WO2012140262A1 - Neural electrode and method for fabricating the same - Google Patents

Neural electrode and method for fabricating the same Download PDF

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Publication number
WO2012140262A1
WO2012140262A1 PCT/EP2012/056921 EP2012056921W WO2012140262A1 WO 2012140262 A1 WO2012140262 A1 WO 2012140262A1 EP 2012056921 W EP2012056921 W EP 2012056921W WO 2012140262 A1 WO2012140262 A1 WO 2012140262A1
Authority
WO
WIPO (PCT)
Prior art keywords
layer
reinforcement
electrode
elastomer
metal layer
Prior art date
Application number
PCT/EP2012/056921
Other languages
French (fr)
Inventor
Martin SCHÜTTLER
Christopher W. D. DODDS
Gregg J. SUANING
Original Assignee
Cortec Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cortec Gmbh filed Critical Cortec Gmbh
Priority to EP12718124.6A priority Critical patent/EP2696934B1/en
Priority to CN201280029011.1A priority patent/CN103702714B/en
Publication of WO2012140262A1 publication Critical patent/WO2012140262A1/en
Priority to US14/053,130 priority patent/US9174038B2/en

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Classifications

    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61NELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY
    • A61N1/00Electrotherapy; Circuits therefor
    • A61N1/02Details
    • A61N1/04Electrodes
    • A61N1/05Electrodes for implantation or insertion into the body, e.g. heart electrode
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61NELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY
    • A61N1/00Electrotherapy; Circuits therefor
    • A61N1/02Details
    • A61N1/04Electrodes
    • A61N1/05Electrodes for implantation or insertion into the body, e.g. heart electrode
    • A61N1/0526Head electrodes
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61NELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY
    • A61N1/00Electrotherapy; Circuits therefor
    • A61N1/02Details
    • A61N1/04Electrodes
    • A61N1/05Electrodes for implantation or insertion into the body, e.g. heart electrode
    • A61N1/0551Spinal or peripheral nerve electrodes
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49002Electrical device making
    • Y10T29/49117Conductor or circuit manufacturing

Definitions

  • the invention relates to a neural electrode. It relates in particular to such an elec- trode which is able to withstand high mechanical forces, and to a method of fabrication of the same.
  • the current fabrication process utilizes a laser for cutting metal foil in order to generate electrically conducting tracks and contact pads. These tracks and pads are embedded into a silicone elastomer. Since the silicone is very elastic, it cannot protect the delicate metal tracks against strain and other mechanical load as applied, e.g. during implantation surgery.
  • the current layering (elastomer-metal-elastomer) will be extended by at least one additional layer of high tensile strength polymer.
  • This polymer acts as mechanical protection, e.g. strain relieve in order to minimize the force reaching the delicate metal tracks.
  • the polymer layer can be shaped in a way to locally strengthen (or stiffen) the electrode array, allowing the designer of the electrode to define anisotropic mechani- cal properties (e.g. very high Young's modulus in direction longitudinal to the metal tracks, low Young's modulus in lateral direction).
  • FIG. 1 A potential fabrication process, which can be applied for fabricating polymer- reinforced silicone-based neural electrodes is shown in Figure 1. Generating anisotropic mechanical properties in an electrode grid by shaping the polymeric reinforcement embedded in the grid elastomer is shown in Figures 2A- C
  • the foil used to obtain reinforcement has multiple perforations. Through these holes, the two adjacent layers of elastomer touch each other and establish a strong mechanical link between each other and the polymer foil by interlocking.
  • polymer-reinforcement can be combined with giving the conductive metal tracks the shape of meanders.
  • Meander-shaped electrodes permit stretching to some degree without being damaged [Schuettler 2009].
  • the polymer foil can be shaped in a way that it only takes up tensile forces in the direction longitudinal to the metal tracks. In contrast, they cannot take up forces in direction lateral to the tracks and also would not affect the flexibility of the elastomer very much (see figure 2).
  • the neural electrodes could be fabricated in multiple alternating layers of elas- tomer and laser-patterned metal [Suaning 2007]. Depending on the application, one has to decide which layer is to be used for placing the polymeric reinforcement.
  • Some applications require the use of more than one layer of reinforcement.
  • polymeric reinforcement that has some additional functionality, like: carrying makers for imaging technology (e.g. radiopaque)
  • the concept of embedding a polymeric reinforcement in elastomers can be applied but is not restricted to laser-patterning of neural electrodes (as shown in figure 1). It is also applicable to photolithography-based patterning of metal layers and/or elastomers, methods based on electroplating of metal on elastomers and other methods employing metal structures embedded in elastomer.
  • the potential fabrication process which can be applied for fabricating polymer- reinforced silicone-based neural electrodes, as shown in Figure 1, requires a me- chanical carrier on which the electrode array is processed, which will be discarded after finishing the fabrication.
  • a release layer is deposited onto the carrier in order to prevent the uncured elastomer, which is applied in the second step to permanently bond to the carrier.
  • the polymeric reinforcement is laminated to the elastomer.
  • a thin plastic foil is used as reinforcement. This foil will be embedded in elastomer during the next process step.
  • step five a metal foil is laminated onto the elastomer.
  • a laser is used to cut the perimeter of contacts and conductive tracks into the metal foil. All metal not needed (e.g. the metal between two adjacent tracks) is manually removed in step seven.
  • a third layer of elastomer is deposited in process set eight, covering the metal tracks. Electrode sites and contact pads are exposed in an additional laser process and the contour of the electrode array is also cut through all elastomer layers using a laser.
  • step ten the fabricated electrode array is removed from the mechanical carrier.

