements Tr,..., Tr via the wiring group 28, respectively. The ultrasonic control unit 21 A can electronically control the timing at which ultrasonic waves are emitted from each vibration element Tr in the array probe 10 by adjusting the delay time for delaying each excitation signal. Thereby, as illustrated in FIG. 2, it is possible to variably control the incident angle α _yz of the ultrasonic beam Tw incident on the test body 2 when viewed from the circumferential direction (X-axis direction) of the test body 2. It becomes. The incident angle α _yz is a projection angle of the incident angle α of the ultrasonic beam Tw on the test body 2 onto the YZ plane (a plane parallel to both the Y-axis direction and the Z-axis direction). Here, the Z-axis direction in the figure is a direction perpendicular to both the X-axis direction and the Y-axis direction.

In this specification, controlling the propagation direction of the ultrasonic beam by electronic control in this way is referred to as “steering” or “beam steering”.

Further, as illustrated in FIGS. 1 and 3, the movement control unit 22 can adjust the amount of movement δ in the X-axis direction of the array probe 10 by controlling the operation of the actuator 30. Thereby, as illustrated in FIG. 1, the movement control unit 22 can variably control the incident angle α _xz of the ultrasonic beam Tw when viewed from the longitudinal direction (Y-axis direction) of the test body 2. . The incident angle α _xz is a projection angle of the incident angle α of the ultrasonic beam Tw on the test body 2 onto the XZ plane (a plane parallel to both the X-axis direction and the Z-axis direction). When the ultrasonic beam Tw is incident on the test body 2, it propagates through the test body 2 as a diffracted wave Dw.

On the other hand, the vibrating elements Tr,..., Tr in the array probe 10 convert the reflected echoes into electrical signal groups and output the received analog signal groups to the wiring group 28 when the reflected echoes arrive from the test body 2. To do. The reception amplifier 25 amplifies the reception analog signal group input from the wiring group 28. The A / D converter 26 converts the amplified reception analog signal group into a reception digital signal group. The memory 27 stores the received digital signal group. The property determination unit 21B has a function of reading the received digital signal group from the memory 27 and analyzing the received digital signal group to determine the surface and internal properties of the test body 2. The property determination unit 21B can estimate the size of the defect site in the test body 2 based on, for example, the measurement result of the amplitude or intensity of the reflected echo, and the test body 2 based on the measurement result of the propagation time of the reflected echo. It is also possible to estimate the position of the defect site in the inside.

The main control unit 21 and the movement control unit 22 described above can be realized by, for example, a computer with a CPU (Central Processing Unit). Alternatively, the main control unit 21 and the movement control unit 22 may be LSI (Large Realization) such as DSP (Digital Signal Processor), ASIC (Application Specific Integrated Circuit), or FPGA (Field-Programmable Gate Array). Good.

Next, referring to FIG. 1 to FIG. 3, the inner peripheral surface 2b of the test body 2 is also referred to as a defect site Dx (hereinafter referred to as “oblique flaw Dx”) that extends obliquely with respect to the longitudinal direction of the test body 2. ) Is formed. This oblique flaw Dx is inclined at an angle β (hereinafter also referred to as “flaw inclination angle β”) with respect to the longitudinal direction of the specimen 2 as shown in FIG. It is known that the following relational expressions (1) and (2) are established when the properties of such an oblique flaw Dx are measured using ultrasonic waves.

tan α _xz = tan α × cos β (1)
tan α _yz = tan α × sin β (2)

An expression equivalent to the above relational expressions (1) and (2) is disclosed in, for example, Japanese Patent Application Laid-Open No. 2005-221371.

Based on the above relational expressions (1) and (2) and the transmittance of ultrasonic waves on the surface of the test body 2, both the incident angles α _xz and α _yx can be determined with respect to the flaw inclination angle β. The reason for this will be described below with reference to FIG. 4A, FIG. 4B and FIG. FIG. 4A is a diagram schematically illustrating a state in which the transverse wave of the ultrasonic wave UW is transmitted at the boundary surface between water and steel. As shown in FIG. 4A, the ultrasonic wave UW enters the steel from water at an incident angle α. FIG. 4B is a graph showing the reciprocal transmittance of the transverse wave of the ultrasonic wave at the boundary surface between water and steel, and the horizontal axis of this graph shows the incident angle α. In other words, FIG. 4B is a graph showing the incident angle dependency of the round-trip transmittance of the transverse wave. As shown in FIG. 4B, there are 16 ° to 22 ° as an angle range in which the incident angle dependency of the round-trip transmittance is low. FIG. 5 is a graph showing the characteristic curve of the incident angle α calculated using the above equation (1), and the horizontal axis of this graph shows the flaw inclination angle β. In the graph of FIG. 5, the characteristic curve when α _xz = 17 ° is fixed is indicated by a solid line, and the characteristic curve when α _xz = 7 ° is fixed is indicated by a dotted line.

