WO2015182277A1 - 着色組成物、膜、カラーフィルタ、パターン形成方法、カラーフィルタの製造方法、固体撮像素子および赤外線センサ - Google Patents

着色組成物、膜、カラーフィルタ、パターン形成方法、カラーフィルタの製造方法、固体撮像素子および赤外線センサ Download PDF

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WO2015182277A1
WO2015182277A1 PCT/JP2015/061804 JP2015061804W WO2015182277A1 WO 2015182277 A1 WO2015182277 A1 WO 2015182277A1 JP 2015061804 W JP2015061804 W JP 2015061804W WO 2015182277 A1 WO2015182277 A1 WO 2015182277A1
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Prior art keywords
colorant
group
polymerizable compound
color filter
colored composition
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PCT/JP2015/061804
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English (en)
French (fr)
Japanese (ja)
Inventor
大貴 瀧下
上村　哲也
江副　利秀
嶋田　和人
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富士フイルム株式会社
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Priority to JP2016523375A priority Critical patent/JP6325097B2/ja
Priority to KR1020167032230A priority patent/KR101925813B1/ko
Publication of WO2015182277A1 publication Critical patent/WO2015182277A1/ja

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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G03F7/105—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having substances, e.g. indicators, for forming visible images
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F2/00—Processes of polymerisation
    • C08F2/44—Polymerisation in the presence of compounding ingredients, e.g. plasticisers, dyestuffs, fillers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/22—Absorbing filters
    • G02B5/223—Absorbing filters containing organic substances, e.g. dyes, inks or pigments
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
    • G03F7/0007—Filters, e.g. additive colour filters; Components for display devices
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor
    • G03F7/168—Finishing the coated layer, e.g. drying, baking, soaking
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation

Definitions

  • the present invention relates to a coloring composition.
  • the coloring composition preferably used for formation of a color filter.
  • the present invention also relates to a pattern forming method using a colored composition and a method for producing a color filter.
  • Color filters are indispensable components for solid-state image sensors and liquid crystal displays.
  • color filters for solid-state imaging devices are required to improve color separation and color reproducibility.
  • Such a color filter is formed with a plurality of colored regions. For example, it is formed with red, green, and blue colored regions (hereinafter also referred to as “colored patterns” or “colored pixels”).
  • a coloring pattern first, in the first hue, a coloring composition having a colorant of red, green, or blue is applied, and is colored by performing exposure, development, and heat treatment as necessary. After the pattern is formed, the same coating, exposure, development, and heat treatment processes as necessary are repeated in the second hue and the third hue.
  • Patent Document 1 discloses a resin black matrix having a maximum light transmittance of 1% or less in a wavelength range of 400 to 700 nm and an average light transmittance of 60 or more in a wavelength range of 850 to 3000 nm.
  • Sensing using near infrared rays is utilized in various applications.
  • Near-infrared light has a longer wavelength than visible light, so it is difficult to scatter and can be used for distance measurement and three-dimensional measurement. Utilizing such near-infrared characteristics, it is used in proximity sensors, motion sensors, and the like.
  • near infrared rays are invisible to humans, animals, etc., even if the subject is illuminated with a near infrared light source at night, the subject is not noticed. It can also be used to shoot without.
  • a colored composition capable of forming a film capable of transmitting near-infrared rays with little visible light-derived noise is applied and cured to form a film. It was found that wrinkles are likely to occur on the surface. It was also found that wrinkles are likely to occur on the surface as the film thickness is increased.
  • an object of the present invention is to provide a coloring composition capable of transmitting a near-infrared ray with less visible light-derived noise and capable of forming a film in which wrinkles are suppressed. Moreover, it aims at providing the film
  • the colored composition contains a polymerizable compound having a chain containing two or more alkyleneoxy groups as repeating units (that is, a chain having two or more repeating units of alkyleneoxy groups).
  • a polymerizable compound having a chain containing two or more alkyleneoxy groups as repeating units that is, a chain having two or more repeating units of alkyleneoxy groups.
  • the ratio A / B between the minimum absorbance A in the wavelength range of 400 nm to 580 nm and the minimum absorbance B in the wavelength range of 580 nm to 770 nm is 0.3 to 3, and the wavelength range is 400 nm to 750 nm.
  • a colored composition comprising a colorant and a polymerizable compound, wherein the polymerizable compound contains a polymerizable compound having a chain having two or more alkyleneoxy group repeating units, and the colorant is red
  • the polymerizable compound contains a polymerizable compound having a chain having two or more alkyleneoxy group repeating units, and the colorant is red
  • Colorant A / total colorant in the mass ratio is 0.01 to 0.7
  • yellow colorant / total colorant in the mass ratio of the yellow colorant to the total amount of colorant is 0.05 to 0.5.
  • the colorant contains a red colorant, a purple colorant, a yellow colorant, and a blue colorant, and the red colorant / total colorant is a mass ratio of the red colorant to the total colorant amount is 0.
  • the yellow colorant / total colorant is 0.1 to 0.4, which is the mass ratio of the yellow colorant to the total amount of the colorant, and the mass ratio of the blue colorant to the total amount of the colorant.
  • a certain blue colorant / total colorant is 0.2 to 0.6, and a purple colorant / total colorant, which is a mass ratio of the purple colorant to the total amount of colorant, is 0.01 to 0.3, ⁇
  • ⁇ 4> The colored composition according to any one of ⁇ 1> to ⁇ 3>, wherein the polymerizable compound contains a polymerizable compound having a chain having an ethyleneoxy group repeating unit number of 2 or more.
  • the polymerizable compound is any one of ⁇ 1> to ⁇ 4>, wherein a value obtained by dividing the molecular weight value of the polymerizable compound by the number of polymerizable groups contained in the polymerizable compound is 100 to 300.
  • the coloring composition as described in. ⁇ 6> The colored composition according to any one of ⁇ 1> to ⁇ 5>, wherein the polymerizable compound has a cyclic structure.
  • ⁇ 7> The colored composition according to any one of ⁇ 1> to ⁇ 6>, wherein the polymerizable compound has a heterocyclic structure.
  • ⁇ 8> The polymerizable compound according to any one of ⁇ 1> to ⁇ 7>, wherein the polymerizable compound has a partial structure represented by the following general formula (1); is there.
  • ⁇ 9> The colored composition according to any one of ⁇ 1> to ⁇ 8>, further comprising a resin and a photopolymerization initiator.
  • ⁇ 10> The colored composition according to ⁇ 9>, wherein the resin contains a resin having a hydroxyl group.
  • the maximum transmittance in the wavelength range of 400 to 780 nm is 15% or less, and the transmittance at a wavelength of 850 nm is 80% or more.
  • ⁇ 1> to ⁇ 10> The colored composition according to any one of ⁇ 1> to ⁇ 10>.
  • ⁇ 12> The colored composition according to any one of ⁇ 1> to ⁇ 11>, wherein the viscosity at 25 ° C. is 100 to 150 mP ⁇ s.
  • ⁇ 13> A film obtained by curing the colored composition according to any one of ⁇ 1> to ⁇ 12>.
  • ⁇ 14> A color filter having the film according to ⁇ 13>.
  • ⁇ 15> A step of applying the colored composition according to any one of ⁇ 1> to ⁇ 12> on a support to form a colored composition layer, a step of exposing the colored composition layer in a pattern, Forming a colored pattern by developing and removing an unexposed portion.
  • ⁇ 16> A method for producing a color filter, comprising the pattern forming method according to ⁇ 15>.
  • ⁇ 17> A solid-state imaging device having the color filter according to ⁇ 14> or the color filter obtained by the method for producing a color filter according to ⁇ 16>.
  • ⁇ 18> An infrared sensor having a color filter according to ⁇ 14> or a color filter obtained by the method for producing a color filter according to ⁇ 16>.
  • the present invention it is possible to provide a coloring composition capable of transmitting a near infrared ray with less visible light-derived noise and capable of forming a film in which wrinkles are suppressed.
  • membrane using this coloring composition, a color filter, the pattern formation method, the manufacturing method of a color filter, a solid-state image sensor, and an infrared sensor can be provided.
  • the total solid content refers to the total mass of components excluding the solvent from the total composition of the colored composition.
  • solid content means solid content in 25 degreeC.
  • the viscosity refers to a viscosity at 25 ° C.
  • the “alkyl group” includes not only an alkyl group having no substituent (unsubstituted alkyl group) but also an alkyl group having a substituent (substituted alkyl group).
  • radiation means, for example, an emission line spectrum of a mercury lamp, far ultraviolet rays represented by an excimer laser, extreme ultraviolet rays (EUV light), X-rays, electron beams, and the like.
  • light means actinic rays or radiation.
  • exposure means not only exposure with a deep ultraviolet ray, an X-ray, EUV light, etc. represented by a mercury lamp and an excimer laser, but also drawing with a particle beam such as an electron beam or an ion beam unless otherwise specified. Are also included in the exposure.
  • (meth) acrylate represents both and / or acrylate and methacrylate
  • (meth) acryl represents both and / or acrylic and “(meth) acrylic”.
  • Acryloyl represents both and / or acryloyl and methacryloyl.
  • “monomer” and “monomer” are synonymous.
  • “Monomer” is distinguished from “oligomer” and “polymer”, and refers to a compound having a weight average molecular weight of 2,000 or less.
  • the polymerizable compound means a compound having a polymerizable functional group, and may be a monomer or a polymer.
  • the polymerizable functional group refers to a group that participates in a polymerization reaction.
  • Me in the chemical formula represents a methyl group
  • Et represents an ethyl group
  • Pr represents a propyl group
  • Bu represents a butyl group
  • Ph represents a phenyl group.
  • the term “process” is not limited to an independent process, and is included in the term if the intended action of the process is achieved even when it cannot be clearly distinguished from other processes. It is.
  • a weight average molecular weight and a number average molecular weight are defined as a polystyrene conversion value by gel permeation chromatography (GPC) measurement.
  • the weight average molecular weight (Mw) and the number average molecular weight (Mn) are, for example, HLC-8220 (manufactured by Tosoh Corporation), and TSKgel Super AWM-H (manufactured by Tosoh Corporation, 6) as a column.
  • 0.0 mm ID ⁇ 15.0 cm can be determined by using a 10 mmol / L lithium bromide NMP (N-methylpyrrolidinone) solution as the eluent.
  • the pigment used in the present invention means an insoluble coloring compound that is difficult to dissolve in a solvent. Typically, it means a dye compound that exists in a dispersed state as particles in the composition.
  • the pigment used in the present invention preferably has a solubility at 25 ° C. of 0.1 g / 100 g Solvent or less, for example, for both propylene glycol monomethyl ether acetate and water.
  • a first aspect of the colored composition of the present invention includes a colorant and a polymerizable compound, and the polymerizable compound has a chain containing two or more alkyleneoxy groups as repeating units (that is, the number of repeating units of the alkyleneoxy group is A polymerizable compound having a chain of 2 or more (hereinafter also referred to as an alkyleneoxy chain), and a colored composition having a minimum absorbance A in a wavelength range of 400 nm to less than 580 nm and a wavelength of 580 nm to 770 nm inclusive.
  • the ratio A / B to the minimum absorbance B is 0.3 to 3, and the minimum absorbance C in the wavelength range from 400 nm to 750 nm and the maximum absorbance D in the wavelength range from 850 nm to 1300 nm.
  • the ratio C / D is 5 or more.
  • the absorbance ratio A / B described above is preferably 0.4 to 2.5, and more preferably 0.5 to 2.
  • the above-described absorbance ratio C / D is preferably 10 or more, and more preferably 50 or more.
  • the absorbance A ⁇ at a certain wavelength ⁇ is defined by the following equation (1).
  • a ⁇ ⁇ log (T ⁇ ) (1)
  • a ⁇ is the absorbance at wavelength ⁇
  • T ⁇ is the transmittance at wavelength ⁇ .
  • the absorbance value of the colored composition may be a value measured in the state of a solution, or may be a value of a film formed using the colored composition.
  • a colored composition is applied onto a glass substrate by a method such as spin coating so that the film thickness after drying becomes a predetermined film thickness, and then a hot plate at 100 ° C. for 120 seconds. It is preferable to use a membrane prepared by drying with The film thickness of the film can be measured by using a stylus type surface shape measuring instrument (DEKTAK150 manufactured by ULVAC) for the substrate having the film.
  • the absorbance can be measured using a conventionally known spectrophotometer.
  • the measurement conditions for absorbance are not particularly limited.
  • the measurement is preferably performed under conditions adjusted so that the minimum absorbance A in the wavelength range of 400 nm to less than 580 nm is 0.1 to 3.0.
  • the measurement error can be further reduced.
  • the method for adjusting the minimum absorbance A in the wavelength range of 400 nm or more and less than 580 nm to be 0.1 to 3.0 For example, when measuring the absorbance in a liquid state, a method of adjusting the optical path length of the sample cell can be mentioned. Moreover, when measuring a light absorbency in the state of a film
  • the second aspect of the colored composition of the present invention includes a colorant and a polymerizable compound, and the polymerizable compound has a chain containing two or more alkyleneoxy groups as repeating units (that is, a repeating unit of an alkyleneoxy group).
  • a polymerizable compound having a chain having a number of 2 or more) and the colorant includes at least one colorant A selected from a red colorant and a purple colorant, a yellow colorant, and a blue colorant.
  • the colorant A / total colorant which is at least a mass ratio of the colorant A selected from the red colorant and the purple colorant to the total amount of the colorant, is 0.01 to 0.7, and the colorant of the yellow colorant
  • the yellow colorant / total colorant which is a mass ratio to the total amount, is 0.05 to 0.5
  • the blue colorant / total colorant which is the mass ratio of the blue colorant to the total amount of colorant, is 0.05 to 0.00.
  • the colorant includes a red colorant, a purple colorant, a yellow colorant, and a blue colorant
  • the red colorant / total colorant is a mass ratio of the red colorant to the total amount of the colorant.
  • the yellow colorant / total colorant is 0.1 to 0.4, and the mass ratio of the yellow colorant to the total amount of the colorant is 0.1 to 0.4, and the mass ratio of the blue colorant to the total amount of the colorant
  • the blue colorant / total colorant is 0.2 to 0.6, and the purple colorant / total colorant, which is the mass ratio of the purple colorant to the total amount of colorant, is 0.01 to 0.3. Is preferred.
  • the color composition of the first aspect in which the absorbance ratio A / B is 0.3 to 3 and the absorbance ratio C / D is 5 or more, and each colorant is contained in the above range.
  • the colored composition according to the second aspect can form a film that can transmit near infrared rays with less visible light-derived noise.
  • the coloring composition of this invention can form the film
  • a colored composition capable of forming a film capable of transmitting near-infrared rays with less visible light-derived noise has a low permeability to i-line and the like, and therefore tends to have a lower curability inside the film than the film surface. It is in. For this reason, since the film
  • the polymerizable compound having an alkyleneoxy chain has flexibility, the influence of shrinkage of the film accompanying the curing of the polymerizable compound can be suppressed, so that it is presumed that a film in which wrinkles are suppressed can be formed.
