WO2015124676A1 - Interferometric sensor - Google Patents

Interferometric sensor Download PDF

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Publication number
WO2015124676A1
WO2015124676A1 PCT/EP2015/053513 EP2015053513W WO2015124676A1 WO 2015124676 A1 WO2015124676 A1 WO 2015124676A1 EP 2015053513 W EP2015053513 W EP 2015053513W WO 2015124676 A1 WO2015124676 A1 WO 2015124676A1
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WIPO (PCT)
Prior art keywords
sensor
waves
phase shift
interference
measure
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PCT/EP2015/053513
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French (fr)
Inventor
Xun GU
Sergio Vincenzo Marchese
Klaus Bohnert
Andreas Frank
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Abb Technology Ag
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Publication date
Application filed by Abb Technology Ag filed Critical Abb Technology Ag
Priority to ES15705315.8T priority Critical patent/ES2662124T3/en
Priority to EP15705315.8A priority patent/EP3108212B1/en
Priority to AU2015220811A priority patent/AU2015220811C1/en
Priority to CN201580009630.8A priority patent/CN105992934B/en
Priority to RU2016137476A priority patent/RU2677126C2/en
Publication of WO2015124676A1 publication Critical patent/WO2015124676A1/en
Priority to US15/243,713 priority patent/US10725073B2/en

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R15/00Details of measuring arrangements of the types provided for in groups G01R17/00 - G01R29/00, G01R33/00 - G01R33/26 or G01R35/00
    • G01R15/14Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks
    • G01R15/24Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks using light-modulating devices
    • G01R15/241Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks using light-modulating devices using electro-optical modulators, e.g. electro-absorption
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/266Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light by interferometric means
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/353Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/353Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre
    • G01D5/35306Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/353Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre
    • G01D5/35306Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement
    • G01D5/35309Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement using multiple waves interferometer

