WO2010135668A2 - Apparatus and method for non-contact sensing of transparent articles - Google Patents

Apparatus and method for non-contact sensing of transparent articles Download PDF

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Publication number
WO2010135668A2
WO2010135668A2 PCT/US2010/035811 US2010035811W WO2010135668A2 WO 2010135668 A2 WO2010135668 A2 WO 2010135668A2 US 2010035811 W US2010035811 W US 2010035811W WO 2010135668 A2 WO2010135668 A2 WO 2010135668A2
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WO
WIPO (PCT)
Prior art keywords
article
laser
transparent
coating
laser processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2010/035811
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French (fr)
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WO2010135668A3 (en
Inventor
Mehmet Alpay
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Electro Scientific Industries Inc
Original Assignee
Electro Scientific Industries Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Electro Scientific Industries Inc filed Critical Electro Scientific Industries Inc
Priority to JP2012512065A priority Critical patent/JP2012527630A/en
Priority to CN2010800214566A priority patent/CN102428342A/en
Publication of WO2010135668A2 publication Critical patent/WO2010135668A2/en
Publication of WO2010135668A3 publication Critical patent/WO2010135668A3/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/03—Observing, e.g. monitoring, the workpiece
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01V—GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
    • G01V8/00—Prospecting or detecting by optical means
    • G01V8/10—Detecting, e.g. by using light barriers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/08—Systems determining position data of a target for measuring distance only

