WO2017006620A1 - Interféromètre de talbot-lau - Google Patents

Interféromètre de talbot-lau Download PDF

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Publication number
WO2017006620A1
WO2017006620A1 PCT/JP2016/064038 JP2016064038W WO2017006620A1 WO 2017006620 A1 WO2017006620 A1 WO 2017006620A1 JP 2016064038 W JP2016064038 W JP 2016064038W WO 2017006620 A1 WO2017006620 A1 WO 2017006620A1
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Prior art keywords
grating
lattice
zeroth
talbot
axis
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PCT/JP2016/064038
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English (en)
Japanese (ja)
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一裕 二瓶
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コニカミノルタ株式会社
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Priority to JP2017527108A priority Critical patent/JP6638728B2/ja
Publication of WO2017006620A1 publication Critical patent/WO2017006620A1/fr

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    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B6/00—Apparatus or devices for radiation diagnosis; Apparatus or devices for radiation diagnosis combined with radiation therapy equipment
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B6/00—Apparatus or devices for radiation diagnosis; Apparatus or devices for radiation diagnosis combined with radiation therapy equipment
    • A61B6/06—Diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T7/00—Details of radiation-measuring instruments

Definitions

  • the present invention relates to a Talbot-Lau interferometer.
  • X-ray phase imaging has attracted attention from the viewpoint of reducing the amount of exposure, and for example, X-ray imaging apparatuses using a Talbot-Lau interferometer have been widely implemented.
  • three X-ray metal gratings of a 0th grating, a first grating, and a second grating are used.
  • the zeroth grating is a normal grating used to make a single X-ray source a multi-light source, and X-rays emitted from the single X-ray source are converted into a plurality of X-rays (a plurality of X-rays). Radiation).
  • Patent Document 1 discloses a joint imaging apparatus using a Talbot-Lau interferometer.
  • the 0th grating, the first grating, and the second grating are held in the interferometer main body so as to be movable, so that the 0th grating and the first grating can be adjusted to be parallel to each other and at a predetermined distance.
  • the first grating and the second grating can be adjusted in parallel to each other and at a predetermined distance.
  • the Talbot-Lau interferometer is For example, vibration is received at a place where the Talbot-Lau interferometer is installed, or vibration is received from a subject.
  • the Talbot-Lau interferometer is subject to temperature changes at the location where the Talbot-Lau interferometer is installed.
  • the parallelism and distance between the zeroth and first gratings change, or the parallelism and distance between the first and second gratings change. End up. As a result, the subject may not be captured with a clear image.
  • the present invention has been made in view of the above-described circumstances, and an object thereof is to provide a Talbot-Lau interferometer that can obtain a clearer image of a subject even when subjected to vibration or temperature change. is there.
  • the Talbot-Lau interferometer according to the present invention includes a vibration applying member that applies vibration to the 0th, 1st and 2nd gratings and the 0th grating, and the 0th grating is movable in the first direction. And rotatable about a second axis extending in a second direction orthogonal to the first direction and about a third axis extending in a third direction orthogonal to each of the first and second directions, The first and second gratings are fixed to each other in a state of being parallel to each other at a predetermined distance, the vibration applying member vibrates the zeroth grating in the first direction, and the second Vibrate around the axis and around the third axis. Therefore, the Talbot-Lau interferometer according to the present invention can obtain a clearer image of the subject even when subjected to vibration or temperature change.
  • FIG. 1 is a perspective view of a Talbot-Lau interferometer in the embodiment.
  • FIG. 2 is a block diagram showing the configuration of the Talbot-Lau interferometer of FIG.
  • FIG. 3 is a schematic view of the main part of the Talbot-Lau interferometer of FIG.
