WO2012071203A2 - Real space mapping of ionic diffusion and electrochmical activity in energy storage and conversion materials - Google Patents
Real space mapping of ionic diffusion and electrochmical activity in energy storage and conversion materials Download PDFInfo
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- WO2012071203A2 WO2012071203A2 PCT/US2011/060547 US2011060547W WO2012071203A2 WO 2012071203 A2 WO2012071203 A2 WO 2012071203A2 US 2011060547 W US2011060547 W US 2011060547W WO 2012071203 A2 WO2012071203 A2 WO 2012071203A2
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/02—Multiple-type SPM, i.e. involving more than one SPM techniques
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
- G01Q60/30—Scanning potential microscopy
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/60—SECM [Scanning Electro-Chemical Microscopy] or apparatus therefor, e.g. SECM probes
Definitions
- the present disclosure relates generally to measurement apparatuses and methods and, more particularly, to the qualitative and quantitative mapping of ionic diffusion, interfacial electrochemical process, and electrochemical activity in solids using scanning probe microscopy and related methods on the nanometer scale.
- Solid-state energy storage systems based on intercalation and reconstitution chemistries are key components of multiple energy technologies.
- SPM Scanning probe microscopy
- electrochemical kinetics at various length scales of electrochemical systems has been limited because of the well known limits on current detection.
- standard current-based electrochemical methods have proven to be time consuming, and require protective atmospheres or in- situ operation, and offer limited or indirect information on electrochemical properties. Accordingly, these techniques are inadequate for a thorough and complete characterization of the local ionic properties of electrochemically active storage materials.
- Electrochemical processes in energy storage and conversion materials are typically linked with changes of molar volume of a host compound (chemical
- the strain-bias coupling mediated by an ionic motion or generally electrochemical process serves as a basis for detection of electrochemical phenomena in the nanoscale, and this approach is extended to include a family of spatially-resolved, voltage and time spectroscopic techniques.
- the method disclosed herein extends to measurement of electrochemical activity of both anionic and cationic species in a wide variety of materials, including battery materials, fuel cell materials, and the like,
- a method of mapping activity on an electrochemically active surface of a material includes applying an electrical excitation signal to the material or device (global excitation). Movement of mobile ions of the material in response to the electrical excitation signal is detected locally by an SPM tip (local detection) and an electrochemical response of the material induced by the movement of the mobile ions is measured.
- An alternative method for measuring ion motion is made through direct time detection by applying a voltage pulse and observing how the signal relaxes with the voltage pulse.
- the measurement is correlated directly the diffusion time of the ions in the specimen, because the relaxation of the signal or the time change of the signal is controlled by how the ions redistribute in the specimen.
- the dynamics of the change in the signal offers a reliable way to trace the ionic diffusion.
- a method of mapping activity on an electrochemically active surface of a ionic material includes applying a pulsed electrical excitation signal to a nanoscale volume of the material though a movable SPM probe (or nanoindentor, or other local probe technique) to induce movement of mobile ions in the nanoscale volume of the material (local excitation).
- the movement of the mobile ions causes lattice strain in the material and a vertical or lateral displacement, or both, of a nanoscale surface region of the material.
- the resultant displacement of an AFM microscope tip is measured as flexural and torsional components of cantilever displacement (or by an equivalent detection system), providing information on ionic activity below the probe.
- an apparatus that maps activity on an
- electrochemically active surface of a material includes a controller module configured to generate electrical excitation signals, where the excitation signals are applied to a nanoscale surface region of the material.
- the excitation signal can be a single frequency (sinusoidal) wave, multiple frequencies (with or without feedback to maintain resonance conditions), or a broad-band excitation signal.
- a probe in contact with the surface of the material is configured to detect intercalation of mobile ions, and interfacial or bulk electrochemical reactions through a vertical or in-plane (lateral) displacement of the nanoscale surface region of the material.
- a detector is coupled to the probe that measures the electromechanical response at the nanoscale surface region of the material based on the displacement of the mobile ions.
