WO2014130560A2

WO2014130560A2 - Self-powered timer apparatus

Info

Publication number: WO2014130560A2
Application number: PCT/US2014/017174
Authority: WO
Inventors: Shantanu Chakrabartty
Original assignee: Michigan State University MSU
Current assignee: Michigan State University MSU
Priority date: 2013-02-20
Filing date: 2014-02-19
Publication date: 2014-08-28
Anticipated expiration: 2015-08-20
Also published as: WO2014130560A3; US8963647B2; US20140232444A1

Abstract

A method is provided for implementing a timer using a floating-gate transistor. The method includes: injecting a charge into a floating-gate transistor at an initial time, where a gate terminal of the floating-gate transistor is comprised of polysilicon encased by an insulating material; creating lattice imperfections at boundary of the polysilicon to cause leakage from the floating-gate transistor; measuring current read out from the floating-gate transistor at a time subsequent to the initial time; and determining an amount of time between the initial time and the subsequent time using the measured current.

Description

SELF-POWERED TIMER APPARATUS

CROSS-REFERENCE TO RELATED APPLICATIONS

[0001] This application claims the benefit of United States Patent Application Serial No. 13/771 ,890, filed on February 20, 2013, which is incorporated by reference herein.

GOVERNMENT RIGHTS

[0002] This invention was made with government support under Grant No. 0954752 by the National Science Foundation. The government has certain rights in the invention.

FIELD

[0003] The present disclosure relates to a self-powered timer apparatus.

BACKGROUND

[0004] Energy scavenging sensors which operate by harvesting energy from its ambient environment are useful for long-term sensing applications where the use of batteries (rechargeable or non-rechargeable) is considered to be impractical. Depending on the level of ambient energy that is available, the sensor can implement different functionalities that range from complex signal- processing to wirelessly transmitting data to an external radio-receiver. Figure 1 shows a typical range of scavengeable power and different sensor functionalities that can be achieved at these power levels. For instance, the self-powered sensor which was reported in "An asynchronous analog self-powered cmos sensor-data-logger with a 13.56 mhz rf programming interface", C. Huang et al can scavange nanowatts of power from ambient strain variations and can compute and store the statistics of the strain-signal. As the scavengeable power level is increased, the stored statistics can be wirelessly transmitted, as shown in Figure 1 . [0005] However, a major limitation of remotely powered sensor (e.g. using strain variations or using RF) is that events being monitored by the sensor cannot be time-stamped. This is because the sensor does not have access to a system timer or clock that is continuously active for the entire monitoring period. For a typical structural health monitoring application, the monitoring period could easily span more than 20 years. One method to achieve continuous powering is to scavenge energy from perennial sources of power like ambient thermal-noise, as illustrated in Figure 1 . Also shown in Figure 1 is that the typical power-level of ambient-thermal-noise « 10^_18W, which is challenging for operating conventional electronic devices. In this regards, biology serves as a motivation providing several examples where many biochemical computations (e.g. for DNA hybridization) are driven by thermal-noise and in many instances the computations are robust to variations in ambient temperature. Thermally-driven and diffusion-based information processing was also proposed by Charles Bennett as a way to approach fundamental limits of computation (in terms of energy-efficiency).

[0006] Therefore, there is a need for a self-powered timer that is driven by thermal processes and thermal energy.

[0007] This section provides background information related to the present disclosure which is not necessarily prior art.

SUMMARY

[0008] A method is provided for implementing a self-powered timer using a floating-gate transistor. The method includes: injecting a charge into a floating-gate transistor at an initial time, where a gate terminal of the floating- gate transistor is comprised of polysilicon encased by an insulating material; creating lattice imperfections at boundary of the polysilicon to cause leakage from the floating-gate transistor; measuring current read out from the floating- gate transistor at a time subsequent to the initial time; and determining an amount of time between the initial time and the subsequent time using the measured current.