As shown in FIG. 4B, the reciprocal transmittance at the boundary surface between water and steel shows a peak near the incident angle α = 16 °. However, when the incident angle α is initially set to 16 °, the actual incident angle α may be about 15 ° due to factors such as installation errors or sound speed fluctuations. In this case, the transmittance rapidly increases. May decrease. For this reason, it is preferable to use about 17 ° as the initial setting value of the incident angle α.

As is apparent from the above formulas (1) and (2), the properties of the oblique flaw with the inclination angle β = 0 ° may be measured with α _xz = α = 17 ° and α _yz = 0 °. When the scratch inclination angle β is small, the property of the oblique scratch can be measured by a method in which the incident angle α _yz of the ultrasonic beam Tw is electronically variably controlled while the incident angle α _xz is fixed at 17 °. It is.

In addition, as shown in FIG. 4B, the reciprocal transmittance maintains a relatively large value up to about 25 °, but it is preferable that the upper limit of the effective range is about 22 ° in consideration of the reflectance at an oblique flaw. As shown in FIG. 5, even if α _xz = 17 °, measurement is possible up to a scratch inclination angle β = 41 °. However, if the flaw inclination angle β exceeds 41 °, the incident angle α needs to be set to a value of 22 ° or more. This value exceeds the effective range (17 ° to 22 °) of the incident angle that gives a suitable round-trip transmittance.

Therefore, in order to measure the properties of an oblique flaw having a large flaw inclination angle β, it is also necessary to change the incident angle α _xz . As shown in FIG. 5, for example, if α _xz = 7 °, even an oblique flaw with a flaw angle β = 71 ° can be measured within an effective range (17 ° to 22 °) of the incident angle α. It is. Thus, by changing both of the two types of incident angles α _xz and α _yz , it becomes possible to measure the properties of the oblique flaws over a wide range of the flaw inclination angle β.

Next, the operation of the ultrasonic measurement apparatus 1 will be described. FIG. 6 is a flowchart schematically showing an example of a basic procedure of ultrasonic measurement processing by the transceiver 20. First, the ultrasonic control unit 21A sets control conditions for the array probe 10 (step ST11). Specifically, the ultrasonic control unit 21A sets the target values of the incident angles α _xz and α _yz to appropriate initial values. Next, the movement control unit 22 moves the array probe 10 by the movement amount δ so that the incident angle α _xz of the ultrasonic beam Tw becomes the target value (step ST12). In addition, the ultrasonic control unit 21A transmits the ultrasonic beam Tw from the array probe 10 to the test body 2 so that the incident angle α _yz of the ultrasonic beam Tw becomes a target value (step ST13).

Thereafter, the transceiver 20 receives the received analog signal group detected by the array probe 10 (step ST14). That is, the reception amplifier 25 amplifies the reception analog signal group input from the wiring group 28. The A / D converter 26 converts the amplified reception analog signal group into a reception digital signal group. Then, the memory 27 stores this received digital signal group (step ST15).

Next, the ultrasonic control unit 21A determines whether or not the scanning of the test object 2 within a predetermined angle range has been completed (step ST16). When the scanning of the predetermined angle range is not completed (NO in step ST16), the ultrasonic control unit 21A changes the control condition regarding the steering (step ST17). Thereafter, steps ST13 to ST16 are executed. When the scanning of the predetermined angle range is completed (YES in step ST16), the ultrasonic control unit 21A ends the transmission of the ultrasonic beam Tw (step ST18). Then, the property determination unit 21B reads the received digital signal group from the memory 27, analyzes the received digital signal group, and determines the surface and internal properties of the test body 2 (step ST19).

The ultrasonic measurement apparatus 1 is characterized in that the maximum radiation direction of the vibration elements Tr,..., Tr in the array probe 10 is inclined at an angle of 90 ° −α ₀ with respect to the element arrangement direction, and is non-zero. a point having an offset angle alpha ₀ of. Thus, the vibrating element Tr, ..., the maximum radiation direction of the Tr is also inclined at an angle of 90 °-.alpha. ₀ relative to the longitudinal direction of the test material 2. As will be described below, a decrease in detection sensitivity due to the radiation directivity of the vibration element Tr is suppressed as compared with the case where the maximum radiation direction of the vibration elements Tr,. Therefore, the property of the defective part of the test body 2 can be determined with high accuracy.

FIG. 7 is a schematic cross-sectional view of the array probe 10 arranged to face the test body 2 having the defect portion D1 having a flaw inclination angle β = 0 °. The defect site D1 is formed on the inner peripheral surface 2b of the test body 2 so as to extend in the longitudinal direction of the test body 2. 8 is a diagram showing a schematic cross section of the array probe 10 and the test body 2 along the line VIII-VIII shown in FIG. 7, and FIG. 9 is a diagram showing the array probe 10 and the test shown in FIG. 2 is an external view schematically showing an upper surface of a body 2. FIG. As shown in FIG. 8, the vibration elements Tr,..., Tr of the array probe 10 have a non-zero offset angle α ₀ . In the example of FIGS. 7 to 9, test material 2 is steel, the offset angle alpha ₀ of the vibrating element Tr is assumed to be set to + 8.5 °.

