WO2013042959A2 - Appareil de séchage à vide - Google Patents

Appareil de séchage à vide Download PDF

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Publication number
WO2013042959A2
WO2013042959A2 PCT/KR2012/007545 KR2012007545W WO2013042959A2 WO 2013042959 A2 WO2013042959 A2 WO 2013042959A2 KR 2012007545 W KR2012007545 W KR 2012007545W WO 2013042959 A2 WO2013042959 A2 WO 2013042959A2
Authority
WO
WIPO (PCT)
Prior art keywords
housing
solvent
lower housing
heater
connector
Prior art date
Application number
PCT/KR2012/007545
Other languages
English (en)
Korean (ko)
Other versions
WO2013042959A3 (fr
Inventor
전영준
이민철
Original Assignee
주식회사 테라세미콘
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR1020110095919A external-priority patent/KR101334163B1/ko
Priority claimed from KR1020110111118A external-priority patent/KR101317286B1/ko
Application filed by 주식회사 테라세미콘 filed Critical 주식회사 테라세미콘
Publication of WO2013042959A2 publication Critical patent/WO2013042959A2/fr
Publication of WO2013042959A3 publication Critical patent/WO2013042959A3/fr

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B5/00—Drying solid materials or objects by processes not involving the application of heat
    • F26B5/04—Drying solid materials or objects by processes not involving the application of heat by evaporation or sublimation of moisture under reduced pressure, e.g. in a vacuum