[0009] In one aspect, the method for implementing a self-powered timer uses a floating-gate transistor and a reference floating-gate transistor. In this case, the method includes: injecting a charge into a first floating-gate transistor and a reference floating-gate transistor during initialization; reading out a reference current from the reference floating-gate transistor at a time subsequent to the initialization; estimating a thermal voltage for the first floating-gate transistor using the reference current; reading out current from the first floating- gate transistor concurrently with the reading out of the reference current; and compensating the current read out from the first floating-gate transistor using the estimated thermal voltage.

[0010] This section provides a general summary of the disclosure, and is not a comprehensive disclosure of its full scope or all of its features. Further areas of applicability will become apparent from the description provided herein. The description and specific examples in this summary are intended for purposes of illustration only and are not intended to limit the scope of the present disclosure.

DRAWINGS

[0011] Figure 1 is a diagram showing different amounts of scavengeable power levels and the corresponding sensor functionality that can be achieved;

[0012] Figures 2A and 2B are diagrams depicting an ideal floating-gate structure and a leaky floating-gate structure, respectively, with its energy-band diagram;

[0013] Figure 3 is a schematic and layout of an exemplary differential timer arrangement;

[0014] Figures 4A and 4B are graphs illustrating the measured source- to-drain current with respect to time for a reference structure and a leaky structure, respectively;

[0015] Figure 5 is a graph illustrating the temperature compensated leakage characteristics for two example timers; and

[0016] Figure 6 is a flowchart illustrating a method for implementing a timer using a floating-gate transistor.

[0017] The drawings described herein are for illustrative purposes only of selected embodiments and not all possible implementations, and are not intended to limit the scope of the present disclosure. Corresponding reference numerals indicate corresponding parts throughout the several views of the drawings. DETAILED DESCRIPTION

[0018] Figure 2 illustrates how a floating-gate of a floating-gate transistor can formed by completely insulating a piece of polysilicon with an insulating material, such as silicon-dioxide. The energy band-diagram corresponding to an ideal floating-gate is also shown in Figure 2A where the oxide forms an energy barrier that prevents the electrons to either surmount or tunnel through the barrier. Therefore, any electrons that are injected onto the floating-gate are retained for a long-period of time, demonstrating negligible leakage (e.g., retention of 8 bits over 8 years). The high-quality barrier and hence the retention is determined by the quality of polysilicon silicon-di-oxide interface, which for thermally grown oxide exhibits ultra-low density of imperfections. While reference is made to particular materials, it is understood that the broader aspects of this disclosure are applicable to other types of materials which may be used to construct a floating gate.

[0019] Referring to Figure 2B, when a metallic contact is formed on polysilicon, the polysilicon surface is strained due to metal-polysilicon lattice mismatch and creates spurious traps at the interface. Therefore, even if the metallic junction is left unconnected, the charge on the polysilicon floating-gate leaks out over a long-duration of time (as shown in Fig 2B). This leakage is typically considered to be a nuisance and several methods have been proposed to reduce this artifact. In this disclosure, the leakage characteristic is exploited to implement timers that can discharge electrons from the floating-gate transistor over long-durations of time.

[0020] When a potential difference exists between the floating-gate and the surrounding metal the electrons can leak out of the floating-gate due to the following three physical phenomena: (a) trap-assisted tunneling where the electrons move to an unoccupied trap-state by defects close to the metal- polysilicon-oxide interface; (b) Modified Poole-Frenkel (MPF) or internal Schottky emission of the trapped electrons into the conduction band of the silicon-di- oxide; and (c) Thermal-field emission of Fermi-level electrons from the metal directly into the conduction band of the silicon-di-oxide. While trap-assisted tunneling mainly affects the leakage current on short time-scales, MPF and thermal-field emission of electrons are dominant for long time-scales. For this disclosure, the focus is to exploit the combined effect of all the different leakage mechanism. However, a common attribute of different leakage mechanism is that the leakage current increases with the increase in the number of defects at the polysilicon interface. In other words, leakage can be effectively controlled by the number of metallic vias connected to the floating gate.

