WO2013168274A1 - Drive device - Google Patents

Abstract

The present invention solves the problem of difficulties with miniaturization and positioning magnets in suitable locations due to coils being disposed in such a manner as to surround a mirror in a drive device such as a MEMS scanner in which a driven object such as a mirror is made to rotate. This drive device (105) is provided with: a second base (110-2) that rotates around the X-axis via first elastic parts (120a-1, 120b-1) inside a first base (110-1); and a driven part (130) that rotates around the Y-axis via second elastic parts (120a-2, 120b-2) inside the second base. The driven part is disposed on the outsides of the windings of a first coil (140a) and a second coil (140b), which are disposed on the second base with the driven part therebetween. In addition, magnetic field applying parts (161, 162), which each apply a magnetic field to each coil, are provided, and the first coil is disposed in such a manner that the center of the first coil is positioned in a position that is offset along the Y-axis from the axis of rotation of the second base.

Description

Drive device

The present invention relates to a technical field of a driving device such as a MEMS scanner that rotates a driven object such as a mirror.

For example, in various technical fields such as a display, a printing apparatus, precision measurement, precision processing, and information recording / reproduction, research on MEMS (Micro Electro Mechanical System) devices manufactured by semiconductor process technology is being actively promoted. As such a MEMS device, for example, a display field in which light incident from a light source is scanned with respect to a predetermined screen region to embody an image, or light reflected by scanning light with respect to a predetermined screen region. In the scanning field where light is received and image information is read, a micro-structured mirror driving device (optical scanner or MEMS scanner) has attracted attention.

In general, a mirror driving device includes a fixed main body serving as a base, a mirror that can rotate around a predetermined rotation axis, and a torsion bar (twisting member) that connects or joins the main body and the mirror. The structure provided is known (refer patent document 1).

Special table 2007-522529

In a mirror driving device having such a configuration, a configuration in which a mirror is driven using a coil and a magnet is generally used. In such a configuration, for example, a configuration in which a coil is directly attached to the mirror so as to surround the mirror can be given as an example. In this case, a force in the rotational direction is applied to the mirror by the interaction between the magnetic field generated by passing a current through the coil and the magnetic field of the magnet, and as a result, the mirror is rotated. In Patent Document 1 described above, a configuration is adopted in which the coil and the magnet are arranged so as to cause distortion in the twisting direction (in other words, the rotation axis direction of the mirror) of the torsion bar. In this case, the torsion bar is distorted in the twisting direction due to the interaction between the magnetic field generated by passing a current through the coil and the magnetic field of the magnet, and the distortion in the twisting direction of the torsion bar rotates the mirror.

However, since the coil is arranged so as to surround the mirror, the coil becomes relatively large. As a result, the magnet for applying a magnetic field to the coil is also relatively large. This causes a technical problem that the magnetic gap between the coil and the magnet becomes large and the MEMS scanner cannot be downsized. In addition, since the coil is arranged so as to surround the mirror, the arrangement of the magnet is limited or it is difficult to arrange the magnet at a suitable position. Specifically, since the reflection of light by the mirror is hindered, it is possible to arrange a magnet above the center of the coil (specifically, above the inside of the coil winding (that is, above the mirror). Have difficulty.

In contrast to such a conventional mirror driving device, the present invention, for example, uses a coil and a magnet to drive a mirror (or a driven object to be rotated) while driving a relatively small driving device (that is, It is an object to provide a MEMS scanner.

In order to solve the above problem, the drive device connects the first base portion, the second base portion supported by the first base portion, the first base portion and the second base portion, and A first elastic portion having elasticity that rotates the second base portion about an axis along another direction as a rotation axis, a rotatable driven portion, and the second base portion and the driven portion are connected to each other. And a second elastic part having elasticity for rotating the driven part about an axis along one direction different from the other direction as a rotation axis, and a second elastic part disposed on the second base part. The driven portion is sandwiched between the first coil portion and the first coil portion, which is a one-coil portion and the driven portion is disposed outside the winding of the first coil portion. A second coil portion disposed on the base portion, and the second coil A second coil part in which the driven part is disposed outside a winding of the part, and a magnetic field applying part that applies a magnetic field to the first coil part and the second coil part, and the first coil The part is arranged so that the center of the first coil part is located at a position offset along the one direction from the rotation axis of the second base part.

The operation and gain of the present invention will be clarified from the embodiments described below.

It is a top view which shows notionally the structure of the MEMS scanner which concerns on 1st Example. It is the top view and sectional view which show notionally the mode of operation by the MEMS scanner concerning the 1st example. It is the top view and sectional view which show notionally the mode of operation by the MEMS scanner concerning the 1st example. It is sectional drawing which shows notionally the aspect of the operation | movement by the MEMS scanner which concerns on 2nd Example. It is a top view which shows notionally the structure of the MEMS scanner which concerns on 2nd Example. It is the top view and sectional drawing which show notionally the aspect of the operation | movement by the MEMS scanner which concerns on 2nd Example. It is the top view and sectional drawing which show notionally the aspect of the operation | movement by the MEMS scanner which concerns on 2nd Example. It is sectional drawing which shows notionally the aspect of the operation | movement by the MEMS scanner which concerns on 2nd Example. It is a top view which shows notionally the structure of the MEMS scanner which concerns on 3rd Example. It is a top view which shows notionally the aspect of the operation | movement by the MEMS scanner which concerns on 3rd Example. It is a top view which shows notionally the structure of the MEMS scanner which concerns on 4th Example. It is a top view which shows notionally the aspect of the operation | movement by the MEMS scanner which concerns on 4th Example. It is a top view which shows notionally the structure of the MEMS scanner which concerns on 5th Example. It is a top view which shows notionally the aspect of the operation | movement by the MEMS scanner which concerns on 5th Example. It is a top view which shows notionally the structure of the MEMS scanner which concerns on 6th Example. It is a top view which shows notionally the aspect of the operation | movement by the MEMS scanner which concerns on 6th Example. It is a top view which shows notionally the structure of the MEMS scanner which concerns on 7th Example. It is a top view which shows notionally the structure of the MEMS scanner which concerns on an 8th Example.

Hereinafter, embodiments according to the drive device will be described in order.

<1>
The driving apparatus of the present embodiment connects the first base portion, the second base portion supported by the first base portion, the first base portion and the second base portion, and the second base portion. Connecting a first elastic part having elasticity such that an axis along the other direction is a rotation axis, a rotatable driven part, the second base part and the driven part, and A second elastic part having elasticity that rotates the driven part about an axis along one direction different from the other direction as a rotation axis; and a first coil part disposed on the second base part. And on the base portion so as to sandwich the driven portion between the first coil portion and the first coil portion where the driven portion is disposed outside the winding of the first coil portion. A second coil part disposed on the outside of the winding of the second coil part A second coil unit in which the driven unit is disposed, and a magnetic field applying unit that applies a magnetic field to the first coil unit and the second coil unit, wherein the first coil unit includes the second coil unit It arrange | positions so that the center of a said 1st coil part may be located in the position offset along the said one direction from the rotating shaft of a base part.

According to the drive device of the present embodiment, the first base portion serving as the base and the second base portion supported by the first base portion have the first elastic portion having elasticity (for example, a first torsion bar described later). Etc.) directly or indirectly. Further, the second base portion and a driven portion (for example, a mirror described later) rotatably arranged are directly or by a second elastic portion (for example, a second torsion bar described later) having elasticity. Connected indirectly. The second base portion has elasticity of the first elastic portion (for example, elasticity that allows the second base portion to rotate about an axis along another direction (for example, an X-axis direction described later) as a rotation axis). An axis along another direction different from one direction (preferably intersecting, more preferably orthogonal) is rotated as a rotation axis. Therefore, the driven part connected via the second base part and the second elastic part also rotates about the axis along the other direction as the rotation axis. In addition, the driven part is made by the elasticity of the second elastic part (for example, the elasticity that the driven part can be rotated about an axis along one direction (for example, a Y-axis direction described later) as a rotation axis). , The axis along one direction is rotated as a rotation axis. That is, the driving device of the present embodiment can perform biaxial driving of the driven part. However, the drive apparatus of this embodiment may perform multi-axis drive (for example, 3-axis drive, 4-axis drive,...) Of the driven part.

In the present embodiment, the first coil portion is disposed so that the center of the first coil portion is located at a position offset along one direction from the rotation axis of the second base portion. In other words, the rotation axis of the first coil portion along the other direction is located at a position shifted along one direction from the rotation axis of the second base portion along the other direction. The second coil portion may be arranged such that the center of the first coil portion is located at a position offset along one direction from the rotation axis of the second base portion. In other words, the rotation axis of the second coil portion along the other direction may be located at a position shifted along one direction from the rotation axis of the second base portion along the other direction. Or the 2nd coil part may be arranged so that the center of the 1st coil part may be located in the position (namely, position on a rotation axis) corresponding to the rotation axis of the 2nd base part. In other words, the rotation axis of the second coil part along the other direction may be located at a position corresponding to the rotation axis of the second base part along the other direction.

In the driving device of the present embodiment, the second base with the axis along the other direction as the rotation axis is caused by the force caused by the electromagnetic interaction between each of the first coil unit and the second coil unit and the magnetic field applying unit. The part (in other words, the driven part supported by the second base part) rotates. In other words, the driving force for rotating the second base part about the axis along the other direction as a rotation axis is an electromagnetic interaction between the first coil part and the second coil part and the magnetic field applying part. The resulting electromagnetic force. In addition, the driven part rotates about the axis along one direction as a rotation axis by the force caused by the electromagnetic interaction between each of the first coil part and the second coil part and the magnetic field applying part. In other words, the driving force for the driven part to rotate with the axis along one direction as the rotation axis is due to the electromagnetic interaction between the first coil part and the second coil part and the magnetic field applying part. Electromagnetic force.

More specifically, as will be described in detail later, each of the first coil portion and the second coil portion has a control current for rotating the second base portion about the axis along the other direction as a rotation axis. Supplied. This control current may be, for example, an alternating current having a frequency that is the same as or synchronized with a frequency (in other words, a cycle) at which the second base portion rotates about an axis along another direction as a rotation axis. preferable. In addition, each of the first coil portion and the second coil portion is supplied with a control current for rotating the driven portion with an axis along one direction as a rotation axis. This control current is preferably an alternating current having a frequency that is the same as or synchronized with a frequency (in other words, a cycle) at which the driven part rotates about an axis along one direction as a rotation axis. . More preferably, the control current is the resonance frequency of the driven part determined by the driven part and the second elastic part (more specifically, the driven frequency determined by the moment of inertia of the driven part and the torsion spring constant of the second elastic part). It is preferable that the alternating current has the same frequency as the resonance frequency of the part or a synchronized frequency.

Meanwhile, a magnetic field is applied from the magnetic field applying unit to each of the first coil unit and the second coil unit.

For this reason, Lorentz force is generated in the first coil portion due to electromagnetic interaction between the control current supplied to the first coil portion and the magnetic field applied by the magnetic field applying portion. Similarly, Lorentz force is generated in the second coil portion due to the electromagnetic interaction between the control current supplied to the second coil portion and the magnetic field applied by the magnetic field applying portion. Due to this Lorentz force, the second base portion rotates with an axis along the other direction as a rotation axis.

In addition, in the present embodiment, the rotation axis of the first coil portion along the other direction is located at a position shifted along the one direction from the rotation axis of the second base portion along the other direction. Yes. For this reason, the rotation axis (rotating body rotation support center) of the second base part along the other direction, the center of gravity of the entire second base part including the first coil part (rotating body center of gravity), and the first coil At least two of the Lorentz force centers (rotational force centers) generated in the part are displaced along one direction. The Lorentz force generated in the first coil portion due to such a shift (that is, unbalance) acts to deform and vibrate the second base portion. As a result, along with the deformation vibration of the second base portion, the driven portion rotates about the axis along one direction as the rotation axis.

Particularly in the present embodiment, each of the first coil portion and the second coil portion is disposed on the second base portion so that the driven portion is disposed outside the winding. In other words, each of the first coil portion and the second coil portion is disposed on the second base portion so that the driven portion is not disposed inside the winding. That is, each of the first coil portion and the second coil portion is disposed at a position offset in a predetermined direction (for example, another direction (for example, an X-axis direction described later)) from a position where the driven portion is disposed. . More specifically, the first coil unit is arranged such that the center of the first coil unit (for example, the center of the winding) is disposed at a position offset in a predetermined direction from the position where the center of the driven unit is disposed. , Disposed on the second base portion. Similarly, the second coil portion is arranged such that the center of the second coil portion (for example, the center of the winding) is disposed at a position offset in a predetermined direction from the position where the center of the driven portion is disposed. It is arranged on the base part. As a result, the first coil portion, the driven portion, and the second coil portion are arranged so as to be arranged in this order along a predetermined direction (for example, another direction). In addition, since each of the first coil portion and the second coil portion is disposed on the second base portion, at least a part of the shape of the second base portion is disposed in each of the first coil portion and the second coil portion. It preferably has a possible shape.

Thus, in this embodiment, the driven part is located outside the respective windings of the first coil part and the second coil part. Therefore, each of the first coil part and the second coil part may not be arranged so as to surround the driven part. As a result, in the present embodiment, each size of the first coil portion and the second coil portion is compared with a case where at least one of the first coil portion and the second coil portion is disposed so as to surround the driven portion. (For example, the diameter of a winding, the length of a winding, etc.) can be made relatively small. In other words, in this embodiment, the sizes of the first coil portion and the second coil portion (for example, the diameter of the winding and the length of the winding) are relatively set regardless of the size of the driven portion. Can be small. As a result, the size of the magnetic field application unit (for example, a magnet) for applying a magnetic field to each of the first coil unit and the second coil unit can also be relatively reduced. For this reason, in the present embodiment, the first coil portion and the second coil portion are compared with the case where at least one of the first coil portion and the second coil portion is disposed so as to surround the driven portion, regardless of the size of the driven portion. The magnetic gap between each of the part and the second coil part and the magnetism applying part can be made relatively small. Therefore, in the present embodiment, the size of the driving device can be suitably reduced as compared with the case where at least one of the first coil portion and the second coil portion is disposed so as to surround the driven portion.

In addition, in the present embodiment, since the first coil portion and the second coil portion do not have to be arranged so as to surround the driven portion, at least the first coil portion and the second coil portion so as to surround the driven portion. Compared with the drive device in which one is arranged, the degree of freedom of arrangement of the magnetic field application unit is relatively high. For this reason, it is possible to dispose the magnetic field applying unit above the center of each of the first coil unit and the second coil unit (specifically, above the inside of each winding of the first coil unit and the second coil unit). it can.

In addition, in the present embodiment, the first coil portion is located at a position shifted along one direction from the rotation axis of the second base portion along the other direction. For this reason, in this embodiment, as will be described in detail later with reference to the drawings, the magnetic field applying unit for applying a magnetic field across the first coil unit along one direction and the first coil along the other direction. Even if a magnetic field applying unit for applying a magnetic field across the unit is not separately provided, the driven unit is driven in two axes. In other words, in this embodiment, for example, if a magnetic field application unit that applies a magnetic field across the first coil unit along one direction is arranged, the driven unit is driven in two axes.

However, in the present embodiment, in addition to the first coil portion and the second coil portion where the driven portion is located outside the winding, the driven portion is further provided with another coil portion located inside the winding. May be. That is, it is not required that the driven part is located outside the windings of all the coil parts included in the driving device. In other words, the driven part is located outside the winding of at least two coil parts (for example, two coil parts arranged so as to sandwich the driven part between them) among all the coil parts included in the driving device. If it is done, it is enough.

In addition, a plurality of coil parts may be constituted by a single winding. Even in this case, after substantially distinguishing each of a plurality of coil parts constituted by a single winding according to the arrangement position, shape, etc., a plurality of coil parts constituted by a single winding While the driven part is located outside the windings of the first and second coil parts, the inside of the windings of the other coil parts of the plurality of coil parts composed of a single winding The driven part may be located in the position.

<2>
In another aspect of the driving apparatus of the present embodiment, the magnetic field application unit includes a pair of first magnetic bodies that sandwich the first coil unit along the one direction.

According to this aspect, as will be described in detail later with reference to the drawings, the magnetic field applying unit for applying a magnetic field across the first coil unit along one direction and the first coil unit along the other direction. Even if the magnetic field applying unit for applying the crossing magnetic field is not separately arranged independently, the driven unit is driven in two axes. In other words, in this embodiment, for example, if a magnetic field application unit that applies a magnetic field across the first coil unit along one direction is arranged, the driven unit is driven in two axes.

<3>
In the aspect of the driving apparatus in which the magnetic field applying unit includes the pair of first magnetic bodies as described above, the pair of first magnetic bodies are (i) opposed to each other along the one direction of the first coil sections. The magnetic field is applied to two sides, and the pair of first magnetic bodies (ii-1) does not apply the magnetic field to two sides of the first coil portion that face each other along the other direction. Or (ii-2) two sides of the first coil portion that face along the other direction are given to two sides of the first coil portion that face along the one direction The magnetic flux leakage magnetic flux may be applied.

With this configuration, for example, if a magnetic field applying unit that applies a magnetic field across the first coil unit along one direction is arranged, the driven unit is driven in two axes.

<4>
In another aspect of the driving apparatus of the present embodiment, the second coil portion is positioned at the center offset from the rotation axis of the second base portion along the one direction. Is arranged.

According to this aspect, the rotation axis (rotating body rotation support center) of the second base portion along the other direction, the center of gravity of the entire second base portion including the second coil portion (rotating body gravity center), At least two of the centers of Lorentz forces (rotational force centers) generated in the second coil portion are displaced along one direction. The Lorentz force generated in the second coil portion due to such deviation (that is, unbalance) acts to cause the second base portion to deform and vibrate. For this reason, as will be described in detail later with reference to the drawings, a magnetic field applying unit for applying a magnetic field that crosses the second coil unit along one direction and a magnetic field that crosses the second coil unit along the other direction. Even if the magnetic field applying unit for applying is not arranged separately and independently, the driven part is driven in two axes. In other words, for example, if a magnetic field application unit that applies a magnetic field across the second coil unit is disposed along one direction, the driven unit is biaxially driven.

<5>
In the aspect of the driving device in which the center of the second coil portion is located at a position offset in one direction from the rotation axis of the second base portion as described above, the first position based on the rotation axis of the second base portion. The offset amount at the center of the two coil portions is different from the offset amount at the center of the first coil portion based on the rotation axis of the second base portion.

According to this aspect, the two-axis drive of the driven part is suitably performed.

<6>
As described above, in the aspect of the driving device in which the center of the second coil portion is located at a position offset along the one direction from the rotation axis of the second base portion, the magnetic field applying unit is arranged along the one direction. You may comprise so that a pair of 1st magnetic body which pinches | interposes a 1st coil part may be provided.

