WO2013102771A1 - Method for scanning along a continuous scanning trajectory with a scanner system - Google Patents

Method for scanning along a continuous scanning trajectory with a scanner system Download PDF

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Publication number
WO2013102771A1
WO2013102771A1 PCT/HU2012/000001 HU2012000001W WO2013102771A1 WO 2013102771 A1 WO2013102771 A1 WO 2013102771A1 HU 2012000001 W HU2012000001 W HU 2012000001W WO 2013102771 A1 WO2013102771 A1 WO 2013102771A1
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Prior art keywords
deflectors
pair
focal spot
scanning
acoustic frequency
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French (fr)
Inventor
Balázs RÓZSA
Gergely Katona
Máté VERESS
Pál MAÁK
Gergely Szalay
Attila KASZÁS
Balász CHIOVINI
Péter MÁTYÁS
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Femtonics Kft
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Femtonics Kft
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Priority to PT12703338T priority Critical patent/PT2800995T/en
Priority to PCT/HU2012/000001 priority patent/WO2013102771A1/en
Priority to US14/368,932 priority patent/US10168598B2/en
Priority to PL12703338T priority patent/PL2800995T3/en
Priority to JP2014550762A priority patent/JP6101286B2/en
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Priority to ES12703338T priority patent/ES2732423T3/en
Priority to EP12703338.9A priority patent/EP2800995B1/en
Priority to CA2861708A priority patent/CA2861708C/en
Priority to CN201280069646.4A priority patent/CN104115061B/en
Publication of WO2013102771A1 publication Critical patent/WO2013102771A1/en
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    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/29Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
    • G02F1/33Acousto-optical deflection devices
    • G02F1/332Acousto-optical deflection devices comprising a plurality of transducers on the same crystal surface, e.g. multi-channel Bragg cell
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/0004Microscopes specially adapted for specific applications
    • G02B21/002Scanning microscopes
    • G02B21/0024Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0036Scanning details, e.g. scanning stages
    • G02B21/004Scanning details, e.g. scanning stages fixed arrays, e.g. switchable aperture arrays
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10Scanning systems
    • G02B26/101Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/29Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
    • G02F1/33Acousto-optical deflection devices
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/29Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
    • G02F1/291Two-dimensional analogue deflection
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2201/00Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
    • G02F2201/16Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 series; tandem

Definitions

  • the present invention relates to a method for scanning along a continuous scanning trajectory with a scanner system comprising a first pair of acousto-optic deflectors for deflecting a focal spot of an electromagnetic beam traversing a consecutive lens system defining an optical axis (z) in an x-z plane, and a second pair of acousto-optic deflectors for deflecting the focal spot in a y-z plane being substantially perpendicular to the x-z plane.
  • Three-dimensional (3D) laser scanning technologies have great importance in performing measurements on biological specimens (including scanning, imaging, detection, excitation, etc.).
  • Moving the focus spot along an arbitrary trajectory can be achieved by deflecting the laser beam to scan different points in a focal plane (x-y plane) and by displacing the objective along its optical axis (axis z) e.g. via a piezo-positioner in order to change the depth of the focal plane.
  • XY scanning is conventionally achieved by deflecting the laser beam within a given focal plane (x-y plane) via mechano-optical deflecting means such as deflecting mirrors mounted on galvanometric scanners.
  • the inertia of the mechanical scanning components presents certain limitations with regard to the achievable scanning speed, since the scanning components need to be physically displaced in order to perform 3D scanning.
  • Kaplan et al. (“Acousto-optic lens with very fast focus scanning", OPTICS LETTERS / Vol. 26, No. 14 / July 15, (2001)) proposed an acousto-optic lens made up of two deflectors with counter propagating acoustic waves locked in phase, to achieve purely focal plane shift along the z axis without lateral moving of the beam.
  • chirped frequency acoustic waves should be generated, i.e. the frequency of the acoustic wave in the acousto-optic medium of the deflectors is continuously changed.
  • Changing the focus of the acousto-optic lens is achieved by changing the sweep rate of the acoustic frequencies through the optical aperture of the acousto-optic devices.
  • the sweep rates have to be changed and acoustic frequency difference between the two deflectors of a pair should be introduced.