- the probe can be modified to include ion-specific coatings. The measurements can be performed in ambient, controlled gas, vacuum, or in liquid environments.
- FIGs. 1A and 1 B are schematic diagrams illustrating a probe tip contacting a specimen in accordance with exemplary embodiments of the disclosure
- FIG. 2 illustrates a functional block diagram of an exemplary atomic force microscopy (AFM) system in accordance with an embodiment of the disclosure
- FIG. 3A depicts the topography of the polycrystalline UC0O 2 surface of a UC0O2 sample
- FIG. 3B depicts the deflection images of the polycrystalline UC0O 2 surface of FIG. 2A using the probe tip of the system illustrated in FIG. 1 ;
- FIG. 3C is a schematic drawing of the electrical connection of the probe tip in contact with a sample;
- FIGS. 3D and 3E illustrate deflector images of the L1C0O 2 surface showing the affect of a bias pulse to control local lithium concentration within the polycrystalline
- FIG. 4A illustrates an exemplary map of the LiCoO 2 surface illustrated in FIG.
- FIG. 4B depicts measured contact resonance peaks resulting from an AC bias of a voltage applied to the tip at the different locations illustrated in FIG. 3A, in accordance with an embodiment of the disclosure
- FIG. 4C illustrates the spatial distribution of the resonance frequencies on the surface of a sample
- FIG. 4D illustrates a spatial map of resonant amplitude indicative of regions of dissimilar response of the LiCoO 2 , in accordance with an embodiment of the disclosure
- FIG. 5 is a plot of Li ion concentration versus time for two locations in the sample of FIG. 3C;
- FIG. 6 is a plot of a voltage pulse over a 2 ms time interval application to the sample of FIG. 3C;
- FIG. 7A illustrates a spatial map of a displacement loop in the sample of FIG. 3C measured with 15V D c bias;
- FIGs. 7B-7C illustrate expanded view of the spatial map of FIG. 7A
- FIG. 8 is a plot of extracted displacement loops of three areas designated in the map of FIG. 7C;
- FIGs. 9A-9D illustrate a spatial map of a displacement loops resulting from Li ion flow upon repeated cycling of a high-frequency bias of the sample of FIG. 3C;
- FIG. 10 is a plot of displacement hysteresis corresponding to the spatial maps of FIGs. 9A-9D.
- FIG. 1 1 is a plot of charge curves for a pristine sample and a cycled sample of FIG. 3C.
- the exemplary systems and methods described herein are related to various systems and methods that allow for the real space mapping of ionic diffusion and electrochemical reactivity in energy storage and conversion and electroresistive materials and devices based on SPM-based detection of local strains induced by ion transport (for example, diffusion or migration or both), and interfacial and bulk electrochemical processes. More particularly, the systems and methods may allow for the spatially resolved qualitative and quantitative measure of local ion dynamics on the nanometer scale through the detection of strain that is developed due to ion
- the methods described herein may be universally applied to study of cationic and anionic motion at the nanoscale volume level with high resolution in energy storage and generation systems such as, but not limited to, Li-ion batteries, oxygen- containing fuel cells, and electroresistive and memristive devices.
- the specific embodiments described herein relate to the methodology employed to enable real space mapping of ionic diffusion and electrochemical reactivity in Li-ion batteries and in oxygen-ion conductive solid surfaces.
- the oxygen reduction/evolution reaction phenomena on oxygen-conductive surfaces is mapped on the scale of several nanometers, well below the limit of micro- contact measurements. This allows for direct identification of local electrochemical reactivity and providing insight into local kinetic parameters.
- Li ion electrochemical activity is mapped in a Li ion battery material.
- bias-induced ionic dynamics including both transport and reactions are determined in a nanoscale surface region of a specimen through bias-induced volumetric changes are determined within a very small portion of the specimen.
- the mobile ion electrochemical activity in such extremely small volumes of a specimen is detected and measure through contact of a surface of the specimen with an SPM probe.
