WO2010036072A2

WO2010036072A2 - Micro pump using snap-through

Info

Publication number: WO2010036072A2
Application number: PCT/KR2009/005520
Authority: WO
Inventors: 오일권; 전진한; 박중우
Original assignee: 전남대학교산학협력단
Priority date: 2008-09-29
Filing date: 2009-09-28
Publication date: 2010-04-01
Also published as: WO2010036072A3

Abstract

The present invention is a micro pump which provides enhanced pumping ability. The structure of the present micro pump has a pumping portion which has a relatively larger deformation. According to the present invention, the disclosed pump allows for less loss of voltage and backward reflux flow of pumped fluid, and has greater pumping power and enhanced biocompatibility. The present invention is utilized with excellent potential in use with uTAS that control small amounts of fluid, medical apparatus for insertion into human bodies, and for adhesive processes in micro factories.

Description

Snap-Through Micro Pump

The present invention relates to a micropump, and more particularly to a micropump having a larger pumping force by having a structure in which the pumping part of the micropump obtains a larger deformation amount.

Recently, microstructures having a micro unit size necessary for sensing or actuating are fabricated using semiconductor manufacturing process technology, and signal processing circuits are integrated therein to provide a high performance, multifunctional microelectromechanical system (Micro Electro). Mechanical System, hereinafter referred to as 'MEMS' is implemented. Using this MEMS technology, Lab-on-Chip, a micro-integrator of biochips, medical and microfluidic analyzers on a few centimeters of chips, is a medical microcontroller for biological, chemical, medical and genetic engineering applications. Many studies have been conducted to utilize the diagnostic and drug injection system.

Substantial research on micron-sized sensors or actuators has been fueled by the emergence of Micro Electro Mechanical Systems (MEMS) technology.

Recently, with the introduction of various commercial products manufactured by this technology and the rapid expansion of the market, it is recognized as a core technology that can bring about a new industry. In particular, the use of silicon-based micromechanical system technology has enabled the emergence of so-called integrated MEMS (iMEMS), in which sensors or actuators are fabricated simultaneously with integrated circuits (ICs).

A micro pump has a function of allowing a small amount of fluid to flow in a desired direction. A micro pump mainly includes a micro-TAS (Micro Total Analysis System), a lab-on-a-chip (LOC), and the like. It is used in trace fluid transportation and control fields related to MEMS (Bio-Micro Electro Mechanical System) field.

Until now, many methods have been used in the macro area to transfer a fluid by forming a pressure gradient using a rotational force such as a motor. However, it is difficult to use an actuator such as a motor having a relatively large volume in a micro-sized LOC system. In order to overcome this, there is a great need to design a micro pump having a simple shape and easy to manufacture in a micro size.

In the meantime, various methods have been tried to drive the micro actuators. The micro pumps are electrostatic, piezoelectric, electrolytic, shape memory alloy, and electromagnetic force.

Hereinafter, the problems of the micro pump driving method will be briefly described. First, the electrostatic type is simple in structure but difficult to obtain a relatively large force, and the piezoelectric type is driven by using the piezoelectric effect of the piezoelectric ceramic. It can be made, but it is structurally large because high applied voltage is required. On the other hand, the electrolysis type can produce a large displacement without heat generation even with relatively low energy, but has a problem that the gas removal time generated through the chemical reverse reaction is long and the driving speed is slow. The shape memory alloy can produce great force with strong tensile force, but it is difficult to manufacture due to unidirectional characteristics. In addition, the electromagnetic force method has a merit that a large displacement can be obtained at a low voltage, and the frequency response is fast, but it is difficult to miniaturize.

On the other hand, research on ionic polymer metal composite (IPMC), one of the electroactive polymers (EAP), is being conducted by many scientists. Referring to FIG. When a voltage is applied to the metal electrodes coated on both sides of the Nafion membrane, the cation and the polar solvent move in a direction opposite to the direction of the applied voltage, causing deformation of the membrane on the moving side.

