WO2011031590A3 - Methods and arrangement for plasma dechuck optimization based on coupling of plasma signaling to substrate position and potential - Google Patents
Methods and arrangement for plasma dechuck optimization based on coupling of plasma signaling to substrate position and potential Download PDFInfo
- Publication number
- WO2011031590A3 WO2011031590A3 PCT/US2010/047382 US2010047382W WO2011031590A3 WO 2011031590 A3 WO2011031590 A3 WO 2011031590A3 US 2010047382 W US2010047382 W US 2010047382W WO 2011031590 A3 WO2011031590 A3 WO 2011031590A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- plasma
- substrate
- dechuck
- lower electrode
- threshold value
- Prior art date
Links
- 238000000034 method Methods 0.000 title abstract 5
- 239000000758 substrate Substances 0.000 title abstract 4
- 230000008878 coupling Effects 0.000 title 1
- 238000010168 coupling process Methods 0.000 title 1
- 238000005859 coupling reaction Methods 0.000 title 1
- 238000005457 optimization Methods 0.000 title 1
- 230000011664 signaling Effects 0.000 title 1
- 239000011261 inert gas Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
- H01L21/6833—Details of electrostatic chucks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/32091—Radio frequency generated discharge the radio frequency energy being capacitively coupled to the plasma
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32917—Plasma diagnostics
- H01J37/32935—Monitoring and controlling tubes by information coming from the object and/or discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
Abstract
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201080039844.7A CN102484086B (en) | 2009-09-10 | 2010-08-31 | Methods and arrangement for plasma dechuck optimization based on coupling of plasma signaling to substrate position and potential |
JP2012528825A JP5735513B2 (en) | 2009-09-10 | 2010-08-31 | Method and apparatus for plasma dechuck optimization based on coupling of plasma signal to substrate position and substrate potential |
SG2012009627A SG178372A1 (en) | 2009-09-10 | 2010-08-31 | Methods and arrangement for plasma dechuck optimization based on coupling of plasma signaling to substrate position and potential |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/557,387 | 2009-09-10 | ||
US12/557,387 US8797705B2 (en) | 2009-09-10 | 2009-09-10 | Methods and arrangement for plasma dechuck optimization based on coupling of plasma signaling to substrate position and potential |
US12/557,381 | 2009-09-10 | ||
US12/557,381 US20110060442A1 (en) | 2009-09-10 | 2009-09-10 | Methods and arrangement for detecting a wafer-released event within a plasma processing chamber |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2011031590A2 WO2011031590A2 (en) | 2011-03-17 |
WO2011031590A3 true WO2011031590A3 (en) | 2011-06-30 |
Family
ID=43733060
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2010/047382 WO2011031590A2 (en) | 2009-09-10 | 2010-08-31 | Methods and arrangement for plasma dechuck optimization based on coupling of plasma signaling to substrate position and potential |
PCT/US2010/047380 WO2011031589A2 (en) | 2009-09-10 | 2010-08-31 | Methods and arrangement for detecting a wafer-released event within a plasma processing chamber |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2010/047380 WO2011031589A2 (en) | 2009-09-10 | 2010-08-31 | Methods and arrangement for detecting a wafer-released event within a plasma processing chamber |
Country Status (5)
Country | Link |
---|---|
JP (2) | JP5735513B2 (en) |
KR (2) | KR20120073226A (en) |
CN (2) | CN102484086B (en) |
SG (3) | SG10201405047VA (en) |
WO (2) | WO2011031590A2 (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8520360B2 (en) * | 2011-07-19 | 2013-08-27 | Lam Research Corporation | Electrostatic chuck with wafer backside plasma assisted dechuck |
JP6789099B2 (en) * | 2016-12-26 | 2020-11-25 | 東京エレクトロン株式会社 | Measurement method, static elimination method and plasma processing equipment |
US10770257B2 (en) | 2018-07-20 | 2020-09-08 | Asm Ip Holding B.V. | Substrate processing method |
US11437262B2 (en) * | 2018-12-12 | 2022-09-06 | Applied Materials, Inc | Wafer de-chucking detection and arcing prevention |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5459632A (en) * | 1994-03-07 | 1995-10-17 | Applied Materials, Inc. | Releasing a workpiece from an electrostatic chuck |
US6307728B1 (en) * | 2000-01-21 | 2001-10-23 | Applied Materials, Inc. | Method and apparatus for dechucking a workpiece from an electrostatic chuck |
