WO2016199625A1 - オゾン生成装置 - Google Patents
オゾン生成装置 Download PDFInfo
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- WO2016199625A1 WO2016199625A1 PCT/JP2016/066107 JP2016066107W WO2016199625A1 WO 2016199625 A1 WO2016199625 A1 WO 2016199625A1 JP 2016066107 W JP2016066107 W JP 2016066107W WO 2016199625 A1 WO2016199625 A1 WO 2016199625A1
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- electrode
- discharge surface
- discharge
- dielectric
- ozone generator
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B13/00—Oxygen; Ozone; Oxides or hydroxides in general
- C01B13/10—Preparation of ozone
- C01B13/11—Preparation of ozone by electric discharge
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2201/00—Preparation of ozone by electrical discharge
- C01B2201/20—Electrodes used for obtaining electrical discharge
- C01B2201/22—Constructional details of the electrodes
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2201/00—Preparation of ozone by electrical discharge
- C01B2201/30—Dielectrics used in the electrical dischargers
- C01B2201/32—Constructional details of the dielectrics
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2201/00—Preparation of ozone by electrical discharge
- C01B2201/60—Feed streams for electrical dischargers
- C01B2201/64—Oxygen
Definitions
- the present invention relates to an ozone generator that generates a discharge from a dielectric surface as a discharge surface and generates ozone from oxygen in a space facing the discharge surface.
- An ozone generator that uses the surface of a dielectric as a discharge surface includes a dielectric, and a discharge electrode and a counter electrode provided inside the dielectric.
- a drive voltage is applied between the discharge electrode and the counter electrode to cause discharge in the air near the discharge surface and the discharge surface, and generate ozone from oxygen in the air.
- the discharge surface is viewed in a state where the ozone generator is discharging, light is emitted near the edges of the discharge electrode and the counter electrode, but light is emitted particularly brightly near the edge of the electrode such as the tip of the discharge electrode and the counter electrode. This is because the electric field strength is stronger in the vicinity of the position where the edge of the electrode is bent than in the vicinity of the position where the edge of the electrode extends in a straight line.
- Patent Document 1 a technique for making the electric field intensity distribution on the discharge surface uniform has been proposed (see, for example, Patent Document 1).
- the ozone generator disclosed in Patent Document 1 rounds the tip of the discharge electrode and the tip of the counter electrode, thereby suppressing the electric field strength in the vicinity of the electrode tip.
- the electrode tip is rounded, as in the ozone generator disclosed in Patent Document 1, the electrode is compared with the side of the discharge electrode or the counter electrode, that is, the edge of the electrode extends in a straight line.
- the electric field strength is stronger at the tip, and the tip of the electrode emits light more brightly than the side of the electrode on the discharge surface. Therefore, even if the electrode tip portions of the discharge electrode and the counter electrode are rounded, it is difficult to suppress the vicinity of the electrode tip portion from emitting bright light on the discharge surface and causing deterioration.
- an object of the present invention is to provide an ozone generator that can make the electric field intensity distribution on the discharge surface uniform, regardless of the electrode shape of the discharge electrode and the counter electrode.
- the ozone generating apparatus of the present invention comprises a dielectric part having a discharge surface, and a first electrode and a second electrode that extend side by side inside the dielectric part and face the discharge surface, respectively,
- the first electrode includes, as viewed from the discharge surface, a linear portion in which an edge of the electrode extends in a direction in which the first electrode extends, and a curved portion in which an edge of the electrode extends from the linear portion,
- the capacitance generated per unit area of the first electrode between the first electrode and the discharge surface is smaller in the vicinity of the curved portion than in the vicinity of the linear portion.
- a capacitance generated per unit area of the first electrode between the first electrode and the discharge surface is referred to as a first partial capacitance.
- electric field concentration can be suppressed in the vicinity of the curved portion on the discharge surface as compared with the case where the first partial capacitance is equal between the vicinity of the curved portion and the vicinity of the straight portion.
- the electric field strength is stronger in the vicinity of the curved portion than in the vicinity of the straight portion. Therefore, if the electric field concentration in the vicinity of the curved portion can be suppressed as described above, the discharge electrode Even if the counter electrode has any electrode shape, the electric field intensity distribution on the discharge surface can be made uniform.
- the dielectric portion includes a relative permittivity changing portion that covers the curved portion when viewed from the discharge surface, and the relative permittivity changing portion has a lower relative permittivity than the dielectric portion.
- the first partial capacitance can be reduced in the vicinity of the curved portion without changing the interval between the curved portion and the discharge surface.
- the distance between the first electrode and the discharge surface is preferably shorter in the vicinity of the linear portion than in the vicinity of the curved portion.
- the first partial capacitance can be reduced in the vicinity of the curved portion without changing the relative dielectric constant of the dielectric portion in the vicinity of the curved portion.
- the dielectric portion may include a protrusion that covers the curved portion when viewed from the discharge surface, and the protrusion may protrude from the discharge surface as compared to the surroundings. Further, the first electrode may be bent in a direction in which the vicinity of the bent portion is separated from the discharge surface.
- the distance between the first electrode and the discharge surface is further away in the vicinity of the curved portion than in the vicinity of the straight portion.
- the relative dielectric constant changing portion extends in a direction intersecting with the linear portion as viewed from the discharge surface and overlaps the second electrode.
- the protruding portion extends in a direction intersecting with the linear portion as viewed from the discharge surface and overlaps the second electrode.