With this configuration, as will be described in detail later with reference to the drawings, a magnetic field applying unit for applying a magnetic field across the second coil unit along one direction and a second coil unit along the other direction. Even if a magnetic field applying unit for applying a magnetic field that crosses is not separately provided, the driven unit is driven in two axes. In other words, in this embodiment, for example, if a magnetic field application unit that applies a magnetic field across the second coil unit along one direction is disposed, the driven unit is driven in two axes.

<7>
In the aspect of the drive device in which the magnetic field applying unit includes the pair of second magnetic bodies as described above, the pair of second magnetic bodies are (i) opposed along the one direction of the second coil sections. The magnetic field is applied to two sides, and the pair of second magnetic bodies (ii-1) does not apply the magnetic field to two sides of the second coil portion that are opposed along the other direction. Or (ii-2) Two sides facing the other direction of the second coil portion are given to two sides facing the one direction of the second coil portion. The magnetic flux leakage magnetic flux may be applied.

If constituted in this way, for example, if a magnetic field application unit that applies a magnetic field across the second coil unit along one direction is disposed, the driven unit is driven in two axes.

<8>
In another aspect of the driving apparatus of the present embodiment, the first coil portion and the second coil portion are arranged at positions symmetrical with respect to the driven portion.

According to this aspect, even if the first coil portion and the second coil portion are arranged, as will be described in detail later, the driven portion and the vertical direction of the first coil portion and the second coil portion (specifically, , Movement or vibration in a direction perpendicular to each of the one direction and the other direction and perpendicular to the surface of the second base portion) can be prevented. Therefore, highly accurate rotation of the driven part can be realized.

<9>
In the aspect of the driving device in which each of the first coil portion and the second coil portion is rotated by the Lorentz force as described above, the rotation axis along the one direction of each of the first coil portion and the second coil portion is , Different from the rotation axis of the driven part along the one direction.

According to this aspect, the rotation axis along one direction of each of the first coil portion and the second coil portion (however, in the present embodiment, (i) the first axis with the axis along one direction as the rotation axis is the first axis. It may be an actual rotation axis when each of the coil section and the second coil section is actually rotated, or (ii) the first coil section and the second coil section with the axis along one direction as the rotation axis It is not necessary to match the rotation axis along one direction of the driven part with a virtual rotation axis when it is assumed that each of the rotation axes is rotated. For this reason, as compared with a driving device in which the rotation axis along one direction of each of the first coil portion and the second coil portion needs to coincide with the rotation axis along one direction of the driven portion, The degree of freedom of arrangement of the driven parts becomes relatively high. For this reason, a driven part becomes easy to be located in the outer side of each winding of a 1st coil part and a 2nd coil part. Therefore, the various effects described above are suitably realized.

Note that the rotation axis along one direction of each of the first coil portion and the second coil portion is shifted along the other direction from the rotation axis along one direction of the driven portion. preferable. That is, the first coil portion is arranged on the second base portion so that the center of the first coil portion (for example, the center of the winding) is arranged at a position shifted from the center of the driven portion along the other direction. It is preferable to arrange | position. Similarly, the second coil portion is arranged so that the center of the second coil portion (for example, the center of the winding) is shifted from the center of the driven portion along the other direction. It is preferable to be arranged on the top.

Further, the rotation of the first and second coil parts having the axis along one direction as the rotation axis and the rotation of the driven part having the axis along the one direction as the rotation axis will be described in detail later.

<10>
In another aspect of the driving apparatus of the present embodiment, Lorentz generated in the first coil unit due to electromagnetic interaction between a control current supplied to the first coil unit and a magnetic field applied by the magnetic field applying unit. Due to the force, the first coil unit rotates about the axis along the other direction as a rotation axis, and electromagnetic interaction between the control current supplied to the second coil unit and the magnetic field applied by the magnetic field applying unit Due to the Lorentz force generated in the second coil portion due to the above, the second coil portion rotates about the axis along the other direction as a rotation axis, and the axis along the other direction as the rotation axis. Due to the respective rotations of the first coil portion and the second coil portion, the second base portion rotates about the axis along the other direction as a rotation axis and along the other direction. The first coil section and the first coil having a shaft as a rotation axis; Due to each rotation of the coil part, the second base part deforms and vibrates in a standing wave shape along the other direction, and due to the deformation vibration of the second base part, the driven part , The axis along the one direction is rotated as a rotation axis.

According to this aspect, the driven part rotates about the axis along one direction as the rotation axis by the force caused by the electromagnetic interaction between each of the first coil part and the second coil part and the magnetic field applying part. At the same time, the second base portion rotates with the axis along the other direction as the rotation axis. Hereinafter, a specific mode in which the driven portion rotates with the axis along one direction as the rotation axis and a specific mode in which the second base portion rotates with the axis along the other direction as the rotation axis will be described. .

A control current for rotating the second base portion about the axis along the other direction as a rotation axis is supplied to each of the first coil portion and the second coil portion. In addition, each of the first coil portion and the second coil portion is supplied with a control current for rotating the driven portion with an axis along one direction as a rotation axis. On the other hand, a magnetic field is applied from the magnetic field applying unit to each of the first coil unit and the second coil unit. For this reason, Lorentz force is generated in the first coil portion due to electromagnetic interaction between the control current supplied to the first coil portion and the magnetic field applied by the magnetic field applying portion. Similarly, Lorentz force is generated in the second coil portion due to the electromagnetic interaction between the control current supplied to the second coil portion and the magnetic field applied by the magnetic field applying portion.

</ RTI> By this Lorentz force, each of the first coil portion and the second coil portion rotates about an axis along the other direction as a rotation axis (more specifically, reciprocatingly drives to rotate). In order to realize the rotation of the first coil unit with the axis along the other direction as a rotation axis, the two sides of the first coil unit facing each other in one direction act in different directions. It is preferable that the Lorentz force is applied simultaneously. For example, the Lorentz force applied to the first coil portion at a certain timing is a force that acts as an upward force on one of the two sides of the first coil portion facing in the one direction, and It is preferable that the force acts as a downward force on the other side of the two sides of the first coil portion facing in one direction. Further, the Lorentz force applied to the first coil portion at another timing that is in tandem with the one timing is a downward force on one of the two sides of the first coil portion that are opposed along the one direction. It is preferable that the force acts as an upward force on the other side of the two sides of the first coil portion facing in one direction. Similarly, in order to realize the rotation of the second coil portion with the axis along the other direction as the rotation axis, the two sides of the second coil portion facing each other along one direction act in different directions. It is preferable that the Lorentz force is applied simultaneously. For example, the Lorentz force applied to the second coil portion at a certain timing is a force that acts as an upward force on one of the two sides of the second coil portion that are opposed along one direction, and It is preferable that the force acts as a downward force on the other side of the two sides of the second coil portion facing in one direction. Furthermore, the Lorentz force applied to the second coil portion at another timing that is in tandem with the one timing is a downward force on one of the two sides of the second coil portion that are opposed along the one direction. It is preferable that the force acts as an upward force on the other side of the two sides of the second coil portion facing in one direction. When such a Lorentz force is generated in each of the first coil portion and the second coil portion, each of the first coil portion and the second coil portion rotates about an axis along the other direction as a rotation axis.

As the first coil portion and the second coil portion rotate with the axis along the other direction as the rotation axis, the second base portion on which each of the first coil portion and the second coil portion is arranged is Rotate the axis along the other direction as a rotation axis.

In addition, as described above, in the present embodiment, the rotation axis of the first coil portion along the other direction is shifted along the one direction from the rotation axis of the second base portion along the other direction. Located in position. For this reason, the rotation axis (rotating body rotation support center) of the second base part along the other direction, the center of gravity of the entire second base part including the first coil part (rotating body center of gravity), and the first coil At least two of the Lorentz force centers (rotational force centers) generated in the part are displaced along one direction. The Lorentz force generated in the first coil portion due to such a shift (that is, unbalance) acts to deform and vibrate the second base portion. That is, with the rotation of the first coil portion having the axis along the other direction as the rotation axis, the second base portion on which the first coil portion is disposed becomes a standing wave shape along the other direction (that is, Oscillates in the shape of a standing wave. When the rotation axis of the second coil portion along the other direction is located at a position shifted along the one direction from the rotation axis of the second base portion along the other direction, The Lorentz force generated in the two coil portions also acts to deform and vibrate the second base portion. This is because each of the first coil portion and the second coil portion has not only a control current for rotating the second base portion about the axis along the other direction as a rotation axis, but also along one direction. This is because a control current for rotating the driven part about the axis as a rotation axis is also supplied. That is, according to the control current for rotating the driven part about the axis along one direction as the rotation axis, the second base part has a standing wave shape along the other direction (that is, a standing wave shape). ) Deformation vibration. That is, the external appearance of the second base portion is deformed so that a part thereof becomes an antinode of deformation vibration and the other part becomes a node of deformation vibration. Due to the deformation vibration of the second base portion, a belly and a node appear along other directions. Since the deformation vibration of the second base portion is performed in accordance with a so-called standing wave waveform, the positions of its antinodes and nodes are substantially fixed. At this time, the deformation vibration of the second base portion may be resonance. The resonance frequency at which the second base portion resonates (that is, the frequency of deformation vibration of the base portion) may be the same as the frequency at which the driven portion rotates (or the resonance frequency of the driven portion).

Due to the deformation vibration of the second base part, the driven part rotates about the axis along one direction as a rotation axis. At this time, the driven part is driven by the resonance frequency of the driven part determined by the driven part and the second elastic part (more specifically, the driven frequency determined by the moment of inertia of the driven part and the torsion spring constant of the second elastic part). May be rotated with an axis along one direction as a rotation axis so as to resonate at a resonance frequency of the portion.

<11>
In the aspect of the driving device in which each of the first coil portion and the second coil portion is rotated by the Lorentz force as described above, the magnitude of the Lorentz force generated in the first coil portion and the Lorentz force generated in the second coil portion. You may comprise so that a magnitude | size may be the same.

If configured in this way, the second base portion suitably deforms and vibrates due to the Lorentz force generated in the first coil portion and the Lorentz force generated in the second coil portion. More specifically, as will be described in detail later, a portion corresponding to the rotation axis along one direction of each of the first coil portion and the second coil portion and the rotation axis along one direction of the driven portion. A node in the deformation vibration of the second base portion appears. In addition, in the deformation vibration of the second base portion at a location between the rotation axis along one direction of each of the first coil portion and the second coil portion and the rotation axis along one direction of the driven portion. A belly appears. As a result, the driven part is suitably rotated.

<12>
In the aspect of the driving device in which each of the first coil portion and the second coil portion is rotated by the Lorentz force as described above, the rotation direction of the first coil portion and the one direction having the axis along the one direction as a rotation axis. You may comprise so that it may be the same as the rotation direction of the said 2nd coil part which makes the axis | shaft along this direction the rotating shaft.

If configured in this way, the second base portion suitably deforms and vibrates due to the Lorentz force generated in the first coil portion and the Lorentz force generated in the second coil portion. More specifically, as will be described in detail later, a portion corresponding to the rotation axis along one direction of each of the first coil portion and the second coil portion and the rotation axis along one direction of the driven portion. A node in the deformation vibration of the second base portion appears. In addition, in the deformation vibration of the second base portion at a location between the rotation axis along one direction of each of the first coil portion and the second coil portion and the rotation axis along one direction of the driven portion. A belly appears. As a result, the driven part is suitably rotated.

<13>
In the aspect of the drive device in which each of the first coil portion and the second coil portion is rotated by the Lorentz force as described above, the rotation axis along the one direction of each of the first coil portion and the second coil portion, and A node in the deformation vibration of the second base portion appears at a location corresponding to the rotation axis along the one direction of the driven portion, and the one of the first coil portion and the second coil portion respectively. An antinode in the deformation vibration of the second base portion appears at a location between the rotation axis along the direction of and the rotation axis along the one direction of the driven portion.

According to this aspect, the driven part is connected to the location corresponding to the node in the deformation vibration of the second base part. Each of the first coil portion and the second coil portion is disposed at a location corresponding to a node in the deformation vibration of the second base portion. For this reason, the driven part and the vertical direction of each of the first coil part and the second coil part (specifically, the direction perpendicular to each of the one direction and the other direction, and the surface of the second base part) Can be prevented from moving or vibrating. Therefore, highly accurate rotation of the driven part can be realized.

<14>
In the aspect of the driving device in which each of the first coil portion and the second coil portion is rotated by the Lorentz force as described above, the first coil portion and the second coil portion having the axis along the one direction as a rotation axis. The rotation direction of each of the driven parts and the rotation direction of the driven portion having the axis along the one direction as a rotation axis are opposite to each other.

According to this aspect, using the deformation vibration of the second base portion caused by the rotation of each of the first coil portion and the second coil portion having the axis along one direction as the rotation axis, the driven portion is The axis along one direction is preferably rotated as a rotation axis.

Note that the rotation direction of each of the first coil portion and the second coil portion having the axis along one direction as the rotation axis and the rotation direction of the driven portion having the axis along the one direction as the rotation axis are mutually different. Strictly speaking, the example of the opposite direction corresponds to the rotation direction and the driven part of each of the first coil part and the second coil part whose axis is the axis along one direction (for example, the driven part). It can also be expressed as an example in which the rotation direction of the base portion (corresponding to the portion supporting the portion) (in other words, the pseudo rotation direction accompanying deformation vibration) is opposite to each other.

However, when the second base portion deforms and vibrates in a higher order vibration mode, it corresponds to the rotational direction of the driven portion and the driven portion with the axis along one direction as the rotation axis (for example, the driven portion The rotation direction of the second base portion (corresponding to the portion supporting the drive portion) may be reversed. That is, the rotation directions of the first coil portion and the second coil portion having an axis along one direction as the rotation axis and the rotation direction of the driven portion having the axis along the one direction as the rotation axis are mutually different. It may be the same orientation.

Such an operation and other advantages of the present embodiment will be clarified from examples described below.

As described above, according to the driving apparatus of the present embodiment, the first base portion, the second base portion, the first elastic portion, and the outer sides of the respective windings of the first coil portion and the second coil portion. A driven portion, a second elastic portion, a first coil portion, a second coil portion, and a magnetic field applying portion, the first coil portion being one from the rotation axis of the second base portion. It arrange | positions so that the center of a 1st coil part may be located in the position offset along the direction. Therefore, a relatively small driving device that drives the driven object using the first coil unit, the second coil unit, and the magnetic field applying unit is provided.

Hereinafter, embodiments of the drive device will be described with reference to the drawings. In the following, an example in which the driving device is applied to a MEMS scanner will be described.

(1) First Embodiment First, a first embodiment of a MEMS scanner will be described with reference to FIGS.

(1-1) Configuration of MEMS Scanner First, the configuration of the MEMS scanner 101 according to the first embodiment will be described with reference to FIG. FIG. 1 is a plan view conceptually showing the structure of the MEMS scanner 101 according to the first embodiment.

As shown in FIG. 1, the MEMS scanner 101 according to the first embodiment includes a base 110, torsion bars 120a and 120b, a mirror 130, a coil 140a, a coil 140b, magnets 151a and 152a, a magnet 151b, 152b.

The base 110 has a frame shape with a gap inside. That is, the base 110 has two sides extending in the Y-axis direction in FIG. 1 and two sides extending in the X-axis direction (that is, a direction orthogonal to the Y-axis direction) in FIG. It has a frame shape having a gap surrounded by two sides extending in the axial direction and two sides extending in the X-axis direction. In the example illustrated in FIG. 1, the base 110 has a square shape, but is not limited thereto, and other shapes (for example, a rectangular shape such as a rectangle or a circular shape) may be used. You may have. The base 110 is a structure that is the basis of the MEMS scanner 101 according to the first embodiment, and is fixed to a substrate or a support member (not shown) (in other words, the inside of the system called the MEMS scanner 100). Is preferably fixed). Alternatively, the base 110 may be suspended by a suspension (not shown).

Although FIG. 1 shows an example in which the base 110 has a frame shape, it goes without saying that it may have other shapes. For example, the base 110 may have a U-shape in which a part of the base 110 is an opening. Alternatively, for example, the base 110 may have a box shape with a gap inside. That is, the base 110 is defined by two surfaces distributed on a plane defined by the X axis and the Y axis, and the X axis and a Z axis (not shown) (that is, an axis orthogonal to both the X axis and the Y axis). Box having two planes distributed on a flat plane and two planes distributed on a plane defined by a Y-axis and a Z-axis (not shown) and a space surrounded by these six planes You may have a shape. Alternatively, the shape of the base 110 may be arbitrarily changed according to the manner in which the mirror 130 is disposed.

Each of the torsion bars 120a and 120b is an elastic member such as a spring made of silicon, copper alloy, iron alloy, other metal, resin, or the like. Each of the torsion bars 120a and 120b is arranged to extend in the Y-axis direction in FIG. In other words, each of the torsion bars 120a and 120b has a shape having a long side extending in the Y-axis direction and a short side extending in the X-axis direction. However, each of the torsion bars 120a and 120b may have a shape having a short side extending in the Y-axis direction and a long side extending in the X-axis direction depending on the setting state of the resonance frequency described later. . One end of each of the torsion bars 120 a and 120 b is connected to the base 110. The other end of each of the torsion bars 120 a and 120 b is connected to the mirror 130. That is, the torsion bars 120a and 120b suspend the mirror 130 so as to sandwich the mirror 130 therebetween.

The mirror 130 is arranged to be suspended or supported by the torsion bars 120a and 120b in the gap inside the base 110. The mirror 130 is configured to rotate about the axis along the Y-axis direction as a rotation axis by the elasticity of the torsion bars 120a and 120b.

The coil 140a is a plurality of windings made of, for example, a material having relatively high conductivity (for example, gold, copper, etc.). In the first embodiment, the coil 140a has a rectangular shape. In particular, the length of two sides along the X-axis direction (that is, the direction orthogonal to the direction of the rotation axis of the mirror 130) among the four sides of the coil 140a is the Y-axis direction among the four sides of the coil 140a. That is, it is shorter than the length of two sides along the direction of the rotation axis of the mirror 130. In other words, the coil 140a includes two long sides that face each other along the X-axis direction and two short sides that face each other along the Y-axis direction. That is, in the first embodiment, the coil 140a has a rectangular shape. However, the coil 140a may have any shape (for example, a square, a rhombus, a parallelogram, a circle, an ellipse, or any other loop shape).

Similarly, the coil 140b is a plurality of windings composed of, for example, a material having relatively high conductivity (for example, gold, copper, etc.). In the first embodiment, the coil 140b has a rectangular shape. In particular, the length of two sides along the X-axis direction (that is, the direction orthogonal to the direction of the rotation axis of the mirror 130) among the four sides of the coil 140b is the Y-axis direction among the four sides of the coil 140b. That is, it is shorter than the length of two sides along the direction of the rotation axis of the mirror 130. In other words, the coil 140b includes two long sides that face each other along the X-axis direction and two short sides that face each other along the Y-axis direction. That is, in the first embodiment, the coil 140b has a rectangular shape. However, the coil 140b may have an arbitrary shape (for example, a square, a rhombus, a parallelogram, a circle, an ellipse, or any other loop shape).

