WO2016188330A1 - 轴位置检测装置和磁悬浮电机 - Google Patents

轴位置检测装置和磁悬浮电机 Download PDF

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Publication number
WO2016188330A1
WO2016188330A1 PCT/CN2016/082014 CN2016082014W WO2016188330A1 WO 2016188330 A1 WO2016188330 A1 WO 2016188330A1 CN 2016082014 W CN2016082014 W CN 2016082014W WO 2016188330 A1 WO2016188330 A1 WO 2016188330A1
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Prior art keywords
displacement sensor
eddy current
current displacement
freedom
position detecting
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PCT/CN2016/082014
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English (en)
French (fr)
Inventor
胡余生
郭伟林
贺永玲
牛高产
胡叨福
李燕
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Gree Electric Appliances Inc of Zhuhai
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Gree Electric Appliances Inc of Zhuhai
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N15/00—Holding or levitation devices using magnetic attraction or repulsion, not otherwise provided for

Definitions

  • the invention relates to the field of detection technology, in particular to a shaft position detecting device and a magnetic levitation motor.
  • the magnetic levitation motor it is necessary to detect a displacement signal of 5 degrees of freedom of the shaft, and the displacement signals of the five degrees of freedom are used to be supplied to the bearing controller to realize stable suspension control of the shaft. At least one non-contact displacement sensor is required for each degree of freedom to measure the shaft displacement.
  • a differential structure is usually adopted, that is, two non-contact displacement sensors are installed for each degree of freedom, and a total of 10 non-contact displacement sensors are required in the whole magnetic suspension bearing system, and the non-contact type is used.
  • the displacement sensor generally uses an eddy current displacement sensor.
  • the design of the eddy current displacement sensor ie, the shaft position detecting device
  • the design of the eddy current displacement sensor generally adopts a discrete design scheme, that is, one probe corresponds to one preamplifier circuit.
  • the present invention provides a shaft position detecting device and a magnetic levitation motor which are small in size and convenient for integration.
  • the present invention provides the following technical solutions:
  • a shaft position detecting device comprising:
  • the eddy current displacement sensor probe set includes at least 10 eddy current displacement sensor probes, and at least two of the eddy current displacement sensor probes are provided for each degree of freedom in five degrees of freedom of the magnetic levitation motor shaft.
  • the eddy current displacement sensor probe set is integrated in two probe rings, and the two probe rings are respectively disposed at two ends of the shaft.
  • the eddy current displacement sensor probe corresponding to the same degree of freedom of the magnetic levitation motor shaft adopts a differential arrangement structure.
  • the integrated front end device comprises:
  • An excitation source generating circuit connected to the eddy current displacement sensor probe set; a resonant capacitor corresponding to each of the eddy current displacement sensor probes, each of the eddy current displacement sensor probes being connected in parallel with a corresponding resonant capacitor Constituting at least 10 sets of resonant circuits, wherein each degree of freedom of the magnetic levitation motor shaft corresponds to at least two sets of resonant circuits; at least 5 sets of differential detecting circuits, each degree of freedom of the magnetic levitation motor shaft corresponding to at least one set of differential detection a circuit, the differential detection circuit of the same degree of freedom is connected to the corresponding resonant circuit; and at least 5 sets of amplification filter circuits, each degree of freedom of the magnetic levitation motor shaft corresponding to at least one set of amplification filter circuits, the same freedom
  • the amplification filter circuit of the degree is connected to the corresponding differential detection circuit.
  • the excitation source generating circuit is a square wave excitation source generating circuit.
  • the differential detection circuit comprises:
  • the integrated front end is disposed on a bearing controller of the magnetic levitation motor.
  • all of the eddy current displacement sensor probes are eddy current displacement sensor probes whose electrical parameters and mechanical parameters are all the same respectively; all of the resonant capacitors are capacitors having the same parameter.
  • all of the resonant circuits are resonant circuits having a natural oscillation frequency equal to the frequency of the excitation signal, and the excitation signal is generated by the excitation source generating circuit.
  • a magnetic levitation motor comprising:
  • the magnetic levitation motor body, and the shaft position detecting device according to any one of the above.
  • the present invention provides a shaft position detecting device and a magnetic levitation motor as compared with the prior art.
