WO2009024344A1 - Optical microprobe - Google Patents

Optical microprobe

Info

Publication number
WO2009024344A1
WO2009024344A1 PCT/EP2008/006885 EP2008006885W WO2009024344A1 WO 2009024344 A1 WO2009024344 A1 WO 2009024344A1 EP 2008006885 W EP2008006885 W EP 2008006885W WO 2009024344 A1 WO2009024344 A1 WO 2009024344A1
Authority
WO
Grant status
Application
Patent type
Prior art keywords
light
optical
surface
lens
grin
Prior art date
Application number
PCT/EP2008/006885
Other languages
German (de)
French (fr)
Inventor
Peter Lehmann
Original Assignee
Carl Mahr Holding Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00Instruments as specified in the subgroups and characterised by the use of optical measuring means
    • G01B9/02Interferometers for determining dimensional properties of, or relations between, measurement objects
    • G01B9/02091Tomographic low coherence interferometers, e.g. optical coherence tomography
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical means
    • G01B11/24Measuring arrangements characterised by the use of optical means for measuring contours or curvatures
    • G01B11/2441Measuring arrangements characterised by the use of optical means for measuring contours or curvatures using interferometry
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00Instruments as specified in the subgroups and characterised by the use of optical measuring means
    • G01B9/02Interferometers for determining dimensional properties of, or relations between, measurement objects
    • G01B9/02049Interferometers for determining dimensional properties of, or relations between, measurement objects characterised by particular mechanical design details
    • G01B9/0205Interferometers for determining dimensional properties of, or relations between, measurement objects characterised by particular mechanical design details of probe head

Abstract

An optical microprobe for common-path interferometers uses micro-optical components and utilizes a light exit surface (11) curved parallel to the optical spherical wave passing through it in order to generate a defined reference beam with an unambiguous phase angle of sufficient intensity and negligible dispersion difference relative to the measurement beam. As an alternative, the light exit surface can be situated so close to the object that as a result of lack of parallelism with respect to the wavefront passing through it, the disturbances brought about remain below a given limit value.

Description

Optical microprobe

The invention relates to an optical microprobe for focusing a light beam onto a measurement object.

Optical microprobes are components of optical sensor systems. You are introduced to a target and capture high precision changes in distance between the probe and the measurement object.

For the optical measurement of objects, DE 103 17 826 Al discloses a method and a device for interferometric measurement of distances, topographies or depth profiles. In this case an interferometric array is provided with an interferometer unit which is connected both to a light source as well as to an optical microprobe over a fiber optic device. Ü about the microprobe light is guided to a measurement object and received back by it. The light is then fed to the interferometer, to perform the desired measurement. In order to measure short coherent light is preferably used.

About the construction of the probe is given little this document.

The interferometric distance measurement is also known from DE 198 08 273 Al. A duly established home interferometers is connected via a fiber-optic device for optical probes containing both a measuring light path and a reference light. In order to measure short coherent light is preferably used here. About the structure of the lens, ie an optical microprobe, this document provides little information.

In DE 100 57 539 Al describes an interferometric measuring device based on a fiber-based optical probe, wherein the free, facing the measuring object end portion of the fiber polished provided with an aperture as a lens or prism formed against disturbing reflection light treated beveled, mirrored, antireflective or is provided with a combination of these measures.

In US 6,564,087 Bl optical probes are described in which lenses and prism elements for beam shaping and redirection to an optical fiber are placed so that the fiber leaves a focused light beam. Here, the end surfaces from which the light exits, designed either flat or convex. These probes are used in conjunction with an interferometric method, the so-called "Optical Coherence Tomography".

When using kurzkohärentem light to metrological purposes, there will be special requirements. the different spectral components of the light passes this light through a dispersion optical lossy ULTRASONIC medium therethrough, so to move at different speeds. In an interferometer, the dispersion differences between the reference beam and the measuring beam must be extremely low, since otherwise the interference capability of the light is lost.

Further, it is desirable for the optical measurement when the measurement beam relative to the optical axis at a large angle as possible, ie, focused with the greatest possible numerical aperture N A. This should be as greater than 0.1. This high spatial resolution and a great insensitivity to local inclinations of the surface of the object can be achieved. At the same time, a large distance between the optical probe and the measurement object is often required. These requirements can be met only very limited rosonden with the currently known optical micro-. The most relevant prior art probes have a low numerical aperture (less than 0.1).