The coil 140a is disposed on the base 110. In particular, the coil 140a has an X-axis direction (that is, a direction orthogonal to the direction of the rotation axis of the mirror 130) based on the position where the mirror 130 is disposed (particularly, the position where the center or the center of gravity of the mirror 130 is disposed). Are arranged on the base 110 so that the coil 140a is located at a position shifted by a predetermined distance along the line (particularly, the center or the center of gravity of the coil 140a is located). However, the coil 140a has a base such that the coil 140a is positioned at a position shifted by a predetermined distance along the Y-axis direction (that is, the direction of the rotation axis of the mirror 130) with respect to the position where the mirror 130 is disposed. 110 may be arranged. In addition, the coil 140a is disposed on the base 110 so that the mirror 130 and the coil 140a are aligned along the X-axis direction. As a result, the mirror 130 is positioned outside the windings that constitute the coil 140a. In other words, the mirror 130 is not positioned inside the winding wire constituting the coil 140a.

Similarly, the coil 140b is disposed on the base 110. In particular, the coil 140b has an X-axis direction (that is, a direction orthogonal to the direction of the rotation axis of the mirror 130) based on the position where the mirror 130 is disposed (particularly, the position where the center or the center of gravity of the mirror 130 is disposed). Are arranged on the base 110 so that the coil 140b is located at a position shifted by a predetermined distance along the line (particularly, the center or the center of gravity of the coil 140b is located). However, the coil 140b is positioned so that the coil 140b is positioned at a position shifted by a predetermined distance along the Y-axis direction (that is, the direction of the rotation axis of the mirror 130) with respect to the position where the mirror 130 is disposed. 110 may be arranged. In addition, the coil 140b is disposed on the base 110 so that the mirror 130 and the coil 140b are arranged along the X-axis direction. As a result, the mirror 130 is positioned outside the winding wire that constitutes the coil 140b. In other words, the mirror 130 is not positioned inside the winding wire constituting the coil 140b.

The coils 140a and 140b are disposed on the base 110 such that the mirror 130 is disposed between the coils 140a and 140b. In other words, the coils 140a and 140b are arranged on the base 110 such that the coil 140a, the mirror 130, and the coil 140b are arranged in this order along the X-axis direction. At this time, the distance between the coil 140a and the mirror 130 may be the same as the distance between the coil 140b and the mirror 130. That is, the coils 140a and 140b may be arranged on the base 110 such that the coils 140a and 140b are arranged symmetrically with respect to the mirror 130.

The coil 140a is supplied with a control current for rotating the mirror 130 from the power supply via the power supply terminal 141a formed on the base 110. Similarly, a control current for rotating the mirror 130 is supplied to the coil 140b from the power supply via the power supply terminal 141b formed on the base 110. The control current is typically an alternating current that includes a signal component having a frequency that is the same as or synchronized with the frequency at which the mirror 130 rotates with the axis along the Y-axis direction as the rotation axis. Note that the power source may be a power source provided in the MEMS scanner 101 itself, or may be a power source prepared outside the MEMS scanner 101.

Magnets 151a and 152a are arranged such that magnet 151a and magnet 152a are arranged along the X-axis direction. In particular, the magnets 151a and 152a are arranged such that the magnet 151a and the magnet 152a sandwich the coil 140a along the X-axis direction. In addition, one of the magnets 151a and 152a is on the magnetic flux exit side, and the other of the magnets 151a and 152a is on the magnetic flux entrance side. In the following description, the magnet 151a is on the magnetic flux incident side and the magnet 152a is on the magnetic flux outgoing side.

Similarly, the magnets 151b and 152b are arranged such that the magnet 151b and the magnet 152b are arranged along the X-axis direction. In particular, the magnets 151b and 152b are arranged such that the magnet 151b and the magnet 152b sandwich the coil 140b along the X-axis direction. In addition, one of the magnets 151b and 152b is a magnetic flux exit side, and the other of the magnets 151b and 152b is a magnetic flux entrance side. In the following, description will be given using an example in which the magnet 151b is on the magnetic flux incident side and the magnet 152b is on the magnetic flux output side.

(1-2) Operation of MEMS Scanner Next, with reference to FIGS. 2 to 4, an operation mode of the MEMS scanner 101 according to the first embodiment (specifically, an operation mode of rotating the mirror 130). Will be described. FIG. 2 is a plan view and a cross-sectional view conceptually showing an operation mode of the MEMS scanner 101 according to the first embodiment. FIGS. 3A and 3B are a plan view and a cross-sectional view conceptually showing a mode of operation by the MEMS scanner 101 according to the first embodiment. FIG. 4 is a sectional view conceptually showing an operation mode of the MEMS scanner 101 according to the first embodiment.

During the operation of the MEMS scanner 101 according to the first embodiment, first, a control current is supplied to each of the coils 140a and 140b. The control current includes a current component for rotating the mirror 130 about the axis along the Y-axis direction as a rotation axis. In the first embodiment, the mirror 130 has a resonance frequency determined by the mirror 130 and the torsion bars 120a and 120b (more specifically, a resonance frequency determined by the moment of inertia of the mirror 130 and the torsion spring constant of the torsion bars 120a and 120b). In order to resonate, it rotates with the axis along the Y-axis direction as the rotation axis. Strictly speaking, it is preferable that the resonance frequency determined by the mirror 130 and the torsion bars 120a and 120b is finely corrected in consideration of the mass and the moment of inertia of the base 110 that supports the torsion bars 120a and 120b. However, in the following (especially including not only the first embodiment but also other embodiments), for the sake of simplification of description, the description will be omitted while omitting fine correction of the resonance frequency. Therefore, the control current is an alternating current including a signal component having a frequency that is the same as or synchronized with the resonance frequency of the mirror 130. However, the mirror 130 may rotate around the axis along the Y-axis direction at a frequency different from or not synchronized with the resonance frequency determined by the mirror 130 and the torsion bars 120a and 120b. In this case, the control current is an alternating current including a signal component having a frequency that is the same as or synchronized with the frequency at which the mirror 130 rotates with the axis along the Y-axis direction as the rotation axis.

On the other hand, a magnetic field is applied to the coil 140a from the magnets 151a and 152a. The magnets 151a and 152a preferably apply a magnetic field to the two sides of the coil 140a facing each other along the X-axis direction. In this case, the magnets 151a and 152a do not need to apply a magnetic field to the two sides of the coil 140a facing each other along the Y-axis direction. Alternatively, the magnets 151a and 152a may apply a magnetic field to two sides of the coil 140a facing each other along the Y-axis direction. Alternatively, the magnets 151a and 152a leak the magnetic field applied to the two sides of the coil 140a facing in the Y-axis direction with respect to the two sides of the coil 140a facing in the Y-axis direction. Only magnetic flux may be applied.

Therefore, Lorentz force is generated in the coil 140a due to electromagnetic interaction between the control current supplied to the coil 140a and the magnetic field applied to the coil 140a.

Similarly, a magnetic field is applied to the coil 140b from the magnets 151b and 152b. The magnets 151b and 152b preferably apply a magnetic field to the two sides of the coil 140b facing each other along the X-axis direction. In this case, the magnets 151b and 152b do not need to apply a magnetic field to the two sides of the coil 140b facing each other along the Y-axis direction. Alternatively, the magnets 151b and 152b may apply a magnetic field to the two sides of the coil 140b facing each other along the Y-axis direction. Alternatively, the magnets 151b and 152b leak the magnetic field applied to the two sides of the coil 140b facing in the Y-axis direction with respect to the two sides of the coil 140b facing in the Y-axis direction. Only magnetic flux may be applied.

Therefore, the Lorentz force resulting from the electromagnetic interaction between the control current supplied to the coil 140b and the magnetic field applied to the coil 140b is generated in the coil 140b.

Here, as shown in FIG. 2A, a control current flowing in the clockwise direction in FIG. 2A is supplied to each of the coils 140a and 140b, and a magnetic field from the magnet 152a toward the magnet 151a is generated. A situation where a magnetic field applied to the coil 140a and directed from the magnet 152b toward the magnet 151b is applied to the coil 140b will be described. In this case, as shown in FIG. 2 (b), which is a drawing of the MEMS scanner 101 shown in FIG. 2 (a) observed from the direction of arrow II, the two long sides of the coil 140a facing each other along the X-axis direction are shown. A Lorentz force in the lower direction in FIG. 2B is generated on the long side on the right side (that is, the outside in FIG. 2A). Similarly, as shown in FIG. 2B, the left side of the two long sides of the coil 140a facing along the X-axis direction (that is, the inner side in FIG. 2A) is shown on the left side. A Lorentz force toward the upper direction in 2 (b) is generated. That is, Lorentz forces in different directions are generated on the two long sides of the coil 140a facing each other along the X-axis direction. In other words, Lorentz force, which is a couple, is generated on the two long sides of the coil 140a facing each other along the X-axis direction. Therefore, the coil 140a rotates in the clockwise direction in FIG. In addition, as shown in FIG. 2B, the long side on the right side (that is, the inner side in FIG. 2A) of the two long sides of the coil 140b facing in the X-axis direction is Lorentz force toward the lower direction in 2 (b) is generated. Similarly, as shown in FIG. 2B, the left side of the two long sides of the coil 140b facing in the X-axis direction (that is, the outside in FIG. 2A) is shown on the left side. A Lorentz force toward the upper direction in 2 (b) is generated. That is, Lorentz forces in different directions are generated on the two long sides of the coil 140b facing each other along the X-axis direction. In other words, Lorentz force, which is a couple, is generated on the two long sides of the coil 140b facing each other along the X-axis direction. Accordingly, the coil 140b rotates in the clockwise direction in FIG. On the other hand, since the control current is an alternating current, as shown in FIG. 3A, the control current flowing in the counterclockwise direction in FIG. 3A is supplied to each of the coils 140a and 140b. The situation where the magnetic field from the magnet 152a toward the magnet 151a is applied to the coil 140a and the magnetic field from the magnet 152b toward the magnet 151b is applied to the coil 140b follows the situation shown in FIG. In this case, as shown in FIG. 3B, which is a drawing of the MEMS scanner 101 shown in FIG. 3A observed from the direction of arrow III, the two long sides of the coil 140a facing each other along the X-axis direction are shown. On the long side of the right side (that is, the outside in FIG. 2A), a Lorentz force is generated in the upper direction in FIG. 3B. Similarly, as shown in FIG. 3B, the left side of the two long sides of the coil 140a facing along the X-axis direction (that is, the inner side in FIG. 3A) A Lorentz force toward the lower direction in 3 (b) is generated. That is, Lorentz forces in different directions are generated on the two long sides of the coil 140a facing each other along the X-axis direction. In other words, Lorentz force, which is a couple, is generated on the two long sides of the coil 140a facing each other along the X-axis direction. Therefore, the coil 140a rotates in the counterclockwise direction in FIG. In addition, as shown in FIG. 3B, the right side of the two long sides of the coil 140b facing in the X-axis direction (that is, the inner side in FIG. 2A) Lorentz force toward the upper direction in 3 (b) is generated. Similarly, as shown in FIG. 3B, the left side of the two long sides of the coil 140b facing in the X-axis direction (that is, the outside in FIG. 3A) is shown on the left side. A Lorentz force toward the lower direction in 3 (b) is generated. That is, Lorentz forces in different directions are generated on the two long sides of the coil 140b facing each other along the X-axis direction. In other words, Lorentz force, which is a couple, is generated on the two long sides of the coil 140b facing each other along the X-axis direction. Accordingly, the coil 140b rotates in the counterclockwise direction in FIG.

At this time, the magnitude and direction of the Lorentz force that rotates the coil 140a in the clockwise direction at a certain timing (that is, the Lorentz force generated in the coil 140a) is such that the coil 140b is rotated in the clockwise direction at a certain timing. It is preferable that the magnitude and direction of the Lorentz force to be rotated (that is, the Lorentz force generated in the coil 140b) is the same. Similarly, the magnitude of the Lorentz force that rotates the coil 140a counterclockwise at a certain timing (ie, the Lorentz force generated in the coil 140a) is such that the coil 140b is counterclockwise at a certain timing. The Lorentz force to be rotated (that is, the Lorentz force generated in the coil 140b) is preferably the same. More specifically, the magnitude and direction of the Lorentz force generated on the long side on the right side (see FIG. 2B) of the two long sides of the coil 140a facing along the X axis direction is The magnitude and direction of the Lorentz force generated on the long side on the right side (see FIG. 2B) of the two long sides of the coil 140b facing in the direction are preferably the same. Similarly, the magnitude and direction of the Lorentz force generated on the long side on the left side (see FIG. 2B) of the two long sides of the coil 140a facing each other along the X-axis direction is along the X-axis direction. The magnitude and direction of the Lorentz force generated on the long side on the left side (see FIG. 2B) of the two long sides of the opposing coil 140b are preferably the same. In order to make the magnitude and direction of the Lorentz force the same, the magnitude of the magnetic field from the magnet 152a to the magnet 151a and the magnitude of the magnetic field from the magnet 152b to the magnet 151b are made the same and supplied to the coil 140a. The control current to be supplied and the control current supplied to the coil 140b are preferably the same.

By such Lorentz force, each of the coils 140a and 140b rotates about the axis along the Y-axis direction as a rotation axis (more specifically, reciprocatingly drives to rotate). At this time, the rotation axes of the coils 140a and 140b along the Y-axis direction are different from the rotation axis of the mirror 130 along the Y-axis direction. Specifically, the respective rotation axes of the coils 140a and 140b along the Y-axis direction exist at positions shifted by a predetermined distance in the X-axis direction with respect to the rotation axis of the mirror 130 along the Y-axis direction. Therefore, the respective rotations of the coils 140a and 140b having the axis along the Y-axis direction as the rotation axis do not directly rotate the mirror 130 with the axis along the Y-axis direction as the rotation axis.

On the other hand, micro vibrations propagate from the coils 140a and 140b to the base 110 as the coils 140a and 140b rotate with the axis along the Y-axis direction as the rotation axis. As a result, the base 110 on which each of the coils 140a and 140b is disposed deforms and vibrates in a standing wave shape (that is, in a standing wave shape) along the X-axis direction. In other words, the base 110 deforms and vibrates so as to wave along the X-axis direction. In other words, the appearance of the base 110 is deformed so that one part thereof becomes an antinode of deformation vibration and the other part becomes a node of deformation vibration.

Due to the deformation vibration of the base 110, the mirror 130 rotates about the axis along the Y-axis direction as a rotation axis. At this time, the mirror 130 rotates so as to resonate at a resonance frequency (for example, 20 kHz) determined according to the mirror 130 and the torsion bars 120a and 120b. For example, if the moment of inertia about the axis along the Y-axis direction of the mirror 130 is I and the torsion spring constant is k when the torsion bars 120a and 120b are regarded as one spring, the mirror 130 is Resonance frequency (or (1 / (2π)) × √ (k / I) specified by (1 / (2π)) × √ (k / I) N times or 1 / N times (however, N is rotated about an axis along the Y-axis direction so as to resonate at a resonance frequency of 1).

Here, the rotation of the coils 140a and 140b with the axis along the Y-axis direction as the rotation axis, the deformation vibration of the base 110 along the X-axis direction, and the mirror 130 with the axis along the Y-axis direction as the rotation axis. The rotation relationship will be described in more detail with reference to FIG.

As shown in FIG. 4A, the base 110 is not deformed and oscillated along the X-axis direction when each of the coils 140a and 140b is not rotating about the axis along the Y-axis direction as a rotation axis. For this reason, the mirror 130 is also not rotated about the axis along the Y-axis direction as the rotation axis.

Thereafter, as shown in FIG. 4B, when each of the coils 140a and 140b starts to rotate in the counterclockwise direction in FIG. 4B with the axis along the Y-axis direction as the rotation axis, the base 110 indicates that a portion corresponding to the rotation axis along the Y-axis direction of each of the coils 140a and 140b (that is, a position located on the rotation axis along the Y-axis direction of the coil 140) is a node. It begins to deform and vibrate along the axial direction. In addition, the base 110 has a portion corresponding to the rotation axis along the Y-axis direction of the mirror 130 (that is, a position located on the rotation axis along the Y-axis direction of the mirror 130) as a node. It begins to deform and vibrate along the axial direction. In other words, the base 110 has an antinode between a location corresponding to the rotation axis along the Y-axis direction of each of the coils 140a and 140b and a location corresponding to the rotation axis along the Y-axis direction of the mirror 130. Thus, deformation vibration starts along the X-axis direction. That is, antinodes and nodes appear along the X-axis direction due to the deformation vibration of the base 110. In addition, since the deformation vibration of the base 110 is performed in accordance with a so-called standing wave waveform, the positions of the antinodes and nodes are substantially fixed. At this time, the frequency of deformation vibration of the base 110 is typically the same as the resonance frequency of the mirror 130 described above.

In order to realize such deformation vibration of the base 110, the rigidity of the base 110 may be adjusted. For example, the rigidity of the base 110 may be relatively high and the rigidity of the base 110 may be relatively low. More specifically, for example, a rib may be formed at a node portion of the base 110 and a rib may not be formed at a belly portion of the base 110. In this case, since the portion of the base 110 where the rib is formed has a relatively high rigidity, it is difficult to bend as the coil 140 rotates, whereas the portion of the base 110 where the rib is not formed has a rigidity. Since it is relatively low, it tends to bend as the coil 140 rotates. As a result, the base 110 deforms and vibrates so as to wave along the direction of the X axis, with a portion where the rib is formed as a node and a portion where the rib is not formed as a belly.

As a result, as shown in FIG. 4A to FIG. 4G in time series, the base 110 deforms and vibrates so as to have an appearance like a standing wave as the coils 140a and 140b rotate. . That is, the base 110 has an appearance such that a standing wave appears along a direction orthogonal to the rotation axis of the mirror 130 (that is, the X-axis direction). As a result, as shown in FIG. 4A to FIG. 4G in time series, the mirror 130 rotates with the axis along the Y-axis direction as the rotation axis in accordance with the deformation vibration of the base 110.

As shown in FIGS. 4A to 4G, typically, the rotation directions of the coils 140a and 140b and the rotation direction of the mirror 130 are opposite to each other. Specifically, as shown in FIGS. 4 (a) to 4 (c), the mirror 130 rotates clockwise when the coils 140a and 140b are rotating counterclockwise. Similarly, as shown in FIGS. 4C to 4G, in a state where the coils 140a and 140b are rotating clockwise, the mirror 130 rotates counterclockwise. Note that the coils 110a and 140b in the state shown in FIG. 4G, the base 110, and the mirror 130 respectively change to the state shown in FIG. 4A after passing through the state shown in FIG. Thereafter, the base 110 and the mirror 130 of the coils 140a and 140b, respectively, deform or vibrate or rotate in accordance with the time series shown in FIGS. 4A to 4G. However, the deformation mode of the base 110 shown in FIGS. 4A to 4G is merely an example, and the base 110 is deformed in another deformation mode (for example, a deformation mode having more nodes). You may vibrate.