  • the shaft position detecting device comprises: an eddy current displacement sensor probe set, and an integrated front end connected to the eddy current displacement sensor probe set; the eddy current displacement sensor probe set includes at least 10 eddy current displacement sensor probes, In the five degrees of freedom of the magnetic levitation motor shaft, at least two of the eddy current displacement sensor probes are provided for each degree of freedom.
  • the technical solution provided by the invention provides an integrated front-end device, and the integrated front-end device occupies a small volume, and can effectively save space and convenience compared with the scheme of corresponding one-stage circuit of each probe in the prior art. Integrated.
  • FIG. 1 is a structural view of a shaft position detecting device in the prior art
  • FIG. 2 is a structural diagram of a shaft position detecting device according to an embodiment of the present invention.
  • FIG. 3 is a structural diagram of another shaft position detecting device according to an embodiment of the present invention.
  • FIG. 4 is a structural diagram of a differential arrangement of an eddy current displacement sensor probe according to an embodiment of the present invention.
  • FIG. 5 is a structural diagram of an integrated front end device according to an embodiment of the present invention.
  • FIG. 6 is a structural diagram of a differential detection circuit in an integrated preamplifier according to an embodiment of the present invention.
  • FIG. 7 is a waveform diagram of differential detection according to an embodiment of the present invention.
  • FIG. 1 is a structural diagram of a shaft position detecting device in the prior art.
  • the prior art shaft position detecting device generally adopts a discrete design scheme, that is, one probe corresponds to one preamplifier circuit.
  • the discrete technical solution has a large volume of the preamplifier due to the corresponding preamplifier circuit of each probe, which is disadvantageous for integration.
  • the present invention provides a new shaft position detecting device for solving the above-mentioned problem of inconvenience in integration in the prior art.
  • FIG. 2 is a structural diagram of a shaft position detecting device according to an embodiment of the present invention.
  • the shaft position detecting device provided by the embodiment of the present invention includes:
  • the eddy current displacement sensor probe set 201 includes at least ten eddy current displacement sensor probes 2011, and at least two of the eddy current displacement sensor probes 2011 are provided for each degree of freedom in five degrees of freedom of the magnetic levitation motor shaft.
  • the shaft position detecting device provided by the embodiment of the present invention optionally includes 10 eddy current displacement sensor probes 2011.
  • each of the degrees of freedom is set with two of the electric powers.
  • more than two eddy current displacement sensor probes 2011 may be set in any one degree of freedom, for example, four (required An even number of the eddy current displacement sensor probes 2011. It should be noted that, in the five degrees of freedom of the magnetic levitation motor shaft, two eddy current displacement sensor probes 2011 are provided for each degree of freedom, which is actually sufficient.
  • the eddy current displacement sensor probe 2011 corresponding to the same degree of freedom of the magnetic levitation motor shaft adopts a differential arrangement structure, that is, the magnetic levitation motor shaft has the same degree of freedom.
  • the eddy current displacement sensor probe 2011 corresponding to other degrees of freedom exists between the corresponding eddy current displacement sensor probes 2011.
  • FIG. 3 is a structural diagram of another shaft position detecting device according to an embodiment of the present invention.
  • the eddy current displacement sensor probe set is integrated in two probe rings 203, that is, the eddy current displacement sensor probes 2011 are distributed in two probe rings 203, specifically, optionally, wherein One probe ring 203 integrates four of the eddy current displacement sensor probes 2011 with two degrees of freedom, and the other probe ring 203 integrates six of the eddy current displacement sensor probes 2011 with three degrees of freedom.
  • the two probe rings 203 are respectively disposed at both ends of the shaft and are not in contact with the shaft.
  • FIG. 4 is a structural diagram of a differential arrangement of an eddy current displacement sensor probe according to an embodiment of the present invention.
  • the X1 probe and the X2 probe are two eddy current displacement sensor probes of the same degree of freedom
  • the Y1 probe and the Y2 probe are two eddy current displacement sensor probes of another degree of freedom, visible, two of the same degree of freedom.
  • An eddy current displacement sensor probe such as an X1 probe and an X2 probe, is differentially arranged.
  • the area between the shaft and the probe ring is a gap between the two, and the two are non-contact structures.