- a capacitance generated per unit area of the second electrode between the second electrode and the discharge surface is referred to as a second partial capacitance.
- both the first partial capacitance and the second partial capacitance are smaller in the vicinity of the curved portion than in the vicinity of the straight portion, so that the electric field concentration in the vicinity of the curved portion on the discharge surface. Can be further suppressed.
- the second electrode includes a straight line portion in which an edge of the electrode extends in a direction in which the second electrode extends as viewed from the discharge surface, and a curved portion in which the edge of the electrode extends from the straight line portion,
- the capacitance (second partial capacitance) generated per unit area of the second electrode between the second electrode and the discharge surface is closer to the curved portion than to the linear portion. Is preferably smaller.
- the electric field concentration can be suppressed even in the vicinity of the curved portion of the second electrode on the discharge surface, and the electric field intensity distribution on the discharge surface can be made more uniform.
- the ozone generator includes a plurality of pairs of the first electrode and the second electrode arranged in a direction orthogonal to a direction in which the first electrode and the second electrode extend as viewed from the discharge surface, A drive voltage source that outputs an N (N ⁇ 3) -phase drive voltage having a repetitive pattern and a circulating phase difference, and the plurality of pairs of the first electrode and the second electrode are arranged in the nth order according to their arrangement order. It is preferable that the driving voltage of the (1 ⁇ n ⁇ N) phase is input from the driving voltage source. In this configuration, the electric field intensity distribution in the vicinity of the discharge surface changes so as to circulate along the direction in which the electrode pairs are arranged.
- the gas in the space moves in the vicinity of the discharge surface along the direction in which the electrode pairs are arranged under the influence of the electric field intensity distribution. For this reason, the supply of oxygen to the discharge surface and the detachment of ozone from the discharge surface are promoted, and the amount of ozone generated can be increased. Further, the generation of gas flow makes it difficult for dust and the like to be adsorbed on the discharge surface, and the reliability of the ozone generator is improved.
- the ozone generating apparatus of the present invention includes a dielectric part having a discharge surface, and a first electrode and a second electrode that extend side by side inside the dielectric part and respectively face the discharge surface,
- the first electrode includes, as viewed from the discharge surface, a linear portion in which an edge of the electrode extends in a direction in which the first electrode extends, and a curved portion in which the edge of the electrode extends from the linear portion.
- the dielectric portion includes a protruding portion that covers the curved portion when viewed from the discharge surface, The protruding portion protrudes in the thickness direction from the discharge surface.
- the first partial capacitance in the vicinity of the curved portion is reduced by providing the protruding portion so as to cover the curved portion. For this reason, the electric field strength generated in the vicinity of the curved portion on the discharge surface is suppressed. Thereby, the electric field intensity distribution on the discharge surface can be made uniform.
- the said protrusion part is extended in the direction which cross
- the electric field concentration can be suppressed in the vicinity of the curved portion on the discharge surface, so that the electric field intensity distribution on the discharge surface can be made uniform.
- the discharge surface it is possible to make it difficult to deposit deposits and spread defects near the curved portion, and the reliability of the ozone generator can be improved.
- FIG. 1 is a plan view seen from the discharge surface of the ozone generator according to the first embodiment.
- FIG. 2 is a cross-sectional view seen from the front of the ozone generator according to the first embodiment.
- FIG. 3 is a schematic diagram showing lines of electric force generated in the ozone generator according to the first embodiment.
- FIGS. 4A and 4B are schematic diagrams for explaining the capacitance generated in the ozone generator according to the first embodiment.
- FIG. 5 is a plan view seen from the discharge surface of the ozone generator according to the second embodiment.
- 6A and 6B are cross-sectional views as viewed from the front of the ozone generator according to the third embodiment.
- 7A and 7B are cross-sectional views seen from the front of the ozone generator according to the fourth embodiment.
- FIG. 8 is a plan view seen from the discharge surface of the ozone generator according to the fifth embodiment.
- FIG. 9A is an electrical connection diagram of the ozone generator according to the sixth embodiment.
- FIG. 9B is a time waveform diagram of the drive voltages V 1 to V 4 .
- FIG. 10 is a diagram illustrating an example of a flowchart of a manufacturing method of the ozone generator.
- FIG. 1 is a plan view seen from the discharge surface of the ozone generator 10 according to the first embodiment of the present invention.
- FIG. 2 is a cross-sectional view of the ozone generator 10 as viewed from the front.
- the ozone generator 10 includes a dielectric part 1, a discharge electrode 2, a counter electrode 3, and a drive voltage source 4.
- the dielectric part 1 is made of a dielectric material.
- the dielectric portion 1 includes a discharge surface (top surface) 11, a bottom surface 12, a left side surface 13, a right side surface 14, a front surface 15, and a back surface 16.
- the dielectric portion 1 is a rectangular flat plate when viewed from the discharge surface 11.
- the shape seen from the discharge surface 11 of the dielectric portion 1 is not limited to a square shape, and may be an arbitrary shape such as a polygonal shape, a circular shape, or an elliptical shape.
- the discharge electrode 2 and the counter electrode 3 are provided in at least one pair inside the dielectric portion 1. At least a partial region of each of the discharge electrode 2 and the counter electrode 3 faces the discharge surface 11 in a direction from the bottom surface 12 toward the discharge surface 11 (hereinafter referred to as a thickness direction). Further, the discharge electrode 2 and the counter electrode 3 extend along a direction (hereinafter referred to as a length direction) from the left side surface 13 toward the right side surface 14.
