WO2013046552A1 - 搬送システム - Google Patents
搬送システム Download PDFInfo
- Publication number
- WO2013046552A1 WO2013046552A1 PCT/JP2012/005654 JP2012005654W WO2013046552A1 WO 2013046552 A1 WO2013046552 A1 WO 2013046552A1 JP 2012005654 W JP2012005654 W JP 2012005654W WO 2013046552 A1 WO2013046552 A1 WO 2013046552A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- substrate
- transport
- delivery
- belts
- mounting table
- Prior art date
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/02—Devices for feeding articles or materials to conveyors
- B65G47/04—Devices for feeding articles or materials to conveyors for feeding articles
- B65G47/06—Devices for feeding articles or materials to conveyors for feeding articles from a single group of articles arranged in orderly pattern, e.g. workpieces in magazines
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/52—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
- B65G49/064—Transporting devices for sheet glass in a horizontal position
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67736—Loading to or unloading from a conveyor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
Definitions
- the present invention relates to a transfer system for transferring a substrate.
- a conveyor is known as an apparatus for conveying a substrate.
- a conveyor there exists a thing like patent document 1, for example.
- the conveyor described in Patent Document 1 has a conveyance path configured by arranging a plurality of rails at predetermined intervals. Chains that run by a motor are provided on both sides of the carrying path.
- a moving body is provided so as to span the pair of chains. The moving body is provided with a plurality of scrapers, and each scraper is disposed so as to protrude upward from the gap between the rails.
- the substrate is stored in the storage case, and when the substrate is transported, the substrate is taken out from the storage case and then transported.
- the conveyor described in Patent Document 1 does not have a configuration for receiving a substrate from a storage case. Further, since the object to be transported is dropped and placed on the transport path, the substrate may be damaged. Furthermore, the substrate cannot be stored in the storage case. Therefore, the conveyor described in Patent Document 1 cannot be adopted as a substrate transfer system.
- the substrate is subjected to various processes after being transported, and the position accuracy of the substrate is required in the process. Since the conveyor described in Patent Document 1 has a structure in which a substrate on a conveyance path is pushed and conveyed by a scraper, the substrate cannot be positioned. Therefore, a positioning device must be provided separately, and the system becomes large.
- an object of the present invention is to provide a transport system capable of receiving and transporting a substrate from a storage case and positioning it.
- the transfer system of the present invention includes a storage case for storing a plurality of substrates at intervals in the vertical direction, and a lifting device for moving the storage case up and down to sequentially position the substrates in the storage case at a receiving position.
- a transfer device that receives the substrate at the receiving position and transfers the substrate at the transfer position; and a transfer device that receives and transfers the substrate at the transfer position, the transfer device extending in the transfer direction, respectively.
- a plurality of conveyor belts that are arranged in a predetermined direction and spaced apart from each other, a plurality of support members that are associated with each other and provided on each of the plurality of conveyor belts, and the association
- a plurality of supporting members that drive the plurality of conveying belts so as to move together in the conveying direction, and are provided in association with the plurality of conveying belts.
- It said support member are are those that are configured to position the substrate with and the support supports the outer edge portion of the substrate that is passed by the delivery position to the specified position.
- the substrate can be sequentially transferred from the storage case to the transfer device by moving the delivery device by raising or lowering the storage case with the lifting device. Further, the substrate can be positioned at a specified position on the support member simply by passing the substrate from the delivery device to the support member of the transport device, and the substrate can be positioned by moving the transport belt by the transport unit. Accordingly, the substrate can be received from the storage case and transported, and positioning can be performed while transporting.
- the support member is provided with an interval regulating mechanism that regulates an interval in the predetermined direction between a pair of the conveyor belts among the plurality of conveyor belts, and is provided in association with the pair of conveyor belts.
- Each includes a support portion for supporting outer edge portions on both sides of the substrate in the predetermined direction and a positioning portion facing in the predetermined direction for positioning a side surface in the predetermined direction of the substrate, In a state where the distance between the pair of transport belts in the predetermined direction is not narrowed, the support members corresponding to each other of the pair of transport members support the outer edge portion of the substrate passed at the delivery position.
- the gap regulating mechanism narrows the gap between the pair of conveying belts in the predetermined direction to position the supported substrate to the prescribed position. Rukoto is preferable.
- the distance between the pair of transport belts in the predetermined direction is widened at the delivery position, and the pair of support members are separated in the predetermined direction.
- the space between the positioning portions is widened, and the allowable range of positional deviation when the substrate is transferred at the transfer position can be increased. Therefore, the substrate can be easily placed on the support member.
- the interval restriction mechanism narrows the interval between the pair of transport belts in the predetermined direction, and the pair of support members approaches the predetermined direction.
- the space between the positioning portions is narrowed, and the substrate can be positioned more accurately while being conveyed. Therefore, it is not necessary to perform a positioning operation by another device in order to improve positioning accuracy, and the conveyance stop time can be eliminated.
- the support member has a taper-shaped portion that supports the substrate so that the substrate is guided to the specified position when the substrate is placed.
- the substrate can be positioned simply by placing the substrate on the support member.
- the delivery device includes a placing table on which the substrate is placed, a moving unit that moves the placing table between a receiving position and a delivering position, and raising and lowering the placing table in conjunction with the movement of the placing table.
- a lifting cam mechanism that moves the mounting table to the receiving position, lifts the mounting table, receives the substrate on the mounting table, and transfers the mounting table to the delivery table. It is preferable that, when moved to the position, the mounting table is lowered to pass the substrate to the plurality of support members.
- the mounting table can be moved up and down by the lifting cam mechanism by moving the mounting table in the transport direction by the moving unit, and the substrate is mounted on the mounting table at the receiving position and mounted at the delivery position.
- the substrate of the table can be transferred to the transfer device.
- a transfer device that is provided at an intermediate position between the receiving position and the delivery position and transfers the substrate at the intermediate position in a direction different from the transfer direction according to the state, the transfer unit, and And a control device for controlling movement of the transfer device, wherein the mounting table has first and second regions for mounting the substrate, and the first region has the receiving table at the receiving position.
- the second substrate is configured to receive the substrate delivered at the receiving position when moved to the position, and to place the placed substrate at the intermediate position when the placing table is moved to the delivery position.