  • FIG. 5 is a structural diagram of an integrated front end device according to an embodiment of the present invention. As shown in FIG. 5, the integrated front end device 202 includes:
  • An excitation source generating circuit 2021 connected to the eddy current displacement sensor probe set; a resonance capacitor C corresponding to each of the eddy current displacement sensor probes 2011, each corresponding to the eddy current displacement sensor probe 2011
  • the resonant capacitors C are connected in parallel to form at least 10 sets of resonant circuits 2022, wherein each degree of freedom of the magnetic levitation motor shaft corresponds to at least two sets of resonant circuits 2022; at least five sets of differential detecting circuits 2023, each of the magnetic levitation motor shafts
  • the degree of freedom corresponds to at least one set of differential detection circuits 2023, the differential detection circuit 2023 of the same degree of freedom is connected to the corresponding resonance circuit 2022, and at least five sets of amplification filter circuits 2024, each of the magnetic suspension motor axes
  • the degree of freedom corresponds to at least one set of amplification filter circuits 2024, and the amplification filter circuit 2024 of the same degree of freedom is connected to the corresponding differential detection circuit 20
  • FIG. 5 in FIG. 5, other circuit parts except the excitation source generating circuit 2021 and the ellipsis are for a certain degree of freedom structure, such as a first degree of freedom axis position detecting circuit, and an ellipsis part indicating the other 4
  • the axis position detecting circuit of one degree of freedom is exactly the same as the structure of the first degree of freedom axis position detecting circuit, and the five-degree-of-freedom axis position detecting circuit is connected to the excitation source generating circuit 2021 to receive the excitation thereof. signal.
  • the same detection circuit as the first degree of freedom axis position detecting circuit is provided for the two extra probes, and the detection is set for the two extra probes.
  • the circuit is also coupled to the excitation source generating circuit 2021 to receive its excitation signal.
  • the differential signal of the two eddy current displacement sensor probes on the same degree of freedom is differentially detected, and the amount related only to the displacement change is extracted. Since the amplitude of the signal is small, the amplification factor of the latter stage can be correspondingly increased. Therefore, the sensitivity can be improved, and the filter capacitor can be selected to be smaller, thereby improving the frequency response. In addition, since the influence of temperature on the parameters of the two probes on the same degree of freedom is uniform, the difference between the two can be removed. The effect of the change on the sensor signal, thereby improving the temperature drift performance of the sensor.
  • the excitation source generating circuit 2021 is a square wave excitation source generating circuit.
  • the wave excitation source generating circuit has a simple circuit structure and a small volume.
  • FIG. 6 is a structural diagram of a differential detection circuit in an integrated preamplifier according to an embodiment of the present invention.
  • the axis position detecting device provided by the embodiment of the present invention, the differential detecting circuit 2023 includes:
  • the previous radial X direction is taken as an example to illustrate the process of differential detection.
  • the eddy current displacement sensor probe X1 resonance signal (referred to as PX1) and the eddy current displacement sensor probe X2 resonance signal (referred to as PX2) are selected by signals.
  • the circuit 20231 obtains two signals PX+ and PX-.
  • the waveform of PX+ is composed of the positive half-cycle waveform of PX1 and the negative half-cycle waveform of PX2.
  • the waveform of PX- consists of the negative half-cycle waveform of PX1 and the positive half-cycle waveform of PX2, and then the difference.
  • the circuit 20232 converts the PX+ minus the PX- to achieve a difference, and obtains a signal PXA related only to the displacement change amount, that is, the PXA is a signal for differential detection of both the eddy current displacement sensor probe X1 and the eddy current displacement sensor probe X2, as shown in FIG.
  • FIG. 7 is a waveform diagram of differential detection according to an embodiment of the present invention, wherein the horizontal axis represents time and the vertical axis represents voltage. The polarity of the PXA signal is related to the position of the axis.
  • the PXA signal is a pulsation signal, which is amplified and filtered by the amplification filter circuit 2024 to obtain a DC signal PXD corresponding to the position.
  • PXD is also negative when the PXA signal is negative, and PXD is also positive when the PXA signal is positive.