  • it is useful when forming a film having a film thickness of 1 ⁇ m or more, and further 6 ⁇ m.
  • each component of the coloring composition of the present invention will be described.
  • the coloring composition of the present invention contains a colorant.
  • the colorant may be a pigment or a dye. Preferably, it is a pigment because it has high resistance to heat and light.
  • the colorant preferably has a pigment content of 95% by mass or more, more preferably 97% by mass or more, and still more preferably 99% by mass or more based on the total amount of the colorant. .
  • the pigment is preferably an organic pigment, and examples thereof include the following. However, the present invention is not limited to these.
  • Pigment Orange 2 5, 13, 16, 17: 1, 31, 34, 36, 38, 43, 46, 48, 49, 51, 52, 55, 59, 60, 61, 62, 64, 71, 73, etc. (Orange pigment) C. I.
  • black pigments such as carbon black (CI Pigment Black 7), titanium black, iron, Examples thereof include metal oxides such as cobalt, aluminum, cadmium, lead, copper, titanium, magnesium, chromium, zinc, and antimony, and composite oxides of the above metals.
  • the well-known dye currently used for the color filter can be used.
  • the chemical structure includes pyrazole azo, anilino azo, triphenyl methane, anthraquinone, anthrapyridone, benzylidene, oxonol, pyrazolotriazole azo, pyridone azo, cyanine, phenothiazine, pyrrolopyrazole azomethine, Dyes such as xanthene, phthalocyanine, benzopyran, indigo, and pyromethene can be used. Moreover, you may use the multimer of these dyes.
  • an acid dye and / or a derivative thereof may be suitably used.
  • direct dyes, basic dyes, mordant dyes, acid mordant dyes, azoic dyes, disperse dyes, oil-soluble dyes, food dyes, and / or derivatives thereof can also be used effectively.
  • acid alizarin violet N acid black 1, 2, 24, 48, acid blue 1,7,9,15,18,23,25,27,29,40-45,62,70,74,80,83,86,87,90,92,103,112,113,120, 129, 138, 147, 158, 171, 182, 192, 243, 324: 1, acid chroma violet K, acid Fuchsin; acid green 1,3,5,9,16,25,27,50, acid orange 6, 7, 8, 10, 12, 50, 51, 52, 56, 63, 74, 95, acid red 1,4,8,14,17,18,26,27,29,31,34,35,37,42,44,50,51,52,57,66,73,80,87,88, 91, 92, 94, 97, 103, 111, 114, 129, 133, 134, 138, 143, 145, 150, 151, 158, 176,
  • azo, xanthene and phthalocyanine acid dyes are also preferred.
  • I. Solvent Blue 44, 38; C.I. I. Solvent orange 45; Rhodamine B, Rhodamine 110 and other acid dyes and derivatives of these dyes are also preferably used.
  • the dye triarylmethane, anthraquinone, azomethine, benzylidene, oxonol, cyanine, phenothiazine, pyrrolopyrazole azomethine, xanthene, phthalocyanine, benzopyran, indigo, pyrazoleazo
  • a colorant selected from anilinoazo, pyrazolotriazole azo, pyridone azo, and anthrapyridone pyromethene is preferable. Further, pigments and dyes may be used in combination.
  • bisbenzofuranone pigments examples include those described in JP-A-2012-528448, JP-A-2010-534726, JP-A-2012-515234, and the like.
  • IRGAPHOR BK manufactured by BASF Is available as Examples of the azomethine pigment include those described in JP-A-1-170601, JP-A-2-34664, etc., and can be obtained, for example, as “Chromofine Black A1103” manufactured by Dainichi Seika Co., Ltd.
  • the azo dye is not particularly limited, and preferred examples include compounds represented by the following formula (A-1).
  • the colorant it is preferable to include at least a yellow colorant and a blue colorant, and it is more preferable to include a red colorant, a yellow colorant, a blue colorant, and a purple colorant.
  • the colorant preferably contains a pigment, more preferably contains a yellow pigment and a blue pigment, and more preferably contains a red pigment, a yellow pigment, a blue pigment, and a purple pigment. According to this aspect, it is possible to obtain a colored composition capable of forming a film capable of transmitting near-infrared rays with little visible light-derived noise.
  • red pigments include C.I. I. Pigment Red 254 is preferred.
  • yellow pigments include C.I. I. Pigment Yellow 139 is preferred.
  • the blue pigment include C.I. I. Pigment Blue 15: 6 is preferred.
  • Purple pigments include, for example, C.I. I. Pigment Violet 23 is preferred.
  • the colorant preferably contains at least one selected from bisbenzofuranone pigments, azomethine pigments, perylene pigments, and azo dyes. It is more preferable to contain one or more selected from pigments, azomethine pigments and perylene pigments.
  • the mass ratio of the red colorant to the total amount of the colorant is 0.1 to 0.5
  • the mass ratio of the yellow colorant to the total amount of the colorant The ratio is preferably 0.1 to 0.4
  • the mass ratio of the blue colorant to the total amount of the colorant is preferably 0.2 to 0.6.
  • the mass ratio of the red colorant to the total amount of colorant is 0.3 to 0.5
  • the mass ratio of the yellow colorant to the total amount of colorant is 0.1 to 0.3
  • the blue colorant is based on the total amount of colorant.
  • the mass ratio is more preferably 0.4 to 0.6.
  • the mass ratio of the yellow colorant to the total amount of the colorant is 0.1 to 0.4, and the mass of the blue colorant relative to the total amount of the colorant
  • the ratio is preferably 0.2 to 0.6
  • the mass ratio of the purple colorant to the total amount of the colorant is preferably 0.01 to 0.3.
  • the mass ratio of the yellow colorant to the total amount of colorant is 0.2 to 0.3
  • the mass ratio of the blue colorant to the total amount of colorant is 0.4 to 0.6
  • the purple colorant is based on the total amount of colorant.
  • the mass ratio is more preferably 0.1 to 0.25.
  • the mass ratio of the red colorant to the total amount of the colorant is 0.1 to 0.5, and the yellow colorant is colored.
  • the mass ratio to the total amount of the colorant is 0.1 to 0.4, the mass ratio of the blue colorant to the total amount of the colorant is 0.2 to 0.6, and the mass ratio of the purple colorant to the total amount of the colorant is 0.00. It is preferably 01 to 0.3.
  • the mass ratio of the red colorant to the total amount of colorant is 0.3 to 0.5, the mass ratio of the yellow colorant to the total amount of colorant is 0.1 to 0.3, and the blue colorant is based on the total amount of colorant.
  • the mass ratio is 0.3 to 0.5, and the mass ratio of the purple colorant to the total amount of the colorant is 0.01 to 0.2.
  • the color ratio of the red colorant to the total amount of the colorant is 0.35 to 0.41, the mass ratio of the yellow colorant to the total amount of the colorant is 0.13 to 0.1.9, and the colorant of the blue colorant.
  • the mass ratio with respect to the total amount is preferably 0.34 to 0.40, and the mass ratio of the purple colorant to the total amount of the colorant is particularly preferably 0.06 to 0.12.
  • the ratio A / B between the minimum value A of the absorbance in the wavelength range from 400 nm to less than 580 nm and the minimum value B in the wavelength range from 580 nm to 770 nm is 0.3 to 3
  • a colored composition having a ratio C / D of 5 or more between the minimum absorbance C in the wavelength range of 400 nm to 750 nm and the maximum absorbance D in the wavelength range of 850 nm to 1300 nm can be obtained.
  • the content of the colorant is preferably 1 to 90% by mass, more preferably 3 to 80% by mass, and more preferably 3 to 70% by mass of the total solid content of the colored composition. % Is more preferable.
  • Pigment dispersion when a pigment is used as the colorant, it is preferably used in the form of a pigment dispersion in which the pigment is dispersed together with a resin, an organic solvent, a pigment derivative and the like.
  • the composition of the pigment dispersion and the method for preparing the pigment dispersion are described in detail below.
  • the average particle diameter of the pigment is preferably 20 to 300 nm, more preferably 25 to 250 nm, and still more preferably 30 to 200 nm.
  • the “average particle size” means the average particle size of secondary particles in which primary particles (single crystallites) of the pigment are aggregated.
  • the average particle diameter of the pigment is obtained by observing with a scanning electron microscope (SEM) or a transmission electron microscope (TEM), measuring 100 particle sizes in a portion where the particles are not aggregated, and calculating an average value. be able to.
  • the particle size distribution of the secondary particles of the pigment (hereinafter, simply referred to as “particle size distribution”) is 70% by mass or more, preferably 80% by mass, of secondary particles falling into (average particle size ⁇ 100) nm. % Or more is preferable.
  • the particle size distribution is a value measured using a scattering intensity distribution.
  • the pigment having the average particle size and particle size distribution described above is obtained by mixing and dispersing a commercially available pigment, preferably with a resin and an organic solvent, and using a pulverizer such as a bead mill or a roll mill while pulverizing. Can be prepared.
  • the pigment thus obtained is usually in the form of a pigment dispersion.
  • a fine and sized pigment it is preferable to use a fine and sized pigment. Refinement of the pigment is achieved by preparing a high-viscosity liquid composition together with the pigment, the organic solvent, and the water-soluble inorganic salts, and applying a stress and grinding using a wet pulverizer.
  • a water-soluble organic solvent is preferable.
  • the water-soluble organic solvent include methanol, ethanol, isopropanol, n-propanol, isobutanol, n-butanol, ethylene glycol, diethylene glycol, diethylene glycol monomethyl ether, diethylene glycol monoethyl ether, diethylene glycol monobutyl ether, propylene glycol, propylene glycol monomethyl.
  • examples include ether acetate.
  • the amount of the water-soluble organic solvent used in the miniaturization step is preferably 50 to 300 parts by mass, more preferably 100 to 200 parts by mass with respect to 100 parts by mass of the pigment.
  • other solvents include benzene, toluene, xylene, ethylbenzene, chlorobenzene, nitrobenzene, aniline, pyridine, quinoline, tetrahydrofuran, dioxane, ethyl acetate, isopropyl acetate, butyl acetate, hexane, heptane, octane, nonane, decane, and undecane.
  • water-soluble inorganic salts used in the pigment refinement process examples include sodium chloride, potassium chloride, calcium chloride, barium chloride, sodium sulfate and the like.
  • the amount of the water-soluble inorganic salt used in the miniaturization step is preferably 1 to 50 parts by mass, more preferably 1 to 10 parts by mass with respect to 1 part by mass of the pigment.
  • the operating condition when the apparatus is a kneader is the rotational speed of the blade in the apparatus. Is preferably from 10 to 200 rpm, and a relatively large biaxial rotation ratio is preferable because of a high grinding effect.
  • the operation time is preferably 1 to 8 hours together with the dry grinding time, and the internal temperature of the apparatus is preferably 50 to 150 ° C.
  • the water-soluble inorganic salt as a grinding medium preferably has a grinding particle size of 5 to 50 ⁇ m, a sharp particle size distribution, and a spherical shape.
  • Resins (dispersed resin) that can be used in the preparation of pigment dispersions include polymer dispersants [for example, resins having amine groups (polyamideamine and salts thereof), oligoimine resins, polycarboxylic acids and salts thereof, high molecular weight Unsaturated acid ester, modified polyurethane, modified polyester, modified poly (meth) acrylate, (meth) acrylic copolymer, naphthalenesulfonic acid formalin condensate], polyoxyethylene alkyl phosphate ester, polyoxyethylene alkyl amine, alkanol Surfactants such as amines can be mentioned.
  • polymer dispersants for example, resins having amine groups (polyamideamine and salts thereof), oligoimine resins, polycarboxylic acids and salts thereof, high molecular weight Unsaturated acid ester, modified polyurethane, modified polyester, modified poly (meth) acrylate, (meth) acrylic copolymer, naphthal
  • the polymer dispersant can be further classified into a linear polymer, a terminal-modified polymer, a graft polymer, and a block polymer from the structure thereof.
  • the terminal-modified polymer having an anchor site to the pigment surface include a polymer having a phosphate group at the terminal described in JP-A-3-112992, JP-A-2003-533455, and the like.
  • examples thereof include polymers having a sulfonic acid group at the terminal end described in JP-A-273191 and the like, and polymers having a partial skeleton of an organic dye and a heterocyclic ring described in JP-A-9-77994.
  • polymers having two or more pigment surface anchor sites (acid groups, basic groups, organic dye partial skeletons, heterocycles, etc.) introduced at the polymer ends described in JP-A-2007-277514 are also available. It is preferable because of excellent dispersion stability.
  • the graft polymer having an anchor site to the pigment surface include poly (lower alkyleneimine) described in JP-A-54-37082, JP-A-8-507960, JP-A-2009-258668, and the like.
  • reaction product of polyester a reaction product of polyallylamine and polyester described in JP-A-9-169821 and the like, a macromonomer described in JP-A-10-339949, JP-A-2004-37986 and the like, Copolymers with nitrogen atom monomers, graft-type polymers having partial skeletons or heterocyclic rings of organic dyes described in JP-A-2003-238837, JP-A-2008-9426, JP-A-2008-81732, etc.
  • a known macromonomer can be used as the macromonomer used when the graft polymer having an anchor site to the pigment surface is produced by radical polymerization.
  • macromonomer AA-6 polymethyl methacrylate whose terminal group is a methacryloyl group
  • AS-6 polystyrene whose terminal group is a methacryloyl group
  • AN-6S terminal group is methacryloyl
  • AB-6 polybutyl acrylate whose terminal group is a methacryloyl group
  • Plaxel FM5 manufactured by Daicel Chemical Industries, Ltd.
  • polyester macromonomer described in JP-A-2-272009 examples include a polyester-based macromonomer that is particularly excellent in flexibility and solvophilicity is particularly preferable from the viewpoint of dispersibility of the pigment, dispersion stability, and developability exhibited by the coloring composition using the pigment dispersion.
  • a polyester macromonomer represented by a polyester macromonomer described in JP-A-2-272009 is most preferred.
  • block type polymer having an anchor site to the pigment surface block type polymers described in JP-A Nos. 2003-49110 and 2009-52010 are preferable.
  • a kraft copolymer containing a structural unit represented by any one of the following formulas (1) to (4) can also be used.
  • X 1 , X 2 , X 3 , X 4 and X 5 each independently represent a hydrogen atom or a monovalent organic group, preferably a hydrogen atom or an alkyl group having 1 to 12 carbon atoms, preferably a hydrogen atom or a methyl group Are more preferable, and a methyl group is particularly preferable.
  • W 1 , W 2 , W 3 , and W 4 each independently represent an oxygen atom or NH, preferably an oxygen atom.
  • R 3 represents a branched or straight chain alkylene group (preferably having 1 to 10 carbon atoms, more preferably 2 or 3), and —CH 2 —CH (CH 3 ) from the viewpoint of dispersion stability.
  • a group represented by — or a group represented by —CH (CH 3 ) —CH 2 — is preferred.
  • Y 1 , Y 2 , Y 3 and Y 4 each independently represent a divalent linking group.
  • the description of paragraph numbers 0025 to 0069 of JP2012-255128A can be referred to, and the above contents are incorporated in this specification.