It is therefore looking for a solution to at larger numerical apertures within an optical Mic rosonde a defined reference beam with a unique phase of sufficient intensity and negligible dispersion difference with respect to the measurement beam to produce.

In addition to such a microprobe can be manufactured with a minimum of effort and assembled.

This object is achieved by the micro probe of claim 1 as well from the micro-probe according to claim. 2

The microprobes invention lead both the actual measuring beam which is directed onto the object to be measured and is reflected therefrom, and a reference beam, which is superimposed on the measuring beam and interfering with this. The system has proven particularly robust because the measuring and the reference beam are largely out together and the paths that either covers only the measuring beam or only the reference beam are kept short. During the measurement beam to the object surface, and this goes back, the reference beam passes to the light emission surface and is reflected by this in the probe back. Thereby, the dispersion difference between the measuring beam and reference beam is low, and even when white light is negligible or at least tolerable.

Furthermore, the microsensor according to the invention allows to achieve high numerical apertures (eg from ≥0, l). Characterized the optical microprobe is insensitive to local inclinations of the surface of the measurement object.

The optical microprobe invention also allows for the easy adjustment of the intensity of the measuring beam relative or compared to the intensity of the reference beam. It is sufficient, for example, to make the reflection characteristics of the light-emitting surface appropriately.

The probe of the invention can be manufactured in a simple manner with little effort and assembled due to the exclusive use of simple 'Optical elements that can be connected directly to one another. This results in a mechanically robust unit.

An essential idea of ​​the invention that the light exit surface of the optical probe is concave. This is achieved eg by using a glass rod is installed with concave curved light exit surface between the GRIN lens (gradient index) lens, GRIN-fiber or other collecting lens and the object surface. However, the light exit surface may alternatively be arranged directly on the converging lens, the GRIN lens or GRIN fiber and also concave. The optical fiber is used to illuminate the GRIN lens or convex lens. Between the optical fiber and the collection lens or GRIN lens of the optical fiber emerging from the light beam is fanned out. For this purpose, a distance between the optical fiber and the collection lens or GRIN lens, or alternatively a rod of optically transparent and homgenem material, for example can be used a glass rod. The optical axis of the optical fiber passes into the cylinder axis of the glass rod. The light emerging from the fiber core light can initially divergent propagate in the glass rod. so that the core section of the optical fiber assumes the function of an optical shutter, can pass through the light reflected at the measured object light only when it is focused on the fiber core, and the angle to the optical axis within the induced by the numerical A- pertur the fiber acceptance angle lies. Preferably, for example, cylindrical GRIN lens is attached to the glass rod, that the cylinder axes of the glass rod and the GRIN lens coincide.

The GRIN lens collimates the first light beam and focuses it then so, that a converging cone of light that can comparable, the GRIN lens. The beam is guided over a concave light exit surface directly or alternatively via a cylindrical or conical glass rod in the direction of the measured object. The concave light emission surface is then attached to the glass rod. At a defined distance to the measuring object of the cone of light then exits from the glass rod and runs together as a convergent spherical wave to a focal point corresponding to the measurement point on the measurement object. For this purpose, it is preferable that the curvature of the concave light exit surface with the curvature of the wavefront of the spherical wave coincides at the location of the light exit. In other words, the individual light rays of to the measurement object toward converging light cone are perpendicular to the light emission surface and are therefore not broken. The wave fronts of the converging spherical wave thus parallel to the concave exit surface. This creates by (partial) reflection on the light-emitting surface a defined reference beam whose light is coupled into the fiber core. The exiting proportion of the light, however, occurs through the concave light exit surface through without that the individual light beams would be deflected thereby.

After reflection on the measurement object, the light rays travel back to the light-emitting surface, while a divergent spherical wave apart. They occur at least partially back through the light emission window formed by the concave spherical segment surface therethrough are passed through the optical system to the fiber core and coupled into the fiber.