4 (a) to 4 (g) show examples in which the rotation directions of the coils 140a and 140b and the rotation direction of the mirror 130 are opposite to each other. Strictly speaking, this example can also be expressed as an example in which the rotation directions of the coils 140a and 140b and the rotation direction of the base 110 in the portion supporting the mirror 130 are opposite to each other.

However, when the base 110 is deformed and oscillated in a higher-order vibration mode (for example, a vibration mode in which the number of nodes and abdomen increases as compared with the state shown in FIGS. 4A to 4G). The rotation direction of the mirror 130 and the rotation direction of the base 110 in the portion supporting the mirror 130 may be reversed. That is, the rotation directions of the coils 140a and 140b and the rotation direction of the mirror 130 may be the same.

In addition, as shown in FIGS. 4A to 4G, typically, the rotation direction of the coil 140a and the rotation direction of the coil 140b are the same. Specifically, as shown in FIGS. 4A to 4C, when the coil 140a rotates counterclockwise, the coil 140b also rotates counterclockwise. Similarly, as shown in FIGS. 4C to 4G, when the coil 140a rotates clockwise, the coil 140b also rotates clockwise.

As described above, the MEMS scanner 101 of the first embodiment can rotate the mirror 130 about the axis along the Y-axis direction as the rotation axis. That is, the MEMS scanner 101 of the first embodiment can drive the mirror 130 uniaxially.

In addition, in the MEMS scanner 101 of the first embodiment, the mirror 130 is positioned outside the windings of the coils 140a and 140b. Accordingly, each of the coils 140a and 140b may not be disposed so as to surround the mirror 130. As a result, in the first embodiment, compared to the comparative MEMS scanner in which at least one of the coils 140a and 140b is disposed so as to surround the mirror 130, the size of each of the coils 140a and 140b (for example, winding The diameter, the length of the winding, etc.) can be made relatively small. In other words, in the first embodiment, the sizes of the coils 140a and 140b can be made relatively small regardless of the size of the mirror 130. As a result, the sizes of the magnets 151a and 152a for applying a magnetic field to the coil 140a can also be made relatively small. Similarly, the sizes of the magnets 151b and 152b for applying a magnetic field to the coil 140b can also be made relatively small. For this reason, in the first embodiment, compared to the MEMS scanner of the comparative example in which at least one of the coils 140a and 140b is disposed so as to surround the mirror 130, the coil 140a and the magnet 151a are independent of the size of the mirror 130. And the magnetic gap between the coil 140b and the magnets 151b and 152b can be made relatively small. Therefore, in the first embodiment, the MEMS scanner 101 can be reduced in size as compared with the comparative MEMS scanner in which at least one of the coils 140 a and 140 b is arranged so as to surround the mirror 130.

In addition, in the first embodiment, the coils 140a and 140b do not have to be arranged so as to surround the mirror 130. For this reason, the freedom degree of arrangement | positioning of the magnets 151a and 152a and the magnets 151b and 152b becomes relatively high compared with the MEMS scanner of the comparative example in which at least one of the coils 140a and 140b is arranged so as to surround the mirror 130. . Therefore, the magnets 151a and 152a can be arranged above the center of the coil 140a (specifically, above the inside of the winding of the coil 140a). In particular, even if the magnets 151a and 152a are arranged above the center of the coil 140a, the magnets 151a and 152a do not block the optical path above the mirror 130. Similarly, the magnets 151b and 152b can be disposed above the center of the coil 140b (specifically, above the inside of the winding of the coil 140b). In particular, even if the magnets 151b and 152b are arranged above the center of the coil 140b, the magnets 151b and 152b do not block the optical path above the mirror 130. Therefore, the degree of freedom of arrangement of the magnets 151a and 152a and the magnets 151b and 152b is relatively high while maintaining a preferable operation as the MEMS scanner 101.

In addition, in the first embodiment, torsion bars 120 a and 120 b connected to the mirror 130 are connected to locations corresponding to nodes in the deformation vibration of the base 110. That is, the part corresponding to the node in the deformation vibration of the base 110 coincides with the rotation axis of the mirror 130 along the Y-axis direction. Each of the coils 140a and 140b is arranged at a location corresponding to a node in the deformation vibration of the base 110. That is, the part corresponding to the node in the deformation vibration of the base 110 coincides with the rotation axis of each of the coils 140a and 140b along the Y-axis direction. For this reason, in the first embodiment, the mirror 130 and the coils 140a and 140b are respectively in the vertical direction (specifically, the direction orthogonal to the X-axis direction and the Y-axis direction, respectively, with respect to the surface of the base 110). In the vertical Z-axis direction). Therefore, highly accurate rotational driving of the mirror 130 can be realized.

In addition, in the first embodiment, the coils 140a and 140b are symmetrically arranged on both sides of the mirror 130. For this reason, the weight balance with respect to the rotation of the mirror 130 is balanced. Therefore, even if the coil 140a and the coil 140b are arranged on the base 110, the suitable rotation of the mirror 130 is hardly or completely prevented.

The Lorentz force generated in each of the coils 140a and 140b is, for example, as described in Japanese Patent No. 4827993, “micro vibration (that is, a force having no directionality, which is a torsion bar 120a and 120b. As a force that does not act directly to twist in the direction of rotation of the mirror 130) ”. In this case, the Lorentz force is propagated to the base 110 as a slight vibration, so that the base 110 undergoes deformation vibration. That is, the Lorentz force as fine vibration appears in the form of deformation vibration of the base 110. Alternatively, the Lorentz force generated in each of the coils 140a and 140b is, for example, the homepage of the National Institute of Advanced Industrial Science and Technology (http://www.aist.go.jp/aist_j/press_release/pr2010/pr20100209/pr20100209.html ) May be propagated to the base 110 as “Lamb waves”. In this case, the Lorentz force is propagated to the base 110 as a Lamb wave, so that the base 110 undergoes deformation vibration. The same applies to the following second to fifth embodiments.

(2) Second Embodiment Next, a second embodiment of the MEMS scanner will be described with reference to FIGS. In addition, about the structure same as the MEMS scanner 101 of the above-mentioned 1st Example, the detailed description is abbreviate | omitted by attaching | subjecting the same referential mark.

(2-1) Configuration of MEMS Scanner First, the configuration of the MEMS scanner 102 according to the second embodiment will be described with reference to FIG. FIG. 5 is a plan view conceptually showing the structure of the MEMS scanner 102 according to the second embodiment.

As shown in FIG. 5, the MEMS scanner 101 according to the second embodiment includes a first base 110-1, a first torsion bar 120a-1, a first torsion bar 120b-1, and a second base 110-2. Second torsion bar 120a-2, second torsion bar 120b-2, mirror 130, coil 140a, coil 140b, magnets 151a and 152a, magnets 151b and 152b, magnets 161a and 162a, Magnets 161b and 162b are provided.

The first base 110-1 has a frame shape with a gap inside. That is, the first base 110-1 has two sides extending in the Y-axis direction in FIG. 5 and two sides extending in the X-axis direction (that is, a direction orthogonal to the Y-axis direction) in FIG. And a frame shape having a gap surrounded by two sides extending in the Y-axis direction and two sides extending in the X-axis direction. In the example shown in FIG. 5, the first base 110-1 has a square shape. However, the first base 110-1 is not limited to this. For example, other shapes (for example, a rectangular shape such as a rectangle or a circular shape) Shape etc.). The first base 110-1 is a structure that is the basis of the MEMS scanner 102 according to the second embodiment, and is fixed to a substrate or a support member (not shown) (in other words, the MEMS scanner 102). It is preferably fixed inside the system. Alternatively, the first base 110-1 may be suspended by a suspension (not shown) or the like.

Note that FIG. 5 shows an example in which the first base 110-1 has a frame shape, but it goes without saying that the first base 110-1 may have other shapes. For example, the first base 110-1 may have a U-shape in which a part of the first base 110-1 is an opening. Alternatively, for example, the first base 110-1 may have a box shape with a gap inside. That is, the first base 110-1 is orthogonal to the two surfaces distributed on the plane defined by the X axis and the Y axis, and the Z axis (not shown) (that is, both the X axis and the Y axis). 2 planes distributed on a plane defined by the axis) and two planes distributed on a plane defined by the Y axis and a Z axis (not shown) and surrounded by these 6 planes You may have the box shape which has a space | gap. Alternatively, the shape of the first base 110-1 may be arbitrarily changed according to the manner in which the mirror 130 is disposed.

Each of the first torsion bars 120a-1 and 120b-1 is an elastic member such as a spring made of, for example, silicon, copper alloy, iron alloy, other metal, resin, or the like. Each of the first torsion bars 120a-1 and 120b-1 is disposed so as to extend in the X-axis direction in FIG. In other words, each of the first torsion bars 120a-1 and 120b-1 has a shape having a long side extending in the X-axis direction and a short side extending in the Y-axis direction. However, each of the first torsion bars 120a-1 and 120b-1 has a shape having a short side extending in the X-axis direction and a long side extending in the Y-axis direction depending on the setting state of the resonance frequency described later. You may have. One end of each of the first torsion bars 120a-1 and 120b-1 is connected to the first base 110-1. The other ends of the first torsion bars 120a-1 and 120b-1 are connected to the second base 110-2. In other words, the first torsion bars 120a-1 and 120b-1 suspend the second base 110-2 so as to sandwich the second base 110-2 therebetween.

The second base 110-2 has a frame shape with a gap inside. That is, the second base 110-2 has two sides extending in the Y-axis direction in FIG. 5 and two sides extending in the X-axis direction in FIG. It has a frame shape having a gap surrounded by the side and two sides extending in the X-axis direction. In the example shown in FIG. 5, the second base 110-2 has a square shape. However, the second base 110-2 is not limited to this. For example, other shapes (for example, a rectangular shape such as a rectangle or a circular shape) Shape etc.).

Also, the second base 110-2 is arranged to be suspended or supported by the first torsion bars 120a-1 and 120b-1 in the gap inside the first base 110-1. The second base 110-2 is configured to rotate about the axis along the X-axis direction by the elasticity of the first torsion bars 120a-1 and 120b-1.

Although FIG. 5 shows an example in which the second base 110-2 has a frame shape, it goes without saying that the second base 110-2 may have other shapes. For example, the second base 110-2 may have a U-shape in which a part of the second base 110-2 is an opening. Alternatively, for example, the second base 110-2 may have a box shape with a gap inside. That is, the second base 110-2 is orthogonal to the two surfaces distributed on the plane defined by the X axis and the Y axis, and the Z axis (not shown) (that is, both the X axis and the Y axis). 2 planes distributed on a plane defined by the axis) and two planes distributed on a plane defined by the Y axis and a Z axis (not shown) and surrounded by these 6 planes You may have the box shape which has a space | gap. Alternatively, the shape of the second base 110-2 may be arbitrarily changed according to the manner in which the mirror 130 is disposed.

Each of the second torsion bars 120a-2 and 120b-2 is a member having elasticity such as a spring made of, for example, silicon, copper alloy, iron alloy, other metal, resin, or the like. Each of second torsion bars 120a-2 and 120b-2 is arranged to extend in the Y-axis direction in FIG. In other words, each of the second torsion bars 120a-2 and 120b-2 has a shape having a long side extending in the Y-axis direction and a short side extending in the X-axis direction. However, each of the second torsion bars 120a-2 and 120b-2 has a shape having a short side extending in the Y-axis direction and a long side extending in the X-axis direction, depending on the setting state of the resonance frequency described later. You may have. One end of each of the second torsion bars 120a-2 and 120b-2 is connected to the second base 110-2. The other ends of the second torsion bars 120 a-2 and 120 b-2 are connected to the mirror 130. That is, the second torsion bars 120a-2 and 120b-2 suspend the mirror 130 so as to sandwich the mirror 130 therebetween.

The mirror 130 is arranged to be suspended or supported by the second torsion bars 120a-2 and 120b-2 in the gap inside the second base 110-2. The mirror 130 is configured to rotate about the axis along the Y-axis direction as a rotation axis by the elasticity of the second torsion bars 120a-2 and 120b-2.

The coil 140a is a plurality of windings made of, for example, a material having relatively high conductivity (for example, gold, copper, etc.). In the second embodiment, the coil 140a has a rectangular shape. In particular, the lengths of the four sides of the coil 140a are substantially the same. That is, in the second embodiment, the coil 140a has a square shape. However, the coil 140a may have an arbitrary shape (for example, a rectangle, a rhombus, a parallelogram, a circle, an ellipse, or any other loop shape).

Similarly, the coil 140b is a plurality of windings composed of, for example, a material having relatively high conductivity (for example, gold, copper, etc.). In the second embodiment, the coil 140b has a rectangular shape. In particular, the lengths of the four sides of the coil 140b are substantially the same. That is, in the second embodiment, the coil 140b has a square shape. However, the coil 140b may have an arbitrary shape (for example, a rectangle, a rhombus, a parallelogram, a circle, an ellipse, or any other loop shape).

The coil 140a is disposed on the second base 110-2. In particular, the coil 140a has an X-axis direction (that is, a direction orthogonal to the direction of the rotation axis of the mirror 130) based on the position where the mirror 130 is disposed (particularly, the position where the center or the center of gravity of the mirror 130 is disposed). Are arranged on the second base 110-2 so that the coil 140a is located at a position shifted by a predetermined distance along the center (particularly, the center or center of gravity of the coil 140a is located). However, the coil 140a is positioned so that the coil 140a is positioned at a position shifted by a predetermined distance along the Y-axis direction (that is, the direction of the rotation axis of the mirror 130) with respect to the position where the mirror 130 is disposed. 2 may be arranged on the base 110-2. In addition, the coil 140a is disposed on the second base 110-2 so that the mirror 130 and the coil 140a are aligned along the X-axis direction. As a result, the mirror 130 is positioned outside the windings that constitute the coil 140a. In other words, the mirror 130 is not positioned inside the winding wire constituting the coil 140a.

Similarly, the coil 140b is disposed on the second base 110-2. In particular, the coil 140b has an X-axis direction (that is, a direction orthogonal to the direction of the rotation axis of the mirror 130) based on the position where the mirror 130 is disposed (particularly, the position where the center or the center of gravity of the mirror 130 is disposed). Is arranged on the second base 110-2 so that the coil 140b is located at a position shifted by a predetermined distance along the line (particularly, the center or center of gravity of the coil 140b is located). However, the coil 140b is positioned so that the coil 140b is positioned at a position shifted by a predetermined distance along the Y-axis direction (that is, the direction of the rotation axis of the mirror 130) with reference to the position where the mirror 130 is disposed. 2 may be arranged on the base 110-2. In addition, the coil 140b is disposed on the second base 110-2 so that the mirror 130 and the coil 140b are aligned along the X-axis direction. As a result, the mirror 130 is positioned outside the winding wire that constitutes the coil 140b. In other words, the mirror 130 is not positioned inside the winding wire constituting the coil 140b.

The coils 140a and 140b are disposed on the second base 110-2 so that the mirror 130 is disposed between the coils 140a and 140b. In other words, the coils 140a and 140b are arranged on the second base 110-2 so that the coil 140a, the mirror 130, and the coil 140b are arranged in this order along the X-axis direction. At this time, the distance between the coil 140a and the mirror 130 may be the same as the distance between the coil 140b and the mirror 130. That is, the coils 140a and 140b may be arranged on the second base 110-2 so that the coils 140a and 140b are arranged symmetrically with respect to the mirror 130.

The coil 140a is supplied with a control current for rotating the mirror 130 and the second base 110-2 from the power source via the power terminal 141a formed on the second base 110-2. Similarly, the coil 140b is supplied with a control current for rotating the mirror 130 and the second base 110-2 from the power supply via the power supply terminal 141b formed on the second base 110-2. . The control current is typically a signal component having a frequency that is the same as or synchronized with the frequency of rotation of the mirror 130 about the axis along the Y-axis direction and the second axis about the axis along the X-axis direction. This is an alternating current including both signal components having the same or synchronized frequency as the frequency at which the base 110-2 rotates. The power source may be a power source provided in the MEMS scanner 102 itself or a power source prepared outside the MEMS scanner 102. In the following description, for convenience of explanation, a current component for rotating the mirror 130 with the axis along the Y-axis direction as a rotation axis in the control current is referred to as “Y-axis drive control current”. Similarly, a current component for rotating the second base 110-2 with the axis along the X-axis direction as the rotation axis in the control current is referred to as “X-axis drive control current”.

Magnets 151a and 152a are arranged such that magnet 151a and magnet 152a are arranged along the X-axis direction. In particular, the magnets 151a and 152a are arranged such that the magnet 151a and the magnet 152a sandwich the coil 140a along the X-axis direction. In addition, one of the magnets 151a and 152a is on the magnetic flux exit side, and the other of the magnets 151a and 152a is on the magnetic flux entrance side. In the following description, the magnet 151a is on the magnetic flux incident side and the magnet 152a is on the magnetic flux outgoing side.

The magnetic field applied from the magnet 151a and the magnet 152a is mainly used to rotate the mirror 130 about the axis along the Y-axis direction as a rotation axis. For this reason, in the following description, for convenience of explanation, the magnetic field applied from the magnets 151a and 152a (that is, the magnetic field for rotating the mirror 130 about the axis along the Y-axis direction) is expressed as “Y-axis drive”. "Magnetic field".

Similarly, the magnets 151b and 152b are arranged such that the magnet 151b and the magnet 152b are arranged along the X-axis direction. In particular, the magnets 151b and 152b are arranged such that the magnet 151b and the magnet 152b sandwich the coil 140b along the X-axis direction. In addition, one of the magnets 151b and 152b is a magnetic flux exit side, and the other of the magnets 151b and 152b is a magnetic flux entrance side. In the following, description will be given using an example in which the magnet 151b is on the magnetic flux incident side and the magnet 152b is on the magnetic flux output side.

Note that the magnetic field applied from the magnet 151b and the magnet 152b is mainly used to rotate the mirror 130 about the axis along the Y-axis direction as a rotation axis. Therefore, in the following description, for convenience of description, the magnetic field applied from the magnets 151b and 152b (that is, the magnetic field for rotating the mirror 130 about the axis along the Y-axis direction) is expressed as “Y-axis drive”. "Magnetic field".