  • Specific examples of the craft copolymer include the following. Further, resins described in JP-A-2012-255128, paragraphs 0072 to 0094 can be used.
  • an oligoimine resin containing a nitrogen atom in at least one of the main chain and the side chain can also be used.
  • the oligoimine resin includes a repeating unit having a partial structure X having a functional group of pKa14 or less, a side chain containing a side chain Y having 40 to 10,000 atoms, and at least a main chain and a side chain.
  • a resin having a basic nitrogen atom on one side is preferred.
  • the basic nitrogen atom is not particularly limited as long as it is a basic nitrogen atom.
  • the oligoimine resin includes, for example, a repeating unit represented by the following formula (I-1), a repeating unit represented by the formula (I-2), and / or a repeating unit represented by the formula (I-2a). Examples include resins containing units.
  • R 1 and R 2 each independently represents a hydrogen atom, a halogen atom or an alkyl group (preferably having 1 to 6 carbon atoms).
  • a independently represents an integer of 1 to 5; * Represents a connecting part between repeating units.
  • R 8 and R 9 are the same groups as R 1 .
  • L is a single bond, an alkylene group (preferably having 1 to 6 carbon atoms), an alkenylene group (preferably having 2 to 6 carbon atoms), an arylene group (preferably having 6 to 24 carbon atoms), a heteroarylene group (having 1 to 6 carbon atoms).
  • an imino group preferably having a carbon number of 0 to 6
  • an ether group preferably having a carbon number of 0 to 6
  • a thioether group preferably having a carbonyl group, or a combination group thereof.
  • a single bond or —CR 5 R 6 —NR 7 — is preferable.
  • R 5 R 6 each independently represents a hydrogen atom, a halogen atom, or an alkyl group (preferably having 1 to 6 carbon atoms).
  • R 7 is a hydrogen atom or an alkyl group having 1 to 6 carbon atoms.
  • L a is a structural site ring structure formed together with CR 8 CR 9 and N, it is preferable together with the carbon atom of CR 8 CR 9 is a structural site that form a non-aromatic heterocyclic ring having 3 to 7 carbon atoms . More preferably, it is a structural part that forms a 5- to 7-membered non-aromatic heterocyclic ring by combining the carbon atom of CR 8 CR 9 and N (nitrogen atom), more preferably a 5-membered non-aromatic heterocyclic ring. It is a structural part to be formed and is particularly preferably a structural part to form pyrrolidine. This structural part may further have a substituent such as an alkyl group.
  • X represents a group having a functional group of pKa14 or less.
  • Y represents a side chain having 40 to 10,000 atoms.
  • the resin oligoimine-based resin
  • the resin further contains, as a copolymerization component, one or more selected from repeating units represented by formula (I-3), formula (I-4), and formula (I-5) You may do it.
  • the resin contains such a repeating unit, the dispersion performance of the pigment can be further improved.
  • R 1 , R 2 , R 8 , R 9 , L, La, a and * are as defined in the formulas (I-1), (I-2) and (I-2a).
  • Ya represents a side chain having an anionic group having 40 to 10,000 atoms.
  • the repeating unit represented by the formula (I-3) is reacted by adding an oligomer or polymer having a group that reacts with an amine to form a salt to a resin having a primary or secondary amino group in the main chain. Can be formed.
  • oligoimine-based resin described above, the description of paragraph numbers 0102 to 0166 in JP 2012-255128 A can be referred to, and the above contents are incorporated in this specification. Specific examples of the oligoimine resin include the following. Also, resins described in paragraph numbers 0168 to 0174 of JP 2012-255128 A can be used.
  • the resin is also available as a commercial product. Specific examples of such resins include “Disperbyk-101 (polyamidoamine phosphate), 107 (carboxylic acid ester), 110, 111 (copolymer containing an acid group) manufactured by BYK Chemie.
  • Polymer 130 (polyamide), 161, 162, 163, 164, 165, 166, 170 (polymer copolymer) ”,“ BYK-P104, P105 (high molecular weight unsaturated polycarboxylic acid) ”, manufactured by EFKA “EFKA 4047, 4050-4010-4165 (polyurethane type), EFKA 4330-4340 (block copolymer), 4400-4402 (modified polyacrylate), 5010 (polyesteramide), 5765 (high molecular weight polycarboxylate), 6220 ( Fatty acid polyester), 6745 (phthalocyanine) Derivatives), 6750 (azo pigment derivatives), “Ajisper PB821, PB822, PB880, PB881” manufactured by Ajinomoto Fan Techno Co., Ltd., “Floren TG-710 (urethane oligomer)” manufactured by Kyoeisha Chemical Co., Ltd., “Polyflow No.
  • DA-705, DA-725 “ Demol RN, N (Naphthalenesulfonic acid formalin polycondensate), MS, C, SN-B (aromatic sulfonic acid formalin polycondensate) ”manufactured by Kao Corporation,“ Homogenol L- 18 (polymer polycarboxylic acid) "," Emulgen 920, 930, 935, 985 (poly Xylethylene nonylphenyl ether) ”,“ acetamine 86 (stearylamine acetate) ”,“ Solsperse 5000 (phthalocyanine derivative), 22000 (azo pigment derivative), 13240 (polyesteramine), 3000, 17000, manufactured by Nippon Lubrizol Co., Ltd.
  • 27000 (polymer having a functional part at the end), 24000, 28000, 32000, 38500 (graft type polymer) ”,“ Nikkor T106 (polyoxyethylene sorbitan monooleate), MYS-IEX (polyoxy) manufactured by Nikko Chemical Co., Ltd.
  • Nonionics such as polyoxyethylene lauryl ether, polyoxyethylene stearyl ether, polyoxyethylene oleyl ether, polyoxyethylene octyl phenyl ether, polyoxyethylene nonyl phenyl ether, polyethylene glycol dilaurate, polyethylene glycol distearate, sorbitan fatty acid ester Surfactant, anionic surfactant such as “W004, W005, W017”, “EFKA-46, EFKA-47, EFKA-47EA, EFKA polymer 100, EFKA polymer 400, EFKA polymer 401, manufactured by Morishita Sangyo Co., Ltd.
  • Disperse Aid 6 Disperse Aid 8
  • Disperse Aid 15 Disperse Aid 9100 “manufactured by San Nopco Polymer dispersant, manufactured by ADEKA Corporation “Adeka Pluronic L31, F38, L42, L44, L61, L64, F68, L72, P95, F77, P84, F87, P94, L101, P103, F108, L121, P-123 And “Ionet S-20” manufactured by Sanyo Chemical Co., Ltd.
  • Alkali-soluble resins include (meth) acrylic acid copolymer, itaconic acid copolymer, crotonic acid copolymer, maleic acid copolymer, partially esterified maleic acid copolymer, etc., and carboxylic acid in the side chain.
  • the acidic cellulose derivative include a resin having a hydroxyl group modified with an acid anhydride, and a (meth) acrylic acid copolymer is particularly preferable.
  • An alkali-soluble resin containing is also preferred.
  • the content of the resin (dispersion resin) in the pigment dispersion is preferably 1 to 100 parts by mass with respect to 100 parts by mass of the pigment.
  • the upper limit is preferably 80 parts by mass or less, preferably 70 parts by mass or less, and more preferably 60 parts by mass or less.
  • the lower limit is preferably 5 parts by mass or more, and more preferably 10 parts by mass or more.
  • the amount of pigment means the total amount of pigment contained in the total amount of colorant.
  • the pigment dispersion preferably further contains a pigment derivative.
  • the pigment derivative is a compound having a structure in which a part of the pigment is substituted with an acidic group, a basic group, a phthalimidomethyl group, or the like.
  • the pigment derivative preferably contains a pigment derivative having an acidic group or a basic group from the viewpoint of dispersibility and dispersion stability.
  • pigments for constituting the pigment derivative diketopyrrolopyrrole pigment, azo pigment, phthalocyanine pigment, anthraquinone pigment, quinacridone pigment, dioxazine pigment, perinone pigment, perylene pigment, thioindigo pigment, isoindolinone pigment, isoindolinone pigment, examples include quinophthalone pigments, selenium pigments, and metal complex pigments.
  • a sulfonic acid, carboxylic acid, and its quaternary ammonium salt are preferable, a carboxylic acid group and a sulfonic acid group are more preferable, and a sulfonic acid group is especially preferable.
  • the basic group possessed by the pigment derivative is preferably an amino group, particularly preferably a tertiary amino group.
  • a quinoline pigment derivative, a benzimidazolone pigment derivative and an isoindoline pigment derivative are preferable, and a quinoline pigment derivative and a benzimidazolone pigment derivative are particularly preferable.
  • the content of the pigment derivative in the pigment dispersion is preferably 1 to 50% by mass, more preferably 3 to 30% by mass, based on the total mass of the pigment. Only one pigment derivative may be used, or two or more pigment derivatives may be used in combination.
  • the pigment dispersion preferably contains an organic solvent.
  • the organic solvent is selected depending on the solubility of each component contained in the pigment dispersion and the coating property when the pigment dispersion is applied to the coloring composition.
  • esters, ethers, ketones, and aromatic hydrocarbons are used as the organic solvent.
  • the organic solvent which can be contained in the coloring composition mentioned later.
  • the content of the organic solvent in the pigment dispersion is preferably 50 to 95% by mass, more preferably 70 to 90% by mass.
  • the coloring composition of the present invention contains a polymerizable compound.
  • the polymerizable compound is a compound having a polymerizable group, and a known polymerizable compound that can be polymerized by a radical can be used.
  • a group having an ethylenically unsaturated bond is preferable. Examples of the group having an ethylenically unsaturated bond include vinyl group, allyl group, methallyl group, acryloyl group, methacryloyl group, allyloxycarbonyl group, and methallyloxycarbonyl group.
  • the polymerizable compound may be in any chemical form such as a monomer, a prepolymer, that is, a dimer, a trimer and an oligomer, or a mixture thereof and a multimer thereof.
  • the polymerizable compound is preferably a compound having one or more polymerizable groups, and more preferably a compound having two or more polymerizable groups.
  • a polyfunctional polymerizable compound having 4 or more functional groups having 4 or more polymerizable groups is preferable, and a polyfunctional polymerizable compound having 5 or more functional groups is more preferable.
  • the present invention includes a polymerizable compound containing a polymerizable compound having a chain containing two or more alkyleneoxy groups as repeating units (that is, a chain having 2 or more repeating units of alkyleneoxy groups; an alkyleneoxy chain).
  • a polymerizable compound having an alkyleneoxy chain has flexibility, the shrinkage of the film accompanying the curing of the polymerizable compound can be suppressed, and the generation of wrinkles on the film surface can be effectively suppressed.
  • the alkyleneoxy chain preferably has 2 to 30 repeating units of an alkyleneoxy group, more preferably 2 to 20, and still more preferably 5 to 15.
  • the alkyleneoxy group preferably has 2 or more carbon atoms, more preferably 2 to 10, more preferably 2 to 4, and particularly preferably 2.
  • the alkyleneoxy group may be either linear or branched, but is preferably linear.
  • the alkyleneoxy group is preferably unsubstituted. That is, the alkyleneoxy chain is preferably represented by “— ((CH 2 ) a —O) b —”.
  • a is preferably 2 or more, more preferably 2 to 20.
  • b is preferably 2 or more, more preferably 2 to 10.
  • the polymerizable compound having an alkyleneoxy chain is a polymer having a chain containing two or more ethyleneoxy groups as repeating units (that is, a chain having two or more ethyleneoxy group repeating units, also referred to as an ethyleneoxy chain). It is preferable that it is an ionic compound. Since the polymerizable compound having an ethyleneoxy chain is particularly excellent in flexibility, generation of wrinkles on the film surface can be more effectively suppressed.
  • the polymerizable compound having an alkyleneoxy chain preferably has a molecular weight of 100 to 2000, more preferably 1000 to 2000. Further, the value obtained by dividing the molecular weight value of the polymerizable compound by the number of polymerizable groups contained in the polymerizable compound is preferably 100 to 300, more preferably 200 to 300. According to this aspect, since the crosslinking density of the polymerizable compound is moderate, the generation of wrinkles can be more effectively suppressed.
  • the molecular weight value of the polymerizable compound is a theoretical value obtained from the molecular structure when the polymerizable compound is a monomer, and means a weight average molecular weight when the polymerizable compound is an oligomer or a polymer.
  • the polymerizable compound having an alkyleneoxy chain preferably has a cyclic structure. Adhesiveness improves by having a cyclic structure.
  • the cyclic structure include an aromatic ring structure, an alicyclic structure, and a heterocyclic structure.
  • a heterocyclic structure is preferred.
  • the heterocyclic ring is preferably a 5-membered ring or a 6-membered ring.
  • the heterocycle is preferably a monocycle or a condensed ring, and preferably a monocycle. Examples of the hetero atom constituting the hetero ring include a nitrogen atom, an oxygen atom, and a sulfur atom, and a nitrogen atom is preferable.
  • the number of heteroatoms is preferably 1 to 3, more preferably 2 to 3, and particularly preferably 3.
  • the polymerizable compound having an alkyleneoxy chain preferably has a partial structure represented by the following general formula (1). * In the formula is a connecting hand.
  • Examples of the polymerizable compound having a cyclic structure include a compound represented by “Ar— (L—X) n ”.
  • Ar represents an aromatic ring structure, an alicyclic structure, or a heterocyclic structure.
  • L represents a single bond or a linking group.
  • X represents a hydrogen atom or a polymerizable group. When n is 1, X represents a polymerizable group. When n is 2 or more, at least one of the plurality of Xs represents a polymerizable group.
  • the polymerizable group one or more selected from a vinyl group, an allyl group, a methallyl group, an acryloyl group, a methacryloyl group, an allyloxycarbonyl group, and a methallyloxycarbonyl group are preferable, and an acryloyl group and a methacryloyl group are more preferable.
  • Examples of the polymerizable compound having a partial structure represented by the formula (1) include a polymerizable compound represented by the following general formula (1a).
  • X 1 ⁇ X 3 each independently represent a hydrogen atom or a polymerizable group, at least one of X 1 ⁇ X 3 represents a polymerizable group.
  • the polymerizable group one or more selected from a vinyl group, an allyl group, a methallyl group, an acryloyl group, a methacryloyl group, an allyloxycarbonyl group, and a methallyloxycarbonyl group are preferable, and an acryloyl group and a methacryloyl group are more preferable.
  • the plurality of X 1 to X 3 may be the same or different.
  • L 1 represents a (1 + n1) -valent linking group
  • L 2 represents a (1 + n2) -valent linking group
  • L 3 represents a (1 + n3) -valent linking group
  • L At least one of 1 to L 3 represents a linking group containing — ((CH 2 ) a —O) b —.
  • a represents an integer of 2 or more
  • b represents an integer of 2 or more.
  • linking group represented by L 1 to L 3 for example, in the case of a divalent linking group, — ((CH 2 ) a —O) b —, — (CH 2 ) c —, —CO—, and — Examples thereof include a group formed by combining one or more selected from NH-.
  • a represents an integer of 2 or more, preferably 2 to 10, more preferably 2 to 4, and still more preferably 2.