Definitions

  • the invention relates to an interferometric sensor, wherein a change in the parameter to be measured is related to a relative phase shift between two waves, such as an electro-optic voltage sensor, particularly for DC electrical voltages, or a fiber-optic current sensor (FOCS) .
  • an electro-optic voltage sensor particularly for DC electrical voltages
  • a fiber-optic current sensor FOCS
  • an electro-optic DC voltage sensor consisting of a bismuth germanate (Bi 4 Ge 3 0i2, or BGO) crys ⁇ tal with its [001] crystal axis oriented along the optical path of the waves (see also reference [1] for further de ⁇ tails) has a corresponding n-voltage or an unambiguous measurement range of about 75 kV for light waves at 1310 nm.
  • the sign ambiguity (between ⁇ and - ⁇ ) can be removed by combining two polarimetric signals with a (static) relative phase offset (preferably ⁇ /2, called quadrature signals) as described for example in ref. [2]
  • the periodwise ambiguity (between ⁇ and ⁇ + 2 ⁇ ) is an inherent problem for all interferometric measurements.
  • the measurement range can be extended by fringe counting, zero- counting or similar history-tracking techniques.
  • AC voltage measurements one can thus extend the measurement range to many times the ⁇ -voltage by combining quadrature polarimetric signals and using zero-counting (see ref. [2- 4]), facilitated by the fact that the AC voltage continu- ously oscillates about zero.
  • the periodwise ambiguity is a genuine prob ⁇ lem and places a fundamental limit to the achievable meas ⁇ urement range. This is particularly the case for DC volt- age or DC current measurements, due to the absence of an oscillating waveform and thus the lack of a zero reference.
  • Electro-optic voltage sensors can also be built using the modulation phase detection (MPD) technique as described for example in [6] . It is generally implemented in a non-reciprocal phase modulation scheme and commonly used in fiber-optic gyroscopes and fiber-optic current sen ⁇ sors, see ref . [7, 8] . Reciprocal MPD sensors have excel ⁇ lent phase accuracy and DC stability.
  • MPD modulation phase detection
  • the two-wavelength (or multi-wave ⁇ length) method requires at least two sets of light sources and detectors at distinct wavelengths, which significantly add to the complexity and may reduce the reliability of the sensor system.
  • low-coherence light is used. Such radiation encompasses a rel ⁇ atively broad bandwidth (sometimes known as white light) , as opposed to the monochromatic radiation emitted by co- herent laser sources, which are used in conventional in ⁇ terferometers. Consequently, the coherence time of the low-coherence light, inversely proportional to the band ⁇ width, is relatively short, equal to only a small number of optical periods.
  • Low-coherence light sources are widely used in many fiber sensors, especially those consisting of many disparate sections, components and interfaces, mainly to temporally localize interfering waves and eliminate spu ⁇ rious interference from undesired back-scattering and cross-coupling.
  • the same idea is also explored in coher- ence-multiplexed sensor systems as described in [13], where multiple signals are combined and separated based on their non-overlapping coherence times.
  • the narrow coherence peak provides a natural absolute reference for interferometric measurements.
  • a number of low-coherence interference sensors have been developed using the same principle, to measure physical quantities such as pressure [17], temper ⁇ ature [18, 19], etc.
  • a remote sensing interferometer is optically connected to a local reference interferometer in series.
  • the low-coherence light produces a packet of white-light interference fringes as the local interferometer is scanned (either mechanically or electronically as described for example in reference [20]), and the central fringe in the packet provides an absolute reference for the accurate reproduction and lock ⁇ ing of the phase shift between the two interferometers, so that no "zero-forgetting" should occur after an interruption.
  • the local interferometer is simultaneously interro ⁇ gated to measure the transferred phase shift, e.g., with another monochromatic light by fringe counting.
  • the low-coherence light is used to unambiguously transfer the interference signal from one interferometer to another, and the phase measurement is carried out in the reference interferometer by conventional fringe-counting means.
  • a related optical ranging technique termed op ⁇ tical coherence-domain reflectometry is also known, see ref. [21, 22] .
  • the technique scans a delay line and detects the white-light interference fringes in order to measure the arrival times of the reflected waves from various in ⁇ terfaces. It was commercialized in the early 1990s and has gained widespread use in the field. The same concept can be extended to surface profiling [23], and also to cross-sectional imaging in biological samples, in which case an entire field called optical coherence tomography (OCT) [24] has emerged, which has become a very powerful tool in biological diagnostics.
  • OCT optical coherence tomography
  • These techniques use the reflected or scattered white-light interference fringes for sample characterization. For these techniques, the phase shift of the waves used is generally not a parameter of interest.
  • the delay to obtain white- light interference fringes in what is known as the time- domain approach, one can alternatively vary the detection wavelength and measure the spectrum at a fixed non-zero delay, in a so-called frequency-domain approach. In this case, one measures a modulated spectrum containing many spectral fringes.
  • the frequency-domain white-light inter- ferometry contains basically the same information as the time-domain counterpart, and the data acquisition can be accomplished in a single shot by a spectrograph. It is widely used in optical coherence tomography research [25] but has also seen some sensor applications.
  • Patent US5301010 [26] the dependence of the white-light interference fringe contrast on a physical quantity is explicitly used to measure that quantity.
  • a dual-interferometer setup is used and the reflector in one arm of the reference interferometer is oscillated back and forth to record a number of white-light interference fringes about a given position.
  • the value of the interference contrast at the given path length is cal ⁇ culated using the relative intensities of the maxima and minima of these fringes, and the measurand is then inferred from the contrast value.
  • a preferred embodiment with a stepped mirror is also included in this patent, producing two shifted white-light interference fringe packets with the measurement point located in between.
  • the interference contrast is calculated and deliberately used for the measurement of a physical quantity. However, no phase measurement is performed in this technique, and scanning through multiple interference fringes is required to measure the contrast.
  • WO 94/18523, WO 03/093759 and US 2006/0158659 describe interferometric setups that also rely on scanning the whole interference fringes of broadband light.
  • an interferometric sensor with a sensing element whereby a measurand induces a relative phase shift between two waves, at least one detector meas ⁇ uring an interference signal between the two waves, and further including a phase shift detection unit having as input the interference signal and determining a first meas ⁇ ure representative of the principal value of the relative phase shift ( ⁇ ) , and a contrast detection unit having as input the interference signal and determining a second measure representative of the cross-correlation (A) be ⁇ tween the two waves, and further a processing unit for converting the first and second measures to a measurand value .
  • the term "wave” here is meant in the general physical sense of the word, including all types of oscil ⁇ lations traveling in space and time.
  • the wave may have narrow or broad spectral content, may be long-lasting or be limited in duration, and may be generated by one source or be synthesized from multiple sources.
  • the nature of the wave may be mechanical (acoustic) , electro-magnetic (opti ⁇ cal) , or of any other type.
  • the invention is described using light waves as examples.
  • the two interfering waves can then be for example two or- thogonal linear or circular polarization modes of a light wave .
  • the two waves in interference can in principle be emitted from different but mutually (at least partially) coherent sources. If the two waves are copies of the same wave, then the cross-correlation function (also known as the degree of mutual coherence) is an autocorrelation func ⁇ tion (also known as the degree of self-coherence) of the wave in question.
  • the cross-correlation function also known as the degree of mutual coherence
  • autocorrelation func ⁇ tion also known as the degree of self-coherence
  • the sensing element can comprise an electro-optic crystal, a crystalline electro-op ⁇ tic fiber, a poled fiber, or a fiber or bulk optic material attached to a piezo-electric element.
  • the sensing el- ement can comprise an optical fiber or a bulk optic mate ⁇ rial.
  • the sensing element can comprise optical fibers or waveguides, including specialty low birefringent fibers, flint glass fibers, or spun highly-birefringent fibers; bulk magneto-optic materials, such as yttrium iron garnet crystals or fused silica glass blocks; or optical fibers, waveguides, or bulk optical ma ⁇ terials attached to a magneto-strictive element; or combi ⁇ nations thereof.
  • the sen ⁇ sor can remove period ambiguity from the relative phase shift as measured.
  • the detected second measure value is mapped to a period counter n using a pre-deter- mined function or map of parameters representing the cross- correlation function of the waves within the measurement range of the sensor, and, combined with the detected first measure representing the principal value of the relative phase shift, a corresponding unambiguous measurand value is determined.
  • the amplitude of the cross-correlation (or au ⁇ tocorrelation) function of the wave(s) manifests itself as the interference contrast or fringe visibility.
  • Various methods can be used to obtain the first and second measures as described, such as the polarimetric method or the mod ⁇ ulation phase detection method.
  • the waves in interference should have a suffi ⁇ ciently broad spectrum to produce a rapidly varying cross- correlation (or autocorrelation) function in a range of the same width as the target measurement range.
  • the spec- trum may cover a continuous band, or may consist of multi ⁇ ple disconnected bands or disconnected spectral lines.
  • a static group delay bias component can be used to adjust the bias of the relative group delay, in order to shift the target measurement range to a section of the cross-correlation function that has a strong and monotonic dependence on the relative group delay.
  • the group delay bias component is to be inserted in series with the sensing medium before the point of interference between the two waves .
  • the words “rapid”, “strong” and the like as related to the variation of the cross-correlation specifically mean that the difference in the cross-correlation value between adjacent phase shift periods is large enough to be resolved by the second measure detection by the sig ⁇ nal processing unit, i.e.,
  • the un ⁇ certainty ⁇ depends, among others, on the light source power and the signal averaging time.
  • the variation of the cross- correlation with the group delay or phase shift ⁇ is con- sidered to vary strongly if the relative amplitude of the interference signal varies over a group delay of 2 ⁇ by at least 0.1%, i.e.
  • the sensor is particularly preferred as a sensor for DC signals and more particularly for DC voltage or electrical field measurement, especially for medium or high voltage applications.
  • a further aspect of the invention relates to a method determining a first measure representative of the principal value of the relative phase shift and determining a second measure representative of the cross-correlation between two waves, both measures derived from an interference signal of the two waves passing through a sensing element introducing the relative phase shift between the two waves by interaction with the measurand, and converting the first and second measures to a measurand value.
  • the combined measurements of the cross-correlation measure and the principal value of the relative phase shift can be advantageously used to remove period ambiguity from the phase shift measurement and hence can largely increase the unambiguous measurement range of an interferometric sen ⁇ sor .
  • FIGs. 1A and IB illustrate functions or map ⁇ pings for use in an example of the invention
  • FIG. 2 illustrates a polarimetric quadrature signal detection scheme for use in an example of the in- vention
  • FIG. 3 illustrates a modulation phase detection scheme for use in an example of the invention
  • FIG. 4 illustrates the introduction of a group delay bias element into a sensor in accordance with an example of the invention
  • FIG. 5 is a DC voltage sensor based on a po- larimetric quadrature signal detection scheme in accord ⁇ ance with an example of the invention
  • FIG. 6 is a DC voltage sensor based on a po ⁇ larimetric quadrature signal detection scheme in accord- ance with an another example of the invention
  • FIGs. 7A and 7B are DC voltage sensors based on a polarimetric quadrature signal detection scheme using a reflective configuration in accordance with examples of the invention.
  • FIGs. 8 and 9 are DC voltage sensors based on a phase modulation signal detection scheme in accordance with examples of the invention.
  • the optical de ⁇ tector signal after the interference can be written as the sum of a base term, which is proportional to the output power of the light source, and a sinusoidal term which varies with the phase shift ⁇ between the interfering waves as influenced by the measurand.
  • the inter ⁇ ference of non-monochromatic waves introduces a further modification ⁇ ( ⁇ ) to the detector signal which is related to the temporal coherence of the waves. It can be mathe ⁇ matically expressed as the degree of mutual coherence or field cross-correlation function with the relative group delay ⁇ as the argument.
  • the detector signal of a typical interference measurement can be represented in gen ⁇ eral terms as
  • I(x) lo / 2 [1 + ⁇ ( ⁇ ( ⁇ )) cos ( ⁇ (x) ) ] , with lo representing the total power emitted by the light source, ⁇ being the phase shift at the center wavelength of the waves, and ⁇ ( ⁇ ) being the interference contrast or fringe visibility, which is also commonly defined and meas- ured as the difference of the adjacent fringe maximum and minimum divided by their sum.
  • the interference contrast A represents the amplitude of the degree of mutual coherence or the cross-correlation function of the two interfering waves.
  • the sensor signal I (x) depends on the phase shift ⁇ and the cross-correlation function ⁇ ( ⁇ ), both of which are functions of the measurand x.
  • FIGs. 1A and IB The typical behavior of a detector signal is shown in FIGs. 1A and IB using the example of interfering two copies of a light wave with a Gaussian spectrum of 120 nm FWHM bandwidth centered at 1310 nm.
  • the sensing medium is assumed to be nondispersive .
  • the normalized detector signal is shown as the oscillating line 11 as a function of the relative phase shift ⁇ , overlaid with the interference contrast A (auto- correlation function) as line 12 as a function of the relative group delay ⁇ in femtoseconds (fs) .
  • the latter forms an envelope curve over the peaks of the detector signal 11.
  • the oscillating line 13 is the principal value of the phase shift (phase shift mod 2n within the range (-n, +n] ) and the line 12 is again the interference contrast A.
  • the area 14 between the vertical dotted lines is a 7-fringe-wide range suitable for the unambiguous measurement of the relative phase shift ⁇ , with a strong monotonic dependence of the interference contrast A on the relative group delay ⁇ .
  • the Wiener-Khinchin theorem states that the au- tocorrelation function is the inverse Fourier transform of the power spectrum. Therefore, a broadband radiation is also a low-coherence radiation, the autocorrelation func ⁇ tion of which is a narrow function, with its value changing significantly from one phase period to another within its coherence time.
  • the section of the autocorrelation func ⁇ tion where it has a strong monotonic dependence on the relative group delay e.g. the area 14 between the vertical dotted lines in FIG. IB
  • This static component can be a birefringent crystal or a birefringent fiber-optic component (such as a polarization-maintaining fiber) if the waves in interference are orthogonal linear polarized waves, or a Faraday rotator if the waves in interference are orthogonal circu ⁇ lar polarized waves.
  • the group delay bias component is to be inserted in series with the sensing medium before the point of interference of the two waves.
  • the interference contrast can be used to allocate the measured phase shift principal value to the correct period, and thereby unambiguously determine the full value of the rel ⁇ ative phase shift.
  • the interference con ⁇ trast can be used in this range to unambiguously assign a period counter n to the principal value of the phase shift, as each period of the detected phase shift principal value 13 has a different interference contrast value within a monotonic part of line 12.
  • the interference con ⁇ trast measurement ⁇ ( ⁇ ( ⁇ )) alone already yields an unambig- uous measurement of x (as is used in the cited patent US5301010, ref. [26]).
  • the precision of the con ⁇ trast measurement is generally not high enough to enable a sufficiently accurate measurement of the measurand x.
  • the interference contrast ⁇ ( ⁇ ( ⁇ )) can be used to remove the periodwise ambiguity from a simultaneously measured phase shift principal value ⁇ , which has a much higher sensitiv ⁇ ity to x and is therefore more accurate.
  • can then be selected to deter ⁇ mine the full relative phase shift ⁇ ⁇ and thus the measurand value x n .
  • the above procedure describes only an example and that there are other possible ways of signal processing, such as dividing the function A(x) (line 12) into value segments based on 2n periods, or converting the contrast measurement first to the corre ⁇ sponding full value of the phase shift rather than to the measurand x.
  • the possible methods however have in common that the interference contrast (A) measurement is used to provide a coarse but unambiguous measurement of x, and combined with the ambiguous but highly accurate phase shift principal value (cp) measurement, an unambiguous and highly accurate measurement of x is obtained.
  • Any method that simultaneously measures the phase shift principal value ⁇ and the interference contrast A can be used for the implementation of this invention. Next, two examples of such methods are presented.
  • the first example is based on the polarimetric method with FIG. 2 showing the schematic of a typical sen ⁇ sor using polarimetric quadrature detection, where a static optical phase shift bias is introduced between two detec ⁇ tion channels.
