WO2017110713A1

WO2017110713A1 - Vaporization device and method of vaporizing fluid

Info

Publication number: WO2017110713A1
Application number: PCT/JP2016/087716
Authority: WO
Inventors: Lucas D. Barkley
Original assignee: Funai Electric Co., Ltd.
Priority date: 2015-12-21
Filing date: 2016-12-19
Publication date: 2017-06-29
Also published as: CN108291713B; JP2019504269A; EP3394510A4; JP6806149B2; CN108291713A; EP3394510A1; EP3394510B1

Abstract

A fluid vaporization device (10), including a fluid supply (12) containing a vaporizable fluid; a bubble pump (14) operative to pump fluid from the fluid supply (12) to an outlet (36) of the bubble pump (14); and a vaporizer (16) located adjacent the outlet (36) of the bubble pump (14) to receive fluid from the bubble pump (14).

Description

VAPORIZATION DEVICE AND METHOD OF VAPORIZING FLUID

This disclosure relates generally to methods and apparatus for metering and vaporizing a fluid. More particularly, this disclosure relates to fluid vaporization structures that utilize a bubble pump to transport fluid to a vaporization structure.

Improvement is desired in the field of microfluidic structures of the type used to dispense a solution from a storage supply to another device where a secondary function may be performed. An example of one secondary function is vaporization of the solution using a heater such that the contents of the solution can be delivered to complete its function in a gaseous state. Such microfluidic structures have many applications, such as for providing vapor therapy, flavored e-cigarettes, chemical vapor reactions, and the like.

[PTL 1] U.S.Pat.No.8,891,949

Conventional structures for dispensing fluid from a fluid supply to a vaporization heater structure desire improvement. For example, conventional devices are often unreliable in providing consistent and desired amounts of fluid to the vaporization heater structure. As part of this, clogging of the flow path and causes of incomplete travel of fluid are common, resulting in uncertainty of the amount of fluid that reaches the vaporizing element.

The disclosure advantageously provides improved apparatus and methods for metering and vaporizing fluids.

The present disclosure relates to methods and apparatus for metering and vaporizing fluids.

In one aspect, there is disclosed a vaporization device, including a fluid supply containing a vaporizable fluid; a bubble pump operative to pump fluid from the fluid supply to an outlet of the bubble pump; and a fluid vaporization heater located adjacent the outlet of the bubble pump to receive fluid from the bubble pump. The vaporization heater is operative to heat and thereby vaporize the received fluid.

In another aspect, there is disclosed a vaporization device, including a fluid supply containing a vaporizable fluid; a bubble pump having an inlet in flow communication with the fluid supply for receiving fluid therefrom, a fluid flow path, flow sequencing heaters located within the fluid flow path, and an outlet. The bubble pump is operative to pump fluid from the fluid supply to the outlet of the bubble pump. A fluid vaporization heater is located adjacent the outlet of the bubble pump. The fluid vaporization heater has a heated fluid contact surface to receive fluid from the outlet of the bubble pump and to heat and thereby vaporize the received fluid.

In a further aspect, there is disclosed a method of vaporizing fluid. The method includes the steps of: providing a fluid supply containing a vaporizable fluid; providing a bubble pump in fluid communication with the fluid supply and operating the bubble pump to pump fluid from the fluid supply to an outlet of the bubble pump; and providing a fluid vaporization heater adjacent the outlet of the bubble pump to receive fluid from the bubble pump, and operating the vaporization heater to heat and thereby vaporize the received fluid.

The vaporization device according to the present invention is reliable in providing consistent and desired amounts of fluid to the vaporization heater structure.