- the plurality of support members that are configured to pass to a plurality of support members, and are arranged in a plurality in a line in the transport direction on the transport belt, and the control device is configured such that the delivery device is in the delivery position.
- the transfer unit is moved to the transfer position even after the transfer device is positioned at the transfer position. It is preferable that the conveying belt is not fed by the above.
- the transport device can transport a plurality of substrates simultaneously. Further, since the transfer belt is not sent when the substrate is transferred by the transfer device, the transfer device can be arranged in the transfer direction with a plurality of substrates packed. In other words, it is possible to prevent the substrate in the middle from coming out and causing a tooth-like state.
- the transport system of the present invention includes a transport device that transports a received substrate to the receiving position, a delivery device that receives the substrate from the transport device at the receiving position, and passes the substrate at the delivery position, and the delivery device.
- a storage case in which a storage space for storing the substrate passed by is positioned at an interval in the vertical direction, and a lift that moves the storage case up and down to sequentially position the storage space of the storage case in the receiving position A plurality of conveyor belts extending in the conveyance direction and arranged to be spaced apart from each other in a predetermined direction, and the plurality of conveyor belts associated with each other.
- a plurality of support members provided on the first and second support members, and the plurality of associated support members are driven to move together in the transport direction.
- a support unit, and the support member provided in association with the plurality of transport belts is configured to support an outer edge portion of the received substrate and position the supported substrate to a specified position. It is what has been.
- the substrate can be positioned at a predetermined position on the support member simply by passing the substrate to the support member of the transport device, and the substrate can be transported in a positioned state by moving the transport belt by the transport unit.
- substrate can be sequentially accommodated in a storage case by moving a delivery apparatus and raising or lowering a storage case. Thereby, a board
- the substrate can be received from the storage case, conveyed, and positioned.
- FIG. 3 is an enlarged cross-sectional view of the transport device provided in the transport system of FIG. 1 as viewed along the cutting line CC in FIG. 1. It is the side view which looked at the profile of FIG. 6 from the arrow D of FIG. FIG.
- FIG. 7 is an enlarged plane when the profile of FIG. 6 is viewed from above.
- FIG. 2 is an enlarged plan view illustrating an interval regulating mechanism provided in the transport system of FIG. 1 in an enlarged manner. It is a top view which shows the structure of the conveyance system for accommodation. It is a side view which shows the structure of the delivery apparatus with which the conveyance system of FIG. 10 is equipped.
- the transport system 1 according to an embodiment of the present invention will be described with reference to the drawings described above.
- the same reference number is attached
- the concept of the direction used in the following description is used for convenience of description, and is not necessarily limited to that direction.
- the conveyance systems 1 and 1A described below are only one embodiment of the present invention. Therefore, the present invention is not limited to the embodiments, and can be added, deleted, or changed without departing from the spirit of the invention.
- the transport system 1 is a transport system for unloading a plurality of substrates 11 one by one from the storage case 12 and transporting them to a predetermined position. As shown in FIGS. 1 and 2, the transport system 1 includes a storage case 12, an elevating device 13, a delivery device 14, a transport device 15, a transfer device 16, and an interval regulating mechanism 17.
- the storage case 12 has a pair of side walls 22 and 22 as shown in FIG.
- a pair of side walls 22 and 22 are located in the both right and left sides so that the inner surface may oppose.
- a plurality of support plates 23 are provided on the inner surface of each side wall 22 in association with each other.
- the support plates 23 are arranged at equal intervals in the vertical direction, and extend so as to protrude from the inner surface of the side wall 22 toward the other side wall 22.
- the upper surface of each support plate 23 is substantially flush with the upper surface of the corresponding support plate 23 of the other side wall 22, and two associated support plates 23, that is, a pair of support plates 23, 23.
- both side edges of the substrate 11 are supported.
- the substrate 11 is stored in the storage case 12 by inserting the substrate 11 between the pair of side walls 22 and 22 and supporting the substrate 11 on the pair of support plates 23 and 23.
- the storage case 12 in which the substrate 11 is thus stored is placed on the lifting device 13.
- the lifting device 13 includes a base 31, a ball screw mechanism 32, a drive motor 33, and a lifting table 34.
- the base 31 is formed in a generally box shape, and is provided with a ball screw mechanism 32 extending in the vertical direction.
- a driving motor 33 is provided in the base 31.
- the drive motor 33 is a servo motor, and rotates a ball screw (not shown) of the ball screw mechanism 32 to move up and down a slider (not shown) provided on the ball screw.
- the slider is provided with a lifting platform 34.
- the lifting platform 34 extends in the horizontal direction, and the storage case 12 is placed thereon.
- the lifting device 13 configured as described above is configured to lift the storage case 12 mounted on the lifting platform 34 by driving the ball screw mechanism 32 by the drive motor 33 and lowering the storage case 12.
- the substrate 11 is configured to be lowered to a receiving position at a predetermined height.
- a delivery device 14 is arranged on the front side of the lifting device 13 configured as described above.
- the delivery device 14 is configured to receive the substrate 11 lowered to the receiving position by the elevating device 13 and transfer it to the delivery position described later (see the solid line and the two-dot chain line in FIG. 2).
- the delivery device 14 includes a slider mechanism 41, a drive mechanism 42, a cam mechanism 43, and a mounting table 44.
- the slider mechanism 41 includes a guide member 41a and a slide member 41b.
- the guide member 41a is a member extending in the front-rear direction, and a slide member 41b is provided on the guide member 41a so as to be slidable in the front-rear direction.
- the slider mechanism 41 configured as described above is provided with a drive mechanism 42.
- the drive mechanism 42 that is a moving unit has, for example, an electric motor and a belt, and is configured to be able to move the slide member 41b in the front-rear direction by moving the belt by the electric motor.
- the drive mechanism 42 may be configured to move the slide member 41b by expanding and contracting the cylinder by supplying and exhausting air.
- the upper surface of the slide member 41b is flat, and a cam mechanism 43 is provided on the upper surface.
- the cam mechanism 43 includes a cam 43a, a pair of stopper members 43b and 43c, and a cam follower 43d.
- the cam 43a is provided on the upper surface of the slide member 41b.
- a guide (not shown) is provided on the upper surface of the slide member 41b, and the cam 43a is configured to be slidable in the front-rear direction by this guide.
- the cam 43a configured in this manner basically does not move relative to the slide member 41b in the front-rear direction.