  • the components as shown are a light source 20, an input polarizer 21, a sensing element 22 (which in use would be exposed to the measurand) , a first beamsplit ⁇ ter 23-1, a second beamsplitter 23-2, a quarter wave retarder (QWR) 24, a first output polarizer 25-1, a second output polarizer 25-2, and three optical power detectors 26-1, 26-2, 26-3.
  • the beam path of the wave is shown as hashed line(s) .
  • Three detectors are connected to the out ⁇ put beam path: the first detector 26-1 with no polarizer attached, the second detector 26-2 with the linear output polarizer 25-1, and the third detector 26-3 with a quarter- wave retarder 24 and the linear output polarizer 25-2.
  • the optical signals measured at the three detectors are, up to some proportionality constants, respectively,
  • Io Io/2 [1 + ⁇ ( ⁇ ) sin ( ⁇ ) ] , where Io represents the total power emitted by the light source 20, and ⁇ is the relative phase shift at the beamsplitter 23-1.
  • a first part (or phase shift detection unit) 31-1 of a signal processing unit 31 at least some of the measured signals are combined to derive a first measure representative of the principal value of the phase shift.
  • a second part 31-2 (or contrast detection unit) of the signal processing unit 31 at least some of the measured signals are combined to derive a second measure representa- tive of the cross-correlation or autocorrelation function A.
  • phase shift princi ⁇ pal value cp defined in (-n, n] is obtained as the argument or phase of Y, and the interference contrast A equals the absolute value of Y.
  • the detection scheme as represented by FIG. 2 also works without an exact 90° phase bias (although preferred) and only requires hav ⁇ ing two polarimetric channels that have a certain known relative phase difference other than 0° or 180°. Indeed, if for example the third detector channel with the detector 26-3 has an additional phase offset ⁇ , a complex variable can be calculated as [3']
  • the QWR element 24 can be replaced by any phase retarder other than full and half-wave re- tarders .
  • Io measure Io could be having detectors measuring both antiphase outputs from a polariz ⁇ ing beamsplitter (replacing polarizer 25-1 or 25-2) in at least one of the two polarimetric detector channels as represented by detectors 26-2 and 26-3. The sum of the two antiphase outputs would then yield the total light power ⁇ It should further be noted that the Io measure ⁇ ment is not required in cases where the total light power is known and/or kept constant, or can be readily monitored or controlled through electronic means or by using other detectors located before the optical sensing subsystem.
  • FIG. 3 shows an example of the in ⁇ vention using an active phase modulation scheme.
  • the sensor shown uses the modulation phase detection (MPD) principle, often implemented in a "non-reciprocal phase modu ⁇ lation" scheme and commonly used in fiber-optic gyroscopes and current sensors.
  • MPD modulation phase detection
  • the co-owned patent US7911196 cited as reference [9] above describes for example a voltage sensor incorporating a voltage sensing element (or several such elements), a 45° Faraday rotator, and the MPD modula ⁇ tion and detection electronics. It is important to note that the MPD technique has previously only been used to measure the phase shift principal value. But as shown in the following, the same measurement scheme can be extended to simultaneously yield the interference contrast.
  • the basic components for a sensor using the MPD detection scheme as shown in FIG. 3 are a light source 20, an input polarizer 21, a sensing element 22 (which in use would be exposed to the measurand) , an output polarizer 25, and a detector 26.
  • the beam path of the wave is shown as dashed line(s) .
  • a birefringent phase modulator 30 is also included in the beam path.
  • the phase modulator 30 and the detector 26 are coupled through a signal processing unit 31 for performing the signal analysis as described in the following.
  • the birefringent phase modulator 30 is opti ⁇ cally connected in series with the sensing medium 22, so that an additional optic phase shift modulation P(t) can be added to the phase shift to be measured.
  • the detector 26 measures the modulated optical power after the linear polarizer 25.
  • the modulated detector signal can be written as
  • I(t) I 0 /2 [1 + ⁇ ( ⁇ ) cos ( ⁇ + p(t))]. with Io representing the total power of the source, ⁇ being the relative phase shift at the center wavelength without the additional modulation, and ⁇ ( ⁇ ) being the interference contrast .
  • the first part (or phase shift detection unit) 31-1 of the signal processing unit 31 analyzes the detected signal I (t) to derive a first measure representative of the phase shift principal value cp of the relative phase shift ⁇ ; the second part (or contrast detection unit) 31-2 of the signal pro ⁇ cessing unit 31 analyzes the detected signal I (t) to derive a second measure representative of the cross-correlation or auto-correlation function A.
  • a sinusoidal modulation P(t) Psin(Qt) is imposed by the phase modulator 30.
  • the detector signal of eq. [4] can be written in a Fourier expansion as a series of harmonics at different orders k of the modulation frequency ⁇ , i.e.,
  • a vector or complex number can be formed from the above representation which allows to derive the phase shift principal value cp and the interference contrast A from the detected harmonic amplitudes Bk.
  • the phase shift principal value cp can be calculated as the argument of Y, and the interference contrast A equals its absolute value divided by Io.
  • the phase modulation amplitude P can be arbitrarily small.
  • the modulation amplitude P can also be calculated from the measured harmonic amplitudes, e.g., for the purpose of stabilizing the amplitude.
  • waveforms in particular a square wave modulation, may be used. Further details of open-loop MPD signal processing can be found in the refer- ences [6, 21] .
  • a suitable unambiguous measurement range is within a region where the cross-cor ⁇ relation function ⁇ ( ⁇ ) is monotonous and the slope
  • this region is shown as the area 14 between two vertical dotted lines.
  • a pre-deter- mined group delay offset by inserting a (static) group delay bias element 40 into the optical path in series with the sensing element 22, as shown in FIG. 4. It should be noted that the group delay bias element 40 can be inserted at any point between the input polarizer 21 and the point where the waves interfere.
  • the detection scheme as represented in FIG. 4 by a general detection unit 41 can be a polarimetric scheme or an MPD scheme as described above, or any other detection scheme that simultaneously detects the phase shift princi ⁇ pal value and the interference contrast.
  • the group delay bias of the static element 40 and the coherence time of the light source 20 should be selected such that the target measurement range of the measurand x maps to a group delay range ⁇ ( ⁇ ) that is contained within a monotonic portion of the ⁇ ( ⁇ ) function with a large slope
  • the interference contrast function A(x) A(x(x)) can be calculated or cal ⁇ ibrated for the particular sensor, and may be saved in a tabulated or functional form for the one-to-one conversion between A and the period counter n or the measurand x.
  • periodwise ambiguity As mentioned above, the removal of periodwise ambiguity as described can be applied to many types of interferometric sensors. Due to the lack of comparable alternatives, however, it is particularly suited to ex ⁇ tending the measurement range of DC electric field or volt ⁇ age sensors as described for example in reference [1] .
  • An electro-optic crystal is used as the sensing medium to convert the voltage to be measured to a relative phase shift between the orthogonal polariza- tion modes in the crystal.
  • An electro-optic crystal with ⁇ out natural birefringence (such as Bi4Ge3012, BGO) is pre ⁇ ferred.
  • An electro-optic waveguide or fiber can also be used as the voltage sensing medium. The end faces of the BGO crystal (cut perpendicular to the [001] direction) are electrically connected to the electrodes that provide the voltage drop.
  • the full voltage (not a fraction thereof) is applied across the sensing crystal.
  • the volt ⁇ age is applied in the longitudinal direction of the crys ⁇ tal, thus the path integral of the electric field in this direction (i.e. the applied voltage) is measured.
  • the voltage measurement is independent of the inter- nal charge redistribution in the crystal.
  • FIG. 2 In an example of a polarimetric detector for voltage, elements of FIG. 2 and FIG. 4 are combined (and hence the same numerals are used where appropriate) as illustrated in FIG. 5.
  • FIG. 5 shows a design of an extended-range DC voltage sensor where the sensing element is used in trans ⁇ mission.
  • Three detector channels 26-1, 26-2 and 26-3 yield the total light power and two quadrature polarimetric sig ⁇ nals, respectively, as described above (see eq. [2]).
  • a birefringent crystal with static relative group delay (such as a crystalline quartz waveplate) is inserted between the input polarizer 21 and the second beamsplitter 23-2 as a group delay bias element 40, as discussed above.
  • the use of a group delay bias element 40 is preferred, but may not always be needed if the polarity of the voltage to be measured is known and hence the sign of the slope of curve 12 in FIG. 1A and IB in the measurement range is known.
  • the birefringent crystal 40 serves to extend the unambiguous measurement range over both polarities.
  • the birefringent crystal may also be omitted if an electro-optic crystal with natural birefrin ⁇ gence is employed as sensing element 22 that generates the desired group delay bias.
  • the group delay bias element 40 may be a composite optic made from two crystals in series, either with parallel optical axes, if their thermo-birefringence coefficients are of opposite signs, or with swapped optical axes, if their thermo-birefringence coefficients are of the same sign. Additionally, the tem ⁇ perature of the group delay bias element can be measured, whereby its temperature-dependent group delay and phase shift change can be compensated in signal processing.
  • the axes of the input polarizer 21 and the two output polarizers 25-1 and 25-2 are aligned at ⁇ 45°, whereas the axes of the group delay bias element 40 and the QWR 24 are aligned parallel to the electro-optic axes of the sensing element 22.
  • the measurand x is in this example the voltage V applied between the end faces of the BGO crystal with the [001] crystal axis oriented in direc ⁇ tion of the light wave propagation.
  • the beamsplitters should be aligned with their axes at 45° relative to the electro-optic crystal axes, in order to equalize any possible phase shift the two polarization waves may experience from the beamsplitter.
  • Any residual system phase shifts for example from the beamsplitter or from the residual natural birefringence of the electro- optic crystal, can be characterized and taken out by cal ⁇ ibration.
  • the residual birefringence of BGO if any, can also be reduced by combining two BGO crystals in series, with antiparallel [001] axes and the x/y axes rotated 90° against each other. In this arrangement, the electro-optic phase shifts add up, while the intrinsic birefringence cancel, leading to a better zero-point stability.
  • FIG. 6 an apparatus similar to FIG. 5 is described where use is made of a different manner of meas ⁇ uring the total power as already described above in con- nection with eq. [2] .
  • Only one birefringence-free beamsplitter 23-2 is used, and two detector channels with the detectors 26-1 and 26-2 are connected to the two anti ⁇ phase outputs of polarizing beamsplitter 60.
  • the total optical power is given by the sum of powers at the detectors 26-1 and 26-2, while detector 26-1 (or 26-2) and detector 26-3 constitute a pair of quadrature polarimetric channels.
  • the polarimetric voltage sensors can also be designed in a reflective configuration, wherein the elec ⁇ tro-optic phase shift as induced by the measurand would be doubled. Examples illustrating such a configuration are shown in FIGs. 7A and 7B, where a reflecting optic 70 is placed at one end of the crystal, and all the other optical elements are located at the other end. Other elements are identical or similar to those described already when re- ferring to FIG. 5 above.
  • the reflecting optic 70 may be a flat/curved mirror, a roof mirror, a corner-cube retroreflector, or simply a reflective thin film coating deposited on the end face of the crystal.
  • the reflection at the reflecting optic should ideally preserve the polarization state of the light without rotation or polarization-dependent phase shift. Any residual phase shift from reflection can also be characterized and taken out by calibration.
  • the light source and detector end of the crystal is con- nected to the ground potential, and the reflector end to the high voltage, in order to keep the light source and the detectors at the ground potential.
  • FIGs. 8 and 9 illustrate examples of an ex ⁇ tended-range DC voltage sensor in connection with a MPD scheme. As described above (see eq.
  • the MPD scheme is another approach to simultaneously measure the phase shift and the interference contrast.
  • an MPD-based voltage sensor in the transmissive configuration similar to the one depicted in FIG. 3, is not suited for most practical applications, because the intrinsic phase shifts in the phase modulator 30 and the connecting polarization- maintaining fibers are generally very sensitive to temper ⁇ ature and/or stress variations. Therefore, the output of a transmissive MPD-based voltage sensor is easily affected by environmental disturbances.
  • robust MPD sensors can be designed based on a reciprocal optical design, whereby the two interfering waves either counter-propagate in a loop (e.g. in the case of a fiber-optic gyroscope) or retrace the optical path upon reflection with swapped orthogonal polarizations (e.g. in the case of a reflective fiber-optic current sensor) .
  • the intrinsic phase shifts of the phase modulator and the interconnecting PM fibers automatically cancel along the reciprocal path (and hence the temperature dependence thereof) , while the phase modulation and the measurand-induced phase shift double. As explained already in the introduction, this is usually referred to as "non-reciprocal phase modulation.”
  • the co-owned patent US7911196 de ⁇ scribes a non-reciprocal phase modulation voltage sensor incorporating a voltage sensing element (or several such elements), a 45° Faraday rotator, MPD modulation and de ⁇ tection electronics.
  • the sensor in that patent is only capable of unambiguously measuring a DC electro-optic phase shift in the range of - ⁇ to + ⁇ because of the period wise ambiguity problem of the phase shift.
  • the MPD signal processing scheme can be extended to yield also the interference contrast ⁇ ( ⁇ ( ⁇ )), in addition to the phase shift. Therefore, with a low-coherence light source, the sensors described for example in US7911196 can be used to unambiguously measure a DC voltage in an ex ⁇ tended range, employing the contrast-based disambiguation methods and apparatus as described herein.
  • the light is then coupled out of a collimator 82, passes through a 45° Faraday rotator 83, a group delay bias element 40, and enters the sensing el ⁇ ement 22 (BGO crystal along the [001] axis), the ends of which are electrically connected to the voltage supply V.
  • the crystal end faces can be coated with a transparent conductive electrode layer.
  • the light is reflected back into the sensing medium, the group delay bias element, the Faraday rotator and the PM fiber in sequence, by a reflect- ing optic 70 at the far end of the sensing medium 22.
  • the reflecting optic may be a flat/curved mirror, a roof mir ⁇ ror, a corner-cube retroreflector, or simply a reflective thin film coating deposited on the end face of the crystal.
  • the reflection at the reflecting optic should preserve the polarization state of the light without rotation or polarization-dependent phase shift.
  • a birefringent crystal acting as static group- delay bias element 40 (such as a crystalline quartz wave- plate) is inserted between the Faraday rotator 83 and the reflecting optic 70, in order to adjust the group-delay bias, as discussed when referring to FIG. IB above.
  • the optical axes of the BGO crystal and the birefringent crys ⁇ tal are to be aligned at 45° relative to the axes of the PM fiber leading to the collimator 82.
  • the interfering orthogonally polarized waves swap their polarizations as they reenter the PM fiber and the birefringent phase modulator 30, thereby canceling the associated intrinsic phase shifts and eliminating the temperature dependence thereof.
  • the 45° splice 81 and the polarizer 21 on the return path allows the coherent mixing of the polarization waves, and the photodetector 26 measures the resulting light power.
  • a signal processing and control unit 31 con ⁇ trols the phase modulation waveform and measures the light power at the photodetector. It calculates the phase shift principal value and the interference contrast, for example according to the procedure described in eq. [4'] . Finally, the phase shift principal value and the interference con ⁇ trast are combined to yield an unambiguous measurement of the voltage.
  • Any residual system phase shifts for example from the beamsplitter or the reflecting optic or from the residual natural birefringence of the BGO crystal, can be characterized and taken out by calibration.
  • FIG. 9 Another set of collimator 82' and Faraday rotator 83', is shown in FIG. 9. Due to the Faraday rotators 83 and 83' , the waves are polarized along orthogonal electro-optic axes of the sensing medium 22 in the two counter-propagat ⁇ ing directions whereas they are polarized along the same axis in the PM fibers 80.
  • An advantage over the reflective configuration of FIG. 8 is that there are more degrees of freedom in the alignment of the optical components, which may simplify the light coupling from electro-optic crystal back into the PM fiber 80.
  • a possible drawback of the design of FIG. 9 is the larger number of components. While some preferred embodiments of the inven ⁇ tion are shown and described above, it is to be understood that the invention is not limited thereto but may be oth ⁇ erwise variously embodied and practiced within the scope of the following claims.
  • an interferometer in the RF or other electro-magnetic radiation bands can also benefit from the same unambiguous extension of the measurement range.
  • the invention is also not limited to electro-magnetic waves. Any interferometer involving waves, be it acoustic, density, or other types of waves, can also benefit in the same way.
  • the low-coherence source can either be a light source of broad bandwidth, or a synthesized source made up from multiple sources at different wavelengths.
  • the shape of its spectrum is not important.
  • the inverse of the overall frequency bandwidth should be on the same order of the group delay span corresponding to the width of the desired unambiguous measurement range of the sensor.

