WO2013137959A3 - Low temperature resistor for superconductor circuits - Google Patents

Low temperature resistor for superconductor circuits Download PDF

Info

Publication number
WO2013137959A3
WO2013137959A3 PCT/US2012/070066 US2012070066W WO2013137959A3 WO 2013137959 A3 WO2013137959 A3 WO 2013137959A3 US 2012070066 W US2012070066 W US 2012070066W WO 2013137959 A3 WO2013137959 A3 WO 2013137959A3
Authority
WO
WIPO (PCT)
Prior art keywords
low temperature
temperature resistor
circuit
superconductor circuits
resistor
Prior art date
Application number
PCT/US2012/070066
Other languages
French (fr)
Other versions
WO2013137959A2 (en
Inventor
John J. Talvacchio
Erica C. Folk
Sean R. Mclaughlin
David J. Phillips
Original Assignee
Northrop Grumman Systems Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Northrop Grumman Systems Corporation filed Critical Northrop Grumman Systems Corporation
Priority to CA2858087A priority Critical patent/CA2858087C/en
Priority to AU2012373211A priority patent/AU2012373211B2/en
Priority to EP12870932.6A priority patent/EP2795688B1/en
Priority to JP2014549171A priority patent/JP6053821B2/en
Priority to KR1020147020463A priority patent/KR101696526B1/en
Publication of WO2013137959A2 publication Critical patent/WO2013137959A2/en
Publication of WO2013137959A3 publication Critical patent/WO2013137959A3/en

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N69/00—Integrated devices, or assemblies of multiple devices, comprising at least one superconducting element covered by group H10N60/00
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C13/00—Resistors not provided for elsewhere
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
    • H01C7/006—Thin film resistors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices

Abstract

A integrated circuit and methods for fabricating the circuit are provided. The circuit integrates at least one circuit element formed from a material that is superconducting at temperatures less than one hundred milliKelvin and at least one resistor connected to the circuit element. The resistor is formed from an alloy of transition metals that is resistive at temperatures less than one hundred milliKelvin.
PCT/US2012/070066 2011-12-19 2012-12-17 Low temperature resistor for superconductor circuits WO2013137959A2 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
CA2858087A CA2858087C (en) 2011-12-19 2012-12-17 Low temperature resistor for superconductor circuits
AU2012373211A AU2012373211B2 (en) 2011-12-19 2012-12-17 Low temperature resistor for superconductor circuits
EP12870932.6A EP2795688B1 (en) 2011-12-19 2012-12-17 Low temperature resistor for superconductor circuits
JP2014549171A JP6053821B2 (en) 2011-12-19 2012-12-17 Low temperature resistors for superconducting circuits.
KR1020147020463A KR101696526B1 (en) 2011-12-19 2012-12-17 Low temperature resistor for superconductor circuits

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US13/330,270 US8852959B2 (en) 2011-12-19 2011-12-19 Low temperature resistor for superconductor circuits
US13/330,270 2011-12-19

Publications (2)

Publication Number Publication Date
WO2013137959A2 WO2013137959A2 (en) 2013-09-19
WO2013137959A3 true WO2013137959A3 (en) 2013-11-21

Family

ID=48610713

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2012/070066 WO2013137959A2 (en) 2011-12-19 2012-12-17 Low temperature resistor for superconductor circuits

Country Status (7)

Country Link
US (1) US8852959B2 (en)
EP (1) EP2795688B1 (en)
JP (1) JP6053821B2 (en)
KR (1) KR101696526B1 (en)
AU (1) AU2012373211B2 (en)
CA (1) CA2858087C (en)
WO (1) WO2013137959A2 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7615385B2 (en) 2006-09-20 2009-11-10 Hypres, Inc Double-masking technique for increasing fabrication yield in superconducting electronics
US9745941B2 (en) 2014-04-29 2017-08-29 Ford Global Technologies, Llc Tunable starter resistor
US10468406B2 (en) 2014-10-08 2019-11-05 Northrop Grumman Systems Corporation Integrated enhancement mode and depletion mode device structure and method of making the same
CA3127307A1 (en) 2016-09-13 2018-03-22 Google Llc Reducing loss in stacked quantum devices
US10936756B2 (en) 2017-01-20 2021-03-02 Northrop Grumman Systems Corporation Methodology for forming a resistive element in a superconducting structure
US11522118B2 (en) * 2020-01-09 2022-12-06 Northrop Grumman Systems Corporation Superconductor structure with normal metal connection to a resistor and method of making the same