  • the PX signal is obtained by adding an appropriate bias voltage to the PXD signal through a bias circuit, so that the voltage of the PX is within the minimum and maximum values of the analog-to-digital conversion chip acquisition range. This finally results in a voltage signal PX that is proportional to the change in displacement.
  • the shaft position detecting device provided by the embodiment of the present invention is disposed on a bearing controller of the magnetic levitation motor.
  • all of the eddy current displacement sensor probes are eddy current displacement sensor probes whose electrical parameters and mechanical parameters are all the same respectively; all of the resonant capacitors are capacitors having the same parameter.
  • the shaft position detecting device provided by the embodiment of the present invention is provided in the integrated front end device.
  • the resonant circuit is a resonant circuit having a natural oscillation frequency equal to the frequency of the excitation signal, and the excitation signal is generated by the excitation source generating circuit.
  • the equivalent impedance of the eddy current displacement sensor probe changes, the resonant circuit is detuned, the output voltage also changes, and the closer the measured object is to the eddy current displacement sensor probe, the detuning The larger the output voltage, the smaller the output voltage.
  • the output signal of the LC resonant circuit is a sine wave, and the change of its amplitude reflects the change of the distance of the measured body from the eddy current displacement sensor probe.
  • the present invention also discloses a magnetic levitation motor comprising the magnetic levitation motor body, and the shaft position detecting device disclosed in the above embodiment of the present invention.
  • the present invention provides a shaft position detecting device and a magnetic levitation motor as compared with the prior art.