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Abstract

An interferometric sensor and related methods are provided, with a sensing element whereby a measurand induces a relative phase shift between two waves, at least one detector measuring an interference signal between the two waves, and further including a phase shift detection unit having as input the interference signal and determining a first measure representative of the principal value (φ, 13) of the relative phase shift, and a contrast detection unit having as input the interference signal for determining a second measure (A, 12) representative of the cross-correlation between the two waves, and a further a processing unit for converting the first and second measures to a measurand value (x).

Description

Interferometric Sensor
FIELD OF THE INVENTION
The invention relates to an interferometric sensor, wherein a change in the parameter to be measured is related to a relative phase shift between two waves, such as an electro-optic voltage sensor, particularly for DC electrical voltages, or a fiber-optic current sensor (FOCS) . BACKGROUND OF THE INVENTION
Sensors which rely on the interference between two waves, typically two orthogonal polarization modes of a wave, are known and used in a wide range of technical fields. The detector signals of these sensors are related to the cosine of the relative phase shift φ between the two waves. Therefore, phase shifts of φ and ±φ + 2ηπ (n being an integer number, also referred herein as the period counter) produce the same interference output, and hence cannot be distinguished from one another. Consequently, the unambiguous measurement range of the relative phase shift is limited to a range of [0, π] .
For example, an electro-optic DC voltage sensor consisting of a bismuth germanate (Bi4Ge30i2, or BGO) crys¬ tal with its [001] crystal axis oriented along the optical path of the waves (see also reference [1] for further de¬ tails) has a corresponding n-voltage or an unambiguous measurement range of about 75 kV for light waves at 1310 nm.
Although the sign ambiguity (between φ and -φ) can be removed by combining two polarimetric signals with a (static) relative phase offset (preferably π/2, called quadrature signals) as described for example in ref. [2], the periodwise ambiguity (between φ and φ + 2ηπ) is an inherent problem for all interferometric measurements.
For relative measurements of phase shifts, the measurement range can be extended by fringe counting, zero- counting or similar history-tracking techniques. In AC voltage measurements, one can thus extend the measurement range to many times the π-voltage by combining quadrature polarimetric signals and using zero-counting (see ref. [2- 4]), facilitated by the fact that the AC voltage continu- ously oscillates about zero. However, for absolute meas¬ urements in which history information is either unavailable or unreliable, the periodwise ambiguity is a genuine prob¬ lem and places a fundamental limit to the achievable meas¬ urement range. This is particularly the case for DC volt- age or DC current measurements, due to the absence of an oscillating waveform and thus the lack of a zero reference. Furthermore, the latter makes it difficult to distinguish voltage or current drifts from other effects such as chang¬ ing optical loss, stress-induced birefringence, etc. It has been attempted, see ref. [5], to address the drift problem by chopping the applied voltage, but such solutions are not readily adaptable to HV applications. Electro-optic voltage sensors can also be built using the modulation phase detection (MPD) technique as described for example in [6] . It is generally implemented in a non-reciprocal phase modulation scheme and commonly used in fiber-optic gyroscopes and fiber-optic current sen¬ sors, see ref . [7, 8] . Reciprocal MPD sensors have excel¬ lent phase accuracy and DC stability. The co-owned Patent US 7911196 (cited herein as reference [9]) describes a voltage sensor incorporating a voltage sensing element (or several such elements), a 45° Faraday rotator, and the MPD modulation and detection electronics. The periodwise am¬ biguity remains a limitation in this technique, and there¬ fore the sensor as described is also only capable of meas¬ uring a DC electro-optic phase shift φ between -π and +π . A similar system with a transverse-configuration voltage cell can be found in ref. [10] .
There have been efforts to extend the unambig¬ uous measurement range of interferometry beyond 2n. Both patent applications WO9805975A1 [11] and EP1179735A1 [12] propose for example using two distinct optical wavelengths, particularly in an electric voltage or current measurement. Because the optical phase shift as induced by the measurand depends on the wavelength, the interferometric signals measured at the two wavelengths generally have different periodicities as a function of the measurand. Hence, the measured value pair consisting of detector readings at the two wavelengths does not have a simple periodic dependence on the measurand, and can therefore be used to unequivo¬ cally allocate the measurand value in a large range. Three or more wavelengths can also be used (see ref. [12]), providing further advantages of eliminating all remaining ambiguous points. The two-wavelength (or multi-wave¬ length) method, however, requires at least two sets of light sources and detectors at distinct wavelengths, which significantly add to the complexity and may reduce the reliability of the sensor system. In another approach in interferometry, low-coherence light is used. Such radiation encompasses a rel¬ atively broad bandwidth (sometimes known as white light) , as opposed to the monochromatic radiation emitted by co- herent laser sources, which are used in conventional in¬ terferometers. Consequently, the coherence time of the low-coherence light, inversely proportional to the band¬ width, is relatively short, equal to only a small number of optical periods. Low-coherence light sources are widely used in many fiber sensors, especially those consisting of many disparate sections, components and interfaces, mainly to temporally localize interfering waves and eliminate spu¬ rious interference from undesired back-scattering and cross-coupling. The same idea is also explored in coher- ence-multiplexed sensor systems as described in [13], where multiple signals are combined and separated based on their non-overlapping coherence times.
The narrow coherence peak provides a natural absolute reference for interferometric measurements. One of the earliest attempts to employ this principle for a sensor application appeared in ref. [14], and the first fully developed position sensor was demonstrated in [15] and US4596466 [16] . A number of low-coherence interference sensors have been developed using the same principle, to measure physical quantities such as pressure [17], temper¬ ature [18, 19], etc. Typically in these systems, a remote sensing interferometer is optically connected to a local reference interferometer in series. The low-coherence light produces a packet of white-light interference fringes as the local interferometer is scanned (either mechanically or electronically as described for example in reference [20]), and the central fringe in the packet provides an absolute reference for the accurate reproduction and lock¬ ing of the phase shift between the two interferometers, so that no "zero-forgetting" should occur after an interruption. The local interferometer is simultaneously interro¬ gated to measure the transferred phase shift, e.g., with another monochromatic light by fringe counting. It should be noted that for all the techniques using low-coherence light sources as described above, the low-coherence light is used to unambiguously transfer the interference signal from one interferometer to another, and the phase measurement is carried out in the reference interferometer by conventional fringe-counting means.
A related optical ranging technique termed op¬ tical coherence-domain reflectometry is also known, see ref. [21, 22] . The technique scans a delay line and detects the white-light interference fringes in order to measure the arrival times of the reflected waves from various in¬ terfaces. It was commercialized in the early 1990s and has gained widespread use in the field. The same concept can be extended to surface profiling [23], and also to cross-sectional imaging in biological samples, in which case an entire field called optical coherence tomography (OCT) [24] has emerged, which has become a very powerful tool in biological diagnostics. These techniques use the reflected or scattered white-light interference fringes for sample characterization. For these techniques, the phase shift of the waves used is generally not a parameter of interest.
Instead of scanning the delay to obtain white- light interference fringes in what is known as the time- domain approach, one can alternatively vary the detection wavelength and measure the spectrum at a fixed non-zero delay, in a so-called frequency-domain approach. In this case, one measures a modulated spectrum containing many spectral fringes. The frequency-domain white-light inter- ferometry contains basically the same information as the time-domain counterpart, and the data acquisition can be accomplished in a single shot by a spectrograph. It is widely used in optical coherence tomography research [25] but has also seen some sensor applications.
In Patent US5301010 [26], the dependence of the white-light interference fringe contrast on a physical quantity is explicitly used to measure that quantity. In this patent, a dual-interferometer setup is used and the reflector in one arm of the reference interferometer is oscillated back and forth to record a number of white-light interference fringes about a given position. The value of the interference contrast at the given path length is cal¬ culated using the relative intensities of the maxima and minima of these fringes, and the measurand is then inferred from the contrast value. A preferred embodiment with a stepped mirror is also included in this patent, producing two shifted white-light interference fringe packets with the measurement point located in between. In this patent, the interference contrast is calculated and deliberately used for the measurement of a physical quantity. However, no phase measurement is performed in this technique, and scanning through multiple interference fringes is required to measure the contrast.
WO 94/18523, WO 03/093759 and US 2006/0158659 describe interferometric setups that also rely on scanning the whole interference fringes of broadband light.
In the light of the above, it is seen as an object of the invention to provide an interferometric sen¬ sor with the parameter to be measured represented by a relative phase shift between two waves, which does not exhibit periodwise ambiguity. It is seen as a particular object of the invention to remove periodwise ambiguity for sensors measuring DC parameters which do not oscillate rapidly during the duration of a measurement.
SUMMARY OF THE INVENTION
Hence, according to a first aspect of the in¬ vention, an interferometric sensor is provided, with a sensing element whereby a measurand induces a relative phase shift between two waves, at least one detector meas¬ uring an interference signal between the two waves, and further including a phase shift detection unit having as input the interference signal and determining a first meas¬ ure representative of the principal value of the relative phase shift ( φ ) , and a contrast detection unit having as input the interference signal and determining a second measure representative of the cross-correlation (A) be¬ tween the two waves, and further a processing unit for converting the first and second measures to a measurand value .
The term "wave" here is meant in the general physical sense of the word, including all types of oscil¬ lations traveling in space and time. The wave may have narrow or broad spectral content, may be long-lasting or be limited in duration, and may be generated by one source or be synthesized from multiple sources. The nature of the wave may be mechanical (acoustic) , electro-magnetic (opti¬ cal) , or of any other type. In the following description, the invention is described using light waves as examples. The two interfering waves can then be for example two or- thogonal linear or circular polarization modes of a light wave .
The two waves in interference can in principle be emitted from different but mutually (at least partially) coherent sources. If the two waves are copies of the same wave, then the cross-correlation function (also known as the degree of mutual coherence) is an autocorrelation func¬ tion (also known as the degree of self-coherence) of the wave in question.
For voltage or electrical field measurements according to this invention, the sensing element can comprise an electro-optic crystal, a crystalline electro-op¬ tic fiber, a poled fiber, or a fiber or bulk optic material attached to a piezo-electric element. For force or strain measurements according to this invention, the sensing el- ement can comprise an optical fiber or a bulk optic mate¬ rial. For optical magnetic field sensors or current sen¬ sors according to this invention, the sensing element can comprise optical fibers or waveguides, including specialty low birefringent fibers, flint glass fibers, or spun highly-birefringent fibers; bulk magneto-optic materials, such as yttrium iron garnet crystals or fused silica glass blocks; or optical fibers, waveguides, or bulk optical ma¬ terials attached to a magneto-strictive element; or combi¬ nations thereof.