  • b represents an integer of 2 or more, preferably 2 to 30, more preferably 2 to 20, and still more preferably 5 to 15.
  • c represents an integer of 1 or more, preferably 1 to 30, more preferably 1 to 20, and still more preferably 1 to 10.
  • the linking group represented by L 1 to L 3 is a trivalent or higher linking group, among the groups listed as examples of the divalent linking group described above, a group in which one or more hydrogen atoms have been removed can be used.
  • n1 to n3 each independently represents an integer of 1 or more. 1 or 2 is preferred.
  • polymerizable compound represented by the general formula (1a) include the following compounds.
  • Examples of commercially available polymerizable compounds represented by the general formula (1a) include UA-7200 manufactured by Shin-Nakamura Chemical Co., Ltd.
  • the polymerizable compound having an alkyleneoxy chain for example, at least one selected from the group of compounds represented by the following general formula (Z-4) or (Z-5) can also be used. .
  • each E independently represents — ((CH 2 ) y CH 2 O). — Or — ((CH 2 ) y CH (CH 3 ) O) —, each y independently represents an integer of 0 to 10, and each X independently represents an acryloyl group, methacryloyl group, hydrogen atom Or a carboxyl group.
  • the total number of acryloyl groups and methacryloyl groups is 3 or 4
  • each m independently represents an integer of 0 to 10
  • at least one of m represents an integer of 2 to 10
  • the sum of each m is an integer from 2 to 40.
  • the total number of acryloyl groups and methacryloyl groups is 5 or 6, and each n independently represents an integer of 0 to 10, and at least one of n represents an integer of 2 to 10 And the sum of each n is an integer from 2 to 60.
  • m is preferably an integer of 0 to 6, and more preferably an integer of 0 to 4.
  • the total of each m is preferably an integer of 2 to 40, more preferably an integer of 2 to 16, and particularly preferably an integer of 4 to 8.
  • n is preferably an integer of 0 to 6, and more preferably an integer of 0 to 4.
  • the total of each n is preferably an integer of 3 to 60, more preferably an integer of 3 to 24, and particularly preferably an integer of 6 to 12.
  • — ((CH 2 ) y CH 2 O) — or — ((CH 2 ) y CH (CH 3 ) O) — in general formula (Z-4) or general formula (Z-5) is oxygen A form in which the end on the atom side is bonded to X is preferred.
  • the compounds represented by formula (Z-4) or formula (Z-5) may be used alone or in combination of two or more.
  • a form in which all six Xs are acryloyl groups is preferable.
  • the compound represented by the general formula (Z-4) or (Z-5) is a ring-opening addition of ethylene oxide or propylene oxide to pentaerythritol or dipentaerythritol, which is a conventionally known process. It can be synthesized from a step of bonding a ring-opening skeleton by a reaction and a step of introducing a (meth) acryloyl group by reacting, for example, (meth) acryloyl chloride with a terminal hydroxyl group of the ring-opening skeleton. Each step is a well-known step, and a person skilled in the art can easily synthesize a compound represented by the general formula (Z-4) or the general formula (Z-5).
  • pentaerythritol derivatives and / or dipentaerythritol derivatives are more preferable.
  • Specific examples include compounds represented by the following formulas (a) to (f) (hereinafter also referred to as “exemplary compounds (a) to (f)”).
  • exemplary compounds (a), (f) b), (e) and (f) are preferred.
  • Examples of commercially available polymerizable compounds represented by the general formulas (Z-4) and (Z-5) include SR-494, a tetrafunctional acrylate having four ethyleneoxy chains manufactured by Sartomer, Nippon Kayaku Examples thereof include DPCA-60, which is a hexafunctional acrylate having six pentyleneoxy chains, and TPA-330, which is a trifunctional acrylate having three isobutyleneoxy chains.
  • the polymerizable compound used in the colored composition of the present invention preferably contains 50-100% by mass of the above-mentioned polymerizable compound having an alkyleneoxy chain, based on the total amount of the polymerizable compound, and 80-100% by mass. Is more preferable, and 95 to 100% by mass is still more preferable, and it is particularly preferable that it is composed only of a polymerizable compound having an alkyleneoxy chain.
  • the colored composition of the present invention may contain a polymerizable compound other than the polymerizable compound having an alkyleneoxy chain (hereinafter referred to as “other polymerizable compound”).
  • a polymerizable compound other than the polymerizable compound having an alkyleneoxy chain hereinafter referred to as “other polymerizable compound”.
  • a conventionally well-known polymeric compound can be used.
  • unsaturated carboxylic acids for example, acrylic acid, methacrylic acid, itaconic acid, crotonic acid, isocrotonic acid, maleic acid, etc.
  • esters thereof, amides, and multimers thereof can be mentioned.
  • an ester of an unsaturated carboxylic acid and an aliphatic polyhydric alcohol compound, an amide of an unsaturated carboxylic acid and an aliphatic polyhydric amine compound, and a multimer thereof can be used.
  • addition reaction products of monofunctional or polyfunctional isocyanates or epoxies with unsaturated carboxylic acid esters or amides having a nucleophilic substituent such as hydroxyl group, amino group, mercapto group, monofunctional or polyfunctional can also be used.
  • an addition reaction product of an unsaturated carboxylic acid ester or amide having an electrophilic substituent such as an isocyanate group or an epoxy group with a monofunctional or polyfunctional alcohol, amine or thiol, and further a halogen group A substitution reaction product of an unsaturated carboxylic acid ester or amide having a detachable substituent such as a tosyloxy group and a monofunctional or polyfunctional alcohol, amine or thiol can also be used.
  • a compound group in which the unsaturated carboxylic acid is replaced with an unsaturated phosphonic acid, a vinylbenzene derivative such as styrene, vinyl ether, allyl ether or the like As these specific compounds, the compounds described in paragraphs [0095] to [0108] of JP-A-2009-288705 can also be used in the present invention.
  • a compound having an ethylenically unsaturated group having a boiling point of 100 ° C. or higher under normal pressure, which has at least one addition-polymerizable ethylene group can be used.
  • Examples include monofunctional (meth) acrylates such as polyethylene glycol mono (meth) acrylate, polypropylene glycol mono (meth) acrylate, and phenoxyethyl (meth) acrylate; polyethylene glycol di (meth) acrylate, trimethylolethanetri ( (Meth) acrylate, neopentyl glycol di (meth) acrylate, pentaerythritol tri (meth) acrylate, pentaerythritol tetra (meth) acrylate, dipentaerythritol penta (meth) acrylate, dipentaerythritol hexa (meth) acrylate, hexanediol ( (Meth) acrylate, trimethylolpropane tri (acryloyloxypropyl) ether, tri (acryloyloxyethyl) isocyanurate
  • a polyfunctional alcohol such as glycerin or
  • Urethane (meth) acrylates as described in each publication, polyester acrylates and epoxy resins described in JP-A-48-64183, JP-B-49-43191, JP-B-52-30490 And polyfunctional acrylates and methacrylates such as epoxy acrylates which are reaction products of (meth) acrylic acid and mixtures thereof.
  • a polyfunctional (meth) acrylate obtained by reacting a polyfunctional carboxylic acid with a compound having a cyclic ether group such as glycidyl (meth) acrylate and an ethylenically unsaturated group can also be used.
  • JP 2010-160418 A JP 2010-129825 A, JP 4364216 A, etc., having a fluorene ring and having two or more functional ethylenically unsaturated groups. It can also be used.
  • a compound having a boiling point of 100 ° C. or higher under normal pressure and having at least one addition-polymerizable ethylenically unsaturated group is disclosed in paragraph No. of JP-A-2008-292970.
  • the compounds described in ⁇ 0254> to ⁇ 0257> can also be used.
  • polymerizable compounds represented by the following general formulas (MO-1) to (MO-5) can be used.
  • T is an alkyleneoxy group
  • the terminal on the carbon atom side is bonded to R.
  • n is 0 to 14 and m is 1 to 8.
  • a plurality of R and T present in one molecule may be the same or different.
  • at least one of a plurality of Rs is —OC ( ⁇ O) CH ⁇ CH 2 or —OC ( ⁇ O) C (CH 3 ) ⁇
  • a group represented by CH 2 is represented.
  • the polymerizable compounds represented by the general formulas (MO-1) to (MO-5) the compounds described in paragraph numbers 0248 to 0251 of JP-A-2007-26979 are disclosed in the present invention. Can also be suitably used.
  • dipentaerythritol triacrylate (KAYARAD D-330 as a commercial product; manufactured by Nippon Kayaku Co., Ltd.), dipentaerythritol tetraacrylate (KAYARAD D-320 as a commercial product; Nippon Kayaku) Yakuhin Co., Ltd.) dipentaerythritol penta (meth) acrylate (as a commercial product, KAYARAD D-310; manufactured by Nippon Kayaku Co., Ltd.), dipentaerythritol hexa (meth) acrylate (as a commercial product, KAYARAD DPHA; manufactured by Nippon Kayaku Co., Ltd.), ethyleneoxy-modified dipentaerythritol hexaacrylate (as a commercial product, A -DPH-12E (manufactured by Shin-Nakamura Chemical Co., Ltd.) and structures in which these (meth) acryl
  • polymerizable compound 2- (meth) acryloyloxyethyl caproate acid phosphate (PM-20 manufactured by Nippon Kayaku Co., Ltd. as a commercial product), urethane acrylate (Shin Nakamura Chemical Co., Ltd. as a commercial product)
  • Preferable examples include U-6LPA manufactured by U.S.A., pentaerythritol tri- or tetraacrylate (commercially available products such as M-303, M-305, M-306, M-450, and M-452 manufactured by Toagosei Co., Ltd.).
  • polymerizable compounds having a caprolactone structure can be used as other polymerizable compounds.
  • the polymerizable compound having a caprolactone structure is not particularly limited as long as it has a caprolactone structure in the molecule, and examples thereof include trimethylolethane, ditrimethylolethane, trimethylolpropane, ditrimethylolpropane, pentaerythritol, diester.
  • ⁇ -caprolactone modified polyfunctional (meth) acrylate obtained by esterifying polyhydric alcohols such as pentaerythritol, tripentaerythritol, glycerin, diglycerol, trimethylolmelamine, (meth) acrylic acid and ⁇ -caprolactone Can be mentioned.
  • polyhydric alcohols such as pentaerythritol, tripentaerythritol, glycerin, diglycerol, trimethylolmelamine, (meth) acrylic acid and ⁇ -caprolactone
  • Z-1 a polymerizable compound having a caprolactone structure represented by the following general formula (Z-1) is preferable.
  • R 1 represents a hydrogen atom or a methyl group
  • m represents 1 or 2
  • “*” represents a bond
  • R 1 represents a hydrogen atom or a methyl group
  • “*” represents a bond
  • the content of the polymerizable compound is preferably 25 to 65% by mass, more preferably 25 to 60% by mass, and further preferably 25 to 50% by mass based on the total solid content of the colored composition. If content of a polymeric compound is the said range, it will be easy to form a film
  • the film surface and the film of the colored composition applied in the form of a film can be obtained. The inside curability can be made more uniform, and the generation of wrinkles can be more effectively suppressed.
  • the generation of residues during pattern formation can be more effectively suppressed.
  • the ratio P / M between the mass P of the colorant contained in the colored composition and the mass M of the polymerizable compound contained in the colored composition is preferably 0.05 to 0.35. 0.1 to 0.35 is more preferable.
  • the curability of the coloring composition applied in the form of a film can be made substantially uniform on the film surface and inside the film, and the generation of wrinkles can be more effectively suppressed.
  • the generation of residues during pattern formation can be suppressed.
  • the coloring composition of the present invention may contain a polyfunctional thiol compound having two or more mercapto groups in the molecule for the purpose of promoting the reaction of the polymerizable compound.
  • the polyfunctional thiol compound is preferably a secondary alkanethiol, and particularly preferably a compound having a structure represented by the following general formula (I).
  • n represents an integer of 2 to 4
  • L represents a divalent to tetravalent linking group.
  • the linking group L is preferably an aliphatic group having 2 to 12 carbon atoms, particularly preferably n is 2 and L is an alkylene group having 2 to 12 carbon atoms.
  • Specific examples of the polyfunctional thiol compound include compounds represented by the following structural formulas (II) to (IV), and a compound represented by (II) is particularly preferable. These polyfunctional thiols can be used alone or in combination.
  • the blending amount of the polyfunctional thiol compound in the colored composition of the present invention is preferably 0.3 to 8.9% by mass, more preferably 0.8 to 6.4% by mass based on the total solid content excluding the solvent. .
  • the polyfunctional thiol compound may contain only 1 type, and may contain 2 or more types. When two or more types are included, the total amount is preferably within the above range.
  • Polyfunctional thiols may be added for the purpose of improving stability, odor, resolution, developability, adhesion and the like.
  • the colored composition of the present invention preferably contains a resin.
  • the resin does not include the above-described polymerizable compound having an alkyleneoxy chain.
  • the resin preferably has a hydroxyl group. By having a hydroxyl group, adhesion to a support material such as a silicon substrate can be improved.
  • the resin content is preferably 10 to 80% by mass, more preferably 20 to 70% by mass, and still more preferably 30 to 60% by mass of the total solid content of the colored composition.
  • the ratio M / B between the mass M of the polymerizable compound contained in the colored composition and the mass B of the mass polymerizable compound of the resin contained in the colored composition is 0.4-3. 0.0 is preferable, 0.4 to 0.9 is more preferable, and 0.4 to 0.8 is still more preferable. According to this aspect, the curability of the coloring composition applied in the form of a film can be made substantially uniform on the film surface and inside the film, and the generation of wrinkles can be more effectively suppressed.
  • the resin include the dispersion resins described above and alkali-soluble resins described below. Hereinafter, the alkali-soluble resin will be described.
  • the coloring composition of this invention can contain alkali-soluble resin as resin. By containing an alkali-soluble resin, developability and pattern formation are improved.
  • the molecular weight of the alkali-soluble resin is not particularly defined, but the weight average molecular weight (Mw) is preferably from 5000 to 100,000.
  • the number average molecular weight (Mn) is preferably 1000 to 20,000.
  • the alkali-soluble resin may be a linear organic polymer, and has at least one alkali-soluble polymer in a molecule (preferably a molecule having an acrylic copolymer or a styrene copolymer as a main chain). It can be suitably selected from alkali-soluble resins having groups to promote.
  • the alkali-soluble resin is preferably a polyhydroxystyrene resin, a polysiloxane resin, an acrylic resin, an acrylamide resin, or an acrylic / acrylamide copolymer resin from the viewpoint of heat resistance.
  • Acrylic resins, acrylamide resins, and acrylic / acrylamide copolymer resins are preferred.
  • Examples of the group that promotes alkali solubility include a carboxyl group, a phosphoric acid group, a sulfonic acid group, and a phenolic hydroxyl group. What can be developed is preferable, and (meth) acrylic acid is particularly preferable. These acid groups may be used alone or in combination of two or more.
  • a known radical polymerization method can be applied.