- stopper members 43b and 43c are provided in front and rear of the cam 43a.
- the stopper members 43b and 43c are arranged so that the cam 43a stops the movement of the cam 43a when it hits the cam 43a, and the cam 43a does not advance forward or backward from a predetermined position. Therefore, if the cam 43a hits the stopper members 43b and 43c while the slide member 41b is moving forward or backward, only the cam 43a remains in place, and the cam 43a is opposite to the moving direction with respect to the slide member 41b. It moves relative to the direction.
- the cam 43a that moves in this way has a cam surface 43e on its upper surface, and a cam follower 43d is placed on the cam surface 43e.
- the cam follower 43d moves in the front-rear direction on the cam surface 43e while rotating.
- the cam mechanism 43 has an arm 45 extending in the vertical direction, and the cam follower 43 d is rotatably provided at the lower end portion of the arm 45.
- the arm 45 is supported so as to be movable in the vertical direction with respect to the support portion 46 fixed to the slide member 41b.
- the arm 45 is configured such that it cannot move relative to the slide member 41b in the front-rear direction and can move relative to the vertical direction. That is, the cam follower 43d is not movable relative to the slide member 41b in the front-rear direction.
- the cam follower 43d can move relative to the cam 43a in the front-rear direction, and moves relative to the cam surface 43e by moving relative to the cam 43a so as to move up and down according to the shape of the cam surface 43e.
- the cam surface 43e has flat portions 43f and 43g and a recess 43h lower than them.
- the recess 43h is located in the middle part in the front-rear direction of the cam surface 43e, and the cam follower 43d enters the recess 43h when the cam 43a hits the front stopper member 43b and the slide member 41b moves to the frontmost position. It has become.
- the flat portions 43f and 43g are located on both front and rear sides of the recess 43h of the cam surface 43e, and the cam follower is moved when the cam 43a hits the rear stopper member 43c and the slider member 43b moves to the rearmost position.
- 43d rides on the flat portion 43f on the rear side. Therefore, the arm 45 moves up and down as the slide member 41b moves in the front-rear direction and the cam follower 43d moves on the cam surface 43e.
- a mounting table 44 is provided at the upper end of the arm 45.
- the mounting table 44 includes a base portion 44a and a pair of plate-like members 44b and 44c (see also FIG. 5).
- the base portion 44 a is formed in a substantially rectangular parallelepiped shape and is provided at the upper end portion of the arm 45.
- a pair of plate-like members 44b and 44c are provided on the upper surface of the base portion 44a.
- the pair of plate-like members 44b and 44c are strip-like plate members extending in the front-rear direction.
- the pair of plate-like members 44b and 44c are arranged in parallel with a space left and right, and are configured so that the substrate 11 can be placed thereon.
- projecting members 44d, 44e, and 44f are formed at the front and rear end portions and the central portion of each plate-like member 44b and 44c.
- the protruding members 44d, 44e, 44f protrude upward from the upper surfaces of the plate-like members 44b, 44c.
- the interval between the adjacent projecting members 44d, 44e, 44f is slightly longer than the length in the front-rear direction of the substrate 11, and on the upper surface of the plate-like members 44b, 44c, between the rear side and the central projecting members 44d, 44f.
- a rear placement region 47a is formed, and a front placement region 47b is formed between the front side and the central projecting members 44e and 44f.
- the projecting members 44d, 44e, and 44f regulate the movement of the substrate 11 placed in the rear placement area 47a and the front placement area 47b in the front-rear direction. Further, a suction mechanism (not shown) is provided in the rear placement area 47a and the front placement area 47b, and the suction mechanism moves from the rear placement area 47a and the front placement area 47b during movement. The substrate 11 is sucked so that the substrate 11 does not fall.
- the rear placement area 47a which is the first area, can receive the substrate 11 at the receiving position described above.
- An inspection position and a delivery position are arranged in front of the receiving position, and a pair of support tables 48 are provided at the inspection position which is an intermediate position.
- the pair of support bases 48, 48 are located on the outer side in the left-right direction with respect to the pair of plate-like members 44b, 44c, and support the substrate 11 on the upper surface thereof.
- the rear placement area 47a moves between the receiving position and the inspection position by moving the slide member 41b in the front-rear direction.
- the front placement area 47b which is the second area, is located at the inspection position when the rear placement area 47a is located at the reception position, and the reception position when the rear placement area 47a is located at the inspection position. It is supposed to be located in. In other words, the front placement region 47b moves between the inspection position and the delivery position as the slide member 41b moves in the front-rear direction.
- the mounting table 44 moves backward toward the receiving position.
- the cam 43a hits the rear stopper member 43c, and the movement of the cam 43a stops.
- the cam follower 43d moves rearward on the cam surface 43e, rises from the recess 43h to the flat portion 43f, and the mounting table 44 rises.
- the rear placement area 47a and the front placement area 47b are located lower than the receiving position and the inspection position when the cam follower 43d is located in the recess.
- the rear placement region 47a that has reached the receiving position places the substrate 11 positioned at the receiving position thereon. Moreover, the board
- the rear placement region 47a and the front placement region 47b are further raised, and the substrate 11 placed thereon is placed on the pair of support plates 23. , 23 and the pair of support bases 48, 48.
- the delivery device 14 receives the substrate 11 positioned at the receiving position and the inspection position. After receiving the substrate 11, when the slide member 41b is moved forward, the mounting table 44 moves forward.
- the mounting table 44 moves while the cam follower 43d is positioned on the flat portion 43f, and the mounting table 44 moves horizontally at a position higher than the receiving position and the inspection position.
- the cam 43a hits the front stopper member 43b, and the cam 43a stops moving.
- the cam follower 43d descends from the flat portion 43f to the recess 43h, and the mounting table 44 descends.
- the rear placement area 47a is lowered toward the inspection position
- the front placement area 47b is lowered toward the delivery position (see arrow F in FIG. 4).
- the rear placement area 47a reaches the inspection position
- the front placement area 47b reaches the delivery position substantially simultaneously (see the solid lines in FIGS. 4 and 5).
- the substrate 11 placed on the rear placement area 47a is placed on the pair of support bases 48 and 48.
