WO2017117700A1 - 一种基于纳米粒子点阵量子输运特性的振动传感器 - Google Patents

一种基于纳米粒子点阵量子输运特性的振动传感器 Download PDF

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WO2017117700A1
WO2017117700A1 PCT/CN2016/070012 CN2016070012W WO2017117700A1 WO 2017117700 A1 WO2017117700 A1 WO 2017117700A1 CN 2016070012 W CN2016070012 W CN 2016070012W WO 2017117700 A1 WO2017117700 A1 WO 2017117700A1
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vibration
nanoparticle
cantilever beam
nanoparticle lattice
lattice
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陈敏瑞
刘畅
谢波
韩民
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Nanjing University
Nanjing Tech University
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Nanjing University
Nanjing Tech University
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
    • G01H11/06—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means

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  • the invention relates to a vibration sensor, in particular to a vibration sensor based on nanoparticle dot matrix quantum transport characteristics.
  • Vibration sensors are important monitoring tools in the engineering field, and are widely used in such areas as material flaw detection, mechanical system fault diagnosis, noise elimination, safety protection, industrial automation, and dynamic analysis of structural parts.
  • the mainstream vibration sensors can be classified into photoelectric type, piezoelectric type, eddy current type, electric type, and resistive type according to the principle of electromechanical conversion.
  • photoelectric type is a sensor that uses laser technology to measure, and its components are laser, laser detecting device and measuring circuit. Although it has the advantages of high speed, high precision, anti-photoelectric interference, safe use, etc., due to its complicated optical path, vibration pair Its influence can not be ignored, and it can only be used in the case where the vibration intensity is relatively weak, which makes its application greatly limited.
  • the piezoelectric vibration sensor uses the piezoelectric crystal to generate a polarization voltage on the surface after deformation, thereby characterizing the strain or vibration capability of the load.
  • the eddy current sensor is a kind of relative non-contact sensor, but because it needs to generate strong high-frequency current, and the object to be measured has ferromagnetic property, its anti-magnetic interference is weak, and its own circuit also needs magnetic shielding.
  • the electric sensor generates the electromotive force output by cutting the magnetic induction line by the spring-fixed coil during the vibration process by the internal permanent magnet, and the anti-magnetic interference is weak, which is not conducive to miniaturization and modularization.
  • the resistive sensor converts the amount of mechanical vibration to be measured into a change in the resistance of the sensing element.
  • the structure is relatively simple, safe, and environmentally tolerant.
  • the present invention is a resistive vibration sensor.
  • the present invention aims to provide a high sensitivity vibration sensor based on nanotechnology and a method of measuring vibration.
  • the sensor combines a metal nanoparticle lattice with a cantilever beam sensor to form a new resistive vibration sensing device. It can be integrated into MEMS devices with small size, large range and high sensitivity.
  • the technology provided by the present invention enables the performance parameters such as the frequency response range, the amplitude response sensitivity, and the amplitude measurement range of the vibration sensor to be designed by the material, shape, size, and the like of the cantilever beam of the sensor.
  • the technical solution of the present invention is a vibration sensor based on nanoparticle lattice quantum transport characteristics, including a metal nanoparticle lattice (1), a cantilever beam (2) with a microelectrode (3), and a foundation ( 4) and a mass (5); wherein the nanoparticle lattice (1) is prepared on the surface of the cantilever beam (2) and located between the pair of microelectrodes (3); the cantilever beam (2) is elongated and fixed at one end On the base (4), the other end is the free end; the mass (5) is attached to the free end of the cantilever beam (2); the metal nanoparticle lattice (1) is used as the sensitive material of the sensor;
  • the material of 1) may be various metals, the particle size of the nanoparticles is 1-500 nm, and the coverage of the nanoparticles is between 0.3-0.99 single layers.
  • the microelectrode (3) is made of a metal thin film material such as gold, silver, copper or aluminum.
  • the cantilever beam (2) is made of an elastic insulating material or a non-insulating elastic material with a surface insulating layer.
  • the nanoparticle lattice (1) and the microelectrode (3) prepared on the same cantilever beam may be a group or a plurality of groups in parallel.
  • the foundation (4) is in contact with the vibration source to generate vibration.
  • the cantilever beam (2) responds to the vibration of the vibration source and strains the surface thereof, thereby making the nanoparticle lattice (1)
  • the distance between the nanoparticles changes, and the change in the spacing of the nanoparticles causes the conductance of the nanoparticle lattice (1) to change; the detection of vibration is detected by measuring the change in conductance (or resistance) between the microelectrodes.
