WO2015002316A1 - Procédé de formation d'un motif d'isolation - Google Patents

Procédé de formation d'un motif d'isolation Download PDF

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Publication number
WO2015002316A1
WO2015002316A1 PCT/JP2014/067977 JP2014067977W WO2015002316A1 WO 2015002316 A1 WO2015002316 A1 WO 2015002316A1 JP 2014067977 W JP2014067977 W JP 2014067977W WO 2015002316 A1 WO2015002316 A1 WO 2015002316A1
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WO
WIPO (PCT)
Prior art keywords
forming
ink
insulating layer
insulating
pattern according
Prior art date
Application number
PCT/JP2014/067977
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English (en)
Japanese (ja)
Inventor
正好 山内
Original Assignee
コニカミノルタ株式会社
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Publication date
Application filed by コニカミノルタ株式会社 filed Critical コニカミノルタ株式会社
Priority to JP2015525302A priority Critical patent/JP6361659B2/ja
Publication of WO2015002316A1 publication Critical patent/WO2015002316A1/fr

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    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D11/00—Inks
    • C09D11/02—Printing inks
    • C09D11/10—Printing inks based on artificial resins
    • C09D11/101—Inks specially adapted for printing processes involving curing by wave energy or particle radiation, e.g. with UV-curing following the printing
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D11/00—Inks
    • C09D11/30—Inkjet printing inks
    • C09D11/34—Hot-melt inks
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/044—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
    • G06F3/0443—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means using a single layer of sensing electrodes
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/044—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
    • G06F3/0446—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means using a grid-like structure of electrodes in at least two directions, e.g. using row and column electrodes
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F2203/00—Indexing scheme relating to G06F3/00 - G06F3/048
    • G06F2203/041—Indexing scheme relating to G06F3/041 - G06F3/045
    • G06F2203/04103—Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F2203/00—Indexing scheme relating to G06F3/00 - G06F3/048
    • G06F2203/041—Indexing scheme relating to G06F3/041 - G06F3/045
    • G06F2203/04111—Cross over in capacitive digitiser, i.e. details of structures for connecting electrodes of the sensing pattern where the connections cross each other, e.g. bridge structures comprising an insulating layer, or vias through substrate
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/0286—Programmable, customizable or modifiable circuits
    • H05K1/0287—Programmable, customizable or modifiable circuits having an universal lay-out, e.g. pad or land grid patterns or mesh patterns
    • H05K1/0289—Programmable, customizable or modifiable circuits having an universal lay-out, e.g. pad or land grid patterns or mesh patterns having a matrix lay-out, i.e. having selectively interconnectable sets of X-conductors and Y-conductors in different planes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/01—Tools for processing; Objects used during processing
    • H05K2203/0104—Tools for processing; Objects used during processing for patterning or coating
    • H05K2203/013—Inkjet printing, e.g. for printing insulating material or resist

Definitions

  • the present invention relates to a method for forming an insulating pattern, and more particularly to a method for forming an insulating pattern in which an insulating layer is patterned using an inkjet method.
  • the patterning of the insulating layer is performed by removing an unnecessary portion using a photolithography method after applying an insulating material over the entire surface.
  • this method complicates the process and causes a lot of material loss.
  • Patent Document 1 an insulating layer is patterned with an ink that has been thickened by adding an inorganic or organic filler using a screen printing method.
  • these fillers tend to cause insulation failure, and thus have a limit. .
  • Patent Documents 2 and 3 assume that an insulating layer is patterned using an ink jet method.
  • the ink flows to the highly wettable member side due to the difference in wettability of each member with respect to ink. Therefore, there is room for further improvement in forming a desired pattern.
  • Patent Document 2 does not sufficiently solve such a problem.
  • Patent Document 3 describes that a desired pattern can be formed by adjusting the ink application amount according to the wettability of each member. For example, if the difference in wettability of each member increases, There is a limit to the prevention. Also, for example, ink patterning cannot be prevented when patterning across uneven members.
  • an object of the present invention is to provide a method for forming an insulating pattern that easily forms a desired pattern when an insulating layer is patterned using an inkjet method.