Further advantages of the disclosure are apparent by reference to the detailed description in conjunction with the figures, wherein elements are not to scale so as to more clearly show the details, wherein like reference numbers indicate like elements throughout the several views, and wherein:
FIG. 1 shows a fluid vaporization device according to the disclosure in which a vaporizer is located in a plane substantially parallel to a plane defined by a bubble pump; FIG. 2 shows a fluid vaporization device according to the disclosure in which a vaporizer is located in a plane substantially parallel to a plane defined by a bubble pump; FIG. 3 shows a fluid vaporization device according to the disclosure in which a vaporizer is located in a plane substantially parallel to a plane defined by a bubble pump; FIG. 4 shows an alternate embodiment of fluid vaporization device in which a vaporizer is located in a plane substantially perpendicular to a plane defined by a bubble pump; FIG. 5 shows yet another alternate embodiment of fluid vaporization device in which an angle between a plane defined by vaporizers and a plane defined by a bubble pumps is varied; FIG. 6 shows yet another alternate embodiment of fluid vaporization device in which an angle between a plane defined by vaporizers and a plane defined by a bubble pumps is varied; FIG. 7 shows a further embodiment of a fluid vaporization device having a fluid supply inlet located at an edge of the device; FIG. 8 shows a still further embodiment of a fluid vaporization device having a fluid supply inlet located at an edge of the device, with an angle between a plane defined by a vaporizer and a plane defined by a bubble pump of the device is varied; FIG. 9 shows another embodiment of a fluid vaporization device in which the bubble pump and the vaporizer are fabricated on the same substrate; FIG. 10 shows another embodiment of a fluid vaporization device in which the bubble pump and the vaporizer are fabricated on the same substrate; FIG. 11 shows a fluid vaporization device according to the disclosure in which a vaporizer is located in a plane substantially parallel to a plane defined by a plurality of bubble pumps; FIG. 12 shows a fluid vaporization device according to the disclosure in which a vaporizer is located in a plane substantially parallel to a plane defined by a plurality of bubble pumps; FIG. 13 shows an alternate embodiment of fluid vaporization device in which a vaporizer is located in a plane substantially perpendicular to a plane defined by the bubble pumps; FIG. 14 shows yet another alternate embodiment of fluid vaporization device in which an angle between a plane defined by vaporizers and a plane defined by a plurality of bubble pumps is varied; FIG. 15 shows yet another alternate embodiment of fluid vaporization device in which an angle between a plane defined by vaporizers and a plane defined by a plurality of bubble pumps is varied; FIG. 16 shows a further embodiment of a fluid vaporization device having a fluid supply inlet located at an edge of the device; FIG. 17 shows a still further embodiment of a fluid vaporization device having a fluid supply inlet located at an edge of the device, with an angle between a plane defined by a vaporizer and a plane defined by a plurality of bubble pumps of the device is varied; FIG. 18 shows another alternate embodiment of a fluid vaporization device having multiple bubble pumps and multiple fluid supplies; FIG. 19 shows a further alternate embodiment of a fluid vaporization device having multiple bubble pumps, with each bubble pump having its own fluid supply; FIG. 20 shows another embodiment of a fluid vaporization device in which the bubble pumps and the vaporizer are fabricated on the same substrate; and FIG. 21 shows another embodiment of a fluid vaporization device in which the bubble pumps and the vaporizer are fabricated on the same substrate.

(Embodiment 1)
The disclosure relates to fluid vaporization structures that utilize one or more bubble pumps to transport fluid from one or more fluid supplies to a discrete fluid vaporization structure.

With reference to FIGS. 1-3, there is shown a fluid vaporization device 10 having a fluid supply 12, a bubble pump 14, and a vaporizer 16 (fluid vaporization heater). The device 10 is configured so that the bubble pump 14 desirably transports fluid from the fluid supply 12 directly onto the vaporizer 16.

The device 10 is incorporated onto a printed circuit board 18 to provide a single assembly containing the fluid supply 12, the bubble pump 14, and the vaporizer 16. The bubble pump 14 has a length axis that generally defines a plane, and the vaporizer 16 is provided on a substrate generally defining a plane. As will be noted, in the embodiment of FIGS. 1-3, the plane defined by the bubble pump 14 and the plane defined by the vaporizer 16 are substantially parallel to one another.

The fluid supply 12 is configured as a fluid storage vessel located on a cover substrate 20 of the bubble pump 14. The fluid supply 12 is charged with a desired vaporizable fluid and is generally vented to the atmosphere and contains a desired volume of a fluid, typically a liquid at ambient conditions. As one example, the fluid may be a liquid of a type utilized for vapes or e-cigarettes in a volumetric amount suitable for such usage. A supply inlet 22 is defined between the fluid supply 12 and the cover substrate 20 to provide a fluidic path for desired travel of fluid from the fluid supply12 to the bubble pump 14.