Although the lightweight and flexible compact actuator is designed and applied to the micropump using the IPMC, there is still a problem that the pumping force is weak due to the small amount of deformation of the IPMC actuator.

As such, the micropump structures known to date have been difficult to satisfy both the small size and the large force, the large displacement and the high speed.

The present inventors have made efforts to develop a micropump with a large force, a large displacement, and a high speed. As a result, a structure using a dynamic snap-through phenomenon not only obtains a larger pumping force but also develops a technical configuration in which fluid does not flow back. The present invention has been completed.

Accordingly, it is an object of the present invention to provide a micropump having a very small force and a large force and a large displacement.

Another object of the present invention is to provide a micropump having a pumping part having a structure capable of controlling flow and backflow.

It is still another object of the present invention to provide a micropump that can be used in the adhesion process of uTAS, an internal human implantable medical device, and a microfactory, which has a good biocompatibility and controls a small amount of fluid.

In addition, the present inventors have studied to develop a micropump with a large force, a large displacement, and a high speed. As a result, by applying the earthworm or camouflage peristalsis, the present invention not only obtains a larger pumping force by using a dynamic snap-through phenomenon but also a deformation mode. The present invention has been completed to develop a technical configuration for controlling the flow of fluid through control.

Accordingly, an object of the present invention is to provide a micropump having excellent pumping force because it is very small and has a small loss (voltage, backflow of fluid) and a large force and a large displacement.

Another object of the present invention is to provide a micropump having a pumping part having a structure capable of controlling the flow of fluid through the deformation mode control of the dynamic snap-through phenomenon by applying the interlocking motion of the earthworm or the stomach.

The objects of the present invention are not limited to the above-mentioned objects, and other objects that are not mentioned will be clearly understood by those skilled in the art from the following description.

In order to achieve the above object, the present invention includes a lower structure including an inlet hole in which fluid is introduced, a discharge hole in which the fluid is discharged, and a space in which the fluid is contained; A curved actuator formed in contact with the space portion of the substructure; And an upper structure including a space portion for accommodating the curved actuator and coupled to a lower structure.

In a preferred embodiment, the curved actuator includes a curved member and a support member for supporting the curved member.

In a preferred embodiment, the curved member is formed of a piezoelectric material or a mechanical polymer film.

In a preferred embodiment, the curved actuator has a large drive displacement through dynamic snap-through which occurs in an unstable buckling configuration.

In a preferred embodiment, the unstable buckling state of the curved actuator is made by specially treating the boundary between the curved member and the support member so that the ductility is different from the curved member or the support member.

In a preferred embodiment, the unstable buckling state of the curved actuator is such that the curved actuator is fixed to the upper support or the lower support in the form of a cantilever.

In a preferred embodiment, the curved actuator controls the flow of fluid through the second and third modes of the generated snap-through phenomenon to suppress backflow and maximize pumping force.

In a preferred embodiment, the curved actuator is a micropump, characterized in that the electrode is patterned in the form of suppressing the cracks generated during the large deformation caused by the snap-through phenomenon in the curved member.

In a preferred embodiment, the substructure and superstructure is made of a high biocompatibility polymer comprising at least one of PVC, PE, PP, PMMA, PS, PET, PTFE, PU, or nylon or coated with a surface.

In a preferred embodiment, the inlet hole for the fluid is introduced into the upper structure and the discharge hole for the fluid is further formed.

The curved actuator has a double curved structure.

In a preferred embodiment, the inlet hole and the discharge hole is formed to be adjusted in size and angle so that the fluid flowing in one direction.

In order to achieve the above object, the present invention also provides a tubular actuator formed to form an outer circumferential surface of the inner space having a long elliptical shape in the longitudinal cross-section, which is a flowing direction of the introduced fluid; A mold structure in which a pumping space part is formed to accommodate the tubular actuator therein; An inlet hole member formed at one end of the mold structure to allow fluid to flow into the tubular actuator; And a discharge hole member formed at the other end of the mold structure to discharge the fluid of the tubular actuator; It provides a micro pump comprising a.