[0021] Exploiting the oxide-leakage current to implement integrators and timers would, however, require precision measurement of the drift in floating-gate voltage. For instance, a timer that discharges one volt over a period of 20 years would drift by less than ΙΟμν/hour. A timer read-out module can be used to determine the residual charge stored in the floating gate transistor. In one exemplary embodiment, the read-out module uses a pMOS transistor to measure the residual charge, where the gate terminal of the floating-gate transistor is electrically coupled to the gate of a pMOS transistor in the read-out module. Current flowing through the floating-gate transistor can then be measured at the drain terminal of the floating-gate transistor. The measured current is proportional to the floating-gate voltage which in turn is proportional to the residual charge retained on the floating-gate. Other techniques for reading out the current from the floating-gate transistor are also contemplated by this disclosure. It is envisioned that the read-out module could be any current measurement instrument like an integrating analog-to-digital converter or a commercial source-meter like Keithley 2400.

[0022] Figure 3 depicts a schematic and layout for an exemplary differential timer arrangement. The differential timer arrangement is comprised generally of a first floating-gate transistor M₁ and an ideal floating-gate transistor M₂ (with no metallic vias) acting as a reference structure. Note that the floating- gate of transistor M₁ has multiple floating metallic contacts. Ideally, the current through M₂ should remain unchanged (no leakage) once the charge on its floating-gate has been programmed. [0023] The common method for programming floating-gates is by using FowlerNordheim (FN) tunneling or by using hot-electron injection. FN tunneling removes the electrons from the floating-gate node by applying a high-voltage (e.g., 15 V in 0.5μηι CMOS process) across a parasitic nMOS capacitor C_tun (as shown in Figure 3). Hot-electron injection, however, requires lower voltage (e.g., 4.2 V in 0.5μηι CMOS process) than tunneling and hence is the primary mechanism for precision programming of floating-gates. The hot-electron programming procedure, involves applying greater than 4.2 V across the source and drain terminals of the transistors M₁ and M₂. The large electric field near the drain of the pMOS transistor creates impact-ionized hot-electrons whose energy when exceeds the gateoxide potential barrier (3.2 eV) can get injected onto the floating-gate. Because the hot-electron injection in a pMOS transistor is a positive feedback process and can only be used to add electrons to the floating gate, the process needs to be carefully controlled and periodically monitored to ensure the floating-gate voltage is programmed to a desired precision. Known methods achieve the desired precision either by adjusting the duration for which the FG transistor is injected or by adjusting the magnitude of the injection pulses.

[0024] Compensating for the effects of temperature variations using the differential timer arrangement is further described. Under sub-threshold biasing, the drain current l_ref through M₂ can be expressed in terms of its floating-gate charge Q_ref as

where /₀ is the characteristic current, κ is the gate-efficiency factor, C_T is the total capacitance of floating-gate and U_T = kT/e is the thermal-voltage and is directly proportional to the ambient temperature. The reference current l_ref could be used to compensate for the effects of temperature variations when the current l _out is read-out. The compensation procedure involves measuring l_ref and l_out at two different values of the source voltage l^ and V^- Assuming an ideal matching of the transistors M₁ and M₂ , the change in floating-gate charge from time-instant t_£ to time-instant t_i+1 can be estimated to be

The index i represents the ith measurement and U_{T i} is the thermal voltage at time t_£. Note that U_{T i} will vary with i as during long-term measurements, the ambient temperature might vary. By measuring the reference currents l_ref>sl , re ,s2 ^at two different source voltages V_SL and V_S2, the value of U_{T I} can be estimated as

U_{T I} = . (3)

In I_ref s _! - In I_ref _iS2

Since temperature variations are slower compared to time difference between the f^h and i+ 1^th measurement, U_T can be assumed to be equal to U_T +i. Hence, by combining equation 3 with equation 2, the effect of temperature variations on timer-readout can be compensated.