  • FIG. 4 is a schematic diagram showing the positional relationship between the X-ray source and the zeroth, first, and second gratings used in the Talbot-Lau interferometer of FIG.
  • FIG. 5 is an enlarged view of a main part of the Talbot-Lau interferometer shown in FIG.
  • FIG. 5A is a side view and
  • FIG. 5B is a top view.
  • FIG. 6 is an enlarged bottom view of the zeroth lattice held by the holding frame.
  • FIG. 7 is an enlarged perspective view of the 0th lattice body included in the 0th lattice.
  • FIG. 8 is a perspective view of the zeroth grid held in the holding frame and the first and second grids stored in the storage member.
  • the first direction is the Z1-Z2 direction
  • the second direction orthogonal to the first direction is the X1-X2 direction
  • the third direction orthogonal to the first direction and the second direction is the Y1-Y2 direction.
  • the Talbot-Lau interferometer 1 in this embodiment includes an interferometer body 10, a 0th grating (G0 grating) 2 and a first grating (G1 grating) held by the interferometer body 10. ) 3 and the second lattice (G2 lattice) 4, a vibration applying member 5 (shown in FIGS. 5 and 6) for applying vibration to the 0th lattice 2, and a storage housing the first lattice 3 and the second lattice 4. And a member 6.
  • the interferometer main body 10 includes a support column 11, an X-ray source 12, an X-ray imaging unit (imaging unit) 13, an X-ray power supply unit 14 that supplies power to the X-ray source 12, and an X-ray imaging unit 13.
  • the X-ray radiation operation in the X-ray source 12 is controlled by controlling the power supply operation of the camera control unit 15 that controls the imaging operation, the processing unit 16 that controls the entire operation of the interferometer body 10, and the X-ray power supply unit 14. And an X-ray control unit 17 to be controlled.
  • the support column 11 includes a support column main body 110 extending in the Z1-Z2 direction (first direction), and an X-ray source holding unit disposed in order from the Z1 side to the Z2 side of the support column main unit 110. It includes a piece 111, a 0th grid holding unit 112, a 0th grid receiving unit 113, an imaging stage 114 and an imaging unit holding unit 115.
  • the X-ray source holding piece 111 protrudes from the support column main body 110 to the X1 side, and holds the X-ray source 12 at the protruding tip.
  • the 0th lattice receiving portion 113 is a plate-like member as shown in FIGS. 3 and 5, and can receive the 0th lattice 2 from the Z2 side. Note that the 0th lattice receiving portion 113 is formed so as not to hinder the progress of X-rays.
  • the imaging stage 114 is a plate-like member as shown in FIG. 3 and protrudes from the support column main body 110 to the X1 side, and the subject S is placed on the upper surface thereof.
  • the subject placement portion of the imaging placement base 114 on which the subject S is placed is configured not to prevent the progress of X-rays.
  • the imaging unit holding unit 115 is a plate-like member and protrudes from the support column main body 110 to the X1 side, and holds the X-ray imaging unit 13.
  • the 0th lattice holding unit 112 will be described later.
  • the X-ray imaging unit 13 includes an imaging unit main body 130 that captures an X-ray image diffracted by the second grating 3, and interference between a first interference pattern 221 and a second interference pattern 613 described later.
  • the detection part 131 which detects this is provided.
  • the imaging unit main body 130 is, for example, a flat panel detector (FPD) including a two-dimensional image sensor in which a thin film layer including a scintillator that absorbs X-ray energy and emits fluorescence is formed on a light receiving surface, or incident photons are photoelectrically detected.
  • FPD flat panel detector
  • the image is converted into electrons on the surface, the electrons are doubled by the microchannel plate, and the image intensifier unit that emits light by colliding the doubled electron group with the phosphor, and the output light of the image intensifier unit are imaged
  • the detection unit 131 is formed on substantially the entire circumference of the imaging unit main body 130.
  • the detection unit 131 detects an interference pattern generated by the interference between the X-rays that have passed through the first interference pattern 211 and the X-rays that have passed through the second interference pattern 613, and the imaging unit main body 130 is based on the interference result.
  • An X-ray image diffracted by the second grating 3 is picked up.