- the substrate 11 placed on the front placement region 47b is placed on the transfer device 15 described later. If the slide member 41b is further moved forward, the rear placement area 47a and the front placement area 47b are further lowered and separated from the substrate 11, respectively. As a result, the substrate 11 is transferred to the pair of support bases 48 and 48 and the transfer device 15.
- the mounting table 44 can be moved up and down by the drive mechanism 42 so that the mounting mechanism 44 can be moved up and down by the cam mechanism 43, and the substrate 11 is placed on the mounting table 44 at the receiving position, and at the delivery position.
- the substrate 11 of the mounting table 44 can be transferred to the transfer device 15.
- the drive mechanism for movement and lifting can be used together, and the number of parts can be reduced.
- the transport device 15 is configured to receive the substrate 11 placed on the placement region 47b at the delivery position and then transport the substrate 11 to a predetermined position.
- the transport device 15 basically has a pair of belts 51, 51, a plurality of pulleys 52, a drive motor 53, and a plurality of profiles 54.
- a pair of belts 51 and 51 which are conveyance belts are endless annular toothed belts, and extend in the front-rear direction with an interval in the left-right direction.
- Pulleys 52 are respectively arranged at the front and rear portions of each belt 51, and the belt 51 is stretched around these two front and rear pulleys 52.
- the two pulleys 52 arranged on the front side are respectively connected to an output shaft of a drive motor 53 that is a transport unit.
- a drive motor 53 By driving the drive motor 53, the pulley 52 rotates, and the pair of belts 51, 51 move in synchronization.
- a plurality of profiles 54 are provided in each of the pair of belts 51, 51 that move synchronously in this way.
- the profile 54 which is a support member is configured to be able to support the corner portion of the substrate 11 and is arranged at equal intervals in the front-rear direction so that the distance between the centers thereof is a predetermined pitch L as shown in FIG. Yes.
- the predetermined pitch L substantially coincides with the length of the substrate 11 in the front-rear direction, and more specifically, is set slightly longer than the length of the substrate 11 in the front-rear direction.
- Each profile 54 is arranged in association with one of the profiles 54 arranged on the other belt 51, and the pair of profiles 54, 54 are positioned so as to face each other. Further, the pair of profiles 54 and 54 are respectively associated with the pair of profiles 54 and 54 on the front side and the rear side adjacent to them.
- Four profiles 54 (hereinafter also simply referred to as “four profiles”) 54 associated with each other form a mounting area having substantially the same shape as that of the substrate 11 on the inside thereof, and the substrate 11 disposed in the mounting area. The four corners are mounted and supported.
- a plurality of such four profiles 54 are provided at equal intervals in the front-rear direction. Therefore, when the placement area is formed at equal intervals between the pair of belts 51 and 51 and the substrate 11 is placed on all the placement areas located on the upper side, the substrate 11 is moved back and forth as shown in FIG. Are arranged at regular intervals.
- the profile 54 having such a function is formed in a substantially T shape in a plan view, and includes a base portion 54a, a pair of locking portions 54b and 54c, and a support portion 54d as shown in FIGS. Have.
- the base portion 54 a is formed in a substantially rectangular shape extending in the front-rear direction, and is disposed along the belt 51.
- a pair of locking portions 54b and 54c are provided on the lower end surface of the base portion 54a.
- the pair of locking portions 54 b and 54 c are located on both sides in the left-right direction of the belt 51 and are in contact with both left and right side portions of the belt 51.
- the pair of locking portions 54 b and 54 c have a protruding piece 54 e that protrudes toward the other locking portion 54 b and 54 c, and each protruding piece 54 e is in contact with the lower surface of the belt 51.
- the belt 51 is surrounded by the base portion 54 a and the pair of locking portions 54 b and 54 c, so that the profile 54 does not come off the belt 51.
- the protruding piece 54e meshes with a tooth portion (not shown) formed on the lower surface of the belt 51, and the pair of locking portions 54b and 54c are fixed to the belt 51 in the front-rear direction. .
- the protrusions 54e are separated from each other in the left and right ends, and the pulley 52 is inserted between them. In this way, the base 54a fixed to the belt 51 is integrally formed with a support 54d.
- the support portion 54d is a plate-like member provided integrally on one side portion of the base portion 54a. An intermediate portion in the front-rear direction of the support portion 54d protrudes toward the base portion 54a of the profile 54 associated therewith. That is, the support portion 54d is formed in a substantially T shape in plan view.
- the support portion 54d has a raised portion 54f at the center portion in the front-rear direction.
- the raised portion 54f is raised higher than the remaining portion, and the upper surface thereof is flush with the upper surface of the base portion 54a.
- substantially L-shaped support regions 55 and 56 are formed on the front and rear sides of the raised portion 54f, respectively, in plan view.
- the support regions 55 and 56 can respectively support the corner portions of the separate substrates 11 on the upper surface thereof, and form a mounting region together with the support regions 55 and 56 of the other three profiles 54 associated therewith, The four corners of the substrate 11 are supported.
- both the front and rear side surfaces of the raised portion 54f are formed in a taper shape so as to expand toward the support regions 55 and 56 as it goes downward, and one side surface of the base 54a also moves downward as a support region. It is formed in a tapered shape so as to extend to 55 and 56.
- the transport device 15 configured in this way is configured to drive the pair of belts 51 and 51 synchronously by the drive motor 53 and to position the four profiles 54 at the delivery position.
- the four profiles 54 positioned at the delivery position are positioned so as to overlap the four corners of the substrate 11 conveyed to the delivery position by the delivery device 14 in plan view, and support the four corners. That is, the transport device 15 can receive the substrate 11 transported to the delivery position by the delivery device 14 by the four profiles 54. Further, the transfer device 15 guides and positions the received substrate 11 to a specified position by the four profiles 54, and transfers the received substrate 11 to the front in the transfer direction.
- ⁇ Transfer device> An inspection device (not shown) is provided above the inspection position.
- the inspection device detects the state of the substrate 11, specifically, a defective product such as damage or loss.
- a transfer device 16 is provided to remove defective products from the transport path that continues from the receiving position to the transport destination on the front side of the transport device 15 via the inspection position and the delivery position based on the detection result of the inspection device.
- the transfer device 16 includes a suction hand 61 (see the two-dot chain line in FIG. 1), a cylinder mechanism 62 (see the two-dot chain line in FIG. 1), and a conveyor 63.
