WO2015010415A1 - 基板、显示屏、拼接屏及拼接屏的对位方法 - Google Patents
基板、显示屏、拼接屏及拼接屏的对位方法 Download PDFInfo
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- WO2015010415A1 WO2015010415A1 PCT/CN2013/088830 CN2013088830W WO2015010415A1 WO 2015010415 A1 WO2015010415 A1 WO 2015010415A1 CN 2013088830 W CN2013088830 W CN 2013088830W WO 2015010415 A1 WO2015010415 A1 WO 2015010415A1
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- substrate
- alignment marks
- splicing
- alignment
- height difference
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- 239000000758 substrate Substances 0.000 title claims abstract description 68
- 238000000034 method Methods 0.000 title claims abstract description 59
- 230000008569 process Effects 0.000 description 41
- 101150116075 Mark2 gene Proteins 0.000 description 15
- 239000004973 liquid crystal related substance Substances 0.000 description 14
- 229920002120 photoresistant polymer Polymers 0.000 description 10
- 101150053299 Mark1 gene Proteins 0.000 description 9
- 230000000694 effects Effects 0.000 description 8
- 101150059478 Mark3 gene Proteins 0.000 description 7
- 238000005530 etching Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 238000000059 patterning Methods 0.000 description 6
- 230000008859 change Effects 0.000 description 5
- 238000000151 deposition Methods 0.000 description 5
- 238000005259 measurement Methods 0.000 description 5
- 238000012545 processing Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 230000008021 deposition Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 230000007717 exclusion Effects 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000000306 component Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000008358 core component Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000002594 fluoroscopy Methods 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000003550 marker Substances 0.000 description 1
Classifications
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/14—Digital output to display device ; Cooperation and interconnection of the display device with other functional units
- G06F3/1423—Digital output to display device ; Cooperation and interconnection of the display device with other functional units controlling a plurality of local displays, e.g. CRT and flat panel display
- G06F3/1446—Digital output to display device ; Cooperation and interconnection of the display device with other functional units controlling a plurality of local displays, e.g. CRT and flat panel display display composed of modules, e.g. video walls
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/13336—Combining plural substrates to produce large-area displays, e.g. tiled displays
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/14—Digital output to display device ; Cooperation and interconnection of the display device with other functional units
- G06F3/1423—Digital output to display device ; Cooperation and interconnection of the display device with other functional units controlling a plurality of local displays, e.g. CRT and flat panel display
- G06F3/1431—Digital output to display device ; Cooperation and interconnection of the display device with other functional units controlling a plurality of local displays, e.g. CRT and flat panel display using a single graphics controller
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24802—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]
Definitions
- the present invention relates to a method of aligning a substrate, a display screen, a splicing screen, and a splicing screen provided with alignment marks.
- the spliced display is composed of a plurality of display screens as display units arranged in a matrix (for example, 2 x 2, 3 3 , 4 x 4 and larger free infinite 4 )) to form a large screen splicing display, each display Displaying a portion of an image, the matrix-arranged display together displays an image of a large area, or a different image can be displayed on a separate screen.
- a matrix for example, 2 x 2, 3 3 , 4 x 4 and larger free infinite 4
- the input signals of the spliced display are all processed by the image controller, and the output is distributed to each display.
- Each display can cross the boundary of the display, but it is usually necessary to ensure the smallest gap between the displays.
- the display quality of a single display directly affects the effect of the entire splicing screen. Different types of displays can produce very different results.
- the image processor is one of the core components of the spliced display. Its function is to send the signals that need to be displayed on the computer, video, network, etc. to the image splicing controller.
- the processed image signals are sent to the corresponding display screens, respectively.
- the display shows only one part of the entire image. All the displays add up to form a complete large picture.
- the resolution of the large picture is a multiple of the resolution of each display.
- the image processor can only improve the processing of the video.
- the stitching effect of the obtained splicing screen still has a wide stitching seam, and can not meet the requirements of the narrow stitching seam, as shown in Fig. 1, with a 2
- the splicing screen of x 2 is taken as an example, in which each display unit displays a small picture.