In a preferred embodiment, the tubular actuator includes support members formed at both ends of the pumping space part to surround the inlet and discharge hole members; Film members formed at both ends of the support members to form an outer circumferential surface of the inner space; An electrode formed on an outer side of a portion of the surface of the support member to which the film member is fixed; And a plurality of band members fixed at both ends to the respective supporting members, and at least one of both ends formed adjacent to the surface of the film member so as to be connected to the electrodes.

In a preferred embodiment, the band member is formed of a piezoelectric material or a mechanical polymer film.

In a preferred embodiment, the tubular actuator has a large drive displacement through dynamic snap-through which occurs in an unstable buckling state of the band member.

In a preferred embodiment, the film member is a polymer film having a shrinkage force not to inhibit the displacement of the band member.

In a preferred embodiment, the tubular actuator controls the flow of fluid by causing the tubular body of the actuator to interlock through the first and second and third modes of the generated snap-through phenomenon.

In a preferred embodiment, the mold structure is made of a high biocompatible polymer or at least one surface coated with one or more selected from the group consisting of PVC, PE, PP, PMMA, PS, PET, PTFE, PU, or nylon do.

In a preferred embodiment, the inlet hole member and the discharge hole member is formed to be adjusted in size and angle so that the fluid flowing in one direction.

In a preferred embodiment, it further comprises a power supply connected to the electrode for supplying a voltage to the band member.

The present invention also provides an internal human implantable medical device using the micropump according to any one of claims 1 to 9.

In a preferred embodiment, the diameter of the inlet hole member and the outlet hole member of the micropump is the same size as the hose used in the medical device.

The present invention has the following excellent effects.

First, the micropump of the present invention is very small and has a large force and a large displacement.

In addition, the micropump of the present invention has a pumping part having a structure capable of controlling flow and backflow.

In addition, the micropump of the present invention is excellent in biocompatibility, and can be used for the adhesion process of uTAS, an internal human implantable medical device, and a microfactory which controls a small amount of fluid.

In addition, the present invention has the following excellent effects.

The micropump of the present invention is excellent in pumping power because it is very small and has a small loss (voltage, backflow of fluid) and a large force and a large displacement.

In addition, the micropump of the present invention has a pumping part having a structure capable of controlling the flow of fluid through the deformation mode control of the dynamic snap-through phenomenon by applying the interlocking motion of the earthworm or the stomach.

1 is a schematic diagram showing the bending mechanism of IPMC

2 is a structural diagram of a micropump according to an embodiment of the present invention;

3 is a cross-sectional view of a curved member portion showing the large deformation of the curved member in the snap-through phenomenon in the curved polymer actuator shown in FIG.

FIG. 4 is a schematic view of various types of electrodes patterned to prevent cracking of the electrode plate generated when a large deformation as shown in FIG.

Figure 5 is a schematic diagram showing the three modes by the snap-through phenomenon of the curved member of the curved polymer actuator

6 is a structural diagram of a micropump according to a preferred embodiment of the present invention

7 to 10 are a perspective view, a vertical side view, a horizontal side view and a bottom view of a tubular actuator formed in the micropump shown in FIG.

FIG. 11 is a perspective view showing a state in which electrodes are separated in the tubular actuator shown in FIG. 7, and FIG. 12 is a perspective view of a separated electrode.

Figure 13 is an illustration of the various shapes of the mold structure of the micropump of the present invention

14 is a schematic diagram showing three modes by the snap-through phenomenon of the band member in the tubular actuator shown in FIG.

100: micropump 110: substructure

111: inflow hole 112: discharge hole

113: space portion 120: curved actuator

121: curved member 122: support member

130: superstructure 131: upper space

600: micropump 610: mold structure

611: pumping space portion 620: inlet hole member

630: discharge hole member 640: tubular actuator

641: support member 642: film member

643: electrode member 644: band member

The terms used in the present invention were selected as general terms as widely used as possible, but in some cases, the terms arbitrarily selected by the applicant are included. In this case, the meanings described or used in the detailed description of the present invention are considered, rather than simply the names of the terms. The meaning should be grasped.