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  • Health & Medical Sciences (AREA)
  • Animal Behavior & Ethology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Biomedical Technology (AREA)
  • General Health & Medical Sciences (AREA)
  • Radiology & Medical Imaging (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Cardiology (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Neurology (AREA)
  • Neurosurgery (AREA)
  • Orthopedic Medicine & Surgery (AREA)
  • Electrotherapy Devices (AREA)
  • Measurement And Recording Of Electrical Phenomena And Electrical Characteristics Of The Living Body (AREA)

Abstract

The invention relates to a neural electrode. It relates in particular to such an electrode which is able to withstand high mechanical forces, and to a method of fabrication of the same. The invention discloses an elastic neural electrode, having at least one planar metal layer which comprises conductive material and which is bi-laterally covered by an protective elastomer layer, wherein, for reinforcement of the electrode, an additional reinforcement layer comprising reinforcement material is present between the outermost protective elastomer layers.

Description

Neural Electrode and method for fabricating the same
Field of Invention
The invention relates to a neural electrode. It relates in particular to such an elec- trode which is able to withstand high mechanical forces, and to a method of fabrication of the same.
Cross References to related Documents
Schuettler, M., Stiess, S., King, B., Suaning, G.J.: "Fabrication of Implantable Microelectrode Arrays by Laser-Cutting of Silicone Rubber and Platinum Foil". Journal of Neural Engineering, No. 2, p. 121-128 (2005). Schuettler, M., Pfau, D., Ordonez, J.S., Henle, C, Woias, P., Stieglitz, T.: "Stretchable Tracks for Laser-Machined Neural Electrode Arrays", Proceedings of the IEEE Engineering in Medicine and Biology Conference, pp. 1612-1615, (2009). Suaning, G. J., Schuettler, M., Ordonez, J. S., Lovell, N. H.: "Fabrication of Multi-Layer, High Density Micro-Electrode Arrays for Neural Stimulation and Bio-Signal Recording", Proceedings of the IEEE Neural Engineering Conference, pp. 5-8 (2007). Background of the Invention
The established and published [Schuettler 2005] process of fabricating neural electrodes based on metalized elastomer is improved in order to allow a better mechanical stability of the electrode arrays.
Objects of the Invention The current fabrication process utilizes a laser for cutting metal foil in order to generate electrically conducting tracks and contact pads. These tracks and pads are embedded into a silicone elastomer. Since the silicone is very elastic, it cannot protect the delicate metal tracks against strain and other mechanical load as applied, e.g. during implantation surgery.
Summary of the Invention
Currently, there is no fabrication process for silicone-based implantable neural electrode, which employs an additional layer which function is to set the mechanical properties of the neural electrode and to protect the metal structures.
The current layering (elastomer-metal-elastomer) will be extended by at least one additional layer of high tensile strength polymer. This polymer acts as mechanical protection, e.g. strain relieve in order to minimize the force reaching the delicate metal tracks.
It is safer to handle the electrode structure. The risk of damaging the metal tracks during and after implantation are dramatically reduced. Also, if required, the polymer layer can be shaped in a way to locally strengthen (or stiffen) the electrode array, allowing the designer of the electrode to define anisotropic mechani- cal properties (e.g. very high Young's modulus in direction longitudinal to the metal tracks, low Young's modulus in lateral direction).
Brief description of the drawings
A potential fabrication process, which can be applied for fabricating polymer- reinforced silicone-based neural electrodes is shown in Figure 1. Generating anisotropic mechanical properties in an electrode grid by shaping the polymeric reinforcement embedded in the grid elastomer is shown in Figures 2A- C
Detailed description of the Invention