The arranged between the GRIN lens and the measured object element may be a glass rod, which for example may be cylindrical or frustoconical. Also parts of the GRIN lens can be formed frusto-conical. This has the advantage that the probe geometry of the geometry of a conventional tactile Rauheitstastspitze similar. Rauheitstastspitzen also have a conical basic geometry, so that they can slide in a Tastschnittmessung over interfering edges on the measurement object away. While it is advantageous, if the light exit surface is a concave spherical segment surface whose center of curvature coincides with the focal point of the microprobe, modifications to this arrangement are possible that do not require curved light exit surface. For this purpose which is arranged between the GRIN lens and the measured object optical element, that is, for example, the glass cylinder or the glass cone, such a length along the optical axis, that until it extends directly to the measurement object, the surface of which is located in the vicinity of the focus , The light-emitting surface lies at a point where the light beam is already so focused that can be dispensed onto the concave configuration of the light-emitting surface. This condition occurs when the space occupied by the element light path, better occupies at least 80% 90% of the distance between the converging lens and the GRIN lens and the focal point. The light dispersion between the light emission window and the object surface is so small that it seems hardly disturbing.

The arrangement of the optical element between the GRIN lens and the measured object is not mandatory. Alternatively, to dispense with the .Element. The light then exits directly from the GRIN lens, the end surface is machined so that a concave spherical surface is formed.

There are other variations possible. For example, the GRIN lens can be replaced by a GRIN-fiber with a correspondingly smaller diameter. On the arranged between the optical fiber and the GRIN-fiber and GRIN lens element for Lichtauffächerung, which for example may take the form of a glass rod will be omitted. The light exit surface may be provided directly on the GRIN-fiber. In the to be arranged between the condenser lens or the GRIN lens and the measured object optical element, that is, the glass rod or the glass cylinder can also be a deviating prism may be integrated, for example in the form of a light-reflecting (border) surface so that the optical axis of the emerging light beam a defined, includes non-zero angle with the optical axis of the optical fiber.

It should be noted that the optical elements, lenses and other components of the optical micro probe of glass, transparent plastic or other suitable material may exist. The optical microprobe invention is particularly suitable for use in interferometric measuring devices, or in confocal measuring devices. They are particularly suitable for operation with kurzkohärentem light, eg white or colored light in the visible or invisible wavelength range.

When used as a pure confocal probes which would otherwise occur at the light exit surface of light reflection, which is used in interferometric mode for generating a reference light beam can be prevented by the light exit surface is provided for example with a suitable coating.

Further modifications, details and special features will become apparent from the drawing, the description or claims. The description is limited to essential aspects of the invention and miscellaneous situations. The drawings disclose further details and can be used in addition. Show it:

1 shows a measuring device with optical microprobe in a schematic representation, and FIG 2 to 8 modified embodiments of the optical micro-probe of Figure 1 j in each case in schematic representation.

1 shows a measuring device 1 is illustrated, for example, is designed as interferometric measurement device. It comprises a measuring module 2, the one or more light sources, and optionally one or more interferometers an evaluation device. The light sources preferably generate broadband white or less broad band colored light. It can also be provided narrow-band light sources or light sources with line spectrum or a single spectral line. At the measuring module 2, at least one optical fiber 3 is connected which leads to an optical microprobe 4 and ultimately belongs to this. The optical microprobe 4 serves the focusing of a light beam 5 onto a measurement object 6 or the surface thereof.

To the microprobe include 4 except at least the last end 7 of the optical fiber 3, a light path 8, a condenser lens 9 and an optical element 10 to which a concavely curved light exit surface is formed. 11 This is preferably a spherical surface or ball portion surface whose center of curvature coincides with a focal point 12 of the microprobe. 4 The end 7 of the optical fiber, the optical path 8, the condenser lens 9 and the element 10 have Ü prepared tuning and mutually adjacent optical axes 13, 14, 15, 16th The resulting common optical axis passing through the focal point 12th

The light path 8 is used for fanning out the light emerging from the optical fiber 3 light beam. The optical path 8 can be formed by a suitable optical element such as an optically homogeneous transparent material such as glass or plastic, existing cylinder or rod 17, a group consisting of flat material such truncated cone or the like. With a preferably flat surface 18 of the rod 17 connects to the optical fiber. 3 With an opposing also preferably flat surface 19 of the rod 17 connects to the condenser lens. 9