  • the processing unit 16 is a device that controls the overall operation of the Talbot-Lau interferometer 1 by controlling each unit of the Talbot-Lau interferometer 1 according to the function of each unit. As shown in FIG. 2, the image processing unit 161 and the system control unit 162 are functionally provided.
  • the system control unit 162 controls the X-ray emission operation in the X-ray source 12 via the X-ray power source unit 14 by transmitting and receiving control signals to and from the X-ray control unit 17, and the camera control unit 15
  • the imaging operation of the X-ray imaging unit 13 is controlled by transmitting and receiving control signals between the X-ray imaging unit 13 and the X-ray imaging unit 13.
  • X-rays are emitted toward the subject S, an image generated thereby is captured by the X-ray imaging unit 13, and an image signal is input to the processing unit 16 via the camera control unit 15.
  • the system control unit 162 includes a first power supply signal for operating a first piezoelectric element 51 of a vibration applying member 5 described later, a second power supply signal for operating a second piezoelectric element 52 of a vibration applying member 5 described later, and a vibration applying described later.
  • a third power supply signal that operates the third piezoelectric element 53 of the member 5 is output to each of the first piezoelectric element 51, the second piezoelectric element 52, and the third piezoelectric element 53.
  • the image processing unit 161 processes the image signal generated by the X-ray imaging unit 13 and generates an image of the subject S.
  • the 0th grid 2 includes a 0th grid body 21 and a 0th grid holding frame 22 that holds the 0th grid body 21.
  • the zeroth lattice main body 21 has a predetermined thickness (depth) H in the Z1-Z2 direction and extends linearly in the Y1-Y2 direction on a silicon material such as a silicon wafer.
  • a plurality of X-ray transmission parts 212 having the predetermined thickness H and extending in a line in the Y1-Y2 direction and embedded with metal. 211, and the plurality of X-ray absorption units 211 and the plurality of X-ray transmission units 212 are alternately arranged in parallel. For this reason, the plurality of X-ray absorbers 211 are respectively arranged at predetermined intervals in the X1-X2 direction orthogonal to the Y1-Y2 direction.
  • This interval (pitch) P is constant in this embodiment. That is, the plurality of X-ray absorbers 211 are arranged at equal intervals P in the X1-X2 direction.
  • the X-ray absorption unit 211 is plate-shaped or layered, and the plurality of X-ray transmission units 212 are plate-shaped or layered spaces sandwiched between the X-ray absorption units 211 adjacent to each other.
  • the plurality of X-ray absorption units 211 function to absorb X-rays, and the X-ray transmission units 212 function to transmit X-rays.
  • the width W in the X-ray absorber 211 is the length in the X-ray absorber 211 in the third direction, and the thickness H is the length of the X-ray absorber 211 in the first direction.
  • the 0th grid holding frame 22 is formed of a rectangular tube shape arranged on the entire outer periphery of the 0th grid body 21 in this embodiment, and includes a first interference pattern 221. ing.
  • the first interference pattern 221 includes a plurality of slits arranged at equal intervals along each of the X1-X2 direction and the Y1-Y2 direction. Each slit is formed by embedding metal at a predetermined depth in the thickness direction along the Z1-Z2 direction.
  • the 0th lattice 2 formed in this way is movable in the Z1-Z2 direction to the 0th lattice holding portion 112 of the support column 11, and in the X1-X2 direction (second direction). It is rotatably held around an extending X axis (second axis) 2a and around a Y axis (third axis) 2b extending in the Y1-Y2 direction (third direction).
  • the 0th lattice holding part 112 includes a columnar connecting shaft 112a and a substantially U-shaped holding frame 112b.
  • One end of the connecting shaft 112a is connected to the column main body 110, and the other end extends from the column main body 110 to the X1 side.
  • the holding frame 112b includes a rotating shaft 112c formed to face each other.
  • the holding frame 112b is connected to the connecting shaft 112a so as to be movable in the Z1-Z2 direction and rotatable about the connecting shaft 112a.
  • the 0th lattice 2 is rotatably inserted into the rotation shaft 112c of the holding frame 112b, whereby the 0th lattice 2 is movable in the Z1-Z2 direction and the X axis (second axis) 2a.