Definitions

  • the present invention relates to a vacuum drying apparatus for drying a solvent contained in a coating liquid applied to a substrate by using vacuum and heat.
  • a coating liquid such as a photoresist is applied to a substrate for a flat panel display device used in an LCD (Liquid Crystal Display), an OLED (Organic Light Emitting Diodes) display, or a field emission display (FED).
  • LCD Liquid Crystal Display
  • OLED Organic Light Emitting Diodes
  • FED field emission display
  • a solvent such as a solvent is mixed with the coating liquid and then applied, and then the solvent is dried to temporarily harden the coating liquid, and then the substrate is transported, thereby preventing the coating liquid from being oriented to one side.
  • the vacuum drying apparatus has a lower housing and an upper housing which are coupled to each other to form a chamber which is a closed space in which the substrate is loaded and dried.
  • the lower housing is fixed, and the upper housing is installed to be elevated on the upper side of the lower housing.
  • the chamber is formed between the lower housing and the upper housing.
  • a solvent such as a solvent is dried using only a pressure difference, so that the drying efficiency of the solvent is lowered.
  • the amount of the dried solvent is calculated by comparing the weight difference between the weight of the substrate before drying and the weight of the substrate after drying, the difference between the weight before drying the substrate and the weight after drying is the difference between the solvent mixed in the coating liquid There is only a factor due to drying.
  • Table 1 Table showing amount of solvent dried in conventional vacuum drying apparatus Chamber pressure (torr) Drying time (min) Amount of solvent mixed in the coating liquid (g) Amount of dried solvent (g) 10 5 12.5 0.42
  • the solvent mixed in the coating liquid was dried by about 3.36% and discharged. That is, when the solvent is dried using a conventional vacuum drying apparatus, the ratio of the dried solvent to the mixed solvent is 15% or less.
  • the present invention has been made to solve the problems of the prior art as described above, the object of the present invention is to dry a large amount of solvent by using a vacuum and heat, vacuum drying that can improve the reliability of the product to be dried In providing a device.
  • Another object of the present invention is to provide a vacuum drying apparatus capable of further improving the drying efficiency by completely sealing between a connector and a housing connected to a heater to transfer external power to the heater.
  • Vacuum drying apparatus for achieving the above object, the main body; A housing installed in the main body and forming a chamber in which the loaded dry body is dried by a pressure difference; And a heater installed inside the housing to heat the dry object.
  • the vacuum drying apparatus which concerns on this invention dries a to-be-dried body using a pressure difference and heat, the drying rate of the solvent mixed with the coating liquid apply
  • coated to the to-be-dried body is excellent.
  • the coating liquid is cured to the inside, thereby reducing the problem that the coating liquid is concentrated to one side or the pores due to the solvent remaining in the coating liquid. Therefore, there is an effect of improving the reliability of the product to be dried.
  • FIG. 1 is a perspective view of a vacuum drying apparatus according to an embodiment of the present invention.
  • FIG. 2 is a perspective view of the housing shown in FIG. 1.
  • FIG. 2 is a perspective view of the housing shown in FIG. 1.
  • FIG. 3 is an exploded perspective view of FIG. 2;
  • FIG. 4 is a bottom perspective view of FIG. 3.
  • FIG. 5 is an enlarged perspective view of the heater shown in FIG.
  • FIG. 6 is a cross sectional view of FIG. 2.
  • FIG. 7 is an enlarged view of a portion “A” of FIG. 6.
  • FIG. 8 is an enlarged view of a portion “B” of FIG. 6.
  • FIG. 1 is a perspective view of a vacuum drying apparatus according to an embodiment of the present invention
  • Figure 2 is a perspective view of the housing shown in Figure 1
  • Figure 3 is an exploded perspective view of FIG.
  • the vacuum drying apparatus includes a main body 110 forming an appearance, and the housing 120 is installed inside the main body 110.
  • a chamber 120a which is an enclosed space in which a to-be-dried object 50, such as a flat panel display substrate, is loaded and dried, is formed.
  • the to-be-dried body 50 is coated with a coating liquid such as a photoresist, and the coating liquid contains a solvent such as a solvent or the like.
  • the chamber 120a is decompressed to become a vacuum state, whereby the solvent contained in the coating liquid applied to the to-be-dried body 50 is forcibly dried by a pressure difference. And is discharged to the outside of the housing 120.
  • the housing 120 has a lower housing 121 fixed to the main body 110 and an upper housing 125 that is supported by a portion of the upper main body 110 of the lower housing 121 and is installed to be elevated.