- FIG. 2 is a design of the alignment mark around the narrow splicing display screen in the prior art.
- Schematic diagram where A, B, and C represent the upper left, lower left, and lower right corners of a small display, respectively, 1A, 2A, and 3A represent the three alignment marks in the upper left corner, and 1B, 2B, and 3B represent the three in the lower left corner.
- the alignment marks, 1C, 2C and 3C represent the three alignment marks in the lower right corner.
- any one of the alignment marks has an exclusive area around it, which is the area where any image is prohibited, and the area of the alignment mark is 0.5 mm * 0.5 mm, and the area of the exclusive area is 1.5 mm * 1.5 mm. If other patterns enter the exclusion zone of the registration mark, it will cause an alarm for the production line device and cannot be streamed.
- Figure 2 there is no coverage between the three alignment marks in the upper left corner and its exclusive area, which does not result in the inability to flow, but the three alignment marks in the lower left and lower right corners and their exclusive areas. There is coverage between, especially in the lower left corner, the coverage between the exclusive areas of the alignment marks 1B, 2B and 3B is severe.
- the enlarged view is as shown in Fig. 3.
- the lower left corner of the exclusive area of the alignment mark 2B and the upper right corner of the exclusive area of the alignment mark 1B and the alignment mark 2B partially overlap with the exclusive area of the alignment mark 3B.
- the pattern enters the exclusive area of the alignment mark, resulting in the inability to stream.
- Embodiments of the present invention provide a substrate provided with an alignment mark, the substrate including at least two alignment marks, and a height difference between different alignment marks, the height difference being N times the standard difference , N is greater than or equal to 1.
- the standard deviation is 2000 angstroms.
- the height difference is 5000 angstroms.
- the alignment mark is located on the back side and/or the front side of the substrate.
- the alignment marks having the height difference are formed by the same film layer; or the alignment marks having the height difference are formed by different film layers.
- Embodiments of the present invention also provide a display screen including at least one of the above substrates.
- An embodiment of the present invention further provides a splicing screen, the splicing screen includes at least two display screens, and the display screen is the foregoing display screen.
- An embodiment of the present invention further provides a method for aligning a splicing screen, the method comprising: setting a aligning mark having a height difference on a display screen;
- the size of the focal length of the image observation device is adjusted, and the alignment mark of the target is aligned, and the splicing positioning is performed.
- the height difference is 2000 angstroms.
- the setting of the alignment mark having the height difference on the display screen comprises:
- the alignment mark having the height difference is formed on the same film layer; or the alignment mark having the height difference is formed in the different film layers.
- FIG. 2 is a schematic diagram showing the design of the alignment mark of the periphery of the narrow frame stitching in the conventional technology
- FIG. 3 is a schematic diagram of three alignment mark distributions in a lower left corner region of a conventional technique
- FIG. 4 is a schematic view showing a substrate provided with an alignment mark and a registration mark disposed on a front surface of the substrate according to an embodiment of the present invention
- FIG. 5 is a schematic view showing a substrate on which a registration mark is disposed, and a registration mark is disposed on a back surface of a substrate according to an embodiment of the present invention
- FIG. 6 is a aligning mark Mark1 and an exclusive area thereof in a splicing screen according to an embodiment of the present invention
- FIG. 7 is a aligning mark Mark2 and an exclusive area thereof in the splicing screen according to an embodiment of the present invention
- the alignment mark Mark3 and its exclusive area in a splicing screen
- FIG. 9 is a splicing effect diagram obtained by a splicing screen according to an embodiment of the present invention
- FIG. 10 is a flow chart showing the steps of a method for aligning a splicing screen according to an embodiment of the present invention. detailed description
- a substrate provided with an alignment mark is provided.
- the substrate includes at least two alignment marks, and the height difference between the different alignment marks is N times of the standard difference. N is greater than or equal to 1.