  • the frequency response parameter of the vibration sensor can be adjusted according to the mass of the mass (5).
  • the mass (5) is not necessary, and the mass m(5) can also be removed under certain conditions.
  • the invention also provides a vibration sensor and vibration measuring method based on nanoparticle dot matrix quantum transport characteristics.
  • a metal electrode is prepared on the cantilever beam, and the metal nanoparticles are deposited between the electrodes at a predetermined number density to form a lattice of metal nanoparticles having a certain conductance.
  • the conductance of the metal nanoparticle lattice will change synchronously, and the quantitative measurement of the vibration spectrum can be realized by monitoring the change of the conductance value through the electrode.
  • the vibration sensor based on the lattice structure of metal nanoparticles has the advantages of high sensitivity, reliable performance, easy integration, low price, etc., and the amplitude and frequency response characteristics of the sensor can be adjusted by changing the material and shape parameters of the cantilever beam.
  • the tunneling resistance change rate of the nanoparticle lattice is:
  • R0 is the initial resistance value of the nanoparticles
  • ⁇ is the parameter related to the size and temperature of the nanoparticles
  • d is the average nanoparticle spacing.
  • the vibration information of the vibration source can be obtained by measuring the nanoparticle lattice resistance R(t).
  • the resonant frequency of the sensor is:
  • E is the elastic modulus of the cantilever beam.
  • the measurement performance of the sensor can be adjusted according to the material type, size and shape of the cantilever beam, and also related to the mass m of the mass.
  • the foundation is fixed so that it is at rest, the vibration source drives the free end of the cantilever beam to be vibrated, and the resistance or conductance of the nanoparticle lattice is measured. As shown in Figure 6A.
  • a vibration sensor based on nanoparticle lattice quantum transport characteristics is composed of a cantilever beam with a microelectrode and a nanoparticle lattice distributed between the microelectrodes.
  • the coverage of the nanoparticle lattice can be precisely controlled in 0.5-1 single layers.
  • the conductance of the nanoparticle lattice is measured by a microelectrode.
  • a mass having a certain mass can be attached to the free end of the cantilever beam. Under the action of the vibration source, the inertia of the mass and the cantilever beam itself causes the cantilever beam to synchronize with a large amplitude of vibration.
  • the cantilever beam when When the cantilever beam is forced to vibrate, its surface will be strained, which causes the nanoparticle spacing in the nanoparticle lattice to change, which in turn changes the conductance of the nanoparticle lattice.
  • the detection of vibration is achieved by measuring the change in conductance (or resistance) between the microelectrodes.
  • Figure 1 is a front elevational view of the vibration sensor of the present invention
  • Figure 2 is a plan view of the vibration sensor of the present invention.
  • FIG. 3 is a microelectrode design diagram according to an embodiment of the present invention.
  • Figure 5 is a graph showing data measured by a vibration sensor in Embodiment 2 of the present invention.
  • 6A and 6B are respectively schematic views of two vibration measuring methods of the vibration sensor of the present invention.
  • the interdigitated electrode was prepared at one end of the PET by a thermal evaporation mask method.
  • the electrode material was metallic silver.
  • the specific pattern and size ratio are shown in Fig. 3.
  • the height is about 4.5 mm and the width is about 3 mm.
  • the vibration sensor foundation is prepared using an aluminum alloy material. Silver nanoparticles are deposited between the interdigitated electrodes by nanoparticle beam vapor deposition to form nanoparticle lattices.
  • the interdigital electrode is prepared at one end of the PET by a thermal evaporation mask method, and the electrode material is metallic silver. The specific pattern and size are shown in FIG. 3, and the vibration sensor base is prepared by using an aluminum alloy material.
  • a 50g lead block is attached to the end of the cantilever beam, and silver nanoparticles are deposited between the interdigitated electrodes by nanoparticle beam vapor deposition to form a nanoparticle lattice.
  • the specific operation method of the nanoparticle beam vapor deposition can be performed.
  • FIG. 1 is a vibration signal diagram measured by a vibration sensor.
  • Embodiment 2 adds a mass m of 50 g with respect to Embodiment 1, and when the mass of the mass is driven by a 30 Hz vibration source for simple harmonic vibration, the vibration frequency is closer to its natural frequency than that of Embodiment 1, and the vibration amplitude of the sensor is somewhat different. Increased, making measurements easier.
  • the sensor of the present invention is capable of optimizing the measurement performance of the sensor by adjusting the mass of the mass m.
  • the cantilever beam is a thin plate, and the mass m is removed.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)

