WO2012099342A3 - Robot diagnosis system and robot diagnosis method using same - Google Patents

Robot diagnosis system and robot diagnosis method using same Download PDF

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Publication number
WO2012099342A3
WO2012099342A3 PCT/KR2011/009895 KR2011009895W WO2012099342A3 WO 2012099342 A3 WO2012099342 A3 WO 2012099342A3 KR 2011009895 W KR2011009895 W KR 2011009895W WO 2012099342 A3 WO2012099342 A3 WO 2012099342A3
Authority
WO
WIPO (PCT)
Prior art keywords
robot
diagnosis system
module
real
operating state
Prior art date
Application number
PCT/KR2011/009895
Other languages
French (fr)
Korean (ko)
Other versions
WO2012099342A2 (en
Inventor
윤해근
서강열
박효근
Original Assignee
주식회사 해피글로벌솔루션
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사 해피글로벌솔루션 filed Critical 주식회사 해피글로벌솔루션
Publication of WO2012099342A2 publication Critical patent/WO2012099342A2/en
Publication of WO2012099342A3 publication Critical patent/WO2012099342A3/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/16—Programme controls
    • B25J9/1674—Programme controls characterised by safety, monitoring, diagnostic
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • G05B19/406—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by monitoring or safety
    • G05B19/4062—Monitoring servoloop, e.g. overload of servomotor, loss of feedback or reference
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/42—Servomotor, servo controller kind till VSS
    • G05B2219/42306—Excess in error, compare reference with feedback
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/42—Servomotor, servo controller kind till VSS
    • G05B2219/42307—Compare actual feedback with predicted, simulated value to detect run away

Landscapes

  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Robotics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Automation & Control Theory (AREA)
  • Human Computer Interaction (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)

Abstract

The present invention relates to a robot diagnosis system and to a robot diagnosis method using same. In particular, an operating state of a robot may be monitored in real-time to systematize a process schedule of a wafer and a maintenance and repair plan for the robot. For this purpose, the present invention relates to a diagnosis system for diagnosing the operation of each robot disposed within a chamber of each piece of equipment installed in each bay. The diagnosis system includes: a capture module (30) that collects a command signal, which is a preset reference value, applied to a robot (T) to operate the robot (T) and a feedback signal corresponding to an actual operation of the robot (T) from a driver module (20), which is a controller, so as to transmit the collected signals to the outside; a computation module (40) generating computation data through a preset algorithm with respect to a deviation between the command signal and the feedback signal which are transmitted from the capture module (30) in order to ascertain the operating state of the robot (T); and a screen module (50) displaying the resultant value using numerical values and graphs in real-time on the basis of the computation data.
PCT/KR2011/009895 2011-01-20 2011-12-21 Robot diagnosis system and robot diagnosis method using same WO2012099342A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020110006071A KR101098556B1 (en) 2011-01-20 2011-01-20 Robot diagnosis system, diagnosis method using the same
KR10-2011-0006071 2011-01-20

Publications (2)

Publication Number Publication Date
WO2012099342A2 WO2012099342A2 (en) 2012-07-26
WO2012099342A3 true WO2012099342A3 (en) 2012-09-20

Family

ID=45506943

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2011/009895 WO2012099342A2 (en) 2011-01-20 2011-12-21 Robot diagnosis system and robot diagnosis method using same

Country Status (2)

Country Link
KR (1) KR101098556B1 (en)
WO (1) WO2012099342A2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12064882B2 (en) 2018-12-24 2024-08-20 Abb Schweiz Ag Method for diagnosing a robot, device and server

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07160323A (en) * 1993-12-02 1995-06-23 Nissan Motor Co Ltd Operation waveform diagnostic device for industrial robot
JP2001067122A (en) * 1999-08-26 2001-03-16 Matsushita Electric Works Ltd Method for diagnosing ladder program and equipment diagnostic device
KR20070108648A (en) * 2006-05-08 2007-11-13 대우조선해양 주식회사 Welding robot remote monitoring and self-diagnosis system of dockyard
KR20100091237A (en) * 2007-12-27 2010-08-18 가부시키가이샤 알박 Diagnosis system for transport robot

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07160323A (en) * 1993-12-02 1995-06-23 Nissan Motor Co Ltd Operation waveform diagnostic device for industrial robot
JP2001067122A (en) * 1999-08-26 2001-03-16 Matsushita Electric Works Ltd Method for diagnosing ladder program and equipment diagnostic device
KR20070108648A (en) * 2006-05-08 2007-11-13 대우조선해양 주식회사 Welding robot remote monitoring and self-diagnosis system of dockyard
KR20100091237A (en) * 2007-12-27 2010-08-18 가부시키가이샤 알박 Diagnosis system for transport robot

Also Published As

Publication number Publication date
KR101098556B1 (en) 2011-12-26
WO2012099342A2 (en) 2012-07-26

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