WO2011052866A1 - Débitmètre non invasif, et système de distribution utilisant un tel débitmètre - Google Patents

Débitmètre non invasif, et système de distribution utilisant un tel débitmètre Download PDF

Info

Publication number
WO2011052866A1
WO2011052866A1 PCT/KR2010/002618 KR2010002618W WO2011052866A1 WO 2011052866 A1 WO2011052866 A1 WO 2011052866A1 KR 2010002618 W KR2010002618 W KR 2010002618W WO 2011052866 A1 WO2011052866 A1 WO 2011052866A1
Authority
WO
WIPO (PCT)
Prior art keywords
fluid
pipe
flow rate
flow
electrical signal
Prior art date
Application number
PCT/KR2010/002618
Other languages
English (en)
Korean (ko)
Inventor
김재달
김형석
Original Assignee
주식회사 에이앤디코퍼레이션
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사 에이앤디코퍼레이션 filed Critical 주식회사 에이앤디코퍼레이션
Publication of WO2011052866A1 publication Critical patent/WO2011052866A1/fr

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/66—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by measuring frequency, phase shift or propagation time of electromagnetic or other waves, e.g. using ultrasonic flowmeters
    • G01F1/666—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by measuring frequency, phase shift or propagation time of electromagnetic or other waves, e.g. using ultrasonic flowmeters by detecting noise and sounds generated by the flowing fluid
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H3/00—Measuring characteristics of vibrations by using a detector in a fluid