  • acoustic frequency difference between the deflectors deflecting in the x-z plane to move along the y axis, acoustic frequency difference between the deflectors of the pair deflecting in the y- z plane should be applied.
  • the amount of the frequency difference in the respective pairs determines the x and y coordinates of the spot.
  • acousto-optic scanners in order to provide 3D scanning.
  • four deflectors are used to achieve true 3D scanning - i.e. focusing the exciting laser beam to points within a diamond like spatial volume as described in US 7,227,127.
  • random access scanning is used, that means that any selected point in the 3D space can be addressed by adding proper control to the acousto-optic deflectors. This mode is called random access multipoint scanning (RAMP).
  • the deflectors should be filled with chirped acoustic waves that change their frequencies linearly with time, with nearly equal frequency sweep rate, but different starting frequency.
  • the slope of the chirps determines focal depth (z level) whereas the difference between the instant frequencies present in the members of the deflector pairs deflecting in the x-z or y- z planes, respectively, gives the lateral distance x and y of the focal spot, relative to the axis.
  • the frequency functions in the members of the pair deflecting e.g. in the x- z plane can be defined as
  • acousto-optic scanners the values a-i x and a2x are kept equal in order to form a stable focus spot in a desired spatial location.
  • the switching time between two different spatial points in RAMP mode is determined by the acoustic velocity, since the new acoustic waves must fill the optical aperture of the deflectors completely.
  • One of the problems associated with the conventional RAMP mode is that it is not possible to conduct measurements during the switching time because the discrete change of the frequency results in the spot spreading out in space, whereby multi-photon excitation does not occur any more. It is an object of the present invention to overcome the problems associated with the prior art. In particular, it is an object of the invention to eliminate the switching time associated with the RAMP mode of acousto-optic deflectors and to provide a new operating mode for moving the focus spot continuously along an arbitrary scanning trajectory (curve).
  • the inventors have realised that if the slopes in the two deflectors in an x- z or y-z pair are not kept equal, but instead varied in time, then it is possible to move the focal spot along trajectories (curves) in 2D and 3D.
  • Fig. 1 is a schematic illustration of the basics of beam deflection via a pair of acousto-optic deflectors.
  • Fig. 2 is a schematic illustration of a prior art scanning system comprising two consecutive pairs of deflectors focusing in the x-z and y-z planes.
  • Fig. 3 is a schematic illustration of another prior art scanning system.
  • Fig. 1 is a schematic illustration of the basics of beam deflection via a pair of acousto-optic deflectors 10 comprising a first deflector 12 and a second deflector 12' having counter propagating acoustic waves 13 and 13' for performing scanning in the x-z plane in a known way.
  • the crystal lattice constants of the crystal making up the deflector 12, 12 * are slightly modified by the acoustic waves propagating there through, whereby the deflector crystals act as thick optical gratings of modifiable grating constant.
  • an incident electromagnetic beam 14 (generally a laser beam) is split by the first deflector 12 into an undeflected zero order beam 16, a first order deflected beam 18 and higher order deflected beams which are neglected in the following discussion as generally only the first order beam 16 is of interest.
  • the first order beam 18' deflected (diffracted) by the second deflector 12' will have the same direction as the incident beam 14 and consequently as the zero order beam 16 deflected by the first deflector 12. Therefore this zero order beam 16 must be separated from the twice diffracted first order beam 18' exiting the second deflector 12'.
  • the deflectors 12, 12' are made up of anisotropic crystals and use anisotropic Bragg diffraction involving slow shear acoustic waves the polarisation of the first order diffracted beam 18 is rotated by 90 degrees compared to the undiffracted zero order beam 16, thus the zero order beam 16 may simply be filtered out via a polarising filter.
  • Fig. 2 illustrates a prior art scanning system 100 comprising two consecutive pairs of deflectors 10 and 20.
  • the first pair 10 (comprises a first and a second deflector 12, 12' provided for focusing in the x-z plane, while the second pair 20 () comprises a third and a fourth deflector 22, 22' being provided for focusing in the y-z plane.
  • Fig. 3 illustrates a prior art scanning system 100 containing a different arrangement of deflectors.
