WO2016129092A1 - Hydrostatic bearing - Google Patents

Hydrostatic bearing Download PDF

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Publication number
WO2016129092A1
WO2016129092A1 PCT/JP2015/053913 JP2015053913W WO2016129092A1 WO 2016129092 A1 WO2016129092 A1 WO 2016129092A1 JP 2015053913 W JP2015053913 W JP 2015053913W WO 2016129092 A1 WO2016129092 A1 WO 2016129092A1
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Prior art keywords
holes
bearing
lubricating fluid
rotating shaft
hole
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PCT/JP2015/053913
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French (fr)
Japanese (ja)
Inventor
英嗣 石丸
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川崎重工業株式会社
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Priority to PCT/JP2015/053913 priority Critical patent/WO2016129092A1/en
Publication of WO2016129092A1 publication Critical patent/WO2016129092A1/en

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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00Bearings not otherwise provided for
    • F16C32/06Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings

Definitions

  • the present invention relates to a hydrostatic bearing that rotatably supports a rotating shaft by static pressure of a lubricating fluid, and more particularly, to a hydrostatic bearing applicable to a high-speed rotating machine.
  • Rotating machines such as turbines and compressors use various types of bearings such as plain bearings, rolling bearings, and magnetic bearings to support the rotating shaft.
  • the plain bearing is further classified into a dynamic pressure type and a static pressure type.
  • a hydrodynamic bearing is generated due to the viscosity of a lubricating fluid film (liquid such as oil or gas such as air) interposed in the bearing gap when it is drawn into the wedge-shaped gap generated by the relative sliding movement of the rotating shaft and the bearing.
  • the load is supported by pressure (dynamic pressure).
  • a hydrostatic bearing introduces a pre-pressurized high-pressure lubricating fluid into a gap between the rotating shaft and the bearing, and supports the load of the rotating shaft by the static pressure of the lubricating fluid.
  • a hydrostatic bearing as shown in FIG. 7, a cylindrical bearing member 402 into which a rotating shaft 401 is inserted is provided, and the bearing member 402 has a plurality of holes having the same hole diameter extending in the radial direction.
  • a hydrostatic bearing 400 in which through-holes 403 are arranged at equal intervals in the circumferential direction, and a lubricating fluid 404 having the same pressure is supplied to each through-hole 403.
  • a lubricating fluid is supplied to a rotating shaft in a direction opposite to the rotating direction from a through hole inclined obliquely from the radial direction of the rotating shaft.
  • a method of suppressing swinging in the rotation direction is known.
  • a method is known in which the rotating shaft is intentionally decentered downward to suppress swinging of the rotating shaft.
  • an object of the present invention is to provide a hydrostatic bearing (hereinafter referred to as “hydrostatic bearing”) that can more reliably suppress the occurrence of unstable vibration without causing such a problem.
  • the hydrostatic bearing according to the present invention is configured as follows.
  • a bearing member is provided, and this bearing member is a cylindrical bearing member in which a plurality of through holes are arranged at different positions in the circumferential direction and into which a rotating shaft can be inserted.
  • a hydrostatic bearing configured to supply a pre-pressurized lubricating fluid to the through-hole and to rotatably support the rotating shaft by a static pressure of the lubricating fluid, the hydrostatic bearing Is configured to have anisotropy in bearing rigidity.
  • the through holes may be arranged such that an interval between the through holes adjacent to each other in the circumferential direction at at least one position is different from the interval at at least one other position.
  • the bearing member has a pair of first and second circumferential regions facing each other, and the number of the through holes arranged in the pair of first circumferential regions is equal to the pair of first circumferential regions. More than the number of the said through-holes arrange
  • the bearing member further includes a fixing member fixed to an outer peripheral surface of the bearing member, and the fixing member has an annular groove communicating with each of the through holes, and the annular groove and the respective The lubricating fluid is supplied to the through holes, and the force that the rotating shaft receives from the lubricating fluid in the through holes in the pair of first and second circumferential regions is different.
  • the through hole may be configured such that the hole diameter of at least one through hole at a certain position is different from the hole diameter of at least one through hole at another position.
  • the bearing member has a pair of first and second circumferential regions opposed to each other, and a hole diameter of the through hole disposed in the pair of first circumferential regions is the pair.
  • the through-holes are larger in diameter than the through-holes arranged in the second circumferential region, and the respective through-holes are arranged at substantially equal intervals in the circumferential direction.
  • the bearing member further includes a fixing member fixed to an outer peripheral surface of the bearing member, and the fixing member has an annular groove communicating with each of the through holes, and the annular groove and the respective The lubricating fluid is supplied to the through holes, and the force that the rotating shaft receives from the lubricating fluid in the through holes in the pair of first and second circumferential regions is different.
  • the bearing member may be provided with an external supply means that preliminarily pressurizes the lubricating fluid to a predetermined pressure, and a supply pressure of the lubricating fluid supplied to at least one through-hole disposed at a certain position. Adjusting means for adjusting the supply pressure of the lubricating fluid pressurized by the external supply means so as to be different from the supply pressure of the lubricating fluid supplied to the at least one through hole.
  • the bearing member has an external supply means that pressurizes the lubricating fluid to a predetermined pressure in advance, and the bearing member has a pair of first and second circumferential regions facing each other, Supply pressure of the lubricating fluid supplied to the through-holes arranged in the first circumferential region of the lubricating fluid supplied to the through-holes arranged in the pair of second circumferential regions Adjusting means for adjusting the supply pressure of the lubricating fluid pressurized by the external supply means so as to be different from the supply pressure.
  • the hydrostatic bearing according to an aspect of the present invention is configured to have anisotropy in bearing rigidity so that the center of the rotating shaft forms an elliptical orbit when rotating at a high speed.
  • a rotating machine including a hydrostatic bearing and the rotating shaft, and the bearing member is provided with a plurality of through holes arranged at different positions in the circumferential direction, and rotated.
  • a cylindrical bearing member into which a shaft can be inserted is provided, a lubricating fluid pressurized in advance to the through hole is supplied, and the rotating shaft is rotatably supported by the static pressure of the lubricating fluid,
  • the hydrostatic bearing is configured to have anisotropy in bearing rigidity.
  • the rotating shaft is supported by a plurality of hydrostatic bearings, and the hydrostatic bearings differ in bearing rigidity obtained by superimposing circumferential bearing stiffness distributions of the hydrostatic bearings. It is configured to have directionality.
  • the bearing rigidity is anisotropic
  • the rotating shaft is not easily encouraged to swing around the rotating shaft in the rotational direction even if the rotational speed of the rotating shaft is increased.
  • An orbit for example, an elliptical orbit
  • the number of rotations causing unstable vibration can be increased as compared with the conventional one. Therefore, the occurrence of unstable vibration can be suppressed more reliably.
  • the bearing shaft is configured to have anisotropy in the bearing rigidity so as to draw an elliptical orbit at the time of high-speed rotation, even if the rotation speed of the rotation shaft is increased.
  • the rotating shaft is not easily promoted in the rotational direction of the rotating shaft, and the number of rotations causing unstable vibration can be increased compared to the conventional case. Therefore, the occurrence of unstable vibration can be suppressed more reliably.
  • the rotating shaft is supported by the hydrostatic bearing having anisotropy in bearing rigidity, the occurrence of unstable vibration in the rotating machine is suppressed as in the first aspect. Can do.
  • the plurality of hydrostatic bearings that support the rotating shaft are configured to have anisotropy in the bearing stiffness obtained by superimposing the circumferential bearing stiffness distributions of the plurality of hydrostatic bearings. Therefore, for example, when focusing on the bearing rigidity of a plurality of hydrostatic bearings as well as when focusing on the bearing rigidity of one hydrostatic bearing, the rotation speed can be increased even if the rotational speed of the rotating shaft is increased.
  • the shaft draws a non-circular orbit (for example, an elliptical orbit) in which the rotation of the rotating shaft in the rotation direction is not easily promoted, and the number of rotations where unstable vibration is generated can be increased as compared with the related art.
  • FIG. 1 is a partial cross-sectional perspective view showing a rotary machine to which a hydrostatic bearing according to a first embodiment of the present invention is applied. It is the side view and longitudinal direction sectional view which show the structure of the same hydrostatic bearing.
  • FIG. 3 is a cross-sectional view taken along line AA in FIG. 2. It is sectional drawing similar to FIG. 3 regarding the hydrostatic bearing which concerns on 2nd Example of this invention. It is sectional drawing similar to FIG. 3 regarding the hydrostatic bearing which concerns on 3rd Example of this invention. It is a figure which compares the stability of the hydrostatic bearing which concerns on a prior art example and the 1st-3rd Example. It is sectional drawing which shows schematically the prior art example of a hydrostatic bearing.
  • FIG. 1 shows a hydrostatic bearing (hydrostatic bearing mechanism) 100 incorporated in a rotary machine 10 such as a machine tool.
  • a rotary machine 10 such as a machine tool.
  • Other examples of the rotating machine 10 include a turbocharger, a turbine expander, and a turbine refrigerator.
  • the rotating machine 10 has a solid cylindrical rotating shaft (shaft) 2.
  • the rotary shaft 2 is supported by a hydrostatic bearing 100 so as to be rotatable about a central axis 101 passing through the center of the hydrostatic bearing 100.
  • the rotary shaft 2 has its central shaft 14 placed horizontally, and a rotary blade (not shown) for converting steam pressure into rotational force is attached to one end side thereof. It is done.
  • FIG. 1 shows a hydrostatic bearing (hydrostatic bearing mechanism) 100 incorporated in a rotary machine 10 such as a machine tool.
  • Other examples of the rotating machine 10 include a turbocharger, a turbine expander, and a turbine refrigerator.
  • the rotating machine 10 has
  • the center axis 101 of the hydrostatic bearing 100 and the center axis 14 of the rotary shaft 2 are coaxial.
  • the rotary shaft 2 has a static pressure when the center axis 14 is rotated.
  • the center axis 101 of the bearing 100 may be slightly eccentric and swing around.
  • the hydrostatic bearing 100 has a hollow inner cylinder 102 and a hollow outer cylinder 104, and the inner cylinder 102 is inserted inside the outer cylinder 104. More specifically, the inner cylinder 102 has an inner diameter slightly larger than the outer diameter of the rotary shaft 2, and the rotary shaft 2 is supported so as to be rotatable about the central axis 101.
