WO2009144072A1

WO2009144072A1 - Arrangement for coating a substrate

Info

Publication number: WO2009144072A1
Application number: PCT/EP2009/054218
Authority: WO
Inventors: Stefan Bangert; Jose Manuel Dieguez-Campo; Michael König; Nety M. Krishna; Byung-Sung Leo Kwak
Original assignee: Applied Materials, Inc.
Priority date: 2008-05-30
Filing date: 2009-04-08
Publication date: 2009-12-03
Also published as: JP5512660B2; JP5932867B2; JP2014169501A; CN102046832A; TWI527925B; KR20110020878A; KR101682348B1; TW201005115A; JP2011522118A; CN102046832B

Abstract

The invention relates to an arrangement for coating a substrate (4) by means of a vapor distributor (3). This vapor distributor (3) is connected with a vaporizer crucible (7) via an inlet (5). At least one valve (13) is disposed between the crucible (7) and the inlet (5). The vaporizer crucible (7) is located in a chamber (12) which can be evacuated or flooded by means of a vacuum valve (11).

Description

ARRANGEMENT FOR COATING A SUBSTRATE

Description

The invention relates to an arrangement for coating a substrate according to the preamble of patent claim 1.

Arrangements for coating a substrate with cadmium sulfide or zinc cadmium sulfide or with OLED substances are already known (US 4 401 052, DE 102 24 908 A1 , EP 1 357 200 A1 ). Herein the materials with which the substrate is to be coated are vaporized in vaporizers.

With these arrangements, however, no materials are vaporized which belong to the group alkali- and/or alkaline earth-metals, because these metals are highly reactive and form compounds with glass and water. Of the alkali- and alkaline earth-metals, lithium is in particular of interest since it is suitable for the production of only extremely slowly discharging batteries and accumulators.

Modern lithium batteries came first on the market in 1991. With them, Li⁺ ions are exchanged between a graphite (Li_xCe) anode and a layered oxide (Lii_-xT^Mθ2) cathode, T^M being a transition metal - cobalt, nickel or occasionally manganese. At an average voltage of 3.8 V the energy density is approximately 180 Whkg^"1, which is approximately the fivefold of the considerably older lead-acid battery.

The most recent developments in the field of Li⁺ batteries involve the use of nanomaterials. Moreover, lithium-oxygen batteries are being investigated, which comprise an oxygen cathode and a lithium anode (M. Armand and J.-M. Tarascon: Building Better Batteries, Nature, Vol. 451 , 7 Febr. 2008, pp. 652 - 657).

Lithium batteries are also produced as thin-layer batteries (WO 02/099910 A1 , p. 1 , lines 17 - 20). The application of the thin layers takes place by sputtering. During the sputtering ions, for example of lithium orthophosphate are deposited on a substrate. Through reactive sputtering an electrolyte layer of Li_xP_yON_z can be applied. It is also known to apply thin layers of SiO2 and lithium by means of PECVD (= Plasma Enhanced Chemical Vapor Deposition) onto a substrate (US 6 177 142 B1 ).

Further known is the coating of a substrate with Li-Co-O, wherein an electron beam vaporizer is being utilized (JP 2003-234100).

In another known arrangement for the production of thin layers of lithium or lithium alloys on a substrate, lithium, located in a crucible, is vaporized under vacuum (JP 2002-206160).

Finally, there is known a film formation source for use in a film formation apparatus having a film formation chamber in which a vacuum or a depressurized state is formed and a sublimated or evaporated film formation material is formed into a film on a substrate (EP 1 584 705 A). This film formation source further comprises a discharge outlet disposed within the film formation chamber for discharging the film formation material towards a film formation surface of the substrate, a material accommodating section disposed outside the film formation chamber and including a material container containing the film formation material. A discharge passage air- tightly communicating the discharge outlet with the material accommodating section is also provided in the film formation source.

The invention addresses the problem of providing an arrangement for coating a substrate, wherein the coating material can also be a member of the group of chemically reactive alkali- and alkaline earth-metals.

This problem is solved according to the features of patent claim 1.