  • Plan view for explaining an example of a manufacturing method of a matrix type electrode substrate
  • Plan view for explaining an example of a manufacturing method of a matrix type electrode substrate
  • an insulating layer also referred to as an insulating film
  • the insulating layer is satisfied so as to satisfy the following conditions (hereinafter sometimes referred to as viscosity changing conditions).
  • a forming ink (hereinafter sometimes simply referred to as an ink) is applied to a substrate. (Viscosity after landing on the base material) / (Viscosity upon emission) ⁇ 100
  • Viscosity can be measured using a rotational viscometer.
  • the “viscosity after landing on the substrate” means the ink that reaches before the ink flow (not due to the impact of landing) occurs due to the wetting and spreading of the ink on the substrate.
  • the viscosity can be referred to as a viscosity. Specifically, the viscosity reaches within 1 second after the ink has landed on the substrate.
  • the reason why it becomes easy to impart a desired pattern to the insulating layer according to the present invention is not necessarily clear, but for example, since it is easy to obtain the stability of ink ejection, the ink can be applied to the substrate with high accuracy, In addition, it is presumed that the ink applied to the base material is likely to promptly fix the contact line to the base material (pinning) and prevent the ink from flowing.
  • the present invention it is possible to easily form a desired pattern when patterning the insulating layer, and therefore it is possible to suitably prevent the occurrence of insulation failure.
  • the effect of the present invention is particularly significant when the insulating layer is formed over different members or formed over uneven members.
  • “(viscosity after landing on the base material) / (viscosity upon emission)” is preferably 200 or more, and is 500 or more. Is more preferable.
  • the “viscosity at the time of emission” is not particularly limited, but is preferably in the range of 3 to 15 mPa ⁇ s from the viewpoint of improving the emission stability.
  • the viscosity change condition according to the present invention can be appropriately satisfied by, for example, the composition of the ink or the setting of physical conditions such as temperature and humidity when the ink is applied.
  • the ink preferably has a phase change mechanism such as hot melt, thixotropy, or gelation. Since the ink exhibits a phase change mechanism from the time of ejection of the ink to after landing, the viscosity change condition according to the present invention can be suitably achieved, and the effect of the present invention becomes remarkable.
  • a phase change mechanism such as hot melt, thixotropy, or gelation. Since the ink exhibits a phase change mechanism from the time of ejection of the ink to after landing, the viscosity change condition according to the present invention can be suitably achieved, and the effect of the present invention becomes remarkable.
  • the phase change mechanism by hot melt is a phase change mechanism that shifts from a heated (melted) and low viscosity state (during emission) to a high viscosity (after landing) state by cooling. From the viewpoint of suitably expressing the phase change mechanism by hot melt, it is preferable to change the temperature of the ink at the time of emission and after landing. For example, it is preferable to perform either one or both of ink heating at the time of emission and ink cooling after landing.
  • a heater for heating the ink filled in the inkjet head, or a cooling means for cooling the substrate
  • a temperature adjusting means such as can be used as appropriate.
  • phase change mechanism by thixotropy starts from a state where viscosity is low under the action of shear stress due to stirring or vibration (during emission), and a state where viscosity increases due to the action of shear stress being reduced or stationary (landing) It is a phase change mechanism that moves to (after).
  • a phase change mechanism by thixotropy can be developed by appropriately using a shear stress applying means for applying stirring or vibration (fine vibration) to ink filled in an ink jet head.
  • the phase change mechanism due to gelation is based on the interaction of the polymer network formed by chemical or physical aggregation, the aggregation structure of fine particles, etc. It is a phase change mechanism in which a structure in which solutes lose their independent motility to form an aggregate and shift to a high viscosity state (after landing).
  • a gelling agent such as an oil gelling agent (described in detail later) in the ink. From the viewpoint of suitably expressing the phase change mechanism by gelation, it is preferable to change the temperature of the ink at the time of emission and after landing.
  • the ink is heated to a temperature equal to or higher than the sol-gel phase transition temperature at the time of emission and is converted into a sol, and after landing, the ink is cooled to a temperature equal to or lower than the sol-gel phase transition temperature.
  • the ink of the present invention preferably has a curing mechanism by, for example, polymerization between molecules (for example, monomers) or crosslinking between molecules (for example, polymers).