- the suction hand 61 is located at a suction position above the substrate 11 at the inspection position, and is configured to be able to suck the upper surface of the substrate 11.
- the suction hand 61 is provided with a cylinder mechanism 62.
- the cylinder mechanism 62 can be expanded and contracted in the left-right direction, and is configured to move the suction hand 61 between the suction position and the release position by expanding and contracting.
- the suction hand 61 releases the suction of the substrate 11 at the release position, and drops the substrate 11 therebelow.
- a conveyor 63 is provided below the release position, and the dropped substrate 11 is transferred to a shooter (not shown) by the conveyor 63.
- the transfer device 16 configured in this manner first picks up the substrate 11 at the inspection position by suction with the suction hand 61. Then, the cylinder mechanism 62 is moved to move the suction hand from the suction position to the release position. Then, the suction of the suction hand 61 is released to remove the substrate 11 and drop it onto the conveyor 63. Thereafter, the substrate 11 is transferred to the shooter by the conveyor 63. Accordingly, the transfer device 16 can transfer the defective substrate 11 at the inspection position in a direction different from the transport direction, and can remove the defective substrate 11 from the transport path.
- a spacing restriction mechanism 17 is provided in front of the delivery position.
- the spacing regulating mechanism 17 is a mechanism that regulates and narrows the spacing between the pair of belts 51, 51 in the left-right direction, and is provided one by one on the outside of the pair of belts 51, 51 as shown in FIG. 1.
- the interval restriction mechanism 17 includes a base 71 and a restriction portion 72.
- the base 71 is a member that extends in the front-rear direction, and is located outside the belt 51 in the left-right direction.
- the side surface of the base 71 on the belt 51 side faces the engaging portion 54b outside the profile 54, and a restricting portion 72 is provided there.
- the regulating portion 72 is formed in a substantially trapezoidal shape in plan view, and is inclined so as to approach the belt 51 side as the leading end portion on the receiving position side advances forward.
- the intermediate portion of the restriction portion 72 extends in parallel with the belt 51.
- the restricting portion 72 formed in this way is disposed so as to abut against the outer locking portion 54b of the profile 54 that passes in front thereof, and the profile 54 is moved toward the other belt 51 side by abutting. (See also FIG. 6). Thereby, the space
- the distance between the side surfaces of the base portion 54a is made substantially the same as the width of the substrate 11 by narrowing the distance between the pair of profiles 54, 54.
- the side surface of the substrate 11 is sandwiched by the base portions 54a on both the left and right sides, which are positioning portions, and the substrate 11 is positioned in the left-right direction.
- the distance between the pair of profiles 54, 54 remains wide at the delivery position, and the distance between the one side surfaces of the base 54 a is slightly larger than the width of the substrate 11. This increases the allowable range of positional deviation when the substrate 11 is delivered from the delivery device 14 to the transport device 15 at the delivery position, and makes it easier to place the substrate 11 on the four profiles 54.
- the transport system 1 having such a configuration further includes a control device 18, and the operations of the lifting device 13, the delivery device 14, and the transport device 15 are controlled by the control device 18. Yes.
- the transfer operation executed by the control device 18 will be described in detail.
- the control device 18 drives the drive motor 33 of the elevating device 13 to lower the elevating table 34 and lowers the substrate 11 located at the lowest position in the storage case 12 to the receiving position.
- the control device 18 stops driving the drive motor 33.
- the control device 18 moves the slide member 41b backward by the drive mechanism 42.
- the rear placement area 47a of the placement table 44 moves to the receiving position, and the substrate 11 at the receiving position is placed on the rear placement area 47a.
- the front placement area 47b is also moved to the inspection position, and the substrate 11 supported by the pair of support bases 48 and 48 is placed on the front placement area 47b.
- the control device 18 moves the slide member 41b further rearward. Accordingly, the rear placement area 47a and the front placement area 47b receive the two substrates 11 by lifting them from the support plate 23 and the support base 47, respectively.
- the control device 18 moves the slide member 41b forward by the drive mechanism 42. Thereby, the mounting table 44 on which the two substrates 11 are placed moves forward through a place higher than the receiving position and the inspection position.
- the placement table 44 begins to descend. If it continues to move forward, the rear placement region 47a reaches the inspection position, and the substrate 11 placed thereon is placed on the pair of support bases 48, 48. At the same time, the front placement area 47b reaches the delivery position.
- the transport device 15 four profiles 54 are arranged at the four corners of the delivery position.
- the front placement area 47 b reaches the delivery position, the four corners of the substrate 11 on the front placement area 47 b are above the four profiles 54. Respectively.
- the front placement region 47 b is separated from the substrate 11 by further moving the slide member 41 b forward, and is transferred to the substrate 11 by the four profiles 54.
- the substrate 11 in the rear placement region 47a is transferred to the pair of support bases 48 and 48 and placed at the inspection position.
- the state of the substrate 11 placed in the inspection position in this way is inspected by an inspection device (not shown), and the inspection result is transmitted to the control device 18.
- the control device 18 determines that the substrate 11 is defective
- the controller 11 sucks the defective substrate 11 by the suction hand 11 and moves it onto the conveyor 63, and moves the substrate 11 to the shooter by the conveyor 63.
- the control apparatus 18 makes the board
- the control device 18 rotates the pair of belts 51, 51 in synchronization with the drive motor 53.
- the four profiles 54 move forward and the substrate 11 is sent forward.
- the profile 54 sent forward the profile 54 eventually hits the restricting portion 72, and the interval between the pair of opposing profiles 54, 54 is narrowed.
- the substrate 11 placed on the four profiles 54 is positioned in the left-right direction. That is, the transport system 1 can transport the substrate 11 to a predetermined position ahead while positioning the substrate 11.
- control device 18 that controls the movements of the devices 13, 14, 15, and 16 controls the operations of the lifting device 13 and the delivery device 14 as described above, and controls the substrate 11 stored in the storage case 12. Each sheet passes through the receiving position and the inspection position and is transferred to the delivery position.
- the control device 18 controls the movement of the drive motor 53 so that the transferred substrates 11 are placed on the four profiles 54 one by one.