Definitions

  • the present invention relates to a non-cutting flow rate change detector and a dispensing system including the same. Specifically, a non-cutting flow rate change detector which is installed outside the pipe without cutting the pipe and detects an abnormality of the flow rate and the fluid flow, and the same A dispensing system is included.
  • a flow rate change detector is installed directly on a flow path through which a fluid flows to sense a flow rate.
  • the flow rate change detector is installed inside the pipe and configured to detect the flow of the fluid, there are problems such as corrosion of the detection sensor by the fluid and contamination of the fluid by the detection sensor.
  • the technical problem to be achieved by the present invention is installed outside the pipe without cutting the pipe, non-cutting flow sensing sensor for detecting the flow of the fluid by the vibration applied to the pipe in a non-contact state with the fluid and dispensing having the same It is to provide a system.
  • Non-cutting flow rate change sensor for achieving the technical problem is located on the outside of the pipe, the sensing sensor 110 for detecting the vibration according to the flow of the fluid inside the pipe to convert into an electrical signal; And an amplifier 120 for amplifying the electrical signal.
  • Non-cleavable flow rate change sensor comprises a buffer layer that receives the vibration of the pipe in contact with the pipe from the outside of the pipe; A pickup in contact with the buffer layer to convert vibrations received from the buffer layer into an electrical signal; And an amplifier configured to receive and amplify the electrical signal.
  • the dispensing system includes a pump 320 for pumping fluid from a storage vessel 310; A filter 330 for removing contaminants from the fluid; A valve 340 for adjusting the amount of fluid; And a flow rate change detector 100 which detects an amount of flow of the fluid by contacting the pipe 350 through which the fluid flows, and detects an abnormal operation of the pump, the filter, or the valve.
  • the flow rate change sensor according to the present invention does not come into contact with the fluid and is installed outside the pipe to prevent corrosion of the flow rate change sensor or contamination of the fluid generated in the prior art, so that the detection characteristics of the sensor are improved, It has the effect of increasing the lifespan.
  • the present invention is constructed by constructing and modeling the data on the characteristics of the pipe oscillation when the fluid flows in advance and then modeling and comparing the real-time vibration to the flow rate, the pressure of the fluid, the presence of bubbles and the configuration that the pipe passes Not only can you measure, check, or predict the abnormal operation of parts, but you can also know the position of the pipe with abnormality only by looking at the waveform outputted to the abnormal waveform analysis unit. It can work.
  • the dispensing system including the flow rate change sensor according to the present invention can determine whether there is an abnormality by comparing the pump operation, valve operation, filter clogging and the like with the modeled normal waveform.
  • the present invention is provided with an alarm sound generating device has the effect that the user can immediately determine whether the abnormal flow of the fluid even if the user hears only the alarm sound in the proximity of the dispensing system.
  • FIG 1 illustrates an embodiment of an uncut flow rate change detector according to the present invention.
  • 9 to 14 show the three-dimensional shape of the second embodiment of the sensor shown in FIG. 1.
  • 15 to 17 illustrate waveform graphs output from the abnormal waveform analyzer illustrated in FIG. 1.
  • FIG. 18 illustrates one embodiment of a dispensing system to which a non-cutting flow change detector according to the present invention is applied.
  • FIG 1 illustrates an embodiment of an uncut flow rate change detector according to the present invention.
  • the non-cut flow rate change detector shown in FIG. 1 includes a detection sensor 110, an amplifier 120, and an abnormal waveform analyzer 130.
  • the fluid includes a liquid and a gas.
  • the semiconductor process include photoresist (PR), thinner, flowable oxide (FOX), and nitrogen gas (N2).
  • the detection sensor 110 is located outside of the pipe without cutting the pipe, and detects the vibration according to the flow of the fluid inside the pipe and converts it into an electrical signal.
  • the sensing sensor 110 may use a piezoelectric element (piezo sensor), an infrared sensor, or the like shown in FIG. 1, and means a means capable of detecting vibration and converting it into an electrical signal.
  • piezoelectric element piezo sensor
  • infrared sensor or the like shown in FIG. 1
  • the material of the pipe is, for example, polymer, plastic, metal, rubber, or the like.
  • the amplification unit 120 Since the amplification unit 120 has a weak magnitude of the electric signal transmitted from the detection sensor, the amplification unit 120 amplifies and outputs the amplified signal to the waveform abnormality analysis unit 130.
  • the abnormal waveform analysis unit 130 receives the electrical signal transmitted from the amplification unit 120 and analyzes the data with the pre-modeled data to determine the position of the pipe in which there is an abnormality in the flow of the fluid, the presence of bubbles, the flow rate and the fluid. Pressure can be sensed.
  • the abnormal waveform analyzer 130 data-processes a plurality of measurement results according to various conditions, models the data, and provides or processes data on a waveform range that is an extracted reference. Includes features
  • the abnormal waveform analysis unit compares the electric signal input from the amplification unit with a reference waveform range in real time and compares the flow rate, the pressure of the fluid, the presence or absence of bubbles, or the position of the pipe with clogging or abnormality. To derive.
  • the abnormal waveform analysis unit 130 extracts an average value and a reference waveform range having no abnormality in the flow of the fluid from values measured several times in the normal state of the fluid flow, and a signal input in real time exceeds or falls short of the reference range.
  • the apparatus may further include an abnormal signal notification device for notifying that the abnormal state.
  • the reference waveform range allows a predetermined deviation voltage ( ⁇ V) or a predetermined deviation time ( ⁇ t) for determining that the flow of the fluid is in a normal state from a value obtained by accumulating and averaging the waveforms for detecting the flow of the flow rate.
  • the deviations are, for example, the peak voltage of the waveform, a time delay from a normal waveform, or the like.
  • the flow rate change sensor according to the present invention may be provided with an elastic member for mitigating the impact transmitted to the detection sensor 110, the elastic member may be a plurality of (151, 152).
  • the first elastic member 151 has a form surrounding the detection sensor 110 and the pipe.
  • the second elastic member 152 is positioned to face the first elastic member 151 and has a form surrounding the detection sensor 110 and the pipe.