  • the upper housing 125 is elevated by driving means 130 such as a motor or a cylinder fixed to the main body 110.
  • the upper housing 125 When the upper housing 125 is lowered, the upper housing 125 and the lower housing 121 are coupled to seal to form a sealed chamber 120a. Then, when the upper housing 125 is raised, the upper housing 125 and the lower housing 121 is spaced apart, thereby opening the chamber 120a. When the chamber 120a is opened, the to-be-dried body 50 is loaded into the chamber 120a or unloaded from the chamber 120a.
  • one side of the main body 110 is provided with a pumping means (not shown) such as a vacuum pump for reducing the chamber 120a in a vacuum state when the chamber 120a is sealed.
  • the pumping means is preferably in communication with the lower surface of the lower housing 121 and the upper surface of the upper housing 125 to uniformly dry the to-be-dried body 50 to depressurize the chamber 120a.
  • the to-be-dried body 50 When the to-be-dried body 50 is loaded into the chamber 120a, when the to-be-dried body 50 contacts the inner lower surface of the lower housing 121, the to-be-dried body 50 is supported by a robot arm (not shown). When loading the 50 into the chamber 120a or unloading the to-be-dried body 50 from the chamber 120a, there is no gap between the to-be-dried body 50 and the lower surface of the lower housing 121, which is inconvenient. .
  • a plurality of support pins 141 for supporting the to-be-dried body 50 spaced apart from the inner lower surface of the lower housing 121 are installed to be lowered below the lower housing 121.
  • the support pin 141 is coupled to the lower end of the elevating plate 143 (see FIG. 4) installed to be elevated on and under the lower housing 121 to elevate as the elevating plate 143 is elevated.
  • the support pin 141 passes through the lower surface of the lower housing 121 to enter and exit the chamber 120a, and the to-be-dried body 50 is mounted and supported at the upper end thereof.
  • the support pin 141 Since the support pin 141 is installed to be elevated, the support pin 141 may protrude upward from the lower surface of the lower housing 121 as necessary. Then, the space of the chamber 120a can be reduced as compared with the structure in which the support pin 141 always protrudes upward from the lower surface of the lower housing 121.
  • a support plate 145 (see FIG. 4) is fixed to a portion of the main body 110 below the lifting plate 143, and a driving means such as a motor or a cylinder for lifting up and down the lifting plate 143 is supported on the support plate 145. Is installed.
  • the vacuum of the chamber 120a may leak through the lower portion of the lower housing 121 through which the support pin 141 penetrates.
  • the expansion pipe 147 (see Fig. 4) is installed.
  • the heater 160 is installed to dry the solvent using heat as well as a pressure difference.
  • FIG. 4 is a bottom perspective view of FIG. 3
  • FIG. 5 is an enlarged perspective view of the heater shown in FIG. 3.
  • the heater 160 is formed in a plate shape is installed inside the housing 120 and heats the dry object 50. More specifically, the heater 160 is installed on the inner lower surface of the lower housing 121 and the inner upper surface of the upper housing 125, respectively.
  • the heater 160 is formed by dividing a plurality of unit heaters 160a, 160b, 160c,... Having a predetermined shape, and unit heaters 160a, 160b, 160c,... .) Are each controlled independently.
  • Each unit heater (160a, 160b, 160c, ...) can be controlled independently, can be heated to a different temperature for each part of the dry object 50, as needed.
  • Each unit heater (160a, 160b, 160c, ...) is the first protective plate 161, the second protective plate 163, the first protective plate 161 and the second protective plate 161 coupled to the first protective plate 161 and the second The coil 165 is interposed between the protection plates 163.
  • Each coil 165 of each unit heater may be formed in a uniform form, or may be formed in a non-uniform form.
  • the coil 165 may be formed of an incroid material that does not react with a solvent that is a solvent.
  • the amount of the dried solvent is calculated by comparing the weight difference between the weight of the dried object 50 before drying and the dried object 50 after drying, the weight before drying the dry body 50 and the weight after drying The difference is caused only by the drying of the solvent mixed in the coating liquid.
  • the solvent was dried at 4.50 g when the atmosphere temperature of the chamber was 30 ° C. and the heating time was 5 minutes, and the solvent was dried at 4.85 g when the atmosphere temperature of the chamber was 40 ° C. and the heating time was 5 minutes. .
  • the solvent was dried at 5.05 g, 5.95 g, and 7.00 g, respectively, when the chamber was heated at 50 ° C. for 3 minutes, 4 minutes, and 5 minutes, and the chamber temperature was 60 ° C.
  • the solvents were dried 8.50 g, 9.40 g and 9.19 g, respectively, when maintained for 3 minutes, 4 minutes and 5 minutes, respectively.