The bubble pump 14 is configured for pumping fluid from the fluid supply 12 to the vaporizer 16. In addition to the cover substrate 20, the bubble pump 14 includes an inlet 30, a base substrate 32, flow sequencing resistive heaters 34, and an outlet 36. During manufacture, a flow feature layer is initially deposited on the base substrate 32. The flow feature layer is then selectively etched to provide the heaters 34 and to define a flow channel 38.

The base substrate 32 may be a semiconductor silicon substrate that is suitable for providing bubble pumps and logic circuits thereon. The cover substrate 20 may be made of silicon or a polymeric material such as polyimide. The resistive heaters 34 and vaporizer 16 may be made of TaAlN, TaAl or other thin film resistor material. The preferred material for the flow feature layer for providing the resistive heaters 34 is TaAlN deposited on the base substrate 32 as by sputtering. The vaporizer 16 may be formed in a similar manner.

Electrical connections and logic circuits are integrated onto the device 10 to control and operate the heaters 34 of the bubble pump 14 and the vaporizer 16, and to otherwise control the transfer of fluid from the fluid supply 12 to the vaporizer 16. For example, voltage pulses may be applied to the heaters 34 in a desired manner to form and transport thermal bubbles of the fluid along the flow channel 38 to deliver fluid as desired to the vaporizer 16 for vaporization of the delivered fluid. Examples of preferred bubble pumps are shown in U.S. Patent No. 8,891,949, issued November 18, 2014, entitled Micro-fluidic pump, and incorporated by reference herein in its entirety.

In basic operation of the bubble pump 14, a voltage pulse is applied to each of the heaters 34 in sequence to generate thermal bubbles in a predetermined manner. For example, every heater 34 can form a bubble from the inlet 30 to the outlet 36 of the channel 38 in sequence to transport fluid as desired from the supply 12 to the vaporization heater 16. Each heater 34 is also desirably permitted to cool down before the next firing sequence in order to prevent overheating and boiling of fluid within the bubble bump 14.

The vaporizer 16 is configured as a microfluidic electrical heating element designed specifically to vaporize the fluid received from the fluid supply 12. The vaporizer 16 is located adjacent and below the outlet 36 of the bubble pump 14. A slot or other flow path is formed through the circuit board 18 for travel of fluid from the outlet 36 of the bubble pump 14 to the vaporizer 16. The vaporizer 16 has a heated fluid contact surface that is open and exposed to the air or other local environment. The heated fluid contact surface heats the received fluid to vaporize the received fluid into the atmosphere or other local environment.

Turning now to FIG. 4, there is shown an alternate embodiment of a fluid vaporization device 50. The device 50 has a fluid supply 52, a bubble pump 54, and a vaporizer 56. The fluid supply 52 and the bubble pump 54 are incorporated onto a printed circuit board 58. The fluid supply 52, the bubble pump 54, and the vaporizer 56 substantially correspond to the fluid supply 12, the bubble pump 14, and the vaporizer 16. However, the vaporizer 56 is spaced from the end of the circuit board 58 so as to be in a plane that is substantially perpendicular to a fluid flow plane defined by the bubble pump 54.

Turning now to FIGS. 5 and 6, there is shown another alternate embodiment of a fluid vaporization device 60. The device 60 substantially corresponds to the device 50, and includes the fluid supply 52, bubble pump 54, and the vaporizer 56, except the circuit board 58 with the bubble pump 54 thereon is oriented at an angle A or an angle A’ or both relative to a plane defined by the vaporizer 56. The angles A and A’ may each vary from about 0 degrees to about 90 degrees. In this regard, it will be appreciated that the depicted angles are provided to show that the angular orientation between the bubble pump 54 and the vaporizer 56 may be varied in any of the three dimensions.

Turning now to FIG. 7, there is shown yet another embodiment of a fluid vaporization device 70. The device 70 substantially corresponds to the device 50, and includes the bubble pump 54, the vaporizer 56 and the circuit board 58. However, a fluid supply 72 is provided having an inlet 74 located at a distal end of the assembly of the bubble pump 54 and the circuit board 58 opposite the vaporizer 56.