The converging lens 9 is preferably a GRIN lens 20 with, for example, sections of cylindrical and partially conical outer periphery. The GRIN lens 20 can abut with a flat connection surface 21 directly on the surface nineteenth The GRIN lens 20 serves as a converging lens for focusing the fanned-out, discharged from the rod 17 the light beam 22nd

The GRIN lens 20 has a preferably planar, the connecting surface 21 opposite surface 23 further to which the element 10 with a preferably flat surface, in turn, preferably immediately follows. The e-lement 10 may, for example, an existing of optically transparent homogeneous material rod 24 may be greater or, as shown, of smaller length, in which it is almost disc-shaped due to its brevity. On the rod 24, the light exit surface 11 is formed. The glass rod 24 can be focused by the GRIN lens 20 the light beam 25 to pass through unbroken to the focal point 12th However, the light exit surface 11 reflects a defined proportion of the light in the optical path described, ie the GRIN lens back 20, the rod 17 and the optical fiber. 3 For example, the light exit surface 11 may be adapted as a partially transparent mirror. It can be used for this purpose, the natural reflection properties of the light-emitting surface. Alternatively, a light-reflecting coating, for example in the form of a Metallbedamp- Fung, are provided which the light exit surface 11 entirely or partially.

The optical microprobe 4 described so far arbei- tet as follows:

The microprobe 4 receives via the optical fiber 3 light off from the nearly point-shaped end face of the optical fiber 3 and enters the rod 17th It forms the conical light beam 22 with divergent marginal rays. The GRIN lens 20 refocuses the light beam having the focal point at 12 converging towards edge rays. The light beam passes through the rod 24. On the light emitting surface 22 is divided into measuring and reference beam. Serving as the measuring beam splitter exits and runs converge to the focal point 12. He will be concave shape little or not broken due to the (12 from the perspective of the focal point). The focal point 12 reflects part of light, which run as a divergent spherical wave from the focal point 12 away and impinge on the axis parallel to the wave front substantially light exit surface. 11 This is thus the light entry face. It unite here the measurement light beam with the light reflected from the light exit surface 11 of reference light beam and running back to the measuring module 2 in common by the GRIN lens and the rod 17 and the optical fiber. 3 There the path differences between the measuring beam and a reference beam, if necessary, corrected and a resulting interference pattern can be evaluated.

The presented measurement device 1 is suitable not only for the optical interference measurement of the surface of the measurement object 6 but also for confocal microscopy or distance measurement. These can be used with virtually non-reflecting light-emitting surface. 11 Did the light-emitting surface 11 some reflection properties, for example to enable a mode change, it interferes little or not. In confocal microscopy, the measurement module 2 measures the strength of the reflected from the surface of the measurement object 6 recorded by the micro probe 4 light. The strength is maximum when the surface of the measurement object 6 is positioned exactly in the focal point of the 12th A change in distance between the micro-optical probe 4 and the measurement object 6 permits the determination of the maximum brightness and thus the height of the surface of the measurement object 6 in the intensity maximum.

Various modifications are possible to the extent presented microprobe fourth As Figure 2 illustrates, the rod 24 and the element 10 can be omitted if the light exit surface 11 is mounted directly on the GRIN lens 20th The spherically curved light exit surface 11 decreases, for example, a part of the measurement object 6 facing surface 23 of the GRIN lens 20th Again, preferably curved with a constant radius with respect to the focal point 12, the concave curved light exit surface. 11 Incidentally, the above description on the basis of the reference characters already introduced applies accordingly.