Abstract

基于纳米粒子点阵量子输运特性的振动传感器，包括金属纳米粒子点阵(1)、带有微电极(3)的悬臂梁(2)、基础(4)和质块(5)；其中，纳米粒子点阵(1)制备于悬臂梁(2)表面且位于一对微电极(3)之间；悬臂梁(2)呈现长条状，一端固定于基础(4)上，另一端为自由端；在悬臂梁(2)的自由端附着质块(5)；以金属纳米粒子点阵(1)作为传感器的敏感材料；构成纳米粒子点阵(1)的材料是各种金属，纳米粒子的粒径为1-500nm，纳米粒子的覆盖率在0.3-0.99个单层之间。

Description

一种基于纳米粒子点阵量子输运特性的振动传感器 技术领域
本发明涉及一种振动传感器，特别是一种基于纳米粒子点阵量子输运特性的振动传感器。
背景技术
振动传感器是工程领域的重要监测手段，在诸如材料探伤、机械系统的故障诊断、噪声消除、安全防范、工业自动化、结构件的动态特性分析等方面有着广泛应用
目前，主流的振动传感器根据其机电变换的原理，可以分为光电式、压电式、电涡流式、电动式、电阻式等。其中光电式是利用激光技术进行测量的传感器，其组成部分为激光器、激光检测装置以及测量电路，虽然具备速度快，精度高，抗光电干扰，使用安全等优点，但是由于其光路复杂，振动对其本身影响不可忽略，只能在振动强度相对较弱的场合使用，使得其应用受到了很大的限制。压电式振动传感器则是利用压电晶体在发生形变之后会在表面产生极化电压，从而表征载荷的应变或是振动能力，由于晶格畸变能力有限，所以其测量振动幅度的范围十分微小。电涡流式传感器是一种相对式非接触传感器，但是由于其需要产生强大的高频电流，且需要被测物体具有铁磁性质，其抗磁干扰较弱，自身电路也需要做好磁性屏蔽。电动式传感器则是通过内部永磁铁在振动过程中，由弹簧固定的线圈切割磁感线从而产生电动势输出，其抗磁干扰较弱，不利于微型化与模块化。电阻式传感器则是通过将被测的机械振动量转化成传感元件电阻的变化量，其结构相对简单，安全，对于环境容忍度较高。本发明即是一种电阻式振动传感器。
本发明旨在提供一种基于纳米技术的高灵敏度振动传感器和测量振动的方法。该传感器将金属纳米粒子点阵与悬臂梁传感器结合，形成一种新的电阻式振动感应器件。并可集成于MEMS器件中具有体积小、量程大、灵敏度高等特点。并且，本发明提供的技术能使得振动传感器的频率响应范围、振幅响应灵敏度和振幅测量范围等性能参数可通过传感器的悬臂梁的材料、形状、尺寸等进行设计。
发明内容
本发明目的是，提出基于基于纳米粒子点阵量子输运特性的振动传感器及振动测量 方法。本发明的另一目的在于提供一种使用纳米粒子点阵作为敏感材料测量机械振动的方法。
为实现上述目的，本发明技术方案是，基于纳米粒子点阵量子输运特性的振动传感器，包括金属纳米粒子点阵(1)、带有微电极(3)的悬臂梁(2)、基础(4)和质块(5)；其中，纳米粒子点阵(1)制备于悬臂梁(2)表面且位于一对微电极(3)之间；悬臂梁(2)呈现长条状，一端固定于基础(4)上，另一端为自由端；在悬臂梁(2)的自由端附着质块(5)；以金属纳米粒子点阵(1)作为传感器的敏感材料；构成纳米粒子点阵(1)的材料可以是各种金属，纳米粒子的粒径为1-500nm，纳米粒子的覆盖率在0.3-0.99个单层之间。微电极(3)由金、银、铜、铝等金属薄膜材料构成。
悬臂梁(2)由具有弹性的绝缘材料制作，也可由带有表面绝缘层的非绝缘体弹性材料制作。
纳米粒子点阵(1)中纳米粒子间不形成欧姆接触。
制备于同一悬臂梁上的纳米粒子点阵(1)和微电极(3)可以是一组也可以多组的并联。
基础(4)与振动源接触产生振动，在基础上质块(5)的惯性驱动下悬臂梁(2)响应振动源的振动并使其表面发生应变，进而使得纳米粒子点阵(1)中的纳米粒子之间距发生变化,而纳米粒子间距的变化导致纳米粒子点阵(1)的电导发生变化；通过测量微电极间电导(或电阻)的变化实现对振动的探测。
振动传感器的频率响应参数能根据质块(5)的质量进行调整，质块(5)不是必需的，某些条件下也可将质块m(5)移去。
本发明还提供一种基于纳米粒子点阵量子输运特性的振动传感器与振动测量方法。在悬臂梁上制备金属电极，并将金属纳米粒子以预定的数密度沉积于电极间形成具有一定电导的金属纳米粒子点阵。当悬臂梁因振动而产生形变时，金属纳米粒子点阵的电导会发生同步变化，通过电极监测该电导值的变化即可实现振动谱的定量测量。基于金属纳米粒子点阵构造的振动传感器具有灵敏度高，性能可靠，易于集成，价格低廉等优点，并且传感器振幅和频率响应特性可以通过改变选择悬臂梁材料和形状参数进行调节。
传感器的原理可由悬臂梁模型解释，假定悬臂梁长度为L，宽度为b，厚度为h，纳米粒子点阵位于悬臂梁固定端的一侧，受迫振动时，假设振动方程为
Figure PCTCN2016070012-appb-000001
悬臂梁自由端产生的扰度为xr＝x，由此引起固定端附近的纳米粒子点阵横向应变为：