[0025] The accurate estimation and compensation of U_T makes it possible to isolate the effect of oxide-leakage from ambient temperature effects. Since κ and C_T are almost constant with respect to time and temperature,

c_T can be estimated instead of Q_FG .

[0026] Next, an empirical model of the oxide-leakage current is presented. The leakage current l_ikg is proportional to the potential difference AV across the floating-gate and the surrounding metal. This can be expressed as

l_lkg = KAV (4) where κ is a proportionality constant determined by defect state distribution and temperature. Deduced from equation 4, the change in Q_FG is computed as a function of time according to

^ (t) = ^ (l - _e-^) (5)

[0027] This equation implies the charge on the floating-gate will change exponentially with respect to time and is similar to the transient response of an RC circuit. The time constant of this exponential decay can be estimated to be

T = By varying C_r and K, timers can be implemented with different time- constants and different discharge characteristics. As indicated earlier, the parameter κ can be modified by changing the density of the traps and the distance between the floating-gate and the surrounding metal. The density of traps can be increased by adding more metallic contacts in the timer layout. Other means for varying these two parameters are also contemplated by this disclosure.

[0028] Two different topologies of the proposed timer have been fabricated in a 0.5μηι standard CMOS process. The reference floating-gate structure has no vias; whereas, the floating-gate labeled "timerl " has 35 vias and the floating-gate labeled "timer2" has only one via.

[0029] In a first set of experiments, the reference floating-gate and the timerl floating-gate were precisely programmed to the same current (using hot- electron injection). The power-source to the timer-circuit was disabled by setting the source voltage V_s to zero. The structure was periodically energized (every hour) by setting V_s to V_sl ^■ V_s3. For each value of V_s, the output current I_out and the reference current l_ref is measured using a Keithley 2400 source meter. Figure 4A shows the measured l_ref with respect to time. Note that the ideal floating-gate structure should exhibit negligible leakage. Therefore, the variations in the measured l_ref can be attributed to variations in temperature. Figure 4B plots the measured l_ref with respect to time and also shows variability due to temperature variations. The temperature compensation method described above was applied and Figure 5 shows the estimated leakage characteristics corresponding to the timerl and timer2.

[0030] The measured results show that the timer leakage characteristics match the empirical exponential model. It can also be observed that the output of timer2 is more noisier than the output of timerl . It is because the initial voltage difference between the floating-gate and surrounding metal for timer2 is relatively smaller than that of timerl , thus the measurement is more vulnerable to the noise. The error could be reduced by using more sophisticated measurement techniques.

[0031] The fitting curves give the time constant of the corresponding timer. Based on the empirical exponential model, the time-constants for timerl and timer2 is estimated to be approximately 3.6 hours and 24.5 hours, respectively. This result verifies the conclusion that the number of metallic contacts could affect the leakage current: more contacts lead to a smaller time- constant.

[0032] Given this understanding, a method for implementing a timer using a floating-gate transistor is set forth generally in relation to Figure 6. The timer circuit includes a floating-gate transistor, where the floating-gate is comprised of polysilicon or some other silicon based material encased by an insulating material. Of note, the boundary of the polysilicon is created at 62 with lattice imperfections to cause leakage from the floating-gate transistor. In one exemplary embodiment, the lattice imperfections are created by electrically connecting one or more metal vias to the polysilicon of the floating-gate transistor as discussed above. Other techniques for creating lattice imperfections also fall within the broader aspects of this disclosure. It is also understood that other circuit components, such as capacitors, may be need to implement the timer circuit.

[0033] To initiate the timer, a charge is injected at 64 into the floating- gate transistor. The charge may be injected, for example using a linear hot- electron injection technique as described in U.S. provisional application no. 61 /602,247 entitled "Self-Powered Strain Gauge" and which is incorporated herein by reference. Other techniques for injecting a charge also fall within the scope of this disclosure.