Definitions

  • the present invention relates to methods and apparatus for non-contact sensing of articles with laser-based displacement sensors, in particular non-contact sensing of articles generally transparent to the laser wavelengths employed by the non-contact laser sensor.
  • non-contact sensing of articles generally transparent to the laser wavelengths employed by the non-contact laser sensor In more particular it relates to methods of determining the orientation of articles generally transparent to laser wavelengths by coating one surface of the article with material opaque to the wavelength of laser radiation used.
  • part manufacturers will try to ensure that there is no ambiguity as to which side of a part is the "processing side” by either marking this side with a unique identifier (such as a label, bar-code, etc.) which can be verified either by an operator or an automated machine vision system, or by drilling into the part fixturing holes that make it impossible to place the part in the processing area in any orientation other than the correct one.
  • a unique identifier such as a label, bar-code, etc.
  • An aspect of the instant invention relies upon the presence of an opaque coating applied to a portion of the transparent article for cosmetic purposes.
  • This opaque coating one side of the article is detected and used to provide information regarding the orientation of the article.
  • a conventional laser-based displacement detector is used to detect the opaque material on the transparent article to determine which side is uppermost in the machine. If the correct side is uppermost, processing proceeds. If it is determined that the incorrect side is uppermost, the article can be re -oriented automatically if the machine has that capability, or an operator can be alerted to re-orient the part.
  • the applied opaque coating may remain after the machining operation if it is designed to be a cosmetic addition to the article or it may be removed following machining.
  • FIG. 1 A sample part oriented paint side up.
  • Fig 2b A sample part oriented paint side down.
  • Embodiments of this invention represent an improved method for processing a transparent article with a laser processing system having a controller.
  • the invention includes applying a coating to one side of the transparent article and providing the laser processing system with a laser range measuring device.
  • the embodiment measures the location of the transparent article with the laser range measuring device by detecting the coating and communicating the location of the coating to the controller.
  • the controller examines the reported location and decides whether or not to process said transparent article depending upon said location communicated to said controller.
  • This invention refers to establishing the correct processing side of a transparent article for machining purposes. Transparency in this case is defined principally as visual transparency to a human observer, however transparency with respect to the laser processing or measuring beam is also possible.
  • An exemplary laser processing system for processing articles as described herein is the ESI Model MM5900 micro-machining system, manufactured by Electro Scientific Industries, Inc, Portland, OR.
  • the material is clear glass
  • the article is an essentially flat sheet with a band of black paint at the perimeter as shown in Fig 1.
  • Fig 1 shows an article 10 with a coating 12 applied to the top surface of the article. Also in this case, it is important that the orientation is known since the machining operation is not symmetric with respect to the top and bottom surfaces of the article.
  • a laser displacement sensor is used to detect the location of the article.
  • An exemplary laser displacement sensor is the Acuity AR200 series sensor from Schmitt Industries, Portland, Oregon 97210. Principles of operation of laser displacement sensors are well known and will not be discussed herein.
  • This sensor is selected so that the material to be located is transparent to the laser wavelength used.
  • the coating applied to the article is selected to be opaque or at least partially reflective to the laser wavelength used.
  • the laser sensor is directed to the article from a position above the article and perpendicular to the surface to be measured. The distance from the sensor to the article is measured and compared to predetermined distances stored in the controller of the laser processing system. By comparing the measured location of the reflective surface of the article, it can be determined whether the part has been inserted into the laser processing system right side up or upside down.
  • Fig 2a shows an article 20, loaded into a laser processing system (not shown) right side up with a coating 22 which is at least partially reflective to the laser radiation 24 emitted by the sensor 26, reflected off the top surface of the coating 28 and received by the sensor 26. This yields a value of Dt for the displacement of the article 20 from the sensor 26.
  • Fig 2b shows an article 30 loaded into a laser processing system (not shown) upside down with a coating 32 at least partially reflective to laser radiation 34 emitted by sensor 36, reflected off the bottom surface of the coating 38 and received by the sensor 36. This yields a measured displacement value of Db. Since Db is not approximately equal to the nominal value of Dt, the right side up measurement, the system concludes that the article has been inserted improperly. At this point the system can direct material handling elements of the system to turn the article over, if the embodiment of the invention is so equipped, or alert the operator that a part has been improperly inserted or simply stop.
  • the laser sensor should be mounted in a position where it can report valid and repeatable locations for the measured part. This requires that the sensor be mounted in a known location so that the location can be reliably measured and communicated to the laser processing system controller.
  • the sensor should be mounted so that the laser beam intersects the article as close to perpendicular as possible.
  • the sensor should be mounted so that the laser beam will reflect off the coated portions of the article.
  • the article can be positioned by the material handling elements under the direction of the controller to direct the laser beam emitted by the laser sensor to impinge upon the coated portions of the article.
  • Coatings used by embodiments of this invention include paints, epoxies or powders that can be made to adhere to the glass or glass-like materials which comprise the articles to be laser machined. This adherence can be temporary, where the coating will be removed following machining, or permanent, where the coating forms a part of the cosmetic finish of the article.
  • the coating can also be in the form of a film to be adhered to the article for the purpose of machining and removed following. This film could be made of plastic or paper for example. All of these embodiments are capable of adhering to an article made of glass or glass-like material and can reflect or partially reflect laser light at a wavelength to which the material is transparent or semi-transparent.
  • Determination of the orientation of the article depends upon a priori information programmed into the controller of the laser processing system.
  • One manner of determining this is to insert an article correctly into the laser processing system and instruct the system to measure the article and store the results in the controller.
  • An article which is subsequently incorrectly inserted into the system and measured will yield a measurement which differs from the stored value by the thickness of the transparent article.
  • the part orientation may be identified by comparing the acquired data with stored data with appropriate tolerances due to measurement error. For example, if the measured distance to the part inserted topside up is Dt and the measured distance to the part inserted bottom side up is Db, then a dual measurement threshold Td may be set
  • Td Measurement less than or equal to Td indicate the part is correctly inserted. If, on the other hand, the perceived thickness, which is equal to t/n, where t is the thickness of the part and n the index or refraction of the material with respect to the laser wavelength is known, a single measurement threshold Ts may be calculated
  • Ts Dt + t/2n

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Biochemistry (AREA)
  • Pathology (AREA)
  • Immunology (AREA)
  • Engineering & Computer Science (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Optics & Photonics (AREA)
  • Analytical Chemistry (AREA)
  • Geophysics (AREA)
  • Mechanical Engineering (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Plasma & Fusion (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Laser Beam Processing (AREA)
  • Surface Treatment Of Glass (AREA)
  • Coating Apparatus (AREA)

Abstract

A laser-based displacement detector 26 is used to detect cosmetic coatings 22 applied to one surface of the transparent article 20 and thereby determine which side is uppermost when loaded into the laser processing system. In particular, articles 20 that are transparent to visible light and are particularly difficult to orient properly in laser processing systems are oriented using a laser-based displacement detector 26 in conjunction with a partial coating 22 on the article 20.