  • the first elastic member 151 and the second elastic member 152 may be any material having an elastic material that surrounds the sensing sensor 110 to mitigate impact and appropriately transmit vibration of the pipe.
  • the present invention may further include a load control unit 160 is attached to the opposite side of the portion of the second elastic member 152 in contact with the pipe to adjust the intensity of vibration transmitted to the detection sensor 110.
  • the load adjusting unit 160 may adjust the pressure applied to the pipe and the detection sensor by, for example, a screw or a spring.
  • the flow rate change detector according to the present invention includes an upper cover 172 and a lower cover 171, which are outer cases of the detection sensor 110, the first elastic member 151, and the second elastic member 152. Equipped.
  • the upper cover 172 and the lower cover 171 are fastened by a screw 170.
  • the flow rate change sensor according to the present invention can be easily detached from the pipe by the screw 170.
  • first elastic member and the second elastic member are separated while facing each other, but they may be joined together to surround at least a part of the pipe.
  • FIG. 2 to 8 illustrate three-dimensional shapes in multiple angles of the sensor shown in FIG. 1.
  • 2 to 8 includes a piezoelectric element 110, a first elastic member 151, a second elastic member 152, a top cover 172, a bottom cover 171, and a load adjuster 160. ) And screw 170.
  • a piezoelectric element 110 for a description of each component, refer to the detailed description of FIG. 1.
  • 9 to 14 include a buffer layer 191, a pickup 192, an elastic member 153, and a cover 173, which is an outer case.
  • the buffer layer 191 protects the pipe 140 and transmits vibrations of the pipe 140 to the pickup 192. As shown in FIG. 9, the buffer layer 191 preferably has a shape surrounding at least a portion of the pipe 140. In addition, the buffer layer 191 may be implemented with a hard material such as metal or plastic.
  • the pick-up 192 (pickup) is formed in the shape of a pointed tip like a needle and in contact with the buffer layer 191, converts the vibration received from the buffer layer 191 into an electrical signal.
  • the elastic member 153 supports the pickup 192 and appropriately controls the vibration from the pipe and mitigates the impact.
  • the elastic member 153 may be any elastic material.
  • the cover surrounds the elastic member 153 to form an outer case.
  • the sensing sensor illustrated in FIGS. 9 to 14 differs in that the sensing sensor 110 of FIG. 1 is replaced with the buffer layer 191 and the pickup 192.
  • the electrical signal is transferred to an amplification unit (not shown in FIGS. 9 to 14, see FIG. 1) through the lead wire 181 and amplified.
  • the waveform analysis unit (not shown in FIG. 9 to FIG. 14, see FIG. 1) analyzes the waveform and flows through the pipe 140, the pressure of the fluid, the presence or absence of bubbles, and the pipe 140. Detect the position of the pipe 140 is clogged or abnormal.
  • 15 to 17 show waveforms observed in the present invention as shown in FIG. 1 and will be described in detail below.
  • FIG. 15 is a waveform observed when a fluid flow is steady-state in a pipe, for example.
  • FIG. 16 is an enlarged view of only peak portions after superimposing waveforms on the waveform of FIG. 15 when abnormal flow of fluid is observed.
  • Several waveforms in a steady state are accumulated. Such abnormal waveforms are observed when an abnormal situation occurs such as bubbles in the pipe or a flow of fluid in the pipe is momentarily interrupted.
  • the abnormal waveform always deviates from the accumulated waveform in the steady state, which can be recognized by the difference in peak voltage or the delay of the voltage waveform itself.
  • the peak value of the waveform accumulated in the steady state is about 4V, but the peak value of the abnormal waveform is about 4.5V, and both show a difference of about 0.5V. This difference is large enough to easily indicate that the fluid flow in the piping is abnormal.
  • the steady state accumulation waveform and the abnormal state waveform are different from each other.
  • a steady-state waveform slightly exceeds 160ms at the point of crossing 2.0V.
  • the non-steady waveform has a time value of about 165 ms at the 2.0 V intersection point, which is also large enough to easily indicate that the fluid flow in the pipe is abnormal.
  • Such a voltage difference or time difference may vary depending on how much the vibration transmitted from the sensor is properly amplified, and also depends on the type of abnormality occurring in the pipe.
  • FIG. 17 is a waveform observed when a flow rate of 0.8cc per second to 0.9cc per second flows through a 0.25cc gap in a pipe.
  • the minimum waveform, the maximum waveform, and the average waveform are also shown.
  • the waveform also delays along the time axis.
  • the flow rate can be measured even without direct contact in the pipe, and the basis for determining the abnormality even when the flow rate gradually changes.
  • FIG. 18 illustrates an embodiment of a dispensing system to which a flow rate change sensor 100 according to the present invention is applied.
  • the dispensing system shown in FIG. 18 includes a chemical vessel 310, a pump 320, a flow rate change detector 100, a filter 330, a valve 340, and a pipe 350.
  • the pump 320 pumps the chemical until the chemical stored in the chemical container 310 is dispensed to the wafer through the pipe 350, the filter 330 for removing contaminants from the chemical, and a valve for controlling the amount of chemical. Pass 340. If there is a blockage in one of the pump 320, the filter 330, and the valve 340, a problem may occur in the flow of the chemical.
  • the vibration waveform transmitted to the pipe is measured and modeled in advance.
  • the flow rate change sensor shown in FIG. 18 is provided at one end of the valve 340, the flow rate change sensor according to the present invention is not limited thereto, and may be provided at an appropriate position.
  • the flow rate change sensor according to the present invention can not only prevent the contamination of the flow rate change sensor or the contamination of the fluid by contacting the pipe surrounding the fluid without directly contacting the fluid.
  • the detection characteristic of the is improved, and the life of the flow change detector is increased.
  • the present invention can estimate the magnitude of the flow rate flowing through the pipe by data-modeling with a database of the flow rate, the pressure of the fluid, the presence of bubbles or the abnormal operation of the components passing through the pipe, etc. Since the position of the pipe can be seen only by looking at the waveform output to the abnormal waveform analysis unit 130, there is an effect that can quickly derive the cause when a problem of fluid flow occurs.
  • the present invention is provided with an alarm sound generating device has the effect that the user can immediately determine whether the abnormal flow of the fluid even if the user hears only the alarm sound in the proximity of the dispensing system.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Fluid Mechanics (AREA)
  • Measuring Volume Flow (AREA)