- the control device 18 moves the pair of belts 51, 51 forward by a predetermined pitch L by the drive motor 53. Then, the four profiles 54 move forward by a predetermined pitch L, the substrate 11 is conveyed forward, and the next four profiles 54 are respectively arranged at the four corners of the delivery position. The next four profiles 54 are delivered with the next substrate 11 transferred by the delivery device 14 and placed on the placement area. Then, the control device 18 again moves the pair of belts 51, 51 forward by a predetermined pitch L by the drive motor 53. By repeating this, the substrate 11 can be continuously transferred to adjacent placement areas, and the substrate 11 is disposed without any omission with respect to all the placement areas located on the upper side as shown in FIG. be able to.
- the defective substrate 11 is transferred to the shooter at the inspection position, so that the substrate 11 is transferred to the transport device 15 as described above. Can not be delivered continuously.
- the control device 18 determines that the product is not defective at the next inspection position and transfers the four profiles 54 to the delivery position without turning the pair of belts 51 and 51 until the substrate 11 is transferred to the delivery position. It is supposed to be kept in. Thereby, even if the defective substrate 11 is removed by the transfer device 16, the substrates 11 can be arranged one by one in all the placement regions arranged in the front-rear direction, and the substrate can be placed in any placement region. It is possible to prevent the plurality of substrates 11 from being lined up in a state of missing teeth between the pair of belts 51 and 51 without being placed.
- the transport system 1 configured in this way can also be used when the semiconductor-treated substrate 11A is stored in the storage case 12.
- the conveyance system 1A for accommodation is demonstrated.
- the conveyance system 1A is basically similar in configuration to the above-described conveyance system 1, but as shown in FIG. 10, the conveyance direction, the arrangement position of the interval regulating mechanism 17A, and the structure of the delivery device 14A are particularly different.
- illustration of the control apparatus 18 is abbreviate
- the substrate 11A is placed on the four profiles 54 positioned on the front side, and the transport device 15 transports the substrate 11A rearward (that is, toward the delivery device 14).
- the substrates 11A are conveyed one by one to the delivery position.
- the interval regulating mechanism 17A is positioned on the delivery device 14A side, and on the delivery device 14A side, the interval between the pair of belts 51, 51 is narrowed to narrow the interval between the pair of profiles 54, 54. It has become. Thereby, it can position in the left-right direction, conveying to a delivery position.
- the delivery device 14A can receive the substrate 11A at the delivery position and store the substrate 11A in the storage case 12 at the reception position.
- the delivery device 14A moves the cam follower 43d from the recess 43h to the front side. It rides on the flat part 43g.
- the front placement region 47b rises in the vicinity of the delivery position and is positioned at the reception position (see arrow G in FIG. 11).
- the mounting table 44 moves horizontally at a position higher than the delivery position, the inspection position, and the receiving position, and the cam 43a eventually hits the rear stopper member.
- control device 18 moves the slide member 41b of the delivery device 14A forward to move the front placement region 47b of the placement table 44 to the delivery position.
- the substrate 11A at the delivery position is placed on the front placement region 47b, and the delivery device 14 receives the substrate 11A from the transport device 15.
- the substrate 11A is placed on the rear placement region 47a.
- the control device 18 moves the slide member 41b backward to move the front placement region 47b to the inspection position.
- the front placement area 47b moves toward the inspection position while descending. Therefore, the front placement area 47b is located at the inspection position so that the front placement area 47b is placed on the pair of support bases 48 and 48.
- the substrate 11A is placed and delivered.
- the rear placement area 47a moves to the receiving position. In the vicinity of the receiving position, similarly to the front mounting area 47b, the rear mounting area 47a moves toward the receiving position while descending. Therefore, when the receiving position is reached, a pair of support plates disposed on the left and right sides thereof The left and right ends of the substrate 11 are placed on 23 and 23. Even after the placement, the rear placement region 47a is further lowered, and the pair of support plates 23 and 23 receive the substrate 11A.
- the control device 18 raises the storage case 12 by the elevating device 13, and sets the next pair of support plates 23, 23 positioned under the pair of support plates 23, 23 that received the substrate 11A to the receiving position. Move. By repeating these operations, the substrates 11 placed on the transfer device 15 can be stored in the storage case 12 accurately and easily one after another.
- the controller 18 drives the transfer device 16 to detect the defective substrate 11A. Is removed from the transport path.
- the control device 18 drives the lifting device 13 even if the rear placement area 47a reaches the receiving position after the inspection.
- the storage case 12 is made to stand by. Thereby, the board
- the vertical movement of the mounting table 44 is realized by the cam mechanism 43, but even if a separate driving mechanism different from the driving mechanism 42 is provided to realize the vertical movement.
- interval control mechanism 17 is arrange
- the interval regulating mechanism 17 indirectly regulates the interval between the pair of belts 51 and 51 via the profile 54, but regulates the interval between the pair of belts 51 and 51 by directly pressing the belt 51. Such a configuration may be adopted.