In the following, several preferred embodiments of the invention are given. Subsequently, the process according to the invention is described. The foil used to obtain reinforcement has multiple perforations. Through these holes, the two adjacent layers of elastomer touch each other and establish a strong mechanical link between each other and the polymer foil by interlocking.
In order to enhance the robustness of the neural electrodes, polymer-reinforcement can be combined with giving the conductive metal tracks the shape of meanders. Meander-shaped electrodes permit stretching to some degree without being damaged [Schuettler 2009].
In order to enhance mechanical flexibility of the polymer reinforced neural elec- trode, the polymer foil can be shaped in a way that it only takes up tensile forces in the direction longitudinal to the metal tracks. In contrast, they cannot take up forces in direction lateral to the tracks and also would not affect the flexibility of the elastomer very much (see figure 2).
The neural electrodes could be fabricated in multiple alternating layers of elas- tomer and laser-patterned metal [Suaning 2007]. Depending on the application, one has to decide which layer is to be used for placing the polymeric reinforcement.
Some applications require the use of more than one layer of reinforcement.
Some applications require the use of polymeric reinforcement that has some additional functionality, like: carrying makers for imaging technology (e.g. radiopaque)
- carrying fluidic channels allowing controlled drug release
carrying printed information on how to implant the array or on design aspects like labeling of electrode contacts, etc.
being (partly) made from degradable material, providing mechanical protection only during implantation and during the curing-in process but providing maximal softness for the delicate neural tissue in the long-term use.
The concept of embedding a polymeric reinforcement in elastomers can be applied but is not restricted to laser-patterning of neural electrodes (as shown in figure 1). It is also applicable to photolithography-based patterning of metal layers and/or elastomers, methods based on electroplating of metal on elastomers and other methods employing metal structures embedded in elastomer.
The potential fabrication process, which can be applied for fabricating polymer- reinforced silicone-based neural electrodes, as shown in Figure 1, requires a me- chanical carrier on which the electrode array is processed, which will be discarded after finishing the fabrication. During the first step, a release layer is deposited onto the carrier in order to prevent the uncured elastomer, which is applied in the second step to permanently bond to the carrier. During the third step, the polymeric reinforcement is laminated to the elastomer. Typically, a thin plastic foil is used as reinforcement. This foil will be embedded in elastomer during the next process step.
In step five, a metal foil is laminated onto the elastomer. In the following step, a laser is used to cut the perimeter of contacts and conductive tracks into the metal foil. All metal not needed (e.g. the metal between two adjacent tracks) is manually removed in step seven. A third layer of elastomer is deposited in process set eight, covering the metal tracks. Electrode sites and contact pads are exposed in an additional laser process and the contour of the electrode array is also cut through all elastomer layers using a laser. In step ten, the fabricated electrode array is removed from the mechanical carrier.
Usually, medical grade silicone rubber is used as elastomer. The metal foil could be made from stainless steel, platinum, or similar material. The polymer reinforcement can be made from Polyethylene, Polypropylene, Parylene C, or others. Figure 2A shows an exemplary design of an electrode according to the invention. More precise, an electrode grid with no forces applied, is shown.
Figure 2B shows how tensile forces (arrows) in longitudinal direction (relative to the metal tracks) are taken up by the reinforcement and do not affect the shape of electrode grid.
According to figure 2C, tensile forces (arrows) in lateral direction (relative to the metal tracks) can affect the shape of the electrode grid without being a risk to the delicate metal tracks.