  • the shaft position detecting device comprises: an eddy current displacement sensor probe set, and an integrated front end connected to the eddy current displacement sensor probe set; the eddy current displacement sensor probe set includes at least 10 eddy current displacement sensor probes, In the five degrees of freedom of the magnetic levitation motor shaft, at least two of the eddy current displacement sensor probes are provided for each degree of freedom.
  • the technical solution provided by the invention provides an integrated front-end device, and the integrated front-end device occupies a small volume, and can effectively save space and convenience compared with the scheme of corresponding one-stage circuit of each probe in the prior art. Integrated.
  • all the eddy current displacement sensor probes use a unified excitation source to improve the consistency of the signals of the eddy current displacement sensors, simplify the circuit, and eliminate the use of multiple excitation source probes between each other. interference.
  • the technical solution provided by the invention adopts the differential detection method to improve the sensitivity and the frequency response, and can remove the influence of the temperature change on the sensor signal, thereby improving the temperature drift performance of the sensor.

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  • General Physics & Mathematics (AREA)
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  • Combustion & Propulsion (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Abstract

一种轴位置检测装置和磁悬浮电机，包括：电涡流位移传感器探头组（201），和与电涡流位移传感器探头组（201）相连接的集成式前置器（202）；电涡流位移传感器探头组（201）包括至少10个电涡流位移传感器探头（2011），在磁悬浮电机轴的5个自由度中，每个自由度至少设置有2个电涡流位移传感器探头（2011）。能够有效节省空间，方便集成化。

Description

轴位置检测装置和磁悬浮电机
本申请要求于2015年5月27日提交中国专利局、申请号为201510282490.3、发明名称为“轴位置检测装置和磁悬浮电机”的中国专利申请的优先权，其全部内容通过引用结合在本申请中。
技术领域
本发明涉及检测技术领域，尤其轴位置检测装置和磁悬浮电机。
背景技术
在磁悬浮电机中需要探测轴5个自由度的位移信号，这5个自由度的位移信号用于提供给轴承控制器，以实现轴的稳定悬浮控制。每个自由度至少需要安装1个非接触式位移传感器来实现轴位移的测量。
为了提高悬浮精度，目前的技术中，通常采取差动结构，即每个自由度安装2个非接触式位移传感器，则整套磁悬浮轴承系统中总共需要安装10个非接触式位移传感器，非接触式位移传感器一般采用电涡流位移传感器。目前的技术中，请参阅图1，电涡流位移传感器(即轴位置检测装置)的设计一般采用分立式设计方案，即一个探头对应一个前置器电路。
但是，目前的技术方案，由于每个探头对应一个前置器电路，造成前置器的体积较大，不利于集成化。
发明内容
有鉴于此，本发明提供了一种轴位置检测装置和磁悬浮电机，体积较小，方便集成化。
为实现上述目的，本发明提供如下技术方案：
一种轴位置检测装置，包括：
电涡流位移传感器探头组，和与所述电涡流位移传感器探头组相连接的集成式前置器；
所述电涡流位移传感器探头组包括至少10个电涡流位移传感器探头，在磁悬浮电机轴的5个自由度中，每个自由度至少设置有2个所述电涡流位移传感器探头。
