WO2015100717A1 - 高稳定性双频激光器 - Google Patents

高稳定性双频激光器 Download PDF

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WO2015100717A1
WO2015100717A1 PCT/CN2014/070029 CN2014070029W WO2015100717A1 WO 2015100717 A1 WO2015100717 A1 WO 2015100717A1 CN 2014070029 W CN2014070029 W CN 2014070029W WO 2015100717 A1 WO2015100717 A1 WO 2015100717A1
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laser
mirror
frequency
cat
cavity
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French (fr)
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朱守深
苏华钧
刘维新
张书练
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Tsinghua University
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Tsinghua University
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/034—Optical devices within, or forming part of, the tube, e.g. windows, mirrors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08—Construction or shape of optical resonators or components thereof
    • H01S3/08018—Mode suppression
    • H01S3/08022—Longitudinal modes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08—Construction or shape of optical resonators or components thereof
    • H01S3/08059—Constructional details of the reflector, e.g. shape
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08—Construction or shape of optical resonators or components thereof
    • H01S3/08086—Multiple-wavelength emission
    • H01S3/0809—Two-wavelenghth emission
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/22—Gases
    • H01S3/2222—Neon, e.g. in helium-neon (He-Ne) systems

Definitions

  • the invention relates to the technical field of laser measurement, in particular to a high stability dual-frequency HeNe laser for a laser interferometer. Background technique
  • Dual-frequency lasers are an important application in today's precision measurement, such as laser interferometers, and are a core component of the entire interferometer system.
  • the former affects the measurement accuracy of the laser interferometer, which determines the measurement speed of the dual-frequency laser interferometer.
  • the dual-frequency laser itself needs to meet two requirements: The output has a large frequency difference and the frequency difference has high stability; The laser output power has high stability. Because the larger the frequency difference is, the higher the measurement speed of the interferometer is. The higher the frequency stability and the power stability of the laser can ensure high frequency stability.
  • the applied magnetic field utilizes the longitudinal Zeeman effect; the birefringent element is inserted into the laser cavity; the external force is applied to the laser cavity mirror to generate birefringence.
  • the laser frequency difference caused by the longitudinal Zeeman effect is generally about 3 MHz, and the corresponding laser interferometer measurement speed does not exceed the lm/si cavity.
  • the frequency difference generated by the birefringent element is too large. For hundreds of MHz, it is very difficult for subsequent circuit processing; while the frequency difference caused by applying the elastic force on the laser cavity mirror is poor, it will drift greatly with time. Therefore, in order to obtain a dual-frequency laser with a large frequency difference and good stability, it is necessary to improve on the basis of these technologies.
  • Laser power stability is critical to achieving high frequency stability, because commonly used frequency stabilization techniques, such as equal-intensity frequency stabilization, generate error signals by detecting light intensity signals, and feedback control the length of the laser cavity to make the frequency (or mode) Stabilize at the set intensity point.
  • frequency stabilization techniques such as equal-intensity frequency stabilization
  • the realization of laser frequency stabilization is based on the light intensity. Even when the laser frequency does not change, the power of the neon may change. If this change is non-common mode for the two-amplitude mode of the dual-frequency laser, the feedback loop will be misjudged, causing the laser frequency to deviate from the set operating point.
  • the reason for the random variation of the laser power may be: the variation of the laser pump source, the unevenness of the cavity due to heat or deformation caused by vibration, the mirror mirror deviates from the parallel state, the random fluctuation of the working medium gain atom, and the transition quantum noise.
  • the instability of the cavity formed by the two mirrors is the easiest to make the intensity variation of the two split modes of the laser inconsistent, which reduces the frequency stability.
  • the instability of the resonant cavity may also cause large fluctuations in the laser output power, which is also to be avoided as much as possible for the laser interferometer.
  • the present invention is directed to two difficulties in the above laser design process, and proposes a ⁇ -stability dual-frequency laser.
  • a ⁇ -stability dual-frequency laser By improving the design of the laser two-cavity mirror, the same can meet the requirements of laser output frequency difference and high output power stability. Yu Yu performance dual-frequency laser interferometer. Summary of the invention
  • the object of the present invention is to design a novel high-stability dual-frequency laser, which can overcome the shortcomings of the method of generating double-frequency of a common krypton laser on the one hand, and realize a high-stability frequency difference output; Improve the stability of the cavity and achieve high stability laser power output.
  • the invention provides a high-stability dual-frequency laser, which is characterized in that it mainly comprises three parts:
  • the laser is composed of a ⁇ laser gain tube and a resonant cavity formed by two cavity mirrors connected thereto, and the ⁇ gain laser tube is filled with a helium gas and a helium gas of a certain pressure ratio by a laser gain tube as a laser gain medium;
  • One of the mirrors is an optical glass mirror, one side of the mirror is plated with a high-reflectivity dielectric film of the laser wavelength, and the other side is plated with an antireflection dielectric film of the laser wavelength, and the mirror is One side of the plated anti-reflection dielectric film is sealed with one end of the laser gain tube;
  • Another of the cavity mirrors is a cat's eye retroreflector comprising a convex lens coated on both sides with respect to the laser wavelength-transmitting dielectric film and a concave mirror facing the laser with a high-reflectivity dielectric film at one end of the laser.
