WO2014117991A2 - Pompe à vide, en particulier pompe roots - Google Patents

Pompe à vide, en particulier pompe roots Download PDF

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Publication number
WO2014117991A2
WO2014117991A2 PCT/EP2014/050459 EP2014050459W WO2014117991A2 WO 2014117991 A2 WO2014117991 A2 WO 2014117991A2 EP 2014050459 W EP2014050459 W EP 2014050459W WO 2014117991 A2 WO2014117991 A2 WO 2014117991A2
Authority
WO
WIPO (PCT)
Prior art keywords
valve
diaphragm
vacuum pump
pump
pump according
Prior art date
Application number
PCT/EP2014/050459
Other languages
German (de)
English (en)
Other versions
WO2014117991A3 (fr
Inventor
Dirk STRATMANN
Armin Bertsch
Wolfgang Giebmanns
Original Assignee
Oerlikon Leybold Vacuum Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Leybold Vacuum Gmbh filed Critical Oerlikon Leybold Vacuum Gmbh
Publication of WO2014117991A2 publication Critical patent/WO2014117991A2/fr
Publication of WO2014117991A3 publication Critical patent/WO2014117991A3/fr

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/24—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/12—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
    • F04C29/124—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet with inlet and outlet valves specially adapted for rotary or oscillating piston pumps
    • F04C29/126—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet with inlet and outlet valves specially adapted for rotary or oscillating piston pumps of the non-return type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/50—Conditions before a throttle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/52—Conditions after a throttle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/28—Safety arrangements; Monitoring

