WO2009018776A1 - Système de dépôt sous vide destiné à la production en série - Google Patents

Système de dépôt sous vide destiné à la production en série Download PDF

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Publication number
WO2009018776A1
WO2009018776A1 PCT/CN2008/071906 CN2008071906W WO2009018776A1 WO 2009018776 A1 WO2009018776 A1 WO 2009018776A1 CN 2008071906 W CN2008071906 W CN 2008071906W WO 2009018776 A1 WO2009018776 A1 WO 2009018776A1
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WO
WIPO (PCT)
Prior art keywords
vacuum
workpiece
conveyor belt
mass production
coating
Prior art date
Application number
PCT/CN2008/071906
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English (en)
French (fr)
Inventor
Yang Liu
Original Assignee
Beijing Powertech Co., Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Beijing Powertech Co., Ltd filed Critical Beijing Powertech Co., Ltd
Publication of WO2009018776A1 publication Critical patent/WO2009018776A1/zh

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks

Definitions

  • the present invention relates to a vacuum coating system, and more particularly to a structure and layout of a vacuum chamber in a vacuum coating system for mass production, a workpiece transfer system and a continuous coating method.
  • the vacuum coating system continuously circulates from the atmosphere to the high vacuum, which brings heavy exhausting load and exposure to the atmosphere, increasing energy consumption and reducing production efficiency.
  • Existing workpieces The loading is usually carried out by means of a mounting and carding method which is fixed on the turret without concentrated transmission, and basically rotates the workpiece on the workpiece turret by gear meshing, and only one coating process is completed for each working condition. This constrains the mass production of the product, resulting in poor consistency of film defects and performance. At the same time, it is difficult to implement a large-scale coating production process of continuous or automatic continuous cycle, and the production efficiency is low, resulting in high production cost.
  • CN1566398A discloses a continuous vacuum decorative plating method in which articles are placed on a conventional continuous conveyor belt, one by one, fed into a low vacuum chamber body for auxiliary treatment, and coated in a high vacuum coating chamber.
  • the vacuum coating device involves a common belt conveyor method for the workpiece to be plated, and the type of vacuum coating equipment to be adapted is limited, and the transmission efficiency needs to be further improved.
  • ZL200520147087.1 We have disclosed a mutual double warehouse structure: the pre-processing warehouse, the post-processing warehouse and the transfer warehouse of the coated product are combined into one auxiliary warehouse, and then form a double-storage structure with the coating chamber; The high vacuum valve on the next wall is connected to the two chambers, and the workpiece can be changed between the two chambers under vacuum conditions; the valve is closed to separate the two chambers, and the workpiece is processed in the auxiliary chamber while the coating chamber is coated.
  • the pre-treatment, the post-treatment of the coated product and the transfer of the in-and-out coating system do not affect the normal operation of the coating chamber.
  • ZL200520130173.1 We disclose a vacuum coating system in which two or more coating chambers share one or more mobile switching bins for switching between the workpiece to be coated and the coating product, wherein the coating chamber has a high vacuum exhaust device and a switching chamber.
  • the utility model has a vacuum exhaust device; the mobile switch chamber can be respectively connected with each coating chamber; the coating chamber and the switching chamber are respectively provided with mutually matching pair interfaces; and two working positions for placing the workpiece rack are arranged in the switching chamber, and A mobile transposition mechanism is connected.
  • the system is suitable for mass production, avoiding the exhaust burden and pollution caused by the continuous circulation of the coating chamber from atmospheric pressure to high vacuum, improving production efficiency and reducing low cost.
  • the present invention provides a novel vacuum coating system structure and an efficient transmission system for the workpiece thereof, which reliably realizes mass production of vacuum coating and related processing.
  • the invention is based on a large number of workpieces.