Hereinafter, with reference to the preferred embodiments shown in the accompanying drawings will be described in detail the technical configuration of the present invention.

However, the present invention is not limited to the embodiments described herein and may be embodied in other forms. Like numbers refer to like elements throughout the specification.

The present invention provides a micropump having a structure in which the snap-through phenomenon of the shell structure is maximized by the pumping force, which is focused on accompanied by a very large deformation force. FIG. 2 is a structural diagram of a micropump according to an embodiment of the present invention. 3 is a cross-sectional view of a curved member portion showing a large deformation of the curved member during snap-through occurring in the curved actuator shown in FIG. 2, and FIG. It is a schematic diagram of various types of electrodes patterned to prevent cracking, and FIG. 5 is a schematic diagram showing three modes by snap-through phenomenon of the curved member in the curved actuator.

First, referring to FIG. 3, it can be seen that the micropump 100 according to the preferred embodiment of the present invention includes a lower structure 110, a curved actuator 120, and an upper structure 130.

The lower structure 110 includes an inlet hole 111 through which the fluid is introduced, a discharge hole 112 through which the fluid is discharged, and a space portion 113 in which the fluid is contained, wherein the space portion 113 is a curved actuator 120. ) Has a size to accommodate the deformed curved actuator 120.

The upper structure 130 has a structure coupled to the lower structure 110, including a space portion 131 for receiving the curved actuator 120, in some cases the space portion 113 of the lower structure 110 The fluid contained therein may be configured to be unable to move to the space portion 131 of the upper structure 130 by the curved actuator 120 installed between the upper structure 130 and the lower structure 110.

In addition, the size, shape, and materials of the substructure 110 and the superstructure 130 affect the suitability for a particular environment.

For example, when intended for use in the human body or other organisms, they generally have appropriate biocompatibility properties. For use in any environment, the structure of substructure 110 and superstructure 130 (ie, the entire structure of the micropump) can be configured to withstand environmental conditions such as temperature, chemical exposure, and mechanical stress, The substructure 110 and the superstructure 130 may include a feature that allows the structure to be positioned or positioned at a location required by the installation environment or a feature that enables the orientation of the location required by the installation environment. The features may be size or shape features, or tethers or gripping structures that prevent movement of the micropump in the installation environment, or point the micropump to the desired location or in place of the required location. It may include targeting features (surface chemistry, shape, etc.) that allow for grasping.

The substructure 110 and the superstructure 130 may be manufactured using a method known to those skilled in the art of microfabrication as a component forming a micropump, which is a device that can be used for placement in an organism, in particular PVC, It is preferable to use a high biocompatibility polymer material, including any one or more of PE, PP, PMMA, PS, PET, PTFE, PU, or nylon as a mold, but various materials or not limited thereto. From combinations of materials and by various manufacturing techniques.

In this case, the inflow hole 111 and the discharge hole 112 formed in the lower structure 110 is a passage through which the fluid flows in a specific direction intended such as a direction in which the pumping force of the micropump 100 increases. It is preferable that the size and angle are adjusted to flow.

Although not shown in the drawings, in some cases, the upper structure 130 may also have the same structure as the lower structure 110, that is, the inlet and discharge holes are formed in the upper structure 130 to form the curved actuator 120. As a boundary, the pumping force is generated not only through the flow of the fluid through the substructure 110 but also through the flow of the fluid through the upper structure 130 to increase the operating force of the micropump 100 or by using two actuators. It may be implemented to enable the driving of the micropump 100.

That is, when the curved member 121 of the curved actuator 120 descends through the two-way fluid flow through the upper structure 130 and the lower structure 110, the fluid goes out of the lower structure 110 and the upper structure. This is because the two flows can be controlled at the same time as the fluid enters.

In addition, the curved actuator 120 is formed in contact with the space portion 113 of the lower structure 110 and is formed to be received by the space portion 131 of the upper structure 130, the curved member 121 and the support member (122).