  • Polymerization conditions such as temperature, pressure, type and amount of radical initiator, type of solvent, etc. when producing an alkali-soluble resin by radical polymerization can be easily set by those skilled in the art, and experimental conditions are determined. It can also be done.
  • the alkali-soluble resin a polymer having a carboxylic acid in the side chain is preferable, and a methacrylic acid copolymer, an acrylic acid copolymer, an itaconic acid copolymer, a crotonic acid copolymer, a maleic acid copolymer, and a partial esterification are used.
  • a methacrylic acid copolymer, an acrylic acid copolymer, an itaconic acid copolymer, a crotonic acid copolymer, a maleic acid copolymer, and a partial esterification are used.
  • examples thereof include maleic acid copolymers, alkali-soluble phenol resins such as novolak type resins, acidic cellulose derivatives having a carboxylic acid in the side chain, and polymers having hydroxyl groups added with acid anhydrides.
  • a copolymer of (meth) acrylic acid and another monomer copolymerizable therewith is suitable as the alkali-soluble resin.
  • examples of other monomers copolymerizable with (meth) acrylic acid include alkyl (meth) acrylates, aryl (meth) acrylates, and vinyl compounds.
  • alkyl (meth) acrylate and aryl (meth) acrylate methyl (meth) acrylate, ethyl (meth) acrylate, propyl (meth) acrylate, butyl (meth) acrylate, isobutyl (meth) acrylate, pentyl (meth) acrylate,
  • vinyl compounds such as hexyl (meth) acrylate, octyl (meth) acrylate, phenyl (meth) acrylate, benzyl (meth) acrylate, tolyl (meth) acrylate, naphthyl (meth) acrylate, cyclohexyl (meth) acrylate, styrene, ⁇ -methylstyrene, vinyltoluene, glycidyl methacrylate, acrylonitrile, vinyl acetate, N-vinylpyrrolidone, tetrahydrofurfury
  • the alkali-soluble phenol resin can be suitably used when the colored composition of the present invention is a positive composition.
  • the alkali-soluble phenol resin include novolak resins and vinyl polymers.
  • the novolak resin include those obtained by condensing phenols and aldehydes in the presence of an acid catalyst.
  • the phenols include phenol, cresol, ethylphenol, butylphenol, xylenol, phenylphenol, catechol, resorcinol, pyrogallol, naphthol, and bisphenol A.
  • aldehydes examples include formaldehyde, paraformaldehyde, acetaldehyde, propionaldehyde, benzaldehyde, and the like. Phenols and aldehydes can be used alone or in combination of two or more.
  • Specific examples of the novolak resin include, for example, a condensation product of metacresol, paracresol, or a mixture thereof and formalin.
  • the molecular weight distribution of the novolak resin may be adjusted using a means such as fractionation.
  • an alkali-soluble resin having a polymerizable group may be used.
  • the polymerizable group include an allyl group, a methallyl group, and a (meth) acryloyl group.
  • an alkali-soluble resin having a polymerizable group an alkali-soluble resin containing a polymerizable group in a side chain is useful.
  • the alkali-soluble resin containing a polymerizable group is prepared by reacting an isocyanate group and a hydroxyl group in advance, leaving one unreacted isocyanate group and containing a polymerizable group such as a (meth) acryloyl group, and a carboxyl group.
  • alkali-soluble resin containing a polymerizable group examples include NR series (manufactured by Mitsubishi Rayon Co., Ltd.), Photomer 6173 (produced by COOH containing polyurethane acrylic oligomer. 106 (all manufactured by Osaka Organic Chemical Industry Co., Ltd.), Cyclomer P series, Plaxel CF200 series (all manufactured by Daicel Chemical Industries, Ltd.), Ebecryl 3800 (manufactured by Daicel UC Corporation) and the like.
  • Alkali-soluble resins include benzyl (meth) acrylate / (meth) acrylic acid copolymer, benzyl (meth) acrylate / (meth) acrylic acid / 2-hydroxyethyl (meth) acrylate copolymer, benzyl (meth) acrylate / Multi-component copolymers composed of (meth) acrylic acid / other monomers can be preferably used.
  • the alkali-soluble resin is a compound represented by the following general formula (ED) and / or a compound represented by the following general formula (ED2) (hereinafter, these compounds may be referred to as “ether dimers”).
  • ED general formula
  • ether dimers a compound represented by the following general formula (ED2)
  • R 1 and R 2 each independently represent a hydrogen atom or a hydrocarbon group having 1 to 25 carbon atoms which may have a substituent.
  • R represents a hydrogen atom or an organic group having 1 to 30 carbon atoms.
  • ED2 the description in JP 2010-168539 A can be referred to.
  • the hydrocarbon group represented by R 1 and R 2 is preferably a hydrocarbon group having 1 to 25 carbon atoms.
  • the hydrocarbon group may have a substituent.
  • the hydrocarbon group is not particularly limited. For example, straight chain such as methyl, ethyl, n-propyl, isopropyl, n-butyl, isobutyl, t-butyl, t-amyl, stearyl, lauryl, 2-ethylhexyl, etc.
  • An aryl group such as phenyl; an alicyclic group such as cyclohexyl, t-butylcyclohexyl, dicyclopentadienyl, tricyclodecanyl, isobornyl, adamantyl, 2-methyl-2-adamantyl; And alkyl groups substituted with alkoxy such as 1-methoxyethyl and 1-ethoxyethyl; alkyl groups substituted with aryl groups such as benzyl; and the like.
  • an acid such as methyl, ethyl, cyclohexyl, benzyl or the like, or a primary or secondary carbon hydrocarbon group which is difficult to be removed by heat is preferable from the viewpoint of heat resistance.
  • ether dimers include, for example, dimethyl-2,2 ′-[oxybis (methylene)] bis-2-propenoate, diethyl-2,2 ′-[oxybis (methylene)] bis-2-propenoate, di ( n-propyl) -2,2 ′-[oxybis (methylene)] bis-2-propenoate, di (isopropyl) -2,2 ′-[oxybis (methylene)] bis-2-propenoate, di (n-butyl) -2,2 '-[oxybis (methylene)] bis-2-propenoate, di (isobutyl) -2,2'-[oxybis (methylene)] bis-2-propenoate, di (t-butyl) -2,2 '-[Oxybis (methylene)] bis-2-propenoate, di (t-amyl) -2,2'-[oxybis (methylene)] bis-2-propenoe Di (stearyl)
  • dimethyl-2,2 ′-[oxybis (methylene)] bis-2-propenoate, diethyl-2,2 ′-[oxybis (methylene)] bis-2-propenoate, dicyclohexyl-2,2′- [Oxybis (methylene)] bis-2-propenoate and dibenzyl-2,2 ′-[oxybis (methylene)] bis-2-propenoate are preferred.
  • These ether dimers may be only one kind or two or more kinds.
  • the content of the ether dimer in the monomer component is not particularly limited, but is preferably 2 to 60% by mass, more preferably 5 to 55% by mass, and still more preferably 5 to 50% by mass.
  • the resin (a) may be a copolymer obtained by copolymerizing other monomers together with the ether dimer.
  • ether dimer dimer examples include, for example, a monomer for introducing an acid group, a monomer for introducing a radical polymerizable double bond, and an epoxy group. Monomers and other copolymerizable monomers other than these may be mentioned. Only 1 type may be used for such a monomer and it may use 2 or more types. With respect to the other monomers described above, for example, the description in JP-A-2004-300204, 0016 to 0022 can be referred to, and these contents are incorporated in this specification.
  • the weight average molecular weight (Mw) of the resin (a) is not particularly limited, but is preferably 5000 to 200000, more preferably from the viewpoint of the viscosity of the colored composition and the heat resistance of the film formed from the colored composition. Is from 5,000 to 100,000, more preferably from 5,000 to 20,000.
  • the acid value is preferably 30 to 500 mgKOH / g, more preferably 50 to 400 mgKOH / g.
  • the resin (a) can be easily obtained by polymerizing a monomer containing an ether dimer. At this time, the cyclization reaction of the ether dimer proceeds simultaneously with the polymerization to form a tetrahydropyran ring structure.
  • combination of resin (a) Although conventionally well-known various polymerization methods can be employ
  • the resin (a) can be synthesized according to the synthesis method of the resin (a) described in JP-A-2004-300204.
  • exemplary compounds of the resin (a) are shown. However, the present invention is not limited to these.
  • the composition ratio of the exemplary compounds shown below is mol%.
  • alkali-soluble resin a resin containing a structural unit derived from an ethylenically unsaturated monomer represented by the following formula (X) can also be used.
  • R 1 represents a hydrogen atom or a methyl group
  • R 2 represents an alkylene group having 2 to 10 carbon atoms
  • R 3 represents a hydrogen atom or a benzene ring which may contain a benzene ring.
  • n represents an integer of 1 to 15.
  • the alkylene group of R 2 preferably has 2 to 3 carbon atoms.
  • the carbon number of the alkyl group of R 3 is preferably 1-10.
  • the alkyl group of R 3 may contain a benzene ring.
  • Examples of the alkyl group containing a benzene ring represented by R 3 include a benzyl group and a 2-phenyl (iso) propyl group.
  • Specific examples of the resin containing a structural unit derived from the ethylenically unsaturated monomer represented by the above formula (X) include resins described in JP2012-247591A and JP2013-24934A Etc.
  • the acid value of the alkali-soluble resin is preferably 30 to 500 mgKOH / g.
  • the lower limit is preferably 50 mgKOH / g or more, and more preferably 70 mgKOH / g or more.
  • the upper limit is preferably 400 mgKOH / g or less, more preferably 200 mgKOH / g or less, still more preferably 150 mgKOH / g or less, and most preferably 120 mgKOH / g or less.
  • the content of the alkali-soluble resin is preferably 10 to 80% by mass, more preferably 20 to 70% by mass, and still more preferably 30 to 60% by mass with respect to the total solid content of the coloring composition.
  • the coloring composition of the present invention preferably contains a photopolymerization initiator.
  • the photopolymerization initiator is not particularly limited as long as it has the ability to initiate polymerization of a polymerizable compound, and can be appropriately selected from known photopolymerization initiators. For example, those having photosensitivity to visible light from the ultraviolet region are preferable. Further, it may be a photopolymerization initiator that generates an active radical by causing some action with a photoexcited sensitizer, and is a photopolymerization initiator that initiates cationic polymerization according to the type of polymerizable compound. May be.
  • photopolymerization initiator examples include halogenated hydrocarbon derivatives (for example, those having a triazine skeleton, those having an oxadiazole skeleton, etc.), acylphosphine compounds such as acylphosphine oxide, hexaarylbiimidazole, and oxime derivatives.
  • halogenated hydrocarbon derivatives for example, those having a triazine skeleton, those having an oxadiazole skeleton, etc.
  • acylphosphine compounds such as acylphosphine oxide, hexaarylbiimidazole, and oxime derivatives.
  • Oxime compounds such as organic peroxides, thio compounds, ketone compounds (eg, benzophenone, 2-methylbenzophenone, 4,4′-bis (diethylamino) benzophenone, 2-methyl-1- [4- (methylthio) phenyl] -2-morpholino-1-propanone, benzoin, benzoin methyl ether, acridone, N-methylacridone, 2-benzyl-dimethylamino-1- (4-morpholinophenyl) -1-butanone), aromatic onium salts, Ketoxime ether, Mino acetophenone compounds, such as hydroxy acetophenone. Among these, oxime compounds are preferable.
  • halogenated hydrocarbon compounds having a triazine skeleton examples include those described in Wakabayashi et al., Bull. Chem. Soc. Japan, 42, 2924 (1969), a compound described in British Patent No. 1388492, a compound described in JP-A-53-133428, a compound described in German Patent No. 3337024, F.I. C. J. Schaefer et al. Org. Chem. 29, 1527 (1964), compounds described in JP-A-62-258241, compounds described in JP-A-5-281728, compounds described in JP-A-5-34920, US Pat. No. 4,221,976 Examples thereof include compounds described in the specification (for example, compounds having an oxadiazole skeleton).
  • photopolymerization initiators other than those mentioned above, polyhalogen compounds (for example, 9-phenylacridine, 1,7-bis (9,9′-acridinyl) heptane, etc.), N-phenylglycine, etc.
  • polyhalogen compounds for example, 9-phenylacridine, 1,7-bis (9,9′-acridinyl) heptane, etc.
  • N-phenylglycine etc.
  • acylphosphine oxides for example, bis (2,4 , 6-Trimethylbenzoyl) -phenylphos Zinc oxide, bis (2,6-dimethoxybenzoyl) -2,4,4-trimethyl-pentylphenylphosphine oxide, Lucirin TPO, etc.
  • metallocenes for example, bis ( ⁇ 5-2,4-cyclopentadien-1-yl)- Bis (2,6-difluoro-3- (1H-pyrrol-1-yl) -phenyl) titanium, ⁇ 5-cyclopentadienyl- ⁇ 6-cumenyl-iron (1 +)-hexafluorophosphate (1-), etc.
  • Examples thereof include compounds described in JP-A-53-133428, JP-B-57-1819, JP-A-57-60
  • hydroxyacetophenone compounds As the photopolymerization initiator, hydroxyacetophenone compounds, aminoacetophenone compounds, and acylphosphine compounds can also be suitably used. More specifically, for example, aminoacetophenone initiators described in JP-A-10-291969 and acylphosphine oxide initiators described in Japanese Patent No. 4225898 can also be used.
  • hydroxyacetophenone-based initiator IRGACURE-184, DAROCUR-1173, IRGACURE-500, IRGACURE-2959, IRGACURE-127 (trade names: all manufactured by BASF) can be used.
  • aminoacetophenone-based initiator commercially available products IRGACURE-907, IRGACURE-369, and IRGACURE-379 (trade names: all manufactured by BASF) can be used.
  • aminoacetophenone-based initiator compounds described in JP-A-2009-191179 whose absorption wavelength is matched with a long wave light source of 365 nm or 405 nm can also be used.
  • acylphosphine initiator commercially available products such as IRGACURE-819 and DAROCUR-TPO (trade names: both manufactured by BASF) can be used.
  • the photopolymerization initiator include oxime compounds.
  • the coloring composition contains an oxime compound as a photopolymerization initiator
  • the pattern property dependency on the time from application of the coloring composition to exposure (hereinafter simply referred to as “PCD dependency”). Is also good).
  • Specific examples of the oxime compound include compounds described in JP-A No. 2001-233842, compounds described in JP-A No. 2000-80068, and compounds described in JP-A No. 2006-342166.
  • Examples of the oxime compound suitably used as the photopolymerization initiator include 3-benzoyloxyiminobutan-2-one, 3-acetoxyiminobutan-2-one, 3-propionyloxyiminobutan-2-one, 2 -Acetoxyiminopentan-3-one, 2-acetoxyimino-1-phenylpropan-1-one, 2-benzoyloxyimino-1-phenylpropan-1-one, 3- (4-toluenesulfonyloxy) iminobutane- Examples include 2-one and 2-ethoxycarbonyloxyimino-1-phenylpropan-1-one.