- the discharge electrode 2 and the counter electrode 3 are each made of a planar conductor extending parallel to the discharge surface 11 and are opposed to each other in the thickness direction.
- the discharge electrode 2 is located closer to the discharge surface 11 than the counter electrode 3.
- the counter electrode 3 is wider in the width direction than the discharge electrode 2 and protrudes from both sides of the discharge electrode 2 in the width direction when viewed from the discharge surface 11.
- the discharge electrode 2 has a tip portion 21 that terminates inside the dielectric portion 1 on the left side surface 13 side, and a straight portion 22 that reaches the right side surface 14 of the dielectric portion 1 on the right side surface 14 side of the tip portion 21. have.
- the straight portion 22 has an electrode edge extending along the length direction.
- the tip 21 is bent from the straight line 32 and extends in the width direction. Therefore, the distal end portion 21 corresponds to a “curved portion” in the discharge electrode 2.
- the counter electrode 3 has a distal end portion 31 that terminates inside the dielectric portion 1 on the right side surface 14 side, and a linear portion 32 that reaches the left side surface 13 of the dielectric portion 1 on the left side surface 13 side of the distal end portion 31. is doing.
- the straight portion 32 has the edge of the electrode along the length direction.
- the distal end portion 31 is bent from the straight portion 32 and extends along the width direction. Therefore, the distal end portion 31 corresponds to a “curved portion” in the counter electrode 3.
- the dielectric portion 1 includes projecting portions 17 and 18 on the discharge surface 11.
- the protruding portions 17 and 18 are portions protruding in the thickness direction from the periphery on the discharge surface 11 of the dielectric portion 1.
- the discharge surface 11 is flat except for the protrusions 17 and 18.
- the protrusion 17 extends in the width direction so as to cover the distal end portion 21 of the discharge electrode 2 when viewing the discharge surface 11.
- the protrusion 18 extends in the width direction so as to cover the tip 31 of the counter electrode 3 when viewed from the discharge surface 11.
- the drive voltage source 4 is electrically connected between one end of the discharge electrode 2 on the straight line portion 22 side and one end of the counter electrode 3 on the straight line portion 32 side.
- the drive voltage source 4 connects the counter electrode 3 to a reference potential, and applies an alternating voltage with respect to the reference potential to the discharge electrode 2.
- an alternating electric field is generated around the discharge electrode 2 and the counter electrode 3.
- FIG. 3 is a schematic diagram showing an alternating electric field around the discharge electrode 2 and the counter electrode 3 in the ozone generator 10.
- electric lines of force generated by the alternating electric field are indicated by dotted lines.
- This alternating electric field extends from the discharge electrode 2 only through the inside of the dielectric portion 1 to the counter electrode 3 as it is, and from the discharge electrode 2 to the discharge surface 11 side and to the outside of the dielectric portion 1.
- An electric field line B that spreads and returns to the inside of the dielectric portion 1 and reaches the counter electrode 3 is generated. If the electric lines of force B become higher than a certain level outside the dielectric part 1, that is, if the electric field strength outside the dielectric part 1 becomes higher than a certain degree, A dielectric breakdown occurs in the space, which causes a discharge.
- the electric lines of force B are dense in a region overlapping the counter electrode 3 on the discharge surface 11 from the edge of the discharge electrode 2 to the outer side in the vicinity, so that discharge easily occurs in this region.
- FIG. 4A is a schematic diagram of an equivalent circuit in which the capacitance between the counter electrode 3 generated per unit area in the discharge electrode 2 is expressed as a lumped constant.
- the capacitance C between the discharge electrode 2 and the counter electrode 3 generated per unit area generates a partial capacitance Ca that generates an electric field line A and an electric field line B in FIG. It can be regarded as a capacitance circuit in which the partial capacitance Cb is connected in parallel. That is, the capacitance C can be expressed by the following equation.
- the partial capacitance Cb due to the electric force line B further includes the first partial capacitance C1 that generates the electric force line B between the discharge electrode 2 and the discharge surface 11, and the counter electrode 3.
- a second partial capacitance C2 that generates electric lines of force B between the discharge surface 11 and a third partial capacitance C3 that generates electric lines of force B in the space near the discharge surface 11 or the discharge surface 11; Can be regarded as a capacitor circuit connected in series. That is, the partial capacitance Cb due to the electric lines of force B can be expressed by the following equation.
- the ozone generator 10 having such an equivalent circuit includes the protrusions 17 and 18 shown in FIG. 1 and FIG. In the vicinity of the portions 21 and 31, the thickness from the discharge electrode 2 or the counter electrode 3 to the discharge surface 11 is larger than that in the vicinity of the straight portions 22 and 32 in the dielectric portion 1. As a result, the first partial capacitance C1 and the second partial capacitance C2 are closer to the tip portions 21 and 31 in the dielectric portion 1 than in the vicinity of the straight portions 22 and 32 in the dielectric portion 1. It will be small.
- the first partial capacitance C1 is such that the distance from the discharge electrode 2 to the discharge surface 11 is L1, the vacuum dielectric constant is ⁇ 0, the relative dielectric constant in the dielectric portion 1 is ⁇ r, and the area in the discharge electrode 2 is
- the second partial capacitance C2 can be expressed by the following equation when the distance from the counter electrode 3 to the discharge surface 11 is L2. it can.