  • the deflectors 12, 12' and 22, 22' are now grouped in two consecutive pairs 110 and 120, a drift compensating unit and a z-focusing unit.
  • Both pairs 110 and 120 contain a deflector 12, 12' operating in the x-z plane and a deflector 22, 22' operating in the y-z plane.
  • the two deflector pairs 110, 120 are linked optically with a telecentric imaging system 60.
  • the scanning system 100 is further imaged to the back aperture of an objective or similar lens system 200 via a second telecentric imaging system 60.
  • the present invention can be applied in any prior art scanner comprising two pairs of acousto-optic deflectors and in particular with any of acousto-optic deflector systems disclosed in WO2010/076579
  • the inventive method is suitable for increasing the speed of acousto-optic scanning in two-photon microscope technology and allows both for scanning in 2D (along segments within a given focal plane, i.e. where the z coordinate is constant), and for scanning in 3D (along an arbitrary 3D trajectory within the sample).
  • the frequency functions in the deflectors 12, 12' of the pair 10 deflecting in the x-z plane can be defined as
  • line scans are made possible in 2D by keeping the z coordinate constant and changing only the x and y coordinates.
  • ai x is not equal to a 2X as in the RAMP operation mode
  • the velocity of the scanning in a given plane can be set by nearly symmetrically increasing the mismatch between the slopes of the deflectors in the deflector pairs 10 and 20 respectively: this means that a 1x -a 2 x, aiy-a 2y is no longer zero.
  • a and a ⁇ and ai y and a ⁇ y can be chosen as:
  • ai y aioy + Aa y and a2 - aio y - Aa y .
  • Ki and K2 are different.
  • M is the magnification of the optical system between the scanner 100 and the objective 200 and f 0 bj is the effective focal length of the objective, or of any lens system used as an objective 200. The same is valid for the y-z plane:
  • the sweep slope mismatch is optimized for minimum astigmatism in any z ⁇ 0 plane, to obtain the best spot size and shape.
  • the minimum astigmatism restriction causes difference in the frequency slopes of the x deflecting and y deflecting deflector pairs: ai x and a2 X as well as ai y and a2 y set for the x-z and y-z planes respectively.
  • the drift compensating unit's 1 10 deflectors 12 and 22 are imaged onto the deflectors 22' and 12' of the scanner unit 120.
  • the z value in the x-z or y-z plane can be determined directly from the slopes in the respective deflectors:
  • M x and M y are the magnifications of the telecentric system linking the scanning system 100 and the objective 200 in the respective planes.
  • the slope differences between the two deflectors 12, 12' and 22, 22' deflecting in the same direction x or y, respectively, are set by the desired spot drift parameters: direction and velocity.
  • the direction can be defined as the angle a of the drift direction with respect the x axis.
  • a given direction a and given velocity v can be set by the slope differences determined as:
  • f20x are chosen as:
  • a further constraint can be set by requiring that the velocity along z be constant with t, meaning that the t dependent terms in the expression of v z must have zero coefficients.

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • Microscoopes, Condenser (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)

Description

Method for scanning along a continuous scanning
trajectory with a scanner system
The present invention relates to a method for scanning along a continuous scanning trajectory with a scanner system comprising a first pair of acousto-optic deflectors for deflecting a focal spot of an electromagnetic beam traversing a consecutive lens system defining an optical axis (z) in an x-z plane, and a second pair of acousto-optic deflectors for deflecting the focal spot in a y-z plane being substantially perpendicular to the x-z plane.
Three-dimensional (3D) laser scanning technologies have great importance in performing measurements on biological specimens (including scanning, imaging, detection, excitation, etc.).
State of the art technologies commonly apply two-photon laser scanning microscopes that use a laser light of lower photon energy of which two photons are needed to excite a fluorophore in a quantum event, resulting in the emission of a fluorescence photon, which is then detected by a detector. The probability of a near simultaneous absorption of two photons is extremely low requiring a high flux of excitation photons, thus two-photon excitation practically only occurs in the focal spot of the laser beam, where the beam intensity overcomes the two-photon threshold. The photon number is increased also by mode-locking the excitation laser causing photons to arrive in high intensity bounces at the sample. Generally a femtosecond pulsed laser is used to provide the required photon flux for the two- photon excitation, while keeping the average laser beam intensity sufficiently low to avoid thermal sample deterioration.