  • the side on which the high-reflection film is coated on the optical glass mirror generates permanent internal stress by external action such as mechanical punching or laser engraving.
  • the holes or lattices are located outside of the laser exit point, and the resulting permanent internal stress may vary depending on the size, position, depth, etc. of the holes or lattice.
  • the distance relationship between the convex lens and the concave mirror included in the cat's eye retroreflector is ensured by a sleeve having a length d, and the length of the sleeve d is equal to the focal length F of the convex lens, and the concave mirror position is ensured by a threaded pressure ring, and the optical glass window is sealed at an end of the cat's eye retroreflector away from the laser gain tube.
  • the optical glass mirror and the cat's eye retroreflector may be coupled to the krypton laser gain tube by kovar or glass frit.
  • Figure 2 is a schematic diagram of the composition of a dual-frequency HeNe laser with a cat's eye retroreflector
  • Figure 3 shows the structure of the cat's eye retroreflector. detailed description
  • the resulting laser frequency difference can cover an intermediate frequency difference range of several MHz to twenty Hz or even larger, which can make the measurement speed of the dual-frequency laser reach lm/ s from 7 m/s or more, which can meet the current processing and manufacturing. Measurement requirements for high speed sports machines.
  • a light from the laser The anisotropy is generated by the external force of the glass endoscope, which itself becomes a birefringent cavity mirror.
  • the laser forms two different physical cavity lengths in two orthogonal polarization directions, and the optical path difference is the magnitude of the stress birefringence in the birefringent cavity mirror.
  • a frequency difference that is, frequency splitting, occurs between the longitudinal modes of the same level that satisfy the resonance condition in the two orthogonal polarization directions.
  • ⁇ is the frequency difference of the dual-frequency laser
  • V is the laser frequency
  • £ is the average cavity length of the laser, which is the optical path difference introduced by the birefringence cavity mirror.
  • the magnitude of the stress birefringence on the laser cavity mirror determines the magnitude of the output frequency difference.
  • the force on the birefringence mirror is adjustable and stable.
  • the output frequency difference of the laser can be adjusted by applying an external force to the mirror through the mechanical structure, but it is difficult to maintain long-term stability due to the elastic structure, especially in the case of disturbances such as temperature changes and environmental vibrations.
  • One solution is to drill a blind hole of appropriate size and depth directly on the laser glass endoscope by a mechanical drill bit.
  • the local stress caused by the drilling changes the stress distribution of the laser output point on the cavity mirror, so that the stress is solidified inside the cavity mirror.
  • the laser can produce a stable frequency difference.
  • a further improvement is the application of laser engraving technology, in which a high energy beam is ablated inside the cavity mirror to produce a dot matrix, which can also produce the same effect as mechanical punching.
  • it can be adjusted by changing the external, size, depth, etc. of the processed hole or dot matrix.
  • the required frequency difference cannot be achieved at one time, it is also possible to process new holes or lattices in the orthogonal direction and re-adjust, ie change the number and distribution of the processed holes. Since the external elastic urging structure is not required, the stress distribution in the cavity mirror can be relatively stable. This is the principle of the frequency-diffused output produced by the ⁇ -stabilized dual-frequency laser proposed by the present invention.
  • the stability of the laser output power is also important to improve the frequency stability.
  • the instability of the laser cavity is one of the important factors that affect its power stability. For example, if the yttrium laser is deformed by heat, not only the cavity length changes, but also the bending deformation due to uneven heating, so that the resonant cavity mirror deviates from the original parallel position and directly causes the power fluctuation. Using such a power signal to control the laser cavity length, Reduce the frequency stability.
  • the invention proposes a method for improving the stability of the resonant cavity by using a cat's eye retroreflector as a cavity mirror of the laser, and the laser power can be stably outputted.
  • the basic principle of the cat's eye retroreflector is as follows
  • Fig. 1 As shown in Fig. 1, it is composed of a convex lens and a concave mirror, and the following relationship is satisfied between the two:
  • This anti-detuning characteristic of the cat's eye retroreflector is a common laser cavity mirror or concave surface. What the mirror does not have is also the physical basis for the cat's eye retroreflector to improve the stability of the laser as a laser cavity mirror.
  • the present invention proposes a design scheme of a high-stability dual-frequency laser.
  • the cat-eye retroreflector is configured as Figure 3 shows:
  • the laser is composed of a holmium laser gain tube 1 and an optical glass mirror 2 and a cat's eye retroreflector 3 connected thereto.
  • the neon gain laser tube 1 is filled with helium gas and helium gas of a certain gas pressure ratio as a laser gain medium; the optical glass mirror 2 and the cat's eye retroreflector 3 together constitute a resonant cavity of the laser, both of which may
  • the krypton laser gain tube 1 is connected by kovar or glass frit.
  • One side of the optical glass mirror 2 is plated with a laser wavelength high reflectivity dielectric film, and the other side is plated with a laser wavelength antireflection dielectric film; in order to make the stress birefringence on the mirror 2 be located in the laser cavity, One side of the plated antireflection dielectric film should be sealed with one end of the laser gain tube 1; the side of the mirror 2 coated with the high reflection film is permanently formed by mechanical punching or laser engraving lattice. Stress, the hole or lattice is located outside the laser exit point, and the resulting permanent internal stress may vary depending on the size, position, depth, etc. of the hole or lattice.
  • the cat's eye retroreflector 3 is composed of a convex lens 5 and a concave mirror 7.
  • the position of the concave mirror 7 is ensured by the threaded pressure ring 8; the optical glass window 9 is sealed at one end of