  • oxime compounds include J.M. C. S. Perkin II (1979) pp. 1653-1660), J.M. C. S. Perkin II (1979) pp. 156-162, Journal of Photopolymer Science and Technology (1995) pp. 202-232, compounds described in JP-A No. 2000-66385, compounds described in JP-A Nos. 2000-80068, JP-T 2004-534797, JP-A No. 2006-342166, and the like.
  • IRGACURE OXE-01 manufactured by BASF
  • IRGACURE OXE-02 manufactured by BASF
  • TRONLY TR-PBG-304 TRONLY TR-PBG-309
  • TRONLY TR-PBG-305 Changzhou Power Electronics New Materials Limited
  • a company manufactured by CHANGZHOU TRONLY NEW ELECTRONIC MATERIALS CO., LTD
  • Adeka Arkles NCI-831 Adeka Arkles NCI-930 (Adeka) are also preferably used.
  • oxime compounds other than those described above compounds described in JP-A-2009-519904 in which oxime is linked to the N-position of carbazole, compounds described in US Pat. No. 7,626,957 in which a hetero substituent is introduced into the benzophenone moiety, A compound described in Japanese Patent Application Laid-Open No. 2010-15025 and US Patent Publication No. 2009-292039 in which a nitro group is introduced at the dye moiety, a ketoxime compound described in International Patent Publication No. 2009-131189, the triazine skeleton and the oxime skeleton are the same A compound described in US Pat. No.
  • the oxime compound is preferably a compound represented by the following general formula (OX-1).
  • the oxime N—O bond may be an (E) oxime compound, a (Z) oxime compound, or a mixture of (E) and (Z) isomers. .
  • R and B each independently represent a monovalent substituent
  • A represents a divalent organic group
  • Ar represents an aryl group.
  • the monovalent substituent represented by R is preferably a monovalent nonmetallic atomic group.
  • the monovalent nonmetallic atomic group include an alkyl group, an aryl group, an acyl group, an alkoxycarbonyl group, an aryloxycarbonyl group, a heterocyclic group, an alkylthiocarbonyl group, and an arylthiocarbonyl group. These groups may have one or more substituents.
  • the substituent examples include a halogen atom, an aryloxy group, an alkoxycarbonyl group or an aryloxycarbonyl group, an acyloxy group, an acyl group, an alkyl group, and an aryl group.
  • the monovalent substituent represented by B is preferably an aryl group, a heterocyclic group, an arylcarbonyl group, or a heterocyclic carbonyl group. These groups may have one or more substituents. Examples of the substituent include the above-described substituents.
  • the divalent organic group represented by A is preferably an alkylene group having 1 to 12 carbon atoms, a cycloalkylene group, or an alkynylene group. These groups may have one or more substituents. Examples of the substituent include the above-described substituents.
  • oxime compounds that can be suitably used are shown below, but the present invention is not limited thereto.
  • the oxime compound has an absorption maximum wavelength in a wavelength region of 350 nm to 500 nm, preferably has an absorption wavelength in a wavelength region of 360 nm to 480 nm, and particularly preferably has a high absorbance at 365 nm and 455 nm.
  • the molar extinction coefficient at 365 nm or 405 nm of the oxime compound is preferably from 1,000 to 300,000, more preferably from 2,000 to 300,000, more preferably from 5,000 to 200, from the viewpoint of sensitivity. Is particularly preferred.
  • a known method can be used for the molar extinction coefficient of the compound. Specifically, for example, it is preferable to measure at a concentration of 0.01 g / L using ethyl acetate in an ultraviolet-visible spectrophotometer (Carry-5 spctrophotometer manufactured by Varian).
  • the content of the photopolymerization initiator is preferably 0.1 to 20% by mass, more preferably 0.5 to 10% by mass, and particularly preferably 1 to 8% by mass with respect to the total solid content of the coloring composition. Within this range, good sensitivity and pattern formability can be obtained.
  • a photoinitiator may use only 1 type and may use it in combination of 2 or more type. When using 2 or more types in combination, the total content is preferably in the above range.
  • the coloring composition of the present invention can contain an ultraviolet absorber.
  • the ultraviolet absorber is preferably a compound having an extinction coefficient per 1 g at a wavelength of 365 nm of more than 100 and an extinction coefficient per 1 g at a wavelength of 400 nm or more. If the extinction coefficient per gram at a wavelength of 365 nm exceeds 100, an excellent ultraviolet absorption effect can be obtained even with a small amount. In addition, if the extinction coefficient per gram at a wavelength of 400 nm or more is 10 or less, the influence on device spectroscopy in the visible region can be reduced.
  • the extinction coefficient is a value measured with an ultraviolet-visible spectrophotometer (Varian, Carry-5 spectrophotometer) at a concentration of 0.01 g / L using ethyl acetate.
  • the ultraviolet absorber a compound represented by the following general formula (I) which is a conjugated diene compound is preferable.
  • this conjugated diene compound is used, fluctuations in development performance after exposure, especially when low-illuminance exposure is performed, can be suppressed, and exposure illuminance dependence related to pattern formability such as pattern line width, film thickness, and spectral spectrum can be reduced. It can suppress more effectively.
  • R 1 and R 2 each independently represent a hydrogen atom, an alkyl group having 1 to 20 carbon atoms, or an aryl group having 6 to 20 carbon atoms, and R 1 and R 2 May be the same as or different from each other. However, R 1 and R 2 do not represent a hydrogen atom at the same time.
  • R 3 and R 4 represent an electron withdrawing group.
  • the electron-withdrawing group is preferably an electron-withdrawing group having a Hammett's substituent constant ⁇ p value (hereinafter simply referred to as “ ⁇ p value”) of 0.20 or more and 1.0 or less, and the ⁇ p value is 0.30.
  • ⁇ p value Hammett's substituent constant
  • Hammett's rule was found in 1935 by L. L. in order to quantitatively discuss the effect of substituents on the reaction or equilibrium of benzene derivatives.
  • Substituent constants obtained by Hammett's rule include a ⁇ p value and a ⁇ m value, and these values are described in many general books.
  • R 3 is preferably a group selected from a cyano group, —COOR 5 , —CONHR 5 , —COR 5 , and —SO 2 R 5 .
  • R 4 is preferably a group selected from a cyano group, —COOR 6 , —CONHR 6 , —COR 6 , and —SO 2 R 6 .
  • R 5 and R 6 each independently represents an alkyl group having 1 to 20 carbon atoms or an aryl group having 6 to 20 carbon atoms.
  • R 3 and R 4 may combine with each other to form a ring.
  • At least one of R 1 , R 2 , R 3 , and R 4 may be in the form of a polymer derived from a monomer bonded to a vinyl group via a linking group. Moreover, the copolymer with another monomer may be sufficient.
  • the colored composition of the present invention may or may not contain an ultraviolet absorber, but when it is contained, the content of the ultraviolet absorber is 0.01 to from the total solid content of the colored composition of the present invention. 10% by mass is preferable and 0.01 to 5% by mass is more preferable. If the content of the ultraviolet absorber is in the above range, the sensitivity is good, and furthermore, a fine pattern shape (in particular, a rectangle) can be finely formed. Only one type of ultraviolet absorber may be used, or two or more types may be used in combination. When using 2 or more types in combination, the total content is preferably in the above range.
  • the ratio (D / B) between the mass (D) of the photopolymerization initiator and the mass (B) of the ultraviolet absorber is 0. .25 to 1.25 is preferable, 0.3 to 1.1 is more preferable, and a range of 0.4 to 1.0 is particularly preferable. If the above-mentioned ratio is within the above range, the sensitivity is good, and furthermore, a fine pattern shape (in particular, a rectangle) can be finely formed.
  • the coloring composition of the present invention can contain an organic solvent.
  • the organic solvent is basically not particularly limited as long as the solubility of each component and the coating property of the coloring composition are satisfied, but particularly the solubility of an ultraviolet absorber, an alkali-soluble resin, etc., the coating property of the coloring composition, It is preferable to select in consideration of safety.
  • Examples of the organic solvent include the following.
  • Examples of esters include ethyl acetate, n-butyl acetate, isobutyl acetate, cyclohexyl acetate, amyl formate, isoamyl acetate, isobutyl acetate, butyl propionate, isopropyl butyrate, ethyl butyrate, butyl butyrate, methyl lactate, ethyl lactate, oxy Alkyl acetates (eg, methyl oxyacetate, ethyl oxyacetate, butyl oxyacetate (eg, methyl methoxyacetate, ethyl methoxyacetate, butyl methoxyacetate, methyl ethoxyacetate, ethyl ethoxyacetate)), 3-oxypropionic acid alkyl esters (For example, methyl 3-oxypropionate, ethyl 3-oxypropionate, etc.
  • 2-oxypropionic acid alkyl esters eg, methyl 2-oxypropionate, ethyl 2-oxypropionate, propyl 2-oxypropionate, etc.
  • diethylene glycol dimethyl ether tetrahydrofuran
  • ethylene glycol monomethyl ether ethylene glycol monoethyl ether, methyl cellosolve acetate, ethyl cellosolve acetate
  • diethylene glycol monomethyl ether diethylene glycol monoethyl ether, diethylene glycol monobutyl ether
  • propylene glycol monomethyl ether propylene glycol monomethyl Ether acetate, propylene glycol monoethyl ether acetate, propylene glycol monopropyl ether acetate, etc.
  • ketones such as methyl ethyl ketone, cyclopentanone, cyclohexanone, 2-heptanone, 3-heptanone, and aromatic hydrocarbons
  • Preferred examples include toluene and xylene.
  • An organic solvent may be used individually by 1 type, and may be used in combination of 2 or more type.
  • organic solvents particularly preferred are methyl 3-ethoxypropionate, ethyl 3-ethoxypropionate, ethyl cellosolve acetate, ethyl lactate, diethylene glycol dimethyl ether, butyl acetate, methyl 3-methoxypropionate,
  • a mixed solution composed of two or more selected from heptanone, cyclohexanone, ethyl carbitol acetate, butyl carbitol acetate, propylene glycol methyl ether, and propylene glycol methyl ether acetate.
  • the amount of the organic solvent contained in the colored composition is preferably 10 to 90% by mass, more preferably 20 to 80% by mass, and still more preferably 25 to 75% by mass with respect to the total amount of the colored composition.
  • the colored composition of the present invention may contain a sensitizer for the purpose of improving the radical generation efficiency of the photopolymerization initiator and increasing the photosensitive wavelength.
  • the sensitizer include sensitizers having an absorption wavelength in the wavelength region of 300 nm to 450 nm.
  • the sensitizer is preferably one that sensitizes the photopolymerization initiator by an electron transfer mechanism or an energy transfer mechanism.
  • sensitizer examples include polynuclear aromatics such as phenanthrene, anthracene, pyrene, perylene, triphenylene, and 9,10-dialkoxyanthracene, xanthene such as fluorescein, eosin, erythrosine, rhodamine B, and rose bengal.
  • polynuclear aromatics such as phenanthrene, anthracene, pyrene, perylene, triphenylene, and 9,10-dialkoxyanthracene
  • xanthene such as fluorescein, eosin, erythrosine, rhodamine B, and rose bengal.
  • Thioxanthones cyanines, merocyanines, phthalocyanines, thiazines such as thionine, methylene blue and toluidine blue, acridines, anthraquinones, squariums, coumarins, phenothiazines, phenazines, styrylbenzenes, azo compounds , Diphenylmethane, triphenylmethane, distyrylbenzenes, carbazoles, porphyrins, spiro compounds, quinacridone, indigo, styryl, pyrylium compounds, pyromethene compounds, pyrazo Triazole compounds, benzothiazole compounds, barbituric acid derivatives, thiobarbituric acid derivatives, acetophenone, benzophenone, aromatic ketone compounds such as Michler's ketone, and heterocyclic compounds such as N- aryl oxazolidinone and the like.
  • the content of the sensitizer in the coloring composition is preferably 0.1 to 20% by mass in terms of solid content from the viewpoint of light absorption efficiency in the deep part and initiation decomposition efficiency, and preferably 0.5 to 15%.
  • the mass% is more preferable.
  • a sensitizer may be used individually by 1 type and may use 2 or more types together. When using 2 or more types together, it is preferable that a total amount is the said range.
  • Chain transfer agent Depending on the photopolymerization initiator used, it is preferable to add a chain transfer agent to the colored composition of the present invention.
  • chain transfer agents include N, N-dialkylaminobenzoic acid alkyl esters and thiol compounds.
  • thiol compounds include 2-mercaptobenzothiazole, 2-mercapto-1-phenylbenzimidazole, and 3-mercaptopropion.
  • An acid etc. can be used individually or in mixture of 2 or more types.
  • the colored composition in the present invention may contain a polymerization inhibitor in order to prevent unnecessary thermal polymerization of the polymerizable compound during the production or storage of the colored composition.
  • Polymerization inhibitors include hydroquinone, p-methoxyphenol, di-t-butyl-p-cresol, pyrogallol, t-butylcatechol, benzoquinone, 4,4′-thiobis (3-methyl-6-t-butylphenol), 2,2′-methylenebis (4-methyl-6-t-butylphenol), N-nitrosophenylhydroxyamine primary cerium salt and the like. Of these, p-methoxyphenol is preferred.
  • the addition amount of the polymerization inhibitor is preferably 0.01 to 5% by mass relative to the mass of the colored composition.
  • the coloring composition of the present invention may contain a substrate adhesion agent for the purpose of improving the substrate adhesion.
  • a substrate adhesion agent it is preferable to use a silane coupling agent, a titanate coupling agent, or an aluminum coupling agent.
  • silane coupling agents include ⁇ -methacryloxypropyltrimethoxysilane, ⁇ -methacryloxypropyltriethoxysilane, ⁇ -acryloxypropyltrimethoxysilane, ⁇ -acryloxypropyltriethoxysilane, and ⁇ -mercaptopropyl.
  • Examples include trimethoxysilane, ⁇ -aminopropyltriethoxysilane, and phenyltrimethoxysilane.
  • ⁇ -methacryloxypropyltrimethoxysilane is preferable as the substrate adhesive.
  • the content of the substrate adhesion agent is from 0.1 to 30 masses based on the total solid content of the colored composition from the viewpoint of leaving no residue in the unexposed areas when the colored composition is exposed and developed. %, More preferably 0.5 to 20% by mass, and particularly preferably 1 to 10% by mass.
  • the colored composition of the present invention may contain various surfactants from the viewpoint of further improving applicability.
  • various surfactants such as a fluorine-based surfactant, a nonionic surfactant, a cationic surfactant, an anionic surfactant, and a silicone-based surfactant can be used.
  • the liquid properties (particularly fluidity) when prepared as a coating liquid are further improved, and the uniformity of coating thickness and liquid-saving properties are further improved. can do. That is, when a film is formed using a coating liquid to which a coloring composition containing a fluorosurfactant is applied, the interfacial tension between the surface to be coated and the coating liquid is reduced, and the wettability to the surface to be coated is reduced. Is improved, and the coating property to the coated surface is improved. Therefore, it is possible to more suitably form a film having a uniform thickness with small thickness unevenness.
  • the fluorine-containing surfactant preferably has a fluorine content of 3 to 40% by mass, more preferably 5 to 30% by mass, and still more preferably 7 to 25% by mass.