As shown in FIG. 7, in order to measure the property of the defect site D 1 having the flaw inclination angle β = 0 °, the movement control unit 22 moves the array probe 10 from the apex position of the test body 2 in the negative direction of the X axis. The incident angle α _xz of the ultrasonic beam Tw is set to 17 °. On the other hand, when the ultrasonic beam is incident perpendicularly to the extending direction of the defect site D1, the defect site D1 can be detected with high sensitivity. Therefore, the incident angle α _yz of the ultrasonic beam Tw is set to 0 °. Need to be done. Therefore, in the ultrasonic control unit 21A, as shown in FIG. 8, the propagation direction of the ultrasonic beam Tw is inclined by an angle γ (hereinafter also referred to as “steering angle γ”) from the maximum radiation direction of the vibration element Tr. The ultrasonic beam Tw is steered so as to be in the direction. Here, the steering angle γ is set to −8.5 °, which cancels the offset angle α ₀ .

On the other hand, FIG. 10 is a schematic cross-sectional view of the array probe 10 arranged to face the test body 2 having the defect portion D2 having a flaw inclination angle β = 90 °. The defect site D2 is formed on the inner peripheral surface 2b of the test body 2 so as to extend in a direction orthogonal to the longitudinal direction of the test body 2. 11 is a diagram showing a schematic cross section of the array probe 10 and the test body 2 along the line XI-XI shown in FIG. 10, and FIG. 12 shows the array probe 10 and the test shown in FIG. 2 is an external view schematically showing an upper surface of a body 2. FIG. 10 to 12, it is assumed that the test body 2 is a steel pipe and the offset angle α ₀ of the vibration element Tr is set to + 8.5 °.

As shown in FIG. 10, the movement control unit 22 does not move the array probe 10 from the apex position of the test body 2 in order to measure the property of the defect site D2 having the flaw inclination angle β = 0 °. The incident angle α _xz of the ultrasonic beam Tw is set to 0 °. On the other hand, when an ultrasonic beam is incident perpendicularly to the extending direction of the defect portion D2, the defect portion D2 can be detected with high sensitivity. Therefore, as shown in FIG. The angle α _yz needs to be set to 17 °. Therefore, the steering angle γ in this case is set to + 8.5 °.

If a defect site can occur within the range where the scratch inclination angle β is 0 ° to 90 °, the movement control unit 22 changes the movement amount δ of the array probe 10 from the apex position of the test body 2. By doing so, the incident angle α _xz viewed from the longitudinal direction of the specimen 2 may be changed within a range of 0 ° to 17 °. In addition, the ultrasonic control unit 21A changes the steering angle γ of the ultrasonic beam Tw within a range of −8.5 ° to + 8.5 °, so that the incident angle α _yz viewed from the circumferential direction of the test body 2 is obtained. Can be varied within a range of 0 ° to 17 °. Thus, by giving the offset angle α ₀ , the range of the steering angle γ corresponding to the range of 0 ° to 90 ° of the flaw inclination angle β can be set to −8.5 ° to + 8.5 °.

FIG. 13 is a graph showing an example of measurement results of radiation directivity of the vibration element Tr alone. FIG. 13 shows the radiation directivity measurement result of the vibration element Tr alone when the element width is 0.9 mm and the frequency is 3 MHz. The horizontal axis of the graph indicates the steering angle γ (unit: °) centered on the maximum radiation intensity, and the vertical axis of the graph indicates the relative amplitude (unit: dB) of the ultrasonic wave. In the case of FIG. 13, in the range Δ1 (−8.5 ° to + 8.5 °) of the steering angle γ, the maximum change width (sensitivity difference) of the relative amplitude is within 4 dB. Therefore, it can be seen that even when the radiation directivity of the vibration element Tr alone of the array probe 10 is strong, the ultrasonic measurement apparatus 1 according to the present embodiment can suppress a decrease in sensitivity.

On the other hand, if the maximum radiation direction of the vibration elements Tr,..., Tr is perpendicular to the element arrangement direction without being inclined, the sensitivity reduction is significantly increased. Hereinafter, this point will be described. FIG. 14 is a schematic cross-sectional view of the array probe 100 disposed so as to face the test body 2 having the defect site Dx. FIG. 15 is a diagram showing a schematic cross section of the array probe 10 and the specimen 2 along the line XV-XV shown in FIG. The configuration of the array probe 100 is the same as the configuration of the array probe 10 except that the maximum radiation direction of the vibration elements Tr,..., Tr is perpendicular to the element arrangement direction.

FIG. 16 is a schematic cross-sectional view of the array probe 100 arranged to face the test body 2 having the defect site D1 having a flaw inclination angle β = 0 °. FIG. 17 is a view showing a schematic cross section of the array probe 100 and the test body 2 along the line XVII-XVII shown in FIG. On the other hand, FIG. 18 is a schematic cross-sectional view of the array probe 100 arranged to face the test body 2 having the defect portion D2 having a flaw inclination angle β = 90 °. FIG. 19 is a diagram showing a schematic cross section of the array probe 100 and the test body 2 along the XIX-XIX line shown in FIG. In the examples of FIGS. 16 to 19, the test body 2 is a steel pipe.