  • a curing mechanism by, for example, polymerization between molecules (for example, monomers) or crosslinking between molecules (for example, polymers).
  • an active energy ray-curable monomer such as an acrylic monomer in the ink
  • curing can be performed by irradiating the ink after landing with an active energy ray.
  • the ink of the present invention has both the above-described phase change mechanism and the above-described curing mechanism.
  • an ink for example, an ink containing an active energy ray-curable composition and a gelling agent such as an oil gelling agent can be preferably used.
  • the active energy ray-curable composition mainly contributes to the above-described curing mechanism, and the gelling agent can mainly contribute to the above-described phase change mechanism by gelation.
  • the oil gelling agent referred to in the present invention refers to an oil (lipid) that can express the above-described phase change mechanism due to gelation in ink.
  • a gel becomes a fluid solution (sometimes called a sol) by heating, a thermoreversible gel that returns to the original gel when cooled, and once gelled, it can be reheated even if heated. There is a heat irreversible gel that does not return.
  • the gel formed by the oil gelling agent according to the present invention is preferably a thermoreversible gel.
  • the oil gelling agent used in the ink of the present invention may be a high molecular compound or a low molecular compound, but is preferably a low molecular compound from the viewpoint of use in ink.
  • the gel structure a compound in which the oil gelling agent itself can form a fibrous aggregate is preferable. Formation of the fibrous aggregate can be easily confirmed by morphological observation with a transmission electron microscope.
  • oil gelling agent that can be used in the ink of the present invention will be described in detail, but the present invention is not limited thereto.
  • the ink of the present invention more preferably contains at least one curable oil gelling agent that reacts with the active energy ray-curable composition as an oil gelling agent.
  • the curable monomer By reacting with the curable monomer, an effect of preventing the gelling agent from bleeding out on the surface of the insulating layer is obtained.
  • a functional material such as a conductive material on the insulating layer, it becomes easy to obtain adhesion, which is a particularly significant effect.
  • the curable oil gelling agent specifically, a functional group capable of expressing at least one curing function selected from acrylate, methacrylate, alkene, vinyl, allyl ether, epoxide, oxetane, etc. in the molecular structure.
  • the oil which has can be illustrated preferably.
  • Such a curable oil gelling agent can be easily obtained by synthesizing from any oil having a convertible functional group such as a hydroxyl group or a carboxyl group.
  • Preferred examples of the oil having a hydroxyl group include polyethylenes having a hydroxyl group, Gerve alcohols, diols composed of a dimerized alcohol, and the like.
  • Preferred examples of the polyethylene having a hydroxyl group include, but are not limited to, a polyethylene having a hydroxyl group at the terminal, and the like. Although not limited thereto, in the structural formula CH 3 — (CH 2 ) n —CH 2 OH, Those having an average in the range of 16 to 50 can be preferably used.
  • Gerve alcohols include 2,2-dialkyl-1-ethanols.
  • gerbe alcohol those having 16 to 36 carbon atoms can be preferably used.
  • a dimer diol having 36 carbon atoms represented by the following chemical formula commercially available as PRIPOL (registered trademark) 2033 can be exemplified.
  • the oil having a hydroxyl group can be preferably used even if it is an isomer having an unsaturated site or a cyclic site in the oil described above.
  • oils having hydroxyl groups preferably react with the carboxyl groups of the carboxylates to produce an oil gelling agent having a reactive ester.
  • the carboxylates are not particularly limited, and those in which the carboxyl groups possessed by the carboxylates take an acryl group or a methacryl group, for example, can be preferably used.
  • Preferred examples of the oil having a carboxyl group include polyethylenes having a carboxyl group, compounds in which a hydroxyl group in a Guerbet alcohol is substituted with a carboxyl group, dicarboxylic acids composed of a dimerized carboxylic acid, and the like.
  • Preferred examples of the polyethylene having a carboxyl group include, but are not limited to, a polyethylene having a carboxyl group at the terminal.
  • the structural formula CH 3 — (CH 2 ) n —COOH has an average of n Those in the range of 16 to 50 can be preferably used.
  • Examples of compounds in which the hydroxyl group in Gerve alcohols is substituted with a carboxyl group include, for example, compounds in which the hydroxyl group in the ethanol moiety of 2,2-dialkyl-1-ethanols is substituted with a carboxyl group. . As these compounds, those having a carbon number of 16 to 36 can be preferably used.