Turning now to FIG. 8, there is shown another alternate embodiment of a fluid vaporization device 80. The device 60 substantially corresponds to the device 70, and includes the fluid supply 72, bubble pump 54, and the vaporizer 56, except the circuit board 58 with the bubble pump 54 thereon is oriented at an angle B relative to the plane defined by the vaporizer 56. The angle B may vary from about 0 degrees to about 90 degrees. As in the case of the device 60, the angle B may be in one or more dimensions, as explained in connection with the angles A and A’ of FIGS. 5 and 6.

Turning now to FIGS. 9 and 10 there is shown another alternate embodiment of a fluid vaporization device 90. The device 90 substantially corresponds to the device 10, and includes the fluid supply 12, the bubble pump 14, the vaporizer 16, and the circuit board 18. However, the device 90 is constructed with the bubble pump 14 and the vaporizer 16 fabricated on the same substrate.

(Embodiment 2)
With reference to FIGS. 11-12, there is shown a fluid vaporization device 10A having a fluid supply 12, a plurality of bubble pumps 14, and a vaporizer 16. The device 10A is configured so that the bubble pumps 14 desirably transport fluid from the fluid supply 12 directly onto the vaporizer 16.

The device 10A is incorporated onto a printed circuit board 18 to provide a single assembly containing the fluid supply 12, the bubble pumps 14, and the vaporizer 16. Each of the bubble pumps 14 has a length axis that generally defines a plane, and the vaporizer 16 is provided on a substrate generally defining a plane. As will be noted, in the embodiment of FIGS. 11-12, the common plane defined by the bubble pumps 14 and the plane defined by the vaporizer 16 are substantially parallel to one another.

The fluid supply 12 is configured as a fluid storage vessel located on a cover substrate 20 of each of the bubble pumps 14. The fluid supply 12 is charged with a desired vaporizable fluid and is generally vented to the atmosphere and contains a desired volume of a fluid, typically a liquid at ambient conditions. As one example, the fluid may be a liquid of a type utilized for vapes or e-cigarettes in a volumetric amount suitable for such usage. A supply inlet 22 is defined between the fluid supply 12 and the cover substrate 20 to provide a fluidic path for desired travel of fluid from the fluid supply12 to each of the bubble pumps 14.

Each of the bubble pumps 14 is configured for pumping fluid from the fluid supply 12 to the vaporizer 16. In addition to the cover substrate 20, each bubble pump 14 includes an inlet 30, a base substrate 32, flow sequencing resistive heaters 34, and an outlet 36. During manufacture, a flow feature layer is initially deposited on the base substrate 32. The flow feature layer is then selectively etched to provide the heaters 34 and to define a flow channel 38. The base substrate 32 may be a semiconductor silicon substrate that is suitable for providing bubble pumps and logic circuits thereon. The cover substrate 20 may be made of silicon or a polymeric material such as polyimide. The resistive heaters 34 and vaporizer 16 may be made of TaAlN, TaAl or other thin film resistor material. The preferred material for the flow feature layer for providing the resistive heaters 34 is TaAlN deposited on the base substrate 32 as by sputtering. The vaporizer 16 may be formed in a similar manner.

Electrical connections and logic circuits are integrated onto the device 10A to control and operate the heaters 34 of the bubble pumps 14 and the vaporizer 16, and to otherwise control the transfer of fluid from the fluid supply 12 to the vaporizer 16. For example, voltage pulses may be applied to the heaters 34 in a desired manner to form and transport thermal bubbles of the fluid along the flow channel 38 to deliver fluid as desired to the vaporizer 16 for vaporization of the delivered fluid. Examples of preferred bubble pumps are shown in U.S. Patent No. 8,891,949, issued November 18, 2014, entitled Micro-fluidic pump, and incorporated by reference herein in its entirety.

In basic operation of the bubble pumps 14, a voltage pulse is applied to each of the heaters 34 in sequence to generate thermal bubbles in a predetermined manner. For example, every heater 34 can form a bubble from the inlet 30 to the outlet 36 of the channel 38 in sequence to transport fluid as desired from the supply 12 to the vaporization heater 16. Each heater 34 is also desirably permitted to cool down before the next firing sequence in order to prevent overheating and boiling of fluid within the bubble bump 14. The bubble pumps 14 may be operated to cooperate to provide transport of fluid to the vaporizer 16.