[0034] At some subsequent time, current is read out at 66 from the floating-gate transistor. The current can be read out and measured using a timer read-out module as noted above. The measured current is proportional to the potential difference across the floating-gate and thus the residual charge on the floating-gate. Furthermore, the charge on the floating-gate will change exponentially with respect to time as shown in equation (5) above. Accordingly, the amount of time between the time of initialization and the time the current is read out from the transistor can be determined at 68 by computing the change in charge, Q_FG, on the floating-gate transistor. In this way, the floating-gate transistor can serve as a timer.

[0035] In one embodiment, the timer arrangement may be implemented in a self-powered sensor. For further details regarding an exemplary self- powered sensor, reference may be made to U.S. Patent Nos. 7,757,565 and 8,056,420. Moreover, it is contemplated that broader concept of implementing such a timer is applicable outside of self-powered sensors.

[0036] The techniques for computing the amount of time may be implemented by one or more computer programs executed by one or more processors of the timer read-out module. The computer programs include processor-executable instructions that are stored on a non-transitory tangible computer readable medium. The computer programs may also include stored data. Non-limiting examples of the non-transitory tangible computer readable medium are nonvolatile memory, magnetic storage, and optical storage.

[0037] Some portions of the above description present the techniques described herein in terms of algorithms and symbolic representations of operations on information. These algorithmic descriptions and representations are the means used by those skilled in the data processing arts to most effectively convey the substance of their work to others skilled in the art. These operations, while described functionally or logically, are understood to be implemented by computer programs. Furthermore, it has also proven convenient at times to refer to these arrangements of operations as modules or by functional names, without loss of generality.

[0038] Unless specifically stated otherwise as apparent from the above discussion, it is appreciated that throughout the description, discussions utilizing terms such as "processing" or "computing" or "calculating" or "determining" or "displaying" or the like, refer to the action and processes of a computer system, or similar electronic computing device, that manipulates and transforms data represented as physical (electronic) quantities within the computer system memories or registers or other such information storage, transmission or display devices.

[0039] Certain aspects of the described techniques include process steps and instructions described herein in the form of an algorithm. It should be noted that the described process steps and instructions could be embodied in software, firmware or hardware, and when embodied in software, could be downloaded to reside on and be operated from different platforms used by real time network operating systems. [0040] The timer read-out module may be specially constructed for the required purposes, or it may comprise a general-purpose computer selectively activated or reconfigured by a computer program stored on a computer readable medium that can be accessed by the computer. Such a computer program may be stored in a tangible computer readable storage medium, such as, but is not limited to, any type of disk including floppy disks, optical disks, CD-ROMs, magnetic-optical disks, read-only memories (ROMs), random access memories (RAMs), EPROMs, EEPROMs, magnetic or optical cards, application specific integrated circuits (ASICs), or any type of media suitable for storing electronic instructions, and each coupled to a computer system bus. Furthermore, the computers referred to in the specification may include a single processor or may be architectures employing multiple processor designs for increased computing capability.

[0041] The foregoing description of the embodiments has been provided for purposes of illustration and description. It is not intended to be exhaustive or to limit the disclosure. Individual elements or features of a particular embodiment are generally not limited to that particular embodiment, but, where applicable, are interchangeable and can be used in a selected embodiment, even if not specifically shown or described. The same may also be varied in many ways. Such variations are not to be regarded as a departure from the disclosure, and all such modifications are intended to be included within the scope of the disclosure.

Claims

CLAI MS What is claimed is:

1 . A method for implementing a timer using a floating-gate transistor, comprising:

injecting a charge into a floating-gate transistor at an initial time, where a gate terminal of the floating-gate transistor is comprised of polysilicon encased by an insulating material;

creating lattice imperfections at boundary of the polysilicon to cause leakage from the floating-gate transistor;

measuring current read out from the floating-gate transistor at a time subsequent to the initial time; and

determining an amount of time between the initial time and the subsequent time using the measured current.