The advantage attained with the invention comprises in particular that a vaporizer crucible can readily be replenished or exchanged free of risks. This is of significance in particular for highly reactive materials to be vaporized, for example lithium, since these must not be contacted nor be exposed to normal atmosphere, oxygen or water.

The invention consequently relates to an arrangement for the coating of a substrate by means of a vapor distributor. This vapor distributor is connected with a vaporizer crucible via a feed system. Between the crucible and the feed system at least one valve is disposed. The vaporizer crucible is located in a chamber which can be evacuated or flooded via a vacuum valve by means of a gas supply and a vacuum pump.

Embodiment examples of the invention are shown in the Figures and will be described in further detail in the following. In the drawing depict:

Fig. 1 a vapor feed system with the separating valve closed,

Fig. 2 the vapor feed system according to Figure 1 with a PID controller with the separating valve open,

Fig. 3 a vapor feed system with two separating valves,

Fig. 4 the vapor feed system according to Figure 3, in which the separating valves are closed and a vaporizer crucible is laterally shifted.

Figure 1 shows a vapor feed system 1 for a vacuum chamber. Of the vacuum chamber only the chamber wall 2 is evident. In Figures 1 to 3 of DE 102 24 908 A1 such a vacuum chamber is shown in detail.

The vapor feed system 1 comprises a vertically oriented vaporizer tube 3, opposite to which is disposed a substrate 4 to be coated. The vaporizer tube 3, which is provided with several, linearly vertically disposed vaporizer nozzles, is connected with an inlet tube 5 which is directed at right angles to the vaporizer tube 3. This vaporizer tube 3, consequently, serves as a vapor distributor. Parallel to the vaporizer tube 3 and perpendicularly to the inlet tube 5 is provided a cylindrical vaporizer crucible 7, which is located in a crucible housing 8. If reactive materials, for example lithium, are vaporized, the crucible 7 is, for example, comprised of stainless steel, titanium or molybdenum. Beneath the vaporizer crucible 7 is located a cylinder 9 with a piston 10. The vaporizer crucible 7, which in Figure 1 is in its lower position, can be raised and lowered by means of the piston 10. Laterally to the piston 10 is provided a vacuum valve 11 , via which a crucible chamber 12 can be evacuated or be flooded, for example with protective gas.

However, since not only the crucible 7 is exposed to the reactive material, it is obvious that the entire vapor feed system must be comprised of a material that is inert relative to these reactive materials.

In this crucible chamber 12 is located a linear guide 31 which contributes to the stabilization of the crucible chamber 12. On this linear guide 31 is disposed a guide element 32 that is connected to the vaporizer crucible 7. By moving the guide element 32 along the linear guide 31 the vaporizer crucible 7 is also moved along the linear guide 31 , i.e. in the direction of arrows 33 and 34.

With the aid of a separating valve 13, shown in Figure 1 in the closed state, the crucible chamber 12 together with the crucible 7 can be separated from the inlet tube 5. This separating valve 13 is disposed on a spacer ring 25. The inlet tube 5 includes a downwardly directed connection fitting 14. In Figure 1 can further be seen a heating jacket 15. The connection fitting 14 can be closed by means of an end piece 16 of a piston 17. This connection fitting 14 comprises furthermore a calotte-shaped part 19 into which the upper part 18 of the vaporizer crucible 7 can engage. Piston 17 is connected with a cylinder by means of which the piston 17 can be moved. The cylinder 35 can be a pneumatically operated cylinder.

Within the crucible chamber 12 is further evident a holding arrangement 36 that is placed onto the piston 10. A thermocouple 44 is wound from a vacuum-tight power feedthrough 50 in a spiral about the holding arrangement 36 and terminates in an indentation 51 located in the bottom of crucible 7. By means of the thermocouple 44 the temperature at the bottom of the vaporizer crucible 7 can be measured. The spiral winding of the thermocouple 44, that, on the one hand, is fastened on the power feedthrough 50 and, on the other hand, on the holding arrangement 36, permits the necessary lift of crucible 7 from a lower into an upper position. This is illustrated in Figure 2. Therewith the thermocouple 44 can be moved in the direction of arrows 33 and 34, respectively, by means of piston 10.