Figure PCTCN2016070012-appb-000002
由物理学知识可知纳米粒子点阵的隧穿电阻变化率为：
Figure PCTCN2016070012-appb-000003
其中，R0为纳米粒子初始电阻值，β为与纳米粒子尺寸和温度相关的参数，d为平均纳米粒子间距。由<1>和<2>式联立可得：
Figure PCTCN2016070012-appb-000004
由式<3>可知，通过测量纳米粒子点阵电阻R(t)即可得到振动源的振动信息。
在悬臂梁重量相对可忽略不计的情况下，传感器的共振频率为：
Figure PCTCN2016070012-appb-000005
其中
Figure PCTCN2016070012-appb-000006
为悬臂梁的刚度，E为悬臂梁的弹性模量。
传感器受迫振动频率越接近共振频率，测量信号越强，测量灵敏度越高。因此，传感器的测量性能能够依据悬臂梁的材料种类、尺寸和形状等进行调控，同时还与质块的质量m有关。
基于上述的振动传感器，有两种方法进行振动测量方法：
固定基础，使其处于静止状态，振动源驱动悬臂梁的自由端受迫振动，同时测量纳米粒子点阵的电阻或电导值。如图6A所示。
将基础与振动源之间采用刚性连接，传感器整体随振动源振动，悬臂梁在质块的惯性作用下往复振动，同时测量纳米粒子点阵的电阻或电导值。如图6B所示。
有益效果：本发明提供的一种基于纳米粒子点阵量子输运特性的振动传感器由带有微电极的悬臂梁和分布于微电极之间的纳米粒子点阵组成。纳米粒子点阵的覆盖率可精确控制在0.5-1个单层。通过微电极测量纳米粒子点阵的电导值。将悬臂梁的一段固定，另一端保持自由。在悬臂梁的自由端可附着具有一定质量的质块。在振动源的作用下，质块及悬臂梁自身的惯性使悬臂梁发生同步的较大振幅的振动。根据材料力学知识，当 悬臂梁发生受迫振动时，其表面将发生应变，这导致纳米粒子点阵中的纳米粒子间距发生变化，进而改变纳米粒子点阵的电导值。通过测量微电极间电导(或电阻)的变化实现对振动的探测。
附图说明
图1是本发明所述振动传感器的前视图；
图2是本发明所述振动传感器的俯视图；
图3是本发明实施例所述的微电极设计图；
图4是本发明实施例1中振动传感器测量得到的数据曲线图；
图5是本发明实施例2中振动传感器测量得到的数据曲线图；
图6A和6B分别是本发明中振动传感器的两种振动测量方法示意图。
具体实施方式
实施例1
选取对苯二甲酸乙二醇酯(PET)薄片为悬臂梁材料，具体尺寸为：长度L＝50mm，宽度b＝12mm，厚度h＝0.5mm。采用热蒸发掩膜法在PET的一端制备叉指电极，电极材料为金属银，具体图案及尺寸比例如图3所示,高4.5mm左右，宽度为3mm左右。振动传感器基础采用铝合金材料制备。通过纳米粒子束流气相沉积在叉指电极之间沉积银纳米粒子，形成纳米粒子点阵，纳米粒子束流气相沉积的具体操作方法可参见文献Journal of Vacuum Science and Technology A 12(1994)2925–2930。将制备好的带有纳米粒子点阵的PET衬底的一端固定于基础上，形成悬臂梁结构。使用50Hz的振动源(例如打点计时器)驱动悬臂梁的自由端进行简谐振动，并使用数据采集卡监测电极间电导随振动的变化情况。图4为振动传感器测量得到的振动信号图。
实施例2
选取对苯二甲酸乙二醇酯(PET)薄片为悬臂梁材料，具体尺寸为：长度L＝50mm，宽度b＝12mm，厚度h＝0.5mm。采用热蒸发掩膜法在PET的一端制备叉指电极，电极材料为金属银，具体图案及尺寸如图3所示，振动传感器基础采用铝合金材料制备。将一块质量为50g的铅块粘贴于悬臂梁的末端，通过纳米粒子束流气相沉积在叉指电极之间沉积银纳米粒子，形成纳米粒子点阵，纳米粒子束流气相沉积的具体操作方法可参见文 献Journal of Vacuum Science and Technology A 12(1994)2925–2930。将制备好的带有纳米粒子点阵的PET衬底的一端固定于基础上，形成悬臂梁结构。使用30Hz的振动源(例如打点计时器)驱动悬臂梁的自由端进行简谐振动，并使用数据采集卡监测电极间电导随振动的变化情况。图5为振动传感器测量得到的振动信号图。实施例2相对于实施例1增加了质量为50g的质块m，使用30Hz振动源驱动质块端进行简谐振动时，振动频率相比实施例1更加接近其固有频率，传感器振动幅度有所增大，更易于进行测量。这也说明本发明涉及的传感器能够通过调整质块m的质量优化传感器的测量性能。，悬臂梁是薄板，质块m移去。
以上通过两个个实施例对本发明进行了描述。因此，一个本发明的普通技术人员不需要创造性劳动可以在所附的权利要求的范围内通过各种方案实现它。
虽然本发明已以较佳实施例揭露如上，然其并非用以限定本发明。本发明所属技术领域中具有通常知识者，在不脱离本发明的精神和范围内，当可作各种的更动与润饰。因此，本发明的保护范围当视权利要求书所界定者为准。

