WO2012108767A3 - A method of manufacturing a solar cell and solar cell thus obtained - Google Patents

A method of manufacturing a solar cell and solar cell thus obtained Download PDF

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Publication number
WO2012108767A3
WO2012108767A3 PCT/NL2012/050068 NL2012050068W WO2012108767A3 WO 2012108767 A3 WO2012108767 A3 WO 2012108767A3 NL 2012050068 W NL2012050068 W NL 2012050068W WO 2012108767 A3 WO2012108767 A3 WO 2012108767A3
Authority
WO
WIPO (PCT)
Prior art keywords
solar cell
manufacturing
emitters
boron
doping
Prior art date
Application number
PCT/NL2012/050068
Other languages
French (fr)
Other versions
WO2012108767A2 (en
WO2012108767A9 (en
Inventor
Robertus Adrianus Maria Wolters
Johannes Reinder Marc LUCHIES
Wijnand Michiel Godfried VAN HOOFF
Klaas Heres
Original Assignee
Tsc Solar B.V.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from NL2006164A external-priority patent/NL2006164C2/en
Priority claimed from NL2006171A external-priority patent/NL2006171C2/en
Application filed by Tsc Solar B.V. filed Critical Tsc Solar B.V.
Publication of WO2012108767A2 publication Critical patent/WO2012108767A2/en
Publication of WO2012108767A3 publication Critical patent/WO2012108767A3/en
Publication of WO2012108767A9 publication Critical patent/WO2012108767A9/en

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier
    • H01L31/068—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/0224—Electrodes
    • H01L31/022408—Electrodes for devices characterised by at least one potential jump barrier or surface barrier
    • H01L31/022425—Electrodes for devices characterised by at least one potential jump barrier or surface barrier for solar cells
    • H01L31/022441—Electrode arrangements specially adapted for back-contact solar cells
    • H01L31/02245—Electrode arrangements specially adapted for back-contact solar cells for metallisation wrap-through [MWT] type solar cells
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/0224—Electrodes
    • H01L31/022408—Electrodes for devices characterised by at least one potential jump barrier or surface barrier
    • H01L31/022425—Electrodes for devices characterised by at least one potential jump barrier or surface barrier for solar cells
    • H01L31/022441—Electrode arrangements specially adapted for back-contact solar cells
    • H01L31/022458—Electrode arrangements specially adapted for back-contact solar cells for emitter wrap-through [EWT] type solar cells, e.g. interdigitated emitter-base back-contacts
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H01L31/042—PV modules or arrays of single PV cells
    • H01L31/0475—PV cell arrays made by cells in a planar, e.g. repetitive, configuration on a single semiconductor substrate; PV cell microarrays
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic System
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/547—Monocrystalline silicon PV cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Abstract

The process includes the manufacturing of a solar cell comprising boron doping after phosphorous doping, so as to obtain a substrate (10) with a double-diffused field region (33) and emitters (30), suitably selective emitters, together forming a p-i-n-diode construction. In order to prevent the formation of boron rich layers detrimental for carrier lifetime, a diffusion resistance layer (22) is applied within the through-holes (20).
PCT/NL2012/050068 2011-02-08 2012-02-08 A method of manufacturing a solar cell and solar cell thus obtained WO2012108767A2 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
NL2006164 2011-02-08
NL2006164A NL2006164C2 (en) 2011-02-08 2011-02-08 A method of manufacturing a solar cell and solar cell thus obtained.
NL2006171A NL2006171C2 (en) 2011-02-09 2011-02-09 A photovoltaic cell device and a solar panel.
NL2006171 2011-02-09

Publications (3)

Publication Number Publication Date
WO2012108767A2 WO2012108767A2 (en) 2012-08-16
WO2012108767A3 true WO2012108767A3 (en) 2013-01-17
WO2012108767A9 WO2012108767A9 (en) 2013-03-07

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/NL2012/050068 WO2012108767A2 (en) 2011-02-08 2012-02-08 A method of manufacturing a solar cell and solar cell thus obtained

Country Status (1)

Country Link
WO (1) WO2012108767A2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105070787A (en) * 2015-08-18 2015-11-18 东莞南玻光伏科技有限公司 Crystalline silicon solar cell and diffusion method therefor

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20150004488A (en) * 2013-07-02 2015-01-13 한화케미칼 주식회사 Method of preparing the emitter wrap-through type solar cell
US11145774B2 (en) 2018-05-30 2021-10-12 Solar Inventions Llc Configurable solar cells
CN113851562A (en) * 2021-12-01 2021-12-28 南京日托光伏新能源有限公司 Preparation method of weldable double-sided battery suitable for heterojunction MWT

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5468652A (en) * 1993-07-14 1995-11-21 Sandia Corporation Method of making a back contacted solar cell
US20080174028A1 (en) * 2007-01-23 2008-07-24 General Electric Company Method and Apparatus For A Semiconductor Structure Forming At Least One Via

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3903428A (en) 1973-12-28 1975-09-02 Hughes Aircraft Co Solar cell contact design
EP0881694A1 (en) 1997-05-30 1998-12-02 Interuniversitair Micro-Elektronica Centrum Vzw Solar cell and process of manufacturing the same
US20110208372A1 (en) 2008-10-01 2011-08-25 Sunsil A/S Power generation system and method of operating a power generation system
DE102009031151A1 (en) 2008-10-31 2010-05-12 Bosch Solar Energy Ag Solar cell and process for its production

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5468652A (en) * 1993-07-14 1995-11-21 Sandia Corporation Method of making a back contacted solar cell
US20080174028A1 (en) * 2007-01-23 2008-07-24 General Electric Company Method and Apparatus For A Semiconductor Structure Forming At Least One Via

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
GEE J M ET AL: "Emitter wrap-through solar cell", PROCEEDINGS OF THE PHOTOVOLTAIC SPECIALISTS CONFERENCE. LOUISVILLE, MAY 10 - 14, 1993; [PROCEEDINGS OF THE PHOTOVOLTAIC SPECIALISTS CONFERENCE], NEW YORK, IEEE, US, vol. CONF. 23, 10 May 1993 (1993-05-10), pages 265 - 270, XP010113396, ISBN: 978-0-7803-1220-3, DOI: 10.1109/PVSC.1993.347173 *
SMITH D D ET AL: "REVIEW OF BACK CONTACT SILICON SOLAR CELLS FOR LOW COST APPLICATION", 16TH. E.C. PHOTOVOLTAIC SOLAR ENERGY CONFERENCE. GLASCOW, UNITED KINGDOM, MAY 1 - 5, 2000; [PROCEEDINGS OF THE INTERNATIONAL PHOTOVOLTAIC SOLAR ENERGY CONFERENCE], LONDON : JAMES & JAMES LTD, GB, vol. CONF. 16, 1 May 2000 (2000-05-01), pages 1104 - 1107, XP001138830, ISBN: 978-1-902916-18-7 *
ZHAO J ET AL: "High-efficiency PERL and PERT silicon solar cells on FZ and MCZ substrates", SOLAR ENERGY MATERIALS AND SOLAR CELLS, ELSEVIER SCIENCE PUBLISHERS, AMSTERDAM, NL, vol. 65, no. 1-4, 1 January 2001 (2001-01-01), pages 429 - 435, XP004217148, ISSN: 0927-0248, DOI: 10.1016/S0927-0248(00)00123-9 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105070787A (en) * 2015-08-18 2015-11-18 东莞南玻光伏科技有限公司 Crystalline silicon solar cell and diffusion method therefor

Also Published As

Publication number Publication date
WO2012108767A2 (en) 2012-08-16
WO2012108767A9 (en) 2013-03-07

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