优选的，所述电涡流位移传感器探头组集成在两个探头环内，所述两个探头环分别设置在轴的两端。
优选的，所述磁悬浮电机轴同一个自由度所对应的所述电涡流位移传感器探头采用差分布置结构。
优选的，所述集成式前置器包括：
与所述电涡流位移传感器探头组相连接的激励源发生电路；与每个所述电涡流位移传感器探头一一对应的谐振电容，每个所述电涡流位移传感器探头与所对应的谐振电容并联，构成至少10组谐振电路，其中，所述磁悬浮电机轴的每个自由度对应至少两组谐振电路；至少5组差分检波电路，所述磁悬浮电机轴的每个自由度至少对应1组差分检波电路，同一自由度的所述差分检波电路与所对应的所述谐振电路相连接；以及至少5组放大滤波电路，所述磁悬浮电机轴的每个自由度至少对应1组放大滤波电路，同一自由度的所述放大滤波电路与所对应的所述差分检波电路相连接。
优选的，所述激励源发生电路为方波激励源发生电路。
优选的，所述差分检波电路包括:
信号选择电路，以及与所述信号选择电路相连接的差分电路。
优选的，所述集成式前置器设置在磁悬浮电机的轴承控制器上。
优选的，所有所述电涡流位移传感器探头为电参数和机械参数分别全部相同的电涡流位移传感器探头；所有所述谐振电容为参数相同的电容。
优选的，所有所述谐振电路为固有振荡频率与激励信号的频率相等的谐振电路，所述激励信号由所述激励源发生电路产生。
一种磁悬浮电机，包括：
所述磁悬浮电机本体，和上述任意一项所述的轴位置检测装置。
经由上述的技术方案可知，与现有技术相比，本发明提供了一种轴位置检测装置和磁悬浮电机。轴位置检测装置包括：电涡流位移传感器探头组，和与所述电涡流位移传感器探头组相连接的集成式前置器；所述电涡流位移传感器探头组包括至少10个电涡流位移传感器探头，在磁悬浮电机轴的5个自由度中，每个自由度至少设置有2个所述电涡流位移传感器探头。本发明提供的技术方案，提供集成式前置器，集成式前置器所占用的体积较小，相对于现有技术中每个探头对应一个前置器电路的方案，能够有效节省空间，方便集成化。
附图说明
为了更清楚地说明本发明实施例或现有技术中的技术方案，下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图仅仅是本发明的实施例，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据提供的附图获得其他的附图。
图1为现有技术中轴位置检测装置的结构图；
图2为本发明实施例提供的一种轴位置检测装置的结构图；
图3为本发明实施例提供的另外一种轴位置检测装置的结构图；
图4为本发明实施例提供的一种电涡流位移传感器探头差分布置的结构图；
图5为本发明实施例提供的集成式前置器的结构图；
图6为本发明实施例提供的集成式前置器中差分检波电路的结构图；
图7为本发明实施例提供的差分检波的波形图。
具体实施方式
下面将结合现有技术和本发明实施例中的附图，对本发明实施例中的技术方案进行清楚、完整地描述，显然，所描述的实施例仅仅是本发明一部分实施例，而不是全部的实施例。基于本发明中的实施例，本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例，都属于本发明保护的范围。
为使本发明的上述目的、特征和优点能够更加明显易懂，下面结合附图和具体实施方式对本发明作进一步详细的说明。
请参阅图1，图1为现有技术中轴位置检测装置的结构图。如图1所示，现有技术中的轴位置检测装置，一般采用分立式设计方案，即一个探头对应一个前置器电路。现有技术中的这种分立式技术方案，由于每个探头对应一个前置器电路，造成前置器的体积较大，不利于集成化。
为此，本发明提供一种新的轴位置检测装置，用以解决上述现有技术中存在的不便于集成化的问题。
实施例
请参阅图2，图2为本发明实施例提供的一种轴位置检测装置的结构图。 如图2所示，本发明实施例提供的轴位置检测装置，包括：
电涡流位移传感器探头组201，和与所述电涡流位移传感器探头组201相连接的集成式前置器202；
所述电涡流位移传感器探头组201包括至少10个电涡流位移传感器探头2011，在磁悬浮电机轴的5个自由度中，每个自由度至少设置有2个所述电涡流位移传感器探头2011。
具体的，本发明实施例提供的轴位置检测装置，可选的，包括10个电涡流位移传感器探头2011，在磁悬浮电机轴的5个自由度中，每个自由度设置有2个所述电涡流位移传感器探头2011。当然，本发明实施例提供的轴位置检测装置，在磁悬浮电机轴的5个自由度中，任意一个自由度可以设置多于2个所述电涡流位移传感器探头2011，比如设置4个(需为偶数个)所述电涡流位移传感器探头2011。需要说明的是，在磁悬浮电机轴的5个自由度中，每个自由度设置有2个所述电涡流位移传感器探头2011，其实已经够用了。
具体的，本发明实施例提供的轴位置检测装置，所述磁悬浮电机轴同一个自由度所对应的所述电涡流位移传感器探头2011采用差分布置结构，即所述磁悬浮电机轴同一个自由度所对应的所述电涡流位移传感器探头2011之间存在其他自由度所对应的所述电涡流位移传感器探头2011。