In the case of analysing biological specimens it is generally preferred to move the focus spot of the laser beam instead of moving the specimen, which would be difficult to carry out when using submerge specimen chambers or when electrical recording is performed on the biological specimen with microelectrodes. Moving the focus spot along an arbitrary trajectory can be achieved by deflecting the laser beam to scan different points in a focal plane (x-y plane) and by displacing the objective along its optical axis (axis z) e.g. via a piezo-positioner in order to change the depth of the focal plane. XY scanning is conventionally achieved by deflecting the laser beam within a given focal plane (x-y plane) via mechano-optical deflecting means such as deflecting mirrors mounted on galvanometric scanners.
The inertia of the mechanical scanning components (i.e. the scanning mirrors and the microscope objective) presents certain limitations with regard to the achievable scanning speed, since the scanning components need to be physically displaced in order to perform 3D scanning.
Rapid acousto-optic deflectors (deflector) have been proposed as an alternative to the conventional mechano-optic solutions.
Kaplan et al. ("Acousto-optic lens with very fast focus scanning", OPTICS LETTERS / Vol. 26, No. 14 / July 15, (2001)) proposed an acousto-optic lens made up of two deflectors with counter propagating acoustic waves locked in phase, to achieve purely focal plane shift along the z axis without lateral moving of the beam. In this type of application chirped frequency acoustic waves should be generated, i.e. the frequency of the acoustic wave in the acousto-optic medium of the deflectors is continuously changed. Changing the focus of the acousto-optic lens is achieved by changing the sweep rate of the acoustic frequencies through the optical aperture of the acousto-optic devices. To simultaneously move the beam and change the focal plane the sweep rates have to be changed and acoustic frequency difference between the two deflectors of a pair should be introduced. To move the focal spot along the x axis acoustic frequency difference between the deflectors deflecting in the x-z plane, to move along the y axis, acoustic frequency difference between the deflectors of the pair deflecting in the y- z plane should be applied. The amount of the frequency difference in the respective pairs determines the x and y coordinates of the spot.
The above principle is used in acousto-optic scanners in order to provide 3D scanning. In an acousto-optic scanner four deflectors are used to achieve true 3D scanning - i.e. focusing the exciting laser beam to points within a diamond like spatial volume as described in US 7,227,127. In normal operation, random access scanning is used, that means that any selected point in the 3D space can be addressed by adding proper control to the acousto-optic deflectors. This mode is called random access multipoint scanning (RAMP).
For the RAMP operation in 3D the deflectors should be filled with chirped acoustic waves that change their frequencies linearly with time, with nearly equal frequency sweep rate, but different starting frequency. The slope of the chirps determines focal depth (z level) whereas the difference between the instant frequencies present in the members of the deflector pairs deflecting in the x-z or y- z planes, respectively, gives the lateral distance x and y of the focal spot, relative to the axis.
The frequency functions in the members of the pair deflecting e.g. in the x- z plane can be defined as
fix = flOx + a\x ' t ' fix = flOx + a2x ' t
In the RAMP operation the z level is controlled (kept constant) by keeping the amount of aix and a2X equal (aix=a2x) from which it follows that the x level is determined by:
Figure imgf000004_0001
In prior art acousto-optic scanners the values a-ix and a2x are kept equal in order to form a stable focus spot in a desired spatial location. The switching time between two different spatial points in RAMP mode is determined by the acoustic velocity, since the new acoustic waves must fill the optical aperture of the deflectors completely. If the aperture has a width D across the sound, the time needed to fill the acousto-optic medium with the new acoustic wave of velocity vac is: tsw=D/vac. (In acoustically rotated Te02 deflector configuration this time is 21 ps for an aperture of 15 mm).
One of the problems associated with the conventional RAMP mode is that it is not possible to conduct measurements during the switching time because the discrete change of the frequency results in the spot spreading out in space, whereby multi-photon excitation does not occur any more. It is an object of the present invention to overcome the problems associated with the prior art. In particular, it is an object of the invention to eliminate the switching time associated with the RAMP mode of acousto-optic deflectors and to provide a new operating mode for moving the focus spot continuously along an arbitrary scanning trajectory (curve).