  • dicarboxylic acids composed of dimerized carboxylic acids include, for example, dimer dicarboxylic acids having 36 carbon atoms represented by the following chemical formula commercially available as PRIPOL (registered trademark) 1009.
  • the oil having a carboxyl group can be preferably used even in the oil described above, even if it is an isomer having an unsaturated site or a cyclic site.
  • oils having carboxyl groups preferably react with hydroxyl groups of alcohols to produce oil gelling agents having reactive esters.
  • curable polypropylene oil are also preferably used as the curable oil gelling agent. be able to.
  • the oil gelling agent contained in the ink of the present invention is not limited to the curable oil gelling agent described above, and may be at least one non-curing oil gelling agent.
  • the non-curing oil gelling agent refers to a solid oil at room temperature (20 ° C.) among oils that are not substantially cured by free radical polymerization or radiation irradiation.
  • non-curable oil gelling agent Specific examples of the non-curable oil gelling agent will be shown below, but the present invention is not limited to these compounds.
  • non-curable oil gelling agents particularly preferably used compounds are OG-1, OG-2, OG-5 and OG-15.
  • non-curable oil gelling agent is preferably an ester of an acidic oil such as a fatty acid and a monohydric or polyhydric alcohol.
  • ester-based non-curable oil gelling agents include stearyl stearate.
  • the acid value of such an ester-based non-curable oil gelling agent is preferably in the range of 15 (mg KOH / g) to 100 (mg KOH / g), more preferably 40 (mg KOH / g). The range is 95 (mg ⁇ KOH / g) or less.
  • the acid value refers to the number of milligrams of potassium hydroxide required to neutralize the acid contained in 1 g of the non-curable oil gelling agent, and the acid value measurement, hydrolysis acid value measurement (total acid value measurement) of JIS K 0070 ) Can be measured.
  • the total amount of the oil gelling agent including the curable and non-curable oil gelling agent is preferably in the range of 2% by weight to 10% by weight with respect to the total amount of the ink.
  • the ink ejection stability can be improved, the insulating layer can be easily patterned on the substrate with high accuracy, and the dot height can be adjusted more easily with respect to the dot diameter. Can be controlled more easily.
  • the amount of the oil gelling agent is less than 2% by weight, the gelation property of the ink may be lowered. If the amount exceeds 10% by weight, the surface hardness of the insulating layer may be weakened.
  • a radical polymerizable compound that is cured by a polymerization reaction by radical active species and a cationic polymerizable compound that is cured by a cationic polymerization reaction by cationic active species can be used.
  • the radical polymerizable compound is a compound having an ethylenically unsaturated bond capable of radical polymerization, and may be any compound as long as it has at least one ethylenically unsaturated bond capable of radical polymerization in the molecule. , Oligomers, polymers and the like having a chemical form. Only one kind of radically polymerizable compound may be used, or two or more kinds thereof may be used in combination at an arbitrary ratio in order to improve desired properties.
  • Examples of compounds having an ethylenically unsaturated bond capable of radical polymerization include unsaturated carboxylic acids such as acrylic acid, methacrylic acid, itaconic acid, crotonic acid, isocrotonic acid, maleic acid and their salts, esters, urethanes, amides. And radically polymerizable compounds such as unsaturated monomers, acrylonitrile, styrene, various unsaturated polyesters, unsaturated polyethers, unsaturated polyamides, and unsaturated urethanes.
  • the amount of the radical polymerizable compound added is preferably 1 to 97% by weight, more preferably 30 to 95% by weight.
  • cationic polymerizable compound various known cationic polymerizable monomers can be used.
  • cationic polymerizable monomers JP-A-6-9714, JP-A-2001-31892, JP-A-2001-40068, JP-A-2001-55507, JP-A-2001-310938, JP-A-2001-310937, Examples thereof include epoxy compounds, vinyl ether compounds, oxetane compounds and the like exemplified in JP-A-2001-220526.
  • the epoxy compound includes an aromatic epoxide, an alicyclic epoxide, an aliphatic epoxide, and the like.