2. The method of claim 1 wherein creating lattice imperfections further comprises electrically connecting one or more metal vias to the polysilicon of the floating-gate transistor.

3. The method of claim 1 wherein measuring current further comprises using a metal-oxide-semiconductor field-effect transistor having a gate coupled to a gate of the floating-gate transistor.

4. The method of claim 1 further comprises determining the amount of time by computing change in charge, QFG, on the floating-gate transistor as a function of time according to

where CT is total capacitance of the floating-gate transistor and k is the gate- efficiency factor.

5. The method of claim 1 further comprise controlling rate of leakage from the floating-gate transistor by varying total amount of capacitance of the floating gate transistor.

6. The method of claim 1 further comprises

injecting a charge into a reference floating-gate transistor at the initial time;

measuring a reference current read out from the floating-gate transistor at the subsequent time;

estimating the thermal voltage at the initial time using the reference current; and

compensating the current read out from the floating-gate transistor using the estimated thermal voltage.

7. A method for implementing a timer using a floating-gate transistor, comprising:

injecting a charge into a first floating-gate transistor and a reference floating-gate transistor during initialization, where each of the floating-gate transistors is comprised of polysilicon encased by an insulating material and the first floating-gate transistor having lattice imperfections at boundary of the polysilicon;

reading out a reference current read out from the reference floating- gate transistor at a time subsequent to the initialization;

estimating a thermal voltage for the first floating-gate transistor using the reference current;

reading out current from the first floating-gate transistor concurrently with the reading out of the reference current; and

compensating the current read out from the first floating-gate transistor using the estimated thermal voltage.

8. The method of claim 7 further comprises determining an amount of time between the initialization and the time at which current is read out from the first floating-gate transistor using the compensated current read out from the first floating-gate transistor.

9. The method of claim 8 further comprises determining the amount of time by computing change in charge, Q_FG, on the floating-gate transistor as a function of time according to

^KA(2FG ₌ KQFG.O ^ _ _e -j where C_T is total capacitance of the floating-gate transistor and Z is the gate- efficiency factor.

10. The method of claim 7 further comprises electrically connecting one or more metal vias to the polysilicon of the first floating-gate transistor to create lattice imperfections.

1 1 . The method of claim 7 further comprises estimating a thermal voltage for the first floating-gate transistor in accordance with

where /_{re <sl}, /_re/,s2 is the reference current measured at two different source voltages V_sl and V_s2.

12. A timer for use in a self-powered sensor, comprising:

a substrate;

a timer floating-gate transistor formed on the substrate, the first floating-gate transistor having a gate terminal comprised of polysilicon encased by an insulating material and one or more metal vias electrically coupled to the polysilicon; and

a reference floating-gate transistor formed on the substrate and disposed adjacent to the first floating-gate transistor.

13. The timer of claim 12 operably couples to a timer read-out module, wherein the timer read-out module includes

a read-out circuit interfaced with the timer floating-gate transistor and the reference floating-gate transistor and operable to read out a timer current from the timer floating-gate transistor and a reference current from the reference floating-gate transistor; and

a controller configured to measure the timer current read out from the timer floating-gate transistor and operates to determine an amount time since a charge was injected into the timer floating-gate transistor.

14. The timer read-out module of claim 13 wherein the controller estimates a thermal voltage for the timer floating-gate transistor using the reference current and compensates the timer current using the estimated thermal voltage.

15. The timer read-out module of claim 13 wherein the controller determines the amount of time by computing change in charge, Q_FG, on the floating-gate transistor as a function of time according to i^ (t) = ¾ (l - _e^)

where C_T is total capacitance of the floating-gate transistor and A: is the gate- efficiency factor.

16. The timer read-out module of claim 13 wherein the read-out circuit is configured with a first input node that couples to a drain terminal of the timer floating-gate transistor and a second input node that couples to a drain terminal of the reference floating-gate transistor.