Because the cross-correlation value changes with the relative group delay between the two waves (which in turn is proportional to their relative phase shift) , different phase shift periods would see a different cross- correlation value. Therefore using the detected second measure representative of the cross-correlation, the sen¬ sor can remove period ambiguity from the relative phase shift as measured. Preferably, the detected second measure value is mapped to a period counter n using a pre-deter- mined function or map of parameters representing the cross- correlation function of the waves within the measurement range of the sensor, and, combined with the detected first measure representing the principal value of the relative phase shift, a corresponding unambiguous measurand value is determined.
The amplitude of the cross-correlation (or au¬ tocorrelation) function of the wave(s) manifests itself as the interference contrast or fringe visibility. Various methods can be used to obtain the first and second measures as described, such as the polarimetric method or the mod¬ ulation phase detection method.
Because of the Fourier transform relationship between the cross-correlation (or autocorrelation) and the spectrum, the waves in interference should have a suffi¬ ciently broad spectrum to produce a rapidly varying cross- correlation (or autocorrelation) function in a range of the same width as the target measurement range. The spec- trum may cover a continuous band, or may consist of multi¬ ple disconnected bands or disconnected spectral lines. A static group delay bias component can be used to adjust the bias of the relative group delay, in order to shift the target measurement range to a section of the cross-correlation function that has a strong and monotonic dependence on the relative group delay. The group delay bias component is to be inserted in series with the sensing medium before the point of interference between the two waves .
Here the words "rapid", "strong" and the like as related to the variation of the cross-correlation specifically mean that the difference in the cross-correlation value between adjacent phase shift periods is large enough to be resolved by the second measure detection by the sig¬ nal processing unit, i.e., |Α(φ) - Α(φ ± 2π) | » δΑ, where δΑ is the uncertainty in the measurement of Α(φ) . The un¬ certainty δΑ depends, among others, on the light source power and the signal averaging time.
Advantageously, the variation of the cross- correlation with the group delay or phase shift φ is con- sidered to vary strongly if the relative amplitude of the interference signal varies over a group delay of 2π by at least 0.1%, i.e. |Α(φ) - Α(φ ± 2π) 1/ Α(φ) > 0.001, with A being "second measure", in particular the amplitude of the interference signal.
The sensor is particularly preferred as a sensor for DC signals and more particularly for DC voltage or electrical field measurement, especially for medium or high voltage applications.
A further aspect of the invention relates to a method determining a first measure representative of the principal value of the relative phase shift and determining a second measure representative of the cross-correlation between two waves, both measures derived from an interference signal of the two waves passing through a sensing element introducing the relative phase shift between the two waves by interaction with the measurand, and converting the first and second measures to a measurand value. The combined measurements of the cross-correlation measure and the principal value of the relative phase shift can be advantageously used to remove period ambiguity from the phase shift measurement and hence can largely increase the unambiguous measurement range of an interferometric sen¬ sor .
The above and other aspects of the present in¬ vention together with further advantageous embodiments and applications of the invention are described in further de- tails in the following description and figures.
BRIEF DESCRIPTION OF THE FIGURES FIGs. 1A and IB illustrate functions or map¬ pings for use in an example of the invention;
FIG. 2 illustrates a polarimetric quadrature signal detection scheme for use in an example of the in- vention;
FIG. 3 illustrates a modulation phase detection scheme for use in an example of the invention; FIG. 4 illustrates the introduction of a group delay bias element into a sensor in accordance with an example of the invention;
FIG. 5 is a DC voltage sensor based on a po- larimetric quadrature signal detection scheme in accord¬ ance with an example of the invention;
FIG. 6 is a DC voltage sensor based on a po¬ larimetric quadrature signal detection scheme in accord- ance with an another example of the invention; FIGs. 7A and 7B are DC voltage sensors based on a polarimetric quadrature signal detection scheme using a reflective configuration in accordance with examples of the invention; and
FIGs. 8 and 9 are DC voltage sensors based on a phase modulation signal detection scheme in accordance with examples of the invention.
DETAILED DESCRIPTION In the following, the example of an orthogonal- polarization interferometer is used to describe steps of signal handling or processing used in the present invention. It should be noted that the underlying principles of the example described apply to many different types of interferometric sensors otherwise suffering from period- wise ambiguity. Hence they can actually be applied to any types of interferometers (Michelson, Mach-Zehnder, Fabry- Perot, Sagnac, etc.), with only minor differences in im¬ plementation or interpretation.
Typically, in an interferometer the optical de¬ tector signal after the interference can be written as the sum of a base term, which is proportional to the output power of the light source, and a sinusoidal term which varies with the phase shift φ between the interfering waves as influenced by the measurand. In addition, the inter¬ ference of non-monochromatic waves introduces a further modification Α(τ) to the detector signal which is related to the temporal coherence of the waves. It can be mathe¬ matically expressed as the degree of mutual coherence or field cross-correlation function with the relative group delay τ as the argument. Hence the detector signal of a typical interference measurement can be represented in gen¬ eral terms as
[1] I(x) = lo / 2 [1 + Α(τ(χ)) cos (φ (x) ) ] , with lo representing the total power emitted by the light source, φ being the phase shift at the center wavelength of the waves, and Α(τ) being the interference contrast or fringe visibility, which is also commonly defined and meas- ured as the difference of the adjacent fringe maximum and minimum divided by their sum. Mathematically, it can be proven that with a non-monochromatic radiation, the interference contrast A represents the amplitude of the degree of mutual coherence or the cross-correlation function of the two interfering waves. When the waves are copies of the same wave, A is the degree of self-coherence or the autocorrelation function of the wave in question. Therefore, the sensor signal I (x) depends on the phase shift φ and the cross-correlation function Α(τ), both of which are functions of the measurand x.
The typical behavior of a detector signal is shown in FIGs. 1A and IB using the example of interfering two copies of a light wave with a Gaussian spectrum of 120 nm FWHM bandwidth centered at 1310 nm. For the sake of simplicity, the sensing medium is assumed to be nondispersive .
The normalized detector signal is shown as the oscillating line 11 as a function of the relative phase shift φ, overlaid with the interference contrast A (auto- correlation function) as line 12 as a function of the relative group delay τ in femtoseconds (fs) . The latter forms an envelope curve over the peaks of the detector signal 11. In FIG. IB the oscillating line 13 is the principal value of the phase shift (phase shift mod 2n within the range (-n, +n] ) and the line 12 is again the interference contrast A. The area 14 between the vertical dotted lines is a 7-fringe-wide range suitable for the unambiguous measurement of the relative phase shift φ, with a strong monotonic dependence of the interference contrast A on the relative group delay τ.
The Wiener-Khinchin theorem states that the au- tocorrelation function is the inverse Fourier transform of the power spectrum. Therefore, a broadband radiation is also a low-coherence radiation, the autocorrelation func¬ tion of which is a narrow function, with its value changing significantly from one phase period to another within its coherence time. The section of the autocorrelation func¬ tion where it has a strong monotonic dependence on the relative group delay (e.g. the area 14 between the vertical dotted lines in FIG. IB) is a suitable unambiguous meas¬ urement range, with its width determined by the spectrum and its offset controllable by a static group delay bias component. This static component can be a birefringent crystal or a birefringent fiber-optic component (such as a polarization-maintaining fiber) if the waves in interference are orthogonal linear polarized waves, or a Faraday rotator if the waves in interference are orthogonal circu¬ lar polarized waves. The group delay bias component is to be inserted in series with the sensing medium before the point of interference of the two waves.
Therefore, provided the phase shift principal value cp (φ mod 2n within (-n, +n] ) and the interference contrast are measured simultaneously, in a range where the cross-correlation function has a strong monotonic dependence on the relative group delay (for example, e.g. the area 14 between the vertical dotted lines in Fig. IB), the interference contrast can be used to allocate the measured phase shift principal value to the correct period, and thereby unambiguously determine the full value of the rel¬ ative phase shift. In other words, the interference con¬ trast can be used in this range to unambiguously assign a period counter n to the principal value of the phase shift, as each period of the detected phase shift principal value 13 has a different interference contrast value within a monotonic part of line 12.
It is worth noting that the interference con¬ trast measurement Α( τ(χ)) alone already yields an unambig- uous measurement of x (as is used in the cited patent US5301010, ref. [26]). However, the precision of the con¬ trast measurement is generally not high enough to enable a sufficiently accurate measurement of the measurand x. Us¬ ing the methods described in the present invention, the interference contrast Α( τ(χ)) can be used to remove the periodwise ambiguity from a simultaneously measured phase shift principal value φ, which has a much higher sensitiv¬ ity to x and is therefore more accurate.
One possible procedure is the following: From the measured phase shift principal value φ, a list of all possible full values of the relative phase shift φη = Φ + 2ηπ within the measurement range is calculated and then converted into the corresponding measurand values xn. Then, using a pre-determined function or map of parameters representing the auto-correlation function A(x), the corresponding contrast values An = A(xn) are determined and compared with the measured value of A. The n having the smallest deviation | An - A| can then be selected to deter¬ mine the full relative phase shift φη and thus the measurand value xn.
It should be noted that the above procedure describes only an example and that there are other possible ways of signal processing, such as dividing the function A(x) (line 12) into value segments based on 2n periods, or converting the contrast measurement first to the corre¬ sponding full value of the phase shift rather than to the measurand x. The possible methods however have in common that the interference contrast (A) measurement is used to provide a coarse but unambiguous measurement of x, and combined with the ambiguous but highly accurate phase shift principal value (cp) measurement, an unambiguous and highly accurate measurement of x is obtained. Any method that simultaneously measures the phase shift principal value φ and the interference contrast A can be used for the implementation of this invention. Next, two examples of such methods are presented.
The first example is based on the polarimetric method with FIG. 2 showing the schematic of a typical sen¬ sor using polarimetric quadrature detection, where a static optical phase shift bias is introduced between two detec¬ tion channels. The components as shown are a light source 20, an input polarizer 21, a sensing element 22 (which in use would be exposed to the measurand) , a first beamsplit¬ ter 23-1, a second beamsplitter 23-2, a quarter wave retarder (QWR) 24, a first output polarizer 25-1, a second output polarizer 25-2, and three optical power detectors 26-1, 26-2, 26-3. The beam path of the wave is shown as hashed line(s) . Three detectors are connected to the out¬ put beam path: the first detector 26-1 with no polarizer attached, the second detector 26-2 with the linear output polarizer 25-1, and the third detector 26-3 with a quarter- wave retarder 24 and the linear output polarizer 25-2. The optical signals measured at the three detectors are, up to some proportionality constants, respectively,
[2]
II io
12 = Io/2 [1 + Α(τ) cos (φ) ]
13 = Io/2 [1 + Α(τ) sin (φ) ] , where Io represents the total power emitted by the light source 20, and φ is the relative phase shift at the beamsplitter 23-1.