Magnets 161a and 162a are arranged such that magnets 161a and 162a are arranged along the Y-axis direction. In particular, the magnets 161a and 162a are arranged such that the magnet 161a and the magnet 162a sandwich the coil 140a along the Y-axis direction. In addition, one of the magnets 161a and 162a is on the magnetic flux exit side, and the other of the magnets 161a and 162a is on the magnetic flux entrance side. In the following, description will be given using an example in which the magnet 161a is on the magnetic flux exit side and the magnet 162a is on the magnetic flux entrance side.

The magnetic field applied from the magnet 161a and the magnet 162a is mainly used to rotate the second base 110-2 with the axis along the X-axis direction as a rotation axis. Therefore, in the following description, for convenience of description, a magnetic field applied from the magnets 161a and 162a (that is, a magnetic field for rotating the second base 110-2 with the axis along the X-axis direction as a rotation axis) This is referred to as “X-axis driving magnetic field”.

Magnets 161b and 162b are arranged such that magnets 161b and 162b are arranged along the Y-axis direction. In particular, the magnets 161b and 162b are arranged such that the magnet 161b and the magnet 162b sandwich the coil 140b along the Y-axis direction. In addition, one of the magnets 161b and 162b is a magnetic flux exit side, and the other of the magnets 161b and 162b is a magnetic flux incident side. In the following, description will be given using an example in which the magnet 161b is on the magnetic flux exit side and the magnet 162b is on the magnetic flux entrance side.

The magnetic field applied from the magnet 161b and the magnet 162b is mainly used to rotate the second base 110-2 with the axis along the X-axis direction as a rotation axis. Therefore, in the following description, for convenience of description, a magnetic field applied from the magnets 161b and 162b (that is, a magnetic field for rotating the second base 110-2 with the axis along the X-axis direction as a rotation axis) This is referred to as “X-axis driving magnetic field”.

(2-2) Operation of MEMS Scanner Next, with reference to FIGS. 6 to 8, the mode of operation of the MEMS scanner 102 according to the second embodiment (specifically, mode of operation for rotating the mirror 130) Will be described. FIG. 6 is a plan view and a cross-sectional view conceptually showing a mode of operation by the MEMS scanner 102 according to the second embodiment. FIGS. 7A and 7B are a plan view and a cross-sectional view conceptually showing a mode of operation by the MEMS scanner 102 according to the second embodiment. FIG. 8 is a sectional view conceptually showing an operation mode of the MEMS scanner 102 according to the second embodiment.

During the operation of the MEMS scanner 102 according to the second embodiment, first, a control current is supplied to each of the coils 140a and 140b. The control current includes a current component (that is, an X-axis drive control current) for rotating the second base 110-2 about the axis along the X-axis direction as a rotation axis. In the second embodiment, the second base 110-2 rotates at an arbitrary frequency (for example, 60 Hz) with an axis along the X-axis direction as a rotation axis. Therefore, the X-axis drive control current is an alternating current including a signal component having a frequency that is the same as or synchronized with the frequency of rotation of the second base 110-2 whose axis is the axis along the X-axis direction. However, the second base 110-2 is a suspended portion including the second base 110-2 (that is, a suspended portion including the second base portion 110-2, the second torsion bars 120a-2 and 120b-2, and the mirror 130). Part) and the resonance frequency determined by the first torsion bars 120a-1 and 120b-1 (more specifically, the inertia moment of the suspended part including the second base 110-2 and the first torsion bars 120a-1 and 120b- (Resonance frequency determined by a torsion spring constant of 1) may be rotated about the axis along the X-axis direction as a rotation axis.

On the other hand, an X-axis driving magnetic field is applied to the coil 140a from the magnets 161a and 162a. The magnets 161a and 162a preferably apply a magnetic field for X-axis driving to the two sides of the coil 140a facing each other along the Y-axis direction. In this case, the magnets 161a and 162a do not need to apply the X-axis driving magnetic field to the two sides of the coil 140a facing in the X-axis direction. Alternatively, the magnets 161a and 162a may apply an X-axis driving magnetic field to two sides of the coil 140a facing each other along the X-axis direction. Alternatively, the magnets 161a and 162a may apply the leakage flux of the X-axis driving magnetic field to the two sides of the coil 140a facing each other along the X-axis direction.

Therefore, Lorentz force is generated in the coil 140a due to electromagnetic interaction between the X-axis drive control current supplied to the coil 140a and the X-axis drive magnetic field applied to the coil 140a. Become.

Similarly, an X-axis driving magnetic field is applied to the coil 140b from the magnets 161b and 162b. The magnets 161b and 162b preferably apply an X-axis driving magnetic field to the two sides of the coil 140b facing each other along the Y-axis direction. In this case, the magnets 161b and 162b do not need to apply the X-axis driving magnetic field to the two sides of the coil 140b facing each other along the X-axis direction. Alternatively, the magnets 161b and 162b may apply an X-axis driving magnetic field to two sides of the coil 140b facing each other along the X-axis direction. Alternatively, the magnets 161b and 162b may apply the leakage flux of the X-axis driving magnetic field to the two sides of the coil 140b facing each other along the X-axis direction.

Therefore, Lorentz force is generated in the coil 140b due to electromagnetic interaction between the X-axis driving control current supplied to the coil 140b and the X-axis driving magnetic field applied to the coil 140b. Become.

Here, as shown in FIG. 6A, the X-axis drive control current flowing in the clockwise direction in FIG. 6A is supplied to each of the coils 140a and 140b, and the magnet 161a to the magnet 162a. A situation will be described in which an X-axis driving magnetic field toward the magnet is applied to the coil 140a, and an X-axis driving magnetic field directed from the magnet 161b to the magnet 162b is applied to each of the coils 140b. In this case, as shown in FIG. 6 (b), which is a drawing of the MEMS scanner 102 shown in FIG. 6 (a) observed from the direction of the arrow VI, of the two sides of the coil 140a facing along the Y-axis direction. A Lorentz force toward the upper direction in FIG. 6B is generated on the right side (that is, the upper side in FIG. 6A). Similarly, as shown in FIG. 6B, the left side (that is, the lower side in FIG. 6A) of the two sides of the coil 140a facing in the Y-axis direction is shown in FIG. A Lorentz force toward the lower direction in (b) is generated. That is, Lorentz forces in different directions are generated on the two sides of the coil 140a facing each other along the Y-axis direction. In other words, Lorentz force, which is a couple, is generated on the two sides of the coil 140a facing each other along the Y-axis direction. Therefore, the coil 140a rotates in the counterclockwise direction in FIG. In addition, as shown in FIG. 6B, the right side of the two sides of the coil 140b facing in the Y-axis direction (that is, the upper side in FIG. 6A) is shown in FIG. A Lorentz force toward the upper direction in b) is generated. Similarly, as shown in FIG. 6B, the left side (that is, the lower side in FIG. 6A) of the two sides of the coil 140b facing in the Y-axis direction is shown in FIG. A Lorentz force toward the lower direction in (b) is generated. That is, Lorentz forces in different directions are generated on the two sides of the coil 140b facing each other along the Y-axis direction. In other words, Lorentz force, which is a couple, is generated on the two sides of the coil 140b facing each other along the Y-axis direction. Accordingly, the coil 140b rotates in the counterclockwise direction in FIG.

On the other hand, since the X-axis driving control current is an alternating current, as shown in FIG. 7A, the X-axis driving control current flowing in the counterclockwise direction in FIG. 140b, an X-axis driving magnetic field directed from the magnet 161a to the magnet 162a is applied to the coil 140a, and an X-axis driving magnetic field directed from the magnet 161b to the magnet 162b is applied to the coil 140b. Follows the situation shown in FIG. In this case, as shown in FIG. 7B, which is a drawing of the MEMS scanner 101 shown in FIG. 7A observed from the direction of the arrow VII, of the two sides of the coil 140a opposed along the Y-axis direction. A Lorentz force toward the lower side in FIG. 7B is generated on the right side (that is, the upper side in FIG. 7A). Similarly, as shown in FIG. 7B, the left side of the two sides of the coil 140a facing along the Y-axis direction (that is, the lower side in FIG. 6A) is A Lorentz force toward the upper direction in 7 (b) is generated. That is, Lorentz forces in different directions are generated on the two sides of the coil 140a facing each other along the Y-axis direction. In other words, Lorentz force, which is a couple, is generated on the two sides of the coil 140a facing each other along the Y-axis direction. Therefore, the coil 140a rotates in the clockwise direction in FIG. In addition, as shown in FIG. 7B, the right side of the two sides of the coil 140b facing in the Y-axis direction (that is, the upper side in FIG. 7A) is shown in FIG. A Lorentz force in the downward direction in b) is generated. Similarly, as shown in FIG. 7B, the long side on the left side (that is, the lower side in FIG. 6A) of the two sides of the coil 140b facing in the Y-axis direction is A Lorentz force toward the upper direction in 7 (b) is generated. That is, Lorentz forces in different directions are generated on the two sides of the coil 140b facing each other along the Y-axis direction. In other words, Lorentz force, which is a couple, is generated on the two sides of the coil 140b facing each other along the Y-axis direction. Accordingly, the coil 140b rotates in the clockwise direction in FIG.

At this time, the magnitude and direction of the Lorentz force that rotates the coil 140a in the clockwise direction at a certain timing (that is, the Lorentz force generated in the coil 140a) is such that the coil 140b is rotated in the clockwise direction at a certain timing. It is preferable that the magnitude and direction of the Lorentz force to be rotated (that is, the Lorentz force generated in the coil 140b) is the same. Similarly, the magnitude of the Lorentz force that rotates the coil 140a counterclockwise at a certain timing (ie, the Lorentz force generated in the coil 140a) is such that the coil 140b is counterclockwise at a certain timing. The Lorentz force to be rotated (that is, the Lorentz force generated in the coil 140b) is preferably the same. More specifically, the magnitude and direction of the Lorentz force generated on the long side on the right side (see FIG. 6B) of the two long sides of the coil 140a opposed along the Y-axis direction is The magnitude and direction of the Lorentz force generated on the long side on the right side (see FIG. 6B) of the two long sides of the coil 140b facing in the direction are preferably the same. Similarly, the magnitude and direction of the Lorentz force generated on the long side on the left side (see FIG. 6B) of the two long sides of the coil 140a facing each other along the Y-axis direction is along the Y-axis direction. The magnitude and direction of the Lorentz force generated on the long side on the left side (see FIG. 6B) of the two long sides of the opposing coil 140b are preferably the same. In order to make the magnitude and direction of the Lorentz force the same, the magnitude of the magnetic field from the magnet 162a to the magnet 161a and the magnitude of the magnetic field from the magnet 162b to the magnet 161b are made the same and supplied to the coil 140a. The control current to be supplied and the control current supplied to the coil 140b are preferably the same.

By such Lorentz force, each of the coils 140a and 140b rotates about the axis along the X-axis direction as a rotation axis (more specifically, reciprocatingly drives to rotate). At this time, the rotation axes of the coils 140a and 140b along the X-axis direction overlap the rotation axis of the second base 110-2 along the X-axis direction. Accordingly, the second base 110-2 also rotates about the axis along the X-axis direction as the rotation axis in accordance with the rotation of the coils 140a and 140b having the axis along the X-axis direction as the rotation axis.

In addition, the second base 110-2 supports the mirror 130 via the second torsion bars 120a-2 and 120b-2. Therefore, as the second base 110-2 rotates with the axis along the X-axis direction as the rotation axis, the mirror 130 also rotates with the axis along the X-axis direction as the rotation axis.

Here, the rotation of each of the coils 140a and 140b having the axis along the X-axis direction as the rotation axis, the rotation of the second base 110-2 having the axis along the X-axis direction as the rotation axis, and along the X-axis direction. The relationship of rotation of the mirror 130 with the axis as the rotation axis will be described in more detail with reference to FIG.

As shown in FIG. 8A, in a state where the coils 140a and 140b are not rotating with the axis along the X-axis direction being the rotation axis, the second base 110-2 is also along the X-axis direction. The shaft is not rotating around its axis of rotation. For this reason, the mirror 130 is also not rotated about the axis along the X-axis direction as the rotation axis.

Thereafter, as shown in FIG. 8B, when each of the coils 140a and 140b starts to rotate along the counterclockwise direction in FIG. The two bases 110-2 also start to rotate along the counterclockwise direction in FIG. 8B with the axis along the X-axis direction as the rotation axis. As a result, as shown in FIG. 8 (a) to FIG. 8 (g) in time series, as the coils 140a and 140b rotate about the axis along the X-axis direction, the second base 110-2 also rotates about the axis along the X-axis direction as a rotation axis. For this reason, as shown in FIG. 8 (a) to FIG. 8 (g) in time series, with the rotation of the second base 110-2 whose axis is the axis along the X-axis direction, the mirror 130 is also Moreover, it rotates with an axis along the X-axis direction as a rotation axis. The coils 140a and 140b in the state shown in FIG. 8 (g), the second base 110-2, and the mirror 130 are then in the state shown in FIG. 8 (a) after the state shown in FIG. 8 (f). Transition to. Thereafter, the coils 140a and 140b, the second base 110-2, and the mirror 130, respectively, rotate according to the time series shown in FIGS. 8A to 8G.

On the other hand, the control current includes a current component (that is, a Y-axis drive control current) for rotating the mirror 130 about the axis along the Y-axis direction as a rotation axis. In the second embodiment, the mirror 130 has a resonance frequency determined by the mirror 130 and the second torsion bars 120a-2 and 120b-2 (more specifically, the moment of inertia of the mirror 130 and the second torsion bars 120a-2 and 120b-2). In order to resonate at a resonance frequency determined by a torsion spring constant of 120b-2, the axis rotates along the axis along the Y-axis direction. Therefore, the Y-axis drive control current is an alternating current including a signal component having a frequency that is the same as or synchronized with the resonance frequency of the mirror 130. However, the mirror 130 may rotate around the axis along the Y-axis direction at a frequency different from or not synchronized with the resonance frequency determined by the mirror 130 and the second torsion bars 120a-2 and 120b-2. . In this case, the Y-axis drive control current is an alternating current including a signal component having a frequency that is the same as or synchronized with the frequency at which the mirror 130 rotates with the axis along the Y-axis direction as the rotation axis.

On the other hand, a magnetic field for Y-axis driving is applied to the coil 140a from the magnets 151a and 152a. The magnets 151a and 152a preferably apply a Y-axis driving magnetic field to two sides of the coil 140a facing each other along the X-axis direction. In this case, the magnets 151a and 152a do not need to apply the Y-axis driving magnetic field to the two sides of the coil 140a facing each other along the Y-axis direction. Alternatively, the magnets 151a and 152a may apply a Y-axis driving magnetic field to the two sides of the coil 140a facing each other along the Y-axis direction. Alternatively, the magnets 151a and 152a may apply only the leakage flux of the Y-axis driving magnetic field to the two sides of the coil 140a that are opposed in the Y-axis direction.

Therefore, a Lorentz force is generated in the coil 140a due to electromagnetic interaction between the Y-axis drive control current supplied to the coil 140a and the Y-axis drive magnetic field applied to the coil 140a. Become.

Similarly, a magnetic field for Y-axis driving is applied to the coil 140b from the magnets 151b and 152b. The magnets 151b and 152b preferably apply a Y-axis driving magnetic field to two sides of the coil 140b facing each other along the X-axis direction. In this case, the magnets 151b and 152b do not need to apply the Y-axis driving magnetic field to the two sides of the coil 140b facing each other along the Y-axis direction. Alternatively, the magnets 151b and 152b may apply a Y-axis driving magnetic field to two sides of the coil 140b facing each other along the Y-axis direction. Alternatively, the magnets 151b and 152b may apply only the leakage magnetic flux of the Y-axis driving magnetic field to the two sides of the coil 140b facing each other along the Y-axis direction.

Therefore, Lorentz force is generated in the coil 140b due to electromagnetic interaction between the Y-axis drive control current supplied to the coil 140b and the Y-axis drive magnetic field applied to the coil 140b. Become.

In this case, as in the first embodiment (that is, as in FIGS. 2 and 3), each of the coils 140a and 140b rotates about the axis along the Y-axis direction as a rotation axis (more specifically, To reciprocate to rotate). At this time, the rotation axes of the coils 140a and 140b along the Y-axis direction are different from the rotation axis of the mirror 130 along the Y-axis direction. Specifically, the respective rotation axes of the coils 140a and 140b along the Y-axis direction exist at positions shifted by a predetermined distance in the X-axis direction with respect to the rotation axis of the mirror 130 along the Y-axis direction. Therefore, the respective rotations of the coils 140a and 140b having the axis along the Y-axis direction as the rotation axis do not directly rotate the mirror 130 with the axis along the Y-axis direction as the rotation axis.

On the other hand, as the coils 140a and 140b rotate about the axis along the X-axis direction, micro vibrations propagate from the coils 140a and 140b to the second base 110-2. As a result, the second base 110-2 on which the coils 140a and 140b are arranged is deformed and oscillated in a standing wave shape (that is, in a standing wave shape) along the X-axis direction. In other words, the second base 110-2 is deformed and oscillated so as to wave along the X-axis direction. That is, the appearance of the second base 110-2 is deformed so that a part of the second base 110-2 becomes an antinode of deformation vibration and the other part becomes a node of deformation vibration.

Due to the deformation vibration of the second base 110-2, the mirror 130 rotates about the axis along the Y-axis direction as a rotation axis. At this time, the mirror 130 rotates so as to resonate at a resonance frequency (for example, 20 kHz) determined according to the mirror 130 and the second torsion bars 120a-2 and 120b-2. For example, the torsion spring constant when the moment of inertia about the axis along the Y-axis direction of the mirror 130 is I (Y) and the second torsion bars 120a-2 and 120b-2 are regarded as one spring is k ( Y), the mirror 130 has a resonance frequency (or (1 / (2π)) × specified by (1 / (2π)) × √ (k (Y) / I (Y)) × Rotate the axis along the Y-axis direction so that it resonates at N times or 1 / N times (k (Y) / I (Y))) (where N is an integer of 1 or more). Rotates as an axis.

The rotation of the coils 140a and 140b with the axis along the Y-axis direction as the rotation axis, the deformation vibration of the second base 110-2 along the X-axis direction, and the axis along the Y-axis direction as the rotation axis. The relationship of the rotation of the mirror 130 is that the rotation of the coils 140a and 140b with the axis along the Y-axis direction as the rotation axis in the first embodiment, the deformation vibration of the base 110 along the X-axis direction, and the Y-axis direction. This is the same as the relationship of rotation of the mirror 130 about the axis along the axis (see FIG. 4).

As described above, the MEMS scanner 102 of the second embodiment can rotate the mirror 130 about the axis along the Y-axis direction as the rotation axis. In addition, the MEMS scanner 102 of the second embodiment can rotate the second base 110-2 with the axis along the X-axis direction as a rotation axis. At this time, considering that the mirror 130 is supported by the second base 110-2 via the second torsion bars 120a-2 and 120b-2, the first axis about the axis along the X-axis direction is the rotation axis. As the 2 base 110-2 rotates, the mirror 130 also rotates about the axis along the X-axis direction as the rotation axis. Therefore, the MEMS scanner 102 according to the second embodiment can rotate the mirror 130 about the axis along the X-axis direction as the rotation axis. That is, the MEMS scanner 102 of the second embodiment can drive the mirror 130 biaxially.