请参阅图3，图3为本发明实施例提供的另外一种轴位置检测装置的结构图。如图3所示，所述电涡流位移传感器探头组集成在两个探头环203内，即所述电涡流位移传感器探头2011分布在两个探头环203内集成，具体的，可选的，其中，一个探头环203集成2个自由度的4个所述电涡流位移传感器探头2011，另一个探头环203集成3个自由度的6个所述电涡流位移传感器探头2011。所述两个探头环203分别设置在轴的两端，不与轴接触。
进一步的，请参阅图4，图4为本发明实施例提供的一种电涡流位移传感器探头差分布置的结构图。如图4所示，X1探头和X2探头为同一自由度的两个电涡流位移传感器探头，Y1探头和Y2探头为另外一自由度的两个电涡流位移传感器探头，可见，同一自由度的两个电涡流位移传感器探头，比如X1探头和X2探头，采用差分布置。图中，轴与探头环之间的区域为二者之间的间隙，二者为非接触结构。
具体的，请参阅图5，图5为本发明实施例提供的集成式前置器的结构图。如图5所示，所述集成式前置器202包括：
与所述电涡流位移传感器探头组相连接的激励源发生电路2021；与每个所述电涡流位移传感器探头2011一一对应的谐振电容C，每个所述电涡流位移传感器探头2011与所对应的谐振电容C并联，构成至少10组谐振电路2022，其中，所述磁悬浮电机轴的每个自由度对应至少两组谐振电路2022；至少5组差分检波电路2023，所述磁悬浮电机轴的每个自由度至少对应1组差分检波电路2023，同一自由度的所述差分检波电路2023与所对应的所述谐振电路2022相连接；以及至少5组放大滤波电路2024，所述磁悬浮电机轴的每个自由度至少对应1组放大滤波电路2024，同一自由度的所述放大滤波电路2024与所对应的所述差分检波电路2023相连接。
进一步的，为了更加清楚的阐述所述集成式前置器202的结构，下面以(本发明轴位置检测装置包括)10个电涡流位移传感器探头2011继续说明。请参阅图5，图5中，除所述激励源发生电路2021和省略号以外的其他电路部分是针对某一自由度的结构，比如命名为第一自由度轴位置检测电路，省略号部分表示其他4个自由度的轴位置检测电路，且与所述第一自由度轴位置检测电路结构完全相同，这五个自由度的轴位置检测电路都与所述激励源发生电路2021相连接，接收其激励信号。若某一自由度多出两个探头，则针对这两个多出的探头设置一个与所述第一自由度轴位置检测电路相同的检测电路，针对这两个多出的探头所设置的检测电路同样与所述激励源发生电路2021相连接，接收其激励信号。
对同一自由度上的两个电涡流位移传感器探头的谐振信号作差分检波处理，提取出仅与位移变化相关的量，由于此信号量幅值较小，故后级放大倍数可相应增大，从而可提高灵敏度，且滤波电容可选择的更小，从而可提高频率响应，另外由于温度对同一自由度上的2个探头的参数的影响是一致的，两者作差分处理后，可削除温度变化对传感器信号的影响，从而提高传感器的温漂性能。
进一步的，本发明实施例提供的轴位置检测装置，所述激励源发生电路2021为方波激励源发生电路。方波激励源发生电路相对于现有技术中的正弦 波激励源发生电路，电路结构要简单，体积较小。
进一步的，请参阅图6，图6为本发明实施例提供的集成式前置器中差分检波电路的结构图。如图6所示，本发明实施例提供的轴位置检测装置，所述差分检波电路2023包括:
信号选择电路20231，以及与所述信号选择电路20231相连接的差分电路20232。
具体的，参考图6，以前径向X方向为例来说明差分检波的处理过程，电涡流位移传感器探头X1谐振信号(简称PX1)和电涡流位移传感器探头X2谐振信号(简称PX2)经过信号选择电路20231，得到2路信号PX+和PX-，PX+的波形由PX1的正半周波形和PX2的负半周波形组成，PX－的波形由PX1的负半周波形和PX2的正半周波形组成，再经过差分电路20232，将PX+减去PX-实现差分，得到一个仅与位移变化量相关的信号PXA，即PXA为电涡流位移传感器探头X1和电涡流位移传感器探头X2两者差分检波的信号，如图7，图7为本发明实施例提供的差分检波的波形图，横轴表示时间，纵轴表示电压。PXA信号的极性与轴的位置有关，当轴处在靠近电涡流位移传感器探头X1远离电涡流位移传感器探头X2时，PX1的幅值小于PX2的幅值，PXA信号为负，反之，PXA信号为正。PXA信号为一个脉动信号，通过所述放大滤波电路2024对其进行放大滤波处理，得到一个与位置相对应的直流信号PXD。当PXA信号为负时PXD也为负值，当PXA信号为正值时PXD也为正值。由于模数转换芯片一般只识别正信号，故通过一个偏置电路对PXD信号加一个适当的偏置电压得到PX信号，使得PX的电压在模数转换芯片采集范围的最小值和最大值之内，这样最终得到一个与位移变化成一定比例关系的电压信号PX。
具体的，可选的，本发明实施例提供的轴位置检测装置，所述集成式前置器设置在磁悬浮电机的轴承控制器上。
进一步的，本发明实施例提供的轴位置检测装置，所有所述电涡流位移传感器探头为电参数和机械参数分别全部相同的电涡流位移传感器探头；所有所述谐振电容为参数相同的电容。