  • the following warehouse structure and multi-storage space layout are used for different requirements of working environment conditions (vacuum degree, atmosphere and temperature, etc.):
  • This new type of vacuum coating The system generally adopts a combined multi-vacuum chamber structure, which comprises two or more vacuum chambers, and each vacuum chamber is provided with at least one of a coating device or an auxiliary processing device, at least one vacuum chamber is provided with a coating device, and at least one vacuum is provided.
  • the warehouse is equipped with an auxiliary processing device, and adjacent vacuum chambers are connected by a vacuum gate.
  • the auxiliary treatment means that various auxiliary treatments other than the plating can be realized.
  • the combined structure means that any vacuum chamber can be used alone, and a coating device can be disposed in the vacuum chamber as a vacuum coating chamber to realize different coating process, or an auxiliary processing device can be disposed in the vacuum chamber for use as Auxiliary processing chamber to realize various auxiliary processing functions other than coating, including pre-treatment of the workpiece to be coated into the vacuum chamber, pre-vacuation and preheating before coating, vacuum passivation of the coated product, etc. warehouses, etc.; each vacuum chamber can also be arbitrarily combined and connected according to the needs of the production line structure.
  • the vacuum coating system may further include a workpiece transfer system including a power drive system, a guide rail and a conveyor belt, and the guide rails are located inside the vacuum chambers.
  • a workpiece transfer system including a power drive system, a guide rail and a conveyor belt
  • the guide rails are located inside the vacuum chambers.
  • the guide rails of different vacuum chambers can be matched.
  • the tracks of the adjacent two bins correspond to each other at the junction of the two bins, and the conveyor belt can enter the track of the adjacent bin after leaving the bin track.
  • the conveyor belt is combined with the guide rail, and the conveyor belt can drive the workpiece along the guide rail driven by the power drive system, a part of the conveyor belt in the width direction enters the inside of the guide rail, and another part in the width direction is used to carry the workpiece or the workpiece. Group and fixtures.
  • the conveyor belt is an elastic slat conveyor belt that maintains rigidity in the width direction and flexibility in the thickness direction to match the line process of the combined continuous coating and its associated processing.
  • the guide rail may be closed in a circular or circular shape in the vacuum coating chamber.
  • the shape, in other auxiliary bins, may be a ring shape or a shape such as a curved shape, a straight line shape, or a straight line curve combination that matches the shape of the bin.
  • the power drive system of the workpiece transfer system may be an electric motor and a sprocket, the motor drives the sprocket, and the sprocket moves the chain fixed on the conveyor belt, so that the conveyor belt drives the workpiece to travel along the track, and the workpiece is controlled by the motor forward and reverse. Move forward or backward.
  • the power drive system of the workpiece transport system may also be an electric motor and a set of friction wheel drive assemblies, each of which is driven by a motor to simultaneously drive a set of friction wheel drive assemblies that are identical and distributed along the track, each of which includes a pair of friction wheels.
  • the auxiliary driving wheel and the driven wheel which is elastically supported and rotatable, the two-wheel contact point is located at the center line of the track, and a part of the workpiece conveying belt in the width direction passes between the two wheels, and is dragged by friction to run along the guide rail.
  • the driven wheel presses the conveyor belt against the driving wheel under the action of the spring, and the driving wheel rotates under the driving of the motor, and the driving force is applied to the conveyor belt through the surface of the friction conveyor belt, so that the conveyor belt can travel along the track, and the workpiece rotates when the motor rotates forward.
  • the conveyor belt advances, and when the motor reverses, the workpiece conveyor belt retreats, and the workpiece connected to the conveyor belt can advance or retreat accordingly.
  • the vacuum chamber of the vacuum coating system preferably uses a standardized modular design.
  • At least one of the vacuum coating systems in the vacuum coating system enables the workpiece to continuously run a plurality of turns along the track to facilitate the deposition of a thick film.