- the SPM probe has a tip that is extremely small and is capable of detecting very small changes in the surface of a material in contact with the probe tip.
- a method and an apparatus for performing the method are described in which a quantitative measure of local ion dynamics on the nanometer scale is carried out through the detection of strain by means of contact with an SPM probe tip.
- the strain in the material in contact with the probe is developed as a result of electrochemically-induced ion redistribution (either transport or reaction) when electrical fields are applied to an electrochemically active material.
- This technique is defined herein as
- the tip can be coated with a solid electrolyte that is sensitive to a specific mobile ion.
- the probe tip can be coated with a cation-containing electrolyte, such as a Li or Na-containing electrolyte or other anion, or a anion-containing electrolyte, such as an electrolyte including oxygen, fluorine, hydroxyl, and the like.
- a high-frequency period voltage bias is applied between the cathode and the anode electrodes of a specimen, such as battery electrode material, and the SPM probe acts as a passive probe of the local periodic surface displacement generated by the ion redistribution and the associated changes in the molar volume of the specimen.
- the (SPM) tip concentrates a periodic electric field in a nanoscale volume of material. In either method, the associated changes in molar volume result in local surface expansion and contraction, or lateral motion, or both that is transferred to the SPM probe and detected by microscope electronics coupled with the probe.
- the extremely measurement high sensitivity of dynamic SPM potentially on the order of at least about 1 picometer and including, for example, a range of about 3 to about 10 picometers, enables the detection of ion concentration changes on the order of 10% in 300 nm 3 volumes for typical values of chemical expansivity (Vegard) coefficients.
- Vegard chemical expansivity
- FIG. 1 schematically illustrates the two methods described above.
- a specimen 1 is subjected to analysis by an SPM probe 2.
- a pulsed voltage is applied to electrodes 3 and 4 to impart a periodic electric bias to an SPM probe 2.
- electrochemically active material 5 An electric field 7 is set up in electrochemically active material 5 causing mobile ions to undergo chemical reactions with atoms making up the grain structures within the material 5. These reactions lead to changes in a nanoscale volume V of material 5 creating a strain force 8 that causes surface 9 of material 5 to deform. The surface deformation is detected by SPM probe 12.
- FIG. 1 B illustrates the alternative embodiment in which the SPM probe 2 generates a periodic electric field in a nanoscale volume V of material 5.
- SPM probe 2 detects strain force 8 in the nanoscale volume V as a vertical or lateral, or a combined vertical and lateral displacement of surface 9.
- the volumetric changes are created by the chemical reactions and transport of mobile ions in the nanoscale volume.
- FIG. 2 illustrates an exemplary scanning probe microscopy (SPM) system 10 that implements an electrochemical strain microscopy (ESM) method of the present disclosure.
- the ESM method is based on the application of a high-frequency periodic electric bias between an anode and a cathode of a Li-ion thin film battery.
- a lock-in technique or equivalent is used to determine an oscillatory surface displacement on top of the Li-ion thin film battery.
- the amplitude of the surface oscillations may be directly related to the concentration changes of Li ions that is induced by the applied electrical bias (Vac) in small material volumes.
- Vac electrical bias
- a relationship between a local lattice parameter and the Li ion concentration within a thin film battery is defined by the Vegard tensor, or by defining the dependence of molar volume compounds on ion concentration.
- the amount of bias-induced Li-ion flow is determined both by Li-ion migration (field driven) and diffusion (concentration driven migration), both of which are essential for battery functionality.
- the alternative modes of excitation can include, but are not limited to the multifrequency (for example, two or more) at the fixed frequency, multiple frequency excitations with the use of the feedback loop to maintain resonance conditions, frequency sweeps at each spatial/voltage location, and broad band excitation (band excitation) without or with feedback.
- These alternative excitation methods are used to ensure the imaging at the cantilever resonance (or adjusting driving frequency for variations in contact resonance frequencies along sample surface). Imaging at the resonance is preferred, but is not a required mode of ESM.