In Figure 1 is also evident a wall 6 of a glovebox 40, which encompasses the vaporizer crucible 7 and the vaporizer chamber 12. It becomes thereby possible to exchange the vaporizer crucible 7 under protective gas or to fill it with material. As protective gas can serve, for example, argon. Figure 1 shows the glovebox 40 only segment-wise and schematically.

Figure 1 shows further a pressure gauge head 38 for measuring the pressure in the vaporizer crucible 7. When the pressure in the vaporizer crucible 7 reaches the desired value, the separating valve 13 is either opened or closed by means of a control not depicted in Figure 1.

Evident is also a cooling means port 37, in Figure 1 shown only as a segment. This cooling means port 37 is connected with a supply unit, not shown in Figure 1 , for a cooling means, for example H₂O. If needed, the housing 41 is cooled with this cooling means. The cooling means port 37 can be connected to the supply unit via an element, for example a tubing of rubber, not shown in Figure 1. If the cooling means is H₂O, the supply unit can be a conventional water connection.

Figure 2 shows the same arrangement as Figure 1 , wherein, however, the vaporizer crucible 7 is raised by the piston 10 and specifically so far that the uppermost part 18 of vaporizer crucible 7 is inserted into the lowermost part 19 of connection fitting 14. The upper part 18 of the vaporizer crucible 7 is here formed spherically while the lower part of connection fitting 14 is implemented in the form of a calotte. The separating valve 13 is herein opened.

By 20 is denoted a crucible heating system that encompasses the vaporizer crucible 7. This crucible heating system 20 is connected with a PID controller 21 which, in turn, is connected with a rate acquisition 22. This rate acquisition 22 can be provided with a measuring instrument 23, for example an oscillating crystal or an emission spectroscope. This measuring instrument 23 acquires the vaporization rate of the material which reaches the substrate 4 from the vaporizer tube 3. For this purpose in the vaporizer tube 3 a special nozzle 24 is provided which generates a rate signal that is proportional to the coating rate on the substrate 4. Through this nozzle 24 streams the vapor onto the measuring instrument 23. In this manner, the crucible heating system 20 can be regulated as a function of the coating rate. On the PID controller 21 can also be set a nominal value. Instead of a PID controller, another controller can also be provided. The PID controller involves the general basic type of a controller comprised of the parallel circuit of PD controllers and I controllers, whose properties - early detection of disturbances, rapid correction and elimination of regulation deviation - it combines. If the regulated process contains dead times, the PID controller cannot be utilized due to its D component.

The vapor exiting the vaporizer tube 3 through the perpendicularly linearly disposed holes is shown symbolically by arrows 26. The holes are laid out such that high vaporization rates and uniform coating are attained. For example, they have a diameter of 1 mm to 4 mm and a distance of 5 mm to 30 mm. To compensate the layer thickness decreases in the margin regions of substrate 4, the holes or nozzle bores can here be located more closely to one another and, for example, only have half the distance from one another. Instead of cylindrical holes, elongated holes or other forms of openings are also conceivable.

Figure 3 shows the same arrangement as Figure 1 , however, with two separating valves 13 and 27, both of which are closed. The two separating valves 13 and 27 permit an even better exchange of the vaporizer crucible 7 under protective gas. The upper separating valve 13 separates the coating chamber 28 from atmospheric pressure 29, while the lower separating valve 27 separates the crucible chamber 8, fillable with protective gas, from atmospheric pressure 29. This separating valve 27 is disposed on the spacer ring 25.

The housing of the separating valve 27 must be implemented such that it is vacuum tight, however, the gate of the valve only needs to be diffusion-tight against gases. Since after flooding of crucible 7 to atmospheric pressure, no pressure difference with respect to the ambient air exists, the gate of the valve 27 does not need to absorb any vacuum forces.