Abstract

Selon la présente invention, un débitmètre est fixé à l'extérieur d'une conduite pour effectuer une détection indirecte sans entrer en contact avec un fluide, permettant ainsi de résoudre le problème de l'art antérieur entraîné par le contact direct avec un fluide, tel la corrosion du capteur, la contamination du fluide, et l'inconvénient d'avoir à découper une conduite pour installer un capteur ou d'avoir à installer un capteur à l'extrémité d'une conduite. Le débitmètre peut également détecter des anomalies dans divers composants le long du chemin d'écoulement de fluide, tels qu'une pompe, une soupape, et un filtre, ainsi qu'une fuite ou analogue depuis une conduite. Un débitmètre selon la présente invention comporte: un capteur de détection (110) disposé à l'extérieur d'une conduite, pour détecter des vibrations entraînées par l'écoulement de fluide à l'intérieur de la conduite, et convertir les vibrations détectées en un signal électrique ; et un amplificateur (120) pour amplifier le signal électrique.
PCT/KR2010/002618 2009-10-30 2010-04-27 Débitmètre non invasif, et système de distribution utilisant un tel débitmètre WO2011052866A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2009-0103948 2009-10-30
KR20090103948 2009-10-30

Publications (1)

Publication Number Publication Date
WO2011052866A1 true WO2011052866A1 (fr) 2011-05-05

Family

ID=43922282

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2010/002618 WO2011052866A1 (fr) 2009-10-30 2010-04-27 Débitmètre non invasif, et système de distribution utilisant un tel débitmètre

Country Status (1)

Country Link
WO (1) WO2011052866A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3554221A4 (fr) * 2016-12-14 2020-07-22 7Sense Products AS Système de détection d'un écoulement de fluide dans un dispositif de communication fluidique, et système d'arrosage comprenant un système de détection d'un écoulement de fluide
CN112284515A (zh) * 2016-10-13 2021-01-29 东南水务公司 水量计和系统