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)

Abstract

一种高稳定性双频氦氖激光器，其谐振腔一端为预置内应力的玻璃片腔镜（2），另一端为一个凸透镜（5）和一个凹面镜（7）组成的猫眼逆反射器（3）作为腔镜。玻璃片腔镜（2）上的内应力可以使激光谐振腔在两个本征方向上形成物理腔长不同的两个，从而产生双频激光输出；猫眼逆反射器（3）可以使激光谐振腔具有很好的抗失谐性，可以很大程度提高激光器输出功率的稳定度。这种氦氖激光器可用于高性能双频激光干涉仪等精密测量领域。

Description

高稳定性双频激光器 技术领域
本发明涉及激光测量技术领域，特别涉及一种激光干涉仪用的高稳定性双频氦氖激光器。 背景技术
双频激光器在现在精密测量， 如激光干涉仪中有重要的应用， 是整个干涉仪系统的核心 部件。 衡量激光干涉仪的性能有两项关键指标： 双频激光器的稳频精度和频差大小。 前者会 影响激光干涉仪的测量精度， 后者决定了双频激光干涉仪的测量速度。 要提髙激光干涉仪的 性能指标， 双频激光器自身需要满足两方面的要求： 输出较大频差并频差具有很高稳定性； 激光输出功率有很高的稳定性。 因为频差越大对应干涉仪的测量速度越大； 而激光器釆用等 光强点稳频， 频差和功率稳定性好可以保证高的稳频精度。
实际应用中， 激光器产生双频的方法有多种： 加磁场利用纵向塞曼效应； 激光谐振腔内 插入双折射元件； 在激光器谐振腔镜上施加外力产生双折射等。 这些方法还存在一些不足之 处， 如纵向塞曼效应产生的激光频差一般为 3MHz左右，对应的激光干涉仪的测量速度不超过 lm/si 腔内双折射元件产生的频差过大， 一般为上百 MHz , 给后续电路处理带来很大难度； 而在激光器腔镜上施加弹性加力产生的频差稳定性较差， 会随着时间有较大漂移。 因此， 要 获得较大频差并且稳定性好的双频激光器， 还需要在这些技术基础上进行改进。
激光功率稳定性对获得高稳频精度至关重要， 因为常用的稳频技术， 如等光强稳频等都 通过检测光强信号生成误差信号， 反馈控制激光谐振腔长使频率 （或模式） 稳定在设定的等 光强点上。 在这个闭环控制中， 实现激光稳频是以光强为参考依据的。 即使在激光频率未发 生变化时， 徼光功率可能发生变化。 如果这种变化对双频激光器的两振荡模式是非共模的， 就会使反馈环路发生误判， 从而使激光频率偏离设定的工作点。 造成激光器功率随机变动的 原因可能是： 激光泵浦源的变动， 谐振腔受热不均或受到震动而变形使腔镜偏离平行状态， 工作介质增益原子的随机波动、 跃迁量子噪声等。 其中由两腔镜构成的谐振腔的不稳定性最 容易使激光两分裂模式光强变化不一致， 使稳频精度下降。 而且谐振腔的不稳定性还可能造 成激光输出功率较大波动， 这对激光干涉仪而言也是要尽量避免的。
本发明针对上述激光器设计过程中的两个难点， 提出一种髙稳定性双频激光器， 通过改 进激光器两腔镜的设计， 能同吋满足激光输出频差和输出功率高稳定性的要求， 可用于髙性 能双频激光干涉仪中。 发明内容
本发明的目的在于设计一种新型的高稳定性双频激光器， 一方面能够克服通常氦氖激光 器产生双频的方法的不足， 实现高稳定性的频差输出； 另一方面能够很大程度上提高谐振腔 的稳定性， 实现高稳定性激光功率输出。
本发明提出一种高稳定性双频激光器， 其特征在于主要包括三部分：
激光器由氦氦激光增益管和与之相连接的两个腔镜形成的谐振腔构成， 所述的氦氖增益 激光管由激光增益管充一定气压比的氦气和氖气作为激光器增益介质；