Description

APPARATUS AND METHOD FOR NON-CONTACT SENSING OF TRANSPARENT ARTICLES
Technical Field
[0001] The present invention relates to methods and apparatus for non-contact sensing of articles with laser-based displacement sensors, in particular non-contact sensing of articles generally transparent to the laser wavelengths employed by the non-contact laser sensor. In more particular it relates to methods of determining the orientation of articles generally transparent to laser wavelengths by coating one surface of the article with material opaque to the wavelength of laser radiation used.
Background
[0002] As laser processing becomes more capable and economical, more and more parts are being machined using laser processing rather than mechanical, chemical or electrical processing. One particular type of material that is adapting favorably to laser processing is glass and glass-like materials. Processing of glass or glass-like articles using a laser are discussed in two co-pending applications assigned to the assignee of this application, namely US Patent application 12/336,609 METHOD FOR LASER PROCESSING GLASS WITH A CHAMFERED EDGE and 61/164,162 GLASS MACHINING WITH PRECISELY TIMED LASER PULSES, both of which are included by reference.
[0003] During machining of glass articles, it's necessary to make sure that the correct side of the part to be machined is presented to the processing head. This is important since the machining operations are typically not symmetric with respect to the top and bottom of the article, therefore the article must be correctly oriented in order to be properly machined. This may not be trivial if the part in question has two or more sides that look sufficiently similar to make visual identification of the correct processing side difficult. An example is an essentially flat "sheet like" part that can be placed with either side up into the system. Typically, part manufacturers will try to ensure that there is no ambiguity as to which side of a part is the "processing side" by either marking this side with a unique identifier (such as a label, bar-code, etc.) which can be verified either by an operator or an automated machine vision system, or by drilling into the part fixturing holes that make it impossible to place the part in the processing area in any orientation other than the correct one.
[0004] Some articles, however, do not lend themselves to being oriented in this fashion. Marking or labeling the parts adds time and expense to the manufacturing process. Some articles do not lend themselves to adding part fixturing holes or features since they would detract from the finished product. A method of identifying which side of the part is uppermost is useful to prevent the article from being loaded improperly. In the case where the machine is loaded automatically without human intervention, a method of identifying the orientation of loaded articles can prevent the machine from processing the article on the wrong side. [0005] There is therefore an ongoing need for a method and apparatus for identifying the orientation of a transparent article loaded into a laser processing machine.
Summary of the Invention
[0006] An aspect of the instant invention relies upon the presence of an opaque coating applied to a portion of the transparent article for cosmetic purposes. This opaque coating one side of the article is detected and used to provide information regarding the orientation of the article. A conventional laser-based displacement detector is used to detect the opaque material on the transparent article to determine which side is uppermost in the machine. If the correct side is uppermost, processing proceeds. If it is determined that the incorrect side is uppermost, the article can be re -oriented automatically if the machine has that capability, or an operator can be alerted to re-orient the part. The applied opaque coating may remain after the machining operation if it is designed to be a cosmetic addition to the article or it may be removed following machining.
Brief Description of the Drawings
[0007] Fig 1. A sample part.
[0008] Fig 2a. A sample part oriented paint side up.
[0009] Fig 2b. A sample part oriented paint side down.
Detailed Description of Preferred Embodiments
[0010] Embodiments of this invention represent an improved method for processing a transparent article with a laser processing system having a controller. The invention includes applying a coating to one side of the transparent article and providing the laser processing system with a laser range measuring device. The embodiment then measures the location of the transparent article with the laser range measuring device by detecting the coating and communicating the location of the coating to the controller. The controller examines the reported location and decides whether or not to process said transparent article depending upon said location communicated to said controller.
[0011] This invention refers to establishing the correct processing side of a transparent article for machining purposes. Transparency in this case is defined principally as visual transparency to a human observer, however transparency with respect to the laser processing or measuring beam is also possible. An exemplary laser processing system for processing articles as described herein is the ESI Model MM5900 micro-machining system, manufactured by Electro Scientific Industries, Inc, Portland, OR. In a particular case, the material is clear glass, and the article is an essentially flat sheet with a band of black paint at the perimeter as shown in Fig 1. Fig 1 shows an article 10 with a coating 12 applied to the top surface of the article. Also in this case, it is important that the orientation is known since the machining operation is not symmetric with respect to the top and bottom surfaces of the article. In this embodiment a laser displacement sensor is used to detect the location of the article. An exemplary laser displacement sensor is the Acuity AR200 series sensor from Schmitt Industries, Portland, Oregon 97210. Principles of operation of laser displacement sensors are well known and will not be discussed herein.