- the first partial capacitance generated in the portion where the protrusions 17 and 18 are provided is indicated as C1 ′
- the second partial capacitance is indicated as C2 ′
- the protrusion 17 , 18 is a schematic diagram showing a first partial capacitance as C1 ′′ and a second partial capacitance as C2 ′′.
- the thickness from the discharge surface 11 to the discharge electrode 2 and the counter electrode 3 is large in the portion where the protruding portions 17 and 18 are provided, and is small in the portion where the protruding portions 17 and 18 are not provided. Therefore, in light of the above-described derivation formulas for the partial capacitances C1 and C2, the partial capacitances C1 ′ and C2 ′ at the portion where the protrusions 17 and 18 are provided are provided with the protrusions 17 and 18. This is smaller than the partial capacitances C1 ′′ and C2 ′′ at the portion that is not provided.
- V3 (C12 / (C3 + C12)) ⁇ V0
- a portion where the edge of the electrode bends like the tip portions 21 and 31 in the discharge electrode 2 or the counter electrode 3 is closer to the electric field in the vicinity than a portion where the edge of the electrode is linear like the straight portions 22 and 32.
- the protrusions 17 and 18 are provided so as to overlap the tip portions 21 and 31 when viewed from the discharge surface 11, the discharge is generated near the tip portions 21 and 31 on the discharge surface 11. Can be made difficult to occur. Therefore, it is possible to suppress the occurrence of excessive discharge in the vicinity of the tip portions 21 and 31 on the discharge surface 11 and to prevent the problem of growing deposits and defects from becoming obvious.
- this invention is not limited to this structural example.
- two or more discharge electrodes 2 and counter electrodes 3 can be provided.
- the protrusions 17 and 18 can be provided so as to extend over the plurality of pairs of discharge electrodes 2 and counter electrodes 3.
- a protruding portion can be provided so as to individually overlap the tip portions 21 and 31.
- the present invention is not limited to this configuration example.
- the functions of the discharge electrode 2 and the counter electrode 3 can be interchanged, and the electrode closer to the discharge surface 11 can be used as the counter electrode, and the electrode far from the discharge surface 11 can be used as the discharge electrode.
- the protruding portion can be provided so as to cover only one of the tip portions. In this case, since the electric field concentration is most likely in the vicinity of the tip located near the discharge surface 11, it is preferable to provide a protrusion so as to cover the tip located near the discharge surface 11.
- the tip portions 21 and 31 of the discharge electrode 2 and the counter electrode 3 are configured as “curved portions” in which the edges of the electrodes are seen when viewed from the discharge surface 11, and the projecting portions 17 and 18 cover the configuration example.
- the present invention is not limited to this configuration example.
- a portion that bends in a crank shape may be provided near the center of the discharge electrode 2 or the counter electrode 3 in the length direction, and the bent portion may be defined as a “curved portion” and covered with a protruding portion.
- FIG. 5 is a plan view seen from the discharge surface 11 of the ozone generator 10A according to the second embodiment of the present invention.
- the ozone generator 10A includes a dielectric portion 1A, a discharge electrode 2A, a counter electrode 3A, and a drive voltage source 4 (not shown).
- the discharge electrode 2A and the counter electrode 3A are each made of a planar conductor extending in parallel with the discharge surface 11, and are arranged in the width direction without facing the thickness direction.
- two discharge electrodes 2A and two counter electrodes 3A are provided alternately, that is, two pairs.
- the discharge electrode 2A and the counter electrode 3A are provided at the same height position in the thickness direction. Moreover, the dimension of each width direction is the same.
- the discharge surface 11 of the dielectric portion 1A is provided with the protrusion 17 so as to cover the tip portion 21 of the discharge electrode 2A, and the protrusion that covers the tip portion 31 of the counter electrode 3A.
- a portion 18 is provided.
- the projecting portions 17 and 18 cover the vicinity of the tip portions 21 and 31, the distance from the discharge electrode 2A or the counter electrode 3A to the discharge surface 11 can be increased. Therefore, also in this embodiment, the first partial capacitance C1 and the second partial capacitance C2 can be reduced in the vicinity of the tip portions 21 and 31, and the tip portion 21 on the discharge surface 11 can be reduced. , 31 can be weakened. Thereby, even in the ozone generation apparatus 10A of the present embodiment, it is possible to suppress the occurrence of excessive discharge in the vicinity of the tip portions 21 and 31 on the discharge surface 11 and to reveal the problem of deposits and defects growing. Can be prevented.
- the configuration can be appropriately changed as described at the end of the first embodiment.
- the number of pairs of the discharge electrode 2A and the counter electrode 3A can be changed.
- a protrusion part can be provided so that it may overlap separately for every pair of discharge electrode 2A and counter electrode 3A.
- a protruding portion can be provided so as to cover only one of the tip portion 21 of the discharge electrode 2A and the tip portion 31 of the counter electrode 3A.
- a bent portion such as a crank shape may be provided near the center in the length direction of the discharge electrode 2A or the counter electrode 3A, and the bent portion may be covered with a protruding portion as a “curved portion”.
- FIG. 6A is a cross-sectional view seen from the front of an ozone generator 10B according to the third embodiment of the present invention.
- the ozone generator 10B includes a dielectric part 1B, a discharge electrode 2B, a counter electrode 3B, and a drive voltage source 4 (not shown).
- the dielectric portion 1B is not provided with a protruding portion, and the entire discharge surface 11 is substantially flat.
- curved portions 17B and 18B are provided on the discharge electrode 2B and the counter electrode 3B.