The inventors have realised that if the slopes in the two deflectors in an x- z or y-z pair are not kept equal, but instead varied in time, then it is possible to move the focal spot along trajectories (curves) in 2D and 3D.
The above objects are achieved by the method according to claim 1.
Particularly advantageous embodiments of the inventive method are defined in the attached dependent claims.
With the inventive method it is not necessary to wait until the new frequencies fill the optical aperture, since if the frequency differences change continuously in time, this causes the spot to move along neighbouring points, without the need for "jumping" from one measurement point to another, that would spread out the spot in space. The inventors have recognized and demonstrated theoretically and experimentally that the point spread function PSF of the focal spot is not distorted only by the fact that it is moving. Appropriate control of the acousto-optic devices, on the other hand, can be achieved by suitable electronic driver and controlling software.
Further details of the invention will be apparent from the accompanying figures and exemplary embodiments.
Fig. 1 is a schematic illustration of the basics of beam deflection via a pair of acousto-optic deflectors.
Fig. 2 is a schematic illustration of a prior art scanning system comprising two consecutive pairs of deflectors focusing in the x-z and y-z planes.
Fig. 3 is a schematic illustration of another prior art scanning system.
Fig. 1 is a schematic illustration of the basics of beam deflection via a pair of acousto-optic deflectors 10 comprising a first deflector 12 and a second deflector 12' having counter propagating acoustic waves 13 and 13' for performing scanning in the x-z plane in a known way. The crystal lattice constants of the crystal making up the deflector 12, 12* are slightly modified by the acoustic waves propagating there through, whereby the deflector crystals act as thick optical gratings of modifiable grating constant.
Accordingly, an incident electromagnetic beam 14 (generally a laser beam) is split by the first deflector 12 into an undeflected zero order beam 16, a first order deflected beam 18 and higher order deflected beams which are neglected in the following discussion as generally only the first order beam 16 is of interest. The first order beam 18' deflected (diffracted) by the second deflector 12' will have the same direction as the incident beam 14 and consequently as the zero order beam 16 deflected by the first deflector 12. Therefore this zero order beam 16 must be separated from the twice diffracted first order beam 18' exiting the second deflector 12'. There are two commonly applied technologies for separating the zero order beam 16. If the deflectors 12, 12' are made up of anisotropic crystals and use anisotropic Bragg diffraction involving slow shear acoustic waves the polarisation of the first order diffracted beam 18 is rotated by 90 degrees compared to the undiffracted zero order beam 16, thus the zero order beam 16 may simply be filtered out via a polarising filter. According to the second technology the twice diffracted first order beam 18' and the zero order beam 16 are separated spatially: the spacing d between the two deflectors 12, 12' must be greater than that predicted by the beam aperture D of the first deflector 12 and the first order diffraction angle Θ. In practice the required d spacing is approximately d=10*D. This imposes that the two counter-propagating acoustic beams cannot be realized within the same deflector.
Fig. 2 illustrates a prior art scanning system 100 comprising two consecutive pairs of deflectors 10 and 20. The first pair 10 (comprises a first and a second deflector 12, 12' provided for focusing in the x-z plane, while the second pair 20 () comprises a third and a fourth deflector 22, 22' being provided for focusing in the y-z plane.
Fig. 3 illustrates a prior art scanning system 100 containing a different arrangement of deflectors. The deflectors 12, 12' and 22, 22' are now grouped in two consecutive pairs 110 and 120, a drift compensating unit and a z-focusing unit. Both pairs 110 and 120 contain a deflector 12, 12' operating in the x-z plane and a deflector 22, 22' operating in the y-z plane. The two deflector pairs 110, 120 are linked optically with a telecentric imaging system 60. The scanning system 100 is further imaged to the back aperture of an objective or similar lens system 200 via a second telecentric imaging system 60.
In order to compensate for different types of optical aberrations various scanning systems 100 have been proposed as discussed in detail in WO2010076579.