As shown in FIG. 16, when the flaw inclination angle β is 0 °, the incident angle α _xz is set to 17 °, and electronic control of the ultrasonic beam Tw is not performed. Further, as shown in FIG. 17, the incident angle α _yz is set to 0 °. The vibrating elements Tr,..., Tr are excited simultaneously and receive reflected echoes simultaneously.

On the other hand, as shown in FIG. 18, when the flaw inclination angle β is 90 °, the incident angle α _xz is set to 0 °. As shown in FIG. 19, the electronic control of the ultrasonic beam Tw is performed. Thus, the incident angle α _yz is set to 17 °.

As can be seen from FIG. 16 to FIG. 19, in order to cope with the range of 0 ° to 90 ° of the flaw inclination angle β, it is necessary to set the incident angle α _yz to 0 ° to 17 ° by the steering. As a result, there is a possibility that the reception intensity (sensitivity) of the reflected echo is greatly reduced. In the case of FIG. 13, the steering range Δ2 is a range of 0 ° to 17 ° of the incident angle α _yz . For this reason, as shown in FIG. 13, the sensitivity difference between 0 ° and 17 ° is 10 dB or more. Since there is a difference of 10 dB or more only by transmission, there is a difference of 20 dB or more when used for both transmission and reception. Therefore, when the vibration element Tr having a strong radiation directivity as shown in FIG. 13 is used, the flaw inclination angle β shown in FIG. 18 is compared with the flaw inclination angle β = 0 ° shown in FIG. In the case of = 90 °, the sensitivity may be lowered by 20 dB or more.

As described above, in the ultrasonic measurement apparatus 1 according to the first embodiment, the maximum radiation direction of the vibration elements Tr,..., Tr in the array probe 10 is inclined with respect to the element arrangement direction. Thereby, even when the radiation directivity of the vibration element Tr alone is strong, a decrease in sensitivity can be suppressed. Therefore, the property of the defective part in the inside of the test body 2 can be determined with high accuracy.

Note that the moving amount δ of the array probe 10 can be changed according to the diameter of the specimen 2 and the flaw inclination angle β. Further, the timing for exciting each vibration element Tr of the array probe 10 can also be changed according to the flaw inclination angle β. It is desirable to calculate the movement amount δ and timing in advance and store them in the memory 27 as information. In this case, the main control unit 21 reads the information stored in the memory 27 in accordance with the diameter and the flaw inclination angle β of the test body 2 and determines the amount of movement δ based on the information or the signal generator A command signal to be supplied to the control unit 23 may be generated.

Embodiment 2. FIG.
Next, a second embodiment according to the present invention will be described. The present embodiment is a modification of the first embodiment. FIG. 20 is a schematic cross-sectional view of the array probe 12 in the second embodiment. The configuration of the ultrasonic measurement apparatus according to the present embodiment is the same as that of the ultrasonic measurement apparatus 1 according to the first embodiment except that the array probe 12 is provided instead of the array probe 10. is there.

As shown in FIG. 20, the array probe 12 in this embodiment includes M (M is a positive integer) sub-array probes arranged along a predetermined array arrangement direction (Y-axis direction). It is comprised including the child 12 ₁ ,..., 12 _M. Each of the sub-array probes 12 ₁ ,..., 12 _M has a plurality of vibration elements Tr,. It should be noted that the number of subarray probes 12 ₁ ,..., 12 _M need not be four or more, and may be two or three.

As shown in FIG. 20, the maximum radiation direction of the vibration elements Tr,..., Tr of the present embodiment is inclined at a non-zero offset angle α ₀ with respect to the array arrangement direction (Y-axis direction). Therefore, as in the case of the first embodiment, even when the radiation directivity of the vibration element Tr alone is strong, the range of the steering angle γ can be set to a range where the sensitivity difference is small, and thus the sensitivity reduction is suppressed. be able to. Therefore, it is possible to determine the property of the defective part inside the specimen 2 with high accuracy.

Further, as compared with the array probe 10 of the above embodiment, it is not necessary to incline the maximum radiation direction of the small vibrating elements Tr,..., Tr at a constant angle with respect to the element arrangement direction. The array probe 12 has an advantage that it is easy to manufacture.

Since the array probe 12 according to the present embodiment is subarrayed, there is a possibility that a valley occurs in the beam width of the ultrasonic beam Tw in the array arrangement direction. When a defective part exists in the valley, the detection accuracy of the defective part may be lowered. In order to cope with this, the ultrasonic control unit 21A controls the timing at which ultrasonic waves are emitted from the vibrating elements Tr,..., Tr of each subarray probe 12 _m (m is an arbitrary integer from 1 to M). Thus, it is desirable to expand the beam width of the ultrasonic beam emitted from each subarray probe 12 _m in the array arrangement direction. Thereby, since the valley of the ultrasonic beam Tw is narrow or the valley becomes shallow, it is possible to suppress a decrease in detection accuracy of the defective part.