US20030210510A1 (en) * | 2002-05-07 | 2003-11-13 | Hann Thomas C. | Dynamic dechucking |
US20060087793A1 (en) * | 2004-10-21 | 2006-04-27 | Taeg-Kon Kim | Methods adapted for use in semiconductor processing apparatus including electrostatic chuck |
US7196896B2 (en) * | 1998-09-30 | 2007-03-27 | Lam Research Corporation | Dechucking method and apparatus for workpieces in vacuum processors |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3125593B2 (en) * | 1994-09-09 | 2001-01-22 | 株式会社日立製作所 | Electrostatic suction device and method |
JPH10163306A (en) * | 1996-12-04 | 1998-06-19 | Sony Corp | Method and apparatus for manufacturing semiconductor device |
JPH11260897A (en) * | 1998-03-12 | 1999-09-24 | Matsushita Electric Ind Co Ltd | Method and apparatus handling substrate, and vacuum chucking and inspecting method and apparatus used therefor |
US6965506B2 (en) * | 1998-09-30 | 2005-11-15 | Lam Research Corporation | System and method for dechucking a workpiece from an electrostatic chuck |
US7218503B2 (en) * | 1998-09-30 | 2007-05-15 | Lam Research Corporation | Method of determining the correct average bias compensation voltage during a plasma process |
US6570752B2 (en) * | 1999-12-28 | 2003-05-27 | Nikon Corporation | Wafer chucks and the like including substrate-adhesion detection and adhesion correction |
JP2002203837A (en) * | 2000-12-28 | 2002-07-19 | Mitsubishi Electric Corp | Plasma treatment method and apparatus, and manufacturing method of semiconductor device |
JP3702220B2 (en) * | 2001-11-29 | 2005-10-05 | 株式会社東芝 | Plasma management method |
JP4313656B2 (en) * | 2003-11-19 | 2009-08-12 | パナソニック株式会社 | Manufacturing method of semiconductor device |
US20050212450A1 (en) * | 2004-03-16 | 2005-09-29 | Scientific Systems Research Limited | Method and system for detecting electrical arcing in a plasma process powered by an AC source |
JP4884811B2 (en) * | 2006-03-20 | 2012-02-29 | 三菱重工業株式会社 | Glass substrate electrostatic adsorption device and adsorption / desorption method thereof |
KR101394337B1 (en) * | 2006-08-30 | 2014-05-13 | 엘아이지에이디피 주식회사 | Electrostratic Chuck |
JP4646941B2 (en) * | 2007-03-30 | 2011-03-09 | 東京エレクトロン株式会社 | Substrate processing apparatus and method for stabilizing state in processing chamber |
-
2010
- 2010-08-31 JP JP2012528825A patent/JP5735513B2/en active Active
- 2010-08-31 SG SG10201405047VA patent/SG10201405047VA/en unknown
- 2010-08-31 KR KR1020127006357A patent/KR20120073226A/en not_active Application Discontinuation
- 2010-08-31 KR KR1020127006359A patent/KR20120073227A/en not_active Application Discontinuation
- 2010-08-31 SG SG2012009650A patent/SG178374A1/en unknown
- 2010-08-31 SG SG2012009627A patent/SG178372A1/en unknown
- 2010-08-31 JP JP2012528824A patent/JP2013504873A/en active Pending
- 2010-08-31 CN CN201080039844.7A patent/CN102484086B/en active Active
- 2010-08-31 WO PCT/US2010/047382 patent/WO2011031590A2/en active Application Filing
- 2010-08-31 WO PCT/US2010/047380 patent/WO2011031589A2/en active Application Filing
- 2010-08-31 CN CN2010800389607A patent/CN102598237A/en active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5459632A (en) * | 1994-03-07 | 1995-10-17 | Applied Materials, Inc. | Releasing a workpiece from an electrostatic chuck |
US7196896B2 (en) * | 1998-09-30 | 2007-03-27 | Lam Research Corporation | Dechucking method and apparatus for workpieces in vacuum processors |
US6307728B1 (en) * | 2000-01-21 | 2001-10-23 | Applied Materials, Inc. | Method and apparatus for dechucking a workpiece from an electrostatic chuck |
US20030210510A1 (en) * | 2002-05-07 | 2003-11-13 | Hann Thomas C. | Dynamic dechucking |
US20060087793A1 (en) * | 2004-10-21 | 2006-04-27 | Taeg-Kon Kim | Methods adapted for use in semiconductor processing apparatus including electrostatic chuck |
Also Published As
Publication number | Publication date |
---|---|
SG10201405047VA (en) | 2014-10-30 |
WO2011031589A3 (en) | 2011-06-03 |
WO2011031590A2 (en) | 2011-03-17 |
KR20120073226A (en) | 2012-07-04 |
JP2013504873A (en) | 2013-02-07 |
WO2011031589A2 (en) | 2011-03-17 |
CN102484086B (en) | 2014-10-15 |
KR20120073227A (en) | 2012-07-04 |
SG178372A1 (en) | 2012-03-29 |
JP5735513B2 (en) | 2015-06-17 |
CN102598237A (en) | 2012-07-18 |
JP2013504874A (en) | 2013-02-07 |
SG178374A1 (en) | 2012-03-29 |
CN102484086A (en) | 2012-05-30 |
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