Here, the curved member 121 is formed of a mechanical polymer membrane such as a piezoelectric material or an ion exchange membrane. When a voltage is applied through a metal electrode formed on the surface of the curved member 121, that is, a surface electrode, the piezoelectric or electroactive layer is applied to the curved surface. It is a portion that provides a pumping force that can be moved up and down to induce fluid as shown, and the support member 122 is supported at both ends or one end by the lower structure 110 or the upper structure 130 while supporting the curved member 121 It is a part that is fixed so that the curved actuator 120 is installed at a predetermined position of the micropump 100.

As described above, the curved actuator 120 is formed of the curved member 121 and the support member 122. In particular, the boundary portion of the curved member 121 and the support member 122, that is, the connection portion, is connected to the curved member 121 or the support member. Treatment with the ductility different from the 122 may cause the curved polymer actuator 120 to form a structure having a more unstable buckling state.

For example, the treatment may be a surface treatment such that the ductility is different from the curved member 121 or the support member 122 at the connection portion of the curved member 121 and the support member 122, the softening operation on the surface, or For example, a method of bonding a polymer such as a polymer having good expansion properties or a polymer having excellent ductility may be used.

The curved actuator 120 having such a structure is a dynamic snap-through phenomenon caused by having a more unstable buckling state due to the curved structure of the curved member 121 and the connecting structure of the curved member 121 and the support member 122. This results in a larger drive displacement. That is, as shown in FIG. 3, the curved actuator 120 having the upper hemispherical structure may generate a large deformation that is transformed into the lower hemispherical structure through the snap-through phenomenon.

The unstable buckling state of the curved polymer actuator 120 is that when the curved actuator 120 is fixed to the upper support or the lower support in the form of a cantilever, that is, only one end of the support member 122 is the upper support 130 or the lower support 110. ), It can be larger.

In addition, the curved actuator 120 is a pattern that suppresses the cracks generated when the large deformation caused by the snap-through phenomenon generated in the curved member 121, it is preferable that various types of electrodes are patterned as shown in FIG. Do.

That is, when the electrode layer is formed of metal on the upper and lower surfaces, cracks may occur in the electrode at the center of the largest deformation during large deformation, and performance may vary depending on the shape of the pattern. Likewise, the center is patterned to leave the polymer state without plating.

Through this configuration, the curved actuator 120 may have a snap-through phenomenon through an unstable buckling state, and in particular, may have three modes of snap-through phenomenon by the principle shown in FIG. The second mode and the third mode generate effects similar to the interlocking effect. That is, the second mode and the third mode do not constantly descend from the center but instead push down from one side, affecting the direction of the fluid. Since it is possible to control the flow of the flow, it is possible to suppress the backflow phenomenon and to maximize the pumping force more.

In addition, the present invention was conceived in that the snap-through phenomenon of the shell structure is accompanied by a very large deformation force due to the unstable behavior, but in order to maximize the pumping force and to prevent the backflow of the earthworm or camouflage peristalsis similar to the conventional micropump to apply a biomematic A micropump having a tubular pumping portion, not a plate form, as shown in FIG. 6 is a structural diagram of a micropump according to a preferred embodiment of the present invention, and FIGS. 7 to 10 are tubular forms formed in the micropump shown in FIG. A perspective view, a vertical side view, a horizontal side view, and a bottom view of the actuator, FIG. 11 is a perspective view showing a state in which an electrode is separated from the tubular actuator shown in FIG. 7, FIG. 12 is a perspective view of a separated electrode, and FIG. 13 is an embodiment of the present invention. Is an exemplary view of the various shapes of the mold structure of the micropump of FIG. Type actuator in a schematic diagram showing the three modes by the snap-through phenomenon of the band member.

First, referring to FIG. 6, a micropump 600 according to a preferred embodiment of the present invention includes a mold structure 610, an inlet hole member 620, a discharge hole member 630, and a tubular actuator 640. It can be seen that.