A further modification is illustrated in FIG 3, where 17 of the optical path 8 is realized by a free air gap in place of the rod, which is enclosed for example by a hollow cylinder 26th At one end of the hollow stern 8 can not further illustrated means the end 7 of the optical fiber 3 to be held. At the other end of the hollow cylinder 26, the converging lens 9 is arranged. This can be used as GRIN lens or, as shown, be formed as a glass body 27 with curved surfaces. Again, 11 may be formed by a surface of the convergent lens 9, the light exit surface. Incidentally, the above description, using the same already introduced reference numbers apply accordingly. Figure 4 illustrates a further modification of the invention. The feature of the modification is to form the element 10. Its light exit surface 11 is here flat, ie formed without spherical curvature. For that accepts the rod 24, at least 80%, preferably 90% of the total distance between the surface of the measurement object 6 and the side facing the measurement object surface 23 of the GRIN lens 20 a. Due to the small distance between the generating the reference beam light exit surface 11 from the focal point 12, the dispersion and phase differences between the reference light beam and the measurement light beam are largely negligible. In other words, the emerging at the light exit surface 11 of refraction of the light beam 25 is due to the short distance to the O berfläche of the measurement object 6 hardly effective. In addition applies above description.

A further modification is shown in FIG 5. This is based on the embodiment of Figure 4, with the difference that the rod 25 and the GRIN lens 20 have an at least partially conical outer surface. Thus the microprobe is particularly slim 4 at its end facing the measurement object 6 end. In addition, they can surveys body edges and the like easily slide structures of the measurement object 6 time. With regard to the dimensioning of the length of the rod 24 applies, as already mentioned in connection with the embodiment of Figure 4, that its length L is greater than 90% of the focal length of the GRIN lens 20th the focal length is calculated thereby as the distance of the GRIN lens of the O- berflache of the measurement object. The distance is the distance of the face 23 to the focal point 12th

Figure 6 illustrates another embodiment, which in turn is based on the embodiment of Figure 1, except that the GRIN lens 20 and the rod 24 have a shape deviating from the cylindrical shape and conical shape of the outer contour. They are for example rounded. In addition, the optical path 8 is again formed by the hollow cylinder 26th Otherwise, the above description applies accordingly.

All Ausfϋhrungsformen the microprobe described above can be designed as side-facing probes by 23, the converging lens 9 and the GRIN lens 20 and the surface of the measurement object 6, a mirror 28 is placed between the face. This can distract the optical axis of the outgoing light beam 25 through a defined angle other than zero. This shows Figure 7. Figure 8 illustrates that the lower edge prism or prisms end 29 of the bar or the prism 24 can be omitted, so that the micro-probe 4 can penetrate deeply into the blind holes and the like.

In addition to the foregoing, reference is made to the following alternative combinations of features:

1. An embodiment in which the optical fiber 3 is optically coupled to the first cylindrical rod 17 of optically homogeneous material, wherein the first cylindrical rod, the GRIN lens 17 is optically coupled 20th Of the GRIN lens, a second rod or prism 24 is coupled optically homogeneous material, the axes of these optical elements coincide approximately with one another and the 20 facing away from front surface 11 of the second cylindrical rod 24 is made concave of the GRIN lens and the light exit surface, optionally serving as a light entrance surface and a mirror for generating a reference light beam. 2. An embodiment in which the microprobe 4 an optical fiber 3, an optically to the optical fiber

3 coupled first cylindrical rod 17 made of optically homogeneous material, and an optically coupled to the first cylindrical rod GRIN lens 20 and an optically coupled to the GRIN lens 20 truncated cone of optically homogeneous material, wherein the axes of these optical elements coincide approximately with one another and the GRIN lens facing away from the end face of the truncated cone is made concave and serves as the light exit surface 11, optionally as a light input surface, and as an area for generating a reference light beam.

3. An embodiment in which the optical microprobe

4 consists of an optical fiber 3, an optically coupled to the optical fiber GRIN lens 20 or a GRIN-fiber-optically coupled to the GRIN lens or GRIN-fiber frustum of optically homogeneous material, the axes of these optical elements approximately coincide with each other and the GRIN lens 20 or GRIN-fiber facing away from the end face of the truncated cone is made concave and the light exit surface 11 and serves light entry surface and light-reflective surface for generating a reference light beam.