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4563695A (en) * 1983-01-28 1986-01-07 Hitachi, Ltd. Superconducting switching device
US4933318A (en) * 1987-12-16 1990-06-12 U.S. Philips Corporation Plasma etch of masked superconductor film
US5306406A (en) * 1991-08-14 1994-04-26 Instituto Nazionale Difisica Nucleare Method and apparatus for sputtering superconducting thin films of niobium on quarter-wave resonant cavities of copper for accelerating heavy ions
EP0282360B1 (en) * 1987-03-12 1995-11-02 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing components of superconducting ceramic oxide materials
US5687112A (en) * 1996-04-19 1997-11-11 Energy Conversion Devices, Inc. Multibit single cell memory element having tapered contact
US6468642B1 (en) * 1995-10-03 2002-10-22 N.V. Bekaert S.A. Fluorine-doped diamond-like coatings
US20040223380A1 (en) * 2003-03-11 2004-11-11 Tsunehiro Hato Superconducting system, superconducting circuit chip, and high-temperature superconducting junction device with a shunt resistor

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Publication number Priority date Publication date Assignee Title
US3704391A (en) 1970-11-10 1972-11-28 Ite Imperial Corp Cryogenic current limiting switch
US5026682A (en) 1987-04-13 1991-06-25 International Business Machines Corporation Devices using high Tc superconductors
EP0303813B1 (en) 1987-08-18 1994-10-12 International Business Machines Corporation High critical current superconductors
US5055158A (en) 1990-09-25 1991-10-08 International Business Machines Corporation Planarization of Josephson integrated circuit
US6051846A (en) 1993-04-01 2000-04-18 The United States Of America As Represented By The Secretary Of The Navy Monolithic integrated high-Tc superconductor-semiconductor structure
JP2630240B2 (en) * 1993-12-28 1997-07-16 日本電気株式会社 Metal thin film resistors for superconducting integrated circuits
JP3105746B2 (en) * 1994-09-12 2000-11-06 日本電気株式会社 Superconducting integrated circuit manufacturing method and superconducting integrated circuit
JPH09199484A (en) * 1996-01-19 1997-07-31 Nippon Steel Corp Manufacture of semiconductor device
US7816303B2 (en) * 2004-10-01 2010-10-19 American Superconductor Corporation Architecture for high temperature superconductor wire
US7473999B2 (en) * 2005-09-23 2009-01-06 Megica Corporation Semiconductor chip and process for forming the same
US8852378B2 (en) 2008-07-15 2014-10-07 Corporation For National Research Initiatives Tailorable titanium-tungsten alloy material thermally matched to semiconductor substrates and devices
CN109626323B (en) * 2009-02-27 2020-12-01 D-波系统公司 Superconducting integrated circuit

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4563695A (en) * 1983-01-28 1986-01-07 Hitachi, Ltd. Superconducting switching device
EP0282360B1 (en) * 1987-03-12 1995-11-02 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing components of superconducting ceramic oxide materials
US4933318A (en) * 1987-12-16 1990-06-12 U.S. Philips Corporation Plasma etch of masked superconductor film
US5306406A (en) * 1991-08-14 1994-04-26 Instituto Nazionale Difisica Nucleare Method and apparatus for sputtering superconducting thin films of niobium on quarter-wave resonant cavities of copper for accelerating heavy ions
US6468642B1 (en) * 1995-10-03 2002-10-22 N.V. Bekaert S.A. Fluorine-doped diamond-like coatings
US5687112A (en) * 1996-04-19 1997-11-11 Energy Conversion Devices, Inc. Multibit single cell memory element having tapered contact
US20040223380A1 (en) * 2003-03-11 2004-11-11 Tsunehiro Hato Superconducting system, superconducting circuit chip, and high-temperature superconducting junction device with a shunt resistor

Also Published As

Publication number Publication date
EP2795688B1 (en) 2017-06-14
US8852959B2 (en) 2014-10-07
KR20140123498A (en) 2014-10-22
AU2012373211B2 (en) 2015-05-28
EP2795688A4 (en) 2015-09-02
AU2012373211A1 (en) 2014-07-03
US20130157864A1 (en) 2013-06-20
EP2795688A2 (en) 2014-10-29
CA2858087A1 (en) 2013-09-19
KR101696526B1 (en) 2017-01-13
WO2013137959A2 (en) 2013-09-19
CA2858087C (en) 2018-06-19
JP2015506110A (en) 2015-02-26
JP6053821B2 (en) 2016-12-27

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