  • the Y-axis (third axis) 2b it is held by the 0th grid holding part 112 so as to be rotatable.
  • the vibration applying member 5 includes a first piezoelectric element 51, a second piezoelectric element 52, and a third piezoelectric element 53.
  • the first piezoelectric element 51, the second piezoelectric element 52, and the third piezoelectric element 53 have substantially the same configuration, and each of the piezoelectric elements 51 to 53 has mechanical energy that expands and contracts input electrical energy, that is, mechanical For example, the electric energy of the input is converted into a mechanical expansion / contraction motion by the piezoelectric effect.
  • Such piezoelectric elements 51 to 53 include, for example, a laminate and a pair of external electrodes.
  • the laminated body is formed by alternately laminating a plurality of thin film (layered) piezoelectric layers made of a piezoelectric material and a thin film (layered) internal electrode layer having conductivity.
  • Each of the plurality of internal electrode layers is configured to face the outside with a pair of outer peripheral side surfaces facing each other.
  • the pair of external electrodes are formed along the stacking direction on the pair of outer peripheral side surfaces of the stacked body, supply the electric energy to the stacked body, and are sequentially connected to the plurality of internal electrodes in turn.
  • piezoelectric material examples include lead zirconate titanate (PZT), crystal, lithium niobate (LiNbO 3 ), potassium tantalate niobate (K (Ta, Nb) O 3 ), and barium titanate (BaTiO 3 ).
  • PZT lead zirconate titanate
  • crystal lithium niobate
  • K (Ta, Nb) O 3 potassium tantalate niobate
  • BaTiO 3 barium titanate
  • Inorganic piezoelectric materials such as lithium tantalate (LiTaO 3 ) and strontium titanate (SrTiO 3 ).
  • the first piezoelectric element 51 is an element for vibrating the zeroth lattice 2 around the X axis 2a by expansion and contraction in the stacking direction (the axial direction of the first piezoelectric element 51), and the zeroth lattice holding frame 22 of the zeroth lattice 2.
  • the first piezoelectric element 51 is activated when it receives the first power supply signal.
  • the second piezoelectric element 52 is an element for vibrating the zeroth lattice 2 around the Y axis 2b by expansion and contraction in the stacking direction (the axial direction of the second piezoelectric element 52), and the zeroth lattice holding frame 22 of the zeroth lattice 2.
  • the second piezoelectric element 52 is activated when receiving the second power feeding signal.
  • the third piezoelectric element 53 is an element for vibrating the zeroth lattice 2 in the Z1-Z2 direction by expansion and contraction in the stacking direction (the axial direction of the third piezoelectric element 53).
  • the third piezoelectric element 53 includes two elements.
  • the third piezoelectric element 53 is arranged between the 0th lattice holding frame 22 of the 0th lattice 2 and the 0th lattice receiving portion 113 of the support column 11 in the Y1 side of the 0th lattice holding frame 22 and in the X1-X2 direction.
  • the third piezoelectric element 53 operates when receiving the third power feeding signal.
  • the vibration imparting member 5 is not limited to a piezoelectric actuator using a piezoelectric material, and can be changed as appropriate.
  • an electrostatic actuator can be used, and can be changed as appropriate.
  • the vibration applying member 5 arranged in this way is covered with the upper cover 17a together with the 0th lattice 2 as shown in FIG.
  • the first grating 3 is a diffraction grating that generates a Talbot effect by X-rays emitted from the X-ray source 12.
  • the first grating 3 has a predetermined thickness (depth) in the Z1-Z2 direction, extends linearly in the Y1-Y2 direction, and is alternately arranged in parallel, like the zeroth grating body 21.
  • a plurality of X-ray absorbing portions and a plurality of X-ray transmitting portions are provided.
  • the first grating 3 is configured so as to satisfy the conditions for causing the Talbot effect, and is a grating sufficiently coarser than the wavelength of X-rays emitted from the X-ray source 12, for example, a grating constant (period of diffraction grating). Is a phase type diffraction grating having an X-ray wavelength of about 20 or more.
  • the first grating 3 may be an amplitude type diffraction grating.