Definitions

  • Vacuum pump in particular Roots pump
  • the invention relates to a vacuum pump, in particular a Roots or Roots pump.
  • Vacuum pumps have pumping elements arranged in a pumping chamber, in which Roots pumps are two Roots.
  • Roots pumps are two Roots.
  • the capacity of Roots pumps is limited in particular by a maximum pressure difference between the suction side and pressure side. This is approx. 30 mbar for Roots pumps with a large-volume pump chamber and up to 100 mbar for smaller Roots pumps.
  • a thermal overload of the Roots pump, in particular of the drive motor can take place.
  • Roots pumps have a connection channel connecting the pressure side to the suction side, through which the conveyed medium can flow back from the pressure side to the suction side.
  • a valve the so-called bypass valve, arranged.
  • Upon reaching a predetermined pressure difference opens the usually weight and / or spring-loaded valve.
  • Roots pump arranged valve Such, in the connecting channel of a Roots pump arranged valve is known for example from DE 28 44 019. It deals this is a poppet valve which has a plate-shaped valve body for closing a passage opening in the connecting channel.
  • Poppet valves with or without hydraulic or mechanical damping have the disadvantage that large masses must be moved. As a result, such poppet valves are sluggish.
  • large-volume Roots pumps correspondingly large poppet valves must be provided so that in a short time a sufficient amount of medium can flow back through the connecting channel.
  • This has the further disadvantage that a large space is required for the poppet valve. This leads to large pump housing dimensions and thus to increased costs.
  • Another disadvantage of spring and weight-loaded poppet valves is that due to the acceleration of gravity, the mounting position must be considered.
  • a special arrangement of the poppet valve in a 45 ° angle to the conveying direction of the Roots pump is known from DE 2844019. This makes it possible, the Roots pump at least in two different Install mounting positions in which the poppet valve is always arranged at a 45 ° angle to the acceleration of gravity.
  • flapper valve As a bypass valve.
  • a flap valve is described, for example, in DE 102008034073.
  • the provision of flap valves also has the advantage that they have a small space.
  • the flapper valve is spring loaded.
  • the spring force applied by the spring the pressure difference between the pressure side and the suction side is defined at which the flapper valve opens.
  • the spring force can be adjusted. This is expensive and possible only in a relatively small power range. In order to realize a greater variation of the spring force, it is therefore necessary to replace the spring. This is extremely expensive and can only be done with the help of special tools.
  • the springs can only be replaced by service personnel of the manufacturer and not by the customer himself.
  • the object of the invention is to provide a vacuum pump, in particular a Roots pump, whose bypass valve can be adjusted in a simple manner for operation at different operating points.
  • the vacuum pump according to the invention is in particular a Roots pump.
  • the vacuum pump has arranged in a pumping chamber pumping elements and in particular Wälzkolben. Furthermore, the pressure side of the suction chamber is connected to the suction side of the suction chamber via a connecting channel. In the connecting channel, a valve device is arranged in a passage opening.
  • the valve device arranged in the connecting channel is adjustable Aperture device assigned, in particular upstream in the flow direction.
  • adjustable Aperture device assigned, in particular upstream in the flow direction.
  • the potential engine power can not be exploited, while at high mass flows, the required engine power leads to an undesirable increase in engine temperature, especially in continuous operation.
  • This problem can be avoided by providing an adjustable aperture device. By adjusting the diaphragm device and thus by the definition of the effective cross-sectional area effected thereby, the desired opening pressure can be adjusted depending on the operating conditions. As a result, the engine power can be fully utilized for the respective application and, as a rule, a shutdown of the engine, in particular due to overheating, can be avoided.
  • the diaphragm device has an adjustable diaphragm element.
  • a plurality of diaphragm elements are provided, wherein the diaphragm elements in Particularly preferred embodiment independently, ie, for example, individually or in groups are adjustable.
  • the adjustment of the at least one diaphragm element for changing the effective cross-sectional area can be effected by displacement and / or rotation of the diaphragm element.
  • By moving the diaphragm element can be changed in a simple manner, the aperture and thus the effective cross-sectional area.
  • In cross-section semicircular or rectangular aperture element can also be done by rotating the diaphragm element, a change in the effective cross-sectional area.
  • the position of the diaphragm device is pressure-independent, so that the effective cross-sectional area is determined only by the position of the diaphragm device and does not depend on the differential pressure.
  • At least one sealing element is provided between the diaphragm device and the valve device. If the diaphragm device has a plurality of diaphragm elements, in particular a plurality of sealing elements or a common sealing element are provided. By providing the sealing elements it is ensured that only the static pressure acts on the valve device, in particular the valve flap. The static pressure primarily determines the required opening force.
  • the diaphragm device and in particular the at least one diaphragm element of the diaphragm device are connected to an actuating device.
  • the adjusting device may be a manually operable actuator.
  • the adjusting device can be provided with slidable aperture elements adjusting screws.
  • an electromagnetic, pneumatic and / or hydraulic adjusting device for adjusting the diaphragm device and in particular the at least one diaphragm element provided.
  • Particularly preferred is the provision of a stepping motor, for example, the actuation of an adjusting spindle or a sliding crank mechanism.
  • a stepping motor and a rotation of individual aperture elements is possible in a simple manner.
  • the diaphragm device is designed as a throttle valve.
  • a throttle valve upstream of the valve device in the flow direction.