  • Closed-shaped guide rails such as rings, except for the inlet and outlet ports, with controllable guiding devices at the inlet and outlet ports, which can control the conveyor belt to select different paths to travel at the cornice, and need to carry out multi-turn operation coating
  • the guiding device Controlled in the closed position the conveyor belt runs in the closed track of the warehouse, can not be exported, can continuously travel multiple times, realize continuous multi-turn coating of the workpiece;
  • the guiding control device is controlled at the opening position, the conveyor belt When the end travels to the position of the cornice, it will enter the exit rail and guide the entire conveyor belt into the exit rail to drive the workpiece out.
  • the large-area workpiece is revolved along the circular orbit in the cylindrical space, or the bulk workpiece can be rotated while revolving, and two target groups facing the workpiece are arranged inside and outside the orbiting track, in the flexible board.
  • One or two sides of the workpiece the surfaces of the separated workpiece are uniformly deposited by the rotation of the thick film; the workpiece can be rotated more than one week to increase the deposition time, thereby obtaining a uniform thick film layer on one or both sides of the workpiece.
  • a vacuum channel may be disposed between adjacent unit storage chambers, and the passage may be directly connected by the respective interfaces of the adjacent storage chambers, or may be connected between the two interfaces.
  • the independent channel is configured, wherein at least one vacuum valve is installed in the warehouse, and the vacuum valve is preferably an automatic vacuum gate; when one gate is opened, the workpiece frame can only enter one way or unidirectionally exit the relevant warehouse; when two automatic gates are simultaneously When opening, allow different workpiece racks to enter and exit the relevant bins at the same time; When switching between adjacent vacuum chamber, it is done under vacuum (10- 4 Pa-1000 Pa) .
  • the vacuum valve disposed between adjacent unit cartridges may be an automatic vacuum valve. The working hours and cabins of each unit can be assigned in real time by the automatic gate according to the time of each warehouse process.
  • the automatic vacuum gates can connect the vacuum chambers in different configurations, and can form a combined continuous coating line containing different functional bins in series, parallel and/or hybrid and different processes.
  • the vacuum system of the automatic vacuum gate and the connected multi-bin combined continuous coating production line can realize the metronome or continuous coating and related by the industrial computer, PLC (programmable controller) or industrial computer + PLC. Automatic coordination and reliable control of the process.
  • FIG. 1 is a schematic view of the layout of a warehouse body and an automatic vacuum valve when three warehouses (A, B, C) are used in series, wherein A, B, and C are three independent warehouse bodies, and two adjacent warehouses A and B and B and C are connected by automatic vacuum valves ab and bc in the vacuum channel, respectively.
  • FIG. 2 is a schematic view of a guide rail, a workpiece conveyor belt and a driving device thereof according to the present invention, wherein FIG. 2a is a general schematic view of a sprocket-driven workpiece conveyor belt, and FIG. 2b is a detailed structural diagram of a sprocket-driven workpiece conveyor belt, wherein: 2 - sprocket; 3- conveyor belt; 4 a guide rail.
  • Fig. 3 is a schematic view of a friction wheel multi-point driving workpiece conveyor belt, wherein Fig. 3a is a general schematic view of a friction wheel multi-point driving workpiece conveyor belt.
  • A vacuum bin
  • B vacuum bin
  • V high vacuum valve in vacuum channel ab between adjacent A and B bins
  • Dl D2, D3, D4--A bin workpiece conveyor
  • Friction wheel drive assembly friction wheel drive assembly for workpiece conveyor belts in D5, D6, D7, D8--B;
  • FIG. 3b is a schematic view of a single friction wheel drive assembly, each friction wheel drive assembly D is the same, including: 5 - friction wheel set (5 _ drive wheel, 5b - driven wheel), 6 - driven friction wheel 5b cantilever beam type Rotating support frame, 7-driven friction wheel 5b elastic support, 3-work conveyor belt; 1-friction wheel drive motor and 4-rail are not shown in Fig. 3, see Fig. 2.