4. An embodiment in which to the micro-probe 4, an optical fiber 7, an optical 17 belonging to the optical fiber-coupled cylindrical rod of optically homogeneous material, and an optically coupled to the cylindrical rod 17 GRIN lens 20, wherein said remote from the cylindrical rod 17 end face of the GRIN lens is made concave at least close to the optical axis 15 20 and serves as a light exit surface. 11

5. An embodiment in which to the microprobe 4 an optical fiber 3, and an optically coupled to the optical fiber GRIN lens 20 or a GRIN-fiber include, said the optical fiber 3 facing away from the end face of the GRIN lens and the GRIN fiber at least is performed close to the optical axis 15 concave and serves as the light exit surface. 11

6. An embodiment in which the micro-probe 4 having an optical fiber 3 and an optical path 8 for the fanning out of light emitted from the optical fiber 3 light beam that strikes a GRIN lens or GRIN-fiber, between the GRIN lens or GRIN fiber, an optical element is provided whose the measurement object 6 facing surface is formed as a plane surface and serves as a light exit surface 11, wherein the distance between the light exit surface 11 and the focal point 12 at most 20% preferably at most 10% of the distance of the GRIN lens of the measurement object surface is.

7. An embodiment in which the microprobe 4 an optical fiber 3, an optically coupled to the optical fiber 3 cylindrical rod 17 made of optically homogeneous material, an optically coupled to the cylindrical rod 17 GRIN lens 20 and an optically coupled to the GRIN lens includes element 10, said element 10 is formed as a prism and deflects the optical axis of the system by a defined angle, further wherein the GRIN lens 20 facing away from surface of the prism is configured concavely and serves as a light exit surface. 11 8. The microsensor according to one of the numbers 2, 3 or 6 of the truncated cone of optically homogeneous material may be integrated with a prism that deflects the optical axis of the system by a defined angle, wherein the GRIN lens is remote from the end face of the combined prisms -Kegelstumpfs is made concave and serves as a light exit surface. 11

9. The diameter of the optical microprobe 4 may preferably be less than 5 mm.

10. All of the optical elements may be mechanically connected directly to one another.

The optical microprobe invention uses micro-optical components and uses in particular a light exit surface 11 that is curved parallel to the passing through it spherical optical wave, or which is so close to the measurement object 6, that caused by lack of parallelism between the light exit surface 11 and the passing through it wavefront disturbances remain below a given threshold.

reference numeral

One measuring device

2 measurement module

3 optical fiber

4 microprobe

5 beam

6 measurement object

7 fiber end

8 light path

9 converging lens

10 element

11 light-emitting surface

12 focus

13-16 optical axes

17 staff

18, 19 face

20 GRIN lens

21 pad 2 light beam 3 Size 4 bar / prism 5 light beams 6 hollow cylinder 7 vitreous 8 mirror 9 prism edge

Claims

claims:
1, optical micro-probe (4) for focusing a light beam (5) onto a measurement object (6), particularly for carrying out interferometric measurements, consisting at least of:
an optical fiber (3),
coupled one to the optical fiber (3) optical path
(8) emerging for fanning out one of the optical fiber (3) light beam,
a light path connected to the (8) converging lens
(9) for focussing the emerging from the optical fiber (3) the light beam (22) to a focal point (12),
with a to the collecting lens (9) connected to the optical element (10) facing a the focal point (12) of light outlet surface (11) and a) at least 90% of the distance between the collecting lens (9) and the focal point (12) occupies and / or b) wherein the light exit surface (11) is concave curved.
2. Optical micro probe (4) for focusing a light beam ¬ (5) on a measurement object (6), in particular for carrying out interferometric measurements, consisting at least of:
an optical fiber (3),
a to the optical fiber (3) connected to the GRIN lens (20) or GRIN-fiber for focusing the from the optical fiber (3) exiting light bundle (22) to a focal point (12),
wherein the GRIN lens (20) has a concavely curved light exit surface (11).
3. Optical microprobe according to claim 2, characterized in that between the optical fiber (3) and said GRIN lens (20), a light path (8) for the fanning out of from the optical fiber (3) exiting light bundle (22) is provided.
4. Optical microsensor according to claim 1 or 3, characterized in that the light path (8) by a rod (17) is formed of optically homogeneous material.
5. Optical microprobe according to claim 4, characterized in that the rod (17) is cylindrical.
6. Optical microprobe according to claim 4, characterized in that the rod (17) directly adjoins the optical fiber (3).
7. Optical microprobe according to claim 4, characterized in that the rod (17) directly adjoins the collecting lens (9).
is 8. Optical microprobe according to claim 1, characterized in that the converging lens (9) having a GRIN lens (20).
is 9. Optical microprobe according to claim 1, characterized in that the optical element (10) comprises a rod (24) of optically homogeneous material.
10. Optical microprobe according to claim 9, characterized in that the rod (24) is cylindrical.
11. Optical microprobe according to claim 9, characterized in that the rod (24) is frustoconical.
12. Optical microprobe according to claim 9, characterized in that the light exit surface (11) is a front end face of the rod (24).
13. Optical microprobe according to claim 9, characterized in that the light exit surface (11) has a side surface of the rod (24).
14. Optical microprobe according to claim 9, characterized in that the rod (24) having a light reflecting surface (28) from said collecting lens (9) forwarding incoming light toward the light outlet surface (11).
15. Optical microprobe according to claim 1 or 2, characterized in that the light exit surface (11) is partially mirrored.
16. Optical microprobe according to claim 1 or 2, characterized in that the light exit surface (11) is a spherical surface is coincident center of curvature with the focal point (12).
17. Optical microsensor according to one of the preceding claims, characterized in that all the optical axes (13, 14, 15, 16) of all elements prepared Ü agree with each other.
18. Optical microprobe according to claim 1, characterized in that the optical fiber (3) is connected to a rometer interferences.
19. Optical microprobe according to claim 1, characterized in that the optical fiber (3) is connected to a confocal measurement device.
PCT/EP2008/006885 2007-08-22 2008-08-21 Optical microprobe WO2009024344A1 (en)