The mold structure 610 includes a pumping space portion 611 in which the tubular actuator 640 is accommodated, in which the pumping space portion 611 has a shape in which a direction in which the flowed fluid flows forms a longitudinal direction. The deformation of the actuator 640 is sized to accommodate the deformed tubular actuator 640. Preferably, the longitudinal section of the pumping space 611 forms a long oval similar to the shape of the tubular actuator 640.

In addition, the external shape of the mold structure 610 may be variously manufactured as needed, such as a rectangular parallelepiped, a cylindrical shape, and a streamlined shape, as shown in FIG. 13. , And materials influence the suitability of the specific environment.

For example, when intended for use in the human body or other organisms, the mold structure 610 is generally made of a high biocompatibility polymer, which is harmless to the human body and has suitable biocompatibility properties. Also for use in any environment, the structure of the mold structure 610 (ie the overall structure of the micropump) can be configured to withstand environmental conditions such as temperature, chemical exposure, and mechanical stress, and the mold structure 610 It may include features that allow the structure to be positioned or positioned at a location required by the installation environment or features that allow the device to be directed to a location required by the installation environment, such features being size and shape features, or installation environments. Tethers or gripping structures that prevent the movement of the micropump, or targeting features that allow the micropump to be directed to or positioned in the required position ( Surface chemistry, shape, etc.).

The mold structure 610 may be manufactured using a method known to those skilled in the art of micropump manufacture as a component forming a micropump, which is a device that can be inserted into an organism, and particularly, PVC, PE, PP, PMMA, It is desirable to prepare, using, but not limited to, high biocompatibility polymeric materials, including any one or more of PS, PET, PTFE, PU, or nylon, from various materials or combinations of these materials, and It can be formed by various manufacturing techniques.

In addition, the inlet hole member 620 and the discharge hole member 630 is formed in a tubular shape at both ends of the mold structure 610, one end is formed so as to be exposed to the outside of the mold structure 610 and the other end of the mold structure 610 Since it has a configuration that is connected to both ends of the tubular actuator 640 accommodated in the pumping space 611 therein, not only serves as a passage through which the fluid flows, but also performs a function of fixing the tubular actuator 640 to the mold structure 610. do.

That is, the other end of the inlet hole member 620 is formed to be connected to one end of the tubular actuator 640 accommodated in the pumping space 611 to inject fluid into the inner space of the tubular actuator 640, the discharge hole member This is because the other end of the 630 is formed to be connected to the other end of the tubular actuator 640 to discharge the fluid from the inner space of the tubular actuator 640 to the outside.

As described above, the inlet hole member 620 and the discharge hole member 630 formed at both ends of the mold structure 610 and connected to both ends of the tubular actuator 640 flow in one direction. The size and angle may be adjusted so that the fluid may flow in a specific direction intended to flow, such as a direction in which the pumping force of the micropump 600 increases or a direction in which the fluid does not flow back. The angle is adjusted and formed. In addition, as long as the inlet hole member 620 and the discharge hole member 630 are tubular, the cross-sectional shape is not limited.

In addition, the tubular actuator 640 is formed to be accommodated in the pumping space 611 of the mold structure 610 and has a structure that is protected by the mold structure 610, the longitudinal cross section that is the direction in which the introduced fluid flows long Since it is preferable to form the outer peripheral surface of the inner space having an elliptical shape, the overall shape is similar to the tube shape.

The tubular actuator 640 preferably includes a support member 641, a film member 642, an electrode 643, and a band member 644.

First, the support member 641 is formed so that the inlet hole member 620 and the discharge hole member 630 penetrates the center thereof on a flat plate, that is, to surround the inlet hole member 620 and the discharge hole member 630. Since it is formed is formed on both ends of the pumping space 611, respectively. As such, the support member 641 forms a bottom and an upper surface of the overall tubular shape, thereby connecting and fixing the inlet hole member 620 and the discharge hole member 630 and the tubular actuator 640 as a result of the tubular actuator 640. Is fixed to the mold structure 610. The shape of the support member 641 is not limited, but is circular as shown.