  • the first grating 3 is arranged in parallel with a distance (first distance) L4 that is an integral multiple of the wavelength of the X-ray, as shown in FIG. Is done.
  • the second grating 4 is a transmission-type amplitude diffraction grating that is disposed at a position that is approximately the Talbot distance L2 away from the first grating 3 and that diffracts the X-rays diffracted by the first grating 3. Like the first grating 3, the second grating 4 also has a predetermined thickness (depth) in the Z1-Z2 direction, extends linearly in the X1-X2 direction, and is alternately arranged in parallel. A plurality of X-ray absorbing portions and a plurality of X-ray transmitting portions are provided.
  • the second grating 4 is arranged so as to satisfy the first grating 3 that is a phase type diffraction grating and the following expressions 1 and 2.
  • l ⁇ / (a / (L1 + L2 + L3))
  • Z1 (m + 1/2) ⁇ (d2 / ⁇ )
  • l is the coherence distance
  • ⁇ is the wavelength of X-rays (usually the center wavelength)
  • a is the aperture diameter of the X-ray source 12 in a direction substantially perpendicular to the diffraction member of the diffraction grating.
  • L1 is the distance from the X-ray source 12 to the first diffraction grating 3
  • L2 is the distance (second distance) from the first diffraction grating 3 to the second diffraction grating 4
  • L3 is the first 2 is the distance from the diffraction grating 103 to the X-ray imaging unit 13
  • m is an integer
  • d is the period of the diffraction member (period of the diffraction grating, grating constant, distance between the centers of adjacent diffraction members, the pitch P).
  • the storage member 6 includes a frame portion 61, a temperature sensor 62, and a temperature adjustment member 63.
  • the frame portion 61 includes a side portion 611 and a peripheral edge portion 612, and the inside is sealed by these.
  • the side portion 611 is made of a material that can transmit X-rays, for example, glass.
  • the peripheral edge 612 includes a second interference pattern 613 for causing interference with the first interference pattern 221 of the 0th grating 2 as shown in FIG.
  • the second interference pattern 613 includes a plurality of slits arranged at equal intervals along the X1-X2 direction and the Y1-Y2 direction so as to correspond to the first interference pattern 221. Each slit is formed by embedding metal at a predetermined depth in the thickness direction along the Z1-Z2 direction.
  • the first lattice 3 and the second lattice 4 are fixedly arranged in a parallel state at a predetermined distance from each other and enclosed in the frame portion 61. As shown in FIG. 3, the first lattice 3 and the second lattice 4 enclosed in the frame portion 61 satisfy the above (Formula 1) and Formula (2) on the Z2 side of the imaging stage 114. Has been placed. The first grid 3 and the second grid arranged in this way are covered with a lower cover 17b as shown in FIG.
  • the temperature sensor 62 detects the temperature inside the storage member 6, and in this embodiment, is attached to the inner surface of the frame portion 61 as shown in FIG.
  • the temperature adjustment member 63 is an element that adjusts the temperature inside the storage member 6, and includes, for example, a Peltier element.
  • the temperature adjustment member 63 is attached to the inner surface of the frame portion 61, and adjusts to the set temperature range by raising or lowering the temperature inside the storage member 6 based on the temperature detected by the temperature sensor 62.
  • FIG. 9 is an explanatory diagram of the X-ray imaging unit in a state where the 0th grating and the first grating are parallel to each other with a first distance.
  • FIG. 10 is an explanatory diagram of the X-ray imaging unit in a state in which the 0th grating is rotated around the second axis from the parallel state with respect to the first grating.
  • FIG. 11 is an explanatory diagram of the X-ray imaging unit in a state in which the 0th grating is rotated around the third axis from the parallel state with respect to the first grating.
  • the subject S is placed between the 0th grid 2 and the first grid 3 by placing the subject S on the imaging stage 114.
  • the system control unit 162 of the processing unit 16 emits X-rays toward the subject S.
  • a control signal is output to the X-ray controller 17 for irradiation.
  • the X-ray control unit 17 causes the X-ray power supply unit 14 to supply power to the X-ray source 12, and the X-ray source 12 emits X-rays and irradiates the subject S with X-rays.