- the discharge electrode 2B and the counter electrode 3B are made of a planar conductor as in the first embodiment, but are curved from a direction parallel to the discharge surface 11 at a position where the curved portions 17B and 18B are provided when viewed from the front, The region closer to the tip portions 21 and 31 than the curved portions 17B and 18B is further away from the discharge surface 11 than the region closer to the straight portions 22 and 32 than the curved portions 17B and 18B. Thereby, in the ozone production
- the first partial capacitance C1 and the second partial capacitance C2 can be reduced in the vicinity of the tip portions 21 and 31, and the tip portion 21 on the discharge surface 11 can be reduced. , 31 can be weakened. Thereby, also in the ozone generator 10B of this embodiment, it is suppressed that the excessive discharge arises in the discharge surface 11 in the vicinity of the front-end
- the configuration can be appropriately changed as described at the end of the first embodiment.
- the number of pairs of the discharge electrode 2B and the counter electrode 3B can be changed.
- a bent portion such as a crank shape may be provided near the center in the length direction of the discharge electrode 2B or the counter electrode 3B, and the bent portion may be covered with a protruding portion as a “curved portion”.
- FIG. 6B is a cross-sectional view of the ozone generator 10C according to the modification of the third embodiment as viewed from the front.
- the ozone generator 10C includes a dielectric portion 1C, a discharge electrode 2C, a counter electrode 3C, and a drive voltage source 4 (not shown).
- the ozone generator 10C includes the discharge electrode 2C and the counter electrode 3C provided at the same height position in the thickness direction and arranged in the width direction.
- the curved portions 17C and 18C are provided on the discharge electrode 2C and the counter electrode 3C, so that the vicinity of the tip portions 21 and 31 is separated from the discharge surface 11.
- the third embodiment in which the curved portion is provided on the discharge electrode and the counter electrode can be realized.
- FIG. 7A is a cross-sectional view seen from the front of an ozone generator 10D according to the fourth embodiment of the present invention.
- the ozone generator 10D includes a dielectric part 1D, a discharge electrode 2D, a counter electrode 3D, and a drive voltage source 4 (not shown).
- dielectric part 1D is not provided with the protrusion part and the curved part, and it replaces with them and is provided with dielectric constant change part 17D, 18D.
- the relative permittivity changing portions 17D and 18D are portions made of a dielectric material having a relative permittivity lower than that of the periphery of the dielectric portion 1D.
- the relative dielectric constant changing portions 17D and 18D are provided so as to cover the tip portions 21 and 31 of the discharge electrode 2D and the counter electrode 3D.
- ⁇ r is a relative permittivity
- the relative permittivity changing portions 17D and 18D having a relative permittivity lower than that of the surroundings are provided in the vicinity of the distal end portions 21 and 31 even if no protruding portion or curved portion is provided.
- the first partial capacitance C1 and the second partial capacitance C2 can also be reduced, and the electric field strength in the vicinity of the tip portions 21 and 31 on the discharge surface 11 can be reduced.
- the configuration can be appropriately changed as described at the end of the first embodiment.
- the number of pairs of the discharge electrode 2D and the counter electrode 3D can be changed.
- a relative dielectric constant changing part can be provided so as to cover only one of the tip part 21 of the discharge electrode 2D and the tip part 31 of the counter electrode 3D.
- a bent portion such as a crank shape may be provided near the center in the length direction of the discharge electrode 2D and the counter electrode 3D, and the bent portion may be defined as a “curved portion” and covered with a relative dielectric constant changing portion.
- FIG. 7B is a cross-sectional view of the ozone generator 10E according to the modification of the fourth embodiment as viewed from the front.
- the ozone generator 10E includes a dielectric portion 1E, a discharge electrode 2E, a counter electrode 3E, and a drive voltage source 4 (not shown).
- the discharge electrode 2E and the counter electrode 3E are arranged at the same height as in the second embodiment.
- the relative permittivity changing portions 17E and 18E are provided so as to overlap the discharge electrode 2E and the counter electrode 3E, whereby the partial capacitances C1 and C2 near the tip portions 21 and 31 are provided. Is made smaller.
- the fourth embodiment in which the relative dielectric constant changing unit is provided can be realized even when the discharge electrode and the counter electrode are arranged at the same height.
- FIG. 8 is a plan view seen from the discharge surface 11 of the ozone generator 10F according to the fifth embodiment of the present invention.
- the ozone generator 10F includes a dielectric portion 1F, a discharge electrode 2F, a counter electrode 3F, and a drive voltage source 4 (not shown).
- This embodiment is different from the second embodiment in the shapes of projecting portions 17F and 18F included in the dielectric portion 1F.
- the protrusions 17F are individually provided for the respective discharge electrodes 2F, and are provided so as to overlap only the respective tip portions 21.
- the protruding portion 18F is provided individually for each counter electrode 3F, and is provided so as to overlap only the tip portion 31 thereof.
- a protrusion part can also be provided.
- FIG. 9A is an electrical connection diagram of an ozone generator 10G according to the sixth embodiment of the present invention.
- the ozone generator 10G has the same general configuration as that of the first embodiment described above, and includes a dielectric portion 1G, a discharge electrode 2G, a counter electrode 3G (not shown), and a drive voltage source 4G. .
- four or more pairs of discharge electrodes 2G and counter electrodes 3G are provided.
- Each pair of the discharge electrode 2G and the counter electrode 3G is divided into four sets in the order in which they are arranged in the width direction.