  • Preferred examples of the aromatic epoxide include a polyhydric phenol having at least one aromatic nucleus or an alkylene oxide adduct thereof and epichlorohydrin.
  • Di- or polyglycidyl ether produced by the reaction of, for example, di- or polyglycidyl ether of bisphenol A or its alkylene oxide adduct, di- or polyglycidyl ether of hydrogenated bisphenol A or its alkylene oxide adduct, and novolak type An epoxy resin etc. are mentioned.
  • examples of the alkylene oxide include ethylene oxide and propylene oxide.
  • cyclohexene oxide obtained by epoxidizing a compound having at least one cycloalkane ring such as cyclohexene or cyclopentene ring with a suitable oxidizing agent such as hydrogen peroxide or peracid. Or a cyclopentene oxide containing compound is preferable.
  • Preferred aliphatic epoxides include di- or polyglycidyl ethers of aliphatic polyhydric alcohols or alkylene oxide adducts thereof, and typical examples thereof include diglycidyl ether of ethylene glycol, diglycidyl ether of propylene glycol or Diglycidyl ether of alkylene glycol such as diglycidyl ether of 1,6-hexanediol, polyglycidyl ether of polyhydric alcohol such as di- or triglycidyl ether of glycerin or its alkylene oxide adduct, polyethylene glycol or its alkylene oxide adduct Diglycidyl ether, polypropylene glycol or polyalkylene glycol such as diglycidyl ether of alkylene oxide adducts thereof Diglycidyl ether, and the like.
  • the alkylene oxide include ethylene oxide and propylene oxide.
  • aromatic epoxides and alicyclic epoxides are preferable, and alicyclic epoxides are particularly preferable.
  • one of the epoxides may be used alone, or two or more may be used in appropriate combination.
  • vinyl ether compound examples include ethylene glycol divinyl ether, diethylene glycol divinyl ether, triethylene glycol divinyl ether, propylene glycol divinyl ether, dipropylene glycol divinyl ether, butanediol divinyl ether, hexanediol divinyl ether, cyclohexanedimethanol divinyl ether, Di- or trivinyl ether compounds such as methylolpropane trivinyl ether, ethyl vinyl ether, n-butyl vinyl ether, isobutyl vinyl ether, octadecyl vinyl ether, cyclohexyl vinyl ether, hydroxybutyl vinyl ether, 2-ethylhexyl vinyl ether, cyclohexane dimethanol monovinyl ether, n- B pills vinyl ether, isopropyl vinyl ether, isopropenyl ether -O- propylene carbon
  • vinyl ether compounds in consideration of curability, adhesion, and surface hardness, di- or trivinyl ether compounds are preferable, and divinyl ether compounds are particularly preferable.
  • one of the above vinyl ether compounds may be used alone, or two or more thereof may be used in appropriate combination.
  • the oxetane compound according to the present invention is a compound having an oxetane ring, and any known oxetane compound as disclosed in JP-A Nos. 2001-220526 and 2001-310937 can be used.
  • oxetane compound according to the present invention when a compound having 5 or more oxetane rings is used, the viscosity of the ink is increased. Therefore, in the present invention, a compound having 1 to 4 oxetane rings is preferable.
  • the ink of the present invention preferably contains at least one photopolymerization initiator.
  • any known photopolymerization initiators published in “Application and Market of UV / EB Curing Technology” (CMC Publishing Co., Ltd., edited by Yoneho Tabata / edited by Radtech Research Association) may be used. it can.
  • radical polymerization initiator conventionally known photo radical generators such as aryl alkyl ketones, oxime ketones, S-phenyl thiobenzoate, titanocene, aromatic ketones, thioxanthones, benzyl and quinone derivatives, ketocoumarins and the like can be used. .
  • acylphosphine oxide and acylphosphonate can be preferably used from the viewpoint of sensitivity.
  • bis (2,4,6-trimethylbenzoyl) -phenylphosphine oxide bis (2,6-dimethoxybenzoyl) -2,4,4-trimethyl-pentylphosphine oxide and the like are preferable.
  • the preferable addition amount of the photoinitiator is 1 to 10% by weight, particularly preferably 2 to 8% by weight, based on the whole ink composition.
  • the cationic polymerization initiator include a photoacid generator and the like.