- SPM system 10 includes an atomic force microscopy (AFM) system, although other SPM implementations may be used.
- AFM atomic force microscopy
- SPM system 10 includes an AFM 12, a sample 16, a scanner 18, and an add-on module 20, shown in phantom.
- AFM 12 may be any of a number of commercially-available AFM systems, or equivalent instrumentation, such as, for example, a nanoindentor or a profilometer, or the like.
- Cantilever 24 is equipped with a probe tip 26, referred to simply as a "tip.”
- AFM 12 further includes a light source 28 such as a laser diode that generates a beam of light that is directed towards cantilever 24 and reflected toward a detector 30, such as, for example, a four-quadrant photodetector.
- the reflected beam contains information regarding the deflection undergone by cantilever 24.
- AFM system 10 may include additional components, such as additional circuitry, firmware and/or processing modules. Portions of AFM system 10 may be implemented by one or more integrated circuits (ICs) or chips.
- controller module 22 and add-on module 20 may respectively include one or more modules or components.
- FIG. 3A depicts the topography of the polycrystalline UC0O2 surface of sample 16.
- FIG. 3B depicts the deflection images of the polycrystalline LiCoO 2 surface using the tip.
- FIG. 3C illustrates a schematic drawing of the electrical connection of the tip in contact with sample 16.
- sample 16 includes an all- solid thin-film Li-ion battery test structure including a layered UC0O2 bottom cathode 24, a lithium phosphorous oxynitride (LiPON) electrolyte 26, and a top amorphous Si anode 28, all of which are deposited on a Au/Ni-coated AI2O3 substrate (shown in FIG. 9).
- Layered L1C0O2 is widely used as a cathode material in rechargeable lithium ion batteries and is relatively stable when in contact with ambient and aqueous
- FIG. 3D illustrates a cantilever deflection image of the L1C0O2 surface prior to the application of several approximately 2-ms bias pulses of approximately 12 Volts to the stationary tip 26 (shown in FIG. 6).
- Tip 26 is positioned at a single point A in contact with the LiCoO 2 surface in an area where step edges are present within sample 16.
- the AFM measurements described in the present disclosure were performed with tip 26 in direct contact with the UC0O 2 surface in air atmosphere and without any additional protective coating.
- this image illustrates the cantilever deflection image of the UC0O 2 surface after the application of the approximately 2-ms bias pulses (FIG. 6).
- the topography of the UC0O 2 surface at point B in FIG. 3E has changed relative to point A of FIG. 3D. This topography change indicates that a variation in material volume occurred as a result of a change in lithium
- the step edge geometry of the UC0O 2 surface remained substantially invariant prior to and after the application of the approximately 2-ms bias pulses.
- the comparative images illustrated in FIGs. 3D and 3E demonstrate the affect of applying local, short, high-voltage pulses that are well above the equilibrium redox potentials, to the UC0O 2 surface (in particular the cathode material) of sample 16.
- the induced electrochemical activity of the Li ions caused by the intercalated or de-intercalated lithium ions in the sample, enables the detection of molar volume changes and deformation of the LiCoO 2 surface.
- the redistribution of lithium ions permits the quantitative mapping of ionic drifting and electrochemical activity in this class of materials using an SPM technique.
- a high-frequency periodic voltage Vac is applied to the tip to measure ionic currents resulting from the local redistribution of lithium ions at the LiCoO 2 surface (indicated as V A c in FIG. 3C).
- V A c the electric field generated by the application of the periodic voltage V A c alters the local electrochemical potential of the lithium ions within the L1C0O 2 surface of sample 16.
- the use of a resonance enhancement technique enhances the sensitivity by a factor of approximately 30 to approximately 100.
- AC voltages of varying frequencies are applied using a band excitation method to take advantage of the contact resonance
- the AC voltage frequency can range from about 1 kHz to about 10 MHz and including smaller ranges, for example, about 300 kHz to about 400 kHz.