  • the outer cylinder 104 has the same or substantially the same inner diameter as the outer diameter of the inner cylinder 102, and the inner cylinder 102 is supported inside the outer cylinder 104 so as not to rotate.
  • shrink fitting (calcination) can be used.
  • the outer cylinder 104 is heated and expanded to expand its inner diameter
  • the inner cylinder 102 is fitted into the expanded outer cylinder 104, and both are fixed in a cooled state (normal temperature state or use temperature state).
  • the outer cylinder 104 may be divided into two divided cylinders along a plane including the central axis 101, and these divided cylinders may be assembled around the inner cylinder 102 and fixed.
  • the inner cylinder 102 In order to supply the lubricating fluid 20 (liquid or gas) to a gap (lubricating space) having a predetermined thickness formed between the inner peripheral surface of the inner cylinder 102 and the outer peripheral surface of the rotary shaft 2, A plurality of flow paths are formed in the cylinder 104. As shown in FIGS. 1 to 3, the inner cylinder 102 according to the embodiment is directed in a radial direction from the central axis 101 on a transverse section 109 that is at the center in the axial direction of the inner cylinder 102 and orthogonal to the central axis 101. A plurality of extending through holes 110 are formed.
  • a plurality of through holes 110 y are symmetrical to the vertical axis Y and constant in the circumferential direction. Are formed at an interval (angle) ⁇ .
  • a plurality of through holes 110x are formed in the left region and the right region, respectively, symmetrically with respect to the horizontal axis X and at a constant interval (angle) ⁇ in the circumferential direction.
  • the inner cylinder 102 has a holeless region or a solid region where the through hole 110 is not provided between the upper region or the lower region and the left region or the right region.
  • the interval ⁇ is set to 5 to 15 degrees.
  • the inner diameters of the through holes 110y in the upper region and the lower region are equal to the inner diameters of the through holes 110x in the left region and the right region, and the number of the through holes 110y in the upper region and the lower region is “6”.
  • the number of the through holes 110x in the right region is “2”, and the amount of the lubricating fluid 20 supplied from the top and bottom through the plurality of through holes 110y is supplied from the left and right regions through the plurality of through holes 110x. It is configured to be larger than the amount of the fluid 20.
  • the outer cylinder 104 has a through-hole 110 extending in a radial direction from the central axis 101 at a location located on the above-described cross section 109 in a state of being combined with the inner cylinder 102, and a through-hole.
  • An annular groove manifold 114 is formed which communicates with the hole 110 and is continuous in the circumferential direction along the inner peripheral surface. Therefore, in a state where the outer cylinder 104 is combined with the inner cylinder 102, the inner cylinder through hole 110 communicates with the manifold 114 and the outer cylinder through hole 112 via the manifold 114.
  • the lubricating fluid supply pipe 16 is connected to the outer cylinder through hole 112.
  • the lubricating fluid supply pipe 16 is connected to a lubricating fluid supply source 18 that supplies pressurized lubricating fluid 20.
  • the rotary shaft 2 is inserted inside the inner cylinder 102.
  • a gap or a lubrication space (not shown) is formed between the outer peripheral surface of the rotary shaft 2 and the inner peripheral surface of the inner cylinder 102.
  • the lubricating fluid 20 supplied from the lubricating fluid supply source 18 is supplied to the manifold 114 through the outer cylinder through hole 112.
  • the lubricating fluid 20 supplied to the manifold 114 is dispersed in the circumferential direction along the manifold 114, and is supplied to the bearing space through the inner cylinder through hole 110 communicating therewith.
  • the lubricating fluid 20 supplied to the bearing space from the inner cylinder through-hole 110 is applied to the central shaft 101 of the hydrostatic bearing 100 in the upper region and the lower region and the left region and the right region in the state shown in FIGS.
  • the rotating shaft 2 is urged toward it.
  • more through holes 110 are formed in the upper region and the lower region than in the left region and the right region, and the force Fy applied to the rotating shaft 2 from the up and down direction is applied to the rotating shaft 2 from the left and right direction. Since it is larger than Fx, the vertical bearing rigidity is higher than the horizontal bearing rigidity. As a result, the center of the rotating shaft 2 draws an elliptical locus.
  • FIG. 4 shows the inner cylinder 202 of the hydrostatic bearing 200 according to the second embodiment.
  • a large number of through-holes 210 extending in the radial direction are formed on the at least one cross section orthogonal to the central axis 101 with a constant interval in the circumferential direction.
  • a through hole in the 12 o'clock direction (Y-axis direction in the drawing) is denoted by reference numeral 210 (1), and 22.5 degrees clockwise from the through hole 210 (1).
  • the through holes separated from each other are indicated by reference numerals 210 (2)...
  • the inner diameters of the four through holes 210 (15) to 210 (3) in the upper region and the four through holes 210 (7) to 210 (11) in the lower region are the three through holes in the right region.
  • the inner diameters of the holes 210 (4) to 210 (6) and the three through holes 210 (12) to 210 (14) in the left region are made larger.
  • the outer cylinder 204 is the same as the outer cylinder 104 of the first embodiment.
  • the amount of the lubricating fluid 20 supplied from the vertical direction is larger than the amount of the lubricating fluid 20 supplied from the left and right regions, and the rotary shaft 2 is By being pressurized in the vertical direction, the rotating shaft 2 draws a non-circular orbit (for example, an elliptical orbit).
  • FIG. 5 shows a hydrostatic bearing 300 according to the third embodiment.
  • the inner cylinder 302 has a plurality of through-holes 310 extending in the radial direction on the at least one cross section orthogonal to the central axis 101 with a constant interval in the circumferential direction.
  • a through hole in the 12 o'clock direction (Y-axis direction in the drawing) is denoted by reference numeral 310 (1), and 22.5 degrees clockwise from the through hole 310 (1).
  • the through holes separated from each other are denoted by reference numerals 310 (2)... 310 (16).
  • each of the through holes 310 (1) to 310 (16) has the same inner diameter.
  • the outer cylinder 304 has an upper region through hole 310 (15) to 310 (3), a right region through hole 310 (4) to 310 (6), a lower region through hole on a cross section corresponding to the inner cylinder through hole 310.
  • 312 (7 to 11), 312 (12 to 14) are formed.
  • the through holes 312 (15 to 3), 312 (4 to 6), 312 (7 to 11), and 312 (12 to 14) are respectively provided with pressure adjusting mechanisms 316 (15 to 3) and 316 (4 to 6). , 316 (7 to 11) and 316 (12 to 14) are connected to the lubricating fluid supply source 18.
  • the lubricating fluid 20 supplied from the lubricating fluid supply source 18 has the pressure adjusted by the pressure adjusting mechanisms 316 (15 to 3), 316. (4 to 6), 316 (7 to 11), and 316 (12 to 14), and then the corresponding manifolds 314 (15 to 3), 314 (4 to 6), 314 (7 to 11), 314 (12-14) through the through holes 310 (15) -310 (3), 310 (4) -310 (6), 310 (7) -310 (11), 310 (12) -310 (14) Supplied to the bearing space.
  • the pressure after the adjustment is such that the pressure of the lubricating fluid 20 supplied from the upper region through holes 310 (15) to 310 (3) and the lower region through holes 310 (7) to 310 (11) is the right.
  • the pressure of the lubricating fluid 20 supplied from the region through holes 310 (4) to 310 (6) and the left region through holes 310 (12) to 310 (14) is larger.
  • the pressure of the lubricating fluid 20 supplied from the upper region through holes 310 (15) to 310 (3) and the pressure of the lubricating fluid 20 supplied from the lower region through holes 310 (7) to 310 (11) may be the same. , One may be larger than the other.
  • the pressure of the lubricating fluid 20 supplied from the right region through holes 310 (4) to 310 (6) and the pressure of the lubricating fluid 20 supplied from the left region through holes 310 (12) to 310 (14) are the same. Preferably there is.
  • the amount of the lubricating fluid 20 supplied from the vertical direction is larger than the amount of the lubricating fluid 20 supplied from the left and right regions, and the rotary shaft 2 is applied in the vertical direction.
  • the rotating shaft 2 draws a non-circular locus.
  • the stability of the rotating shaft of the isotropic hydrostatic bearing (comparative example) configured to be supplied to the rotating shaft was examined using simulation. The result of the examination is shown in FIG. In FIG. 6, the horizontal axis represents the rotational shaft rotational speed, and the vertical axis represents the damping ratio.
  • the damping ratio is an index indicating the vibration of the rotating shaft, with the + side representing a stable vibration region and the ⁇ side representing an unstable vibration region.
  • the unstable vibration increases as the rotational speed increases, and falls from the stable region to the unstable region at a relatively low rotational speed N0.
  • the stable region is maintained up to relatively high rotational speeds N1, N2, and N3 (> N0).
  • the inner cylinder through-holes 110 are formed on one transverse section 109
  • two rows in which the inner cylinder through-holes 110 are formed on a plurality of transverse sections 109 It is good also as the above air supply.
  • the inner cylinder through hole 110 may be formed on one or a plurality of cross sections 109.
  • the number of inner cylinder through holes formed on each cross section can be appropriately changed.
  • the number of inner cylinder through holes provided in the upper region and the lower region, and the right region and the left region is not limited to the above example.
  • the size of the inner cylinder through-hole, the supply pressure of the lubricating fluid for each inner cylinder through-hole, and combinations thereof can be changed as appropriate. In short, what is necessary is just to be comprised so that bearing rigidity may have anisotropy. Further, in the first embodiment, the lubricating fluid supply pipe 16 may be directly connected to the inner cylinder 102.
  • the outer cylinder 104 can be omitted.
  • the manifolds 314 (15 to 3) and 314 (7 to 11) may be communicated with each other.
  • manifolds 314 (4-6) and 314 (12-14) may be in communication.
  • a single rotating shaft 2 may be supported at a plurality of locations using a plurality of hydrostatic bearings according to the present invention.
  • anisotropy of a plurality of hydrostatic bearings is obtained by superimposing (adding) the circumferential bearing stiffness distribution of each of the plurality of hydrostatic bearings, that is, the bearing stiffness of the entire plurality of hydrostatic bearings.
  • Hydrostatic bearing 102 Inner cylinder 104: Outer cylinder 109: Cross section 110: Inner cylinder through hole 110y: Upper area through hole, lower area through hole 110x: Left area through hole, right area through hole 112: Outer cylinder through Hole 114: Manifold 200: Static pressure bearing 202: Inner cylinder 210 (1) to 210 (16): Inner cylinder through hole 300: Static pressure bearing 302: Inner cylinder 304: Outer cylinder 310 (1) to 310 (16): Inner cylinder through holes 312 (15-3) to 312 (12-14): Outer cylinder through holes 314 (15-3) to 314 (12-14): Manifolds 316 (15-3) to 316 (12-14) : Pressure adjustment mechanism

Abstract

The present invention addresses the problem of providing a hydrostatic bearing (100, 200, 300) for which generation of unstable vibrations is limited. Said hydrostatic bearing (100, 200, 300) is provided with a cylindrical bearing member in which multiple through holes (110, 210, 310) are disposed at different positions in the circumferential direction and into which a rotating shaft (2) can be inserted. The hydrostatic bearing (100, 200, 300) is configured so that a previously pressurized lubricating fluid (20) is supplied to the through holes (110, 210, 310), the rotating shaft (2) is supported to rotate freely by the static pressure of the lubricating fluid (20), and bearing rigidity is anisotropic.