  • a chemical amplification type photoresist or a compound used for photocationic polymerization is used (edited by Organic Electronics Materials Research Group, “ Organic materials for imaging ", Bunshin Publishing (1993), see pages 187-192).
  • diazonium salts, iodonium salts, sulfonium salts, iron arene complexes, and organic polyhalogen compounds are preferred.
  • Examples of the diazonium salt, iodonium salt, and sulfonium salt include Japanese Patent Publication No. 54-14277, Japanese Patent Publication No. 54-14278, Japanese Patent Publication No. 51-56885, US Pat. No. 3,708,296, And compounds described in the specification of US Pat. No. 3,853,002.
  • examples of the cationic polymerization initiator include aromatic diazonium salts, aromatic sulfonium salts, aromatic iodonium salts, metallocene compounds, silicon compounds / aluminum complexes, and the like.
  • a curable oligomer can also be used. More preferable examples of the curable oligomer include acrylic polyesters, acrylic polyethers, acrylic epoxies, urethane acrylic acid, and pentaerythritol tetraacrylate, and one or more of these are used in combination. be able to.
  • acrylic acid oligomers acrylic polyester oligomers (for example, CN2255 (registered trademark), CN2256 (registered trademark)), urethane acrylate oligomers, acrylic acid epoxy oligomers (for example, CN2204 (registered trademark)) , CN110 (registered trademark)) (all are Sartomer).
  • the portion where the insulating layer is provided is not particularly limited, but as described above, the insulating layer is formed over different members or formed over uneven members. In this case, the effect of the present invention is particularly significant.
  • a capacitive touch panel has an induction generated in accordance with a change in capacitance based on electrostatic coupling between a plurality of arranged X-axis transparent electrodes and a plurality of Y-axis transparent electrodes and a human finger.
  • the position coordinates on the touch panel are detected using current.
  • the touch panel can be made thinner.
  • an insulating layer is provided in a predetermined region on one transparent electrode (hereinafter sometimes referred to as a first transparent electrode).
  • a first transparent electrode one transparent electrode
  • a second transparent electrode the bridge wiring of the other transparent electrode
  • FIG. 1 and 3 are plan views for explaining an example of a manufacturing method of a matrix type electrode substrate suitably used for the capacitance type touch panel as described above, and FIG. 2 is an enlarged view of a main part of FIG. FIG.
  • an electrode pattern 2 including a plurality of first transparent electrodes 21 and a plurality of electrode films 20 which are precursors of a plurality of second transparent electrodes formed later on one surface side of the transparent substrate 1.
  • the first transparent electrode 21 is configured by alternately arranging island-like electrode portions 211 that are rectangular in a plan view and connection electrode portions 212 that connect them, and extends in the left-right direction in the drawing.
  • the adjacent island-shaped electrode portions 211 are arranged so that the apex angles are opposed along the left-right direction in the drawing, and the apex angles facing each other Is connected to the connection electrode portion 212 at a portion in the vicinity of.
  • the plurality of electrode films 20 have a rectangular shape in plan view, and extend in the vertical direction in the drawing.
  • the adjacent electrode films 20 are arranged so that the apex angles face each other along the left-right direction in the drawing, and the apex angles facing each other are connected to each other.
  • the electrode film 20 and the island-like electrode portions 211 of the first transparent electrode 21 are alternately arranged in the left-right direction and the up-down direction in the drawing. This arrangement may be referred to as a grid arrangement or a checkered arrangement.
  • the adjacent apex angles of the adjacent electrode films 20 are cut at the intersection 23, they can be electrically connected by a bridge wiring.
  • the patterning of the insulating layer of the present invention is effective in forming the bridge wiring.
  • a plurality of second transparent electrodes (indicated by reference numeral 22 in FIG. 3) can be formed by being electrically connected as electrode film 20-bridge wiring-electrode film 20. .
  • the method for forming the plurality of first transparent electrodes 21 and the plurality of electrode films 20 on the transparent substrate 1 is not particularly limited. These formations (patterning) can be simultaneously performed by, for example, a method described below.
  • a transparent conductive layer (not shown) is formed on one side of the transparent substrate 1 by sputtering or vapor deposition.