- the standard deviation is the resolution or measurement accuracy of the image viewing device used in the stitching process.
- the image observation apparatus of this embodiment may be a camera, or may be another image observation apparatus such as a microscope having higher precision than a camera.
- a microscope will be described as an example.
- the microscope can adjust the focal length, and the focal length can be adjusted in a wide range. Alignment marks of different heights need to be observed at different focal lengths. At the same focal length, since the different alignment marks have different heights, only the alignment marks corresponding to the selected focal length can be clearly seen, and other alignment marks corresponding to the selected focal length are blurred. Unclear, it is therefore possible to distinguish the alignment marks having the height difference so that the alignment marks are not affected by each other.
- the image observation apparatus observes the alignment marks of different heights using different focal lengths, and the size of the focal length is adjusted correspondingly according to the height of the alignment mark.
- the alignment marks By setting the alignment marks to different heights, there is a height difference between the alignment marks.
- the two alignment marks cannot be distinguished. Therefore, the positioning is not accurate when splicing, and the frame of the splicing screen is compared. Big.
- the alignment marks overlapping the exclusive areas can be distinguished, and even if the two alignment marks are very close, they can be distinguished from each other. Accurate positioning can be achieved when positioning, and a good result can be obtained for a process based on alignment mark.
- the standard deviation value is at least 2000 angstroms.
- the standard deviation is 2000 angstroms, two highly different alignment marks can be distinguished. It should be noted that in the case of such resolution, 2000 angstroms is the lowest value of the standard deviation, but the standard deviation is not limited to 2000 angstroms, and may be a value greater than 2000 angstroms. Moreover, when the standard deviation is 2000 angstroms, the effect is better when the height difference is 5000 angstroms.
- the resolution or minimum resolution of the viewing device used is smaller than 2000 angstroms, then a smaller minimum standard deviation can be chosen, then the minimum height difference will be reduced and less than the current 2000 angstroms.
- the minimum resolution of the device used for observation is 1000 angstroms
- the height difference can be set to a value above 1000 angstroms, then the minimum standard deviation is 1000.
- the height difference is greater than or equal to 1000 angstroms.
- the selection of the standard difference and the height difference in other resolutions will change accordingly, as long as the height difference is satisfied as N times the standard deviation.
- the alignment mark can be located on the back and/or front side of the substrate. Forming the alignment mark on the back surface of the substrate eliminates the need to consider the structure of the display region, and the formation of the alignment mark on the front surface of the substrate requires consideration of other structures of the display region.
- the formation of the alignment mark having the height difference includes the following two types: the alignment mark having the height difference is formed on the same film layer; or the alignment mark having the height difference is formed on the different layer film layers.
- an example will be described in which an alignment mark having a height difference is formed on the same film layer on the back surface of the substrate and a alignment mark having a height difference is formed on a different layer film layer of the substrate.
- a para-marker having a height difference on the same film layer on the back surface of the substrate For forming a para-marker having a height difference on the same film layer on the back surface of the substrate, first depositing a film layer on the back surface of the substrate, and then applying a photoresist to pass the photoresist through the mask
- alignment mark For example, in the present embodiment, a description will be given in a manner corresponding to two alignment marks in the lower left corner of Fig. 3. First, deposition is performed on the outside of the effective display area of the back surface of the substrate to form a film layer; then the same layer of film is etched by a patterning process, that is, etching is performed according to a preset height of the alignment mark; finally, alignment marks Mark1 and Mark2 are obtained. They correspond to numbers 10 and 20 respectively.
- the height difference between the alignment marks Mark1 and Mark2 is twice the standard value, for example, the standard value is 2000 angstroms. Further, the height difference between the alignment marks Mark1 and Mark2 may be N times the standard value, and N is greater than or equal to 1.
- the alignment marks may be formed on different layers of the film on the back surface of the substrate. Whether the alignment mark is set in the same layer or in different layers, when depositing and etching on the back side of the substrate, since the alignment mark is relatively independent from the front surface, it can be set to an arbitrary height difference, and the height difference size and image
- the measurement accuracy of the observation device is proportional.