Priority Applications (2)

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DE102007039556.8 2007-08-22

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Cited By (16)

* Cited by examiner, † Cited by third party
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US8644913B2 (en) 2011-03-28 2014-02-04 Avinger, Inc. Occlusion-crossing devices, imaging, and atherectomy devices
US8696695B2 (en) 2009-04-28 2014-04-15 Avinger, Inc. Guidewire positioning catheter
US9074862B2 (en) 2011-12-02 2015-07-07 Grintech Gmbh Corrective fiber-optic microprobe for white light interferometric measurements
US9125562B2 (en) 2009-07-01 2015-09-08 Avinger, Inc. Catheter-based off-axis optical coherence tomography imaging system
US9345510B2 (en) 2010-07-01 2016-05-24 Avinger, Inc. Atherectomy catheters with longitudinally displaceable drive shafts
US9345406B2 (en) 2011-11-11 2016-05-24 Avinger, Inc. Occlusion-crossing devices, atherectomy devices, and imaging
US9345398B2 (en) 2012-05-14 2016-05-24 Avinger, Inc. Atherectomy catheter drive assemblies
US9498600B2 (en) 2009-07-01 2016-11-22 Avinger, Inc. Atherectomy catheter with laterally-displaceable tip
US9498247B2 (en) 2014-02-06 2016-11-22 Avinger, Inc. Atherectomy catheters and occlusion crossing devices
US9557156B2 (en) 2012-05-14 2017-01-31 Avinger, Inc. Optical coherence tomography with graded index fiber for biological imaging
US9592075B2 (en) 2014-02-06 2017-03-14 Avinger, Inc. Atherectomy catheters devices having multi-channel bushings
US9788790B2 (en) 2009-05-28 2017-10-17 Avinger, Inc. Optical coherence tomography for biological imaging
US9854979B2 (en) 2013-03-15 2018-01-02 Avinger, Inc. Chronic total occlusion crossing devices with imaging
US9918734B2 (en) 2008-04-23 2018-03-20 Avinger, Inc. Catheter system and method for boring through blocked vascular passages
US9949754B2 (en) 2011-03-28 2018-04-24 Avinger, Inc. Occlusion-crossing devices

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009021580B3 (en) * 2009-05-15 2010-11-25 Medizinisches Laserzentrum Lübeck GmbH Scan forward end OCT endoscope