Embodiment 3 FIG.
Next, a third embodiment according to the present invention will be described. FIG. 21 is a diagram showing a schematic configuration of an ultrasonic measurement apparatus 1A according to the third embodiment of the present invention. This ultrasonic measurement apparatus 1A also has a function of nondestructively measuring the properties of defective portions that may exist on the surface or inside of a test body having a columnar structure. As shown in FIG. 21, the ultrasonic measurement apparatus 1 A moves the array probe 13, the transceiver 20 M, and the array probe 13 to be arranged facing the test body 2 in the X-axis direction of FIG. 21. And an actuator 32 that is moved along.

FIG. 21 schematically shows an example of a cross-sectional structure of the array probe 13 and the test body 2 when viewed from the front direction of the test body 2. FIG. 22 is an enlarged view of the cross-sectional structure of the array probe 13 shown in FIG. FIG. 23 is a schematic sectional view of the array probe 13 and the test body 2 taken along the line XXIII-XXIII shown in FIG. FIG. 23 shows a schematic cross section of the array probe 10 and the test body 2 when viewed from the right side of the test body 2. FIG. 24 is an external view schematically showing the top surfaces of the array probe 13 and the test body 2 shown in FIG. In addition, although water exists as a contact medium interposed between the test body 2 and the array probe 13, this contact medium is not illustrated.

As shown in FIG. 22, the array probe 13 has a plurality of vibration elements Tra,..., Tra fixed to the main body 14 as ultrasonic radiation elements. These vibration elements Tra,..., Tra are arranged along a predetermined element arrangement direction and have the same radiation directivity. As shown in FIG. 23, each vibration element Tra extends along a direction orthogonal to the element arrangement direction (in the case of FIG. 23, the Y-axis direction). Each vibration element Tra may be configured using, for example, a piezoelectric element that emits ultrasonic waves in response to a high-frequency excitation signal.

Further, as shown in FIGS. 21 and 24, the array probe 13 is disposed at a position facing the test body 2 and intersecting a plane including the central axis CA of the test body 2. This plane is parallel to the YZ plane. Vibrating element Tra, ..., the maximum radiation direction of the Tra is inclined at an offset angle alpha ₀ to this plane.

The actuator 32 is arrayed from a parallel state in which the extending direction of the vibration elements Tra,..., Tra is parallel to the longitudinal direction of the test body 2 to an inclined state in which the extending direction is inclined with respect to the longitudinal direction of the test body 2. It has a mechanism for changing the arrangement state of the probe 13. 21 to 24 show the parallel state of the array probe 13. The tilted state of the array probe 13 will be described later.

On the other hand, referring to FIG. 21, the transceiver 20M includes a main control unit 21M, a movement control unit 22M that controls the operation of the actuator 32 according to the control by the main control unit 21M, and a control by the main control unit 21M. A signal generator 23M for generating an excitation signal group, a transmission amplifier 24M for amplifying the excitation signal group, and an excitation signal group amplified by the transmission amplifier 24M as a vibration element Tra in the array probe 13. ..., a wiring group 28M transmitted to Tra, a receiving amplifier 25M for amplifying a receiving analog signal group input from the wiring group 28M, and a receiving analog signal group amplified by the receiving amplifier 25M. A / D converter 26M for converting the received digital signal group, and a memory 27 for storing the received digital signal group. Note that the receiving amplifier 25M may be omitted when the intensity of the received analog signal group is large.

The main control unit 21M includes an ultrasonic control unit 21MA and a property determination unit 21MB. The ultrasonic controller 21MA supplies a command signal for exciting the vibration elements Tra,..., Tra in the array probe 13 to the signal generator 23M according to the phased array method. Based on this command signal, the signal generator 23M generates a plurality of excitation signals corresponding to the vibration elements Tra,..., Tra, respectively. The transmitting amplifier 24M amplifies these excitation signals and supplies the amplified excitation signals to the vibration elements Tra,..., Tra via the wiring group 28M. The ultrasonic control unit 21MA can electronically control the timing at which ultrasonic waves are radiated from each vibration element Tra in the array probe 13 by adjusting the delay time for delaying each excitation signal. This makes it possible to variably control the incident angle α _xz of the ultrasonic beam Tw incident on the test body 2 when viewed from the longitudinal direction (Y-axis direction) of the test body 2, as illustrated in FIG. It becomes. The incident angle α _xz is a projection angle of the incident angle α of the ultrasonic beam Tw on the test body 2 onto the XZ plane (a plane parallel to both the X-axis direction and the Z-axis direction).

Further, the movement control unit 22M can change the arrangement state of the array probe 13 by controlling the operation of the actuator 32.

On the other hand, the vibration elements Tra,..., Tra in the array probe 13 convert the reflected echoes into electrical signal groups and output the received analog signal groups to the wiring group 28M when the reflected echoes arrive from the test body 2. To do. The receiving amplifier 25M amplifies the received analog signal group input from the wiring group 28M. The A / D converter 26M converts the amplified received analog signal group into a received digital signal group. The memory 27 stores the received digital signal group. The property determining unit 21MB has a function of reading the received digital signal group from the memory 27 and analyzing the received digital signal group to determine the surface and internal properties of the test body 2. The property determination unit 21MB can estimate the size of the defect site in the specimen 2 based on the measurement result of the amplitude or intensity of the reflected echo, for example, and the specimen 2 based on the measurement result of the propagation time of the reflected echo. It is also possible to estimate the position of the defect site in the inside.