- the measurement accuracy can reach 2000 angstroms, and the height difference between the alignment marks can be set to N times 2000 angstroms, then Under the microscope, two height-difference alignment marks can be distinguished by adjusting different focal lengths.
- the alignment mark is sometimes placed on the front side of the substrate depending on the process requirements. If the alignment mark is disposed on the front side of the substrate, the patterning process of the alignment mark can be made in the conventional TFT patterning process without additionally adding MASK, so that the cost is not increased.
- the alignment mark is formed on the front surface of the substrate.
- the normal display of the display affects the display. Therefore, in order not to affect the normal display, the alignment mark can be set on different layers outside the effective display area of the display.
- Such an alignment mark can be formed by a patterning process, and similarly to the above embodiment, the alignment mark can be formed by a deposition, a photoresist patterning process, etching, or the like.
- the alignment mark provided by the two different layers may be any layer forming the structure of the display region, and the following description will be made by taking the gate insulating layer and the semiconductor active layer as an example.
- a gate insulating layer on the front side of the substrate; then coating the photoresist, irradiating the photoresist through a mask (MASK), developing, forming a desired pattern on the photoresist; and then insulating the gate
- the layer is etched. While forming the pattern of the gate insulating layer, the pattern of the alignment mark Mark1 is obtained outside the effective display area. This is a graph of Markl obtained at the first preset height.
- the semiconductor active layer is deposited, and then the photoresist is coated, the photoresist is illuminated through the mask, developed, and the desired pattern is formed on the photoresist; then the semiconductor active layer is etched.
- the alignment mark Mark2 is obtained outside the effective display area, which is the pattern of Mark2 obtained according to the second preset height.
- the alignment marks Mark1 and Mark2 obtained by the above process are located on the front side of the substrate and are located in different layers of the substrate. Therefore, different layers are etched on the front side of the substrate to obtain alignment marks Mark1 and Mark2 having height differences, and their corresponding numbers are respectively For 10 and 20, as shown in Fig. 5, the height difference between the two is N times the standard deviation.
- the standard deviation can be 2000 angstroms.
- two alignment marks having a height difference may be formed on the same layer of the front surface F of the substrate by a patterning process, similar to the above method for the same layer etching in FIG. According to the alignment mark etching method of FIG. 4 and FIG. 5, whether the alignment mark having the height difference is on the front side of the substrate or the back side of the substrate, different alignment marks may be formed on the same layer or differently.
- the layer is formed.
- the substrate with the height difference aligning mark can distinguish the aligning marks which overlap the exclusive areas or are very close, and can accurately perform the aligning marks according to the separated aligning marks when performing various processing processes. Identify positioning and achieve better process results.
- the embodiment of the present invention further provides a display screen including at least one substrate provided with an alignment mark, based on the substrate provided with the alignment mark in the embodiment of the present invention.
- the substrate may be an opposite substrate, such as a color film substrate, and/or an array substrate, and the alignment mark having the height difference may be disposed outside the effective display area on the array substrate or the opposite substrate.
- the display screen may further include a backlight for providing a light source for normal display of the display screen. It should be noted that the display screen includes the liquid crystal module formed by the substrate and the backlight, and other structures required for the display device to implement the display function, and details are not described herein again.
- the display screen in this embodiment is described by taking a liquid crystal display as an example, and the display screen for realizing the display function other than the liquid crystal display is also applicable.
- the display screen provided with the alignment mark provided by the embodiment can distinguish the alignment marks which are overlapped or closely spaced from each other when viewed under a microscope, and are separated according to the respective processing processes.
- the positioning mark is accurately identified and positioned to achieve better process results.
- a splicing screen is provided in the second embodiment of the present invention, which includes at least two display screens, wherein the display screen is the display screen provided in the first embodiment.