In the representation of Figure 3 the vaporizer crucible 7 is located in its lower position. Via the vacuum valve 11 the crucible chamber 12 can be separately evacuated or flooded, for example with a protective gas. Not shown is the connection of the vacuum valve 11 to a gas supply and a vacuum pump. The gas supply as well as the vacuum pump can optionally be connected via, for example, a T-piece and appropriately disposed valves with the flexible corrugated tubing leading to the valve 11. For removing the vaporizer crucible 7 from the crucible chamber 12, the chamber is flooded. In the glovebox 40 the vaporizer crucible 7 can refilled or exchanged, respectively. The glovebox 40 is herein under protective gas, for example argon.

In the depiction of Figure 4 the vaporizer crucible 7 is brought along a rail 30 into a position remote from the vaporization chamber. This takes place by movement of the vaporizer chamber 12 in the direction of arrow 39. Preferably in this position is the vaporizer crucible 7 exchanged or refilled. The upper separating valve 13 is herein closed such that the vaporizer chamber continues to be under vacuum. Herewith the vacuum is not broken.

It is understood that exchanging the crucible 7 or also filling it is only possible with the valve 27 open. The vaporizer crucible 7 must therefore be encompassed by the glovebox 40 filled with the protective gas.

As is shown in Figure 4, the vaporizer crucible 7 is located in its lower position. Via the vacuum valve 11 the crucible chamber 12 can be evacuated or flooded independently of the vacuum chamber. The vaporizer crucible 7, together with the crucible chamber 12, is introduced into the glovebox 40. Here the vaporizer crucible 7 is removed and replaced by a new vaporizer crucible or is refilled.

After filling the crucible 7 with the vaporization material, the separating valve 27 is closed and the crucible chamber 12 is evacuated. Subsequently crucible chamber 12 and vaporizer crucible 7 move along rail 30 back into their rearward position by moving in the direction of arrow 42. After the separating valves 13 and 27 have been connected vacuum-tight with one another and the crucible chamber 12 has been evacuated, the separating valves 13, 27 can be opened. The vaporizer crucible 7 is subsequently brought into the upper position by movement in the direction of arrow 33.

According to a further embodiment example, which is not depicted, the glovebox 40 can be located spaced apart from the coating installation. In this case the crucible 7 under protective gas is removed with the valve 27 closed in the pulled-out position shown in Figure 4 from the crucible chamber 12 together with the spacer ring 25 and a suitable, also not shown, locking mechanism, i.e. lifted from the rail 30. This locking mechanism fixes the crucible 7 on the spacer ring 25 or on the flange fastened on spacer ring 25. In this manner the crucible 7 in the closed state can be transported to the glovebox 40 located apart. Here the crucible 7 can optionally be cleaned, refilled again and closed with valve 27.

The above described processes can be utilized for the coating of glass substrates. However, using them, it is also possible to coat silicon wafers of 200 mm or 300 mm diameter, wherein a substrate carrier can be equipped with one or with several wafers. A substrate carrier is, however, not shown in Figure 4. The necessary coatable substrate height h for the uniform coating of all substrates placed onto the carrier, can be adapted via the length of the vaporizer tube 3.

Moreover, flexible substrates of synthetic material or metal can also be worked in an installation, such as for example depicted in Figure 3 of EP 1 589 130 A1. In this known installation only the vapor distributor tube and the vapor exit nozzle would need to be disposed horizontally and parallel to the sheeting.

It is understood that, instead of one crucible, several crucibles can also be provided and be interconnected in the manner described in EP 1 357 200 A1.