Claims

Claims
1. Elastic neural electrode, having at least one planar metal layer which comprises conductive material and which is bilaterally covered by an protective elastomer layer, wherein, for reinforcement of the electrode, an additional reinforcement layer comprising reinforcement material is present.
2. Electrode according to claim 1, wherein the electrode comprises a stack of a first protective elastomer layer with openings to the outside, a planar metal layer onto which these openings reach, a second protective elastomer layer, a reinforcement layer, and a third protective elastomer layer.
3. Electrode according to claim 1 or 2, wherein a polymer is used as reinforcement material.
4. Electrode according to any of claims 1 to 3, wherein the reinforcement material has multiple perforations for allowing a physical connection between its immediate adjacent layers.
5. Electrode according to any of the preceding claims, wherein the metal layer comprises meander-like conductive paths.
6. Electrode according to any of the preceding claims, wherein the reinforcement layer comprises several parallel arranged and at least partially separated strips of reinforcement material.
7. Electrode according to any of the preceding claims, comprising alternating layers of reinforcement material and conductive material.
8. Electrode according to any of the preceding claims, comprising a multi- tude of reinforcement layers.
9. Electrode according to any of the preceding claims, wherein the reinforcement layer has an added functionality comprised of the group consisting of carrying markers for image technology, carrying fluidic channels, and/or carrying printed information being visible from the outside.
10. Electrode according to any of the preceding claims, wherein at least parts of the reinforcement material are degradable.
11. Electrode according to any of the preceding claims, wherein the elastomer is a medical grade silicone rubber, and wherein the metal layer is made from stainless steel or platinum, and wherein the polymer reinforcement layer is made from Polyethylene, Polypropylene, or from Parylene C.
12. Neural electrode array, comprising a multitude of electrodes as defined in the preceding claims, wherein these electrodes have at least one layer in common.
13. Method for the fabrication of an elastic neural electrode as defined in any of the preceding claims, comprising at least one of the following steps: provision of a mechanical carrier
deposition of a release layer onto the mechanical carrier
application of a first elastomer layer onto the release carrier
lamination of a polymer reinforcement layer onto the elastomer
- application of a second elastomer layer onto the polymer reinforcement layer lamination of a metal layer onto the second elastomer layer
shaping the metal layer
removing unneeded parts of the metal layer
application of a third elastomer layer onto the metal layer
- partially removing the third elastomer layer for exposure of desired sites of the metal layer
cutting out the outer contour of the planar electrode
removing the electrode from the mechanical carrier.
14. Method according to claim 13, wherein the shaping of the metal layer, the removing of unneeded parts of the metal layer, the partial removing the third elastomer, and/or the cutting out of the outer contour is achieved by means of laser processing.
15. Method according to claim 13 or 14, wherein the application of metal is achieved by means of photolithography or electroplating.
16. Method according to claim 13 or 14, wherein the structuring of the elastomer and/or reinforcement layer is achieved by means of photolithography.
17. Method according to any of claims 13 to 16, wherein an additional step of printing information onto the reinforcement layer is carried out.
18. Method according to any of claims 13 to 17, wherein an additional step of perforating the reinforcement layer is carried out.
19. Method according to any of claims 13 to 18, wherein the steps of lamination of a metal layer, shaping the metal layer, removing unneeded parts of the metal layer and application of an elastomer layer onto this metal layer is carried out more than once.
PCT/EP2012/056921 2011-04-15 2012-04-16 Neural electrode and method for fabricating the same WO2012140262A1 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP12718124.6A EP2696934B1 (en) 2011-04-15 2012-04-16 Neural electrode and method for fabricating the same
CN201280029011.1A CN103702714B (en) 2011-04-15 2012-04-16 Nerve electrode and the method manufacturing this nerve electrode
US14/053,130 US9174038B2 (en) 2011-04-15 2013-10-14 Neural electrode and method for fabricating the same