- the alignment marks Markl, Mark2 and Mark3 which are required for three different process flows are given, wherein Markl is the mark used for cutting in the Cell process, and Mark2 is the Module process POL.
- Mark3 is the mark to be used when the UV (ultraviolet curing) process black matrix (BM) is aligned, these three alignments
- the markers have their own exclusive areas, and images are forbidden in the exclusive area. If the exclusive area overlaps with the exclusive areas of other alignment marks, the positioning may be inaccurate.
- the above three alignment marks Mark1, Mark2, and Mark3 are disposed outside the effective display area of the liquid crystal panel, and are sequentially or incrementally arranged on the liquid crystal panel.
- the image observation device to be used for positioning is generally a camera or a microscope.
- the height difference between the positioning marks is greater than or equal to the standard deviation. If the minimum resolution of the viewing device is 2000 angstroms, that is, the standard When the difference is 2000 angstroms, two highly different alignment marks can be distinguished. It should be noted that in this case, 2000 angstroms is the minimum value of the standard deviation, but the standard deviation is not limited to 2000 angstroms, and may be a value greater than 2000 angstroms. And when the standard deviation is chosen to be 2000 angstroms, the height difference is 5000 angstroms.
- the resolution or minimum resolution of the viewing device is less than 2000 angstroms, then a smaller minimum standard deviation can be chosen, and then the minimum height difference will be reduced and less than the current 2000 angstroms.
- the minimum resolvable distance of the device used for observation is 1000 angstroms
- the height difference can be set to a value above 1000 angstroms, then the minimum standard deviation is 1000 angstroms, and the height difference is greater than or equal to 1000 angstroms.
- the selection of the standard difference and the height difference in other resolutions will change accordingly, as long as the height difference is N times the standard deviation, and N is greater than or equal to 1.
- Figure 6 is the alignment mark and its exclusive area observed when the focal length corresponding to the alignment mark Mark1 is selected during the process of forming the box
- Figure 7 shows the selected and alignment mark Mark2 during the POL&OLB process.
- FIG. 8 is the alignment mark and its arrangement observed when the focal length corresponding to the alignment mark Mark3 is selected during the UV process. It area.
- the display screen is spliced by using the alignment mark with the height difference provided by the embodiment.
- the image observation apparatus can only recognize the alignment by using the selected focal length.
- the alignment mark corresponding to the selected focal length and the exclusive area of the alignment mark are not seen, and the other alignment marks and the exclusive areas of the other alignment marks are not seen. Therefore, even if there is partial overlap in the exclusive area of the alignment mark, the recognition and alignment will not be affected.
- the effect of the splicing screen obtained by the above splicing process is as shown in FIG. 9. Compared with the effect diagram of the prior art splicing screen of FIG.
- the splicing seam is significantly narrowed, and for the splicing screen of large size (46, above)
- the seam of the original splicing screen is 7-10 mm
- the substrate with the height difference aligning mark provided by the embodiment of the present invention is spliced, and the seam of the splicing screen can be reduced to 4-6 mm.
- the narrow frame splicing screen provided by the embodiment has a height difference form on the substrate by aligning the alignment mark outside the effective display area of the panel, and only needs to adjust the focal length of the image observation device when performing the identification alignment. Only one alignment mark and its exclusive area can be seen under the same focal length. Even if different alignment marks are arranged together, they will not interfere with each other, so that different alignment marks can be set at relatively close positions. Achieve narrow border stitching.
- the narrow frame splicing screen provided in this embodiment sets the alignment marks to different heights outside the effective display area of the panel, so that different alignment marks have a height difference, and when the alignment is performed, the image is Observing the device to set a focal length can only display a registration mark and its exclusive area in the image, even if the different alignment marks are arranged together, they will not interfere with each other, so as to achieve accurate alignment and realize the display. Narrow border stitching.
- a method for implementing a narrow border splicing screen is provided.
- the process of the step is as shown in FIG. 10, including:
- Step Sl Set a registration mark with a height difference on the display screen.