  • a fluorine-based surfactant having a fluorine content within this range is effective in terms of uniformity of coating film thickness and liquid-saving properties, and has good solubility in the composition.
  • fluorosurfactant examples include Megafac F171, F172, F173, F176, F176, F177, F141, F142, F143, F144, R30, F437, F475, F479, F482, F554, F780, F780, F781 (above DIC Corporation), Florard FC430, FC431, FC171 (above, Sumitomo 3M Limited), Surflon S-382, SC-101, SC-103, SC-104, SC-105, SC1068, SC-381, SC-383, S393, KH-40 (above, manufactured by Asahi Glass Co., Ltd.) and the like.
  • nonionic surfactants include glycerol, trimethylolpropane, trimethylolethane, and ethoxylates and propoxylates thereof (for example, glycerol propoxylate, glycerin ethoxylate, etc.), polyoxyethylene lauryl ether, polyoxyethylene Stearyl ether, polyoxyethylene oleyl ether, polyoxyethylene octylphenyl ether, polyoxyethylene nonylphenyl ether, polyethylene glycol dilaurate, polyethylene glycol distearate, sorbitan fatty acid ester (Pluronic L10, L31, L61, L62 manufactured by BASF, 10R5, 17R2, 25R2, Tetronic 304, 701, 704, 901, 904, 150R1, Sparse 20000 (manufactured by Nippon Lubrizol Corporation), and the like.
  • cationic surfactant examples include phthalocyanine derivatives (trade name: EFKA-745, manufactured by Morishita Sangyo Co., Ltd.), organosiloxane polymer KP341 (manufactured by Shin-Etsu Chemical Co., Ltd.), (meth) acrylic acid ( Co) polymer polyflow no. 75, no. 90, no. 95 (manufactured by Kyoeisha Chemical Co., Ltd.) and W001 (manufactured by Yusho Co., Ltd.).
  • phthalocyanine derivatives trade name: EFKA-745, manufactured by Morishita Sangyo Co., Ltd.
  • organosiloxane polymer KP341 manufactured by Shin-Etsu Chemical Co., Ltd.
  • (meth) acrylic acid ( Co) polymer polyflow no. 75, no. 90, no. 95 manufactured by Kyoeisha Chemical Co., Ltd.
  • W001 manufactured by Yusho Co., Ltd.
  • anionic surfactants include W004, W005, W017 (manufactured by Yusho Co., Ltd.) and the like.
  • silicone-based surfactants include Torre Silicone DC3PA, Torre Silicone SH7PA, Torre Silicone DC11PA, Torresilicone SH21PA, Torree Silicone SH28PA, Torree Silicone SH29PA, Torree Silicone SH30PA, Torree Silicone SH8400 (above, Toray Dow Corning Co., Ltd.) )), TSF-4440, TSF-4300, TSF-4445, TSF-4460, TSF-4442 (above, manufactured by Momentive Performance Materials), KP341, KF6001, KF6002 (above, manufactured by Shin-Etsu Silicone Co., Ltd.) , BYK307, BYK323, BYK330 (above, manufactured by BYK Chemie) and the like.
  • the content of the surfactant is preferably 0.001 to 2.0% by mass, more preferably 0.005 to 1.0% by mass, based on the total mass of the composition.
  • the coloring composition comprises a thermal polymerization initiator, a thermal polymerization component, an epoxy compound, a plasticizer such as dioctyl phthalate, a developability improver such as a low molecular weight organic carboxylic acid, other fillers, and an antioxidant.
  • a plasticizer such as dioctyl phthalate
  • a developability improver such as a low molecular weight organic carboxylic acid
  • other fillers such as a low molecular weight organic carboxylic acid
  • an antioxidant such as an agent and an anti-aggregation agent can be contained.
  • the coloring composition of this invention can be prepared by mixing each component mentioned above.
  • the components constituting the colored composition may be blended together, or may be sequentially blended after each component is dissolved and dispersed in a solvent.
  • a colored composition may be prepared by dissolving and dispersing all components in a solvent at the same time. If necessary, each component may be suitably used as two or more solutions / dispersions at the time of use (application). May be mixed to prepare a composition.
  • any filter can be used without any particular limitation as long as it is a filter that has been used for filtration.
  • filter materials include: fluorine resins such as polytetrafluoroethylene (PTFE); polyamide resins such as nylon-6 and nylon-6, 6; polyolefin resins such as polyethylene and polypropylene (PP) (high density, super Including high molecular weight); Among these materials, polypropylene (including high density polypropylene) is preferable.
  • the pore size of the filter is not particularly limited, but is preferably 0.01 to 7.0 ⁇ m, more preferably 0.01 to 2.5 ⁇ m, and still more preferably 0.01 to 2.0 ⁇ m.
  • the pore size of the filter can refer to the nominal value of the filter manufacturer.
  • a commercially available filter for example, it can be selected from various filters provided by Nippon Pole Co., Ltd., Advantech Toyo Co., Ltd., Japan Entegris Co., Ltd. (formerly Japan Microlith Co., Ltd.) or KITZ Micro Filter Co., Ltd. .
  • filter filtration two or more types of filters may be used in combination. For example, filtration can be performed first using a first filter, and then using a second filter having a hole diameter different from that of the first filter. At that time, the filtering by the first filter and the filtering by the second filter may be performed only once or twice or more, respectively.
  • a filter formed of the same material as the first filter described above can be used.
  • the colored composition of the present invention has a viscosity at 25 ° C. of preferably 1 to 200 mPa ⁇ s, more preferably 50 to 200 mPa ⁇ s, and particularly preferably 100 to 150 mPa ⁇ s.
  • the colored composition is preferably 1 to 50 mPa ⁇ s, more preferably 1 to 20 mPa ⁇ s, and more preferably 1 to 15 mPa ⁇ s. Is particularly preferred.
  • the coloring composition is preferably 50 to 200 mPa ⁇ s, more preferably 50 to 150 mPa ⁇ s, and particularly preferably 100 to 150 mPa ⁇ s. preferable.
  • the viscosity can be measured, for example, using a viscometer RE85L (rotor: 1 ° 34 ′ ⁇ R24 measurement range 0.6 to 1200 mPa ⁇ s) manufactured by Toki Sangyo Co., Ltd., with the temperature adjusted to 25 ° C. .
  • the colored composition of the present invention has a light transmittance in the thickness direction of a film when a film having a thickness of 12.0 ⁇ m after drying is formed, and has a maximum transmittance in a wavelength range of 400 to 780 nm.
  • the value is preferably 15% or less
  • the transmittance at a wavelength 850 is preferably 80% or more.
  • the maximum value of transmittance in the wavelength range of 400 to 780 nm is preferably 15% or less, more preferably 10% or less, and particularly preferably 5% or less.
  • the transmittance at a wavelength of 850 nm is preferably 80% or more, more preferably 85% or more, and particularly preferably 90% or more.
  • the minimum transmittance in the wavelength range of 850 to 1300 nm is preferably 80% or more, more preferably 85% or more, and particularly preferably 90% or more.
  • the film of the present invention is formed by curing the above-described colored composition of the present invention.
  • a film is preferably used for a color filter.
  • the maximum value of light transmittance in the film thickness direction is 15% or less in the wavelength range of 400 to 780 nm, and the minimum value in the wavelength range of 850 to 1300 nm is 80% or more. preferable. By having such spectral characteristics, it is possible to obtain a film that can transmit near-infrared rays with less visible light-derived noise.
  • Spectral characteristics of the film of the present invention are as follows: a transmittance in a wavelength range of 300 to 1300 nm using a spectrophotometer (ref. Glass substrate) of an ultraviolet-visible near-infrared spectrophotometer (U-4100 manufactured by Hitachi High-Technologies Corporation). Is a measured value.
  • the thickness of the film of the present invention is not particularly limited, but is preferably 0.1 to 20 ⁇ m, more preferably 0.5 to 15 ⁇ m, and particularly preferably 3 to 15 ⁇ m.
  • the film having the above spectral characteristics tended to generate wrinkles on the film surface as the film thickness increased. However, according to the present invention, the generation of wrinkles can be suppressed even when the film thickness is large. When the value is large, the effect of the present invention is remarkably obtained.
  • the pattern forming method of the present invention includes a step of applying a colored composition on a support to form a colored composition layer, a step of exposing the colored composition layer in a pattern, and developing and removing an unexposed portion. Forming a colored pattern.
  • a pattern forming method is used for manufacturing a colored layer of a color filter. That is, the present invention also discloses a method for manufacturing a color filter including the pattern forming method of the present invention.
  • color filter for solid-state image sensors
  • this invention is not limited to this method.
  • the color filter for the solid-state imaging device may be simply referred to as “color filter”.
  • the colored composition layer is formed by applying the colored composition of the present invention on the support.
  • a substrate for a solid-state imaging device in which an imaging device (light receiving device) such as a CCD or CMOS is provided on a substrate (for example, a silicon substrate), a silicon substrate, a non-alkali glass substrate, a soda glass substrate, Examples include a Pyrex (registered trademark) glass substrate, a quartz glass substrate, and those obtained by attaching a transparent conductive film thereto. In some cases, a black matrix for isolating each pixel is formed on these substrates. Further, an undercoat layer may be provided on these supports, if necessary, in order to improve adhesion to the upper layer, prevent diffusion of substances, or flatten the substrate surface.
  • various coating methods such as slit coating, ink jet method, spin coating, spin coating, roll coating, and screen printing are applied. Can do.
  • Drying (pre-baking) of the colored composition layer coated on the support can be performed at a temperature of 50 to 140 ° C. for 10 to 300 seconds using a hot plate, oven or the like.
  • the thickness of the colored composition layer after drying is preferably 0.5 to 30 ⁇ m, more preferably 0.60 to 25 ⁇ m, still more preferably 0.70 to 20 ⁇ m, and particularly preferably 0.80 ⁇ m to 15 ⁇ m. preferable.
  • Exposure Step the colored composition layer is subjected to pattern exposure through a mask having a predetermined mask pattern, for example, using an exposure apparatus such as a stepper. Thereby, a cured film is obtained.
  • Radiation (light) that can be used for exposure is preferably ultraviolet rays such as g-line and i-line, and i-line is more preferably used.
  • Irradiation dose (exposure dose) is preferably 30 ⁇ 1500mJ / cm 2, more preferably 50 ⁇ 1000mJ / cm 2, particularly preferably 80 ⁇ 500mJ / cm 2.
  • a development step is performed to elute the uncured portion after exposure into the developer and leave the photocured portion.
  • the development method may be any of a dip method, a shower method, a spray method, a paddle method, etc., and a swing method, a spin method, an ultrasonic method, or the like may be combined with these. Unevenness of development can be prevented by pre-wetting the surface to be developed with water or the like before touching the developer.
  • the developer an organic alkali developer that does not damage the underlying circuit or the like is desirable.
  • the development temperature is preferably 20 to 30 ° C.
  • the development time is preferably 20 to 90 seconds.
  • the developer preferably contains an alkaline agent.
  • the alkaline agent include ammonia water, ethylamine, diethylamine, dimethylethanolamine, tetramethylammonium hydroxide, tetraethylammonium hydroxide, tetrabutylammonium hydroxide, benzyltrimethylammonium hydroxide, choline, pyrrole, piperidine, 1,8.
  • -Organic alkaline compounds such as -diazabicyclo- [5,4,0] -7-undecene, and inorganic compounds such as sodium hydroxide, potassium hydroxide, sodium hydrogen carbonate, potassium hydrogen carbonate and the like.
  • an alkaline aqueous solution obtained by diluting the above-mentioned alkaline agent with pure water so as to be 0.001 to 10% by mass, preferably 0.01 to 1% by mass is preferably used.
  • a developer composed of such an alkaline aqueous solution it is generally preferable that after development, the excess developer is washed and removed by rinsing with pure water, followed by drying.
  • Post-baking is a heat treatment after development for complete curing, and usually a heat curing treatment at 100 ° C. to 270 ° C. is performed.
  • Post-baking can be carried out continuously or batchwise using a heating means such as a hot plate, a convection oven (hot air circulation dryer), a high-frequency heater, etc., so that the film after development is in the above-mentioned condition. .
  • the irradiation time is preferably 10 to 180 seconds, more preferably 30 to 60 seconds.
  • post-exposure is preferably performed first.
  • a color filter is manufactured by performing each process demonstrated above.
  • the color filter may be configured with only the colored pixels exhibiting the specific spectral characteristics of the present invention, or the colored pixels exhibiting the spectral characteristics described above, and red, green, blue, magenta, yellow, cyan, black, and colorless. You may comprise the color filter which has coloring pixels, such as.
  • the colored pixels exhibiting the specific spectral characteristics of the present invention may be provided first or later.
  • the colored composition in the present invention can be easily washed and removed using a known cleaning liquid even when it adheres to, for example, a nozzle of a coating apparatus discharge section, a piping section of a coating apparatus, or the inside of a coating apparatus.
  • the surfactant described above may be added to the cleaning liquid as a surfactant that the coloring composition may contain.
  • the color filter of the present invention can be suitably mounted on a solid-state imaging device such as a CCD image sensor, a CMOS image sensor, an organic CMOS image sensor, or a CIGS image sensor.
  • a solid-state imaging device such as a CCD image sensor, a CMOS image sensor, an organic CMOS image sensor, or a CIGS image sensor.
  • it is suitable to be mounted on a high-resolution solid-state imaging device exceeding 1 million pixels.
  • the color filter of the present invention can be disposed, for example, between a light receiving portion of each pixel constituting a CCD image sensor and a microlens for collecting light.
  • the solid-state imaging device of the present invention includes the above-described color filter of the present invention.
  • the configuration of the solid-state imaging device of the present invention is a configuration provided with the color filter in the present invention, and is not particularly limited as long as it is a configuration that functions as a solid-state imaging device. .
  • the support has a transfer electrode made of a plurality of photodiodes and polysilicon constituting a light receiving area of a solid-state imaging device (CCD image sensor, CMOS image sensor, etc.).
  • a light-shielding film made of tungsten or the like having an opening only in the light-receiving part, and a device protective film made of silicon nitride or the like formed on the light-shielding film so as to cover the entire surface of the light-shielding film and the photodiode light-receiving part.
  • the solid-state image sensor color filter of the present invention is included.
  • a configuration having a light condensing means for example, a microlens, etc., the same applies hereinafter
  • a structure having the light condensing means on the color filter etc. It may be.
  • the infrared sensor of the present invention includes the color filter of the present invention.
  • the configuration of the infrared sensor of the present invention is a configuration provided with the color filter of the present invention and is not particularly limited as long as it is a configuration that functions as an infrared sensor. For example, the following configurations can be given.
  • the substrate there are a plurality of photodiodes that constitute a light receiving area of a solid-state imaging device (CCD sensor, CMOS sensor, organic CMOS sensor, etc.), a transfer electrode made of polysilicon, etc., and a photodiode on the photodiode and the transfer electrode
  • a light-shielding film made of tungsten or the like that is open only in the light-receiving part, and a device protective film made of silicon nitride or the like formed on the light-shielding film so as to cover the entire surface of the light-shielding film and the photodiode light-receiving part.