The film members 642 are formed at both ends of each of the supporting members 641 to form an outer circumferential surface of the inner space. For example, the film members 642 have small diameters at both ends to be similar to the inner space of the tubular actuator 640. A cylindrical film having a large diameter may be prepared, and both ends of the film may be fixed to an annular portion having a predetermined width from a central portion of the surface of each support member 641 through which the inlet hole member 620 or the discharge hole member 630 penetrates. Fixing by the width can be configured to configure the outer peripheral surface of the inner space of the tubular actuator 640 having a tubular shape as a whole.

Here, the fixing of the film member 642 and the supporting member 641 may use a known fixing method such as using an adhesive. However, when the micropump 600 is to be used inside an organism such as a human body, the fixing means may also be biocompatible. Be careful to use what you have. In addition, the film member 642 may be a polymer film, although the material is not limited as long as the film member 642 has shrinkage force that does not inhibit the displacement of the band member 644 and has biocompatibility.

The electrode 643 is patterned on the outside of the portion where the film member 642 is fixed so that the fluid flowing through the inlet hole member 620 of the surface of the support member 641 is not in contact with the band member 644. It is formed by a known method, preferably to form a groove to the side adjacent to the outer periphery of the support member 641 and to form an electrode 643 inside the groove.

Both ends of the band member 644 are fixed to each support member 641, and a plurality of band members 644 are formed adjacent to the surface of the film member 642 such that at least one of both ends thereof is connected to the electrode 643. In the drawing, the separation width of the band member 644 is shown to be considerably wide, but a plurality of band members are fixed to both ends of the support member 641 so that there is almost no separation width, so that the surface of the film member 642 is entirely on the band member 644. It may be formed to be wrapped by. In addition, the band member 644 and the support member 641 may be fixed by a known fixing method, preferably the band member 644 is connected to the electrode formed in the groove of the support member 641 and at the same time the groove It is fitted in and fixed.

Here, the band member 644 is formed of an electromechanical polymer film such as a piezoelectric material or an ion exchange membrane. When voltage is applied through the connected electrode 643, the band member 644 may be in an unstable buckling state due to piezoelectric or electric activity. The dynamic snap-through phenomenon that results from having a larger drive displacement. When the band member 644 is driven as described above, the band member 644 is tubular because the band member 644 transmits a driving force to the tubular film member 643 in contact with the band member 644 so that the band member 644 moves in a peristaltic motion. In the actuator 640 is a portion that provides a pumping force.

On the other hand, although not shown, the power supply for supplying a voltage to the electrode 643 of the tubular actuator 640 is inserted into the mold structure 610 is formed integrally or formed outside the mold structure 610 tubular actuator 640 Is applied to the voltage).

Through such a configuration, the tubular actuator 640 may have a snap-through phenomenon through an unstable buckling state of the band member 644. In particular, the tubular actuator 640 may have three modes of snap-through phenomenon by the principle shown in FIG. Preferably, the second mode and the third mode generate an effect similar to the interlocking effect, that is, the second mode and the third mode do not constantly descend from the center but instead push down from one side, so the direction of the fluid Influences can be used to control the flow of fluid, thereby reducing backflow and maximizing pumping power.

In addition, the micropump having the above-described structure can operate at low voltage to efficiently use energy, and is very small and excellent in biocompatibility, so that it is easy to provide a driving force to an internal human implantable medical device. Internally insertable medical devices can be manufactured.

At this time, when the diameter of the inlet hole and the discharge hole member of the hose and the micropump generally used in the micro medical equipment, including the medical device to the same standard is very excellent compatibility.

As described above, the present invention has been illustrated and described with reference to preferred embodiments, but is not limited to the above-described embodiments, and is provided to those skilled in the art without departing from the spirit of the present invention. Various changes and modifications will be possible.