The vaporizer 16 is configured as a microfluidic electrical heating element designed specifically to vaporize the fluid received from the fluid supply 12. The vaporizer 16 is located adjacent and below the outlets 36 of the bubble pumps 14. A slot or other flow path is formed through the circuit board 18 for travel of fluid from the outlet 36 of the bubble pump 14 to the vaporizer 16. The vaporizer 16 has a heated fluid contact surface that is open and exposed to the air or other local environment. The heated fluid contact surface heats the received fluid to vaporize the received fluid into the atmosphere or other local environment. It will be appreciated that the vaporizer 16 may be provided by a single or multiple vaporizer structures.

Turning now to FIG. 13, there is shown an alternate embodiment of a fluid vaporization device 50A. The device 50A has a fluid supply 52, bubble pumps 54, and a vaporizer 56. The fluid supply 52 and the bubble pumps 54 are incorporated onto a printed circuit board 58. The fluid supply 52, the bubble pumps 54, and the vaporizer 56 substantially correspond to the fluid supply 12, the bubble pumps 14, and the vaporizer 16. However, the vaporizer 56 is spaced from the end of the circuit board 58 so as to be in a plane that is substantially perpendicular to a fluid flow plane defined by the bubble pumps 54.

Turning now to FIGS. 14 and 15, there is shown another alternate embodiment of a fluid vaporization device 60A. The device 60A substantially corresponds to the device 50A, and includes the fluid supply 52, bubble pumps 54, and the vaporizer 56, except the circuit board 58 with the bubble pump 54 thereon is oriented at an angle C or an angle C’ or both relative to a plane defined by the vaporizer 56. The angles C and C’ may each vary from about 0 degrees to about 90 degrees. In this regard, it will be appreciated that the depicted angles are provided to show that the angular orientation between the bubble pumps 54 and the vaporizer 56 may be varied in any of the three dimensions.

Turning now to FIG. 16, there is shown yet another embodiment of a fluid vaporization device 70A. The device 70A substantially corresponds to the device 50A, and includes the bubble pumps 54, the vaporizer 56 and the circuit board 58. However, a fluid supply 72 is provided having an inlet 74 located at a distal end of the assembly of the bubble pump 54 and the circuit board 58 opposite the vaporizer 56.

Turning now to FIG. 17, there is shown another alternate embodiment of a fluid vaporization device 80A. The device 60A substantially corresponds to the device 70A, and includes the fluid supply 72, bubble pumps 54, and the vaporizer 56, except the circuit board 58 with the bubble pumps 54 thereon is oriented at an angle D relative to the plane defined by the vaporizer 56. The angle D may vary from about 0 degrees to about 90 degrees. As in the case of the device 60A, the angle D may be in one or more dimensions, as explained in connection with the angles C and C’ of FIGS. 14 and 15.

Turning now to FIG. 18, there is shown another alternate embodiment of a fluid vaporization device 90A. The device 90A substantially corresponds to the device 10A, except the device 90A includes the plurality of bubble pumps 14 in flow communication with a plurality of the fluid supplies 12. It will be appreciated that each of the fluid supplies 12 may include a different vaporizable fluid or fluids having different characteristics or mixtures of fluids.

Turning now to FIG. 19, there is shown another alternate embodiment of a fluid vaporization device 100. The device 100 substantially corresponds to the device 90A, except the device 110 includes the plurality of bubble pumps 14 with the same number of fluid supplies 12. Each of the bubble pumps 14 is in flow communication with a corresponding one of the fluid supplies 12. It will be appreciated that each of the fluid supplies 12 may include a different fluid or fluids having different characteristics or mixtures of fluids.

Turning now to FIGS. 20 and 21 there is shown another alternate embodiment of a fluid vaporization device 110. The device 110 substantially corresponds to the device 10A, and includes the fluid supply 12, the bubble pumps 14, the vaporizer 16, and the circuit board 18. However, the device 110 is constructed with the bubble pumps 14 and the vaporizer 16 fabricated on the same substrate.