Description

静圧軸受Hydrostatic bearing
 本発明は、潤滑流体の静圧により回転シャフトを回転可能に支持する静圧軸受、特に高速回転機械に適用可能な静圧軸受に関する。 The present invention relates to a hydrostatic bearing that rotatably supports a rotating shaft by static pressure of a lubricating fluid, and more particularly, to a hydrostatic bearing applicable to a high-speed rotating machine.
 タービンや圧縮機などの回転機械では、回転シャフトを支持するために、すべり軸受、転がり軸受、磁気軸受など様々な形式の軸受が使用されている。すべり軸受は、さらに動圧型と静圧型に分類される。 Rotating machines such as turbines and compressors use various types of bearings such as plain bearings, rolling bearings, and magnetic bearings to support the rotating shaft. The plain bearing is further classified into a dynamic pressure type and a static pressure type.
 動圧型軸受は、軸受隙間に介在している潤滑流体膜(油などの液体、空気などの気体)が回転シャフトと軸受の相対すべり運動によって生じるくさび状隙間に引き込まれる際、その粘性によって発生する圧力(動圧)によって荷重を支えるものである。 A hydrodynamic bearing is generated due to the viscosity of a lubricating fluid film (liquid such as oil or gas such as air) interposed in the bearing gap when it is drawn into the wedge-shaped gap generated by the relative sliding movement of the rotating shaft and the bearing. The load is supported by pressure (dynamic pressure).
 一方、静圧型軸受は、予め加圧された高圧の潤滑流体を回転シャフトと軸受の隙間内に導入し、その潤滑流体の静圧によって回転シャフトの荷重を支えるものである。静圧型軸受の代表例として、図7に示すように、回転シャフト401が挿設された筒状の軸受部材402を備え、該軸受部材402には、放射方向に延びる同じ穴径である複数の貫通孔403が周方向に等間隔に配置され、各貫通孔403へ同じ圧力の潤滑流体404が供給されるように構成された静圧型軸受400が知られている。 On the other hand, a hydrostatic bearing introduces a pre-pressurized high-pressure lubricating fluid into a gap between the rotating shaft and the bearing, and supports the load of the rotating shaft by the static pressure of the lubricating fluid. As a representative example of a hydrostatic bearing, as shown in FIG. 7, a cylindrical bearing member 402 into which a rotating shaft 401 is inserted is provided, and the bearing member 402 has a plurality of holes having the same hole diameter extending in the radial direction. There is known a hydrostatic bearing 400 in which through-holes 403 are arranged at equal intervals in the circumferential direction, and a lubricating fluid 404 having the same pressure is supplied to each through-hole 403.
 ところで、ラジアル軸受に関して、動圧型軸受では、回転シャフトの回転数を増加させていくと、ある時点で突然、回転シャフトの振動が大きくなる。この振動は、軸受内を回転する潤滑膜の動圧効果に起因して回転シャフトが回転方向へ振れ回る自励的な不安定振動である。静圧型軸受でも、高速回転時に動圧型軸受と同様の動圧効果が現れるので、同様に不安定振動が発生することが知られている。 By the way, with respect to radial bearings, in a dynamic pressure type bearing, when the rotational speed of the rotating shaft is increased, the vibration of the rotating shaft suddenly increases at a certain point. This vibration is a self-excited unstable vibration in which the rotating shaft swings in the rotation direction due to the dynamic pressure effect of the lubricating film rotating in the bearing. It is also known that hydrostatic bearings exhibit the same dynamic pressure effect as that of hydrodynamic bearings during high-speed rotation, and similarly cause unstable vibrations.
 この不安定振動を抑える方法として、静圧型軸受では、回転シャフトの放射方向から斜めに傾いた貫通孔から回転シャフトに対して回転方向と反対方向に向けて潤滑流体を供給することで、回転シャフトの回転方向への振れ回りを抑える方法が知られている。また、上方に位置する貫通孔を下方に位置する貫通孔よりも穴径を大きくし、水平方向を向いた回転シャフトに対して上方の貫通孔からより大きな圧力の潤滑流体を供給することで、意図的に回転シャフトを下方に偏心させて回転シャフトの振れ回りを抑える方法が知られている。 As a method for suppressing this unstable vibration, in a hydrostatic bearing, a lubricating fluid is supplied to a rotating shaft in a direction opposite to the rotating direction from a through hole inclined obliquely from the radial direction of the rotating shaft. There is known a method of suppressing swinging in the rotation direction. In addition, by increasing the diameter of the through hole located above the through hole located below and supplying a lubricating fluid with a greater pressure from the upper through hole to the rotating shaft oriented in the horizontal direction, A method is known in which the rotating shaft is intentionally decentered downward to suppress swinging of the rotating shaft.
 なお、動圧型軸受に関して、例えば特許文献1には、動圧型ティルティングパッド軸受において、荷重方向に位置するパッドの受圧面の面積を周方向両隣のパッドの受圧面の面積より大きくすることにより、荷重直角方向の軸受剛性を低下させ、軸受剛性の異方性を高めることで、不安定振動を抑制する方法が記載されている。 Regarding the dynamic pressure type bearing, for example, in Patent Document 1, in the dynamic pressure type tilting pad bearing, by making the area of the pressure receiving surface of the pad located in the load direction larger than the area of the pressure receiving surface of the pad on both sides in the circumferential direction, A method is described in which unstable vibration is suppressed by reducing the bearing rigidity in the direction perpendicular to the load and increasing the anisotropy of the bearing rigidity.
特開2012-149694号公報JP 2012-149694 A
 ところが、静圧型軸受のための前者の方法では、軸受に斜めの貫通孔を複数設けるので加工が面倒であると共に、貫通孔の傾き具合によっては、回転シャフトに回転方向と逆方向の振れ回り力を発生させるおそれがあった。また、後者の方法では、軸受に異なる径の貫通孔を加工するので加工が面倒になると共に、回転シャフトの偏心が大きすぎると、回転シャフトの底面と軸受の間が非常に狭くなるので、わずかな振動によって回転シャフトが軸受に接触するおそれがあるという問題があった。 However, in the former method for hydrostatic bearings, since a plurality of oblique through holes are provided in the bearing, the processing is troublesome, and depending on the inclination of the through holes, the swinging force in the direction opposite to the rotational direction is applied to the rotating shaft. There was a risk of generating. In the latter method, through-holes with different diameters are machined in the bearing, which is cumbersome, and if the eccentricity of the rotating shaft is too large, the gap between the bottom surface of the rotating shaft and the bearing becomes very narrow. There has been a problem that the rotating shaft may come into contact with the bearing due to various vibrations.
 そこで、本発明は、このような問題を生じさせずに、より確実に不安定振動の発生を抑制できる静圧型軸受(以降、「静圧軸受」という。)を提供することを課題とする。 Therefore, an object of the present invention is to provide a hydrostatic bearing (hereinafter referred to as “hydrostatic bearing”) that can more reliably suppress the occurrence of unstable vibration without causing such a problem.
 前記課題を解決するために、本発明に係る静圧軸受は次のように構成したことを特徴とする。 In order to solve the above-described problems, the hydrostatic bearing according to the present invention is configured as follows.
 本発明に係る第1の態様によれば、軸受部材が提供され、この軸受部材は、複数の貫通孔が周方向の異なる位置に配設され、回転シャフトを挿設可能な円筒状の軸受部材を備え、前記貫通孔に予め加圧された潤滑流体を供給し、前記潤滑流体の静圧により前記回転シャフトを回転自在に支持するように構成された静圧軸受であって、前記静圧軸受は、軸受剛性に異方性を有するように構成されている。 According to the first aspect of the present invention, a bearing member is provided, and this bearing member is a cylindrical bearing member in which a plurality of through holes are arranged at different positions in the circumferential direction and into which a rotating shaft can be inserted. A hydrostatic bearing configured to supply a pre-pressurized lubricating fluid to the through-hole and to rotatably support the rotating shaft by a static pressure of the lubricating fluid, the hydrostatic bearing Is configured to have anisotropy in bearing rigidity.
 また前記貫通孔は、少なくとも一箇所のある位置における周方向で互いに隣接する前記貫通孔同士の間隔が、少なくとも一箇所の他の位置における前記間隔と異なるように配置されていてもよい。 In addition, the through holes may be arranged such that an interval between the through holes adjacent to each other in the circumferential direction at at least one position is different from the interval at at least one other position.
 好適には、前記軸受部材は、互いに対向する一対の第1および第2の周方向領域を有し、前記一対の第1の周方向領域に配置される前記貫通孔の個数が、前記一対の第2の周方向領域に配置される前記貫通孔の個数より多く、前記各貫通孔の穴径が実質的に同一である。 Preferably, the bearing member has a pair of first and second circumferential regions facing each other, and the number of the through holes arranged in the pair of first circumferential regions is equal to the pair of first circumferential regions. More than the number of the said through-holes arrange | positioned in a 2nd circumferential direction area | region, the hole diameter of each said through-hole is substantially the same.
 さらに好適には、前記軸受部材は、前記軸受部材の外周面に固定された固定部材をさらに備え、前記固定部材は、前記各貫通孔に連通する環状溝を有し、前記環状溝及び前記各貫通孔に前記潤滑流体が供給され、前記回転シャフトが前記一対の第1および第2の周方向領域における前記各貫通孔の前記潤滑流体から受ける力が異なる。 More preferably, the bearing member further includes a fixing member fixed to an outer peripheral surface of the bearing member, and the fixing member has an annular groove communicating with each of the through holes, and the annular groove and the respective The lubricating fluid is supplied to the through holes, and the force that the rotating shaft receives from the lubricating fluid in the through holes in the pair of first and second circumferential regions is different.