  • an etching mask having a pattern corresponding to the plurality of first transparent electrodes 21 and the plurality of electrode films 20 is formed by a screen printing method or a photolithography method, and a portion of the transparent conductive film not covered with the etching mask is formed.
  • the layer is etched with an etching solution such as a ferric chloride aqueous solution or hydrochloric acid, and the plurality of first transparent electrodes 21 and the plurality of electrode films 20 are patterned faithfully to the etching mask. Thereafter, the etching mask is peeled off using an organic solvent or an alkaline solution.
  • FIG. 2A is an enlarged view of a main part in which the vicinity of the intersection 23 in FIG. 1 is enlarged.
  • the insulating film 3 is formed on 21 (specifically, the connection electrode portion 212).
  • the insulating film 3 is formed across different members such as the transparent substrate 1 and the first transparent electrode 21 as shown in FIG.
  • the insulating film 3 is formed across the uneven member. That is, a step, an inclination, or the like may exist on the surface on which the insulating film 3 is formed.
  • the insulating film 3 is patterned by an ink jet method.
  • the effect of being easy to form a desired pattern is produced by patterning by the inkjet method so as to satisfy the viscosity change condition according to the present invention.
  • the above-described ink can be suitably used.
  • the insulating film 3 is formed from the upper electrode film 20 in the drawing to the lower electrode film in the drawing so as to cross between the electrode films 20 adjacent in the vertical direction in the drawing.
  • it can be provided in a rectangular shape in plan view over a region up to 20.
  • the bridge wiring for electrically connecting the electrode films 20 adjacent in the vertical direction in the drawing via the insulating film 3 4 is formed.
  • the insulating film 3 can be patterned with high accuracy, the wiring connection (conductivity) by the bridge wiring 4 can be stabilized.
  • the formation method of the bridge wiring 4 is not particularly limited, but it is preferable that the bridge wiring 4 is formed by applying a coating liquid containing a conductive material which is a functional material by an inkjet method and drying it.
  • a plurality of second transparent electrodes 22 are formed by electrically connecting a plurality of electrode films 20 that are precursors of a plurality of second transparent electrodes by bridge wires 4 respectively.
  • a mold electrode substrate is obtained.
  • the plurality of first transparent electrodes 21 and the plurality of second transparent electrodes 22 extend in directions intersecting each other. Since the insulating film 3 is provided at the intersecting portion 23, the plurality of first transparent electrodes 21 and the plurality of second transparent electrodes 22 intersect with each other while being insulated from each other.
  • this invention is not limited to this, It can be used for the insulating field formation in the electronic field at large and various electronic components.
  • an insulating pattern according to the present invention for example, for forming an insulating layer of a semiconductor element or an insulating layer of a light emitting element because the effect of the present invention becomes particularly significant.
  • these insulating layers are often formed over different members, or formed over uneven members, and a functional material may be further patterned on the insulating layer. Many. Therefore, a significant effect is likely to be achieved from the viewpoint of ensuring insulation and optimizing the function expression by the functional material.
  • a conductive material is patterned as a functional material on the insulating layer.
  • a semiconductor element a semiconductor material is used as a functional material
  • a light emitting element if used, a function is provided.
  • a light-emitting material can be suitably patterned by an inkjet method or the like as a material. According to the present invention, it can be seen that the function of the functional material patterned on the insulating layer (conductivity by a conductive material, semiconductor characteristics by a semiconductor material, light emission characteristics by a light emitting material, etc.) can be suitably expressed.
  • the ink of the present invention is set in a temperature-controllable stress-control rheometer (Physica MCR300, manufactured by Anton Paar), heated to 100 ° C., cooled to 25 ° C. at a cooling rate of 0.1 ° C./s, and measured for viscosity. Went. The measurement was performed using a cone plate (CP75-1, manufactured by Anton Paar) having a diameter of 75.033 mm and a cone angle of 1.017 °.
  • the temperature control was performed by a Peltier element type temperature control device (TEK150P / MC1) attached to the Physica MCR300.
  • TEK150P / MC1 Peltier element type temperature control device
  • the temperature at which the viscosity is about 10 mPa ⁇ s suitable for inkjet emission was defined as the temperature during emission.
  • the viscosity after landing is a value at the temperature of the substrate (25 ° C.).