In a first part (or phase shift detection unit) 31-1 of a signal processing unit 31 at least some of the measured signals are combined to derive a first measure representative of the principal value of the phase shift. In a second part 31-2 (or contrast detection unit) of the signal processing unit 31 at least some of the measured signals are combined to derive a second measure representa- tive of the cross-correlation or autocorrelation function A. To such ends, a number of signal processing recipes exist. For example, the signal processing unit 31 can form a vector or complex variable Y in the following way [3] Y = (2I2/I1 - 1) + i (2I3/Il - D = A exp(i φ )
Using this definition, the phase shift princi¬ pal value cp defined in (-n, n] is obtained as the argument or phase of Y, and the interference contrast A equals the absolute value of Y.
It can be further shown that the detection scheme as represented by FIG. 2 also works without an exact 90° phase bias (although preferred) and only requires hav¬ ing two polarimetric channels that have a certain known relative phase difference other than 0° or 180°. Indeed, if for example the third detector channel with the detector 26-3 has an additional phase offset δ, a complex variable can be calculated as [3']
Y = (1 -i tan 5) [(2/3//!) - 1] + i [ _2I3/I1) - l]/cos5 = Ae ^ with the argument and absolute value of Y still yielding the phase shift principal value and the interference con¬ trast. In this case, the QWR element 24 can be replaced by any phase retarder other than full and half-wave re- tarders .
Another option to measure Io could be having detectors measuring both antiphase outputs from a polariz¬ ing beamsplitter (replacing polarizer 25-1 or 25-2) in at least one of the two polarimetric detector channels as represented by detectors 26-2 and 26-3. The sum of the two antiphase outputs would then yield the total light power ∑ο· It should further be noted that the Io measure¬ ment is not required in cases where the total light power is known and/or kept constant, or can be readily monitored or controlled through electronic means or by using other detectors located before the optical sensing subsystem.
As a second example of a method that measures the phase shift principal value and the interference con- trast simultaneously, FIG. 3 shows an example of the in¬ vention using an active phase modulation scheme. The sensor shown uses the modulation phase detection (MPD) principle, often implemented in a "non-reciprocal phase modu¬ lation" scheme and commonly used in fiber-optic gyroscopes and current sensors. The co-owned patent US7911196 cited as reference [9] above describes for example a voltage sensor incorporating a voltage sensing element (or several such elements), a 45° Faraday rotator, and the MPD modula¬ tion and detection electronics. It is important to note that the MPD technique has previously only been used to measure the phase shift principal value. But as shown in the following, the same measurement scheme can be extended to simultaneously yield the interference contrast.
The basic components for a sensor using the MPD detection scheme as shown in FIG. 3 (and using where ap¬ propriate the same numerals as in FIG. 2 for components with the same or similar function) are a light source 20, an input polarizer 21, a sensing element 22 (which in use would be exposed to the measurand) , an output polarizer 25, and a detector 26. The beam path of the wave is shown as dashed line(s) . A birefringent phase modulator 30 is also included in the beam path. The phase modulator 30 and the detector 26 are coupled through a signal processing unit 31 for performing the signal analysis as described in the following.
The birefringent phase modulator 30 is opti¬ cally connected in series with the sensing medium 22, so that an additional optic phase shift modulation P(t) can be added to the phase shift to be measured. The detector 26 measures the modulated optical power after the linear polarizer 25. The modulated detector signal can be written as
[4] I(t) = I0/2 [1 + Α(τ) cos (φ + p(t))]. with Io representing the total power of the source, φ being the relative phase shift at the center wavelength without the additional modulation, and Α(τ) being the interference contrast .
As in the example of FIG. 2 above, the first part (or phase shift detection unit) 31-1 of the signal processing unit 31 analyzes the detected signal I (t) to derive a first measure representative of the phase shift principal value cp of the relative phase shift φ; the second part (or contrast detection unit) 31-2 of the signal pro¬ cessing unit 31 analyzes the detected signal I (t) to derive a second measure representative of the cross-correlation or auto-correlation function A. Again, diverse signal modulation and processing schemes exist. In one version of the MPD scheme, a sinusoidal modulation P(t) = Psin(Qt) is imposed by the phase modulator 30. The detector signal of eq. [4] can be written in a Fourier expansion as a series of harmonics at different orders k of the modulation frequency Ω, i.e.,
[4' ] I (t) = ∑[Bk cos (kQt + ξ]<) ] with the first three harmonic amplitudes Bk and phases ξ¾ being
Bo = (Io / 2) [1 + Α(τ) J0 (β) cos (φ) ] , ξο = 0
Bi = Io * Α(τ) Ji(p) sin^), ξι = π/2
Figure imgf000020_0001
using Bessel functions of the first kind Jk(P) · The signs of the harmonic components can be ascertained by comparing the phases of the harmonic components with that of the excitation waveform.
A vector or complex number can be formed from the above representation which allows to derive the phase shift principal value cp and the interference contrast A from the detected harmonic amplitudes Bk.
[5] Y = B2 / J2(P) + i Bi / Ji(P)= Io Α(τ) exp(i φ)
As in the example of FIG. 2 above, the phase shift principal value cp can be calculated as the argument of Y, and the interference contrast A equals its absolute value divided by Io. The total power Io can be calculated as Io = 2Bo - Jo (P) abs (Y) cos(arg(Y)) .
A preferred modulation amplitude is = 1.84 rad where Ji (P) has its first maximum; another preferred amplitude is P = 2.63 rad where Ji (P) and J2 (P) are equal. However, in principle for the MPD method to work, the phase modulation amplitude P can be arbitrarily small. Furthermore, it is known that the modulation amplitude P can also be calculated from the measured harmonic amplitudes, e.g., for the purpose of stabilizing the amplitude. Instead of a sinusoidal modulation, other waveforms, in particular a square wave modulation, may be used. Further details of open-loop MPD signal processing can be found in the refer- ences [6, 21] .
As is explained earlier, a suitable unambiguous measurement range is within a region where the cross-cor¬ relation function Α(τ) is monotonous and the slope |dA(x)/dx| is preferably as large as possible (i.e. around the steepest point) . In FIG. IB, this region is shown as the area 14 between two vertical dotted lines. And to ensure that the target measurement range of the sensor falls into this region, it is possible to add a pre-deter- mined group delay offset by inserting a (static) group delay bias element 40 into the optical path in series with the sensing element 22, as shown in FIG. 4. It should be noted that the group delay bias element 40 can be inserted at any point between the input polarizer 21 and the point where the waves interfere.
The detection scheme as represented in FIG. 4 by a general detection unit 41 can be a polarimetric scheme or an MPD scheme as described above, or any other detection scheme that simultaneously detects the phase shift princi¬ pal value and the interference contrast. As already de¬ scribed in connection with FIG. IB, the group delay bias of the static element 40 and the coherence time of the light source 20 should be selected such that the target measurement range of the measurand x maps to a group delay range τ(χ) that is contained within a monotonic portion of the Α(τ) function with a large slope |dA(x)/dx| . After the sensor component selection or assembly, the interference contrast function A(x) = A(x(x)) can be calculated or cal¬ ibrated for the particular sensor, and may be saved in a tabulated or functional form for the one-to-one conversion between A and the period counter n or the measurand x.
As mentioned above, the removal of periodwise ambiguity as described can be applied to many types of interferometric sensors. Due to the lack of comparable alternatives, however, it is particularly suited to ex¬ tending the measurement range of DC electric field or volt¬ age sensors as described for example in reference [1] .
In these sensors, a low-coherence light source
(e.g., SLED source, 1310 nm center wavelength, 40 nm FWHM bandwidth) is used to produce interference signals, the auto-correlation of which changes significantly from one phase period to another. An electro-optic crystal is used as the sensing medium to convert the voltage to be measured to a relative phase shift between the orthogonal polariza- tion modes in the crystal. An electro-optic crystal with¬ out natural birefringence (such as Bi4Ge3012, BGO) is pre¬ ferred. An electro-optic waveguide or fiber can also be used as the voltage sensing medium. The end faces of the BGO crystal (cut perpendicular to the [001] direction) are electrically connected to the electrodes that provide the voltage drop.
Hence, in comparison to some sensor designs found in prior art, the full voltage (not a fraction thereof) is applied across the sensing crystal. The volt¬ age is applied in the longitudinal direction of the crys¬ tal, thus the path integral of the electric field in this direction (i.e. the applied voltage) is measured. There¬ fore, the voltage measurement is independent of the inter- nal charge redistribution in the crystal.
In an example of a polarimetric detector for voltage, elements of FIG. 2 and FIG. 4 are combined (and hence the same numerals are used where appropriate) as illustrated in FIG. 5.
FIG. 5 shows a design of an extended-range DC voltage sensor where the sensing element is used in trans¬ mission. Three detector channels 26-1, 26-2 and 26-3 yield the total light power and two quadrature polarimetric sig¬ nals, respectively, as described above (see eq. [2]). A birefringent crystal with static relative group delay (such as a crystalline quartz waveplate) is inserted between the input polarizer 21 and the second beamsplitter 23-2 as a group delay bias element 40, as discussed above. The use of a group delay bias element 40 is preferred, but may not always be needed if the polarity of the voltage to be measured is known and hence the sign of the slope of curve 12 in FIG. 1A and IB in the measurement range is known. If the voltage polarity is unknown, the birefringent crystal 40 serves to extend the unambiguous measurement range over both polarities. The birefringent crystal may also be omitted if an electro-optic crystal with natural birefrin¬ gence is employed as sensing element 22 that generates the desired group delay bias. To reduce the temperature de¬ pendence of the group delay bias, the group delay bias element 40 may be a composite optic made from two crystals in series, either with parallel optical axes, if their thermo-birefringence coefficients are of opposite signs, or with swapped optical axes, if their thermo-birefringence coefficients are of the same sign. Additionally, the tem¬ perature of the group delay bias element can be measured, whereby its temperature-dependent group delay and phase shift change can be compensated in signal processing.
The axes of the input polarizer 21 and the two output polarizers 25-1 and 25-2 are aligned at ±45°, whereas the axes of the group delay bias element 40 and the QWR 24 are aligned parallel to the electro-optic axes of the sensing element 22. The measurand x is in this example the voltage V applied between the end faces of the BGO crystal with the [001] crystal axis oriented in direc¬ tion of the light wave propagation. Preferably, the beamsplitters should be aligned with their axes at 45° relative to the electro-optic crystal axes, in order to equalize any possible phase shift the two polarization waves may experience from the beamsplitter. Any residual system phase shifts, for example from the beamsplitter or from the residual natural birefringence of the electro- optic crystal, can be characterized and taken out by cal¬ ibration. The residual birefringence of BGO, if any, can also be reduced by combining two BGO crystals in series, with antiparallel [001] axes and the x/y axes rotated 90° against each other. In this arrangement, the electro-optic phase shifts add up, while the intrinsic birefringence cancel, leading to a better zero-point stability.
In FIG. 6, an apparatus similar to FIG. 5 is described where use is made of a different manner of meas¬ uring the total power as already described above in con- nection with eq. [2] . Only one birefringence-free beamsplitter 23-2 is used, and two detector channels with the detectors 26-1 and 26-2 are connected to the two anti¬ phase outputs of polarizing beamsplitter 60. The total optical power is given by the sum of powers at the detectors 26-1 and 26-2, while detector 26-1 (or 26-2) and detector 26-3 constitute a pair of quadrature polarimetric channels.
Instead of measuring the total optical power at the output end of the BGO crystal, one can also monitor the total light power before the light goes into the sens¬ ing crystal. One can even rely on the internal monitor of the light source 20 to track power change or maintain a stable optical power output. However, such schemes would not be able to deal with optical loss changes in the path from the light source to the polarimetric detectors, which can be important in a practical sensor, especially if fiber optics are used to deliver light from the light source to the sensing crystal.