  • Figure 4 is a schematic diagram of the series, parallel and or hybrid layout of the warehouse when multiple warehouses are used: 4a_N independent warehouses are connected in series, 4b-4 independent warehouses are connected in parallel, and 4c_5 independent warehouses are mixed (ie, serial and parallel coexistence) .
  • 1, 2, 3, and ⁇ N are respectively N independent warehouse bodies, and one represents the workpiece to be coated enters the warehouse body. Indicates the output of the coated product.
  • the present invention firstly adopts a combined multi-vacuum chamber structure in which at least two or more vacuum chambers are included, and each of the chambers is provided with at least one of a coating device or an auxiliary processing device, thereby at least having a coating or auxiliary treatment.
  • at least one of the chambers of the coating chambers enables the workpiece to continuously run a plurality of turns along the track to facilitate the deposition of a thick film.
  • the chamber is provided with a closed-shaped guide rail such as a circular shape or a ring shape. Except at the entrance and exit, there is a controllable guiding device at the entrance and exit, which can control the conveyor belt to choose different paths to travel at the cornice.
  • the guiding device When multi-turn operation coating is required, the guiding device is controlled in the closed position, and the conveyor belt is in the present position.
  • the warehouse is operated in a closed orbit, can not be exported, can continuously travel multiple times, and achieve continuous multi-turn coating of the workpiece; when the workpiece needs to be removed from the warehouse, the guiding control device is controlled at the opening position, and when the conveyor belt end travels to the cornice position, Entering into the exit track, the entire conveyor belt is guided into the exit track to drive the workpiece out.
  • Each auxiliary processing chamber can realize various auxiliary treatments other than coating; the inter-bin flow control is realized by automatic vacuum gate connection between adjacent vacuum chambers; using a flexible conveyor belt to run along the guide rail under vacuum conditions, can be automatically exchanged or The workpiece is transported to ensure the need for a continuous high-volume coating line.
  • the workpiece In a coating chamber, the workpiece is operated in a cylindrical space, the flexible plate-shaped workpiece adopts a revolution, the bulk workpiece adopts a revolution + autotransmission, and two sets of target groups facing the workpiece are arranged inside and outside, in the flexible plate-shaped workpiece
  • the single-sided or double-sided, separate surfaces of the workpiece are uniformly deposited with a thick film; the workpiece can also be rotated more than one week to increase the deposition time, thereby obtaining a uniform thick film on one or both sides of the workpiece.
  • the multi-vacuum chamber adopts a standardized module design, and any of the cartridge bodies can be used alone, and can be used as a vacuum coating chamber to realize different coating process processes; and can also be used as an auxiliary processing chamber to respectively realize various auxiliary functions other than coating. Processing functions, including the workpiece to be coated into the warehouse, pre-vacuum and preheating before coating, etc., vacuum passivation of the coated product and other post-processing and product out of the warehouse.
  • a vacuum channel may be disposed between adjacent unit magazines, wherein at least one automatic vacuum gate is installed, as shown in FIG. 1, A, B, and C are connected in series, adjacent to each other.
  • the two warehouses A and B and B and C are connected respectively through the vacuum passage and the automatic vacuum valves ab and bc therein; when one gate is opened, the workpiece holder can only enter one way or unidirectionally exit the relevant warehouse; Self The movable shutter is opened simultaneously, allowing different workpiece carrier simultaneously into and out of the relevant magazine; switching between the workpiece adjacent the vacuum chamber, is done under vacuum (10- 4 Pa-1000 Pa) .
  • each of the units A, B, and C is coated with a multi-layer film, wherein the processing amount of B is greater than the processing amount of A and C, and after A and C respectively complete the first process, the process proceeds to B to complete the next process; or A, B
  • the processing capacity of C is equivalent, and different layers are respectively plated by B, C, and then subjected to subsequent rounds of cycles to obtain the desired multilayer film; B can also be used as auxiliary bin, A and C respectively Coating bin.