In addition, in the MEMS scanner 102 of the second embodiment, the mirror 130 is positioned outside the windings of the coils 140a and 140b. Accordingly, each of the coils 140a and 140b may not be disposed so as to surround the mirror 130. As a result, in the second embodiment, compared with the comparative MEMS scanner in which at least one of the coils 140a and 140b is disposed so as to surround the mirror 130, the size of each of the coils 140a and 140b (for example, the winding The diameter, the length of the winding, etc.) can be made relatively small. In other words, in the second embodiment, the sizes of the coils 140a and 140b can be made relatively small regardless of the size of the mirror 130. As a result, the sizes of the magnets 151a and 152a and the magnets 161a and 162a for applying a magnetic field to the coil 140a can also be made relatively small. Similarly, the sizes of the magnets 151b and 152b and the magnets 161b and 162b for applying a magnetic field to the coil 140b can also be made relatively small. For this reason, in the second embodiment, compared to the MEMS scanner of the comparative example in which at least one of the coils 140a and 140b is disposed so as to surround the mirror 130, the coil 140a and the magnet 151a are independent of the size of the mirror 130. And the magnetic gap between the magnets 161a and 162a and the magnetic gap between the coil 140b and the magnets 151b and 152b and the magnets 161b and 162b can be made relatively small. Therefore, in the second embodiment, the MEMS scanner 102 can be reduced in size as compared with the comparative MEMS scanner in which at least one of the coils 140a and 140b is disposed so as to surround the mirror 130.

In addition, in the second embodiment, second torsion bars 120a-2 and 120b-2 connected to the mirror 130 are connected to locations corresponding to nodes in the deformation vibration of the second base 110-2. That is, the part corresponding to the node in the deformation vibration of the second base 110-2 coincides with the rotational axis of the mirror 130 along the Y-axis direction. In addition, the coils 140a and 140b are arranged at locations corresponding to nodes in the deformation vibration of the second base 110-2. That is, the location corresponding to the node in the deformation vibration of the second base 110-2 coincides with the rotation axis along the Y-axis direction of each of the coils 140a and 140b. For this reason, in the second embodiment, the mirror 130 and the coils 140a and 140b are respectively in the vertical direction (specifically, the direction orthogonal to the X-axis direction and the Y-axis direction, respectively, and the first base 110-1 Alternatively, movement or vibration in the Z-axis direction perpendicular to the surface of the second base 110-2 is prevented. Therefore, high-precision rotation of the mirror 130 can be realized.

(3) Third Embodiment Next, a third embodiment of the MEMS scanner will be described with reference to FIGS. In addition, about the structure same as the MEMS scanner 102 of the above-mentioned 2nd Example, the detailed description is abbreviate | omitted by attaching | subjecting the same referential mark.

(3-1) Configuration of MEMS Scanner First, the configuration of the MEMS scanner 103 according to the third embodiment will be described with reference to FIG. FIG. 9 is a plan view conceptually showing the structure of the MEMS scanner 103 according to the third example.

As shown in FIG. 9, the MEMS scanner 103 according to the third embodiment is different from the MEMS scanner 102 according to the second embodiment in that the arrangement positions of the magnets 161a and 162a and the magnets 161b and 162b are changed. The difference is that the magnet 151a and the magnet 152a and the magnet 151b and the magnet 152b are not provided. The other components of the MEMS scanner 103 of the third embodiment may be the same as the other components of the MEMS scanner 102 of the second embodiment.

In the third embodiment, the magnets 161a and 162a are arranged so that the magnet 161a and the magnet 162a sandwich the coil 140a along the Y-axis direction, as in the second embodiment. On the other hand, in the third embodiment, the magnets 161a and 162a are displaced along the X-axis direction (in other words, the magnet 161a (for example, the center of the magnet 161a) and the magnet 162a (for example, the center of the magnet 162a). Offset). However, the magnet 161a and the magnet 162a may sandwich the coil 140a along the X-axis direction, and the position where the magnet 161a is disposed and the position where the magnet 162a is disposed may be offset along the Y-axis direction.

The magnets 161a and 162a are preferably arranged at positions where the magnet 161a and the magnet 162a are point-symmetric with respect to the coil 140a. In other words, the magnets 161a and 162a are preferably arranged at positions where the magnet 161a and the magnet 162a are point-symmetric with respect to the center of the winding constituting the coil 140a.

Similarly, in the third embodiment, the magnets 161b and 162b are arranged such that the magnet 161b and the magnet 162b sandwich the coil 140b along the Y-axis direction, as in the second embodiment. On the other hand, in the third embodiment, the magnets 161b and 162b are shifted in the X-axis direction between the magnet 161b (for example, the center of the magnet 161b) and the magnet 162b (for example, the center of the magnet 162b) (in other words, Offset). However, the magnet 161b and the magnet 162b may sandwich the coil 140b along the X-axis direction, and the position where the magnet 161b is disposed and the position where the magnet 162b is disposed may be offset along the Y-axis direction.

The magnets 161b and 162b are preferably arranged at positions where the magnet 161b and the magnet 162b are point-symmetric with respect to the coil 140b. In other words, the magnets 161b and 162b are preferably arranged at positions where the magnet 161b and the magnet 162b are point-symmetric with respect to the center of the winding constituting the coil 140b.

(3-2) Operation of MEMS Scanner Next, with reference to FIG. 10, the mode of operation of the MEMS scanner 103 according to the third embodiment (specifically, the mode of operation for rotating the mirror 130) will be described. . FIG. 10 is a plan view conceptually showing an operation mode of the MEMS scanner 103 according to the third embodiment.

During the operation of the MEMS scanner 103 according to the third embodiment, similarly to the operation of the MEMS scanner 102 according to the second embodiment, the control currents (that is, the X-axis drive control current and the Y-axis) are applied to the coils 140a and 140b, respectively. A control current superimposed with a drive control current).

On the other hand, a magnetic field is applied to the coil 140a from the magnets 161a and 162a. In the third embodiment, the magnetic field applied from the magnets 161a and 162a is not only used for rotating the mirror 130 about the axis along the Y-axis direction but also the axis along the X-axis direction. Is also used to rotate the second base 110-2 about the rotation axis.

Similarly, a magnetic field is applied to the coil 140b from the magnets 161b and 162b. In the third embodiment, the magnetic field applied from the magnets 161b and 162b is not only used for rotating the mirror 130 about the axis along the Y-axis direction but also the axis along the X-axis direction. Is also used to rotate the second base 110-2 about the rotation axis.

At this time, as shown in FIG. 10, since the position where the magnet 161a is arranged and the position where the magnet 162a is arranged are offset along the X-axis direction, the magnets 161a and 162a are arranged in the Y-axis direction. A magnetic field is applied to the two sides of the coil 140a facing each other so as to obliquely cross the two sides. In other words, the magnets 161a and 162a apply a magnetic field that intersects the two sides of the coil 140a facing each other along the Y-axis direction at an angle other than 90 degrees with respect to the two sides. That is, the magnets 161a and 162a apply a magnetic field that intersects the two sides of the coil 140a facing each other along the Y-axis direction in the diagonal direction of the winding of the coil 140a.

Similarly, as shown in FIG. 10, since the position where the magnet 161b is arranged and the position where the magnet 162b is arranged are offset along the X-axis direction, the magnets 161b and 162b are arranged in the Y-axis direction. A magnetic field is applied to the two sides of the coil 140b facing each other so as to cross the two sides obliquely. In other words, the magnets 161b and 162b apply a magnetic field that intersects the two sides of the coil 140b facing each other along the Y-axis direction at an angle other than 90 degrees with respect to the two sides. That is, the magnets 161b and 162b apply a magnetic field that intersects the two sides of the coil 140b facing each other along the Y-axis direction in the diagonal direction of the winding of the coil 140b.

At this time, it is preferable that the magnets 161a and 162a do not apply a magnetic field to the two sides of the coil 140a facing each other along the X-axis direction. However, the magnets 161a and 162a apply only the leakage flux of the magnetic field to be applied to the two sides of the coil 140a facing in the Y-axis direction to the two sides of the coil 140a facing in the X-axis direction. May be. That is, it is preferable that the magnets 161a and 162a do not actively apply a magnetic field to the two sides of the coil 140a facing each other along the X-axis direction. However, the magnets 161a and 162a may positively apply a magnetic field to the two sides of the coil 140a facing each other along the X-axis direction.

Similarly, it is preferable that the magnets 161b and 162b do not apply a magnetic field to the two sides of the coil 140b facing each other along the X-axis direction. However, the magnets 161b and 162b give only the leakage flux of the magnetic field to be applied to the two sides of the coil 140b facing in the Y-axis direction to the two sides of the coil 140b facing in the X-axis direction. May be. That is, it is preferable that the magnets 161b and 162b do not positively apply a magnetic field to the two sides of the coil 140b facing each other along the X-axis direction. However, the magnets 161b and 162b may positively apply a magnetic field to two sides of the coil 140b facing each other along the X-axis direction.

Here, as shown in FIG. 10, a control current flowing in the clockwise direction in FIG. 10 is supplied to each of the coils 140a and 140b, and a magnetic field from the magnet 161a toward the magnet 162a is applied to the coil 140a. A situation in which a magnetic field from the magnet 161b toward the magnet 162b is applied to the coil 140b will be described.

In this case, as shown in FIG. 10, one side (for example, the upper side in FIG. 10) of the two sides of the coil 140 a facing along the Y-axis direction is formed from the back side in the drawing of FIG. 10. Lorentz force toward the front side of the page is generated. At this time, since the magnetic field is applied so as to obliquely cross the two sides of the coil 140a facing each other along the Y-axis direction, this Lorentz force is applied to the two coils 140a facing each other along the Y-axis direction. It occurs on the relatively outer side of one of the sides (that is, the side relatively far from the mirror 130). Similarly, as shown in FIG. 10, the other side (for example, the lower side of FIG. 10) of the two sides of the coil 140a facing along the Y-axis direction is on the front side of the sheet of FIG. Lorentz force is generated toward the back side of the page. At this time, since the magnetic field is applied so as to obliquely cross the two sides of the coil 140a facing each other along the Y-axis direction, this Lorentz force is applied to the two coils 140a facing each other along the Y-axis direction. This occurs on the relatively inner side of the other side (that is, the side relatively close to the mirror 130). Even when the direction (that is, polarity) of the control current supplied to the coil 140a is reversed, the same Lorentz force (however, the direction is reversed) is generated.

Similarly, as shown in FIG. 10, one side (for example, the upper side in FIG. 10) of the two sides of the coil 140 b facing in the Y-axis direction is formed from the back side in the drawing of FIG. 10. Lorentz force toward the front side of the page is generated. At this time, since the magnetic field is applied so as to obliquely cross the two sides of the coil 140b opposed along the Y-axis direction, this Lorentz force is applied to the two coils 140b opposed along the Y-axis direction. It occurs on the relatively outer side of one of the sides (that is, the side relatively far from the mirror 130). Similarly, as shown in FIG. 10, the other side (for example, the lower side of FIG. 10) of the two sides of the coil 140b facing each other along the Y-axis direction is on the front side of the sheet of FIG. Lorentz force is generated toward the back side of the page. At this time, since the magnetic field is applied so as to obliquely cross the two sides of the coil 140b opposed along the Y-axis direction, this Lorentz force is applied to the two coils 140b opposed along the Y-axis direction. This occurs on the relatively inner side of the other side (that is, the side relatively close to the mirror 130). Even when the direction (that is, polarity) of the control current supplied to the coil 140b is reversed, the same Lorentz force (however, the direction is reversed) is generated.

As a result, the position where the Lorentz force is generated on one of the two sides of the coil 140a facing along the Y-axis direction, and the other of the two sides of the coil 140a facing along the Y-axis direction. The position where the Lorentz force is generated is shifted along the Y-axis direction. For this reason, the Lorentz force generated in the coil 140a (particularly, mainly the Lorentz force according to the X-axis drive control current) acts on the coil 140a as a rotational force with the axis along the X-axis direction as the rotation axis. become. For this reason, the coil 140a rotates about the axis along the X-axis direction as a rotation axis. Similarly, the position where the Lorentz force is generated on one of the two sides of the coil 140b facing in the Y-axis direction and the other of the two sides of the coil 140b facing in the Y-axis direction. The position where the Lorentz force is generated is shifted along the Y-axis direction. For this reason, the Lorentz force generated in the coil 140b (particularly, mainly the Lorentz force according to the X-axis drive control current) acts on the coil 140b as a rotational force having the axis along the X-axis direction as the rotation axis. become. For this reason, the coil 140b rotates using the axis along the X-axis direction as a rotation axis. As a result, similarly to the second embodiment, the second base 110-2 also rotates about the axis along the X-axis direction as the rotation axis.

In addition, the vibration propagates to the second base 110-2 due to the rotation of the coils 140a and 140b whose rotation axis is the axis along the X-axis direction. Due to this vibration, the second base 110-2 is deformed and oscillated along the X-axis direction as in the second embodiment. As a result, the mirror 130 rotates about the axis along the Y-axis direction as a rotation axis.

Alternatively, when the control current supplied to the coil 140a includes the Y-axis drive control current, a magnetic field is not applied to the two sides of the coil 140a facing along the X-axis direction. In addition, it was confirmed by experiments conducted by the inventors of the present application that the Lorentz force corresponding to the Y-axis drive control current is slightly generated in the coil 140a. Similarly, when the control current supplied to the coil 140b includes the Y-axis drive control current, the magnetic field is not applied to the two sides of the coil 140b facing each other along the X-axis direction. However, it has been confirmed by an experiment conducted by the inventors of the present application that the Lorentz force corresponding to the Y-axis drive control current is slightly generated in the coil 140b. As a result, the second base 110-2 is deformed and oscillated along the X-axis direction as in the second embodiment. As a result, the mirror 130 rotates about the axis along the Y-axis direction as a rotation axis.

Alternatively, as shown in FIG. 10, the position where the Lorentz force is generated on one of the two sides of the coil 140 a facing along the Y-axis direction, and 2 of the coil 140 a facing along the Y-axis direction. The position where the Lorentz force is generated on the other side of the two sides is shifted along the X-axis direction. For this reason, the Lorentz force generated in the coil 140a (particularly, the Lorentz force mainly according to the Y-axis drive control current) is substantially the coil as a rotational force with the axis along the Y-axis direction as the rotation axis. 140a may be affected. For this reason, the coil 140a rotates with the axis along the Y-axis direction as the rotation axis, as in the second embodiment. Similarly, as shown in FIG. 10, the position where the Lorentz force is generated on one of the two sides of the coil 140b facing along the Y-axis direction and the position of the coil 140b facing along the Y-axis direction. The position where the Lorentz force is generated on the other side of the two sides is shifted along the X-axis direction. For this reason, the Lorentz force generated in the coil 140b (particularly, the Lorentz force mainly according to the Y-axis drive control current) is substantially the coil as a rotational force having the axis along the Y-axis direction as the rotation axis. 140b may be affected. For this reason, the coil 140b rotates with the axis along the Y-axis direction as the rotation axis, as in the second embodiment. As a result, the second base 110-2 is deformed and oscillated along the X-axis direction as in the second embodiment. As a result, the mirror 130 rotates about the axis along the Y-axis direction as a rotation axis.

As described above, the MEMS scanner 103 according to the third embodiment can preferably enjoy various effects that the MEMS scanner 102 according to the second embodiment enjoys. In addition, the MEMS scanner 103 according to the third embodiment does not need to include the magnets 151a and 152a and the magnets 161a and 162b as compared with the MEMS scanner 102 according to the second embodiment. For this reason, further downsizing of the MEMS scanner 103 is realized.

(4) Fourth Embodiment Next, a fourth embodiment of the MEMS scanner will be described with reference to FIGS. In addition, about the structure same as the MEMS scanner 103 of the above-mentioned 3rd Example, the detailed description is abbreviate | omitted by attaching | subjecting the same referential mark.

(4-1) Configuration of MEMS Scanner First, the configuration of the MEMS scanner 104 according to the fourth embodiment will be described with reference to FIG. FIG. 11 is a plan view conceptually showing the structure of the MEMS scanner 104 according to the fourth example.

As shown in FIG. 11, the MEMS scanner 104 of the fourth embodiment is different from the MEMS scanner 103 of the third embodiment in that it further includes a magnetic yoke 170a and a magnetic yoke 170b. The other components of the MEMS scanner 104 of the fourth embodiment may be the same as the other components of the MEMS scanner 103 of the third embodiment.

In the fourth embodiment, the magnetic yoke 170a forms a magnetic field path in which the magnetic field emitted from the magnet 161a reaches the magnet 162a while being applied to the two sides of the coil 140a facing each other along the Y-axis direction. To do. That is, the magnetic yoke 170a has a shape extending from one end portion where the magnetic field emitted from the magnet 161a is incident toward the other end portion where the magnetic field incident on the magnet 162a is emitted. FIG. 11 shows an example in which the magnetic yoke 170a has a shape extending along the X-axis direction.

Similarly, the magnetic yoke 170b forms a magnetic field path in which the magnetic field emitted from the magnet 161b reaches the magnet 162b while being applied to two sides of the coil 140b facing each other along the Y-axis direction. That is, the magnetic yoke 170b has a shape extending from one end portion where the magnetic field emitted from the magnet 161b is incident toward the other end portion where the magnetic field incident on the magnet 162b is emitted. FIG. 11 shows an example in which the magnetic yoke 170b has a shape extending along the X-axis direction.

(4-2) Operation of MEMS Scanner Next, with reference to FIG. 12, an operation mode of the MEMS scanner 104 according to the fourth embodiment (specifically, an operation mode of rotating the mirror 130) will be described. . FIG. 12 is a plan view conceptually showing an operation mode of the MEMS scanner 104 according to the fourth embodiment.

During the operation of the MEMS scanner 104 according to the fourth embodiment, similarly to the operation of the MEMS scanner 103 according to the third embodiment, the control currents (that is, the X-axis drive control current and the Y-axis) are applied to the coils 140a and 140b, respectively. A control current superimposed with a drive control current).

On the other hand, a magnetic field is applied to the coil 140a from the magnets 161a and 162a. In the fourth embodiment, the magnetic field applied from the magnets 161a and 162a is not only used for rotating the mirror 130 about the axis along the Y-axis direction but also the axis along the X-axis direction. Is also used to rotate the second base 110-2 about the rotation axis.