进一步的，本发明实施例提供的轴位置检测装置，所述集成式前置器中所 有所述谐振电路为固有振荡频率与激励信号的频率相等的谐振电路，所述激励信号由所述激励源发生电路产生。当被测体靠近电涡流位移传感器探头时，电涡流位移传感器探头的等效阻抗发生变化，谐振电路失谐，输出电压也发生变化，且被测体离电涡流位移传感器探头越近，失谐越大，输出的电压也越小。LC谐振回路的输出信号为正弦波，其幅值的变化反应了被测体距电涡流位移传感器探头距离的变化。
进一步的，本发明还公开一种磁悬浮电机，包括所述磁悬浮电机本体，和上述本发明实施例所公开的所述轴位置检测装置。
经由上述的技术方案可知，与现有技术相比，本发明提供了一种轴位置检测装置和磁悬浮电机。轴位置检测装置包括：电涡流位移传感器探头组，和与所述电涡流位移传感器探头组相连接的集成式前置器；所述电涡流位移传感器探头组包括至少10个电涡流位移传感器探头，在磁悬浮电机轴的5个自由度中，每个自由度至少设置有2个所述电涡流位移传感器探头。本发明提供的技术方案，提供集成式前置器，集成式前置器所占用的体积较小，相对于现有技术中每个探头对应一个前置器电路的方案，能够有效节省空间，方便集成化。
另外，本发明提供的技术方案，所有电涡流位移传感器探头用统一的激励源，提高了各路电涡流位移传感器信号的一致性，简化了电路，削除了使用多个激励源探头相互之间的干扰。
另外，本发明提供的技术方案，采用差分检波的方式，提高了灵敏度和频率响应，能够削除温度变化对传感器信号的影响，从而提高传感器的温漂性能。
最后，还需要说明的是，在本文中，诸如第一和第二等之类的关系术语仅仅用来将一个实体或者操作与另一个实体或操作区分开来，而不一定要求或者暗示这些实体或操作之间存在任何这种实际的关系或者顺序。而且，术语“包括”、“包含”或者其任何其他变体意在涵盖非排他性的包含，从而使得包括一系列要素的过程、方法、物品或者设备不仅包括那些要素，而且还包括没有明确列出的其他要素，或者是还包括为这种过程、方法、物品或者设备所固有的要素。在没有更多限制的情况下，由语句“包括一个……”限定的要素，并不排除在包括所述要素的过程、方法、物品或者设备中还存在另外的相同要素。
本说明书中各个实施例采用递进的方式描述，每个实施例重点说明的都是与其他实施例的不同之处，各个实施例之间相同相似部分互相参见即可。
对所公开的实施例的上述说明，使本领域专业技术人员能够实现或使用本发明。对这些实施例的多种修改对本领域的专业技术人员来说将是显而易见的，本文中所定义的一般原理可以在不脱离本发明的精神或范围的情况下，在其它实施例中实现。因此，本发明将不会被限制于本文所示的这些实施例，而是要符合与本文所公开的原理和新颖特点相一致的最宽的范围。

Claims (10)

  1. 一种轴位置检测装置，其特征在于，包括：
    电涡流位移传感器探头组，和与所述电涡流位移传感器探头组相连接的集成式前置器；
    所述电涡流位移传感器探头组包括至少10个电涡流位移传感器探头，在磁悬浮电机轴的5个自由度中，每个自由度至少设置有2个所述电涡流位移传感器探头。
  2. 根据权利要求1所述的轴位置检测装置，其特征在于，所述电涡流位移传感器探头组集成在两个探头环内，所述两个探头环分别设置在轴的两端。
  3. 根据权利要求1所述的轴位置检测装置，其特征在于，所述磁悬浮电机轴同一个自由度所对应的所述电涡流位移传感器探头采用差分布置结构。
  4. 根据权利要求1所述的轴位置检测装置，其特征在于，所述集成式前置器包括：
    与所述电涡流位移传感器探头组相连接的激励源发生电路；与每个所述电涡流位移传感器探头一一对应的谐振电容，每个所述电涡流位移传感器探头与所对应的谐振电容并联，构成至少10组谐振电路，其中，所述磁悬浮电机轴的每个自由度对应至少两组谐振电路；至少5组差分检波电路，所述磁悬浮电机轴的每个自由度至少对应1组差分检波电路，同一自由度的所述差分检波电路与所对应的所述谐振电路相连接；以及至少5组放大滤波电路，所述磁悬浮电机轴的每个自由度至少对应1组放大滤波电路，同一自由度的所述放大滤波电路与所对应的所述差分检波电路相连接。
  5. 根据权利要求4所述的轴位置检测装置，其特征在于，所述激励源发生电路为方波激励源发生电路。
  6. 根据权利要求4所述的轴位置检测装置，其特征在于，所述差分检波电路包括:
    信号选择电路，以及与所述信号选择电路相连接的差分电路。
  7. 根据权利要求4所述的轴位置检测装置，其特征在于，所述集成式前置器设置在磁悬浮电机的轴承控制器上。
  8. 根据权利要求4所述的轴位置检测装置，其特征在于，所有所述电涡 流位移传感器探头为电参数和机械参数分别全部相同的电涡流位移传感器探头；所有所述谐振电容为参数相同的电容。
  9. 根据权利要求8所述的轴位置检测装置，其特征在于，所有所述谐振电路为固有振荡频率与激励信号的频率相等的谐振电路，所述激励信号由所述激励源发生电路产生。
  10. 一种磁悬浮电机，其特征在于，包括：
    所述磁悬浮电机本体，和权利要求1-9任意一项所述的轴位置检测装置。
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