  • a flexible transmission workpiece system which includes a power drive system (motor 1 and sprocket 2), a guide rail 4 and a conveyor belt 3, and the motor 1 drives the sprocket 2, and the sprocket 2 is slidably fixed to the conveyor.
  • the chain moves on the belt, so that the conveyor belt 3 drives the workpiece to travel along the track, and the workpiece is advanced or reversed by the motor forward and reverse rotation;
  • the guide rail is arc or ring in the vacuum coating chamber, and is annular or in the other auxiliary chamber.
  • a curved shape with a matching shape, a linear shape, or a combination of straight curves a part of the conveyor belt in the width direction enters the inside of the guide rail, and another portion of the conveyor belt exposed below the opening is used to carry the workpiece, and the conveyor belt is maintained in the width direction.
  • the friction wheel multi-point drive workpiece conveyor belt is generally connected between the adjacent two vacuum chambers A and B, through the high vacuum valve V in the vacuum channel ab, each of which is driven by a single motor.
  • the workpieces in bins A and B are driven by Dl, D2, D3, D4 and D5, D6, D7, D8 respectively; as shown in Figure 3b, in a single friction wheel drive assembly
  • the driving wheel 5a including a friction wheel pair and the driven wheel 5b elastically supported by the spring 7 and the cantilever type rotating support frame 6 of the driven friction wheel 5b;
  • the two-wheel contact point is located at the center line of the track, and the workpiece conveying belt 3 is in the width direction A part of the upper part passes between the two wheels, and the driven wheel presses the conveyor belt against the driving wheel under the action of the spring, and the driving wheel rotates under the driving of the motor, and applies a driving force to the conveyor belt through the surface of the friction conveying belt
  • the automatic vacuum gate can connect the multiple vacuum chambers in different structures, as shown in Figure 4: 4a_N independent chambers in series, 4b-4 independent chambers in parallel, and 4c-5 independent warehouses Body mixing