 さらに前記貫通孔は、ある位置の少なくとも一つの貫通孔の穴径が他の位置の少なくとも一つの貫通孔の穴径と異なるように構成されていてもよい。 Furthermore, the through hole may be configured such that the hole diameter of at least one through hole at a certain position is different from the hole diameter of at least one through hole at another position.
 好適には、前記軸受部材は、互いに対向する一対の第1および第2の周方向領域を有し、前記一対の第1の周方向領域に配置される前記貫通孔の穴径が、前記一対の第2の周方向領域に配置される前記貫通孔の穴径より大きく、前記各貫通孔が周方向に実質的に等間隔で配置される。 Preferably, the bearing member has a pair of first and second circumferential regions opposed to each other, and a hole diameter of the through hole disposed in the pair of first circumferential regions is the pair. The through-holes are larger in diameter than the through-holes arranged in the second circumferential region, and the respective through-holes are arranged at substantially equal intervals in the circumferential direction.
 さらに好適には、前記軸受部材は、前記軸受部材の外周面に固定された固定部材をさらに備え、前記固定部材は、前記各貫通孔に連通する環状溝を有し、前記環状溝及び前記各貫通孔に前記潤滑流体が供給され、前記回転シャフトが前記一対の第1および第2の周方向領域における前記各貫通孔の前記潤滑流体から受ける力が異なる。 More preferably, the bearing member further includes a fixing member fixed to an outer peripheral surface of the bearing member, and the fixing member has an annular groove communicating with each of the through holes, and the annular groove and the respective The lubricating fluid is supplied to the through holes, and the force that the rotating shaft receives from the lubricating fluid in the through holes in the pair of first and second circumferential regions is different.
 また前記軸受部材は、前記潤滑流体を所定の圧力に予め加圧する外部供給手段と、ある位置に配置された少なくとも一つの貫通孔に供給される前記潤滑流体の供給圧力が、他の位置に配置された少なくとも一つの貫通孔に供給される前記潤滑流体の供給圧力と異なるように、前記外部供給手段によって加圧された前記潤滑流体の供給圧力を調整する調整手段と、を備える。 In addition, the bearing member may be provided with an external supply means that preliminarily pressurizes the lubricating fluid to a predetermined pressure, and a supply pressure of the lubricating fluid supplied to at least one through-hole disposed at a certain position. Adjusting means for adjusting the supply pressure of the lubricating fluid pressurized by the external supply means so as to be different from the supply pressure of the lubricating fluid supplied to the at least one through hole.
 好適には、前記軸受部材は、前記潤滑流体を所定の圧力に予め加圧する外部供給手段と、前記軸受部材は、互いに対向する一対の第1および第2の周方向領域を有し、前記一対の第1の周方向領域に配置される前記貫通孔に供給される前記潤滑流体の供給圧力が、前記一対の第2の周方向領域に配置される前記貫通孔に供給される前記潤滑流体の供給圧力と異なるように、前記外部供給手段によって加圧された前記潤滑流体の供給圧力を調整する調整手段と、を備える。 Preferably, the bearing member has an external supply means that pressurizes the lubricating fluid to a predetermined pressure in advance, and the bearing member has a pair of first and second circumferential regions facing each other, Supply pressure of the lubricating fluid supplied to the through-holes arranged in the first circumferential region of the lubricating fluid supplied to the through-holes arranged in the pair of second circumferential regions Adjusting means for adjusting the supply pressure of the lubricating fluid pressurized by the external supply means so as to be different from the supply pressure.
 本発明に係る態様による前記静圧軸受は、前記回転シャフトの中心が高速回転時に楕円軌道を描くように軸受剛性に異方性を有するように構成されている。 The hydrostatic bearing according to an aspect of the present invention is configured to have anisotropy in bearing rigidity so that the center of the rotating shaft forms an elliptical orbit when rotating at a high speed.
 本発明に係る第2の態様によれば、静圧軸受と、前記回転シャフトとを備える回転機械が提供され、この軸受部材は、複数の貫通孔が周方向の異なる位置に配設され、回転シャフトを挿設可能な円筒状の軸受部材を備え、前記貫通孔に予め加圧された潤滑流体を供給し、前記潤滑流体の静圧により前記回転シャフトを回転自在に支持するように構成され、前記静圧軸受は、軸受剛性に異方性を有するように構成されている。 According to the second aspect of the present invention, there is provided a rotating machine including a hydrostatic bearing and the rotating shaft, and the bearing member is provided with a plurality of through holes arranged at different positions in the circumferential direction, and rotated. A cylindrical bearing member into which a shaft can be inserted is provided, a lubricating fluid pressurized in advance to the through hole is supplied, and the rotating shaft is rotatably supported by the static pressure of the lubricating fluid, The hydrostatic bearing is configured to have anisotropy in bearing rigidity.
 また好適には、前記回転シャフトは、複数の前記静圧軸受によって支持され、複数の前記静圧軸受は、複数の前記各静圧軸受の周方向の軸受剛性分布を重ね合わせた軸受剛性に異方性を有するように構成されている。 Preferably, the rotating shaft is supported by a plurality of hydrostatic bearings, and the hydrostatic bearings differ in bearing rigidity obtained by superimposing circumferential bearing stiffness distributions of the hydrostatic bearings. It is configured to have directionality.
 以上の構成により、本願各請求項に係る発明によれば、次の効果が得られる。 With the above configuration, according to the invention according to each claim of the present application, the following effects can be obtained.
 請求項1に係る発明によれば、軸受剛性に異方性があるので、回転シャフトの回転数を増加させても、回転シャフトが、回転シャフトの回転方向への振れ回りが助長されにくい非円軌道(例えば楕円軌道)を描くこととなり、不安定振動の発生回転数を従来よりも高めることができる。したがって、より確実に不安定振動の発生を抑制することができる。 According to the first aspect of the present invention, since the bearing rigidity is anisotropic, the rotating shaft is not easily encouraged to swing around the rotating shaft in the rotational direction even if the rotational speed of the rotating shaft is increased. An orbit (for example, an elliptical orbit) is drawn, and the number of rotations causing unstable vibration can be increased as compared with the conventional one. Therefore, the occurrence of unstable vibration can be suppressed more reliably.
 請求項2~4に係る発明によれば、複数の貫通孔は、互いに等しい間隔で配置されていないので、軸受剛性に異方性を持たせることができる。よって、請求項1に係る発明と同様の効果を奏することができる。 According to the inventions according to claims 2 to 4, since the plurality of through holes are not arranged at equal intervals, the bearing rigidity can be made anisotropic. Therefore, the same effect as that of the invention according to claim 1 can be obtained.
 請求項5~7に係る発明によれば、複数の貫通孔は、各穴径が等しくないので、軸受剛性に異方性を持たせることができる。よって、請求項1に係る発明と同様の効果を奏することができる。 According to the inventions according to claims 5 to 7, since the diameters of the plurality of through holes are not equal, the bearing rigidity can be made anisotropic. Therefore, the same effect as that of the invention according to claim 1 can be obtained.
 請求項8および9に係る発明によれば、複数の貫通孔は、各貫通孔に潤滑流体を供給する外部圧力が等しくないので、軸受剛性に異方性を持たせることができる。よって、請求項1に係る発明と同様の効果を奏することができる。 According to the inventions according to claims 8 and 9, since the external pressure for supplying the lubricating fluid to each through hole is not equal, the plurality of through holes can have anisotropy in bearing rigidity. Therefore, the same effect as that of the invention according to claim 1 can be obtained.
 請求項10に係る発明によれば、回転シャフトの中心が高速回転時に楕円軌道を描くように軸受剛性に異方性を有するように構成されているので、回転シャフトの回転数を増加させても、回転シャフトが、回転シャフトの回転方向への振れ回りが助長されにくく、不安定振動の発生回転数を従来よりも高めることができる。したがって、より確実に不安定振動の発生を抑制することができる。 According to the tenth aspect of the present invention, since the bearing shaft is configured to have anisotropy in the bearing rigidity so as to draw an elliptical orbit at the time of high-speed rotation, even if the rotation speed of the rotation shaft is increased. The rotating shaft is not easily promoted in the rotational direction of the rotating shaft, and the number of rotations causing unstable vibration can be increased compared to the conventional case. Therefore, the occurrence of unstable vibration can be suppressed more reliably.
 請求項11に係る発明によれば、軸受剛性に異方性がある静圧軸受によって回転シャフトを支持しているので、請求項1と同様に、回転機械における不安定振動の発生を抑制することができる。 According to the eleventh aspect of the invention, since the rotating shaft is supported by the hydrostatic bearing having anisotropy in bearing rigidity, the occurrence of unstable vibration in the rotating machine is suppressed as in the first aspect. Can do.
 請求項12に係る発明によれば、回転シャフトを支持する複数の静圧軸受は、複数の各静圧軸受の周方向の軸受剛性分布を重ね合わせた軸受剛性に異方性を有するように構成されているので、例えば複数の静圧軸受全体の軸受剛性に着目する場合にも、1つの静圧軸受の軸受剛性に着目する場合と同様に、回転シャフトの回転数を増加させても、回転シャフトが、回転シャフトの回転方向への振れ回りが助長されにくい非円軌道(例えば楕円軌道)を描くこととなり、不安定振動の発生回転数を従来よりも高めることができる。 According to the invention of claim 12, the plurality of hydrostatic bearings that support the rotating shaft are configured to have anisotropy in the bearing stiffness obtained by superimposing the circumferential bearing stiffness distributions of the plurality of hydrostatic bearings. Therefore, for example, when focusing on the bearing rigidity of a plurality of hydrostatic bearings as well as when focusing on the bearing rigidity of one hydrostatic bearing, the rotation speed can be increased even if the rotational speed of the rotating shaft is increased. The shaft draws a non-circular orbit (for example, an elliptical orbit) in which the rotation of the rotating shaft in the rotation direction is not easily promoted, and the number of rotations where unstable vibration is generated can be increased as compared with the related art.