The main control unit 21M and the movement control unit 22M described above can be realized by, for example, a computer with a built-in CPU. Alternatively, the main control unit 21M and the movement control unit 22M may be realized by an LSI such as a DSP, ASIC, or FPGA. The basic procedure of ultrasonic measurement processing by the transceiver 20M is the same as the procedure shown in FIG.

The ultrasonic measuring apparatus 1A described above is characterized in that the maximum radiation direction of the vibration elements Tra,..., Tra is inclined at an offset angle α ₀ with respect to the plane including the central axis CA of the test body 2. As will be described below, this feature suppresses a decrease in detection sensitivity due to the radiation directivity of the vibration element Tra, so that the property of the defective part of the test body 2 can be determined with high accuracy. .

The test body 2 shown in FIG. 21, FIG. 23 and FIG. 24 has a defect part D1 having a flaw inclination angle β = 0 °. It is assumed that the offset angle α ₀ is set to + 8.5 °. As shown in FIG. 21, the ultrasonic control unit 21MA steers the ultrasonic beam Tw so that the propagation direction of the ultrasonic beam Tw forms an incident angle α _xz = 17 °. In this case, the steering angle γ is 8.5 ° −θ. Here, as shown in FIG. 21, θ is an angle corresponding to the position of the incident point of the ultrasonic beam Tw when measuring the property of the defect site D1. On the other hand, as shown in FIG. 23, since the incident angle α _yz needs to be set to 0 °, the arrangement state of the array probe 13 is a parallel state.

On the other hand, FIG. 25 is a diagram schematically showing an end face of the array probe 13 disposed to face the test body 2 having the defect portion D2 having a flaw inclination angle β = 90 °. 26 is a schematic cross-sectional view of the array probe 13 and the test body 2 taken along the line XXVI-XXVI shown in FIG. 25, and FIG. 27 is a diagram of the array probe 13 and the test body 2 shown in FIG. FIG. As shown in FIG. 25, the ultrasonic control unit 21MA steers the ultrasonic beam Tw so that the incident angle α _xz of the ultrasonic beam Tw becomes 0 °. Here, the steering angle γ is set to −8.5 °, which cancels the offset angle α ₀ . On the other hand, since the incident angle α _yz needs to be set to 17 °, the extending direction of the vibration elements Tra,..., Tra of the array probe 13 is set to 17 with respect to the longitudinal direction as shown in FIG. Tilt at °.

When the flaw inclination angle β is 0 ° to 90 °, the incident angle α _xz can be changed within the range of 0 ° to 17 ° by changing the steering angle γ of the array probe 13, and the incident angle α _yz Can be varied from 0 ° to 17 °. By giving the offset angle α ₀ to the array probe 13 in this way, the steering angle γ of the ultrasonic beam Tw can be set in the range of −8.5 ° to 8.5 ° −θ.

FIG. 28 is a graph showing the same measurement results as the measurement results shown in FIG. In the case of FIG. 28, in the steering angle γ range Δ3 (−8.5 ° to + 8.5 ° −θ), the maximum change width (sensitivity difference) of the relative amplitude is within 4 dB. Therefore, even when the radiation directivity of the vibration element Tra alone of the array probe 13 is strong, it can be seen that the ultrasonic measurement apparatus 1A according to the present embodiment can suppress a decrease in sensitivity.

Embodiment 4 FIG.
Next, a fourth embodiment according to the present invention will be described. The present embodiment is a modification of the third embodiment. 29 and 30 are schematic cross-sectional views of the array probe 15 according to the fourth embodiment, and FIG. 31 is a schematic cross-sectional view of the k-th sub-array probe 15 _k . FIG. 32 is a diagram showing a schematic configuration of the actuator 32A and the drive mechanism in the fourth embodiment.

The configuration of the ultrasonic measurement apparatus according to the present embodiment includes an array probe 15 instead of the array probe 13, and an actuator 32A and a drive mechanism shown in FIG. Is substantially the same as the configuration of the ultrasonic measurement apparatus 1A of the third embodiment. 31 includes substantially the same structure as the cross-sectional structure illustrated in FIG.

As shown in FIG. 29, the array probe 15 according to the present embodiment has K subarray probes (K is a positive integer) arranged along a predetermined array arrangement direction (Y-axis direction). child ₁₅ 1, ..., is configured to include a 15 _K. Each of the sub-array probes 15 ₁ ,..., 15 _K has a plurality of vibration elements Trb,. The number of subarray probes 15 ₁ ,..., 15 _K need not be four or more, and may be two or three.