Claims (8)

  1. 基于纳米粒子点阵量子输运特性的振动传感器，其特征在于，包括金属纳米粒子点阵(1)、带有微电极(3)的悬臂梁(2)、基础(4)和质块(5)；其中，纳米粒子点阵(1)制备于悬臂梁(2)表面且位于一对微电极(3)之间；悬臂梁(2)呈现长条状，一端固定于基础(4)上，另一端为自由端；在悬臂梁(2)的自由端附着质块(5)；以金属纳米粒子点阵(1)作为传感器的敏感材料；构成纳米粒子点阵(1)的材料是各种金属，纳米粒子的粒径为1-500nm，纳米粒子的覆盖率在0.3-0.99个单层之间。
  2. 如权利要求1所述的基于纳米粒子点阵量子输运特性的振动传感器，其特征在于，微电极(3)由金、银、铜或铝金属薄膜材料构成。
  3. 如权利要求1所述的基于纳米粒子点阵量子输运特性的振动传感器，其特征在于，悬臂梁(2)由具有弹性的绝缘材料制作，或由带有表面绝缘层的非绝缘体弹性材料制作。
  4. 如权利要求1所述的基于纳米粒子点阵量子输运特性的振动传感器，其特征在于，纳米粒子点阵(1)中纳米粒子间不形成欧姆接触。
  5. 如权利要求1所述的基于纳米粒子点阵量子输运特性的振动传感器，其特征在于，制备于同一悬臂梁上的纳米粒子点阵(1)和微电极(3)是一组或多组的并联。
  6. 如权利要求1所述的基于纳米粒子点阵量子输运特性的振动传感方法，其特征在于，基础(4)与振动源接触产生振动，在基础上质块(5)的惯性驱动下悬臂梁(2)响应振动源的振动并使其表面发生应变，进而使得纳米粒子点阵(1)中的纳米粒子之间距发生变化,而纳米粒子间距的变化导致纳米粒子点阵(1)的电导发生变化；通过测量微电极间电导或电阻的变化实现对振动的探测。
  7. 如权利要求1所述的基于纳米粒子点阵量子输运特性的振动传感器，其特征在于，振动传感器的频率响应参数能根据质块(5)的质量进行调整，或质块质量为零。
  8. 如权利要求1-7之一基于纳米粒子点阵量子输运特性的振动传感器进行振动测量方法，其特征是当悬臂梁因振动而产生形变时，金属纳米粒子点阵的电导会发生同步变化，通过电极监测该电导值的变化即可实现振动谱的定量测量。
PCT/CN2016/070012 2016-01-04 2016-01-04 一种基于纳米粒子点阵量子输运特性的振动传感器 Ceased WO2017117700A1 (zh)

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JPS61153529A (ja) * 1984-12-27 1986-07-12 Nissan Motor Co Ltd 半導体振動検出装置
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