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3727003A1 (en) * 1986-08-13 1988-02-25 Messerschmitt Boelkow Blohm Application part for a rigid or flexible endoscope
EP0286733A2 (en) * 1987-04-11 1988-10-19 Richard Wolf GmbH Wide-angle lens for endoscopes
US20040097790A1 (en) * 2000-06-30 2004-05-20 Inner Vision Imaging, L.L.C. Endoscope
WO2007002969A1 (en) * 2005-07-04 2007-01-11 Medizinische Universität Wien Optical coherence tomography probe device

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6564087B1 (en) * 1991-04-29 2003-05-13 Massachusetts Institute Of Technology Fiber optic needle probes for optical coherence tomography imaging
US5361166A (en) * 1993-01-28 1994-11-01 Gradient Lens Corporation Negative abbe number radial gradient index relay and use of same
DE19808273A1 (en) * 1998-02-27 1999-09-09 Bosch Gmbh Robert Interferometric measuring device for detecting the shape or the distance particularly rough surfaces
DE19819762A1 (en) * 1998-05-04 1999-11-25 Bosch Gmbh Robert interferometric measuring device
DE10057539B4 (en) * 2000-11-20 2008-06-12 Robert Bosch Gmbh Interferometric measuring device
DE10317826B4 (en) * 2003-04-16 2005-07-28 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Method and apparatus for interferometric measurement

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3727003A1 (en) * 1986-08-13 1988-02-25 Messerschmitt Boelkow Blohm Application part for a rigid or flexible endoscope
EP0286733A2 (en) * 1987-04-11 1988-10-19 Richard Wolf GmbH Wide-angle lens for endoscopes
US20040097790A1 (en) * 2000-06-30 2004-05-20 Inner Vision Imaging, L.L.C. Endoscope
WO2007002969A1 (en) * 2005-07-04 2007-01-11 Medizinische Universität Wien Optical coherence tomography probe device

Cited By (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9572492B2 (en) 2008-04-23 2017-02-21 Avinger, Inc. Occlusion-crossing devices, imaging, and atherectomy devices
US9918734B2 (en) 2008-04-23 2018-03-20 Avinger, Inc. Catheter system and method for boring through blocked vascular passages
US9642646B2 (en) 2009-04-28 2017-05-09 Avinger, Inc. Guidewire positioning catheter
US8696695B2 (en) 2009-04-28 2014-04-15 Avinger, Inc. Guidewire positioning catheter
US9788790B2 (en) 2009-05-28 2017-10-17 Avinger, Inc. Optical coherence tomography for biological imaging
US9125562B2 (en) 2009-07-01 2015-09-08 Avinger, Inc. Catheter-based off-axis optical coherence tomography imaging system
US9498600B2 (en) 2009-07-01 2016-11-22 Avinger, Inc. Atherectomy catheter with laterally-displaceable tip
US8548571B2 (en) 2009-12-08 2013-10-01 Avinger, Inc. Devices and methods for predicting and preventing restenosis
US9345510B2 (en) 2010-07-01 2016-05-24 Avinger, Inc. Atherectomy catheters with longitudinally displaceable drive shafts
US8644913B2 (en) 2011-03-28 2014-02-04 Avinger, Inc. Occlusion-crossing devices, imaging, and atherectomy devices
US9949754B2 (en) 2011-03-28 2018-04-24 Avinger, Inc. Occlusion-crossing devices
US9345406B2 (en) 2011-11-11 2016-05-24 Avinger, Inc. Occlusion-crossing devices, atherectomy devices, and imaging
US9074862B2 (en) 2011-12-02 2015-07-07 Grintech Gmbh Corrective fiber-optic microprobe for white light interferometric measurements
US9557156B2 (en) 2012-05-14 2017-01-31 Avinger, Inc. Optical coherence tomography with graded index fiber for biological imaging
US9345398B2 (en) 2012-05-14 2016-05-24 Avinger, Inc. Atherectomy catheter drive assemblies
US9854979B2 (en) 2013-03-15 2018-01-02 Avinger, Inc. Chronic total occlusion crossing devices with imaging
US9592075B2 (en) 2014-02-06 2017-03-14 Avinger, Inc. Atherectomy catheters devices having multi-channel bushings
US9498247B2 (en) 2014-02-06 2016-11-22 Avinger, Inc. Atherectomy catheters and occlusion crossing devices

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