[0012] This sensor is selected so that the material to be located is transparent to the laser wavelength used. The coating applied to the article is selected to be opaque or at least partially reflective to the laser wavelength used. The laser sensor is directed to the article from a position above the article and perpendicular to the surface to be measured. The distance from the sensor to the article is measured and compared to predetermined distances stored in the controller of the laser processing system. By comparing the measured location of the reflective surface of the article, it can be determined whether the part has been inserted into the laser processing system right side up or upside down.
[0013] Fig 2a shows an article 20, loaded into a laser processing system (not shown) right side up with a coating 22 which is at least partially reflective to the laser radiation 24 emitted by the sensor 26, reflected off the top surface of the coating 28 and received by the sensor 26. This yields a value of Dt for the displacement of the article 20 from the sensor 26. Fig 2b shows an article 30 loaded into a laser processing system (not shown) upside down with a coating 32 at least partially reflective to laser radiation 34 emitted by sensor 36, reflected off the bottom surface of the coating 38 and received by the sensor 36. This yields a measured displacement value of Db. Since Db is not approximately equal to the nominal value of Dt, the right side up measurement, the system concludes that the article has been inserted improperly. At this point the system can direct material handling elements of the system to turn the article over, if the embodiment of the invention is so equipped, or alert the operator that a part has been improperly inserted or simply stop.
[0014] In order to accomplish this, the laser sensor should be mounted in a position where it can report valid and repeatable locations for the measured part. This requires that the sensor be mounted in a known location so that the location can be reliably measured and communicated to the laser processing system controller. The sensor should be mounted so that the laser beam intersects the article as close to perpendicular as possible. The sensor should be mounted so that the laser beam will reflect off the coated portions of the article. In embodiments which have material handling elements, the article can be positioned by the material handling elements under the direction of the controller to direct the laser beam emitted by the laser sensor to impinge upon the coated portions of the article. Coatings used by embodiments of this invention include paints, epoxies or powders that can be made to adhere to the glass or glass-like materials which comprise the articles to be laser machined. This adherence can be temporary, where the coating will be removed following machining, or permanent, where the coating forms a part of the cosmetic finish of the article. The coating can also be in the form of a film to be adhered to the article for the purpose of machining and removed following. This film could be made of plastic or paper for example. All of these embodiments are capable of adhering to an article made of glass or glass-like material and can reflect or partially reflect laser light at a wavelength to which the material is transparent or semi-transparent.
[0015] Determination of the orientation of the article depends upon a priori information programmed into the controller of the laser processing system. One manner of determining this is to insert an article correctly into the laser processing system and instruct the system to measure the article and store the results in the controller. An article which is subsequently incorrectly inserted into the system and measured will yield a measurement which differs from the stored value by the thickness of the transparent article. Once this data is acquired, the part orientation may be identified by comparing the acquired data with stored data with appropriate tolerances due to measurement error. For example, if the measured distance to the part inserted topside up is Dt and the measured distance to the part inserted bottom side up is Db, then a dual measurement threshold Td may be set
Td = (Dt + Db)/2
Measurement less than or equal to Td indicate the part is correctly inserted. If, on the other hand, the perceived thickness, which is equal to t/n, where t is the thickness of the part and n the index or refraction of the material with respect to the laser wavelength is known, a single measurement threshold Ts may be calculated
Ts = Dt + t/2n
Where a measurement less than Ts indicates the article is correctly inserted.
[0016] More elaborate algorithms can use the part distance measurements utilizing a sensor of the type described in this disclosure while still remaining within the scope of the approach outlined here. For this reason we request that the scope of this invention be determined solely by the following claims:

Claims

We claim:
1. An improved method for processing a visually transparent article with a laser processing system having a controller comprising: applying a coating to one side of said transparent article; providing said laser processing system with a laser range measuring device; measuring the location of said transparent article with said laser range measuring device by detecting said coating and communicating said location to said controller; and deciding whether or not to process said transparent article depending upon said location communicated to said controller.
2. The method of claim 1 wherein said laser range measuring device operates at a wavelength in the visible range.
3. The method of claim 1 wherein said laser processing system is a laser machining system.
4. The method of claim 1 wherein said transparent article is glass.
PCT/US2010/035811 2009-05-21 2010-05-21 Apparatus and method for non-contact sensing of transparent articles Ceased WO2010135668A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2012512065A JP2012527630A (en) 2009-05-21 2010-05-21 Apparatus and method for non-contact detection of transparent article
CN2010800214566A CN102428342A (en) 2009-05-21 2010-05-21 Device and method for non-contact sensing of transparent objects

Applications Claiming Priority (4)

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US18024509P 2009-05-21 2009-05-21
US61/180,245 2009-05-21
US12/783,429 US8706288B2 (en) 2009-05-21 2010-05-19 Apparatus and method for non-contact sensing of transparent articles
US12/783,429 2010-05-19

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WO2010135668A2 true WO2010135668A2 (en) 2010-11-25
WO2010135668A3 WO2010135668A3 (en) 2011-02-03

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JP (1) JP2012527630A (en)
KR (1) KR20120030336A (en)
CN (1) CN102428342A (en)
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WO (1) WO2010135668A2 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8753308B2 (en) 2006-01-06 2014-06-17 Acelrx Pharmaceuticals, Inc. Methods for administering small volume oral transmucosal dosage forms using a dispensing device
CN102735197B (en) * 2012-06-20 2014-12-24 北京北一机床股份有限公司 System and method for automatically detecting correctness of clamping posture of workpiece
NZ732808A (en) 2014-12-23 2021-12-24 Acelrx Pharmaceuticals Inc Systems, devices and methods for dispensing oral transmucosal dosage forms
CN104931880B (en) * 2015-06-02 2018-04-10 苏州工业园区聚博精密设备有限公司 Rotor intelligence beat test system
CN105588511A (en) * 2015-12-15 2016-05-18 中核（天津）机械有限公司 Auxiliary method for facilitating the laser measurement on dimension of transparent member
CN106735869B (en) * 2016-12-21 2018-12-07 兰州空间技术物理研究所 The contactless localization method of laser vision for numerically controlled processing equipment
CN114518072B (en) * 2022-02-22 2023-08-29 江苏铁锚玻璃股份有限公司 Device applied to thickness detection of transparent piece and application method thereof