  • the solvent was dried at 9.00 g, 9.20 g, and 9.30 g, respectively, when the chamber was heated at 70 ° C. for 3 minutes, 4 minutes, and 5 minutes, and the chamber was heated to 80 ° C.
  • the solvent was dried for 9.50 g, 9.40 g and 9.38 g, respectively, when maintained for 3 minutes, 4 minutes and 5 minutes, respectively.
  • the drying rate of the said solvent was 36 to 76%, and the drying rate was excellent compared with the conventional vacuum drying apparatus.
  • the drying rate is 35% or more even when the ambient temperature of the chamber is set to 20 ° C. under the same conditions, and the heating time is 1 minute under the same conditions. Came out.
  • the ambient temperature of the chamber is 80 °C, it is obvious that the temperature of the heater 160 should be heated to a higher temperature.
  • the drying rate of the solvent is excellent. This means that the coating liquid applied to the to-be-dried body 50 is cured to the inside, so that the problem of pore generation due to the phenomenon that the coating liquid is concentrated to one side or the solvent remaining in the coating liquid is reduced.
  • the solvent Since the solvent is dried and discharged by heat as well as the temperature difference, the solvent may be condensed after evaporated by heat. Then, the condensed solvent may fall into the to-be-dried body 50 to damage the to-be-dried body 50.
  • the vacuum drying apparatus is configured such that the vaporized solvent is condensed at the side of the housing 120, and then may fall outside the outer surface of the dry object 50.
  • FIGS. 6 and 7 are cross sectional views of FIG. 2, and FIG. 7 is an enlarged view of a portion “A” of FIG. 6.
  • the internal central side temperature of the housing 120 is formed higher than the internal side temperature. That is, the inner side surfaces of the lower housing 121 and the upper housing 125 are formed to be lower than the internal central temperature. This is possible because the coils 165 of the unit heaters 160a, 160b, 160c,... Can be independently controlled.
  • the vaporized solvent moves to the side surface of the housing 120 having a low temperature, and condenses if the side temperature of the housing 120 is less than or equal to the predetermined temperature.
  • the solvent condensed on the side of the lower housing 121 is introduced into the lower surface of the inner side of the lower housing 121 and then discharged to the outside.
  • the heater 160 installed in the lower housing 121 may have a lower housing. It is preferable to be spaced apart from the inner lower surface of 121.
  • a fence 170 is formed on the inner side of the upper housing 125 to form the solvent condensed after vaporization, and the condensed solvent formed on the fence 170 is an inner side of the lower housing 121. And fall between the outer surface of the heater 160 and flow into the inner lower surface of the lower housing 121 and then discharged to the outside.
  • interval 121a is formed and the space
  • a guide path 122 having a groove-shaped cross section is formed on the inner lower surface of the lower housing 121 facing the gap 121a. Then, since the condensed solvent introduced into the inner lower surface of the lower housing 121 flows into the guide path 122 and is stored, movement along the inner lower surface of the lower housing 121 is prevented.
  • the guide path 122 is in communication with the pumping means for depressurizing the inside of the housing 120, and the condensed solvent stored in the guide path 122 is discharged to the outside of the lower housing 121 by the pumping means.
  • Reference numeral 124 in FIG. 7 is a sealing member sealing between the lower housing 121 and the upper housing 125.
  • the heater 160 receives external power to heat the dry object 50.
  • the housing 120 is provided with a connector 180 for transmitting external power to the heater 160.
  • the connector 180 is installed through the housing 120, one side of which is located inside the housing 120 and connected to the coil 165 of the heater 160, and the other side of which is located outside of the housing 120. It is connected to the external power supply side.
  • the vacuum of the chamber 120a does not leak until the connector 180 and the housing 120 are sealed.
  • the vacuum drying apparatus is provided with a sealing means for sealing between the connector 180 and the housing 120, which will be described with reference to FIGS. 5, 6 and 8. 8 is an enlarged view of a portion “B” of FIG. 6.
  • the heater 160 is installed on the inner lower surface of the lower housing 121 and the inner upper surface of the upper housing 125, respectively, the heater 160 is a plurality of parts (160a, 160b, 160c, ... ...) and are controlled independently of each other. Therefore, the connector 180 is formed on the lower surface of the lower housing 121 and the upper surface of the upper housing 125 by the number of partitioned portions 160a, 160b, 160c,... Of the heater 160. Each is installed through.
  • the sealing means is installed on the outer lower surface portion of the lower housing 121 in which the connector 180 is installed and the outer upper surface portion of the upper housing 125, respectively.