Claims

A lower structure including an inlet hole through which the fluid is introduced, a discharge hole through which the fluid is discharged, and a space in which the fluid is contained;

A curved actuator formed in contact with the space portion of the substructure; And

And an upper structure including a space portion accommodating the curved actuator and coupled to a lower structure.
The method of claim 1,

The curved actuator includes a curved member and a support member for supporting the curved member.
The method of claim 2,

The curved member is a micropump, characterized in that formed of a piezoelectric material or a mechanical polymer film.
The method of claim 2

And said curved actuator has a large drive displacement through dynamic snap-through that occurs in an unstable buckling state.
The method of claim 4, wherein

The unstable buckling state of the curved actuator is characterized in that the connection portion between the curved member and the support member is made so that the ductility is different from the curved member or the support member.
The method of claim 4, wherein

The unstable buckling state of the curved actuator is a micropump, characterized in that the curved actuator is fixed to the upper support or the lower support in the form of a cantilever.
The method of claim 4, wherein

The curved actuator is a micropump, characterized in that to control the flow of the fluid through the second mode and the third mode of the generated snap-through phenomenon to suppress the backflow phenomenon and to maximize the pumping force.
The method of claim 4, wherein

The curved actuator is a micropump, characterized in that the electrode is patterned in the form of suppressing the crack generated when the large deformation caused by the snap-through phenomenon generated in the curved member.
The method of claim 1,

The substructure and the superstructure are made of PVC, PE, PP, PMMA, PS, PET, PTFE, PU, or a micropump characterized in that the surface is made of a high biocompatible polymer containing any one or more of nylon .
The method of claim 1,

Micro-pump characterized in that the inlet hole in which the fluid is introduced into the upper structure and the discharge hole is discharged from the fluid is formed.
The method of claim 1,

The inflow hole and the discharge hole is a micropump, characterized in that the size and the angle is adjusted so that the fluid flows in one direction.
A tubular actuator configured to form an outer circumferential surface of an inner space having a long oval shape having a longitudinal cross section which is a flowing direction of the introduced fluid;

A mold structure in which a pumping space part is formed to accommodate the tubular actuator therein;

An inlet hole member formed at one end of the mold structure to allow fluid to flow into the tubular actuator; And

A discharge hole member formed at the other end of the mold structure to discharge the fluid of the tubular actuator; Micro pump comprising a.
13. The tubular actuator of claim 12, wherein

Support members respectively formed at both ends of the pumping space part to surround the inflow hole member and the discharge hole member;

Film members formed at both ends of the support members to form an outer circumferential surface of the inner space;

An electrode formed on an outer side of a portion of the surface of the support member to which the film member is fixed; And

And a plurality of band members fixed to both ends of each of the supporting members, the band members being formed adjacent to the surface of the film member such that at least one of the two ends is connected to the electrode.
The method of claim 13,

The band member is a micropump, characterized in that formed of a piezoelectric material or a mechanical polymer film.
The method of claim 13,

And said tubular actuator has a large drive displacement through a dynamic snap-through phenomenon occurring in an unstable buckling state of said band member.
The method of claim 15,

The film member is a micropump, characterized in that the polymer film having a shrinkage force not to inhibit the displacement of the band member.
The method of claim 15,

And the tubular actuator controls the flow of fluid by causing the tubular body of the actuator to interlock through the first and second and third modes of the generated snap-through phenomenon.
The method of claim 12,

The mold structure is made of PVC, PE, PP, PMMA, PS, PET, PTFE, PU, or a micro-organic, characterized in that the surface is made of a high biocompatible polymer comprising at least one selected from the group consisting of nylon Pump.
The method of claim 12,

The inlet hole member and the discharge hole member is a micropump, characterized in that the size and the angle is adjusted so that the fluid flowing in one direction is formed.
The method of claim 13,

And a power supply unit connected to the electrode to supply a voltage to the band member.
An internal human implantable medical device using the micropump according to any one of claims 12 to 20.
The medical device of claim 21, wherein the diameters of the inlet and outlet members of the micropump are the same as those of the hose used in the medical device.