Family Cites Families (47)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4591271A (en) 1983-03-21 1986-05-27 Byers Donald W Method and apparatus for coating detection and surface evaluation
JPS6011104A (en) * 1983-06-30 1985-01-21 Fuji Photo Film Co Ltd Method for discriminating front or rear face of glass mount film
JPH04348206A (en) 1991-01-31 1992-12-03 Asahi Glass Co Ltd Measuring apparatus of positional data of front and rear surfaces of transparent substrate
JPH05273403A (en) * 1992-03-25 1993-10-22 Ricoh Co Ltd Optical components
RU2024441C1 (en) 1992-04-02 1994-12-15 Владимир Степанович Кондратенко Process of cutting of nonmetal materials
JP2002148843A (en) * 1992-04-30 2002-05-22 Canon Inc Image forming method, image forming apparatus and transparent film
EP0652400B1 (en) * 1993-11-05 2000-09-20 Vari-Lite, Inc. Light pattern generator (gobo) and laser ablation method and apparatus for making it
US5665134A (en) 1995-06-07 1997-09-09 Hughes Missile Systems Company Laser machining of glass-ceramic materials
US6373026B1 (en) 1996-07-31 2002-04-16 Mitsubishi Denki Kabushiki Kaisha Laser beam machining method for wiring board, laser beam machining apparatus for wiring board, and carbonic acid gas laser oscillator for machining wiring board
JPH10221170A (en) 1997-02-10 1998-08-21 Asahi Glass Co Ltd Method and apparatus for detecting film surface of coated glass
JPH1128900A (en) * 1997-05-12 1999-02-02 Sumitomo Heavy Ind Ltd Paint removal method and laser processing device using laser light
JP2000061667A (en) 1998-08-19 2000-02-29 Junichi Ikeno Laser processing method of glass and glass molded product
US6497921B1 (en) * 1998-11-06 2002-12-24 North Carolina State University Method for meniscus coating with liquid carbon dioxide
JP3672773B2 (en) 1999-07-22 2005-07-20 セントラル硝子株式会社 Method for distinguishing glass coating surface
JP3512387B2 (en) 2000-02-10 2004-03-29 松下電器産業株式会社 Lens, manufacturing method thereof, and optical device using lens
JP2001354439A (en) 2000-06-12 2001-12-25 Matsushita Electric Ind Co Ltd Glass substrate processing method and high frequency circuit manufacturing method
JP4659300B2 (en) 2000-09-13 2011-03-30 浜松ホトニクス株式会社 Laser processing method and semiconductor chip manufacturing method
JP4512786B2 (en) 2000-11-17 2010-07-28 独立行政法人産業技術総合研究所 Glass substrate processing method
JP3802442B2 (en) 2000-12-01 2006-07-26 エルジー電子株式会社 Glass cutting method and apparatus
US6720567B2 (en) * 2001-01-30 2004-04-13 Gsi Lumonics Corporation Apparatus and method for focal point control for laser machining
US6559411B2 (en) * 2001-08-10 2003-05-06 First Solar, Llc Method and apparatus for laser scribing glass sheet substrate coatings
US6706315B2 (en) * 2001-09-17 2004-03-16 Xerox Corporation Coating process for coating die with laser position sensors
US6521862B1 (en) 2001-10-09 2003-02-18 International Business Machines Corporation Apparatus and method for improving chamfer quality of disk edge surfaces with laser treatment
US7015118B2 (en) * 2001-10-31 2006-03-21 Mitsuboshi Diamond Industrial Co., Ltd. Method for forming a scribe line on a semiconductor device and an apparatus for forming the scribe line
JP2003160348A (en) 2001-11-21 2003-06-03 Nippon Sheet Glass Co Ltd Glass substrate for information recording medium and its manufacturing method
TWI258831B (en) * 2001-12-31 2006-07-21 Applied Materials Inc Cassette and workpiece handler characterization tool
JP2003226551A (en) 2002-02-05 2003-08-12 Nippon Sheet Glass Co Ltd Glass substrate having fine pore and production method therefor
JP4267240B2 (en) 2002-02-22 2009-05-27 日本板硝子株式会社 Manufacturing method of glass structure
US6756563B2 (en) 2002-03-07 2004-06-29 Orbotech Ltd. System and method for forming holes in substrates containing glass
US7048962B2 (en) * 2002-05-02 2006-05-23 Labcoat, Ltd. Stent coating device
KR100497820B1 (en) 2003-01-06 2005-07-01 로체 시스템즈(주) Glass-plate cutting machine
US7023001B2 (en) 2003-03-31 2006-04-04 Institut National D'optique Method for engraving materials using laser etched V-grooves
US7267436B2 (en) * 2003-06-27 2007-09-11 Seiko Epson Corporation Manufacturing method of spectacle lens, marking apparatus, marking system and spectacle lens
CN100458496C (en) 2003-06-27 2009-02-04 精工爱普生株式会社 Spectacle lens manufacturing method and spectacle lens
JP2005049259A (en) 2003-07-30 2005-02-24 Dainippon Printing Co Ltd Multilayer transparent body inspection apparatus and method
FI120082B (en) 2004-03-18 2009-06-30 Antti Salminen Process for processing materials with high power frequency electromagnetic radiation
DE102004020737A1 (en) 2004-04-27 2005-11-24 Lzh Laserzentrum Hannover E.V. Device for cutting components from brittle materials with stress-free component mounting
DE102004024475A1 (en) 2004-05-14 2005-12-01 Lzh Laserzentrum Hannover E.V. Method and device for separating semiconductor materials
US7420676B2 (en) 2004-07-28 2008-09-02 Asml Netherlands B.V. Alignment method, method of measuring front to backside alignment error, method of detecting non-orthogonality, method of calibration, and lithographic apparatus
US20060054843A1 (en) * 2004-09-13 2006-03-16 Electronic Design To Market, Inc. Method and apparatus of improving optical reflection images of a laser on a changing surface location
JP4843212B2 (en) * 2004-10-29 2011-12-21 東京エレクトロン株式会社 Laser processing apparatus and laser processing method
KR101101290B1 (en) * 2004-11-15 2012-01-04 일렉트로 싸이언티픽 인더스트리이즈 인코포레이티드 Tracking and marking on specimens with defects formed during laser via drilling
US7638731B2 (en) * 2005-10-18 2009-12-29 Electro Scientific Industries, Inc. Real time target topography tracking during laser processing
JP4551324B2 (en) 2005-12-28 2010-09-29 芝浦メカトロニクス株式会社 Paste coating amount measuring device and paste coating device
JP2009010196A (en) * 2007-06-28 2009-01-15 Advanced Lcd Technologies Development Center Co Ltd Laser crystallization method and crystallization apparatus
JP5336054B2 (en) 2007-07-18 2013-11-06 浜松ホトニクス株式会社 Processing information supply system provided with processing information supply device
US9346130B2 (en) 2008-12-17 2016-05-24 Electro Scientific Industries, Inc. Method for laser processing glass with a chamfered edge

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TW201102204A (en) 2011-01-16
US8706288B2 (en) 2014-04-22
KR20120030336A (en) 2012-03-28
JP2012527630A (en) 2012-11-08
CN102428342A (en) 2012-04-25
US20100298964A1 (en) 2010-11-25

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