- the drive voltage source 4G is configured to output the same four-phase drive voltages V 1 to V 4 as the number of pairs of the discharge electrode 2G and the counter electrode 3G.
- Each set of discharge electrodes 2G is configured to receive drive voltages V 1 to V 4 having a phase number corresponding to the set number.
- FIG. 9B is a time waveform diagram of the drive voltages V 1 to V 4 .
- the drive voltages V 1 to V 4 have the same repeating pattern and a phase difference of 90 ° in the order of the phase numbers. Therefore, the drive voltages V 1 to V 4 have a relationship in which the phase difference circulates in the order of the phase numbers.
- the distribution of the electric field strength in the vicinity of the discharge surface 11 changes so as to circulate along the width direction.
- the gas in the space moves near the discharge surface 11 along the width direction under the influence of the electric field strength.
- the supply of oxygen to the discharge surface and the detachment of ozone from the discharge surface are promoted, and the amount of ozone generated can be increased.
- the gas flow is generated, dust and the like are hardly adsorbed on the discharge surface, and the reliability of the ozone generation device 10G is improved.
- the drive voltage V 1 ⁇ V 4 is also possible to use a sine wave signal or a rectangular wave signal to other It is. If a pulse wave signal or a rectangular wave signal is used, the voltage at which discharge is started can be lowered compared with the case where a sine wave signal is used, which is more preferable.
- the number of phases of the drive voltage is four is shown, but any integer can be adopted as long as the number of phases of the drive voltage is three or more.
- the pattern waveform of each drive voltage may not be the same. For example, driving voltages having different amplitudes and repetition cycles can be used.
- the manufacturing method of the ozone generator will be described by taking the case of an actual machine provided with a protrusion as a representative.
- FIG. 10 is a diagram showing a flowchart of a manufacturing method in an actual machine of the ozone generator.
- a dielectric green sheet was formed (S1). Specifically, CaO-B 2 O 3 -Al 2 O 3 -SiO 2 glass and Al 2 O 3 were subjected to a dispersion process for 8 hours with a tornene / ethanol mixed solvent, a dispersant and a binder in a ball mill, and then a doctor blade method. Thus, a dielectric green sheet was formed.
- the various materials used for manufacturing the dielectric green sheet and the specific construction method are not limited to the above, and may be set according to the type of the dielectric material constituting the dielectric portion.
- dielectric materials such as Al2O3, SiO2, ZrO2, various types of glass, oxides such as BaTiO3, mixtures of glass and oxide fillers that make up LTCC, resins such as epoxy and polyimide, etc. have high insulation on dielectric parts Any material can be used as long as it can realize the properties.
- a conductive paste pattern to be a discharge electrode and a counter electrode was formed (S2). Specifically, a conductor paste pattern serving as a discharge electrode and a counter electrode was formed by printing Ag paste on a dielectric green sheet by screen printing.
- the material of the conductor paste is not particularly limited as long as it can be formed on the dielectric green sheet.
- the conductor paste is It is desirable to select a resistance paste of Cu, Ag, Pd, Pt, W, or RuO2.
- the dielectric thickness on the discharge electrode was 40 ⁇ m
- the dielectric thickness on the counter electrode was 120 ⁇ m
- the total thickness was 500 ⁇ m.
- the protrusion was formed (S4). Specifically, a glass paste or a dielectric paste is applied so as to cover the curved portion of the electrode printing pattern of the electrode-printed dielectric green sheet so that the tip of each electrode is covered. The protrusion was formed so that the dielectric thickness was 10 ⁇ m.
- the actual device of the ozone generation device provided with the protruding portion was manufactured.
- the protruding portion is formed by applying and baking a glass paste.
- a sheet-like dielectric material is punched into a desired pattern to form a fired or unfired laminate.
- the protrusions may be formed by stacking and firing the layers.
- any insulating material can be used in addition to the glass paste.
- the characteristics such as the coefficient of thermal expansion be close to the main part of the dielectric part and the protrusion, so select a material that can provide such characteristics as the material of the protrusion. It is desirable to do.
- the dielectric thickness of the protruding portion is 5 ⁇ m or more.
- the interval between the discharge electrode and the discharge surface is preferably within the range of 10 ⁇ m to 100 ⁇ m. If this interval is 10 ⁇ m or less, the insulation in the dielectric portion becomes poor, and destructive discharge may occur during discharge. On the other hand, if this interval is 100 ⁇ m or more, the voltage required for discharge increases, and the cost of the power supply increases due to an increase in the size of the transformer used in the booster circuit. Therefore, the distance is particularly preferably 50 ⁇ m or less.
- each electrode and the adjacent interval in the width direction may be 10 ⁇ m to 200 ⁇ m, and particularly preferably 30 ⁇ m to 100 ⁇ m. If these are less than 30 ⁇ m, the difficulty of forming the wiring by the printing method increases and the yield deteriorates. In addition, if it is 100 ⁇ m or less, it is possible to drive at a low voltage where a cheaper transformer can be used.
- the dielectric green sheet is laminated and baked (S3) without performing the step (S4) of forming the protruding portion.
- a dielectric green sheet having a pattern (for example, a frame shape) overlapping only at the tip is laminated on the discharge surface. And it bakes, applying a pressure to the whole laminated body. At this time, each main material, pressure, heating time, and the like are set so that the discharge surface is flattened by the flow of the binder. As a result, the conductor paste pattern inside the laminate is deformed in the thickness direction along the shape of the frame-shaped dielectric green sheet, so that the discharge electrode and the counter electrode can be curved.