- the height difference is N times the standard deviation, and N is greater than or equal to 1.
- the standard deviation is the resolution or measurement accuracy of the image viewing device used in the stitching process.
- the display includes: a backlight and a liquid crystal panel, and a liquid crystal panel
- the liquid crystal panel may further include a counter substrate (for example, a color filter substrate), an array substrate, and a liquid crystal between the opposite substrate and the array substrate, and the alignment mark is disposed on the array substrate or the opposite substrate.
- the counter substrate and/or the array substrate are substrates having a height difference on the alignment mark thereon.
- the display screen can also be a display screen for realizing display functions other than the liquid crystal display.
- step S1 Setting the alignment mark with the height difference in step S1 includes:
- the alignment mark having the height difference is formed by etching in the same layer; or the alignment mark having the height difference is separately etched and formed in different layers. This has been described in detail in the first embodiment and will not be described again.
- Step S2 When splicing at least two display screens, adjust the focal length of the image observation device to align with the target alignment mark.
- the alignment marks of different heights correspond to different focal lengths of the image observation device.
- the image viewing device selects a focal length corresponding to the alignment mark required by the process, and only the alignment mark can be observed at the focal length, and no other alignment mark is seen, so Different alignment marks can be easily distinguished. Since any image is prohibited in the exclusive area of the alignment mark, it is necessary to see only the required alignment mark when performing a certain process, and the other alignment marks are not in the display area, so that the influence of each other can be avoided.
- the boxing process, the POL&OLB process, and the UV process as an example, the alignment marks observed in the three process flows and their exclusion zone results are shown in Figures 6-8 above.
- the stitching seam can be original The 7 ⁇ 10mm drop ⁇ ⁇ to 4 ⁇ 6mm.
- the minimum standard deviation depends on the maximum resolution of the microscope used in the observation. For example, if the minimum resolution of the fluoroscopy is 2000 angstroms, the standard deviation can be 2000 angstroms. When the standard deviation is 2000 angstroms, two highly different alignment marks can be distinguished. Then the height difference can be set to N times 2000 angstroms, N is greater than or equal to 1, that is, the height difference can be a value above 2000 angstroms. It should be noted that in this case, 2000 angstroms is the lowest value of the standard deviation, but the standard deviation is not limited to 2000 angstroms, and may be a value greater than 2000 angstroms. Moreover, when the minimum resolution of the microscope is 2000 angstroms, the height difference is 5000 angstroms.
- the standard deviation can be more than 1000 angstroms, then the minimum standard deviation is 1000 angstroms, and the height difference is greater than or equal to 1000 angstroms.
- the selection of the standard and height differences in other resolutions will change accordingly, as long as the height difference is N times the standard deviation, N is greater than or equal to 1.
- the narrow frame splicing screen splicing method provided in this embodiment, it is not necessary to change the position of the alignment mark overlapped by the conventional process, but the alignment marks outside the effective display area of the panel are made to different heights, so that different alignments are made. There is a significant height difference between the marks.
- the focal length of the display device needs to be adjusted. Only one alignment mark and its exclusive area can be seen at the same focal length, even if different alignment marks are arranged. They do not interfere with each other together, so that different alignment marks can be placed at a closer distance to achieve narrow frame stitching.
- Embodiments of the present invention provide a method for aligning a substrate, a display screen, a splicing screen, and a splicing screen provided with alignment marks, by setting the alignment marks outside the effective display area of the display screen to have a height difference form.
- the image observing device can be used to distinguish the overlapping mark of the exclusive area.
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US14/361,879 US9916121B2 (en) | 2013-07-24 | 2013-12-09 | Substrate, display screen, splicing screen and alignment method of splicing screen |
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CN201310314619.5A CN103366648B (zh) | 2013-07-24 | 2013-07-24 | 基板、显示屏、拼接屏及拼接屏的对位方法 |
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US20150205564A1 (en) | 2015-07-23 |
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