The present invention can be applied in any prior art scanner comprising two pairs of acousto-optic deflectors and in particular with any of acousto-optic deflector systems disclosed in WO2010/076579 The inventive method is suitable for increasing the speed of acousto-optic scanning in two-photon microscope technology and allows both for scanning in 2D (along segments within a given focal plane, i.e. where the z coordinate is constant), and for scanning in 3D (along an arbitrary 3D trajectory within the sample).
The frequency functions in the deflectors 12, 12' of the pair 10 deflecting in the x-z plane can be defined as
fix = fl x + aix * ' ' fix = flOx + a2x ' '
Similarly the frequency functions for the deflectors 22, 22' of the pair 20 deflecting in the y-z plane is:
fly = flOy + aiy ' t ' fly = flOy + aiy ' ^
2D scanning
In the more simple embodiment line scans are made possible in 2D by keeping the z coordinate constant and changing only the x and y coordinates. In this case it is possible to make use of the slope mismatch between the acoustic frequency sweeps (i.e. aix is not equal to a2X as in the RAMP operation mode) within the consecutive acousto-optic deflectors 12, 12', or 22, 22' deflecting in the x-z or y-z plane. The velocity of the scanning in a given plane can be set by nearly symmetrically increasing the mismatch between the slopes of the deflectors in the deflector pairs 10 and 20 respectively: this means that a1x-a2x, aiy-a2y is no longer zero. If the deflectors 12 and 12* of the first pair 10 are identical, and the deflectors 22 and 22' of the second pair 20 are identical as well the z level of the plane of the deflected focus spot does not change, if the slopes in the two deflectors 12, 12' and 22, 22' of a pair 10 and 20 are shifted symmetrically to maintain: Aax = a1x-a2x = const, and Aay = aiy-a2y = const.
Hence a and a^ and aiy and a∑y can be chosen as:
ajox + Aax and a∑x= aiox - Aax
aiy= aioy + Aay and a2 - aioy - Aay.
If the deflectors 12, 12' and 22, 22' respectively are not identical, then the following equations can be used.
If the frequency sweeps responsible for the deflection in the x-z plane have the slopes aix and a2x, respectively, than the focal spot will move in the measurement plane along the x axis with the velocity: v, = {KAfy - Kx (fyi - f,*/M
where Κ(λ) is the dependence of the deflection angle Θ on the acoustic frequency f in a given deflector: Θ = K( )f, A being the optical wavelength, The first and second deflectors of a pair may be of different configuration and geometry, therefore Ki and K2 are different. M is the magnification of the optical system between the scanner 100 and the objective 200 and f0bj is the effective focal length of the objective, or of any lens system used as an objective 200. The same is valid for the y-z plane:
Figure imgf000008_0001
Thus by setting the two velocities both arbitrary drift directions in a given focal plane can be adjusted.
Simulations have shown that the spot itself does not change its parameters significantly during the drift, the Strehl ratio only decreases with the distance from the optimum point (from the middle of the scanned volume) according to the rule valid for stationary focal spots.
The sweep slope mismatch is optimized for minimum astigmatism in any z≠0 plane, to obtain the best spot size and shape. The minimum astigmatism restriction causes difference in the frequency slopes of the x deflecting and y deflecting deflector pairs: aix and a2X as well as aiy and a2y set for the x-z and y-z planes respectively. We use a quite simple method in the algorithm that determines the frequency sweep slopes, which cause the spot to move in a plane at a predetermined z in the wanted direction with a wanted velocity v. In the scanning system 100 depicted in figure 3, the drift compensating unit's 1 10 deflectors 12 and 22 are imaged onto the deflectors 22' and 12' of the scanner unit 120. The design of the optical system was made for zero astigmatism in the nominal focal plane of the microscope incorporating the scanning system 100, the astigmatism would increase nearly linearly with the Δζ distance from this plane, if the slope values in the x and y deflectors would be equal. These are set however for zero or nearly zero astigmatism for any z = const plane, by experimentally selecting the slopes of each deflector to get the best possible focal spot PSF over the whole scanned volume. The zero astigmatism condition is zx = zy. The z value in the x-z or y-z plane can be determined directly from the slopes in the respective deflectors:
Figure imgf000009_0001
Figure imgf000009_0002
where Mx and My are the magnifications of the telecentric system linking the scanning system 100 and the objective 200 in the respective planes.