- interval control mechanism 17 is a structure which narrows and regulates the space
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Abstract
Description
搬送システム1は、複数の基板11を収納ケース12から一枚一枚取り出して所定位置まで搬送するための搬出用の搬送システムである。搬送システム1は、図1及び2に示すように収納ケース12と、昇降装置13と、受渡装置14と、搬送装置15と、移送装置16と、間隔規制機構17を備えている。
収納ケース12は、図3に示すように、一対の側壁22,22を有している。一対の側壁22,22は、その内面が対向するように左右両側に位置している。各側壁22の内面には、複数の支持板23が各々対応付けて設けられている。支持板23は、上下方向に等間隔をあけて配置されており、側壁22の内面から他方の側壁22に向かって突出するように延在している。各支持板23の上面は、他方の側壁22の対応している支持板23の上面と略面一となっており、対応付けられている2つの支持板23、つまり一対の支持板23,23によって基板11の両側縁部を支持するようになっている。この一対の側壁22,22の間に基板11を挿入して基板11を一対の支持板23,23に支持させることで、基板11が収納ケース12に収納される。このように基板11が収納されている収納ケース12は、昇降装置13に載置されている。
昇降装置13は、基台31と、ボールねじ機構32と、駆動モータ33と、昇降台34とを有している。基台31は、大略箱状に形成されており、そこには、上下方向に延在するボールねじ機構32が設けられている。また、基台31内には、駆動モータ33が設けられている。駆動モータ33は、サーボモータであり、ボールねじ機構32のボールねじ(図示せず)を回転駆動してボールねじに設けられたスライダ(図示せず)を昇降するようになっている。このスライダには、昇降台34が設けられている。昇降台34は、水平方向に延在しており、その上に収納ケース12が載置されている。このように構成されている昇降装置13は、駆動モータ33によってボールねじ機構32を駆動して昇降台34に載置されている収納ケース12を昇降するようになっており、下降させることで各基板11を所定の高さにある受取位置まで降ろすように構成されている。このように構成されている昇降装置13の前側には、受渡装置14が配置されている。
受渡装置14は、昇降装置13によって受取位置まで降ろされた基板11を受取って後述する受渡位置まで移送するように構成されている(図2の実線及び2点鎖線参照)。受渡装置14は、図4に示すように、スライダ機構41と、駆動機構42と、カム機構43と、載置台44とを有している。スライダ機構41は、ガイド部材41aと、スライド部材41bとを有している。ガイド部材41aは、前後方向に延在する部材であり、このガイド部材41aには、スライド部材41bが前後方向に摺動可能に設けられている。このように構成されるスライダ機構41には、駆動機構42が設けられている。
基板11を受取った後、スライド部材41bを前方に移動させると載置台44が前方に移動する。この際、カムフォロア43dが平坦部43f上に位置したまま載置台44が移動し、載置台44は、受取位置及び検査位置より高い位置で水平移動するようになっている。そして、後側載置領域47aが検査位置に近づくと、カム43aが前側のストッパ部材43bに当たり、カム43aの動きが止まる。この状態のままスライド部材41bが更に前方に移動すると、カムフォロア43dが平坦部43fから凹所43hへと下り、載置台44が下降する。これにより、後側載置領域47aが検査位置に向かって下降し、前側載置領域47bが受渡位置に向かって下降する(図4の矢符F参照)。そして、後側載置領域47aが検査位置に到達し、略同時に前側載置領域47bが受渡位置に到達する(図4及び図5の実線参照)。
搬送装置15は、載置領域47bの上に載せられた基板11を受渡位置にて受取り、その後、基板11を所定位置まで搬送するように構成されている。搬送装置15は、図1及び図2に示すように、基本的に一対のベルト51,51と、複数のプーリー52と、駆動モータ53と、複数のプロファイル54とを有している。搬送ベルトである一対のベルト51,51は、無端環状の歯付きベルトであり、互いに左右方向に間隔をあけて前後方向に延在している。各ベルト51の前後部分には、プーリー52が夫々配置されており、ベルト51は、これら前後2つのプーリー52に張架されている。また、前側に配置されている2つのプーリー52は、搬送ユニットである駆動モータ53の出力軸に夫々連結されている。この駆動モータ53を駆動することによってプーリー52が回転し、一対のベルト51,51が同期して動くようになっている。このように同期して動く一対のベルト51,51の各々には、複数のプロファイル54が設けられている。
また、検査位置の上方には、図示しない検査装置が設けられている。検査装置は、基板11の状態、具体的には損傷や欠損等した不良品を検出するようになっている。そして、検査装置の検出結果に基づいて不良品を受取位置から検査位置及び受渡位置を介して搬送装置15の前側にある搬送先まで続く搬送路から取り除くべく移送装置16が設けられている。
また、搬送装置15の後方の左右両側には、受渡位置より前方に間隔規制機構17が夫々設けられている。間隔規制機構17は、一対のベルト51,51の左右方向の間隔を規制して狭める機構であり、図1に示すように一対のベルト51,51の外側に夫々1つずつ設けられている。間隔規制機構17は、図9に示すように、基体71と、規制部72とを有している。基体71は、前後方向に延在する部材であり、ベルト51の左右方向の外側に位置している。基体71のベルト51側の側面は、プロファイル54の外側の係止部54bと対向しており、そこには、規制部72が設けられている。
このような構成を有する搬送システム1は、図1に示すように更に制御装置18を有しており、この制御装置18によって昇降装置13、受渡装置14、及び搬送装置15の動作が制御されている。以下では、この制御装置18によって実行される搬送作業について詳述する。
制御装置18は、昇降装置13の駆動モータ33を駆動して昇降台34を下げ、収納ケース12において最も下に位置する基板11を受取位置まで降ろす。受取位置に達したところで、制御装置18は、駆動モータ33の駆動を停止する。制御装置18は、次に駆動機構42によりスライド部材41bを後方に移動させる。後方に移動させることで、載置台44の後側載置領域47aが受取位置に移動し、受取位置にある基板11を後側載置領域47aの上に載せる。それと同時に、前側載置領域47bもまた検査位置に移動し、一対の支持台48,48に支持されている基板11を前側載置領域47bの上に載せる。載せた後も、制御装置18は、スライド部材41bを更に後方に移動させる。これにより、後側載置領域47a及び前側載置領域47bは、2枚の基板11を支持板23及び支持台47から夫々持ち上げて受取る。