Further, since the array probe 15 of the present embodiment is sub-arrayed, there is a possibility that a valley occurs in the beam width of the ultrasonic beam Tw in the array arrangement direction. When a defective part exists in the valley, the detection accuracy of the defective part may be lowered. In order to cope with this, each sub-array probe 15 _k has an acoustic lens Ls that expands the ultrasonic beam Tw in the longitudinal direction of the test body 2. Thereby, since the valley of the ultrasonic beam Tw is narrow or the valley becomes shallow, it is possible to suppress a decrease in detection accuracy of the defective part. If the beam width is sufficiently wide even without the acoustic lens Ls, the acoustic lens Ls may not be used.

Actuator 32A in FIG. 32, the vibrating element Trb of each sub-array probes 15 _k, ..., from a parallel state in which the extending direction of the Trb is parallel to the longitudinal direction of the test material 2 (FIG. 30), the extending direction thereof It has a mechanism for changing the arrangement state of the array probe 15 to an inclined state (FIG. 29) inclined with respect to the longitudinal direction of the test body 2. As shown in FIG. 30, the actuator 32 A can cause a shift between the

support members

41 and 42 using the drive shaft 40. Drive shaft 40 is connected to the rotating shaft portion ₄₃ 0, 44 _0. Further, the

support members

41 and 42 support the subarray probes 15 ₁ ,..., 15 _K via the rotation shaft portions 43 ₁ to 43 _K and the rotation shaft portions 44 ₁ to 44 _K. The actuator 32A can switch between the inclined state of FIG. 29 and the parallel state of FIG. 30 by adjusting the amount of deviation between the

support members

41 and 42.

Also in the fourth embodiment, as shown in FIG. 31, the maximum radiation direction of the vibration elements Trb,..., Trb is inclined with respect to the plane including the central axis CA of the test body 2. Therefore, since a decrease in detection sensitivity due to the radiation directivity of the vibration element Trb is suppressed, it is possible to determine the property of the defective part of the test body 2 with high accuracy.

Although various embodiments according to the present invention have been described above with reference to the drawings, these embodiments are examples of the present invention, and various forms other than these embodiments can be adopted. Within the scope of the present invention, the above-described first to fourth embodiments can be freely combined, any constituent element of each embodiment can be modified, or any constituent element of each embodiment can be omitted.

Since the ultrasonic measurement apparatus according to the present invention can measure the surface or internal properties of a columnar test body in a non-destructive manner, the presence / absence, presence position, size, shape, or distribution of the defective portion of the columnar test body, etc. It is suitable for being used for nondestructive testing.

1,1A ultrasonic measuring device, 2 specimens, 2a peripheral surface, 2b in peripheral surfaces, 10,12,13,15 array _probe, 12 1, ..., 12 _M subarrays probe, ₁₅ 1, ..., 15 _K subarray probe, 20, 20M transceiver, 21, 21M main control unit, 21A, 21MA ultrasonic control unit, 21B, 21MB property determination unit, 22, 22M movement control unit, 23, 23M signal generator, 24 , 24M transmission amplifier, 25, 25M reception amplifier, 26, 26M A / D converter, 27 memory, 28, 28M wiring group, 30, 32, 32A actuator, 100 array probe, Tw ultrasonic beam, Dw Diffraction wave, Tr vibration element, Tr, Tra, Trb vibration element, Dx, D1, D2 Defect site, UW ultrasonic wave, CA central axis, Ls acoustic lens.