  • the color filter of the present invention is included.
  • the device protective layer has a condensing means (for example, a microlens etc., the same shall apply hereinafter) on the device protective layer and below the color filter of the present invention (on the side close to the substrate), or condensing on the color filter of the present invention.
  • a condensing means for example, a microlens etc., the same shall apply hereinafter
  • the structure etc. which have a means may be sufficient.
  • the organic CMOS sensor includes a thin panchromatic photosensitive organic photoelectric conversion film as a photoelectric conversion layer and a CMOS signal readout substrate, and the organic material plays a role of capturing light and converting it into an electric signal.
  • This is a two-layer hybrid structure in which an inorganic material plays a role of taking out a signal to the outside.
  • the aperture ratio can be 100% with respect to incident light.
  • the organic photoelectric conversion film is a structure-free continuous film that can be laid on a CMOS signal reading substrate, and therefore does not require an expensive fine processing process and is suitable for pixel miniaturization.
  • reference numeral 110 is a solid-state image sensor.
  • the imaging region provided on the solid-state imaging device 110 has a near infrared absorption filter 111 and a color filter 112.
  • the near-infrared absorption filter 111 transmits light in the visible light region (for example, light having a wavelength of 300 to 700 nm) and light in the infrared region (for example, light having a wavelength of 800 to 1300 nm, preferably light having a wavelength of 900 to 1300 nm, More preferably, it is configured to shield light having a wavelength of 1000 to 1300 nm.
  • the color filter 112 is a color filter in which pixels that transmit and absorb light of a specific wavelength in the visible light region are formed. For example, red (R), green (G), and blue (B) pixels are formed. A color filter or the like is used. A region 114 where the near infrared absorption filter 111 is not formed is provided between the near infrared transmission filter 113 and the solid-state imaging device 110. In the region 114, a resin layer (for example, a transparent resin layer) that can transmit light having a wavelength that has passed through the infrared transmission filter 113 is disposed.
  • a resin layer for example, a transparent resin layer
  • the near-infrared transmission filter 113 is a filter that has visible light shielding properties and transmits infrared rays having a specific wavelength, and is configured by the color filter of the present invention having the above-described spectrum.
  • the near infrared transmission filter 113 preferably blocks light having a wavelength of 400 to 780 nm and transmits light having a wavelength of 850 to 1300 nm.
  • a microlens 115 is disposed on the incident light hv side of the color filter 112 and the near-infrared transmission filter 113.
  • a planarization layer 116 is formed so as to cover the microlens 115. In the embodiment shown in FIG.
  • the resin layer is disposed in the region 114, but the infrared transmission filter 113 may be formed in the region 114. That is, the infrared transmission filter 113 may be formed on the solid-state image sensor 110.
  • the thickness of the color filter 112 and the thickness of the infrared transmission filter 113 are the same, but the thickness of both may be different.
  • the color filter 112 is provided closer to the incident light h ⁇ than the near-infrared absorption filter 111. However, the order of the near-infrared absorption filter 111 and the color filter 112 is changed.
  • the near-infrared absorption filter 111 may be provided on the incident light h ⁇ side with respect to the color filter 112.
  • the near-infrared absorption filter 111 and the color filter 112 are stacked adjacent to each other.
  • both filters are not necessarily adjacent to each other, and another layer is provided between them. May be.
  • this infrared sensor since image information can be captured simultaneously, motion sensing or the like that recognizes a target whose motion is to be detected is possible. Furthermore, since distance information can be acquired, an image including 3D information can be taken.
  • FIG. 2 is a functional block diagram of the imaging apparatus.
  • the imaging device emits infrared light, the lens optical system 1, the solid-state imaging device 10, the signal processing unit 20, the signal switching unit 30, the control unit 40, the signal storage unit 50, the light emission control unit 60, and the like.
  • Infrared LED 70 of the light emitting element and image output units 80 and 81 are provided.
  • the infrared sensor 100 described above can be used as the solid-state imaging device 10.
  • the configuration other than the solid-state imaging device 10 and the lens optical system 1 may be formed entirely or partially on the same semiconductor substrate.
  • paragraphs 0032 to 0036 of JP 2011-233983 A can be referred to, and the contents thereof are incorporated in the present specification.
  • pigment dispersion B-2 A mixed solution having the following composition was mixed and dispersed for 3 hours using a zirconia bead having a diameter of 0.3 mm in a bead mill (high pressure disperser NANO-3000-10 with a pressure reducing mechanism (manufactured by Nippon BEE Co., Ltd.)). Thus, a pigment dispersion B-2 was prepared.
  • pigment dispersion B-5 A mixed solution having the following composition was mixed and dispersed for 3 hours using a zirconia bead having a diameter of 0.3 mm in a bead mill (high pressure disperser NANO-3000-10 with a pressure reducing mechanism (manufactured by Nippon BEE Co., Ltd.)). Thus, a pigment dispersion B-5 was prepared. Yellow pigment (CI Pigment Yellow 139 14.8 parts Dispersion resin 1: BYK manufactured BYK-111 3.0 parts Alkali-soluble resin 2 2.2 parts Organic solvent: Propylene glycol methyl ether acetate (PGMEA ) 80.0 parts
  • pigment dispersion B-6 A mixed solution having the following composition was mixed and dispersed for 3 hours using a zirconia bead having a diameter of 0.3 mm in a bead mill (high pressure disperser NANO-3000-10 with a pressure reducing mechanism (manufactured by Nippon BEE Co., Ltd.)). Thus, a pigment dispersion B-6 was prepared.
  • Dispersion resin 1 BYK-made BYK-111 3.0 parts Alkali-soluble resin 1 2.2 parts
  • Organic solvent Propylene glycol methyl ether acetate ( PGMEA) 80.0 parts [resin] -Dispersing resin 1: trade name; BYK-111 (manufactured by BYK) Dispersing resin 2: the following structure (Mw: 7950) -Dispersing resin 3: the following structure (Mw: 30000) -Alkali-soluble resin 1: the following structure (ratio in repeating units is molar ratio) Alkali-soluble resin 2: the following structure (ratio in repeating units is molar ratio)
  • Example 1 (Preparation of coloring composition) The following components were mixed to prepare the coloring composition of Example 1.
  • -Pigment dispersion B-1 (see Table 1 below for the mass ratio of each pigment) 11.2 parts-Pigment dispersion B-2 (See Table 1 below for the mass ratio of each pigment) 9.1 parts-below 40 mass% PGMEA solution of alkali-soluble resin 1 54.2 parts ⁇
  • the following polymerizable compound 1 13.6 parts ⁇
  • the following photopolymerization initiator 1 2.0 parts ⁇
  • Surfactant 1 Megafac manufactured by DIC Corporation 0.42 part of 10% by mass PGMEA solution of F-781F
  • the following UV absorber 1 0.41 part
  • polymerization inhibitor 0.01 part of p-methoxyphenol
  • organic solvent 1 PGMEA 9.2 parts
  • Example 2-6 Comparative Examples 1-2
  • the pigment dispersion, alkali-soluble resin, polymerizable compound, photopolymerization initiator, surfactant and organic solvent were changed to those shown in Table 2 below and in amounts (parts by mass).
  • Table 1 for the mass ratio of each pigment in the pigment dispersion. Also, in Table 2, it means that those without numerical values are not used.
  • Examples 2 to 6 and Comparative Examples 1 to 2 A colored composition was prepared.
  • Each pigment ratio in Table 1 is the ratio (in terms of mass) of each pigment in the total pigment.
  • alkali-soluble resin 1 is a value (part by mass) in a 40% by mass PGMEA solution.
  • alkali-soluble resin 2 is a value (mass part) in a 40 mass% PGMEA solution.
  • Surfactant 1 is a value (parts by mass) in a 10% by mass PGMEA solution.
  • Alkali-soluble resin 1 following structure (ratio in repeating unit is molar ratio)
  • Alkali-soluble resin 2 the following structure (ratio in repeating units is molar ratio)
  • Photopolymerization initiator 1 structure shown
  • the colored composition is spin-coated on a glass substrate, applied so that the film thickness after post-baking is 12 ⁇ m, dried on a hot plate at 100 ° C. for 120 seconds, dried, and further heated at 200 ° C. Using this, heat treatment (post-bake) was performed for 300 seconds.
  • a substrate having a colored layer is measured using a UV-visible near-infrared spectrophotometer U-4100 (manufactured by Hitachi High-Tech) (ref. Glass substrate), and a minimum absorbance A in a wavelength range of 400 nm to less than 580 nm, a wavelength of 580 nm or more.
  • the coloring composition was applied onto a silicon wafer using a spin coater so that the film thickness after drying was 12 ⁇ m, and heat treatment (prebaking) was performed for 120 seconds using a hot plate at 100 ° C. Then, using an i-line stepper exposure apparatus FPA-3000i5 + (Canon (Ltd.)), 50 mJ / cm 2 up to 50 ⁇ 750mJ / cm 2 using a photomask having a square pixel pattern of 1.4 ⁇ m angle is formed The optimum exposure amount for resolving the square pixel pattern was determined by increasing each time, and exposure was performed at this optimum exposure amount.
  • the silicon wafer on which the exposed coating film is formed is placed on a horizontal rotary table of a spin shower developing machine (DW-30 type, manufactured by Chemitronics), and CD-2060 (Fuji Film Electronics Co., Ltd.). Paddle development was performed at 23 ° C. for 60 seconds using Materials Co., Ltd. to form a colored pattern on the silicon wafer.
  • the silicon wafer on which the colored pattern was formed was rinsed with pure water and then spray-dried.
  • a heat treatment post-bake was performed for 300 seconds using a 200 ° C. hot plate to obtain silicon wafers having colored patterns as color filters of Examples 1 to 6 and Comparative Examples 1 and 2, respectively.
  • the surface of the color filter was measured with an AFM (atomic force microscope), and the surface roughness (Ra) was obtained by calculation.
  • Example 1 to 6 using the colored sensation composition of the present invention, it was possible to form a film capable of transmitting near-infrared rays with less visible light-derived noise and having no wrinkles. .
  • Examples 1 to 6 were excellent in adhesion.
  • Comparative Examples 1 and 2 had many wrinkles on the film surface.
  • lens optical system 10: solid-state imaging device
  • 20 signal processing unit
  • 30 signal switching unit
  • 40 control unit
  • 50 signal storage unit
  • 60 light emission control unit
  • 70 infrared LED
  • 80 81
  • Image output unit 100: Infrared sensor
  • 110 Solid-state imaging device
  • 111 Near-infrared absorption filter
  • 112 Color filter
  • 113 Near-infrared transmission filter
  • 114 Region
  • 115 Micro lens
  • 116 Flattening layer
  • H ⁇ incident light

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Polymers & Plastics (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Organic Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Materials For Photolithography (AREA)
  • Electromagnetism (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Architecture (AREA)
  • Structural Engineering (AREA)
  • Optical Filters (AREA)
  • Polymerisation Methods In General (AREA)
  • Macromonomer-Based Addition Polymer (AREA)
  • Solid State Image Pick-Up Elements (AREA)
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JP2017142372A (ja) * 2016-02-10 2017-08-17 東洋インキＳｃホールディングス株式会社 固体撮像素子向け赤外線透過フィルタ用感光性着色組成物、固体撮像素子向けカラーフィルタ、及び固体撮像素子
WO2018043218A1 (ja) * 2016-08-30 2018-03-08 富士フイルム株式会社 感光性組成物、硬化膜、光学フィルタ、積層体、パターン形成方法、固体撮像素子、画像表示装置および赤外線センサ
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WO2018139186A1 (ja) * 2017-01-25 2018-08-02 富士フイルム株式会社 硬化性組成物、化合物、硬化膜、硬化膜の製造方法、カラーフィルタの製造方法、固体撮像素子、赤外線センサ
WO2018221150A1 (ja) * 2017-06-02 2018-12-06 富士フイルム株式会社 硬化性組成物、膜、近赤外線カットフィルタ、固体撮像素子、画像表示装置および赤外線センサ
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JP2021128313A (ja) * 2020-02-17 2021-09-02 東洋インキＳｃホールディングス株式会社 赤外線透過型着色組成物、赤外線透過フィルタ、赤外線カメラ、および赤外線センサ
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WO2018043218A1 (ja) * 2016-08-30 2018-03-08 富士フイルム株式会社 感光性組成物、硬化膜、光学フィルタ、積層体、パターン形成方法、固体撮像素子、画像表示装置および赤外線センサ
JPWO2018043218A1 (ja) * 2016-08-30 2019-04-25 富士フイルム株式会社 感光性組成物、硬化膜、光学フィルタ、積層体、パターン形成方法、固体撮像素子、画像表示装置および赤外線センサ
JP2018116258A (ja) * 2017-01-16 2018-07-26 東洋インキＳｃホールディングス株式会社 感光性着色組成物、カラーフィルタ用感光性着色組成物、およびカラーフィルタ
JP7167429B2 (ja) 2017-01-16 2022-11-09 東洋インキＳｃホールディングス株式会社 感光性着色組成物、カラーフィルタ用感光性着色組成物、およびカラーフィルタ
WO2018139186A1 (ja) * 2017-01-25 2018-08-02 富士フイルム株式会社 硬化性組成物、化合物、硬化膜、硬化膜の製造方法、カラーフィルタの製造方法、固体撮像素子、赤外線センサ
JPWO2018139186A1 (ja) * 2017-01-25 2019-11-07 富士フイルム株式会社 硬化性組成物、化合物、硬化膜、硬化膜の製造方法、カラーフィルタの製造方法、固体撮像素子、赤外線センサ
CN110291123A (zh) * 2017-01-30 2019-09-27 富士胶片株式会社 组合物、膜、红外线透射滤光片、固体摄像元件、图像显示装置及红外线传感器
JPWO2018221150A1 (ja) * 2017-06-02 2020-03-26 富士フイルム株式会社 硬化性組成物、膜、近赤外線カットフィルタ、固体撮像素子、画像表示装置および赤外線センサ
US11168154B2 (en) 2017-06-02 2021-11-09 Fujifilm Corporation Curable composition, film, near infrared cut filter, solid image pickup element, image display device, and infrared sensor
JP7016356B2 (ja) 2017-06-02 2022-02-04 富士フイルム株式会社 硬化性組成物、膜、近赤外線カットフィルタ、固体撮像素子、画像表示装置および赤外線センサ
WO2018221150A1 (ja) * 2017-06-02 2018-12-06 富士フイルム株式会社 硬化性組成物、膜、近赤外線カットフィルタ、固体撮像素子、画像表示装置および赤外線センサ
JP2021128313A (ja) * 2020-02-17 2021-09-02 東洋インキＳｃホールディングス株式会社 赤外線透過型着色組成物、赤外線透過フィルタ、赤外線カメラ、および赤外線センサ
JP7494481B2 (ja) 2020-02-17 2024-06-04 ａｒｔｉｅｎｃｅ株式会社 赤外線透過型着色組成物、赤外線透過フィルタ、赤外線カメラ、および赤外線センサ
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