Those skilled in the art can readily recognize that numerous variations and substitutions may be made in the invention, its use and its configuration to achieve substantially the same results as achieved by the embodiments described herein. Accordingly, there is no intention to limit the invention to the disclosed exemplary forms. Many variations, modifications and alternative constructions fall within the scope and spirit of the disclosed invention as expressed in the claims. Reference numerals

1 vapor feed system

2 wall

3 vaporizer tube

4 substrate

5 inlet tube

6 wall

7 vaporizer crucible

8 crucible housing

9 cylinder

10 piston

11 vacuum valve

12 crucible chamber

13 separating valve

14 connection fitting

15 heating jacket

16 end piece

17 piston

18 part

19 part

20 crucible heating system

21 PID controller

22 rate acquisition

23 measuring instrument

24 nozzle

25 spacer ring

26 arrows

27 separating valve

28 coating chamber

29 atmospheric pressure

30 rail

31 linear guide

32 guide element arrow arrow cylinder holding arrangement cooling means port pressure gauge head arrow glovebox housing arrow thermocouple feedth rough indentation

Claims

Patent Claims

1. Arrangement for the coating of a substrate (4) by means of a vapor distributor (3) connectable via an inlet (5) with a vaporizer crucible (7), wherein between the crucible (7) and inlet (5) at least one valve (13) is disposed, and wherein the vaporizer crucible (7) is located in a chamber (12) that can be evacuated or vented by means of a vacuum valve (11 ), characterized in that a separate chamber (40) is provided for filling or exchanging the vaporizer crucible (7).

2. Arrangement as claimed in claim 1 , characterized in that the vapor distributor (3) is a linear vapor distributor.

3. Arrangement as claimed in claim 1 , characterized in that the vaporizer crucible (7) is movable toward the inlet (5) and away from it.

4. Arrangement as claimed in claim 1 , characterized in that the valve (13) provided between crucible (7) and inlet (5) is associated with the inlet (5).

5. Arrangement as claimed in claim 1 , characterized in that a second valve (27) is provided that is associated with the crucible chamber (12).

6. Arrangement as claimed in claim 5, characterized in that the second valve (27) is movable together with the vaporizer crucible (7) and the chamber (12).

7. Arrangement as claimed in claim 1 , characterized in that a measuring instrument (23) is provided which measures the vaporization rate and that this measuring instrument (23) is connected with a regulator (21 ) regulating a heating system (20) which heats the vaporizer crucible (7).

8. Arrangement as claimed in claim 1 , characterized in that the substrate (4) is located within a vacuum chamber.

9. Arrangement as claimed in claim 1 , characterized in that the vaporizer crucible (7) is located outside of a vacuum chamber.

10. Arrangement as claimed in claim 1 , characterized in that the vapor distributor (3) comprises at least one nozzle (24) through which streams vapor onto a measuring instrument (23).

11. Arrangement as claimed in claim 1 , characterized in that the vapor feed system (1 ) as well as the crucible (7) are comprised of a material that does not react chemically with the material to be vaporized.

12. Arrangement as claimed in claim 6, characterized in that the movement takes place along a rail (30).

13. Arrangement as claimed in claim 1 , characterized in that the chamber (40) is a glovebox (40).

14. Arrangement as claimed in claim 7, characterized in that the regulator (21 ) is a PID controller.

15. Arrangement as claimed in claim 2, characterized in that the linear vapor distributor (3) has several openings, disposed on at least one line, with a diameter of approximately 1 to 4 mm.

16. Arrangement as claimed in claim 6, characterized in that the crucible (7) closed by the separating valve (27) can be removed from the rail (30).

17. Arrangement as claimed in claim 15, characterized in that the openings are holes.

18. Arrangement as claimed in claim 15, characterized in that the openings are slits.

19. Arrangement as claimed in claim 15, characterized in that the openings are located more closely to one another in the margin region of the vapor distributor (3).

20. Arrangement as claimed in claim 1 , characterized in that the substrates are comprised of silicon or glass or synthetic material or metal.

21. Method for the production of coated substrates with the arrangement as claimed in claims 1 to 20.

22. Application of the coated substrates as claimed in claim 21 for the production of lithium batteries.

23. Arrangement for the coating of the substrate (4) by means of a vapor distributor (3) connectable via an inlet (5) with a vapor crucible (7), wherein between the crucible (7) and inlet (5) at least one valve (13) is disposed and wherein the vaporizer crucible (7) is located in the chamber that can be evacuated or vented by means of a vacuum valve (11 ), characterized in that a second valve (13) is provided that is associated with the crucible chamber (12).