The polarimetric voltage sensors can also be designed in a reflective configuration, wherein the elec¬ tro-optic phase shift as induced by the measurand would be doubled. Examples illustrating such a configuration are shown in FIGs. 7A and 7B, where a reflecting optic 70 is placed at one end of the crystal, and all the other optical elements are located at the other end. Other elements are identical or similar to those described already when re- ferring to FIG. 5 above.
The reflecting optic 70 may be a flat/curved mirror, a roof mirror, a corner-cube retroreflector, or simply a reflective thin film coating deposited on the end face of the crystal. The reflection at the reflecting optic should ideally preserve the polarization state of the light without rotation or polarization-dependent phase shift. Any residual phase shift from reflection can also be characterized and taken out by calibration. Preferably, the light source and detector end of the crystal is con- nected to the ground potential, and the reflector end to the high voltage, in order to keep the light source and the detectors at the ground potential. FIGs. 8 and 9 illustrate examples of an ex¬ tended-range DC voltage sensor in connection with a MPD scheme. As described above (see eq. [4']), the MPD scheme is another approach to simultaneously measure the phase shift and the interference contrast. However, an MPD-based voltage sensor in the transmissive configuration, similar to the one depicted in FIG. 3, is not suited for most practical applications, because the intrinsic phase shifts in the phase modulator 30 and the connecting polarization- maintaining fibers are generally very sensitive to temper¬ ature and/or stress variations. Therefore, the output of a transmissive MPD-based voltage sensor is easily affected by environmental disturbances.
On the other hand, robust MPD sensors can be designed based on a reciprocal optical design, whereby the two interfering waves either counter-propagate in a loop (e.g. in the case of a fiber-optic gyroscope) or retrace the optical path upon reflection with swapped orthogonal polarizations (e.g. in the case of a reflective fiber-optic current sensor) . In such designs, the intrinsic phase shifts of the phase modulator and the interconnecting PM fibers automatically cancel along the reciprocal path (and hence the temperature dependence thereof) , while the phase modulation and the measurand-induced phase shift double. As explained already in the introduction, this is usually referred to as "non-reciprocal phase modulation."
The co-owned patent US7911196 (ref. [9]) de¬ scribes a non-reciprocal phase modulation voltage sensor incorporating a voltage sensing element (or several such elements), a 45° Faraday rotator, MPD modulation and de¬ tection electronics. The sensor in that patent is only capable of unambiguously measuring a DC electro-optic phase shift in the range of -π to +π because of the period wise ambiguity problem of the phase shift. However, as is shown above, the MPD signal processing scheme can be extended to yield also the interference contrast Α(τ(χ)), in addition to the phase shift. Therefore, with a low-coherence light source, the sensors described for example in US7911196 can be used to unambiguously measure a DC voltage in an ex¬ tended range, employing the contrast-based disambiguation methods and apparatus as described herein.
All embodiments in Patent US7911196 can benefit from this invention. To demonstrate how the inventions in the patent can be extended beyond the 2π measurement range, a suitable adaptation to an example described in US7911196 is shown in FIG. 8 using elements already described when referring to FIG. 3 above. Here, a low-coherence light source 20 and a photodetector 26 are connected via a 1x2 fiber-optic coupler to the sensing element 22. The light first passes through a linear polarizer 21, enters into a polarization maintaining (PM) fiber 80, and is coupled into both axes of a fiber-optic birefringent phase modulator 30 through a 45° splice 81. The light is then coupled out of a collimator 82, passes through a 45° Faraday rotator 83, a group delay bias element 40, and enters the sensing el¬ ement 22 (BGO crystal along the [001] axis), the ends of which are electrically connected to the voltage supply V. The crystal end faces can be coated with a transparent conductive electrode layer. The light is reflected back into the sensing medium, the group delay bias element, the Faraday rotator and the PM fiber in sequence, by a reflect- ing optic 70 at the far end of the sensing medium 22. The reflecting optic may be a flat/curved mirror, a roof mir¬ ror, a corner-cube retroreflector, or simply a reflective thin film coating deposited on the end face of the crystal. In this example the reflection at the reflecting optic should preserve the polarization state of the light without rotation or polarization-dependent phase shift.
A birefringent crystal acting as static group- delay bias element 40 (such as a crystalline quartz wave- plate) is inserted between the Faraday rotator 83 and the reflecting optic 70, in order to adjust the group-delay bias, as discussed when referring to FIG. IB above. The optical axes of the BGO crystal and the birefringent crys¬ tal are to be aligned at 45° relative to the axes of the PM fiber leading to the collimator 82.
Due to the two-time 45° Faraday rotation in the reciprocal path, the interfering orthogonally polarized waves swap their polarizations as they reenter the PM fiber and the birefringent phase modulator 30, thereby canceling the associated intrinsic phase shifts and eliminating the temperature dependence thereof. The 45° splice 81 and the polarizer 21 on the return path allows the coherent mixing of the polarization waves, and the photodetector 26 measures the resulting light power.
A signal processing and control unit 31 con¬ trols the phase modulation waveform and measures the light power at the photodetector. It calculates the phase shift principal value and the interference contrast, for example according to the procedure described in eq. [4'] . Finally, the phase shift principal value and the interference con¬ trast are combined to yield an unambiguous measurement of the voltage.
Any residual system phase shifts, for example from the beamsplitter or the reflecting optic or from the residual natural birefringence of the BGO crystal, can be characterized and taken out by calibration.
A loop configuration where the reflecting optic
70 of FIG. 8 is replaced with a Y-type phase modulator 30 and another set of collimator 82' and Faraday rotator 83', is shown in FIG. 9. Due to the Faraday rotators 83 and 83' , the waves are polarized along orthogonal electro-optic axes of the sensing medium 22 in the two counter-propagat¬ ing directions whereas they are polarized along the same axis in the PM fibers 80. An advantage over the reflective configuration of FIG. 8 is that there are more degrees of freedom in the alignment of the optical components, which may simplify the light coupling from electro-optic crystal back into the PM fiber 80. A possible drawback of the design of FIG. 9 is the larger number of components. While some preferred embodiments of the inven¬ tion are shown and described above, it is to be understood that the invention is not limited thereto but may be oth¬ erwise variously embodied and practiced within the scope of the following claims.
While the examples above describe sensors based on optical interferometry, it should be appreciated that this invention can be applied to all types of interferom¬ eters. For example, an interferometer in the RF or other electro-magnetic radiation bands can also benefit from the same unambiguous extension of the measurement range. The invention is also not limited to electro-magnetic waves. Any interferometer involving waves, be it acoustic, density, or other types of waves, can also benefit in the same way.
The low-coherence source can either be a light source of broad bandwidth, or a synthesized source made up from multiple sources at different wavelengths. The shape of its spectrum is not important. The inverse of the overall frequency bandwidth should be on the same order of the group delay span corresponding to the width of the desired unambiguous measurement range of the sensor.
Whilst designs of a DC voltage sensor are de¬ scribed as examples, this invention can also be easily applied to a fiber optic current sensor, a fiber gyroscope, or other type of interferometric sensors. However, it is in particular advantageous for any DC interferometric sen¬ sors covering a large range where an absolute zero refer¬ ence is not available. REFERENCES CITED
[1]G. A. Massey, D. C. Erickson, and R. A.
Kadlec, "Electromagnetic field components: their measure¬ ment using linear electrooptic and magnetooptic effects, " Appl. Opt., vol. 14, pp. 2712-2719, 1975.
[2]K. Bohnert and J. Nehring, "Method and de- vice for the optical determination of a physical quan¬ tity, " US5715058, 1998.
[3]R. C. Miller, "Electro-optical voltage measuring system incorporating a method and apparatus to derive the measured voltage waveform from two phase shifted electrical signals," US Patent US4904931, 1990.
[4]R. C. Miller, "Method of deriving an AC waveform from two phase shifted electrical signals, " US Patent US5001419, 1991.
[5]K. Kurosawa, S. Yoshida, E. Mori, G.
Takahashi, and S. Saito, "Development of an optical in¬ strument transformer for DC voltage measurement, " Power Delivery, IEEE Transactions on, vol. 8, pp. 1721-1726, 1993.
[6]H. Lefevre, The Fiber-Optic Gyroscope: Ar- tech House, 1993.
[7]K. Bohnert, P. Gabus, J. Nehring, and H. Brandle, "Temperature and vibration insensitive fiber-op¬ tic current sensor, " Journal of Lightwave Technology, vol. 20, pp. 267-276, 2002.
[8]K. Bohnert, P. Gabus, J. Nehring, H.
Brandle, and M. G. Brunzel, "Fiber-Optic Current Sensor for Electrowinning of Metals," J. Lightwave Technol., vol. 25, pp. 3602-3609, 2007.
[9]K. Bohnert, "Optical voltage sensor," US Patent US7911196B2, 2011.
[10] C. Zhang, X. Feng, S. Liang, and C.
Li, "Quasi-reciprocal reflective optical voltage sensor based on Pockels effect with digital closed-loop detec¬ tion technique," Optics Communications, vol. 283, pp. 3878-3883, 2010.
[11] 0. Beierl, T. Bosselmann, and M.
Willsch, "Method and arrangement for optically detecting an electrical variable," WO9805975A1, 1998.
[12] M. Stanimirov, U. Meier, K. Bohnert, and J. Glock, "Method of measuring a voltage and voltage sensor," EP1179735A1, 2002.
[13] J. Brooks, R. Wentworth, R.
Youngquist, M. Tur, K. Byoung-Yoon, and H. J. Shaw, "Coherence multiplexing of fiber-optic interferometric sen¬ sors, " Lightwave Technology, Journal of, vol. 3, pp.
1062-1072, 1985.
[14] S. A. Al-Chalabi, B. Culshaw, and D.
E. N. Davies, "Partially Coherent Sources in Interfero- metric Sensors, " in 1st International Conference on Opti¬ cal Fibre Sensors, London, England, 1983, pp. 132-135.
[15] T. Bosselmann and R. Ulrich, "High- Accuracy Position-Sensing With Fiber-Coupled White-Light Interferometers, " in 2nd International Conference on Op¬ tical Fiber Sensors, Stuttgart, Germany, 1984, pp. 361- 364.
[16] R. Ulrich, "Method for the measure- ment of lengths and displacements," US4596466, 1986.
[17] G. Beheim, K. Fritsch, and R. N.
Poorman, "Fiber-linked interferometric pressure sensor, " Review of Scientific Instruments, vol. 58, pp. 1655-1659, 1987.
[18] G. Beheim, "Fibre-Optic Thermometer
Using Semiconductor-Etalon Sensor, " Electronics Letters, vol. 22, pp. 238-239, 1986.
[19] F. Farahi, T. P. Newson, J. D. C.
Jones, and D. A. Jackson, "Coherence multiplexing of re- mote fibre optic Fabry-Perot sensing system, " Optics Com¬ munications, vol. 65, pp. 319-321, 1988. [20] A. Koch and R. Ulrich, "Displacement sensor with electronically scanned white-light interfer¬ ometer, " in Fiber Optic Sensors IV, 1990, pp. 126-133.
[21] R. C. Youngquist, S. Carr, and D. E.
N. Davies, "Optical coherence-domain reflectometry : a new optical evaluation technique," Opt. Lett., vol. 12, pp. 158-160, 1987.
[22] K. Takada, I. Yokohama, K. Chida, and
J. Noda, "New measurement system for fault location in optical waveguide devices based on an interferometric technique," Appl . Opt., vol. 26, pp. 1603-1606, 1987.
[23] P. J. Caber, " Interferometric pro¬ filer for rough surfaces," Appl. Opt., vol. 32, pp. 3438- 3441, 1993.
[24] D. Huang, E. Swanson, C. Lin, J.
Schuman, W. Stinson, W. Chang, M. Hee, T. Flotte, K.
Gregory, C. Puliafito, and a. et, "Optical coherence to¬ mography," Science, vol. 254, pp. 1178-1181, November 22, 1991 1991.
[25] A. F. Fercher, C. K. Hitzenberger, G.
Kamp, and S. Y. El-Zaiat, "Measurement of intraocular distances by backscattering spectral interferometry, " Optics Communications, vol. 117, pp. 43-48, 1995.
[26] R. Jones, R. J. Welford, and M. S.
Hazell, "Interferometer having a short coherence length light source and means for identifying interference fringes," US5301010, 1994.
[27] S. M. Bennett and R. B. Dyott, "DSP
Signal Processing for Open Loop Fiber Optic Sensors, " US Patent US6429939B1, 2002. LIST OF REFERENCE SIGNS
normalised detector signal 11
interference contrast 12
principal value of the phase shift 13
area of strongly varying interference contrast 14 wave or light source 20
input polarizer 21
sensing element 22
beamsplitter 23-1, 23-2
quarter wave retarder (QWR) 24
output polarizer 25, 25-1, 25-2
wave or optical detector 41,26, 26-1, 26-2,26-3 phase modulator 30
signal processing unit 31
phase shift detector 31-1
contrast detector 31-2
group delay shifting element 40
polarizing beamsplitter 65
reflecting optic 70
polarization maintaining (PM) fiber 80
45° splice 81
collimator 82,82'
Faraday rotator 83,83'