- the tip- surface contact may be characterized as a harmonic oscillator having a resonant frequency determined by the Young's modulus of UC0O 2 and the contact area between tip 26 and sample 16.
- An amplitude of the resonance of the surface displacement at the tip-surface contact corresponds to the lithium ion mobility under the influence of an electric field.
- the resonant amplitude of the surface displacement measured in nanometers, may be determined, which yields information about the local bias-induced lithium concentrations and thus the lithium transport in the UC0O 2 surface.
- V ac is an alternating current (AC) voltage amplitude
- D is the lithium diffusion coefficient
- ⁇ is an effective Vegard coefficient that expresses an approximate and empirical linear relationship between lattice size and lithium
- FIG. 4B depicts the measured contact resonance peaks resulting from an AC bias of approximately 1 V (peak-to-peak) applied to tip 26 at the three locations designated as circles “a", “b", and “c," shown in FIG. 4A.
- FIG. 4C illustrates the spatial distribution of the resonance frequencies on the surface of sample 16. The spatial distribution is indicative of a strong systematic variation that reflects changes in the effective Young's modulus for the different grain orientations and surface topography variations.
- FIG. 4D illustrates a spatial map of resonant amplitude indicative of regions of dissimilar response of the LiCoO 2 . In other words, the spatial map illustrates variations in lithium diffusion and intercalation behavior based on the high-frequency excitation at the three locations a, b, and c.
- Li ion concentration was investigated SPM probe analysis at a grain boundary and in at a location away from the grain boundary of sample 16
- FIG. 5 illustrates the change in Li ion concentration measured consecutively in two different locations on the anode surface following the application of a voltage pulse having an amplitude of -18 V and a length 30 ms.
- the pulse was applied to the cathode (the bottom electrode) of the battery with the anode (top electrode) grounded.
- the pulse length was set in the millisecond range in order to minimize the changes in the charge state of the battery during imaging and to keep the measurement time of a single point sufficiently low to enable mapping on spatially resolved grids with a large number of sampling points.
- the applied pulse amplitudes were much higher than typical battery operation voltages.
- the battery showed no signs of damage (such as rapid irreproducible changes and slow drifts in the ESM image contrast, visible surface damage), since the millisecond pulses are also much shorter than possible decomposition reaction kinetics.
- the ESM response is increased after the voltage pulse and decays with a relaxation time on the order of about 100 ms.
- the relaxation is directly related to the redistribution of the Li ions by diffusion transport, since the measurements are performed in the zero-field state, following the initial voltage pulse. Assuming the diffusion coefficient for a Li-ion is about 10 "14 to 10 "12 m 2 /s, the length scale over which Li-ions diffuse during 100 ms can be about 30-300 nm, which is consistent with the signal generation volume for SPM.
- Li-ion diffusion length is comparable to the effective tip size, hence providing an optimal compromise between spatial resolution and signal strength.
- This time scale is also compatible with spectroscopy mapping, where the data is acquired over a grid of points over the sample surface.
- the measured ESM response during the bias sweep show hysteretic behavior, and the mechanisms for hysteresis loop formation can be qualitatively understood from the relaxation curve in FIG. 5. If the application of the bias pulse of given amplitude does not result in Li-ion redistribution, or the induced relaxation is much faster than the time interval of the measurements in the bias-off state, the ESM signal remains constant (horizontal line). Another explanation is the total lack of Li ions in the probed volume. If the relaxation time is larger than the time between the voltage pulse and the measurement, the hysteresis loop opens up. The area under the loop is directly proportional to the changes in Li-ion concentration induced during the voltage cycle, and hence can be used to investigate the Li-ion motion in amorphous Si under the influence of an electric field.
- FIGs. 7A-7B illustrate a 300 nm scan size with 6 nm grid size and show that the observed contrast (hot spots within columnar grains) are measured reproducibly and that the loop opening is not homogeneous along the boundaries, providing information on Li-ion conduction channels on the nanometer scale.