Similarly, a magnetic field is applied to the coil 140b from the magnets 161b and 162b. In the fourth embodiment, the magnetic field applied from the magnets 161b and 162b is not only used to rotate the mirror 130 about the axis along the Y-axis direction but also the axis along the X-axis direction. Is also used to rotate the second base 110-2 about the rotation axis.

At this time, as shown in the plan view of FIG. 12A and the cross-sectional view of FIG. 12B, the position where the magnet 161a is disposed and the position where the magnet 162a is disposed are offset along the X-axis direction. Since the magnetic yoke 170a that extends along the X-axis direction is disposed, the magnets 161a and 162a are disposed on one of the two sides of the coil 140a facing along the Y-axis direction (for example, Relative to the side portion of one side (for example, the left side of FIG. 12 (a)) and the other side (for example, the upper side of FIG. 12 (a)) relative to the lower side of FIG. 12 (a). Therefore, a magnetic field is applied to the side portion on the other side (for example, the right side in FIG. 12A). That is, the magnets 161a and 162a are part of the two sides of the coil 140a opposed along the Y-axis direction and opposed along the diagonal direction (that is, the diagonal direction) of the coil 140a. A magnetic field is applied to the two side portions. In order to apply such a magnetic field, the magnet 161a and one end of the magnetic yoke 170a (that is, the end where the magnetic field emitted from the magnet 161a is incident) face each other along the diagonal direction of the coil 140a. It arrange | positions so that a magnetic field can be provided to one side part of the two side parts of the coil 140a to perform. Similarly, the magnet 162a and the other end of the magnetic yoke 170a (that is, the end from which the magnetic field incident on the magnet 162a is emitted) are the two side portions of the coil 140a that face each other along the diagonal direction of the coil 140a. It arrange | positions so that a magnetic field can be provided to the other side part of these.

Similarly, as shown in the plan view of FIG. 12A and the cross-sectional view of FIG. 12B, the position where the magnet 161b is disposed and the position where the magnet 162b is disposed are offset along the X-axis direction. Since the magnetic yoke 170b extending along the X-axis direction is disposed, the magnets 161b and 162b are disposed on one of the two sides of the coil 140b facing along the Y-axis direction (for example, Relative to the side portion of one side (for example, the left side of FIG. 12 (a)) and the other side (for example, the upper side of FIG. 12 (a)) relative to the lower side of FIG. 12 (a). Therefore, a magnetic field is applied to the side portion on the other side (for example, the right side in FIG. 12A). That is, the magnets 161b and 162b are part of the two sides of the coil 140b facing each other along the Y-axis direction and are opposed along the diagonal direction (that is, the diagonal direction) of the coil 140b. A magnetic field is applied to the two side portions. In order to apply such a magnetic field, the magnet 161b and one end of the magnetic yoke 170b (that is, the end where the magnetic field emitted from the magnet 161b is incident) face each other along the diagonal direction of the coil 140b. It arrange | positions so that a magnetic field can be provided to one side part of the two side parts of the coil 140b to perform. Similarly, the magnet 162b and the other end of the magnetic yoke 170b (that is, the end from which the magnetic field incident on the magnet 162b is emitted) are the two side portions of the coil 140b that face each other along the diagonal direction of the coil 140b. It arrange | positions so that a magnetic field can be provided to the other side part of these.

Here, as shown in FIGS. 12 (a) and 12 (b), a control current flowing in the clockwise direction in FIG. 12 (a) is supplied to the coil 140a, and the magnetic yoke 170a is moved from the magnet 161a. A situation in which a magnetic field directed to the magnet 162a via the coil 140a is applied to the coil 140a will be described. In this case, as shown in FIGS. 12 (a) and 12 (b), one of the two sides of the coil 140a facing along the Y-axis direction (for example, the upper side of FIG. 12 (a)). On the side or the right side in FIG. 12B, a Lorentz force is generated from the back side of the sheet of FIG. 12A toward the front side of the sheet (in other words, the upper side of FIG. 12B). At this time, as shown in FIG. 12A, this Lorentz force is relatively outside of one of the two sides of the coil 140a facing along the Y-axis direction (that is, relative to the mirror 130). Will occur on the far side). Similarly, as shown in FIGS. 12A and 12B, the other side of the two sides of the coil 140a facing along the Y-axis direction (for example, the lower side of FIG. 12A) The Lorentz force is generated from the front side of FIG. 12A toward the back side of the paper surface (in other words, the lower side of FIG. 12B). At this time, as shown in FIG. 12B, this Lorentz force is relatively inward of the other side of the two sides of the coil 140a facing in the Y-axis direction (that is, relative to the mirror 130). Will occur on the near side). Even when the direction (that is, polarity) of the control current supplied to the coil 140a is reversed, the same Lorentz force (however, the direction is reversed) is generated.

Similarly, as shown in FIGS. 12 (a) and 12 (b), a control current flowing in the clockwise direction in FIG. 12 (a) is supplied to the coil 140b, and the magnetic yoke 170b is moved from the magnet 161b. The situation where the magnetic field toward the magnet 162b is applied to the coil 140b through will be described. In this case, as shown in FIGS. 12 (a) and 12 (b), one of the two sides of the coil 140b facing along the Y-axis direction (for example, the upper side of FIG. 12 (a)). On the side or the right side in FIG. 12B, a Lorentz force is generated from the back side of the sheet of FIG. 12A toward the front side of the sheet (in other words, the upper side of FIG. 12B). At this time, as shown in FIG. 12 (a), this Lorentz force is relative to the inner side of one of the two sides of the coil 140b facing in the Y-axis direction (that is, relative to the mirror 130). Will occur on the near side). Similarly, as shown in FIGS. 12A and 12B, the other side of the two sides of the coil 140b facing along the Y-axis direction (for example, the lower side of FIG. 12A) The Lorentz force is generated from the front side of FIG. 12A toward the back side of the paper surface (in other words, the lower side of FIG. 12B). At this time, as shown in FIG. 12B, the Lorentz force is relatively relative to the other side of the two sides of the coil 140b facing in the Y-axis direction (that is, relative to the mirror 130). Will occur on the far side). Even when the direction (that is, polarity) of the control current supplied to the coil 140b is reversed, the same Lorentz force (however, the direction is reversed) is generated.

As a result, the position where the Lorentz force is generated on one of the two sides of the coil 140b facing in the Y-axis direction and the other of the two sides of the coil 140a facing in the Y-axis direction. The position where the Lorentz force is generated is shifted along the Y-axis direction. For this reason, the Lorentz force generated in the coil 140a (particularly, mainly the Lorentz force according to the X-axis drive control current) acts on the coil 140a as a rotational force with the axis along the X-axis direction as the rotation axis. become. For this reason, the coil 140a rotates about the axis along the X-axis direction as a rotation axis. Similarly, the position where the Lorentz force is generated on one of the two sides of the coil 140b facing in the Y-axis direction and the other of the two sides of the coil 140b facing in the Y-axis direction. The position where the Lorentz force is generated is shifted along the Y-axis direction. For this reason, the Lorentz force generated in the coil 140b (particularly, mainly the Lorentz force according to the X-axis drive control current) acts on the coil 140b as a rotational force having the axis along the X-axis direction as the rotation axis. become. For this reason, the coil 140b rotates using the axis along the X-axis direction as a rotation axis. As a result, similarly to the third embodiment, the second base 110-2 also rotates about the axis along the X-axis direction as the rotation axis.

In addition, the vibration propagates to the second base 110-2 due to the rotation of the coils 140a and 140b whose rotation axis is the axis along the X-axis direction. Due to this vibration, the second base 110-2 deforms and vibrates along the X-axis direction as in the third embodiment. As a result, the mirror 130 rotates about the axis along the Y-axis direction as a rotation axis.

Alternatively, when the control current supplied to the coil 140a includes the Y-axis drive control current, a magnetic field is not applied to the two sides of the coil 140a facing along the X-axis direction. In addition, it was confirmed by experiments conducted by the inventors of the present application that the Lorentz force corresponding to the Y-axis drive control current is slightly generated in the coil 140a. Similarly, when the control current supplied to the coil 140b includes the Y-axis drive control current, the magnetic field is not applied to the two sides of the coil 140b facing each other along the X-axis direction. However, it has been confirmed by an experiment conducted by the inventors of the present application that the Lorentz force corresponding to the Y-axis drive control current is slightly generated in the coil 140b. As a result, the second base 110-2 undergoes deformation vibration along the X-axis direction, as in the third embodiment. As a result, the mirror 130 rotates about the axis along the Y-axis direction as a rotation axis.

Alternatively, as shown in FIG. 12A, the position where the Lorentz force is generated on one of the two sides of the coil 140a facing along the Y-axis direction and the coil facing along the Y-axis direction. The position where the Lorentz force is generated on the other side of the two sides 140a is displaced along the X-axis direction. For this reason, the Lorentz force generated in the coil 140a (particularly, the Lorentz force mainly according to the Y-axis drive control current) is substantially the coil as a rotational force with the axis along the Y-axis direction as the rotation axis. 140a may be affected. For this reason, the coil 140a rotates with the axis along the Y-axis direction as the rotation axis, as in the third embodiment. Similarly, as illustrated in FIG. 12A, the position where the Lorentz force is generated on one of the two sides of the coil 140 b facing along the Y-axis direction is opposed along the Y-axis direction. The position where the Lorentz force is generated on the other side of the two sides of the coil 140b is shifted along the X-axis direction. For this reason, the Lorentz force generated in the coil 140b (particularly, the Lorentz force mainly according to the Y-axis drive control current) is substantially the coil as a rotational force having the axis along the Y-axis direction as the rotation axis. 140b may be affected. For this reason, the coil 140b rotates with the axis along the Y-axis direction as the rotation axis, as in the second embodiment. As a result, the second base 110-2 undergoes deformation vibration along the X-axis direction, as in the third embodiment. As a result, the mirror 130 rotates about the axis along the Y-axis direction as a rotation axis.

As described above, the MEMS scanner 104 of the fourth embodiment can suitably enjoy various effects that the MEMS scanner 103 of the third embodiment enjoys. In addition, the MEMS scanner 104 according to the fourth embodiment does not need to include the magnets 151a and 152a and the magnets 161a and 162b as compared with the MEMS scanner 102 according to the second embodiment. For this reason, further downsizing of the MEMS scanner 103 is realized.

(5) Fifth Embodiment Next, a fifth embodiment of the MEMS scanner will be described with reference to FIGS. In addition, about the structure same as the MEMS scanner 102 of the above-mentioned 2nd Example, the detailed description is abbreviate | omitted by attaching | subjecting the same referential mark.

(5-1) Basic Configuration First, the basic configuration of the MEMS scanner 105 according to the fifth embodiment will be described with reference to FIG. FIG. 13 is a plan view conceptually showing the basic structure of the MEMS scanner 105 according to the fourth example.

As shown in FIG. 13, the MEMS scanner 105 of the fifth embodiment is different from the MEMS scanner 102 of the second embodiment in that the arrangement positions of the coil 140a and the coil 140b are changed, and the magnet 151a and the magnet It differs in that it does not include 152a, magnet 151b and magnet 152b. The other components of the MEMS scanner 105 of the fifth embodiment may be the same as the other components of the MEMS scanner 102 of the second embodiment.

In the fifth embodiment, the coil 140a includes a rotation axis of the coil 140a (specifically, a rotation axis along the X-axis direction) and a rotation axis of the second base 110-2 (specifically, in the X-axis direction). Along the Y axis direction (in other words, offset by a predetermined amount a). In other words, the coil 140a matches the rotation center of the coil 140a that coincides with the rotation axis of the coil 140a along the X-axis direction and the second base 110- coincides with the rotation axis of the second base 110-2 along the X-axis direction. The two rotation centers are arranged so as to be shifted by a predetermined amount a along the Y-axis direction. In other words, the coil 140a includes the center of the coil 140a where the Lorentz force is generated (the center of the rotational force), the center of gravity of the rotating body including the coil 140a and the second base 110-2, and the first that supports the rotating body. At least two of the centers (support centers) of the torsion bars 120a-1 and 120b-1 are arranged so as to be shifted by a predetermined amount a along the Y-axis direction.

Similarly, the coil 140b includes a rotation axis of the coil 140b (specifically, a rotation axis along the X-axis direction) and a rotation axis of the second base 110-2 (specifically, rotation along the X-axis direction). (Axis) is shifted along the Y-axis direction (in other words, offset by a predetermined amount b (where a ≠ b)). In other words, the coil 140b matches the rotation center of the coil 140b that coincides with the rotation axis of the coil 140b along the X-axis direction and the second base 110- that coincides with the rotation axis of the second base 110-2 along the X-axis direction. The rotation center of 2 is arranged so as to be shifted by a predetermined amount b along the Y-axis direction. In other words, the coil 140b includes the center of the coil 140b where the Lorentz force is generated (the center of the rotational force), the center of gravity of the rotating body including the coil 140b and the second base 110-2, and the first supporting the rotating body. At least two of the centers (support centers) of the torsion bars 120a-1 and 120b-1 are arranged so as to be shifted by a predetermined amount b along the Y-axis direction.

(5-2) Operation of MEMS Scanner Next, with reference to FIG. 14, an operation mode (specifically, an operation mode of rotating the mirror 130) of the MEMS scanner 105 according to the fifth embodiment will be described. . FIG. 14 is a plan view conceptually showing an operation mode of the MEMS scanner 105 according to the fifth embodiment.

During the operation of the MEMS scanner 105 according to the fifth embodiment, similarly to the operation of the MEMS scanner 102 according to the second embodiment, the control currents (ie, the X-axis drive control current and the Y-axis) are applied to the coils 140a and 140b, respectively. A control current superimposed with a drive control current).

On the other hand, a magnetic field is applied to the coil 140a from the magnets 161a and 162a. In the fourth embodiment, the magnetic field applied from the magnets 161a and 162a is not only used for rotating the mirror 130 about the axis along the Y-axis direction but also the axis along the X-axis direction. Is also used to rotate the second base 110-2 about the rotation axis.

Similarly, a magnetic field is applied to the coil 140b from the magnets 161b and 162b. In the fourth embodiment, the magnetic field applied from the magnets 161b and 162b is not only used to rotate the mirror 130 about the axis along the Y-axis direction but also the axis along the X-axis direction. Is also used to rotate the second base 110-2 about the rotation axis.

Magnets 161a and 162a apply a magnetic field to two sides of coil 140a facing each other along the Y-axis direction. On the other hand, the magnets 161a and 162a preferably do not apply a magnetic field to the two sides of the coil 140a facing each other along the X-axis direction. However, the magnets 161a and 162a apply only the leakage flux of the magnetic field to be applied to the two sides of the coil 140a facing in the Y-axis direction to the two sides of the coil 140a facing in the X-axis direction. May be. That is, it is preferable that the magnets 161a and 162a do not actively apply a magnetic field to the two sides of the coil 140a facing each other along the X-axis direction. However, the magnets 161a and 162a may positively apply a magnetic field to the two sides of the coil 140a facing each other along the X-axis direction.

Similarly, the magnets 161b and 162b apply a magnetic field to two sides of the coil 140b facing each other along the Y-axis direction. On the other hand, the magnets 161b and 162b preferably do not apply a magnetic field to the two sides of the coil 140b facing each other along the X-axis direction. However, the magnets 161b and 162b give only the leakage flux of the magnetic field to be applied to the two sides of the coil 140b facing in the Y-axis direction to the two sides of the coil 140b facing in the X-axis direction. May be. That is, it is preferable that the magnets 161b and 162b do not positively apply a magnetic field to the two sides of the coil 140b facing each other along the X-axis direction. However, the magnets 161b and 162b may positively apply a magnetic field to two sides of the coil 140b facing each other along the X-axis direction.

Here, as shown in FIG. 14, a control current flowing in the clockwise direction in FIG. 14 is supplied to each of the coils 140a and 140b, and a magnetic field from the magnet 161a toward the magnet 162a is applied to the coil 140a. A situation in which a magnetic field from the magnet 161b toward the magnet 162b is applied to the coil 140b will be described.

In this case, as shown in FIG. 14, one side (for example, the upper side in FIG. 14) of the two sides of the coil 140 a facing along the Y-axis direction is formed from the back side of the page of FIG. 14. Lorentz force toward the front side of the page is generated. Similarly, as shown in FIG. 14, the other side (for example, the lower side of FIG. 14) of the two sides of the coil 140 a facing along the Y-axis direction is on the front side of the sheet of FIG. 14. Lorentz force is generated toward the back side of the page. Even when the direction (that is, polarity) of the control current supplied to the coil 140a is reversed, the same Lorentz force (however, the direction is reversed) is generated.

Similarly, as shown in FIG. 14, one side (for example, the upper side in FIG. 14) of the two sides of the coil 140 b facing in the Y-axis direction is formed from the back side of the drawing in FIG. 14. Lorentz force toward the front side of the page is generated. Similarly, as shown in FIG. 14, the other side (for example, the lower side of FIG. 14) of the two sides of the coil 140 b facing in the Y-axis direction is on the front side of the sheet of FIG. 14. Lorentz force is generated toward the back side of the page. Even when the direction (that is, polarity) of the control current supplied to the coil 140b is reversed, the same Lorentz force (however, the direction is reversed) is generated.

As a result, the Lorentz force generated in the coil 140a (particularly, mainly the Lorentz force according to the X-axis drive control current) acts on the coil 140a as a rotational moment about the axis along the X-axis direction. become. For this reason, the coil 140a rotates about the axis along the X-axis direction as a rotation axis. Similarly, the Lorentz force (particularly, the Lorentz force according to the X-axis drive control current) generated in the coil 140b acts on the coil 140b as an inertia moment with the axis along the X-axis direction as the rotation axis. become. For this reason, the coil 140b rotates using the axis along the X-axis direction as a rotation axis. As a result, similarly to the second embodiment, the second base 110-2 also rotates about the axis along the X-axis direction as the rotation axis.

In addition, in the fifth embodiment, as described above, the rotational axis of the coil 140a along the X-axis direction and the rotational axis of the second base 110-2 along the X-axis direction are displaced along the Y-axis direction. In addition, the rotation axis of the coil 140b along the X-axis direction and the rotation axis of the second base 110-2 along the X-axis direction are shifted along the Y-axis direction. Due to such imbalance caused by the rotational axis deviation, the respective rotations of the coils 140a and 140b having the axis along the X-axis direction as the rotation axis propagate to the second base 110-2 as vibration. become. Due to this vibration, the second base 110-2 is deformed and oscillated along the X-axis direction as in the second embodiment. As a result, the mirror 130 rotates about the axis along the Y-axis direction as a rotation axis.

As described above, the MEMS scanner 105 of the fifth embodiment can suitably enjoy various effects that the MEMS scanner 102 of the second embodiment enjoys. In addition, the MEMS scanner 105 of the fifth embodiment does not have to include the magnets 151a and 152a and the magnets 151b and 152b, as compared with the MEMS scanner 102 of the second embodiment. For this reason, further downsizing of the MEMS scanner 103 is realized.