本発明の第1実施例に係る静圧軸受を適用した回転機械を示す一部断面斜視図である。1 is a partial cross-sectional perspective view showing a rotary machine to which a hydrostatic bearing according to a first embodiment of the present invention is applied. 同静圧軸受の構成を示す側面図と長手方向断面図である。It is the side view and longitudinal direction sectional view which show the structure of the same hydrostatic bearing. 図2のA-A線での断面図である。FIG. 3 is a cross-sectional view taken along line AA in FIG. 2. 本発明の第2実施例に係る静圧軸受に関する図3と同様の断面図である。It is sectional drawing similar to FIG. 3 regarding the hydrostatic bearing which concerns on 2nd Example of this invention. 本発明の第3実施例に係る静圧軸受に関する図3と同様の断面図である。It is sectional drawing similar to FIG. 3 regarding the hydrostatic bearing which concerns on 3rd Example of this invention. 従来例と第1~3実施例に係る静圧軸受の安定性を比較する図である。It is a figure which compares the stability of the hydrostatic bearing which concerns on a prior art example and the 1st-3rd Example. 静圧軸受の従来例を概略的に示す断面図である。It is sectional drawing which shows schematically the prior art example of a hydrostatic bearing.
以下、添付図面を参照して本発明に係る静圧軸受の実施例を説明する。 Hereinafter, embodiments of a hydrostatic bearing according to the present invention will be described with reference to the accompanying drawings.
(第1実施例)
 図1は、工作機械などの回転機械10に組み込まれた静圧軸受(静圧軸受機構)100を示す。なお、回転機械10としては他にもターボチャージャ、タービン膨張機、タービン式冷凍機等がある。回転機械10は、中実円筒状の回転シャフト(シャフト)2を有する。回転シャフト2は、静圧軸受100によって、該静圧軸受100の中心を通る中心軸101を中心に回転自在に支持されている。例えば、回転機械10が横置式の蒸気タービンの場合、回転シャフト2はその中心軸14が水平に置かれ、その一端側には蒸気圧力を回転力に変換する回転翼(図示せず)が取り付けられる。なお、図1は、静圧軸受100の中心軸101と回転シャフト2の中心軸14が同軸上にある場合を図示しているが、回転シャフト2は、回転時、その中心軸14が静圧軸受100の中心軸101からわずかに偏心して振れ回ることがある。
(First embodiment)
FIG. 1 shows a hydrostatic bearing (hydrostatic bearing mechanism) 100 incorporated in a rotary machine 10 such as a machine tool. Other examples of the rotating machine 10 include a turbocharger, a turbine expander, and a turbine refrigerator. The rotating machine 10 has a solid cylindrical rotating shaft (shaft) 2. The rotary shaft 2 is supported by a hydrostatic bearing 100 so as to be rotatable about a central axis 101 passing through the center of the hydrostatic bearing 100. For example, when the rotary machine 10 is a horizontal steam turbine, the rotary shaft 2 has its central shaft 14 placed horizontally, and a rotary blade (not shown) for converting steam pressure into rotational force is attached to one end side thereof. It is done. FIG. 1 illustrates the case where the center axis 101 of the hydrostatic bearing 100 and the center axis 14 of the rotary shaft 2 are coaxial. However, the rotary shaft 2 has a static pressure when the center axis 14 is rotated. The center axis 101 of the bearing 100 may be slightly eccentric and swing around.
 静圧軸受100は中空内筒102と中空外筒104を有し、外筒104の内側に内筒102が挿入されている。詳細に説明すると、内筒102は、回転シャフト2の外径よりもわずかに大きな内径を有し、回転シャフト2は中心軸101を中心に回転可能に支持される。外筒104は内筒102の外径と同一又はほぼ同一の内径を有し、内筒102は外筒104の内側に回転不能に支持されている。 The hydrostatic bearing 100 has a hollow inner cylinder 102 and a hollow outer cylinder 104, and the inner cylinder 102 is inserted inside the outer cylinder 104. More specifically, the inner cylinder 102 has an inner diameter slightly larger than the outer diameter of the rotary shaft 2, and the rotary shaft 2 is supported so as to be rotatable about the central axis 101. The outer cylinder 104 has the same or substantially the same inner diameter as the outer diameter of the inner cylinder 102, and the inner cylinder 102 is supported inside the outer cylinder 104 so as not to rotate.
 内筒102を外筒104の内側に隙間なく固定するために、例えば、焼ばめ(焼かしめ)を用いることができる。この場合、外筒104を加熱し膨張させてその内径を広げ、その広げた外筒104に内筒102をはめ入れ、冷却状態(常温状態又は使用温度状態)で両者を固着させる。または、中心軸101を含む面に沿って外筒104を2つの分割筒に二分割し、これらの分割筒を内筒102の周囲に組み付けて固定してもよい。 In order to fix the inner cylinder 102 to the inner side of the outer cylinder 104 without a gap, for example, shrink fitting (calcination) can be used. In this case, the outer cylinder 104 is heated and expanded to expand its inner diameter, the inner cylinder 102 is fitted into the expanded outer cylinder 104, and both are fixed in a cooled state (normal temperature state or use temperature state). Alternatively, the outer cylinder 104 may be divided into two divided cylinders along a plane including the central axis 101, and these divided cylinders may be assembled around the inner cylinder 102 and fixed.
 内筒102の内周面と回転シャフト2の外周面との間に形成される所定厚さの隙間(潤滑空間)に潤滑流体20(液体又は気体)を供給するために、内筒102と外筒104には複数の流路が形成される。実施例に係る内筒102は、図1~図3に示すように、内筒102の軸方向中央にあって中心軸101に直交する横断面109上に、中心軸101から放射方向に向けて延びる複数の貫通孔110がそれぞれ形成されている。 In order to supply the lubricating fluid 20 (liquid or gas) to a gap (lubricating space) having a predetermined thickness formed between the inner peripheral surface of the inner cylinder 102 and the outer peripheral surface of the rotary shaft 2, A plurality of flow paths are formed in the cylinder 104. As shown in FIGS. 1 to 3, the inner cylinder 102 according to the embodiment is directed in a radial direction from the central axis 101 on a transverse section 109 that is at the center in the axial direction of the inner cylinder 102 and orthogonal to the central axis 101. A plurality of extending through holes 110 are formed.
 図2(a)と図3に詳細に示すように、図示の状態で、上部領域と下部領域には、それぞれ複数の貫通孔110yが上下方向の軸Yに対称に、かつ、周方向に一定の間隔(角度)θをあけて形成されている。また、図示の状態で、左領域と右領域には、それぞれ複数の貫通孔110xが水平方向の軸Xに対称に、かつ、周方向に一定の間隔(角度)θをあけて形成されている。さらに内筒102は、図示の状態で、上部領域または下部領域と、左領域または右領域との間に、貫通孔110が設けられていない穴無領域又は中実領域がある。なお、実施例では、上述の間隔θは、5~15度に設定されている。また、実施例では、上部領域及び下部領域の貫通孔110yと左領域と右領域の貫通孔110xの内径を等しく、また、上部領域と下部領域の貫通孔110yの数を「6」、左領域と右領域の貫通孔110xの数を「2」として、複数の貫通孔110yを介して上下方向から供給される潤滑流体20の量が複数の貫通孔110xを介して左右領域から供給される潤滑流体20の量よりも多くなるように構成されている。 As shown in detail in FIGS. 2A and 3, in the illustrated state, in the upper region and the lower region, a plurality of through holes 110 y are symmetrical to the vertical axis Y and constant in the circumferential direction. Are formed at an interval (angle) θ. Further, in the state shown in the drawing, a plurality of through holes 110x are formed in the left region and the right region, respectively, symmetrically with respect to the horizontal axis X and at a constant interval (angle) θ in the circumferential direction. . Further, in the state shown in the drawing, the inner cylinder 102 has a holeless region or a solid region where the through hole 110 is not provided between the upper region or the lower region and the left region or the right region. In the embodiment, the interval θ is set to 5 to 15 degrees. In the embodiment, the inner diameters of the through holes 110y in the upper region and the lower region are equal to the inner diameters of the through holes 110x in the left region and the right region, and the number of the through holes 110y in the upper region and the lower region is “6”. And the number of the through holes 110x in the right region is “2”, and the amount of the lubricating fluid 20 supplied from the top and bottom through the plurality of through holes 110y is supplied from the left and right regions through the plurality of through holes 110x. It is configured to be larger than the amount of the fluid 20.
 図1と図2に示すように、外筒104には、内筒102と組み合わせた状態で上述した横断面109上に位置する場所に、中心軸101から放射方向に延びる貫通孔110と、貫通孔110に連通し、内周面に沿って周方向に連続した環状溝のマニホールド114が形成されている。したがって、外筒104に内筒102を組み合わせた状態で、内筒貫通孔110はマニホールド114及び該マニホールド114を介して外筒貫通孔112に連通する。 As shown in FIGS. 1 and 2, the outer cylinder 104 has a through-hole 110 extending in a radial direction from the central axis 101 at a location located on the above-described cross section 109 in a state of being combined with the inner cylinder 102, and a through-hole. An annular groove manifold 114 is formed which communicates with the hole 110 and is continuous in the circumferential direction along the inner peripheral surface. Therefore, in a state where the outer cylinder 104 is combined with the inner cylinder 102, the inner cylinder through hole 110 communicates with the manifold 114 and the outer cylinder through hole 112 via the manifold 114.
 図1に示すように、外筒貫通孔112は潤滑流体供給管16が接続される。潤滑流体供給管16は、加圧された潤滑流体20を供給する潤滑流体供給源18に接続される。 As shown in FIG. 1, the lubricating fluid supply pipe 16 is connected to the outer cylinder through hole 112. The lubricating fluid supply pipe 16 is connected to a lubricating fluid supply source 18 that supplies pressurized lubricating fluid 20.