  • the throttle valve is preferably connected to an actuator as described above.
  • the diaphragm device has both one or more adjustable diaphragm elements and a throttle valve.
  • a throttle valve e.g. upstream of a flapper valve produces, as aerodynamic drag, flow losses which reduce the pressure prevailing at the flapper valve and thus allow the opening pressures of the flapper valve to operate at other operating points.
  • valve device itself is designed as a throttle valve.
  • a throttle valve There is thus a function of a differential pressure, a partial and / or complete opening of the throttle.
  • the actuation of the throttle valve is in turn carried out by appropriate adjusting devices as described above.
  • Fig. 1 is a schematic sectional view of a Roots pump
  • Fig. 3 is a schematic enlarged cross-sectional view of a
  • Fig. 5 is a schematic sectional view of an embodiment of the invention, in which the flapper valve is combined with a throttle valve and
  • Fig. 6 is a schematic sectional view of a throttle valve designed as a valve device.
  • a Roots pump according to the invention has two Wälzkolben 12 arranged in a pump chamber 10.
  • the Wälzkolben 12 rotate synchronized in opposite directions in the direction of arrow 13 about perpendicular to the plane extending axes of rotation 14.
  • the Wälzkolben 12 are arranged in a housing 16. By the Wälzkolben 12 conveying the medium takes place in the direction of a reed 18 from a suction side 20 in the direction of a pressure side 30th
  • connection channel 22 arranged laterally next to the pump chamber 10 is provided in the housing 16.
  • the connecting channel 22 preferably extends over the entire width of the pump housing running perpendicular to the plane of the drawing 16.
  • the connecting channel thus preferably has a rectangular cross-section.
  • a valve device 24 is arranged in the connecting channel 22 .
  • the spring-loaded valve device 24 opens automatically, so that part of the fluid delivered flows back from the pressure side in the direction of a section 26 to the suction side 20.
  • the valve device 24 has a valve flap 28 (FIG. 2) which closes off a rectangular passage opening 32 of the connection channel 22.
  • the passage opening 32 preferably extends substantially over the entire width of the connection channel 22 and thus approximately the entire housing 16.
  • the valve flap 28 is pivotable about a pivot axis 34 in the direction of an arrow 36.
  • a pivot spring 34 surrounding the torsion spring 40, a holding or closing force is applied to the valve flap 28. Because of this closing force, the valve 24 opens only from a defined pressure difference between the pressure side 30 and the suction side 20 (FIG. 1) of the suction chamber 10.
  • the pivot axis 34 is disposed on the side facing away from the pumping chamber 10 side, so that for opening the valve flap 28, a pivoting of the valve flap takes place in a housing corner. Due to the thus required for the flap valve small space relatively small outer dimensions of the pump housing 16 can be realized.
  • apertures in the passage opening 32 can be mounted by opening a housing cover 38.
  • the effective cross-sectional area of the passage opening 32 can be changed. hereby there is a change in the pressure difference at which the valve flap 28 opens.
  • the mounting cover 38 it is also possible to provide additional weights on the valve flap or to remove it. This also makes it possible to vary the differential pressure.
  • a preferred embodiment of the invention with adjustable diaphragm means 42 is shown in Figures 3 and 4.
  • the diaphragm device 42 is arranged in FIG. 3 below the valve flap 28 or upstream in the flow direction of the valve flap 28.
  • the valve device 24 corresponds to the valve device 24 described with reference to FIGS. 1 and 2.
  • a sealing element 43 is provided, which extends in particular over the entire underside of the valve flap 28. This ensures that the individual diaphragm elements, which are in particular the diaphragm blades 44 in the exemplary embodiment shown, are always sealed with respect to the valve flap 28.
  • an adjusting spindle 46 is provided in the illustrated embodiment. This adjusting spindle 46 protrudes through a projection 48 of the diaphragm element 44, in which a thread is provided. By rotating the spindle 46, the diaphragm element 44 can thus be displaced in the direction of an arrow 50.
  • a plurality of diaphragm elements 44 are provided, which are connected to one another, so that the diaphragm elements 44 can be displaced via a common adjusting spindle 46.
  • a plurality of adjusting spindles it is possible, for example, to provide a plurality of adjusting spindles, so that individual diaphragm elements can be moved separately or in groups.
  • the diaphragm elements 44 preferably have a non-circular, for example semicircular or rectangular cross-section.
  • valve device 24 is again provided.
  • a diaphragm device according to the embodiment shown in Figures 3 and 4.
  • a throttle flap 52 of the valve device 24 is connected upstream as a diaphragm device.
  • the throttle flap 52 can be pivoted about a pivot axis 54 in the direction of an arrow 56.
  • the gas flow in the direction of arrow 57 by turning the flap 52 in the direction of arrow 56 a more or less large aerodynamic resistance are applied, which in turn causes a pressure drop through which the operating point at which opens the valve means can vary.
  • the "active" pressure difference of the spring-loaded flap valve always remains the same.
  • the entire valve device is replaced by a throttle valve (FIG. 6).
  • the throttle valve substantially corresponds to the throttle flap 52 and is also pivotable about an axis 54. Since the sealed in the closed state valve flap 28 is omitted in this embodiment, additional sealing elements 58 are provided, which can be arranged either on a housing extension 60 or at corresponding outer regions of the throttle valve 52.
  • an adjusting device such as an electric motor or the like is provided.
  • the adjusting device is connected to a control device, such as the control device of the vacuum pump.
  • the control device is a frequency converter.
  • the control device can have sensors for measuring pressure, for example in the connecting channel, so that an adjustment of the diaphragm device or the throttle valve can take place as a function of operating data and / or measured pressures.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Reciprocating Pumps (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Abstract