- FIG. 8 shows extracted displacement loops from the three different areas indicated by the circles in FIG. 7C. Circle “a” indicates the boundary, circle “b” indicates a hot spot area within the grain, and circle “c” indicates a low-response region.
- the very sharp boundary features of the order of 20 nm lateral size suggests that the signal generating strain is very close to the surface.
- Amorphous Si films can exhibit a network of low density regions forming channels through the film. These low-density channels may offer a preferred or hindered Li conduction path.
- the ESM data identifies the high-contrast regions as those at which Li-diffusion times are comparable with the experimental time, while zero contrast in grains can be attributed both to much higher and much lower diffusion times, or the lack of Li-ions.
- the mismatch in the electric conductivity between low- and high-density material can lead to the electric field enhancement at the topography minima, stimulating the one-dimensional
- FIGs. 9A-9D show the evolution of the loop opening in the same area for repeated sinusoidal cycles of 1 x 10 4 , 3 x10 4 ,1 x 10 5 , and 6 x10 5 cycles ,
- FIG. 9A shows the hot spots visible in FIG. 9A continuously disappear, while, as shown in FIGs. 9B-C, the Li-ion flow at boundary-like features strongly increases. This shows that the Li-ions saturate the low density channels first, followed by sideways diffusion, resulting in broader features in the map shown in FIG. 9D.
- FIG. 10 shows the evolution of the hysteretic ESM loops for the boundary regions with increasing cycle number. Note that the sequence of images in FIGs. 9A-9D provides a direct nanoscale view in the Li ion flow in the Si anode on a nanoscale surface volume, and the Li ion evolution with the charge state as further described below.
- the open circuit voltages of the pristine and cycled sample were both near zero as would be expected for an uncharged pristine Si-LiCo02 battery.
- the fresh sample was charged up to 4 V and the capacity of the battery can be extracted to 1.62 ⁇ , which is somewhat above the theoretical calculated capacity of 1.16 ⁇ , estimated for extraction of half of the lithium, to Li 0 . 5 CoO2.
- the cycled sample (also shown in FIG. 9D), was charged up to 4.2 V, but showed a strongly reduced capacity of only 0.44 ⁇ compared to the theoretical one of 1.07 mAh.
- nanoindentation is another method that can be used measurement of volumetric changes in a material.
- an indenter having a pyramid geometry is employed and the area of the indent is determined using the known geometry of the indentation tip.
- Various parameters, such as load and depth of penetration are measured and a load-displacement curve is used to determine the mechanical properties of the material. Accordingly, the invention is not restricted except in light of the attached claims and their equivalents.
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Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE112011103902T DE112011103902T5 (en) | 2010-11-24 | 2011-11-14 | Real-space imaging of ionic diffusion and electrochemical activity in energy storage and conversion materials |
| JP2013540968A JP2014502354A (en) | 2010-11-24 | 2011-11-14 | Real-space mapping of ion diffusion and electrochemical activity in energy storage materials and energy conversion materials |
| GB1307619.5A GB2498885B (en) | 2010-11-24 | 2011-11-14 | Real space mapping of ionic diffusion and electrochemical activity in energy storage and conversion materials |
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US45851010P | 2010-11-24 | 2010-11-24 | |
| US61/458,510 | 2010-11-24 | ||
| US13/291,480 US8719961B2 (en) | 2010-11-24 | 2011-11-08 | Real space mapping of ionic diffusion and electrochemical activity in energy storage and conversion materials |
| US13/291,480 | 2011-11-08 |