其中一个所述腔镜为光学玻璃反射镜， 在所述反射镜一侧镀对所述激光器波长高反射率 介质膜， 另一侧镀对所述激光器波长增透介质膜， 并且所述反射镜镀增透介质膜的一侧与所 述激光增益管一端封接在一起；
另一个所述腔镜为猫眼逆反射器， 由一个两面镀对所述激光器波长增透介质膜的凸透镜 和正对所述激光器一端镀对所述激光器波长高反射率介质膜的凹面镜组成， 所述凸透镜的焦 距 F和所述凹面镜的曲率半径 R满足数学关系式： F=R。
在上面所述的高稳定性双频激光器中， 其特征在于， 在所述光学玻璃反射镜上镀高反射 膜的一侧通过机械打孔或激光内雕点阵等外作用产生永久内应力， 所述孔或点阵位于激光出 光点之外， 产生的所述永久内应力可根据所述孔或点阵的大小、 位置、 深度等改变。
在上面所述的高稳定性双频激光器中， 其特征在于， 所述猫眼逆反射器包含的凸透镜和 凹面镜之间的距离关系由一个长度为 d的套筒保证， 且所述套筒长度 d等于所述凸透镜的焦 距 F， 所述凹面镜位置由带螺纹的压环保证， 在所述猫眼逆反射器远离所述激光增益管的一 端封接光学玻璃窗片。
在上面所述的高稳定性双频激光器中， 其特征在于， 所述光学玻璃反射镜和猫眼逆反射 器可通过可伐或玻璃粉与所述氦氖激光增益管连接在一起。 附图说明
图 1 猫眼逆向反射器工作原理图：
图 2 带猫眼逆向反射器的双频氦氖激光器组成示意图；
图 3 猫眼逆向反射器组成结构图。 具体实施方式
在各种使氦氖激光器产生双频的技术中， 通过人为在谐振腔镜产生应力双折射并通过横 向塞曼效应使激光频率分裂的方法被证明是非常有效的。由此产生的激光频差可以覆盖几 MHz 到二十 Hz甚至更大的中频差范围， 可以使双频激光器的测量速度从 lm/S达到 7m/s甚至更 大， 能够满足当前加工制造中的高速运动机床的测量要求。 利用这种方法， 激光器的一个光 学玻璃腔镜外力作用下产生了各向异性， 本身变成一个双折射腔镜。 从而激光器在两个正交 偏振方向上形成不同的两个物理腔长， 其光程差就是双折射腔镜内的应力双折射大小。 两正 交偏振方向上满足谐振条件的同级纵模之间会产生频率差， 即频率分裂。 当在氦氖激光器上 施加横向磁场产生横向塞曼效应， 消除模竞争后， 两分裂模可以同时振荡产生双频， 其频差 大小如公式 （1 ) 给出的：
Av = - AL ( 1 ) L
其中， Δν为双频激光频差， V为激光频率， £为激光平均腔长， 为双折射腔镜引入的光程 差。 激光器腔镜上的应力双折射大小决定了输出频差的大小。 为了得到实际需要的频差大小 并能保证频差稳定性（这对激光稳频很重要），就要使双折射腔镜上的力作用大小可调且稳定。 通过机械结构施加外力到腔镜上可以调整激光器的输出频差， 但由于弹性结构往往难以维持 长时间的稳定性， 尤其当存在温度变化， 环境振动等干扰情况的情况下。 一个解决的方法是 通过机械钻头直接在激光器玻璃腔镜上钻上合适大小和深度的盲孔， 由钻孔产生局部应力改 变腔镜上激光输出点的应力分布， 使应力固化在腔镜内部， 在经过一定时间的时效处理后， 就可以使激光器产生稳定的频差。 进一步改进方法是应用激光内雕技术， 在腔镜内部由高能 光束烧蚀出点阵， 也可以产生机械打孔一样的效果。 而要改变激光器输出频差的大小， 可以 通过改变加工的孔或点阵的外置、 大小、 深度等进行调节。 如果一次不能实现所要求的频差 大小， 还可以再正交方向上加工新的孔或点阵， 重新进行调节， 即改变加工的孔的个数和分 布。 由于不需要外部弹性加力结构， 腔镜内的应力分布可以较稳定存在。 这就是本发明提出 的髙稳定双频激光器产生频差输出的原理。