Claims

An ultrasonic measurement apparatus for determining the properties of a test body having a columnar structure,
An array probe including a plurality of ultrasonic radiating elements arranged along a predetermined element arrangement direction;
An actuator for moving the array probe along a direction orthogonal to both the maximum radiation direction of the plurality of ultrasonic radiation elements and the element arrangement direction;
By electronically controlling the timing at which ultrasonic waves are emitted from each of the plurality of ultrasonic radiation elements, the first ultrasonic beam incident on the test body when viewed from the circumferential direction of the test body An ultrasonic control unit for controlling the incident angle;
By controlling the movement of the array probe by controlling the operation of the actuator, the second incident angle of the ultrasonic beam to the specimen when viewed from the longitudinal direction of the specimen is controlled. And a movement control unit that
The ultrasonic measurement apparatus, wherein a maximum radiation direction of the plurality of ultrasonic radiation elements is inclined with respect to the element arrangement direction.
The ultrasonic measurement apparatus according to claim 1, further comprising a property determination unit that determines a property inside the test body based on a reflected echo coming from the test body,
The plurality of ultrasonic radiation elements convert the reflected echo into an electrical signal group and output a reception signal group,
The property determination unit analyzes the received signal group to determine the property of the specimen.
An ultrasonic measurement device characterized by that.
2. The ultrasonic measurement apparatus according to claim 1, wherein the test body has an outer peripheral surface that is curved along a circumferential direction of the test body.
An ultrasonic measurement apparatus for determining the properties of a test body having a columnar structure,
A plurality of sub-array probes arranged along a predetermined array arrangement direction and each including a plurality of ultrasonic radiation elements;
An actuator for moving the plurality of subarray probes along a direction orthogonal to both the maximum radiation direction of the plurality of ultrasonic radiation elements and the array arrangement direction;
By electronically controlling the timing at which ultrasonic waves are emitted from each of the plurality of ultrasonic radiation elements, the first ultrasonic beam incident on the test body when viewed from the circumferential direction of the test body An ultrasonic control unit for controlling the incident angle;
A second incident angle of the ultrasonic beam to the specimen when viewed from the longitudinal direction of the specimen by controlling the movement of the actuator to adjust the movement amount of the plurality of subarray probes A movement control unit for controlling
The ultrasonic measurement apparatus, wherein a maximum radiation direction of the plurality of ultrasonic radiation elements is inclined with respect to the array arrangement direction.
5. The ultrasonic measurement apparatus according to claim 4, wherein the plurality of ultrasonic radiation elements are arranged along a direction inclined with respect to the array arrangement direction, and the maximum radiation of the plurality of ultrasonic radiation elements. The ultrasonic measurement apparatus, wherein the direction is orthogonal to the arrangement direction of the plurality of ultrasonic radiation elements.
The ultrasonic measurement apparatus according to claim 4, further comprising a property determination unit that determines a property of the test body based on a reflected echo that has arrived from the test body,
The plurality of ultrasonic radiation elements convert the reflected echo into an electrical signal group and output a reception signal group,
The property determination unit analyzes the received signal group to determine the property of the specimen.
An ultrasonic measurement device characterized by that.
5. The ultrasonic measurement apparatus according to claim 4, wherein the test body has an outer peripheral surface that is curved along a circumferential direction of the test body.
An ultrasonic measurement apparatus for determining the properties of a test body having a columnar structure,
An array probe including a plurality of ultrasonic radiation elements arranged along a predetermined element arrangement direction and extending in a direction perpendicular to the element arrangement direction;
Arrangement state of the array probe from a parallel state in which the extending direction of the plurality of ultrasonic radiating elements is parallel to the longitudinal direction of the test body to an inclined state in which the extending direction is inclined with respect to the longitudinal direction An actuator that changes
By electronically controlling the timing at which ultrasonic waves are radiated from each of the plurality of ultrasonic radiation elements, the first incident angle of the ultrasonic beam incident on the specimen when viewed from the longitudinal direction is set. An ultrasonic control unit to control,
A movement control unit that controls the second incident angle of the ultrasonic beam when the operation of the actuator is controlled and viewed from the circumferential direction of the specimen,
The ultrasonic measurement apparatus, wherein the maximum radiation direction of the plurality of ultrasonic radiation elements is inclined with respect to a plane including a central axis of the specimen in the longitudinal direction.
The ultrasonic measurement apparatus according to claim 8, further comprising a property determination unit that determines a property of the test body based on a reflected echo that has arrived from the test body.
The plurality of ultrasonic radiation elements convert the reflected echo into an electrical signal group and output a reception signal group,
The property determination unit analyzes the received signal group to determine the property of the specimen.
An ultrasonic measurement device characterized by that.
9. The ultrasonic measurement apparatus according to claim 8, wherein the test body has an outer peripheral surface that is curved along a circumferential direction of the test body.
An ultrasonic measurement apparatus for determining the properties of a test body having a columnar structure,
A plurality of sub-array probes each including a plurality of ultrasonic radiating elements and arranged along a predetermined array arrangement direction;
An actuator for moving the plurality of subarray probes;
By electronically controlling the timing at which ultrasonic waves are emitted from each of the plurality of ultrasonic radiation elements, a first ultrasonic beam incident on the test body when viewed from the longitudinal direction of the test body An ultrasonic control unit for controlling the incident angle;
A movement control unit that controls the second incident angle of the ultrasonic beam when the operation of the actuator is controlled and viewed from the circumferential direction of the specimen,
The plurality of ultrasonic radiating elements are arranged along an element arrangement direction orthogonal to the array arrangement direction, and each of the plurality of ultrasonic radiating elements extends in a direction orthogonal to the element arrangement direction. And
The actuator is configured so that, depending on the control by the movement control unit, the extending direction of the plurality of ultrasonic radiation elements is parallel to the longitudinal direction of the specimen, and the extending direction is relative to the longitudinal direction. Changing the arrangement state of the plurality of subarray probes to an inclined state
The ultrasonic measurement apparatus, wherein the maximum radiation direction of the plurality of ultrasonic radiation elements is inclined with respect to a plane including a central axis of the specimen in the longitudinal direction.
12. The ultrasonic measurement apparatus according to claim 11, wherein each of the subarray probes includes an acoustic lens that expands the ultrasonic beam in the longitudinal direction.
12. The ultrasonic measurement apparatus according to claim 11, wherein the ultrasonic control unit focuses the ultrasonic beam in a circumferential direction of the specimen.
The ultrasonic measurement apparatus according to claim 11, further comprising a property determination unit that determines a property of the test body based on a reflected echo that has arrived from the test body.
The plurality of ultrasonic radiation elements convert the reflected echo into an electrical signal group and output a reception signal group,
The property determination unit analyzes the received signal group to determine the property of the specimen.
An ultrasonic measurement device characterized by that.
12. The ultrasonic measurement apparatus according to claim 11, wherein the test body has an outer peripheral surface that is curved along a circumferential direction of the test body.