Claims

Claims
1. An interferometric sensor comprising a sensing element (22) whereby a measurand induces a relative phase shift between two waves passing through the sensing element, at least one detector (41,26) measuring an inter¬ ference signal between the two waves, and further compris¬ ing a phase shift detection unit (31-1) having as input the interference signal and determining a first measure representative of the principal value (φ, 13) of the rela- tive phase shift and a contrast detection unit (31-2) hav¬ ing as input the interference signal for determining a second measure (A, 12) representative of the cross-corre¬ lation between the two waves, and further a processing unit (31) for converting the first and second measures to a measurand value.
2. The sensor of claim 1, wherein the second measure is a parameter relating to the interference con¬ trast or fringe visibility.
3. The sensor of claim 1 or 2, wherein the signal processing unit (31) matches the second measure to a pre-determined function or map of parameter values rep¬ resenting the cross-correlation function (A) between the two waves across the measurement range of the sensor.
4. The sensor of any of the preceding claims, wherein the signal processing unit (31) uses the second measure to determine a period counter n.
5. The sensor of any of the preceding claims, further including one or more sources (20) generating two waves, the cross-correlation (A) of which varies strongly and monotonically with the relative group delay (τ) between the two waves within the measurement range of the sensor.
6. The sensor of any of the preceding claims wherein
|Α(φ) - Α(φ ± 2π) |/ Α(φ) > 0.001, with A being said second measure and φ being said phase shift.
7. The sensor of any of the claims 5 or 6, wherein the two waves are generated by the same source (20), whereby the cross-correlation function (A) is the auto-correlation function of the wave generated by the source (20) .
8. The sensor of any of the claims 5 to 7, with the source (s) (20) having a spectrum covering a continuous band, or a spectrum consisting of multiple disconnected bands or disconnected spectral lines.
9. The sensor of any of the preceding claims, further including a group delay bias element (40) to shift the measurement range of the sensor into a region (14) of monotonic variation of the cross-correlation function (A) with the relative group delay (τ) between the two waves.
10. The sensor of claim 9, wherein the group delay bias element (40) is a birefringent material, a bi- refringent waveguide, a polarization-maintaining optical fiber, or a combination thereof.
11. The sensor of any of the preceding claims, wherein the measurement range of the sensor includes the region where the gradient of the cross-correlation function (A) with regard to the group delay (τ) (|dA/dx|) has a maximum value.
12. The sensor of any of the preceding claims, further comprising at least two interference channels with at least two detectors (26-2, 26-3) and at least one static optical phase bias element (24) in at least one of the interference channels, and wherein the signal processing unit (31) combines the interference signals of the at least two interference channels to form the first measure (arg Y) and the second measure (abs Y) .
13. The sensor of claim 12, wherein the phase bias difference between the interference channels is within (90° ± 40°) + 180° x i, where i is an integer including zero.
14. The sensor of claim 12 or 13, further comprising an additional signal channel with a detector (26- 3) measuring a quantity representative of the total power of the waves before interference, or, alternatively, at least one additional channel in antiphase with any of the interference channels, and wherein the signal processing unit (31) combines the interference channel signals and the additional channel signal (s) to compute the first and the second measures independent of total power or loss variation .
15. The sensor of any of the preceding claims 1 to 11, further comprising an optical phase modulation element (30) adding a phase modulation to the relative phase shift between the two waves and at least one detector channel (26) for measuring an interference signal, and wherein the signal processing unit (31) analyzes the mod¬ ulated interference signal to form the first measure (arg Y) and the second measure (abs Y) .
16. The sensor of claim 15, wherein the signal processing unit (31) operates in closed-loop control with a feedback signal representative of the relative phase shift principal value.
17. The sensor of any of the preceding claims, wherein the two waves are light waves, in particular or¬ thogonal linearly polarized light waves or left and right circularly polarized light waves.
18. The sensor of any of the preceding claims, wherein the measurand is an electric voltage or an electric field strength, and the relative phase shift inside the sensing element (22) is responsive to the voltage applied between two of its faces.
19. The sensor of claims 17 and 18, wherein the sensing element (22) comprises a bulk electro-optic crys¬ tal, or an electro-optic fiber, in particular a crystalline electro-optic fiber or a poled electro-optic fiber, or an optical fiber and piezo-electric material.
20. The sensor of claim 19, comprising at least one light source (20), at least one linear polarizer (21), an optical phase modulator (30), a Faraday rotator (83,83') with a rotation angle within (45° ± 25°) + 90° χ k, k being an integer, an electro-optic sensing element (22), and a reflecting optic (70).
21. The sensor of claim 17, wherein the sensing element (22) comprises a magneto-optic material, or an op¬ tical fiber.
22. A method of performing an interference measurement comprising the steps of:
- generating at least two waves;
- determining a function or a map of parameter values representative of the cross-correlation function between the said two waves;
- exposing a sensing element (22) to a measurand which induces a relative phase shift between the two waves passing through the sensing element; - letting the two waves interfere;
- simultaneously determining for a value of the measurand (x) a first measure representative of the prin¬ cipal value (φ, 13) of the relative phase shift and a second measure (A, 12) representative of the cross-correlation between the two waves; and
- combining the first and second measures with the pre-determined function or map of parameter values representative of the cross-correlation function and de- termining a corresponding measurand value.
23. The method of 21, wherein the second meas¬ ure representative of the cross-correlation function (A) between the two waves is a parameter relating to the in- terference contrast or fringe visibility.
24. The method of 21 or 22, wherein the func¬ tion or the map of parameter values representative of the cross-correlation function is used to convert the second measure to a period counter n.
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105953817A (en) * 2016-04-26 2016-09-21 哈尔滨工程大学 Method for assembling core sensitive optical path of optical fiber gyro
EP3290931A1 (en) 2016-09-02 2018-03-07 ABB Schweiz AG Interferometric voltage sensor with error compensation
EP3290870A1 (en) 2016-09-02 2018-03-07 ABB Schweiz AG Closed-loop interferometric sensor using loop gain for determining interference contrast

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10712180B2 (en) * 2016-08-11 2020-07-14 The Charles Stark Draper Laboratory, Inc. Segmented poled optical fiber for fiber optic sensor and phased array
CN111157100B (en) * 2020-01-02 2022-05-20 河海大学常州校区 All-fiber sensing positioning system and positioning method based on feedback
CN111474553B (en) * 2020-06-22 2020-11-27 深圳市汇顶科技股份有限公司 Time-of-flight ranging method and device
WO2021258236A1 (en) * 2020-06-22 2021-12-30 深圳市汇顶科技股份有限公司 Time of flight ranging method and apparatus
DE102020120533A1 (en) 2020-08-04 2022-02-10 Technische Universität Dresden Device and method for determining a measured value
US20240061226A1 (en) * 2021-01-12 2024-02-22 The Board Of Trustees Of The University Of Illinois Multiphase optical coherence microscopy imaging

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1994018523A1 (en) * 1993-02-01 1994-08-18 Zygo Corporation Method and apparatus for the rapid acquisition of data in coherence scanning interferometry
WO2003093759A2 (en) * 2002-05-02 2003-11-13 Zygo Corporation Phase gap analysis for scanning interferometry
US20060158659A1 (en) * 2005-01-20 2006-07-20 Xavier Colonna De Lega Interferometer for determining characteristics of an object surface

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3044183A1 (en) 1980-11-24 1982-06-24 Reinhard Dipl.-Phys. Dr. 7250 Leonberg Ulrich METHOD FOR OPTICALLY MEASURING LENGTHS AND LENGTH CHANGES AND ARRANGEMENT FOR IMPLEMENTING THE METHOD
US5001419A (en) 1988-09-28 1991-03-19 Abb Power T & D Company Inc. Method of deriving an AC waveform from two phase shifted electrical signals
US4904931A (en) 1988-09-28 1990-02-27 Westinghouse Electric Corp. Electro-optical voltage measuring system incorporating a method and apparatus to derive the measured voltage waveform from two phase shifted electrical signals
GB8903725D0 (en) 1989-02-18 1989-04-05 Cambridge Consultants Coherent tracking sensor
RU2032181C1 (en) * 1991-02-05 1995-03-27 Киселев Владимир Васильевич Fiber-optic electric-field strength and voltage meter
US5271034A (en) * 1991-08-26 1993-12-14 Avion Systems, Inc. System and method for receiving and decoding global positioning satellite signals
DE4416298A1 (en) 1994-05-09 1995-11-16 Abb Research Ltd Method and device for optically determining a physical quantity
WO1998005975A1 (en) 1996-08-01 1998-02-12 Siemens Aktiengesellschaft Method and arrangement for optically detecting an electrical variable
DE19701221C1 (en) * 1997-01-16 1998-04-23 Abb Research Ltd Method of temperature compensation of measurement signals of fibre optical sensors
US6301400B1 (en) * 1998-11-12 2001-10-09 Nxtphase Technologies Srl Fiber optic current sensor having rotation immunity
US6429939B1 (en) 2000-07-13 2002-08-06 Kvh Industries, Inc. DSP signal processing for open loop fiber optic sensors
DE10039455A1 (en) 2000-08-12 2002-02-21 Abb Patent Gmbh DC converter
US6946827B2 (en) * 2001-11-13 2005-09-20 Nxtphase T & D Corporation Optical electric field or voltage sensing system
US7355716B2 (en) * 2002-01-24 2008-04-08 The General Hospital Corporation Apparatus and method for ranging and noise reduction of low coherence interferometry LCI and optical coherence tomography OCT signals by parallel detection of spectral bands
CN101600968B (en) 2006-12-22 2013-01-02 Abb研究有限公司 Optical voltage sensor
AU2009356476C1 (en) * 2009-12-11 2014-11-06 Abb Power Grids Switzerland Ag Fiber-optic current sensing using a sensor with exchangeable sub-modules
JP5437085B2 (en) * 2010-01-06 2014-03-12 株式会社ミツトヨ Optical fiber type magnetic field sensor
CN102520374B (en) * 2011-11-29 2014-04-09 北京航空航天大学 Optical fiber magnetic field sensor digital closed loop detection device with double modulation characteristics
CN102914256A (en) * 2012-09-29 2013-02-06 哈尔滨工程大学 Synchronous phase shifting interference detection device based on orthogonal double grating and detection method

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1994018523A1 (en) * 1993-02-01 1994-08-18 Zygo Corporation Method and apparatus for the rapid acquisition of data in coherence scanning interferometry
WO2003093759A2 (en) * 2002-05-02 2003-11-13 Zygo Corporation Phase gap analysis for scanning interferometry
US20060158659A1 (en) * 2005-01-20 2006-07-20 Xavier Colonna De Lega Interferometer for determining characteristics of an object surface

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105953817A (en) * 2016-04-26 2016-09-21 哈尔滨工程大学 Method for assembling core sensitive optical path of optical fiber gyro
EP3290931A1 (en) 2016-09-02 2018-03-07 ABB Schweiz AG Interferometric voltage sensor with error compensation
EP3290870A1 (en) 2016-09-02 2018-03-07 ABB Schweiz AG Closed-loop interferometric sensor using loop gain for determining interference contrast
CN107796300A (en) * 2016-09-02 2018-03-13 Abb瑞士股份有限公司 The close loop interferometric sensor for interfering contrast is determined using loop gain
US11193959B2 (en) 2016-09-02 2021-12-07 Hitachi Energy Switzerland Ag Interferometric voltage sensor with error compensation

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