  • the system control unit 162 includes a first power supply signal that operates a first piezoelectric element 51 of a vibration applying member 5 described later, a second power supply signal that operates a second piezoelectric element 52 of the vibration applying member 5, and a first power supply signal of the vibration applying member 5.
  • a third power supply signal for operating the third piezoelectric element 53 is transmitted in a superimposed manner to the first piezoelectric element 51, the second piezoelectric element 52 and the third piezoelectric element 53.
  • the first piezoelectric element 51, the second piezoelectric element 52, and the third piezoelectric element 53 operate, and the zeroth lattice 2 vibrates in the Z1-Z2 direction, and around the X axis 2a and the Y axis 2b. Vibrate.
  • the irradiated X-rays pass through the first grating 3 through the zeroth grating 2 and the subject S, are diffracted by the first grating 3, and are talvo which is a self-image of the first grating 3 at a position separated by the Talbot distance.
  • An image T is formed.
  • the formed X-ray Talbot image T is diffracted by the second grating 4 to generate moire and form a moire fringe image.
  • the distance between the preset 0th lattice 2 and the first lattice 3 is shifted, or the 0th lattice 2 and the first lattice 3 are not parallel, or the preset first lattice 3 and the second lattice 3 If the distance from 4 is shifted, or the first grating 3 and the second grating 4 are not parallel, the image picked up by the X-ray imaging unit 13 becomes unclear.
  • Such a shift or inclination of the distance between the two lattices 2, 3, 4 adjacent to each other may occur, for example, when the Talbot-Lau interferometer as a whole is subjected to vibrations or temperature changes from the outside.
  • the first piezoelectric element 51, the second piezoelectric element 52, and the third piezoelectric element 53 cause the zeroth lattice 2 to vibrate in the Z1-Z2 direction, and around the X axis 2a and the Y axis 2b. Therefore, during the vibration, the 0th grating 2 comes to a position parallel to the first grating 3 with a first distance L4.
  • the vibration frequency of the 0th lattice 2 that vibrates around the X axis 2a by the first piezoelectric element 51 and the vibration frequency of the 0th lattice 2 that vibrates around the Y axis 2b by the second piezoelectric element 52 are mutually prime, that is, mutually By not having a common divisor other than 1, no miso motion (precession motion) or wrinkle motion occurs, and the 0th lattice 2 is parallel to the first lattice 3 during the vibration. The time will come.
  • the first lattice 3 and the second lattice 4 are sealed in the storage member 6 at a predetermined temperature, the first lattice 3 and the second lattice 4 are subjected to vibration and temperature changes from the outside. Are maintained in a parallel state at a second distance from each other. Accordingly, at a position where the 0th grating 2 is parallel to the first grating 3 by a first distance, the first grating 3 and the second grating 4 are parallel to each other by a second distance. .
  • the detection unit 131 detects an interference pattern caused by the interference between the X-rays that have passed through the first interference pattern 211 and the X-rays that have passed through the second interference pattern 613, and the detection result is used as the processing unit 16. Is output to the system control unit 162, and the system control unit 162 instructs the X-ray imaging unit 13 to instruct imaging via the camera control unit 15 when the interference pattern of the detection result of the detection unit 131 is equally spaced. Output a signal.
  • the X-ray imaging unit 13 captures the moiré fringe image 13a at the timing when the interference pattern is equally spaced by the control signal instructing the imaging. Therefore, at that time, the image 13a detected by the X-ray imaging unit 13 is a clear image as shown in FIG.
  • the X-ray imaging unit 13 outputs the image signal of the moire fringe image to the processing unit 16 via the camera control unit 15. This image signal is processed by the image processing unit 161 of the processing unit 16.
  • the second interference pattern 613 is formed on the storage member 6 that stores the first lattice 3 and the second lattice 4, and the first lattice 3 is indirectly second through the storage member 6.
  • the interference pattern 613 is provided, the present invention is not limited to this configuration and can be changed as appropriate.