L'invention concerne une pompe à vide telle qu'une pompe Roots qui présente une chambre d'aspiration (10) dans laquelle des éléments (12) de pompe sont disposés. Un côté pression (30) est relié à un côté aspiration (20) de la chambre d'aspiration (10) par un canal de liaison (22). Un dispositif de soupape (24) est en outre disposé dans une ouverture de passage (32) du canal de liaison (22). Pour varier la surface de section transversale active de l'ouverture de passage (32), un dispositif de diaphragme (42) ajustable est associé au dispositif de soupape (24) dans une des formes de réalisation préférées.
PCT/EP2014/050459 2013-01-30 2014-01-13 Pompe à vide, en particulier pompe roots WO2014117991A2 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE202013000913.6 2013-01-30
DE202013000913.6U DE202013000913U1 (de) 2013-01-30 2013-01-30 Vakuumpumpe insbesondere Wälzkolbenpumpe

Publications (2)

Publication Number Publication Date
WO2014117991A2 true WO2014117991A2 (fr) 2014-08-07
WO2014117991A3 WO2014117991A3 (fr) 2014-12-31

Family

ID=49956185

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2014/050459 WO2014117991A2 (fr) 2013-01-30 2014-01-13 Pompe à vide, en particulier pompe roots

Country Status (2)

Country Link
DE (1) DE202013000913U1 (fr)
WO (1) WO2014117991A2 (fr)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2311936A (en) * 1941-04-01 1943-02-23 Gen Motors Corp Engine blower control
US4744734A (en) * 1987-07-20 1988-05-17 Ingersoll-Rand Company Means for controlling air discharge, in an air compressor
US4763636A (en) * 1985-09-30 1988-08-16 Aisin Seiki Kabushiki Kaisha Mechanical supercharger
US5127386A (en) * 1990-06-01 1992-07-07 Ingersoll-Rand Company Apparatus for controlling a supercharger
WO2009074408A2 (fr) * 2007-12-13 2009-06-18 Oerlikon Leybold Vacuum Gmbh Pompe à vide et procédé d'utilisation d'une pompe à vide
DE102008034073A1 (de) * 2008-07-22 2010-01-28 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe, insbesondere Wälzkolbenpumpe

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2844019A1 (de) 1978-10-09 1980-04-17 Leybold Heraeus Gmbh & Co Kg Vakuumpumpe, insbesondere waelzkolben-vakuumpumpe
DE4136950A1 (de) * 1991-11-11 1993-05-13 Pfeiffer Vakuumtechnik Mehrstufiges vakuumpumpsystem
DE19745448C1 (de) * 1997-10-15 1999-01-21 Zahnradfabrik Friedrichshafen Verdrängerpumpe
DE10160200A1 (de) * 2001-12-07 2003-06-18 Zf Lenksysteme Gmbh Flügelzellenpumpe
DE10356464B4 (de) * 2003-12-04 2007-09-20 Zf Lenksysteme Gmbh Hydraulik-Lenksystem
DE102008043246A1 (de) * 2008-10-29 2010-05-06 Zf Lenksysteme Gmbh Hyraulische Servolenkung

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2311936A (en) * 1941-04-01 1943-02-23 Gen Motors Corp Engine blower control
US4763636A (en) * 1985-09-30 1988-08-16 Aisin Seiki Kabushiki Kaisha Mechanical supercharger
US4744734A (en) * 1987-07-20 1988-05-17 Ingersoll-Rand Company Means for controlling air discharge, in an air compressor
US5127386A (en) * 1990-06-01 1992-07-07 Ingersoll-Rand Company Apparatus for controlling a supercharger
WO2009074408A2 (fr) * 2007-12-13 2009-06-18 Oerlikon Leybold Vacuum Gmbh Pompe à vide et procédé d'utilisation d'une pompe à vide
DE102008034073A1 (de) * 2008-07-22 2010-01-28 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe, insbesondere Wälzkolbenpumpe

Also Published As

Publication number Publication date
DE202013000913U1 (de) 2014-05-05
WO2014117991A3 (fr) 2014-12-31

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