 このように構成された静圧軸受100によれば、内筒102の内側に回転シャフト2が挿通される。この状態で、回転シャフト2の外周面と内筒102の内周面との間には隙間又は潤滑空間(図示せず)が形成される。そして、潤滑流体供給源18から供給された潤滑流体20は、外筒貫通孔112を介してマニホールド114に供給される。マニホールド114に供給された潤滑流体20は該マニホールド114に沿って周方向に分散し、これに連通した内筒貫通孔110を介して軸受空間に供給される。 According to the hydrostatic bearing 100 configured in this way, the rotary shaft 2 is inserted inside the inner cylinder 102. In this state, a gap or a lubrication space (not shown) is formed between the outer peripheral surface of the rotary shaft 2 and the inner peripheral surface of the inner cylinder 102. The lubricating fluid 20 supplied from the lubricating fluid supply source 18 is supplied to the manifold 114 through the outer cylinder through hole 112. The lubricating fluid 20 supplied to the manifold 114 is dispersed in the circumferential direction along the manifold 114, and is supplied to the bearing space through the inner cylinder through hole 110 communicating therewith.
 内筒貫通孔110から軸受空間に供給された潤滑流体20は、図2~図3に表された状態で、上部領域と下部領域及び左領域と右領域において静圧軸受100の中心軸101に向けて回転シャフト2を付勢する。上述のように、上部領域と下部領域には左領域と右領域よりも多くの貫通孔110が形成されており、上下方向から回転シャフト2に加わる力Fyが左右方向から回転シャフト2に加わる力Fxよりも大きいため、上下方向の軸受剛性が水平方向の軸受剛性よりも高い。その結果、回転シャフト2の中心は楕円軌跡を描くことになる。内筒と回転シャフトの間の隙間流れに起因する自励性の振動について、回転シャフトが内筒の中心に関して円運動する場合には運動が成長する(自励性の振動が助長される)のに対し、回転シャフトが内筒の中心に関して楕円運動する場合には円運動する場合よりも安定になる(運動が成長しない)ことが知られていることから、回転シャフト2の中心が楕円軌跡を描くことで、通常回転時はもとより、高速回転時の不安定振動も低減することになる。 The lubricating fluid 20 supplied to the bearing space from the inner cylinder through-hole 110 is applied to the central shaft 101 of the hydrostatic bearing 100 in the upper region and the lower region and the left region and the right region in the state shown in FIGS. The rotating shaft 2 is urged toward it. As described above, more through holes 110 are formed in the upper region and the lower region than in the left region and the right region, and the force Fy applied to the rotating shaft 2 from the up and down direction is applied to the rotating shaft 2 from the left and right direction. Since it is larger than Fx, the vertical bearing rigidity is higher than the horizontal bearing rigidity. As a result, the center of the rotating shaft 2 draws an elliptical locus. About self-excited vibration caused by the gap flow between the inner cylinder and the rotating shaft, the movement grows (self-excited vibration is promoted) when the rotating shaft makes a circular motion about the center of the inner cylinder On the other hand, it is known that when the rotating shaft moves elliptically with respect to the center of the inner cylinder, it is known that the rotating shaft becomes more stable (movement does not grow) than when it moves circularly. By drawing, not only normal rotation but also unstable vibration during high-speed rotation can be reduced.
(第2実施例)
 図4は、第2実施例に係る静圧軸受200の内筒202を示す。本実施例の内筒202は、中心軸101に直交する少なくとも一つの横断面上に、周方向に一定の間隔をあけて、放射方向に延びる貫通孔210が多数形成されている。実施例では、16個の貫通孔210がθ=22.5度の角度をあけて形成されている。以下、説明の便宜上または必要に応じて、12時の方向(図中のY軸方向)にある貫通孔を符号210(1)、この貫通孔210(1)から時計周り方向に22.5度ずつ隔てた貫通孔を符号210(2)・・・210(16)で示す。また、図示するように、上部領域の4つの貫通孔210(15)~210(3)と下部領域の4つの貫通孔210(7)~210(11)の内径は、右領域の3つの貫通孔210(4)~210(6)と左領域の3つの貫通孔210(12)~210(14)の内径よりも大きくしてある。なお、図示しないが、外筒204は第1実施例の外筒104と同じである。
(Second embodiment)
FIG. 4 shows the inner cylinder 202 of the hydrostatic bearing 200 according to the second embodiment. In the inner cylinder 202 of this embodiment, a large number of through-holes 210 extending in the radial direction are formed on the at least one cross section orthogonal to the central axis 101 with a constant interval in the circumferential direction. In the embodiment, 16 through holes 210 are formed at an angle of θ = 22.5 degrees. Hereinafter, for convenience of explanation or when necessary, a through hole in the 12 o'clock direction (Y-axis direction in the drawing) is denoted by reference numeral 210 (1), and 22.5 degrees clockwise from the through hole 210 (1). The through holes separated from each other are indicated by reference numerals 210 (2)... 210 (16). As shown in the figure, the inner diameters of the four through holes 210 (15) to 210 (3) in the upper region and the four through holes 210 (7) to 210 (11) in the lower region are the three through holes in the right region. The inner diameters of the holes 210 (4) to 210 (6) and the three through holes 210 (12) to 210 (14) in the left region are made larger. Although not shown, the outer cylinder 204 is the same as the outer cylinder 104 of the first embodiment.
 このように構成された第2実施例の静圧軸受200によれば、上下方向から供給される潤滑流体20の量が左右領域から供給される潤滑流体20の量よりも多く、回転シャフト2が上下方向に与圧されて、回転シャフト2が非円軌道(例えば楕円軌道)を描く。 According to the hydrostatic bearing 200 of the second embodiment configured as described above, the amount of the lubricating fluid 20 supplied from the vertical direction is larger than the amount of the lubricating fluid 20 supplied from the left and right regions, and the rotary shaft 2 is By being pressurized in the vertical direction, the rotating shaft 2 draws a non-circular orbit (for example, an elliptical orbit).
(第3実施例)
 図5は、第3実施例に係る静圧軸受300を示す。本実施例において、内筒302は、中心軸101に直交する少なくとも一つの横断面上に、周方向に一定の間隔をあけて、放射方向に延びる貫通孔310が多数形成されている。実施例では、16個の貫通孔310がθ=22.5度の角度をあけて形成されている。以下、説明の便宜上または必要に応じて、12時の方向(図中のY軸方向)にある貫通孔を符号310(1)、この貫通孔310(1)から時計周り方向に22.5度ずつ隔てた貫通孔を符号310(2)・・・310(16)で示す。第2実施例と異なり、各貫通孔310(1)~310(16)は同じ内径を有する。
(Third embodiment)
FIG. 5 shows a hydrostatic bearing 300 according to the third embodiment. In this embodiment, the inner cylinder 302 has a plurality of through-holes 310 extending in the radial direction on the at least one cross section orthogonal to the central axis 101 with a constant interval in the circumferential direction. In the embodiment, 16 through holes 310 are formed at an angle of θ = 22.5 degrees. Hereinafter, for convenience of explanation or as necessary, a through hole in the 12 o'clock direction (Y-axis direction in the drawing) is denoted by reference numeral 310 (1), and 22.5 degrees clockwise from the through hole 310 (1). The through holes separated from each other are denoted by reference numerals 310 (2)... 310 (16). Unlike the second embodiment, each of the through holes 310 (1) to 310 (16) has the same inner diameter.
 外筒304は、内筒貫通孔310に対応する横断面上において、上部領域貫通孔310(15)~310(3)、右領域貫通孔310(4)~310(6)、下部領域貫通孔310(7)~310(11)、左領域貫通孔310(12)~310(14)にそれぞれ対向する内周面領域に、互いに連通しない、周方向に延びる4つの溝又はマニホールド314(15~3),314(4~6),314(7~11),314(12~14)と,これら4つのマニホールドにそれぞれ連通する外筒貫通孔312(15~3),312(4~6),312(7~11),312(12~14)が形成されている。また,貫通孔312(15~3),312(4~6),312(7~11),312(12~14)は、それぞれ圧力調整機構316(15~3),316(4~6),316(7~11),316(12~14)を介して潤滑流体供給源18に接続されている。 The outer cylinder 304 has an upper region through hole 310 (15) to 310 (3), a right region through hole 310 (4) to 310 (6), a lower region through hole on a cross section corresponding to the inner cylinder through hole 310. Four circumferentially extending grooves or manifolds 314 (15 to 15) that do not communicate with each other in the inner peripheral surface regions that respectively face 310 (7) to 310 (11) and the left region through holes 310 (12) to 310 (14) 3), 314 (4 to 6), 314 (7 to 11), 314 (12 to 14), and outer cylinder through holes 312 (15 to 3) and 312 (4 to 6) communicating with these four manifolds, respectively. , 312 (7 to 11), 312 (12 to 14) are formed. The through holes 312 (15 to 3), 312 (4 to 6), 312 (7 to 11), and 312 (12 to 14) are respectively provided with pressure adjusting mechanisms 316 (15 to 3) and 316 (4 to 6). , 316 (7 to 11) and 316 (12 to 14) are connected to the lubricating fluid supply source 18.
 このように構成された第3実施例の静圧軸受300によれば、動作時、潤滑流体供給源18から供給された潤滑流体20は、その圧力が圧力調整機構316(15~3),316(4~6),316(7~11),316(12~14)によって調整された後、対応するマニホールド314(15~3),314(4~6),314(7~11),314(12~14)を介して貫通孔310(15)~310(3),310(4)~310(6),310(7)~310(11),310(12)~310(14)から軸受空間に供給される。 According to the hydrostatic bearing 300 of the third embodiment configured as described above, during operation, the lubricating fluid 20 supplied from the lubricating fluid supply source 18 has the pressure adjusted by the pressure adjusting mechanisms 316 (15 to 3), 316. (4 to 6), 316 (7 to 11), and 316 (12 to 14), and then the corresponding manifolds 314 (15 to 3), 314 (4 to 6), 314 (7 to 11), 314 (12-14) through the through holes 310 (15) -310 (3), 310 (4) -310 (6), 310 (7) -310 (11), 310 (12) -310 (14) Supplied to the bearing space.