The slope differences
Figure imgf000009_0003
between the two deflectors 12, 12' and 22, 22' deflecting in the same direction x or y, respectively, are set by the desired spot drift parameters: direction and velocity. The direction can be defined as the angle a of the drift direction with respect the x axis. A given direction a and given velocity v can be set by the slope differences determined as:
J obj
Figure imgf000009_0004
The z level of the plane does not change, if the slopes in the two deflectors (12, 12' and 22, 22') of a pair (10 and 20) are shifted symmetrically to maintain K2x( )a2x + lx( )alx = const and K2y(x)a2y + K]y ^)aly = const . 3D scanning
When we do not use linear chirps, instead we use nonlinear chirps, and in the same time do not maintain symmetric shift in the slopes of the different deflectors, we can in principle achieve scanning along arbitrary 3D path, given by the function z = f(x,y), x,y,z being the Cartesian coordinates of the sample volume, e.g. with the origin at the point defined by intersection of the optical axis z and the nominal focal plane of the objective. The basic equations for the velocities using the well known aix etc slope values are: ¾ = 2M 0
[Mx (K2xa2x - Klxaix )+ {K2xa2x + K aix )f
K2yKly[a2yaly - iy 2y)
= yf0
[hiy(K2ya2y - Kiyaly )+ [K2ya2y + KXyay )J2
But to have the spot not spread out in space zx=zy and vzx=vzy must always be fulfilled. These give restrictions on the possible values of the slopes and their temporal derivatives, a-w, ¾x etc.:
K2x°2x ~ Klxa
Figure imgf000010_0001
Klx 2x + Klx lx K2ya2y + Kly a\y
and
Figure imgf000010_0002
Figure imgf000010_0003
Example 1
In an exemplary setting aix and a2x are controlled according to the equations: alx = blxt + clx , and a2x = b2xt .
In this case:
^ ix = , 2x = b2x , Furthermore, taking a scanning system 100 wherein the deflectors 12, 12' are identical: K1x=K2x=Kx thus:
Figure imgf000011_0001
Using these values the frequencies in a given deflector pair 10, e.g. x are: f = f + bif + . and fix = fiox + b2f
With these the x coordinate can be determined:
x - hjKxMx ((blx - b2x + clxt + (f10x - f2 ).
The above considerations can be applied for controlling the y direction scanning similarly:
a\y = h\yl + C\y > a nd 0ly = b2yf aild K1y=K2y=Ky
from which the y coordinate can be determined in the same manner:
y = fotjKyMy({bly - b2yY + clyt + (fl0y - f20y )). Using the constraints set for z (zx=zy, and Vzx=vZy) constraints can be found between bix, b2X, biy, b2y, Cix, Ciy, fiox, f20x> fioy. f20y-
In order to render the equations more simple fiox, f20x are chosen as:
Figure imgf000011_0002
In this case the above constraints result in: d = ^Z - + ^ dx .
y fobjMyKy My
A further constraint can be set by requiring that the velocity along z be constant with t, meaning that the t dependent terms in the expression of vz must have zero coefficients.
This puts the constraint to the b coefficients:
Figure imgf000011_0003
Applying this to the formula of x (and y symmetrically), we get: x = MxK ohj -t1 + c, + d] and the velocity along x accordingly:
Figure imgf000012_0001
the expression of z:
Figure imgf000012_0002
To avoid t dependence of vx (and t2 dependence of x) bix can set as bix=0. This immediately implies b2x=0 that would result in vzx=0, unless the magnification between the cells and the objective in the x-z plane is 1 : Mx=1.