  • the second interference pattern 613 is directly formed on one or both of the first grating 3 and the second grating 4, so that either one or both of the first grating 3 and the second grating 4 is formed.
  • the second interference pattern 613 may be provided.
  • X-rays are used, but visible light may be used instead of X-rays, and can be changed as appropriate.
  • a Talbot-Lau interferometer includes an interferometer body having an X-ray source that emits X-rays, and a zeroth array arranged in the first direction in order from the X-ray source and held by the interferometer body. Applying vibration to apply vibration to the zeroth lattice such that the lattice, the first lattice, the second lattice, and the zeroth lattice are in parallel with the first lattice with a predetermined first distance in vibration.
  • the zeroth lattice is movable in the first direction and extends in a second direction perpendicular to the first direction, and the zeroth lattice is between the first direction and the second direction.
  • the interferometer body is rotatably held around a third axis extending in a third direction orthogonal to each other, and the first grating and the second grating are parallel to each other with a predetermined second distance from each other.
  • the vibration applying members are fixed to each other, By vibrating the child in the first direction, to and vibrate in each of said second axis and said third axis.
  • the first grating and the second grating are fixed to each other in a state where they are parallel to each other at a second distance, and thus are subject to vibration and temperature change.
  • the first grating and the second grating can maintain a state of being parallel to each other with a second distance.
  • the vibration applying member moves the 0th lattice in the first direction even if the 0th lattice is subjected to vibration or temperature change and the distance between the 0th lattice and the first lattice changes or the parallel state is shifted.
  • the zeroth grid is spaced apart from the first grid by the first distance during the vibration by vibrating so as to rotate around the second axis and around the third axis. Sometimes it comes to the position of the parallel state. Therefore, the Talbot-Lau interferometer can obtain a clearer image of the subject by imaging the subject at that position.
  • a vibration frequency for vibrating the zeroth lattice about the second axis and a vibration frequency for vibrating the zeroth lattice about the third axis are mutually It is prime.
  • the zeroth lattice does not become parallel to the first lattice when a miso-motion (precession) or heel movement occurs. Therefore, as in the above configuration, the vibration frequency rotated about the second axis and the vibration frequency rotated about the third axis are not prime, that is, have no common divisor other than 1.
  • the Talbot-Lau interferometer can prevent mismovement (precession movement) or wrinkle movement.
  • the first grating and the second grating are sealed inside the housing member so that the temperature can be adjusted.
  • the first grating and the second grating are sealed in the housing member so that the temperature can be adjusted. Therefore, the Talbot-Lau interferometer is reliably in a state of being parallel to each other with a second distance. Maintained. Even if the first grid and the second grid are stored in the storage member, the subject is arranged between the 0th grid and the first grid, so that the imaging is not hindered.
  • the first grating further includes an imaging unit on the opposite side of the first grating across the second grating, and the zeroth grating is And a first interference pattern, wherein at least one of the first grating and the second grating interferes with the first interference pattern when the zeroth grating is parallel to the first grating with the first distance therebetween.
  • a second interference pattern wherein the imaging unit includes an imaging unit body and a detection unit that detects the interference, and the imaging unit body interferes with the first interference pattern based on a detection result of the detection unit. The subject is imaged at a timing at which the interference pattern with the second interference pattern is equally spaced.
  • the imaging unit main body captures an image of the subject based on the detection result of the detection unit, it is easy to make the 0th grating parallel to the first grating with a first distance.
  • the subject can be detected and the subject can be easily and reliably imaged in that state.
  • a Talbot-Lau interferometer can be provided.