 本実施例において、調整後の圧力は、上部領域貫通孔310(15)~310(3)、と下部領域貫通孔310(7)~310(11)から供給される潤滑流体20の圧力が右領域貫通孔310(4)~310(6)と左領域貫通孔310(12)~310(14)から供給される潤滑流体20の圧力よりも大きい。上部領域貫通孔310(15)~310(3)から供給される潤滑流体20の圧力と下部領域貫通孔310(7)~310(11)から供給される潤滑流体20の圧力は同じでもよいし、一方が他方よりも大きくてもよい。ただし、右領域貫通孔310(4)~310(6)から供給される潤滑流体20の圧力と左領域貫通孔310(12)~310(14)から供給される潤滑流体20の圧力は同じであることが好ましい。 In the present embodiment, the pressure after the adjustment is such that the pressure of the lubricating fluid 20 supplied from the upper region through holes 310 (15) to 310 (3) and the lower region through holes 310 (7) to 310 (11) is the right. The pressure of the lubricating fluid 20 supplied from the region through holes 310 (4) to 310 (6) and the left region through holes 310 (12) to 310 (14) is larger. The pressure of the lubricating fluid 20 supplied from the upper region through holes 310 (15) to 310 (3) and the pressure of the lubricating fluid 20 supplied from the lower region through holes 310 (7) to 310 (11) may be the same. , One may be larger than the other. However, the pressure of the lubricating fluid 20 supplied from the right region through holes 310 (4) to 310 (6) and the pressure of the lubricating fluid 20 supplied from the left region through holes 310 (12) to 310 (14) are the same. Preferably there is.
 したがって、第3実施例の静圧軸受300によれば、上下方向から供給される潤滑流体20の量が左右領域から供給される潤滑流体20の量よりも多く、回転シャフト2が上下方向に与圧されて、回転シャフト2が非円軌跡を描く。 Therefore, according to the hydrostatic bearing 300 of the third embodiment, the amount of the lubricating fluid 20 supplied from the vertical direction is larger than the amount of the lubricating fluid 20 supplied from the left and right regions, and the rotary shaft 2 is applied in the vertical direction. As a result, the rotating shaft 2 draws a non-circular locus.
(安定性の比較)
 第1~3実施例に係る静圧軸受100,200,300と,周方向に等間隔に複数の内筒貫通孔を形成するとともにこれら複数の内筒貫通孔から一定圧力の潤滑流体を軸受空間に供給するように構成された等方性静圧軸受(比較例)について、回転シャフトの安定性をシミュレーションを用いて検討した。検討の結果を図6に示す。図6は、横軸に回転シャフト回転数、縦軸に減衰比を示す。減衰比は、回転シャフトの振動を示す指標で、+側が安定振動領域、-側が不安定振動領域を表す。
(Stability comparison)
The hydrostatic bearings 100, 200, 300 according to the first to third embodiments and a plurality of inner cylinder through holes formed at equal intervals in the circumferential direction, and a lubricating fluid having a constant pressure is supplied from the plurality of inner cylinder through holes to the bearing space. The stability of the rotating shaft of the isotropic hydrostatic bearing (comparative example) configured to be supplied to the rotating shaft was examined using simulation. The result of the examination is shown in FIG. In FIG. 6, the horizontal axis represents the rotational shaft rotational speed, and the vertical axis represents the damping ratio. The damping ratio is an index indicating the vibration of the rotating shaft, with the + side representing a stable vibration region and the − side representing an unstable vibration region.
 この図から明らかなように、比較例の等方性静圧軸受では、回転数の増加に応じて不安定振動が増加し、比較的低い回転数N0で、安定領域から不安定領域に陥る。これに対し、第1~3実施例に係る異方性静圧軸受では、比較的高い回転数N1、N2,N3(>N0)まで安定領域が維持される。 As is clear from this figure, in the isotropic hydrostatic bearing of the comparative example, the unstable vibration increases as the rotational speed increases, and falls from the stable region to the unstable region at a relatively low rotational speed N0. On the other hand, in the anisotropic hydrostatic bearings according to the first to third embodiments, the stable region is maintained up to relatively high rotational speeds N1, N2, and N3 (> N0).
(他の実施例)
 以上、第1~3実施例について説明したが、本発明の静圧軸受は種々改変可能である。
(Other examples)
Although the first to third embodiments have been described above, the hydrostatic bearing of the present invention can be variously modified.
 例えば、第1実施例では、一つの横断面109上に内筒貫通孔110を形成した一列給気の場合について説明したが、複数の横断面109上に内筒貫通孔110を形成した2列以上の給気としてもよい。第2、3実施例についても、一つ又は複数の横断面109上に内筒貫通孔110を形成してもよい。 For example, in the first embodiment, the case of one-line air supply in which the inner cylinder through-holes 110 are formed on one transverse section 109 has been described, but two rows in which the inner cylinder through-holes 110 are formed on a plurality of transverse sections 109. It is good also as the above air supply. Also in the second and third embodiments, the inner cylinder through hole 110 may be formed on one or a plurality of cross sections 109.
 また、第1~3実施例について、各横断面上に形成する内筒貫通孔の数は適宜変更できる。例えば、第1~3実施例における上部領域と下部領域、右領域と左領域に設ける内筒貫通孔の数は上述した例に限るものでない。同様に、内筒貫通孔の数の他、内筒貫通孔の大きさや内筒貫通孔毎の潤滑流体の供給圧力、およびこれらの組み合わせも適宜変更できる。要するに、軸受剛性に異方性を有するように構成されていればよい。さらに、第1実施例について、潤滑流体供給管16を内筒102に直結してもよい。このようにすれば外筒104を省略することができる。また、第3実施例について、マニホールド314(15~3)および314(7~11)は連通されていてもよい。同様に、マニホールド314(4~6)および314(12~14)は連通されていてもよい。 Further, in the first to third embodiments, the number of inner cylinder through holes formed on each cross section can be appropriately changed. For example, in the first to third embodiments, the number of inner cylinder through holes provided in the upper region and the lower region, and the right region and the left region is not limited to the above example. Similarly, in addition to the number of inner cylinder through-holes, the size of the inner cylinder through-hole, the supply pressure of the lubricating fluid for each inner cylinder through-hole, and combinations thereof can be changed as appropriate. In short, what is necessary is just to be comprised so that bearing rigidity may have anisotropy. Further, in the first embodiment, the lubricating fluid supply pipe 16 may be directly connected to the inner cylinder 102. In this way, the outer cylinder 104 can be omitted. In the third embodiment, the manifolds 314 (15 to 3) and 314 (7 to 11) may be communicated with each other. Similarly, manifolds 314 (4-6) and 314 (12-14) may be in communication.
 さらに、1本の回転シャフト2を本発明に係る静圧軸受を複数用いて複数箇所で支持してもよい。この場合、複数の静圧軸受を、複数の各静圧軸受の周方向の軸受剛性分布を重ね合わせた(足し合わせた)軸受剛性、すなわち、複数の静圧軸受全体の軸受剛性に異方性を有するように構成することで、複数の静圧軸受全体として軸受剛性に異方性を持たせることができる。そのため、1つの静圧軸受の軸受剛性に着目する場合と同様に、回転シャフト2の回転数を増加させても、回転シャフト2が、回転シャフト2の回転方向への振れ回りが助長されにくい非円軌道(例えば楕円軌道)を描くこととなり、不安定振動の発生回転数を従来よりも高めることができる。 Furthermore, a single rotating shaft 2 may be supported at a plurality of locations using a plurality of hydrostatic bearings according to the present invention. In this case, anisotropy of a plurality of hydrostatic bearings is obtained by superimposing (adding) the circumferential bearing stiffness distribution of each of the plurality of hydrostatic bearings, that is, the bearing stiffness of the entire plurality of hydrostatic bearings. By having such a configuration, anisotropy can be imparted to the bearing rigidity as a whole of the plurality of hydrostatic bearings. Therefore, as in the case of paying attention to the bearing rigidity of one hydrostatic bearing, even if the number of rotations of the rotating shaft 2 is increased, the rotating shaft 2 is not easily promoted in the rotational direction of the rotating shaft 2. A circular orbit (for example, an elliptical orbit) is drawn, and the number of rotations causing unstable vibration can be increased as compared with the conventional one.
 以上、中心軸を水平方向に向けた静圧軸受について説明したが、以上の実施例は、中心軸を鉛直方向に向けた静圧軸受にも同様に適用可能である。この場合、鉛直方向に向けられた回転シャフトを上方から見たときに12時、6時、3時、9時の方向に表れる部位又は場所が、上述の実施例の上部、下部、右側、左側に表した部位又は場所に対応する。 The hydrostatic bearing with the central axis oriented in the horizontal direction has been described above, but the embodiments described above can be applied to hydrostatic bearings with the central axis oriented in the vertical direction as well. In this case, when the rotary shaft oriented in the vertical direction is viewed from above, the parts or places appearing in the direction of 12 o'clock, 6 o'clock, 3 o'clock, 9 o'clock are the upper part, lower part, right side, left side of the above-described embodiment. Corresponds to the site or location shown in.
100:静圧軸受
102:内筒
104:外筒
109:横断面
110:内筒貫通孔
110y:上部領域貫通孔,下部領域貫通孔
110x:左領域貫通孔,右領域貫通孔
112:外筒貫通孔
114:マニホールド
200:静圧軸受
202:内筒
210(1)~210(16):内筒貫通孔
300:静圧軸受
302:内筒
304:外筒
310(1)~310(16):内筒貫通孔
312(15~3)~312(12~14):外筒貫通孔
314(15~3)~314(12~14):マニホールド
316(15~3)~316(12~14):圧力調整機構
100: Hydrostatic bearing 102: Inner cylinder 104: Outer cylinder 109: Cross section 110: Inner cylinder through hole 110y: Upper area through hole, lower area through hole 110x: Left area through hole, right area through hole 112: Outer cylinder through Hole 114: Manifold 200: Static pressure bearing 202: Inner cylinder 210 (1) to 210 (16): Inner cylinder through hole 300: Static pressure bearing 302: Inner cylinder 304: Outer cylinder 310 (1) to 310 (16): Inner cylinder through holes 312 (15-3) to 312 (12-14): Outer cylinder through holes 314 (15-3) to 314 (12-14): Manifolds 316 (15-3) to 316 (12-14) : Pressure adjustment mechanism