激光器输出功率的稳定性对提高稳频精度也很重要。 通常激光器谐振腔的不稳定性是影 响其功率稳定的重要因素之一。 如氦氖激光器受热变形， 不仅腔长变化， 而且可能因受热不 均而弯曲变形， 使谐振腔镜偏离原来的相互平行位置直接导致功率的波动， 使用这样的功率 信号去控制激光腔长， 会降低稳频精度。 本发明提出了用猫眼逆向反射器作为激光器的一个 腔镜， 提高谐振腔稳定性的方法， 可以使激光功率稳定输出。 猫眼逆向反射器的基本原理如
1所示， 其由一个凸透镜和一个凹面镜构成， 并且二者之间满足如下关系式：
F = R = d ( 2 ) 其中， F为凸透镜焦距， ?为凹面镜曲率半径， d为凸透镜和凹面镜之间的距离。根据式（2) 的关系式， 可 W保证入射到猫服逆向反射器的光束被反射后沿原入射方向反向出射， 如图 1 所示。 猫眼逆向反射器的这种良好的逆向平行反射特性还表现在， 当一束平行光以较小的角 度入射到猫眼逆向反射器后， 仍会沿原方向平行出射。 这就能够保证， 以猫眼逆向反射器作 为腔镜的激光器即使在外界干扰作用下偏离了原来的平行位置， 也能保证激光器振荡模式入 射到猫眼逆向反射器后， 仍能在损耗几乎不变的情况下原路返回谐振腔。 因此， 激光器的输 出功率几乎不发生改变。 猫眼逆向反射器的这种抗失谐特性是普通的激光谐振腔镜或者凹面 镜所不具备的， 也是猫眼逆向反射器能作为激光腔镜提高激光器稳定性的物理基础。
综合上述产生激光器频差和保证激光器稳定性的方法， 本发明提出了一种高稳定性双频 激光器的设计方案， 如图 2所示， 作为一种具体实施方式， 猫眼逆向反射器的构成如图 3所 给出：
激光器由氦氦激光增益管 1和与之相连接的光学玻璃反射镜 2和猫眼逆向反射器 3所构 成。 其中， 所述的氦氖增益激光管 1充一定气压比的氦气和氖气作为激光器增益介质； 所述 的光学玻璃反射镜 2和猫眼逆向反射器 3共同构成激光器的谐振腔， 二者可通过可伐或玻璃 粉与所述氦氖激光增益管 1连接在一起。
在所述光学玻璃反射镜 2的一侧镀对激光波长高反射率介质膜， 另一侧镀激光波长增透 介质膜； 为了使所述反射镜 2上的应力双折射位于激光谐振腔内， 其镀增透介质膜的一侧应 与激光增益管 1的一端封接在一起； 在反射镜 2上镀高反射膜的一侧通过机械打孔或激光内 雕点阵等外作用产生永久内应力， 该孔或点阵位于激光出光点之外， 产生的永久内应力可根 据所述孔或点阵的大小、 位置、 深度等改变。
所述的猫眼逆向反射器 3由一个凸透镜 5和一个凹面镜 7组成， 所述凸透镜 5的焦距 F 和所述凹面镜 7的曲率半径 R满足数学关系式： F=R;为降低光学元件在腔内反射造成的损耗， 凸透镜 5的两面都镀对激光波长增透介质膜， 凹面镜 7正对激光增益管 1的一端镀对激光器 波长高反射率介质膜； 所述凸透镜 5和凹面镜 7之间的距离关系由一个长度为 d的套筒 6保 证， 且所述套筒 6的长度 d与凸透镜 5的焦距 F， 以及凹面镜 7的曲率半径 R满足： d=F=R; 所述凹面镜 7的位置由带螺纹的压环 8来保证； 在所述猫眼逆反射器远离所述激光增益管的 一端封接光学玻璃窗片 9， 以保持激光器的密封性； 猫眼逆向反射器 3的上述组成部件都安 装到由可伐材料制成的支撑筒 4上， 其安装凹面镜 5的一端与所述氦氖激光增益管 1连接在 一起。