- the dielectric green sheet is laminated and fired (S3) without performing the process of forming the protruding part (S4). Then, a dielectric green sheet provided with an opening so as to overlap only the tip of the discharge electrode or the counter electrode is laminated on the discharge surface and fired. Then, after firing, the relative dielectric constant changing part can be provided by performing a process of filling the opening of the discharge part with a paste of a dielectric material having a different relative dielectric constant and solidifying the paste.
- a reliability test was performed on the actual machine according to each embodiment manufactured by the above manufacturing method and the actual machine according to the comparative example.
- each actual machine was continuously discharged for a predetermined time (500 hours) in a thermostatic chamber in which the inside of the chamber was kept at 40 ° C.-90%.
- the gas in the case was sucked into the ozone densitometer at a constant speed to measure the ozone concentration.
- the ozone concentration at the beginning of continuous discharge and the ozone concentration immediately after the end of continuous discharge are shown below.
- FIG. 1 There exists a protrusion part and an electrode facing type) Initial stage: 22.1ppm-> After a test: 20.5ppm
- the ozone concentration and the decrease rate tend to be better in the configuration in which the protrusions are continuously extended than when the protrusions are provided separately. These are also considered to be because the supply of outside air to the discharge surface and the detachment of ozone are more likely to occur when the discharge surface has a continuous shape.
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Abstract
Description
前記第1電極は、前記放電面から見て、当該第1電極が延びる方向に電極の縁が延びた直線部と、前記直線部から電極の縁が曲がって延びた曲部と、を備え、
前記誘電体部は、前記放電面から見て前記曲部を覆う突出部を備え、
前記突出部は、前記放電面から厚み方向に突出している。
図1は、本発明の第1の実施形態に係るオゾン生成装置10の放電面から見た平面図である。図2は、オゾン生成装置10の正面から見た断面図である。
図5は、本発明の第2の実施形態に係るオゾン生成装置10Aの放電面11から見た平面図である。
図6(A)は、本発明の第3の実施形態に係るオゾン生成装置10Bの正面から見た断面図である。オゾン生成装置10Bは、誘電体部1Bと、放電電極2Bと、対向電極3Bと、駆動電圧源4(不図示)と、を備えている。誘電体部1Bは、第1の実施形態とは異なり、突出部が設けられておらず、放電面11の全面がほぼ平坦である。そして、突出部に替えて、放電電極2Bと対向電極3Bとに、湾曲部17B,18Bが設けられている。
図7(A)は、本発明の第4の実施形態に係るオゾン生成装置10Dの正面から見た断面図である。オゾン生成装置10Dは、誘電体部1Dと、放電電極2Dと、対向電極3Dと、駆動電圧源4(不図示)と、を備えている。誘電体部1Dは、第1の実施形態や第2の実施形態とは異なり、突出部や湾曲部が設けられておらず、それらに替えて比誘電率変更部17D,18Dが設けられている。比誘電率変更部17D,18Dは、誘電体部1Dにおける周囲よりも比誘電率が低い誘電体材料で構成された部位である。比誘電率変更部17D,18Dは、放電電極2Dや対向電極3Dの先端部21,31を覆うように設けられている。
図8は、本発明の第5の実施形態に係るオゾン生成装置10Fの放電面11から見た平面図である。オゾン生成装置10Fは、誘電体部1Fと、放電電極2Fと、対向電極3Fと、駆動電圧源4(不図示)と、を備えている。この実施形態は、第2の実施形態と誘電体部1Fが有する突出部17F,18Fの形状が相違している。突出部17Fは、各放電電極2Fに対して個別に設けられ、それぞれの先端部21のみに重なるように設けられている。また、突出部18Fは、各対向電極3Fに対して個別に設けられ、それぞれの先端部31のみに重なるように設けられている。このように突出部を設けることもできる。