  • combined continuous coating line can contain coating chambers and sections for different processes Management position.
  • the automatic vacuum gate and the connected multi-bin combined continuous coating production line vacuum system can realize the beat or continuous coating and related processing through the industrial computer, PLC (programmable controller:) or industrial computer + PLC. Automatic coordination and reliable control of the process.
  • a mass production vacuum coating system structure and a workpiece conveying system thereof realize high-efficiency alternating conversion of batch workpieces in various functions of the vacuum chamber, and reliably and automatically realize a beat or continuous large-volume vacuum coating. Production and related processing, increased production efficiency and reduced costs.

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
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  • Mechanical Engineering (AREA)
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  • Organic Chemistry (AREA)
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Description

一种量产真空镀膜系统 技术领域
本发明涉及真空镀膜系统， 特别是用于量产的一种真空镀膜系统中真空仓 的结构、 布局及工件的传输系统和连续镀膜方法。 背景技术 提高质量和增加产量日渐成为现代工业产品降低成本并提高效益的重要途 径， 其中大批量工件需要真空沉积高质量的膜层， 而且往往需要增加膜层厚度 因而需要经过重复循环镀膜来实现， 已成为急待解决的关键技术问题。 但是现 有镀膜系统大多采用单机单仓工作模式， 真空镀膜系统从大气到高真空不断循 环带来沉重的排气负担和暴露大气引起污染， 增加了能耗， 也降低了生产效率; 现有工件的装载通常采用无集中传输而分别在转架上固定的装、 卡方式， 基本 以齿轮啮合使工件转架上的工件旋转， 每种工况只完成一个镀膜程序。 这就束 缚了产品的批量生产， 造成膜层缺陷和性能的一致性差； 同时， 也难以实施节拍 式连续化或自动连续化的大批量的镀膜生产工艺， 其生产效率低导致生产成本 高。
CN1566398A公开了一种连续式真空装饰镀覆的方法， 将物品置于普通的 连续输送带上， 一个接一个地送入低真空仓体辅助处理、 高真空镀膜仓体中进 行镀膜。 这种真空镀膜装置涉及的被镀工件采用普通的带式输送方式， 适应的 真空镀膜设备类型受限， 传输效率需进一歩提高。
ZL200520147087.1我们公开了一种互套双仓结构： 将前处理仓、 后处理仓 与镀膜产品的转移仓合为一辅助仓， 然后与镀膜仓形成互套双仓结构； 开启设 置在两仓隔壁上的高真空阀门， 两仓连通， 可以在真空条件下， 在该两仓之间 进行工件换位； 关闭该阀门使两仓隔离， 在镀膜仓进行镀膜的同时， 在辅助仓 内进行工件前处理、 镀膜产品后处理及其进出镀膜系统的转移等， 均不影响镀 膜仓的正常工作。
ZL200520130173.1我们公开了一种 2个或多个镀膜仓共用一个或多个移动 式切换仓， 进行待镀膜工件和镀膜产品切换的真空镀膜系统， 其中镀膜仓具有 高真空排气装置、 切换仓具有真空排气装置； 移动式切换仓可分别与各个镀膜 仓对接； 镀膜仓和切换仓分别设有相互匹配的对接口； 在切换仓内设有两个可 放置工件架的工位， 并以一移动换位机构连接。 该系统适于大批量生产， 避免 镀膜仓从大气压至高真空不断循环带来的排气负担和污染， 提高生产效率， 降 低成本。
后两个专利从不同角度都向量产前进了一歩， 并为其进一歩发展积累了一 定基础； 但是， 仍有一定的局限性。