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4736763A (en) * 1987-02-26 1988-04-12 Britton George L Automatic device for the detection and shutoff of unwanted liquid flow in pipes
JPH06160136A (ja) * 1992-11-18 1994-06-07 Tokico Ltd 音波センサ
US5551297A (en) * 1992-12-04 1996-09-03 Sumitomo Chemical Company, Limited Pipe clogging detecting device
WO2008072807A1 (fr) * 2006-12-14 2008-06-19 Inzi Controls Co., Ltd. Palpeur pour capteur de vibrations

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4736763A (en) * 1987-02-26 1988-04-12 Britton George L Automatic device for the detection and shutoff of unwanted liquid flow in pipes
JPH06160136A (ja) * 1992-11-18 1994-06-07 Tokico Ltd 音波センサ
US5551297A (en) * 1992-12-04 1996-09-03 Sumitomo Chemical Company, Limited Pipe clogging detecting device
WO2008072807A1 (fr) * 2006-12-14 2008-06-19 Inzi Controls Co., Ltd. Palpeur pour capteur de vibrations

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112284515A (zh) * 2016-10-13 2021-01-29 东南水务公司 水量计和系统
CN112284515B (zh) * 2016-10-13 2023-02-21 东南水务公司 水量计和系统
EP3554221A4 (fr) * 2016-12-14 2020-07-22 7Sense Products AS Système de détection d'un écoulement de fluide dans un dispositif de communication fluidique, et système d'arrosage comprenant un système de détection d'un écoulement de fluide

Similar Documents

Publication Publication Date Title
US6283138B1 (en) Pressure relief valve monitoring device
EP2470876B1 (fr) Détecteur de particules à débit surveillé
US4898022A (en) Steam trap operation detector
CN106068447B (zh) 差压测量组件及用于监测差压测量组件的方法
US7071701B2 (en) Online fiber optic sensor for detecting partial discharge and similar events in large utility station transformers and the like
US20030010126A1 (en) Non-intrusive method and device for characterising flow pertubations of a fluid inside a pipe
FR2882141B1 (fr) Procede et dispositif pour detecter au sol l'obstruction d'une prise de pression d'un capteur de pression statique d'un aeronef
RU2011102052A (ru) Способ и устройство для повышения в реальном времени эффективности работы трубопровода для транспортировки текучей среды
CN100565153C (zh) 用于识别隔膜故障的具有压电元件的压力测量转换器
US20150059583A1 (en) Fume extraction
US11615699B2 (en) Smoke detector availability test
US10184611B2 (en) Detecting fluid properties of a multiphase flow in a condensate drain
WO2011052866A1 (fr) Débitmètre non invasif, et système de distribution utilisant un tel débitmètre
WO2009024444A3 (fr) Dispositif de contrôle destiné au contrôle d'une connexion d'un composant de connexion
EP1665189B1 (fr) Procede et appareil permettant de determiner l'etat operationnel d'un equipement de controle de la pollution
CN104900016A (zh) 一种气体探测器及其报警方法
US20140311588A1 (en) Nuclear grade air accumulation, indication and venting device
CN106770481B (zh) 桥梁吊索监测传感器
KR101203383B1 (ko) 비절단식 유량 변화 감지기 및 이를 포함하는 디스펜싱 시스템
KR101965690B1 (ko) 상수관로 모니터링 시스템
KR101393038B1 (ko) 상수도관 누수 탐지장치 및 이를 이용한 누수 탐지방법
JP2009192418A (ja) 送液管の漏洩検知システム
KR102382535B1 (ko) 가스감지용 포집장치
KR102674423B1 (ko) 유체에 대한 실시간 지능형 모니터링 방법 및 그 시스템
US8505568B2 (en) Nuclear grade air accumulation, indication and venting device

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 10826951

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

32PN Ep: public notification in the ep bulletin as address of the adressee cannot be established

Free format text: NOTING OF LOSS OF RIGHTS PURSUANT TO RULE 112(1) EPC (EPO FORM 1205 DATED 06.07.2012)

122 Ep: pct application non-entry in european phase

Ref document number: 10826951

Country of ref document: EP

Kind code of ref document: A1