図9(A)は、本発明の第6の実施形態に係るオゾン生成装置10Gの電気接続図である。オゾン生成装置10Gは、概要構成については前述の第1の実施形態の構成と同じであり、誘電体部1Gと放電電極2Gと対向電極3G(不図示)と駆動電圧源4Gとを備えている。ここでは、放電電極2Gと対向電極3Gとは4対以上設けられている。放電電極2Gおよび対向電極3Gの各対は幅方向に並ぶ順番に4組に組み分けされている。そして、駆動電圧源4Gは、放電電極2Gおよび対向電極3Gの各対の組数と同じ4相の駆動電圧V1~V4を出力するよう構成している。各組の放電電極2Gには、組番号に対応する相番号の駆動電圧V1~V4が入力されるよう構成している。
各実施形態に係るオゾン生成装置の実機を用い、信頼性試験を行った。
・第3の実施形態(図6(A):湾曲部あり、電極対向型)初期:22.8ppm → 試験後:21.5ppm | オゾン濃度低下率:5.7%
・比較例(突出部、湾曲部なし、電極対向型)初期:24.5ppm → 試験後:17.65ppm | オゾン濃度低下率:28%
これらの結果、本発明の実施形態に係る実機では、比較例に比べてオゾン濃度の低下が大幅に抑制されている。これは、本発明の実施形態に係る実機では、放電電極および対向電極の先端部から放電面までの厚みが増した結果、電極先端部の近傍で放電を抑制でき、煤のような付着物の析出が抑制されたためと考えられる。
・第5の実施形態(図8:突出部分離、電極櫛型)初期:27.3ppm → 試験後:24.1 ppm | オゾン濃度低下率:11.7%
・第3の実施形態(図6(B):湾曲部、電極櫛型)初期:28.6ppm → 試験後:25.8 ppm | オゾン濃度低下率:9.7%
・比較例(突出部、湾曲部なし:電極櫛型)初期:30.8ppm → 試験後:16.3 ppm | オゾン濃度低下率:47.1%
これらの結果からも、本発明の実施形態に係る実機では、やはり比較例に比べてオゾン濃度の低下が大幅に抑制されている。また、本発明の実施形態に係る実機同士を比較しても、やはり突出部を設ける構成よりも湾曲部を設ける構成のほうがオゾン濃度および低下率が良好になる。更には、突出部を設ける場合でも、突出部を分離して設けるよりも突出部を連続して延びるように設ける構成のほうが、オゾン濃度および低下率が良好になる傾向が確認された。これらのことも、放電面が連続的な形状であるほうが、放電面への外気の供給とオゾンの離脱が生じやすくなるためと考えられる。
・第3の比較例(突出部なし:気流型)初期:37.0ppm → 試験後:19.8 ppm | オゾン濃度低下率:46.5%
これらの結果からも、本発明の実施形態に係る実機では、やはり比較例に比べてオゾン濃度の低下が大幅に抑制されている。また、上記実機では放電面に気流が発生することによって、放電面への外気の供給とオゾンの離脱が促進されるので、他の構造に比べて格段に高いオゾン濃度が得られている。
2…放電電極
3…対向電極
4…駆動電圧源
10…オゾン生成装置
11…放電面
12…底面
13…左側面
14…右側面
15…正面
16…背面
17,18,17F,18F…突出部
17B,18B,17C,18C…湾曲部
17D,18D,17E,18E…比誘電率変更部
21,31…先端部
22,32…直線部
Claims (11)
- 放電面を有する誘電体部と、
前記誘電体部の内部で互いに並んで延びるとともに、それぞれ前記放電面に対向する第1電極および第2電極と、を備え、
前記第1電極は、前記放電面から見て、当該第1電極が延びる方向に電極の縁が延びた直線部と、前記直線部から電極の縁が曲がって延びた曲部と、を備え、
前記第1電極と前記放電面との間において前記第1電極の単位面積当たりに生じる静電容量は、前記曲部の近傍の方が前記直線部の近傍よりも小さい、
オゾン生成装置。 - 前記誘電体部は、前記放電面から見て前記曲部を覆う比誘電率変更部を備え、
前記比誘電率変更部は、前記誘電体部に比べて低い比誘電率を有する、
請求項1に記載のオゾン生成装置。 - 前記比誘電率変更部は、前記放電面から見て、前記直線部に交差する方向に延び、前記第2電極に重なっている、
請求項2に記載のオゾン生成装置。 - 前記第1電極と前記放電面との距離は、前記直線部の近傍の方が前記曲部の近傍よりも短い、
請求項1~3のいずれかに記載のオゾン生成装置。 - 前記誘電体部は、前記放電面から見て前記曲部を覆う突出部を備え、
前記突出部は、前記放電面において周囲に比べて突出している、
請求項4に記載のオゾン生成装置。 - 前記突出部は、前記放電面から見て、前記直線部に交差する方向に延び、前記第2電極に重なっている、
請求項5に記載のオゾン生成装置。 - 前記第1電極は、前記曲部の近傍が前記放電面と離れる方向に曲がっている、
請求項4~6のいずれかに記載のオゾン生成装置。 - 前記第2電極は、前記放電面から見て、当該第2電極が延びる方向に電極の縁が延びた直線部と、前記直線部から電極の縁が曲がって延びた曲部と、を備え、
前記第2電極と前記放電面との間において前記第2電極の単位面積当たりに生じる静電容量は、前記曲部の近傍の方が前記直線部の近傍よりも小さい、
請求項1乃至請求項7のいずれかに記載のオゾン生成装置。 - 前記放電面から見て前記第1電極と前記第2電極とが延びる方向に対して直交する方向に並べて複数対の前記第1電極および前記第2電極を備え、
繰り返しのパターンと循環する位相差とを有するN(N≧3)相の駆動電圧を出力する駆動電圧源を更に備え、
前記複数対の第1電極および第2電極は、それらの並び順に従い第n(1≦n≦N)相目の駆動電圧が前記駆動電圧源から入力される、
請求項1乃至請求項8のいずれかに記載のオゾン生成装置。 - 放電面を有する誘電体部と、
前記誘電体部の内部で互いに並んで延びるとともに、それぞれ前記放電面に対向する第1電極および第2電極と、を備え、
前記第1電極は、前記放電面から見て、当該第1電極が延びる方向に電極の縁が延びた直線部と、前記直線部から電極の縁が曲がって延びた曲部と、を備え、
前記誘電体部は、前記放電面から見て前記曲部を覆う突出部を備え、
前記突出部は、前記放電面から厚み方向に突出している、
オゾン生成装置。 - 前記突出部は、前記放電面から見て、前記直線部に交差する方向に延びている、
請求項10に記載のオゾン生成装置。
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JP2001019409A (ja) * | 1999-07-02 | 2001-01-23 | Toshiaki Akimoto | 高圧オゾン発生器 |
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JP2001019409A (ja) * | 1999-07-02 | 2001-01-23 | Toshiaki Akimoto | 高圧オゾン発生器 |
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