このように構成される搬送システム1は、半導体処理済の基板11Aを収納ケース12に収納する場合にも使用することができる。以下では、収納用の搬送システム1Aについて説明する。搬送システム1Aは、上述する搬送システム1と構成が基本的に類似しているが、図10に示すように特に搬送方向と、間隔規制機構17Aの配置位置と、受渡装置14Aの構造が異なる。なお、図10では、制御装置18の図示を省略している。搬送システム1Aでは、前側に位置する4つのプロファイル54上に基板11Aが載せられ、搬送装置15によって基板11Aが後方(即ち、受渡装置14の方)に搬送されるようになっている。これにより、基板11Aが一枚ずつ受渡位置まで搬送される。
次に、搬送システム1Aにおいて、基板11Aを収納ケース12に収納する動作について説明する。図示しないロボット等により基板11Aが前側に位置する4つのプロファイル54上に載せられると、制御装置18は、駆動モータ53によって一対のベルト51,51を回転させる。これにより、一対のプロファイル54,54の間隔が狭められながら受渡位置の方へと移動し、基板11Aが受渡位置の方へと搬送されながら左右方向の位置が決めされる。制御装置18は、搬出時と同様に、プロファイル54を所定ピッチL移動する度に一旦停止するようになっている。即ち、制御装置18は、各基板11Aが受渡位置に位置する度に駆動モータ53の駆動を停止する。停止した後、制御装置18は、受渡装置14Aのスライド部材41bを前方に移動させて載置台44の前側載置領域47bを受渡位置に移動させる。これにより、受渡位置にある基板11Aが前側載置領域47b上に載り、受渡装置14が搬送装置15から基板11Aを受取る。この際、検査位置に基板11Aがある場合、その基板11Aは後側載置領域47a上に載置される。
本実施形態の搬送システム1では、カム機構43により載置台44の上下方向の動きを実現しているが、駆動機構42とは異なる別の駆動機構を設けて上下方向の動きを実現してもよい。また、間隔規制機構17は、一対のベルト51,51の両側に配置されているが、何れか一方のベルト51の外側だけに設けられていてもよい。また、間隔規制機構17は、プロファイル54を介して間接的に一対のベルト51,51の間隔を規制するようになっているが、ベルト51を直接押して一対のベルト51,51の間隔を規制するような構成であってもよい。また、間隔規制機構17は、一対のベルト51,51の間隔を狭めて規制するような構成であるが、受渡位置にて一対のベルト51,51の間隔を広げるような構成であってもよい。
11,11A 基板
12 収納ケース
13 昇降装置
14,14A 受渡装置
15 搬送装置
16 移送装置
17,17A 間隔規制機構
18 制御装置
42 駆動機構
43 カム機構
44 載置台
47a 後側載置領域
47b 前側載置領域
51 ベルト
53 駆動モータ
54 プロファイル
54a 基部
Claims (6)
- 複数の基板を上下方向に間隔をあけて収納するための収納ケースと、
前記収納ケースを昇降させて前記収納ケース内の前記基板を順に受取位置に位置させる昇降装置と、
前記受取位置の前記基板を受取り、受渡位置にて前記基板を渡す受渡装置と、
前記受渡位置にて前記基板を受取って搬送する搬送装置とを備え、
前記搬送装置は、搬送方向に夫々延在し且つ所定方向に互いに間隔を有して並ぶように設けられている複数の搬送ベルトと、互いに対応付けられて前記複数の搬送ベルトに夫々設けられている複数の支持部材と、前記対応付けられている複数の支持部材が前記搬送方向に一緒に移動するように前記複数の搬送ベルトを駆動する搬送ユニットとを有し、
前記複数の搬送ベルトに対応付けられて設けられている前記支持部材は、前記受渡位置にて渡された前記基板の外縁部を支持し且つ当該支持した基板を規定位置へと位置決めするよう構成されている、搬送システム。 - 前記複数の搬送ベルトのうちの一対の搬送ベルトの前記所定方向の間隔を規制する間隔規制機構を備え、
前記一対の搬送ベルトに互いに対応付けられて夫々設けられている前記支持部材は、前記基板の前記所定方向両側の外縁部を夫々支持する支持部と前記基板の所定方向の側面を位置決めするための前記所定方向に対向する位置決め部とを夫々有し、
前記間隔規制機構により前記一対の搬送ベルトの前記所定方向の間隔を狭められていない状態で、前記一対の搬送部材の互いに対応付けられた前記支持部材が前記受渡位置にて渡された前記基板の外縁部を支持し、前記間隔規制機構により前記一対の搬送ベルトの前記所定方向の間隔を狭めることで、当該支持した基板を前記規定位置へと位置決めするよう構成されている、請求項1に記載の搬送システム。 - 前記支持部材は、前記基板を載置すると前記規定位置に案内するよう前記基板を支持する部分がテーパ状に形成されている、請求項1又は2に記載の搬送システム。
- 前記受渡装置は、前記基板を載せる載置台と、前記載置台を受取位置と受渡位置との間で移動させる移動ユニットと、前記載置台の移動に連動して前記載置台を昇降させる昇降用カム機構とを有し、
前記昇降用カム機構は、前記載置台を前記受取位置に移動させると前記載置台を持ち上げて前記載置台上に前記基板を受け取り、前記載置台を前記受渡位置に移動させると前記載置台を下降させて前記基板を前記複数の支持部材に渡すよう構成されている、請求項1乃至3の何れか1つに記載の搬送システム。 - 前記受取位置と前記受渡位置との間の中間位置に設けられ、前記中間位置にある前記基板をその状態に応じて搬送方向と異なる方向に移送する移送装置と、
前記搬送ユニット及び前記移送装置の動きを制御する制御装置とを備え、
前記載置台は、前記基板を載置するための第1及び第2領域を有し、
前記第1領域は、前記載置台を前記受取位置へと移動させると前記受取位置で渡される前記基板を受取り、前記載置台を前記受渡位置へと移動させると前記載置されている前記基板を前記中間位置に置くよう構成され、
前記第2領域は、前記載置台を前記受取位置へと移動させると前記中間位置にある前記基板を受取り、前記載置台を前記受渡位置へと移動させると前記載置されている前記基板を前記対応付けられている複数の支持部材に渡すよう構成され、
前記対応付けられている複数の支持部材は、前記搬送ベルトに前記搬送方向に並べて複数組み設けられており、
前記制御装置は、前記受渡装置が前記受渡位置に位置した後に前記基板の前記搬送方向の長さだけ前記搬送ユニットにより前記搬送ベルトを送り、前記移送装置により前記基板が移送されると前記受渡装置が前記受渡位置に位置した後でも前記搬送ユニットにより前記搬送ベルトを送らないようになっている、請求項4に記載の搬送システム。 - 受取った基板を前記受取位置に搬送する搬送装置と、
前記受取位置にて前記搬送装置から前記基板を受取り、受渡位置にて前記基板を渡す受渡装置と、
前記受渡装置により渡される前記基板を収納するための収納スペースが上下方向に間隔をあけて位置している収納ケースと、
前記収納ケースを昇降させて前記収納ケースの前記収納スペースを順に受取位置に位置させる昇降装置とを備え、
前記搬送装置は、搬送方向に夫々延在し且つ所定方向に互いに間隔を有して並ぶように設けられている複数の搬送ベルトと、互いに対応付けられて前記複数の搬送ベルトに夫々設けられている複数の支持部材と、前記対応付けられている複数の支持部材が前記搬送方向に一緒に移動するように前記複数の搬送ベルトを駆動する搬送ユニットとを有し、
前記複数の搬送ベルトに対応付けて設けられている前記支持部材は、受取った前記基板の外縁部を支持し且つ当該支持した前記基板を規定位置へと位置決めするよう構成されている、搬送システム。
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