Claims

权 利 要 求 书
1、 一种高稳定性双频激光器， 其特征在于， 包括- 激光器由氦氦激光增益管和与之相连接的两个腔镜形成的谐振腔构成， 所述的氦氖增益 激光管由激光增益管充一定气压比的氦气和氖气作为激光器增益介质；
其中一个所述腔镜为光学玻璃反射镜， 在所述反射镜一侧镀对所述激光器波长高反射率 介质膜， 另一侧镀对所述激光器波长增透介质膜， 并且所述反射镜镀增透介质膜的一侧与所 述激光增益管一端封接在一起；
另一个所述腔镜为猫眼逆反射器， 由一个两面镀对所述激光器波长增透介质膜的凸透镜 和正对所述激光器一端镀对所述激光器波长高反射率介质膜的凹面镜组成， 所述凸透镜的焦 距 F和所述凹面镜的曲率半径 R满足数学关系式： F=R。
2、根据权利要求 1所述的高稳定性双频激光器， 其特征在于， 在所述光学玻璃反射镜上 镀髙反射膜的一侧通过机械打孔或激光内雕点阵等外作用产生永久内应力， 所述孔或点阵位 于激光出光点之外， 产生的所述永久内应力可根据所述孔或点阵的大小、位置、深度等改变。
3、 根据权利要求 1所述的高稳定性双频激光器， 其特征在于， 所述猫眼逆反射器包含的 凸透镜和凹面镜之间的距离关系由一个长度为 d的套筒保证， 且所述套筒长度 d等于所述凸 透镜的焦距 F， 所述凹面镜位置由带螺纹的压环保证， 在所述猫眼逆反射器远离所述激光增 益管的一端封接光学玻璃窗片。
4、 根据权利要求 1所述的高稳定性双频激光器， 其特征在于， 所述光学玻璃反射镜和猫 眼逆反射器可通过可伐或玻璃粉与所述氦氖激光增益管连接在一起。
PCT/CN2014/070029 2014-01-02 2014-01-02 高稳定性双频激光器 Ceased WO2015100717A1 (zh)

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1601832A (zh) * 2004-10-22 2005-03-30 清华大学 猫眼腔氦氖激光器
CN101262115A (zh) * 2008-04-18 2008-09-10 清华大学 基于打孔应力调节的双折射-双频激光器
CN202602080U (zh) * 2012-03-12 2012-12-12 浙江工业大学 谐振腔长度可自动调节的外腔式He-Ne激光器

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1601832A (zh) * 2004-10-22 2005-03-30 清华大学 猫眼腔氦氖激光器
CN101262115A (zh) * 2008-04-18 2008-09-10 清华大学 基于打孔应力调节的双折射-双频激光器
CN202602080U (zh) * 2012-03-12 2012-12-12 浙江工业大学 谐振腔长度可自动调节的外腔式He-Ne激光器

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