  • FIG. 4 shows only one connector 180 penetrated through a lower surface of the lower housing 121.
  • a first through hole 123a and a second through hole 123b are formed on the lower surface of the lower housing 121.
  • the first through hole 123a is formed to be adjacent to the inner side of the lower housing 121 so that one side communicates with the inside of the lower housing 121, and the other side is positioned inside the lower housing 121.
  • the second through hole 123b is formed to be adjacent to the outer side of the lower housing 121 so that one side is located inside the lower surface of the lower housing 121 to communicate with the other side of the first through hole 123a, and the other side is lower In communication with the outside of the housing 121. Therefore, the inside and the outside of the lower housing 121 communicate with each other by the first through hole 123a and the second through hole 123b which communicate with each other. At this time, the diameter of the second through hole 123b is larger than the diameter of the first through hole 123a.
  • the connector 180 includes a conductive wire 181 connected to the coil 165 of the heater 160 and an outer shell 183 surrounding and protecting the conductive wire 181, and the first through hole 123a and the second through hole. Pass 123b.
  • the sealing means includes a fixing member 191, a lifting member 193, a sealing member 195 and a support member 197.
  • the fixing member 191 is formed in a substantially cylindrical shape, and the outer peripheral surface of one side is inserted and coupled to the second through hole 123b, and the other side thereof is exposed to the outside of the lower surface of the lower housing 121. At this time, the outer diameter of one side portion of the fixing member 191 inserted into the second through hole 123b is smaller than the outer diameter of the other portion exposed to the outside of the lower housing 121. Then, an end surface 191a is formed at an interface between one side portion and the other side portion of the fixing member 191, and the end surface 191a has a lower surface of the lower housing 121 having the second through hole 123b formed thereon. Contact.
  • the end surface 191a of the fixing member 191 and the lower surface of the lower housing 121 which are in contact with each other are welded. Therefore, between the fixing member 191 and the lower housing 121 is completely sealed.
  • the connector 180 is inserted and supported on the inner circumferential surface of the fixing member 191.
  • Lifting member 193 is formed in a substantially cap shape, the inner peripheral surface is coupled to the outer peripheral surface of the other portion of the fixing member 191.
  • the inner circumferential surface of the elevating member 193 and the outer circumferential surface of the fixing member 191 are formed with interlocking teeth (not shown).
  • the elevating member 193 rotates forward and backward, the elevating member 193 is fixed member ( Go along 191).
  • the connector 180 passes through the elevating member 193.
  • the sealing member 195 is interposed between the other inner circumferential surface of the fixing member 191 and the outer circumferential surface of the connector 180.
  • the supporting member 197 is installed inside the elevating member 193 to elevate with the elevating member 193, and supports the sealing member 195 to be in close contact with the fixing member 191 and the connector 180.
  • the inclined surface 191b is formed on the other inner circumferential surface of the fixing member 191 to have an inner diameter that increases toward the outside of the lower housing 121, and the sealing member 195 is interposed on the inclined surface 191b. .
  • the support member 197 protrudes from an inner circumferential surface of the ring-shaped support frame 197a and the support frame 197a on which the inner surface of the elevating member 193 is installed, and the inner circumferential surface of the fixing member 191 and the connector 180. It includes a tubular support tube (197b) is inserted between the outer peripheral surface for supporting the sealing member (195). Then, when the elevating member 193 is raised by rotating the elevating member 193, the supporting member 197 also rises together with the elevating member 193, so that the sealing member is supported by the supporting tube 197b of the supporting member 197. 195 is in close contact with the inner circumferential surface of the fixing member 191 and the outer circumferential surface of the connector 180. Therefore, the fixing member 191 and the connector 180 are firmly sealed. The connector 180 passes through the support member 197.
  • the vacuum drying apparatus Since the vacuum drying apparatus according to the present embodiment dries the dry object 50 by the pressure difference and heat, the drying efficiency of the solvent is excellent.
  • a connector 180 for transmitting external power to the heater 160 installed inside the housing 120 is installed through the housing 120, and a seal is completely sealed between the connector 180 and the housing 120. Therefore, the drying efficiency of the solvent is more excellent.