(6) Sixth Example Next, with reference to FIGS. 15 and 16, a sixth example of the MEMS scanner will be described. In addition, about the structure same as the MEMS scanner 102 of the above-mentioned 2nd Example, the detailed description is abbreviate | omitted by attaching | subjecting the same referential mark.

(6-1) Basic Configuration First, the basic configuration of the MEMS scanner 106 according to the sixth embodiment will be described with reference to FIG. FIG. 15 is a plan view conceptually showing the basic structure of the MEMS scanner 106 according to the sixth example.

As shown in FIG. 15, the MEMS scanner 106 of the sixth embodiment is different from the MEMS scanner 102 of the second embodiment in that it does not include the magnet 151a and the magnet 152a, and the magnet 151b and the magnet 152b. Yes. Other configurations of the MEMS scanner 106 of the sixth embodiment may be the same as other configurations of the MEMS scanner 102 of the second embodiment.

(6-2) Operation of MEMS Scanner Next, with reference to FIG. 16, an operation mode of the MEMS scanner 106 according to the sixth embodiment (specifically, an operation mode of rotating the mirror 130) will be described. . FIG. 16 is a plan view conceptually showing an operation mode of the MEMS scanner 106 according to the sixth embodiment.

During the operation of the MEMS scanner 106 according to the sixth embodiment, similarly to the operation of the MEMS scanner 102 according to the second embodiment, the control currents (that is, the X-axis drive control current and the Y-axis) are applied to the coils 140a and 140b, respectively. A control current superimposed with a drive control current).

On the other hand, a magnetic field is applied to the coil 140a from the magnets 161a and 162a. In the sixth embodiment, the magnetic field applied from the magnets 161a and 162a is not only used for rotating the mirror 130 about the axis along the Y-axis direction but also the axis along the X-axis direction. Is also used to rotate the second base 110-2 about the rotation axis.

Similarly, a magnetic field is applied to the coil 140b from the magnets 161b and 162b. In the sixth embodiment, the magnetic field applied from the magnets 161b and 162a is not only used for rotating the mirror 130 about the axis along the Y-axis direction but also the axis along the X-axis direction. Is also used to rotate the second base 110-2 about the rotation axis.

Magnets 161a and 162a apply a magnetic field to two sides of coil 140a facing each other along the Y-axis direction. On the other hand, the magnets 161a and 162a preferably do not apply a magnetic field to the two sides of the coil 140a facing each other along the X-axis direction. However, the magnets 161a and 162a apply only the leakage flux of the magnetic field to be applied to the two sides of the coil 140a facing in the Y-axis direction to the two sides of the coil 140a facing in the X-axis direction. May be. That is, it is preferable that the magnets 161a and 162a do not actively apply a magnetic field to the two sides of the coil 140a facing each other along the X-axis direction.

Similarly, the magnets 161b and 162b apply a magnetic field to two sides of the coil 140b facing each other along the Y-axis direction. On the other hand, the magnets 161b and 162b preferably do not apply a magnetic field to the two sides of the coil 140b facing each other along the X-axis direction. However, the magnets 161b and 162b give only the leakage flux of the magnetic field to be applied to the two sides of the coil 140b facing in the Y-axis direction to the two sides of the coil 140b facing in the X-axis direction. May be. That is, it is preferable that the magnets 161b and 162b do not positively apply a magnetic field to the two sides of the coil 140b facing each other along the X-axis direction.

Here, as shown in FIG. 16, a control current flowing in the clockwise direction in FIG. 16 is supplied to each of the coils 140a and 140b, and a magnetic field from the magnet 161a toward the magnet 162a is applied to the coil 140a. A situation in which a magnetic field from the magnet 161b toward the magnet 162b is applied to the coil 140b will be described.

In this case, as shown in FIG. 16, one side (for example, the upper side in FIG. 16) of the two sides of the coil 140 a facing along the Y-axis direction is formed from the back side in the drawing of FIG. 16. Lorentz force toward the front side of the page is generated. Similarly, as shown in FIG. 16, the other side (for example, the lower side of FIG. 16) of the two sides of the coil 140a facing in the Y-axis direction is on the front side of the sheet of FIG. Lorentz force is generated toward the back side of the page. Even when the direction (that is, polarity) of the control current supplied to the coil 140a is reversed, the same Lorentz force (however, the direction is reversed) is generated.

Similarly, as shown in FIG. 16, one of the two sides of the coil 140 b facing in the Y-axis direction (for example, the upper side in FIG. 16) is inserted from the back side of the drawing in FIG. 16. Lorentz force toward the front side of the page is generated. Similarly, as shown in FIG. 16, the other side (for example, the lower side of FIG. 16) of the two sides of the coil 140b facing each other along the Y-axis direction is on the front side of the sheet of FIG. Lorentz force is generated toward the back side of the page. Even when the direction (that is, polarity) of the control current supplied to the coil 140b is reversed, the same Lorentz force (however, the direction is reversed) is generated.

As a result, the Lorentz force generated in the coil 140a (particularly, mainly the Lorentz force according to the X-axis drive control current) acts on the coil 140a as a rotational moment about the axis along the X-axis direction. become. For this reason, the coil 140a rotates about the axis along the X-axis direction as a rotation axis. Similarly, the Lorentz force generated in the coil 140b (particularly, mainly the Lorentz force according to the X-axis drive control current) acts on the coil 140b as a rotational moment about the axis along the X-axis direction. become. For this reason, the coil 140b rotates using the axis along the X-axis direction as a rotation axis. As a result, similarly to the second embodiment, the second base 110-2 also rotates about the axis along the X-axis direction as the rotation axis.

In addition, when the control current supplied to the coil 140a and the coil 140b includes the Y-axis drive control current, the two sides of the coil 140a facing each other along the X-axis direction and the X-axis direction are used. It was confirmed by experiments conducted by the present inventors that the following phenomenon occurs even when a magnetic field is not applied to the two sides of the opposing coil 140b. Specifically, when the control current supplied to the coil 140a includes the Y-axis drive control current, a magnetic field is not applied to the two sides of the coil 140a facing each other along the X-axis direction. Even so, a Lorentz force corresponding to the Y-axis drive control current is generated on one of the two sides of the coil 140a facing in the Y-axis direction (for example, the upper side in FIG. 16). To do. Similarly, when the control current supplied to the coil 140b includes the Y-axis drive control current, the magnetic field is not applied to the two sides of the coil 140b facing each other along the X-axis direction. However, a Lorentz force corresponding to the Y-axis drive control current is generated on one side (for example, the upper side in FIG. 16) of the two sides of the coil 140b facing each other along the Y-axis direction. Due to the Lorentz force corresponding to the Y-axis drive control current, slight vibrations are generated in the coils 140a and 140b (or the second base 110-2 on which the coils 140a and 140b are arranged). As a result, the second base 110-2 is deformed and oscillated along the direction of the X-axis as in the second embodiment. As a result, the mirror 130 rotates about the axis along the Y-axis direction as a rotation axis.

In addition, even when a magnetic field is not actively applied to the two sides of the coil 140a facing along the X-axis direction, the two sides of the coil 140a facing along the X-axis direction are A magnetic leakage flux that is positively applied to the two sides of the coil 140a facing each other along the Y-axis direction may be applied. As a result, a slight Lorentz force corresponding to the Y-axis drive control current is generated on the two sides of the coil 140a facing each other along the X-axis direction. Similarly, even when a magnetic field is not actively applied to the two sides of the coil 140b facing along the X-axis direction, the two sides of the coil 140b facing along the X-axis direction are A leakage flux of a magnetic field that is positively applied to two sides of the coil 140b facing each other along the Y-axis direction may be applied. As a result, a slight Lorentz force corresponding to the Y-axis drive control current is generated on the two sides of the coil 140b facing each other along the X-axis direction. As a result, the second base 110-2 is deformed and oscillated along the direction of the X-axis as in the second embodiment. As a result, the mirror 130 rotates about the axis along the Y-axis direction as a rotation axis.

According to an experiment conducted by the inventors of the present application, a magnetic field is positively applied to two sides of the coil 140a facing along the X-axis direction, and 2 of the coil 140b facing along the X-axis direction. The gain of rotation of the mirror 130 when a magnetic field was actively applied to one side was 60 dB. On the other hand, a magnetic field is not positively applied to the two sides of the coil 140a facing along the X-axis direction, and a magnetic field is positively applied to the two sides of the coil 140b facing along the X-axis direction. The gain of the rotation of the mirror 130 when it was not done was 54 dB. That is, a magnetic field is positively applied to two sides of the coil 140a facing along the X-axis direction, and a magnetic field is positively applied to two sides of the coil 140b facing along the X-axis direction. Compared with the MEMS scanner, the magnetic field is not positively applied to the two sides of the coil 140a facing along the X-axis direction, and the magnetic field is set on the two sides of the coil 140b facing along the X-axis direction. In a MEMS scanner to which is not positively applied, the rotation gain of the mirror 130 is reduced by about 6 dB. However, according to experiments conducted by the inventors of the present application, a gain reduction of about 6 dB does not correspond to a reduction that greatly affects the operation of the MEMS scanner.

As described above, the MEMS scanner 106 of the sixth embodiment can suitably enjoy various effects that the MEMS scanner 102 of the second embodiment enjoys. In addition, the MEMS scanner 106 of the sixth embodiment does not need to include the magnets 151a and 152a and the magnets 151b and 152b as compared with the MEMS scanner 102 of the second embodiment. For this reason, further downsizing of the MEMS scanner 103 is realized.

(7) Seventh Embodiment Next, a seventh embodiment of the MEMS scanner will be described with reference to FIG. FIG. 17 is a plan view conceptually showing the basic structure of the MEMS scanner 107 according to the seventh example.

As shown in FIG. 17, the MEMS scanner 107 of the seventh embodiment differs from the MEMS scanner 102 of the second embodiment in that the coil 140a and the coil 140b are composed of the same winding. Yes. That is, in the seventh embodiment, the coil 140a formed along the second base portion 110-2 and the coil 140a and the coil portion 140b are formed from the same winding. Other configurations of the MEMS scanner 107 of the seventh embodiment may be the same as other configurations of the MEMS scanner 102 of the second embodiment.

In the seventh embodiment, the mirror 130 is positioned inside the winding of the coil 140c. That is, in the seventh embodiment, the mirror 130 is positioned outside the winding of two coils (that is, the coil 140a and the coil 140b) of the plurality of coils (that is, the coil 140a, the coil 140b, and the coil 140c). Thus, the mirror 130 is positioned inside the winding of the remaining one of the plurality of coils (that is, the coil 140c). That is, in the seventh embodiment, the mirror 130 does not have to be positioned outside all the windings of the plurality of coils included in the MEMS scanner 107.

Even in the MEMS scanner 107 of the seventh embodiment, the mirror 130 is positioned at least outside the windings of the coils 140a and 140b. For this reason, the MEMS scanner 107 according to the seventh embodiment can preferably enjoy various effects that the MEMS scanner 102 according to the second embodiment enjoys.

Note that the MEMS scanner 107 may include four or more coils. Also in this case, while the mirror 130 is located outside the winding of some of the four or more coils, the inside of the winding of some other coils of the four or more coils. The mirror 130 may be located in the center.

(8) Eighth Example Next, with reference to FIG. 18, an eighth example of the MEMS scanner will be described. FIG. 18 is a plan view conceptually showing the basic structure of the MEMS scanner 108 in the eighth example.

As shown in FIG. 18, the MEMS scanner 108 according to the eighth embodiment is different from the MEMS scanner 107 according to the seventh embodiment in that the winding method of the coil 140a, the coil 140b, and the coil 130c is different. That is, in the eighth embodiment, an opening is present in part from the same winding (for example, an opening exists on the right side of the coil 140a in FIG. 18) and an opening is present in a part. There are formed an open loop-shaped coil part 140b (for example, an opening exists on the left side of the coil 140b in FIG. 18) and a coil 140c formed on the second base part 110-2. Other configurations of the MEMS scanner 108 of the eighth embodiment may be the same as other configurations of the MEMS scanner 107 of the seventh embodiment.

Also in the eighth embodiment, the coil 140a, the coil 140, and the coil 140c can be distinguished from each other by their shapes, arrangement positions, and the like. That is, the MEMS scanner 108 according to the eighth embodiment includes three coils (that is, the coil 140a, the coil 140, and the coil 140c), similarly to the MEMS scanner 107 according to the seventh embodiment. In addition, also in the eighth embodiment, the mirror 130 is located inside the winding of the coil 140c. That is, in the seventh embodiment, the mirror 130 is positioned outside the winding of two coils (that is, the coil 140a and the coil 140b) of the plurality of coils (that is, the coil 140a, the coil 140b, and the coil 140c). Thus, the mirror 130 is positioned inside the winding of the remaining one of the plurality of coils (that is, the coil 140c). That is, also in the eighth embodiment, the mirror 130 does not have to be positioned outside all the windings of the plurality of coils included in the MEMS scanner 108.

Even in the MEMS scanner 108 of the eighth embodiment, the mirror 130 is positioned at least outside the windings of the coils 140a and 140b. For this reason, the MEMS scanner 108 according to the eighth embodiment can preferably enjoy various effects that the MEMS scanner 102 according to the second embodiment enjoys.

Note that the MEMS scanner 107 may include four or more coils. Also in this case, while the mirror 130 is located outside the winding of some of the four or more coils, the inside of the winding of some other coils of the four or more coils. The mirror 130 may be located in the center.

In addition, you may combine suitably a part of each structure demonstrated in 1st Example-8th Example. Even in this case, the actuator obtained by appropriately combining a part of the configurations described in the first to eighth embodiments can suitably enjoy the various effects described above.

Further, the present invention can be appropriately changed without departing from the gist or concept of the present invention that can be read from the claims and the entire specification, and a drive device that includes such a change is also included in the technical concept of the present invention. It is.

101 to 106 MEMS scanner 110 base 110-1 first base 110-2 second base 120a, 120b torsion bar 120a-1, 120b-1 first torsion bar 120a-2, 120b-2 second torsion bar 130 mirror 140a, 140b Coil 141a, 141b Power supply terminal 151a, 151b, 152a, 152b Magnet 161a, 161b, 162a, 162b Magnet 170a, 170b Magnetic yoke

Claims (14)

1. A first base portion;
   A second base portion supported by the first base portion;
   A first elastic part having elasticity that connects the first base part and the second base part and rotates the second base part around an axis along another direction;
   A rotatable driven part; and
   A second elastic part that connects the second base part and the driven part and has elasticity such that the driven part rotates about an axis along a direction different from the other direction as a rotation axis. When,
   A first coil portion disposed on the second base portion, and the driven portion is disposed outside a winding of the first coil portion; and
   A second coil portion disposed on the base portion so as to sandwich the driven portion between the first coil portion and the driven portion outside the winding of the second coil portion. A second coil portion to be disposed;
   A magnetic field application unit that applies a magnetic field to the first coil unit and the second coil unit,
   The first coil unit is disposed such that the center of the first coil unit is located at a position offset along the one direction from the rotation axis of the second base unit. apparatus.
2. 2. The driving apparatus according to claim 1, wherein the magnetic field application unit includes a pair of first magnetic bodies that sandwich the first coil unit along the one direction.
3. The pair of first magnetic bodies applies (i) the magnetic field to two sides of the first coil portion that face each other along the one direction,
   The pair of first magnetic bodies does not apply (ii-1) the magnetic field to two sides of the first coil portion facing in the other direction, or (ii-2) the first coil. The leakage flux of the magnetic field applied to the two sides of the first coil unit that are opposed to each other along the one direction is applied to the two sides that are opposed to each other along the other direction. The drive device according to claim 2, wherein
4. The second coil portion is disposed so that a center of the second coil portion is located at a position offset along the one direction from a rotation axis of the second base portion. Item 2. The driving device according to Item 1.
5. The offset amount of the center of the second coil portion with respect to the rotation axis of the second base portion is different from the offset amount of the center of the first coil portion with respect to the rotation axis of the second base portion. The drive device according to claim 4, wherein the drive device is characterized.
6. The drive unit according to claim 4, wherein the magnetic field application unit includes a pair of second magnetic bodies that sandwich the second coil unit.
7. The pair of second magnetic bodies applies (i) the magnetic field to two sides of the second coil portion that face each other along the one direction,
   The pair of second magnetic bodies does not apply (ii-1) the magnetic field to two sides of the second coil portion that are opposed in the other direction, or (ii-2) the second coil. The leakage flux of the magnetic field that is applied to the two sides of the second coil unit that are opposed to each other along the one direction is applied to the two sides that are opposed to each other along the other direction. The drive device according to claim 4.
8. 2. The driving apparatus according to claim 1, wherein the first coil portion and the second coil portion are disposed at positions symmetrical with respect to the driven portion.
9. The rotation axis along the one direction of each of the first coil part and the second coil part is different from the rotation axis along the one direction of the driven part. The drive device described in 1.
10. Due to the Lorentz force generated in the first coil part due to the electromagnetic interaction between the control current supplied to the first coil part and the magnetic field applied by the magnetic field applying part, the first coil part is The axis along the direction of
    Due to the Lorentz force generated in the second coil part due to the electromagnetic interaction between the control current supplied to the second coil part and the magnetic field applied by the magnetic field applying part, the second coil part is The axis along the direction of
    Due to the rotation of each of the first coil portion and the second coil portion with the axis along the other direction as the rotation axis, the second base portion rotates the axis along the other direction. Rotate as an axis,
    Due to the rotation of each of the first coil portion and the second coil portion with the axis along the other direction as a rotation axis, the second base portion has a standing wave shape along the other direction. Deformation vibration,
    2. The driving device according to claim 1, wherein the driven portion rotates about an axis along the one direction as a rotation axis due to deformation vibration of the second base portion.
11. 11. The driving device according to claim 10, wherein the magnitude of the Lorentz force generated in the first coil portion and the magnitude of the Lorentz force generated in the second coil portion are the same.
12. The rotation direction of the first coil portion having the rotation axis as the axis along the one direction is the same as the rotation direction of the second coil portion having the rotation axis as the axis along the one direction. The drive device according to claim 10, wherein the drive device is characterized.
13. The second base portion is provided at a position corresponding to the rotation axis along the one direction of each of the first coil portion and the second coil portion and the rotation axis along the one direction of the driven portion. A node in the deformation vibration of
    The second base is provided at a location between the rotation axis along the one direction of each of the first coil part and the second coil part and the rotation axis along the one direction of the driven part. The drive device according to claim 10, wherein an antinode in deformation vibration of the portion appears.
14. The first coil portion and the second coil portion each having an axis along the one direction as a rotation axis, and the rotation direction of the driven portion having an axis along the one direction as a rotation axis. The driving apparatus according to claim 10, wherein the driving directions are opposite to each other.

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