  • Inkjet application> Each ink composition prepared above is loaded into an ink jet recording apparatus having an ink jet recording head equipped with a piezo type ink jet nozzle.
  • Inks 1 and 2 are all set at 100 ° C. for the head, ink supply system, and the like.
  • the head temperature was set to 50 ° C., and each ink was applied to the area 3 of FIG. 2B by adjusting the amount of ink and the resolution so that the wet film thickness was 3 ⁇ m.
  • the substrate was adjusted to 25 ° C. and placed on the stage.
  • an LED lamp (8 W / cm 2 , water cooled unit) manufactured by Phoseon Technology was irradiated from a distance of 5 mm from the tube surface to cure the ink and form an insulating layer. .
  • a coating solution containing PEDOT / PSS (Orgacon IJ-1005 manufactured by Agfa Materials Co., Ltd.) as a conductive material is used in an ink jet recording apparatus having an ink jet recording head equipped with a piezoelectric ink jet nozzle. It was applied so as to form a bridge wiring 4 as shown in FIG.
  • ⁇ Evaluation method Patternability> The formed insulating layer was observed with a microscope, and the patterning property was evaluated according to the following evaluation criteria. [Evaluation criteria] ⁇ : The formation region of the insulating layer coincides with the desired formation region (region 3 in FIG. 2B). X: The formation region of the insulating layer does not coincide with the desired formation region (region 3 in FIG. 2B).
  • Bridge wiring suitability Bridge wiring suitability> The formed bridge wiring was observed with a microscope to see if it was disconnected. Further, it was confirmed with a tester whether electricity flows over the long side of the bridge wiring (vertical direction in FIG. 2C). Bridge wiring suitability was evaluated according to the following criteria. [Evaluation criteria] ⁇ : There is no disconnection and electricity flows. X: Disconnected and no electricity flows.
  • Electrode pattern 20 Electrode film (second transparent electrode precursor) 21: 1st transparent electrode 211: Island-like electrode part 212: Connection electrode part 22: 2nd transparent electrode 23: Crossing part 3: Insulating layer 4: Bridge wiring

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Human Computer Interaction (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Materials Engineering (AREA)
  • Wood Science & Technology (AREA)
  • Organic Chemistry (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Printing Elements For Providing Electric Connections Between Printed Circuits (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Inks, Pencil-Leads, Or Crayons (AREA)

Abstract

L'objectif de la présente invention est de proposer un procédé de formation d'un motif d'isolation qui permet de former facilement un motif souhaité par structuration d'une couche d'isolation (3) par un procédé à jet d'encre. Pour la structuration d'une couche d'isolation (3) par un procédé à jet d'encre selon le procédé de formation d'un motif d'isolation de la présente invention, une encre de formation d'une couche d'isolation est appliquée sur un substrat (1) afin de satisfaire l'exigence : (viscosité après application sur le substrat)/(viscosité à l'éjection) ≥ 100. L'encre de formation d'une couche d'isolation présente un mécanisme de changement de phase de fusion à chaud, de thixotropie ou de gélification.
PCT/JP2014/067977 2013-07-05 2014-07-04 Procédé de formation d'un motif d'isolation WO2015002316A1 (fr)

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Cited By (3)

* Cited by examiner, † Cited by third party
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CN106115244A (zh) * 2016-08-17 2016-11-16 浙江新世纪机械制造有限公司 全自动热压胶合设备的待胶合物输送装置
WO2022049994A1 (fr) 2020-09-03 2022-03-10 コニカミノルタ株式会社 Procédé de formation de motifs
WO2022085183A1 (fr) * 2020-10-23 2022-04-28 コニカミノルタ株式会社 Procédé d'enregistrement et procédé de fabrication d'article imprimé

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JP2007319821A (ja) * 2006-06-02 2007-12-13 Seiko Epson Corp 成膜方法および成膜装置
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WO2022049994A1 (fr) 2020-09-03 2022-03-10 コニカミノルタ株式会社 Procédé de formation de motifs
WO2022085183A1 (fr) * 2020-10-23 2022-04-28 コニカミノルタ株式会社 Procédé d'enregistrement et procédé de fabrication d'article imprimé

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