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  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Molecular Biology (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Drying Of Solid Materials (AREA)

Abstract

L'invention concerne un appareil de séchage à vide. L'appareil de séchage à vide selon à la présente invention permet de sécher un objet à l'aide d'une pression différentielle et de chaleur, ce qui permet au solvant mélangé à un liquide de revêtement recouvrant l'objet d'être parfaitement séché. Lorsqu'une grande quantité de solvant est séchée, un liquide de revêtement peut être durci dans son cœur même ; par conséquent, les problèmes de présence excessive de liquide de revêtement sur un côté peuvent être réduits, ainsi que les problèmes de création de pores dus à la persistance résiduelle du solvant dans le liquide de revêtement. La fiabilité de l'objet séché est ainsi améliorée. Par ailleurs, un connecteur est placé dans un boîtier afin d'acheminer du courant d'une source externe vers un dispositif de chauffage installé dans le boîtier ; l'espace compris entre le connecteur et le boîtier est totalement scellé afin d'obtenir une excellente efficacité de séchage du solvant mélangé au liquide de revêtement dont l'objet est recouvert.
PCT/KR2012/007545 2011-09-22 2012-09-20 Appareil de séchage à vide WO2013042959A2 (fr)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
KR10-2011-0095919 2011-09-22
KR1020110095919A KR101334163B1 (ko) 2011-09-22 2011-09-22 진공 건조 장치
KR1020110111118A KR101317286B1 (ko) 2011-10-28 2011-10-28 진공 건조 장치
KR10-2011-0111118 2011-10-28

Publications (2)

Publication Number Publication Date
WO2013042959A2 true WO2013042959A2 (fr) 2013-03-28
WO2013042959A3 WO2013042959A3 (fr) 2013-05-30

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PCT/KR2012/007545 WO2013042959A2 (fr) 2011-09-22 2012-09-20 Appareil de séchage à vide

Country Status (2)

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TW (1) TW201321696A (fr)
WO (1) WO2013042959A2 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103353209A (zh) * 2013-06-20 2013-10-16 京东方科技集团股份有限公司 一种真空干燥装置及光刻工艺
WO2015164160A1 (fr) 2014-04-21 2015-10-29 Merck Sharp & Dohme Corp. Sels pharmaceutiques d'un antagoniste des récepteurs de l'orexine

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107362953A (zh) * 2017-09-01 2017-11-21 深圳市华星光电半导体显示技术有限公司 光阻烘烤设备

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10311676A (ja) * 1997-05-14 1998-11-24 Shibaura Eng Works Co Ltd 真空乾燥処理装置
KR20070055829A (ko) * 2005-11-28 2007-05-31 엘지.필립스 엘시디 주식회사 진공 건조용 열경화 장치
KR100787873B1 (ko) * 2006-07-07 2007-12-27 (주)나노테크 기판 건조장치 및 건조방법
KR100859975B1 (ko) * 2008-02-20 2008-09-25 씨디에스(주) 다단 진공 건조 장치

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10311676A (ja) * 1997-05-14 1998-11-24 Shibaura Eng Works Co Ltd 真空乾燥処理装置
KR20070055829A (ko) * 2005-11-28 2007-05-31 엘지.필립스 엘시디 주식회사 진공 건조용 열경화 장치
KR100787873B1 (ko) * 2006-07-07 2007-12-27 (주)나노테크 기판 건조장치 및 건조방법
KR100859975B1 (ko) * 2008-02-20 2008-09-25 씨디에스(주) 다단 진공 건조 장치

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103353209A (zh) * 2013-06-20 2013-10-16 京东方科技集团股份有限公司 一种真空干燥装置及光刻工艺
CN103353209B (zh) * 2013-06-20 2015-04-29 京东方科技集团股份有限公司 一种真空干燥装置及光刻工艺
WO2015164160A1 (fr) 2014-04-21 2015-10-29 Merck Sharp & Dohme Corp. Sels pharmaceutiques d'un antagoniste des récepteurs de l'orexine

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TW201321696A (zh) 2013-06-01
WO2013042959A3 (fr) 2013-05-30

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