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  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

L'invention concerne un interféromètre de Talbot-Lau, lequel comporte un réseau zéro, un premier réseau et un deuxième réseau ainsi qu'un élément d'application de vibrations appliquant des vibrations sur le réseau zéro. Le réseau zéro peut se déplacer dans une première direction et peut tourner autour d'un deuxième axe s'étendant dans une deuxième direction perpendiculaire à la première direction et autour d'un troisième axe s'étendant dans une troisième direction perpendiculaire à la fois à la première et à la deuxième direction. Les premier et deuxième réseaux sont fixes l'un par rapport à l'autre, selon une configuration dans laquelle ils sont parallèles l'un à l'autre et à une distance prédéterminée l'un de l'autre. L'élément d'application de vibrations fait vibrer le réseau zéro dans la première direction et autour de chacun des deuxième et troisième axes.
PCT/JP2016/064038 2015-07-03 2016-05-11 Interféromètre de talbot-lau WO2017006620A1 (fr)

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JP2017527108A JP6638728B2 (ja) 2015-07-03 2016-05-11 タルボ・ロー干渉計

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JP2015134258 2015-07-03

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Cited By (1)

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Publication number Priority date Publication date Assignee Title
US10929839B2 (en) 2015-12-31 2021-02-23 Mastercard International Incorporated Digital wallet with installments and combo-card

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WO2010146503A1 (fr) * 2009-06-16 2010-12-23 Koninklijke Philips Electronics N. V. Procede de correction pour imagerie de contraste de phase differentielle
WO2011070488A1 (fr) * 2009-12-10 2011-06-16 Koninklijke Philips Electronics N.V. Imagerie par contraste de phase
WO2013148010A1 (fr) * 2012-03-30 2013-10-03 Carestream Health, Inc. Système pci hybride pour imagerie radiographique à des fins médicales
JP2014506352A (ja) * 2010-12-13 2014-03-13 パウル・シェラー・インスティトゥート 回折格子の装置による位相コントラストイメージング用に制約付き最適化を使用して画像積分する方法およびシステム
WO2014100063A1 (fr) * 2012-12-21 2014-06-26 Carestream Health, Inc. Imagerie médicale à contraste de phase différentiel basée sur un réseau radiographique

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010146503A1 (fr) * 2009-06-16 2010-12-23 Koninklijke Philips Electronics N. V. Procede de correction pour imagerie de contraste de phase differentielle
WO2011070488A1 (fr) * 2009-12-10 2011-06-16 Koninklijke Philips Electronics N.V. Imagerie par contraste de phase
JP2014506352A (ja) * 2010-12-13 2014-03-13 パウル・シェラー・インスティトゥート 回折格子の装置による位相コントラストイメージング用に制約付き最適化を使用して画像積分する方法およびシステム
WO2013148010A1 (fr) * 2012-03-30 2013-10-03 Carestream Health, Inc. Système pci hybride pour imagerie radiographique à des fins médicales
WO2014100063A1 (fr) * 2012-12-21 2014-06-26 Carestream Health, Inc. Imagerie médicale à contraste de phase différentiel basée sur un réseau radiographique

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10929839B2 (en) 2015-12-31 2021-02-23 Mastercard International Incorporated Digital wallet with installments and combo-card

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JPWO2017006620A1 (ja) 2018-04-19

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