The foregoing description of preferred embodiments for this disclosure has been presented for purposes of illustration and description. The description and embodiments are not intended to be exhaustive or to limit the disclosure to the precise forms disclosed. Obvious modifications or variations are possible in light of the above teachings. The embodiments are chosen and described in an effort to provide the best illustrations of the principles of the disclosure and its practical application, and to thereby enable one of ordinary skill in the art to utilize the disclosure in various embodiments and with various modifications as are suited to the particular use contemplated. All such modifications and variations are within the scope of the disclosure as determined by the appended claims when interpreted in accordance with the breadth to which they are fairly, legally, and equitably entitled.

10, 10A, 50, 50A, 60, 60A, 70, 70A, 80, 80A, 90, 90A, 100, 110: fluid vaporization device
12, 52, 72: fluid supply
14, 54: bubble pump
16, 56: vaporizer
18, 58: printed circuit board
20: cover substrate
22: supply inlet
30, 74: inlet
32: base substrate
34: flow sequencing resistive heater
36: outlet
38: flow channel

Claims

A vaporization device, comprising:
a fluid supply containing a vaporizable fluid;
a bubble pump having an inlet in flow communication with the fluid supply for receiving fluid therefrom, a fluid flow path, flow sequencing heaters located within the fluid flow path, and an outlet, wherein the bubble pump is operative to pump fluid from the fluid supply to the outlet of the bubble pump; and
a fluid vaporization heater located adjacent the outlet of the bubble pump, the fluid vaporization heater having a heated fluid contact surface to receive fluid from the outlet of the bubble pump and to heat and thereby vaporize the received fluid.
The vaporization device of claim 1, wherein the bubble pump and the vaporization heater are located on parallel planes.
The vaporization device of claim 1, wherein the bubble pump and the vaporization heater are located on perpendicular planes.
The vaporization device of claim 1, wherein the angular position of the bubble pump relative to the vaporization heater is variable.
The vaporization device of claim 1, wherein the bubble pump and the vaporization heater are fabricated on a common substrate.
The vaporization device of claim 1, wherein the bubble pump and the vaporization heater are fabricated on different substrates.
The vaporization device of any one of claims 1 to 6, wherein the fluid supply is located vertically above the bubble pump.
The vaporization device of claim 1, wherein the fluid supply, bubble pump and vaporization heater are incorporated onto a printed circuit board.
The vaporization device of claim 8, wherein the fluid supply has an inlet located at an end of the printed circuit board opposite the vaporization heater.
A vaporization device, comprising:
a fluid supply containing a vaporizable fluid;
a bubble pump operative to pump fluid from the fluid supply to an outlet of the bubble pump; and
a fluid vaporization heater located adjacent the outlet of the bubble pump to receive fluid from the bubble pump, the vaporization heater being operative to heat and thereby vaporize the received fluid.
The vaporization device of claim 10, wherein the bubble pump and the vaporization heater are located on parallel planes.
The vaporization device of claim 10, wherein the bubble pump and the vaporization heater are located on perpendicular planes.
The vaporization device of claim 10, wherein the angular position of the bubble pump relative to the vaporization heater is variable.
The vaporization device of claim 10, wherein the bubble pump and the vaporization heater are fabricated on the same substrate.
The vaporization device of claim 10, wherein the bubble pump and the vaporization heater are fabricated on different substrates.
The vaporization device of any one of claims 10 to 15, wherein the fluid supply is located vertically above the bubble pump.
The vaporization device of claim 10, wherein the fluid supply, bubble pump and vaporization heater are incorporated onto a printed circuit board.
The vaporization device of claim 17, wherein the fluid supply has an inlet located at an end of the printed circuit board opposite the vaporization heater.
A method of vaporizing fluid, comprising the steps of:
providing a fluid supply containing a vaporizable fluid;
providing a bubble pump in fluid communication with the fluid supply and operating the bubble pump to pump fluid from the fluid supply to an outlet of the bubble pump; and
providing a fluid vaporization heater adjacent the outlet of the bubble pump to receive fluid from the bubble pump, and operating the vaporization heater to heat and thereby vaporize the received fluid.