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| WO2012071203A2 true WO2012071203A2 (en) | 2012-05-31 |
| WO2012071203A3 WO2012071203A3 (en) | 2012-07-19 |
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| PCT/US2011/060547 Ceased WO2012071203A2 (en) | 2010-11-24 | 2011-11-14 | Real space mapping of ionic diffusion and electrochmical activity in energy storage and conversion materials |
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| US (1) | US8719961B2 (en) |
| JP (1) | JP2014502354A (en) |
| DE (1) | DE112011103902T5 (en) |
| GB (1) | GB2498885B (en) |
| WO (1) | WO2012071203A2 (en) |
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| US9541576B2 (en) | 2014-07-28 | 2017-01-10 | Ut-Battelle, Llc | Electrochemical force microscopy |
| US20170315148A1 (en) * | 2016-05-02 | 2017-11-02 | University Of Washington Through Its Center For Commercialization | Scanning thermo-ionic microscopy |
| JP6943811B2 (en) * | 2018-06-11 | 2021-10-06 | 本田技研工業株式会社 | Ion behavior detector, secondary battery device and scanning probe microscope |
| JP7313297B2 (en) * | 2020-02-12 | 2023-07-24 | 本田技研工業株式会社 | Ion Behavior Detector, Secondary Battery Device and Scanning Probe Microscope |
| WO2021193799A1 (en) * | 2020-03-26 | 2021-09-30 | 国立大学法人大阪大学 | Vibration component measurement device, kelvin probe force microscope, and vibration component measurement method |
| US20240094241A1 (en) * | 2020-12-25 | 2024-03-21 | Tohoku University | High-frequency enhanced electrochemical strain microscope and high-frequency enhanced electrochemical strain microscopy using the same |
| CN113092826B (en) * | 2021-03-05 | 2023-04-07 | 中山大学 | Scanning probe microscope system and measuring method thereof |
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| JP2919119B2 (en) | 1991-06-05 | 1999-07-12 | キヤノン株式会社 | Scanning probe microscope and recording / reproducing device |
| US5448399A (en) | 1992-03-13 | 1995-09-05 | Park Scientific Instruments | Optical system for scanning microscope |
| US5517027A (en) | 1993-06-08 | 1996-05-14 | Mitsubishi Denki Kabushiki Kaisha | Method for detecting and examining slightly irregular surface states, scanning probe microscope therefor, and method for fabricating a semiconductor device or a liquid crystal display device using these |
| US5898176A (en) | 1994-12-27 | 1999-04-27 | Japan Science And Technology Corp. | Element analyzing method with a scanning type probe microscope and super short high voltage pulse applying method using the element analyzing method |
| US6134971A (en) | 1998-08-27 | 2000-10-24 | University Of Hawaii | Stress induced voltage fluctuation for measuring stress and strain in materials |
| JP2004167643A (en) * | 2002-11-21 | 2004-06-17 | Japan Science & Technology Agency | Method and apparatus for producing fine metal atomic structure |
| DE102004036971B4 (en) | 2004-07-30 | 2009-07-30 | Advanced Micro Devices, Inc., Sunnyvale | Technique for the evaluation of local electrical properties in semiconductor devices |
| SE0800670A0 (en) | 2008-03-25 | 2009-03-10 | Nanofactory Instruments Ab | Nanoscale charge carrier mapping |
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2011
- 2011-11-08 US US13/291,480 patent/US8719961B2/en active Active
- 2011-11-14 WO PCT/US2011/060547 patent/WO2012071203A2/en not_active Ceased
- 2011-11-14 GB GB1307619.5A patent/GB2498885B/en not_active Expired - Fee Related
- 2011-11-14 DE DE112011103902T patent/DE112011103902T5/en not_active Withdrawn
- 2011-11-14 JP JP2013540968A patent/JP2014502354A/en active Pending
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| DE112011103902T5 (en) | 2013-10-10 |
| US8719961B2 (en) | 2014-05-06 |
| JP2014502354A (en) | 2014-01-30 |
| GB2498885A (en) | 2013-07-31 |
| WO2012071203A3 (en) | 2012-07-19 |
| US20120125783A1 (en) | 2012-05-24 |
| GB2498885B (en) | 2017-10-04 |
| GB201307619D0 (en) | 2013-06-12 |
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