Claims (13)

  1.  複数の貫通孔が周方向の異なる位置に配設され、回転シャフトを挿設可能な円筒状の軸受部材を備え、前記貫通孔に予め加圧された潤滑流体を供給し、前記潤滑流体の静圧により前記回転シャフトを回転自在に支持するように構成された静圧軸受であって、
     前記静圧軸受は、軸受剛性に異方性を有するように構成されている
    ことを特徴とする静圧軸受。
    A plurality of through-holes are disposed at different positions in the circumferential direction, and a cylindrical bearing member into which a rotating shaft can be inserted is provided. Lubricating fluid pressurized in advance is supplied to the through-holes, A hydrostatic bearing configured to rotatably support the rotating shaft by pressure,
    The hydrostatic bearing is configured to have anisotropy in bearing rigidity.
  2.  前記貫通孔は、少なくとも一箇所のある位置における周方向で互いに隣接する前記貫通孔同士の間隔が、少なくとも一箇所の他の位置における前記間隔と異なるように配置されている
    ことを特徴とする請求項1に記載の静圧軸受。
    The through-holes are arranged such that an interval between the through-holes adjacent to each other in a circumferential direction at at least one position is different from at least one of the intervals at another position. Item 4. The hydrostatic bearing according to item 1.
  3.  前記軸受部材は、互いに対向する一対の第1および第2の周方向領域を有し、前記一対の第1の周方向領域に配置される前記貫通孔の個数が、前記一対の第2の周方向領域に配置される前記貫通孔の個数より多く、前記各貫通孔の穴径が実質的に同一である
    ことを特徴とする請求項2に記載の静圧軸受。
    The bearing member has a pair of first and second circumferential regions facing each other, and the number of the through holes disposed in the pair of first circumferential regions is equal to the pair of second circumferential regions. 3. The hydrostatic bearing according to claim 2, wherein the number of the through holes arranged in the direction region is larger than the number of the through holes, and the diameters of the through holes are substantially the same.
  4.  前記軸受部材の外周面に固定された固定部材をさらに備え、
     前記固定部材は、前記各貫通孔に連通する環状溝を有し、
     前記環状溝及び前記各貫通孔に前記潤滑流体が供給され、前記回転シャフトが前記一対の第1および第2の周方向領域における前記各貫通孔の前記潤滑流体から受ける力が異なる
    ことを特徴とする請求項3に記載の静圧軸受。
    A fixing member fixed to the outer peripheral surface of the bearing member;
    The fixing member has an annular groove communicating with each through hole,
    The lubricating fluid is supplied to the annular groove and the through holes, and the force that the rotating shaft receives from the lubricating fluid in the through holes in the pair of first and second circumferential regions is different. The hydrostatic bearing according to claim 3.
  5.  前記貫通孔は、ある位置の少なくとも一つの貫通孔の穴径が他の位置の少なくとも一つの貫通孔の穴径と異なるように構成されている
    ことを特徴とする請求項1に記載の静圧軸受。
    2. The static pressure according to claim 1, wherein the through hole is configured such that a hole diameter of at least one through hole at a certain position is different from a hole diameter of at least one through hole at another position. bearing.
  6.  前記軸受部材は、互いに対向する一対の第1および第2の周方向領域を有し、前記一対の第1の周方向領域に配置される前記貫通孔の穴径が、前記一対の第2の周方向領域に配置される前記貫通孔の穴径より大きく、前記各貫通孔が周方向に実質的に等間隔で配置される
    ことを特徴とする請求項5に記載の静圧軸受。
    The bearing member has a pair of first and second circumferential regions opposed to each other, and a hole diameter of the through hole disposed in the pair of first circumferential regions is the pair of second regions. 6. The hydrostatic bearing according to claim 5, wherein each of the through holes is arranged at substantially equal intervals in the circumferential direction, and the diameter of each of the through holes is larger than a diameter of the through hole arranged in a circumferential region.
  7.  前記軸受部材の外周面に固定された固定部材をさらに備え、
     前記固定部材は、前記各貫通孔に連通する環状溝を有し、
     前記環状溝及び前記各貫通孔に前記潤滑流体が供給され、前記回転シャフトが前記一対の第1および第2の周方向領域における前記各貫通孔の前記潤滑流体から受ける力が異なる
    ことを特徴とする請求項6に記載の静圧軸受。
    A fixing member fixed to the outer peripheral surface of the bearing member;
    The fixing member has an annular groove communicating with each through hole,
    The lubricating fluid is supplied to the annular groove and the through holes, and the force that the rotating shaft receives from the lubricating fluid in the through holes in the pair of first and second circumferential regions is different. The hydrostatic bearing according to claim 6.
  8.  前記潤滑流体を所定の圧力に予め加圧する外部供給手段と、
     ある位置に配置された少なくとも一つの貫通孔に供給される前記潤滑流体の供給圧力が、他の位置に配置された少なくとも一つの貫通孔に供給される前記潤滑流体の供給圧力と異なるように、前記外部供給手段によって加圧された前記潤滑流体の供給圧力を調整する調整手段と、を備える
    ことを特徴とする請求項1に記載の静圧軸受。
    External supply means for pre-pressurizing the lubricating fluid to a predetermined pressure;
    The supply pressure of the lubricating fluid supplied to at least one through hole arranged at a certain position is different from the supply pressure of the lubricating fluid supplied to at least one through hole arranged at another position, The hydrostatic bearing according to claim 1, further comprising an adjusting unit that adjusts a supply pressure of the lubricating fluid pressurized by the external supply unit.
  9.  前記潤滑流体を所定の圧力に予め加圧する外部供給手段と、
     前記軸受部材は、互いに対向する一対の第1および第2の周方向領域を有し、前記一対の第1の周方向領域に配置される前記貫通孔に供給される前記潤滑流体の供給圧力が、前記一対の第2の周方向領域に配置される前記貫通孔に供給される前記潤滑流体の供給圧力と異なるように、前記外部供給手段によって加圧された前記潤滑流体の供給圧力を調整する調整手段と、を備える
    ことを特徴とする請求項8に記載の静圧軸受。
    External supply means for pre-pressurizing the lubricating fluid to a predetermined pressure;
    The bearing member has a pair of first and second circumferential regions facing each other, and a supply pressure of the lubricating fluid supplied to the through-holes disposed in the pair of first circumferential regions is The supply pressure of the lubricating fluid pressurized by the external supply means is adjusted to be different from the supply pressure of the lubricating fluid supplied to the through holes arranged in the pair of second circumferential regions. The hydrostatic bearing according to claim 8, comprising adjusting means.
  10.  前記静圧軸受は、前記回転シャフトの中心が高速回転時に楕円軌道を描くように軸受剛性に異方性を有するように構成されている
    ことを特徴とする請求項1~9のいずれか1項に記載の静圧軸受。
    10. The hydrostatic bearing is configured to have anisotropy in bearing rigidity so that the center of the rotating shaft draws an elliptical orbit when rotating at a high speed. The hydrostatic bearing described in 1.
  11.  複数の貫通孔が周方向の異なる位置に配設され、回転シャフトを挿設可能な円筒状の軸受部材を備え、前記貫通孔に予め加圧された潤滑流体を供給し、前記潤滑流体の静圧により前記回転シャフトを回転自在に支持するように構成された静圧軸受と、前記回転シャフトとを備える回転機械であって、
     前記静圧軸受は、軸受剛性に異方性を有するように構成されている
    ことを特徴とする回転機械。
    A plurality of through-holes are disposed at different positions in the circumferential direction, and a cylindrical bearing member into which a rotating shaft can be inserted is provided. Lubricating fluid pressurized in advance is supplied to the through-holes, A rotary machine comprising a hydrostatic bearing configured to rotatably support the rotating shaft by pressure, and the rotating shaft;
    The rotary machine is characterized in that the hydrostatic bearing is configured to have anisotropy in bearing rigidity.
  12.  前記回転シャフトは、複数の前記静圧軸受によって支持され、
     複数の前記静圧軸受は、複数の前記各静圧軸受の周方向の軸受剛性分布を重ね合わせた軸受剛性に異方性を有するように構成されている
    ことを特徴とする請求項11に記載の回転機械。
    The rotating shaft is supported by a plurality of the hydrostatic bearings,
    The plurality of hydrostatic bearings are configured to have anisotropy in bearing stiffness obtained by superimposing circumferential bearing stiffness distributions of the plurality of hydrostatic bearings. Rotating machine.
  13.  請求項1~9のいずれか1項に記載の静圧軸受と、回転シャフトとを備えた
    ことを特徴とする回転機械。
    A rotary machine comprising the hydrostatic bearing according to any one of claims 1 to 9 and a rotary shaft.
PCT/JP2015/053913 2015-02-13 2015-02-13 Hydrostatic bearing WO2016129092A1 (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106246706A (en) * 2016-08-21 2016-12-21 无锡商业职业技术学院 Guiding sleeve on power transmission shaft

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4920548A (en) * 1972-06-22 1974-02-23
JPS52119744A (en) * 1976-04-01 1977-10-07 Mitsubishi Electric Corp Static pressure journal bearing
JPS5554713A (en) * 1978-10-17 1980-04-22 Toshiba Corp Supporting method of shaft
KR20070101484A (en) * 2006-04-11 2007-10-17 노병후 Journal bearings with asymmetric holes
JP2008082356A (en) * 2006-09-26 2008-04-10 Oiles Ind Co Ltd Static pressure gas bearing

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4920548A (en) * 1972-06-22 1974-02-23
JPS52119744A (en) * 1976-04-01 1977-10-07 Mitsubishi Electric Corp Static pressure journal bearing
JPS5554713A (en) * 1978-10-17 1980-04-22 Toshiba Corp Supporting method of shaft
KR20070101484A (en) * 2006-04-11 2007-10-17 노병후 Journal bearings with asymmetric holes
JP2008082356A (en) * 2006-09-26 2008-04-10 Oiles Ind Co Ltd Static pressure gas bearing

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106246706A (en) * 2016-08-21 2016-12-21 无锡商业职业技术学院 Guiding sleeve on power transmission shaft

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