If bix=0 and Mx=1 simultaneously, very simple formulas arise for the coordinates, since only the slope of the frequency in the second deflectors x 12' and y 22' must vary with time. For this both magnifications Mx=My=1 should be constrained. This can be nearly satisfied with a setup involving long focal length (compared to the distances between the x and y deflectors 12, 12', 22, 22' and the deflector sizes I) lenses, or exactly satisfied with specially designed cylinder astigmatic lenses. In this simple case the coordinates are:
* = K obj (< +
Figure imgf000012_0003
y
Figure imgf000012_0004
and the velocities: vx = clx , Jlx
v = c, V, obj
2c
But from the z constraints + dx
Figure imgf000012_0005
When wishing to scan along an arbitrary continuous trajectory the above equations allow to set c1x, c-iy and dy-dx so as to determine the desired x, y coordinates, whereas the z coordinate can be set accordingly by setting b2X, and b2y, using Cix and Ciy determined from x and y. The above-described embodiments are intended only as illustrating examples and are not to be considered as limiting the invention. Various modifications will be apparent to a person skilled in the art without departing from the scope of protection determined by the attached claims.

Claims

1. Method for scanning along a continuous scanning trajectory with a scanner system (100) comprising a first pair of acousto-optic deflectors (10) for deflecting a focal spot of an electromagnetic beam generated by a consecutive lens system (200) defining an optical axis (z) in an x-z plane, and a second pair of acousto-optic deflectors (20) for deflecting the focal spot in a y-z plane being substantially perpendicular to the x-z plane, characterised by changing the acoustic frequency sweeps with time continuously in the deflectors (12, 12') of the first pair of deflectors (10) and in the deflectors (22, 22') of the second pair of deflectors (20) so as to cause the focal spot to move continuously along the scanning trajectory.
2. The method according to claim 1 , characterised by changing the acoustic frequency sweeps by:
- setting a slope mismatch between the acoustic frequency sweeps of the deflectors (12, 12') of the first pair of deflectors (10) in order to cause the focal spot to move along the x axis with a first velocity (vx), and
- setting a slope mismatch between the acoustic frequency sweeps of the deflectors (22, 22') of the second pair of deflectors (20) in order to cause the focal spot to move along the y axis with a second velocity (vy) having regard to the first velocity (vx) so as to move the focal spot continuously along the scanning trajectory.
3. The method according to claim 2, characterised by changing the acoustic frequency sweeps with time non-linearly and asymmetrically within the deflectors (12, 12' and 22, 22') of the first and second deflector pairs (10 and 20) respectively in order to cause the focal spot to move along the z axis with a third velocity (vz) having regard to the first and second velocity (vx and vy) so as to move the focal spot continuously along the scanning trajectory.
4. The method according to claim 3, characterised by:
- changing the acoustic frequency sweeps in the deflectors (12, 12') of the first pair of deflectors (10) according to the function: f = fi0x + blxt2 + clxt , and
Figure imgf000015_0001
- changing the acoustic frequency sweeps in the deflectors (22, 22') of the second pair of deflectors (20) according to the function: fly = fWy + blyt2 + clyt , and
Figure imgf000015_0002
- determining constants bix, b2x, biy, D2y, Cix, C2X, Ciy, C2y, f-iox, f20x, fioy, hoy such that the two deflector pairs (10, 20) produce the same z coordinates (z=zx=zy) and the same third velocities (vz=vzx=vzy) for the focal spot.
5. The method according to claim 2, characterised by:
- changing the acoustic frequency sweeps in the deflectors (12, 12') of the first pair of deflectors (10) according to the function: f = fWx + a t , and flx = fmx + a2xt and
- changing the acoustic frequency sweeps in the deflectors (22, 22') of the second pair of deflectors (20) according to the function: fly = fi0y + alyt , and
Figure imgf000015_0003
- determining constants aix, a2x such that the two deflector pairs (10, 20) produce the same constant z coordinates (zx=zy=const) for the focal spot.
6. The method according to claim 5, characterised by setting the slope mismatch such that the slopes in the two deflectors (12, 12' and 22, 22') of a pair (10 and 20) are shifted symmetrically to maintain Κ(λ)α + Κ(λ)α = const and K2y{ )a2y + Kly(X)aly = const wherein Κ(λ), Κ(λ), K1y(A), K2y(A) is the dependence of the deflection angle Θ on the acoustic frequency f in a given deflector (12, 12', 22, 22') respectively.
PCT/HU2012/000001 2012-01-05 2012-01-05 Method for scanning along a continuous scanning trajectory with a scanner system Ceased WO2013102771A1 (en)

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