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201161475763P 2011-04-15 2011-04-15
US61/475,763 2011-04-15

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EP (1) EP2696934B1 (en)
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Cited By (4)

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EP2664453A1 (en) * 2012-05-15 2013-11-20 Otto Bock HealthCare GmbH Flexible laminate and method of manufacturing same
WO2017147151A1 (en) * 2016-02-22 2017-08-31 The Charles Stark Draper Laboratory, Inc. Method of manufacturing an implantable neural electrode interface platform
EP3535018A4 (en) * 2016-11-07 2020-07-01 Micro-Leads, Inc. Multi-electrode array with unitary body
AU2017300607B2 (en) * 2016-07-18 2021-05-13 Cortec Gmbh Elastic neural electrode and method for fabricating the same

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DE102011078982B4 (en) * 2011-07-11 2015-02-12 Cortec Gmbh Implantable nerve electrode and method of making an implantable nerve electrode
US10265516B2 (en) 2015-12-10 2019-04-23 The Charles Stark Draper Laboratory, Inc. Closely spaced array of penetrating electrodes
US11027122B2 (en) 2017-01-19 2021-06-08 Micro-Leads, Inc. Spinal cord stimulation method to treat lateral neural tissues
US11395924B2 (en) 2019-01-07 2022-07-26 Micro-Leads, Inc. Implantable devices with welded multi-contact electrodes and continuous conductive elements
CN109663208B (en) * 2019-02-15 2022-04-26 上海交通大学 Flexible nerve electrode based on multilayer stacked structure substrate and manufacturing method

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Cited By (8)

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Publication number Priority date Publication date Assignee Title
EP2664453A1 (en) * 2012-05-15 2013-11-20 Otto Bock HealthCare GmbH Flexible laminate and method of manufacturing same
US9011553B2 (en) 2012-05-15 2015-04-21 Otto Bock Healthcare Gmbh Flexible laminate and method for the production thereof
WO2017147151A1 (en) * 2016-02-22 2017-08-31 The Charles Stark Draper Laboratory, Inc. Method of manufacturing an implantable neural electrode interface platform
US11938314B2 (en) 2016-02-22 2024-03-26 The Charles Stark Draper Laboratory, Inc. Method of manufacturing an implantable neural electrode interface platform
AU2017300607B2 (en) * 2016-07-18 2021-05-13 Cortec Gmbh Elastic neural electrode and method for fabricating the same
US11185685B2 (en) 2016-07-18 2021-11-30 CorTecGmbH Elastic neural electrode and method for fabricating the same
US11298531B2 (en) 2016-07-18 2022-04-12 Cortec Gmbh Elastic neural electrode and method for fabricating the same
EP3535018A4 (en) * 2016-11-07 2020-07-01 Micro-Leads, Inc. Multi-electrode array with unitary body

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EP2696934A1 (en) 2014-02-19
US20140046417A1 (en) 2014-02-13
CN103702714A (en) 2014-04-02
EP2696934B1 (en) 2017-08-09
CN103702714B (en) 2016-08-24
US9174038B2 (en) 2015-11-03

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