WO2013054077A3 - Optical sensor - Google Patents

Optical sensor Download PDF

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Publication number
WO2013054077A3
WO2013054077A3 PCT/GB2012/000780 GB2012000780W WO2013054077A3 WO 2013054077 A3 WO2013054077 A3 WO 2013054077A3 GB 2012000780 W GB2012000780 W GB 2012000780W WO 2013054077 A3 WO2013054077 A3 WO 2013054077A3
Authority
WO
Grant status
Application
Patent type
Prior art keywords
optical sensor
waveguide structure
sensing
substrate
sensing waveguide
Prior art date
Application number
PCT/GB2012/000780
Other languages
French (fr)
Other versions
WO2013054077A2 (en )
Inventor
Arnold Peter Roscoe Harpin
Stephen James Fasham
Original Assignee
Oxsensis Limited
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infra-red, visible, or ultra-violet light
    • G01D5/32Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infra-red, visible, or ultra-violet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infra-red, visible, or ultra-violet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/353Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infra-red, visible, or ultra-violet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre
    • G01D5/35306Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infra-red, visible, or ultra-violet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement
    • G01D5/35309Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infra-red, visible, or ultra-violet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement using multiple waves interferometer
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infra-red, visible, or ultra-violet light
    • G01D5/266Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infra-red, visible, or ultra-violet light by interferometric means
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01KMEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K1/00Details of thermometers not specially adapted for particular types of thermometer
    • G01K1/16Special arrangements for conducting heat from the object to the sensitive element
    • G01K1/18Special arrangements for conducting heat from the object to the sensitive element for reducing thermal inertia
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01KMEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K11/00Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00
    • G01K11/32Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using changes in transmission, scattering or fluorescence in optical fibres
    • G01K11/3206Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using changes in transmission, scattering or fluorescence in optical fibres at discrete locations in the fibre, e.g. by means of Bragg gratings
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B6/00Light guides
    • G02B6/02Optical fibre with cladding with or without a coating
    • G02B6/02057Optical fibre with cladding with or without a coating comprising gratings
    • G02B6/02076Refractive index modulation gratings, e.g. Bragg gratings
    • G02B6/02195Refractive index modulation gratings, e.g. Bragg gratings characterised by means for tuning the grating
    • G02B6/02204Refractive index modulation gratings, e.g. Bragg gratings characterised by means for tuning the grating using thermal effects, e.g. heating or cooling of a temperature sensitive mounting body
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B6/00Light guides
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/28Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/293Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
    • G02B6/29346Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by wave or beam interference
    • G02B6/29358Multiple beam interferometer external to a light guide, e.g. Fabry-Pérot, etalon, VIPA plate, OTDL plate, continuous interferometer, parallel plate resonator
    • G02B6/29359Cavity formed by light guide ends, e.g. fibre Fabry Pérot [FFP]

Abstract

An optical sensor is disclosed in which an aperture is provided in a substrate under at least part of a sensing waveguide structure, so as to reduce thermal coupling between the substrate and the sensing waveguide structure. The optical sensor may be used for sensing temperature of an adjacent gas.
PCT/GB2012/000780 2011-10-12 2012-10-10 Optical sensor WO2013054077A3 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GB201117611A GB2495518B (en) 2011-10-12 2011-10-12 Optical sensor for sensing temperature of an adjacent gas
GB1117611.2 2011-10-12

Publications (2)

Publication Number Publication Date
WO2013054077A2 true WO2013054077A2 (en) 2013-04-18
WO2013054077A3 true true WO2013054077A3 (en) 2016-08-11

Family

ID=45091923

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/GB2012/000780 WO2013054077A3 (en) 2011-10-12 2012-10-10 Optical sensor

Country Status (2)

Country Link
GB (1) GB2495518B (en)
WO (1) WO2013054077A3 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20160161326A1 (en) * 2013-12-01 2016-06-09 Mao-Jen Wu Flexible Optical Sensor Module

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040202400A1 (en) * 2003-04-14 2004-10-14 Lake Shore Cryotronics, Inc. System and method for measuring physical stimuli using vertical cavity surface emitting lasers with integrated tuning means
US20100027581A1 (en) * 2006-12-28 2010-02-04 Sumitomo Electric Industries, Ltd. Fluid physical quantity measuring method and control method

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04216509A (en) * 1990-12-17 1992-08-06 Fujitsu Ltd Connection method for waveguide type optical device and optical fiber
GB2319335B (en) * 1996-11-15 1998-11-11 Bookham Technology Ltd Integrated interferometer
JP2000047055A (en) * 1998-07-28 2000-02-18 Japan Aviation Electronics Industry Ltd Optical waveguide device and its production
GB0100369D0 (en) * 2001-01-06 2001-02-14 Corning Ltd Alignment of optical components
GB2374156A (en) * 2001-04-02 2002-10-09 Kamelian Ltd Aligning array of optical fibres with waveguides of optical device
JP3752442B2 (en) * 2001-11-13 2006-03-08 ユアン ゼ ユニヴァーシティ Silicon on the insulating layer crystal optical waveguide Michelson interferometer temperature sensor
US7567734B2 (en) * 2007-08-09 2009-07-28 Her Majesty The Queen In Right Of Canada, As Represented By The Minister Of Industry, Through The Communications Research Centre Canada Ridge waveguide optical sensor incorporating a Bragg grating
GB0724411D0 (en) 2007-12-14 2008-01-30 Stfc Science & Technology Optical sensor
CN101832792A (en) * 2010-05-14 2010-09-15 无锡光芯科技有限公司 Optical waveguide sensor and preparation methods thereof

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040202400A1 (en) * 2003-04-14 2004-10-14 Lake Shore Cryotronics, Inc. System and method for measuring physical stimuli using vertical cavity surface emitting lasers with integrated tuning means
US20100027581A1 (en) * 2006-12-28 2010-02-04 Sumitomo Electric Industries, Ltd. Fluid physical quantity measuring method and control method

Also Published As

Publication number Publication date Type
GB201117611D0 (en) 2011-11-23 application
GB2495518A (en) 2013-04-17 application
WO2013054077A2 (en) 2013-04-18 application
GB2495518B (en) 2016-08-31 grant

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