发明内容 针对现有技术的不足， 本发明提供一种新型真空镀膜系统结构及其工件的 高效传输系统， 可靠地实现大批量真空镀膜生产及其相关处理。
为了增大镀膜机的处理量， 单纯扩大镀膜仓的容积受到相关设备上一定的 限制， 而增加镀膜仓的数量， 并通过辅助仓进行协调和工件周转，是一有效途径， 有广泛的发展空间。
本发明基于大批量工件， 在真空镀膜工艺的不同阶段， 对于其工作环境条 件 （真空度、 气氛和温度等） 的不同要求， 采用如下的仓体结构和多仓空间布 局： 这种新型真空镀膜系统总体采用组合式多真空仓结构， 其中包括两个或两 个以上的真空仓， 各真空仓至少配置镀膜装置或辅助处理装置中的一种， 至少 有一真空仓配置有镀膜装置， 至少有一真空仓配置有辅助处理装置， 相邻真空 仓之间通过真空闸门连接。
所述辅助处理是指能实现镀膜之外的各种辅助处理。 所述组合式结构是指 任一真空仓既可单独使用， 可在真空仓内配置镀膜装置而作为真空镀膜仓以实 现不同的镀膜工艺制程， 也可在真空仓内配置辅助处理装置， 用作辅助处理仓 以分别实现镀膜之外的各种辅助处理功能， 其中包括待镀膜工件进入真空仓、 镀膜前预抽真空和预热等预处理， 镀膜产品的真空钝化等后处理和产品出真空 仓等； 也可以根据生产线结构的需要任意组合和联接各真空仓。
所述真空镀膜系统还可以包括一工件传输系统， 所述工件传输系统包括动 力驱动系统、 导轨和输送带， 导轨位于各真空仓内部， 当不同真空仓组合使用 时， 不同真空仓的导轨能配合连接， 相邻两仓的轨道在两仓连接处互相对应， 输送带在离开一仓轨道后可以进入相邻仓的轨道内。 输送带与导轨相结合， 输 送带可在动力驱动系统驱动下沿导轨运行输送工件， 输送带在其宽度方向上的 一部分进入导轨内部， 而其在宽度方向上的另一部分用于携带工件或工件组及 卡具。 所述输送带最好为弹性板式输送带， 即在宽度方向上保持刚性， 在厚度 方向上显示出柔性， 以匹配组合式连续镀膜及其相关处理的生产线工艺流程。 所述导轨除了岔口处的基本形状外， 在真空镀膜仓中可以是圆形或环形等封闭 形状， 在其它辅助仓中可以为环形或与所在仓形状相匹配的曲线形状、 直线形 状或者直线曲线组合等形状。
在连用的相邻两真空仓之间， 通过真空通道中的高真空阀门连接。 所述工 件传输系统的动力驱动系统可以为电动机和链轮， 电动机驱动链轮， 链轮拨动 固定在输送带上的链条移动， 使输送带带动工件沿轨道行进， 通过电动机正反 转控制工件前进或后退。
所述工件传输系统的动力驱动系统还可为电动机和一组摩擦轮驱动组件， 各仓均由电机同时带动一组相同而且沿轨道分散布置的摩擦轮驱动组件， 各组 件中包括一对摩擦轮副的主动轮和被弹性支撑可转动的从动轮， 两轮相接点位 于轨道中线处， 工件输送带在宽度方向上的一部分从该两轮之间通过， 被摩擦 力拖动而沿导轨运行， 从动轮在弹簧作用下将输送带压紧在主动轮上， 主动轮 在电机带动下转动， 通过摩擦输送带表面向输送带施加推动力， 使输送带可以 沿轨道行进，， 电机正转时工件输送带前进， 而电机反转时工件输送带后退， 输 送带上连接有工件可随之前进或后退。
所述真空镀膜系统的真空仓最好采用标准化的模块设计。
为了适应大批量工件快速沉积厚膜的需要， 所述的真空镀膜系统中最好至 少有一个镀膜真空仓中能使工件沿轨道连续运行多圈以便于镀厚膜， 该仓内布 置有圆形、 环形等封闭形状的导轨， 该封闭性在进出岔口除外， 在进出岔口处 设有可控导向装置， 可控制输送带在岔口处选择不同的路径行进， 需要进行多 圈运行镀膜时， 导向装置控制在封闭位置， 输送带在本仓的封闭轨道内运行， 无法导出， 可连续行进多圈， 实现工件连续多圈镀膜； 当需要工件移出本仓时， 导向控制装置控制在开口位置， 输送带端头行进至岔口位置时， 会进入到出口 轨道内， 引导整条输送带进入出口轨道， 带动工件移出。 在该镀膜仓中， 以大 面积工件在圆筒形空间内沿环形轨道公转， 或散装工件在公转的同时可以自转， 在公转轨道内、 外布置面对工件的两圈靶群， 在柔性板形工件的单面或双面、 分离工件的各表面因自转而均匀地沉积厚膜； 也可以使工件转一周以上以增加 沉积时间， 从而在工件的单面或双面获得均匀的厚膜层。
在所述的真空仓多仓连用时， 可以在相邻的单元仓体之间设置真空通道， 该通道可以由相邻仓体各自的接口直接连接形成， 也可以在两接口间再接入一 段独立通道构成， 其中仓间安装至少一个真空阀门， 所述真空阀门最好为自动 真空闸门； 当一个闸门打开时， 工件架只能单向进入或者单向退出相关仓；当两 个自动闸门同时打开时， 容许不同的工件架同时分别进、 出相关仓； 工件在相 邻的真空仓之间切换时， 是在真空条件下 （10— 4Pa-1000 Pa) 完成的。 当多仓连用时， 在相邻单元仓体间设置的真空阀门可以为自动真空阀门。 可根据每仓制程的时间不同， 由自动闸门实时分配各单元的工作时间和舱位。
自动真空闸门关闭时， 真空通道封闭， 各真空仓独立工作， 分别完成不同 的镀膜制程或处理。
自动真空闸门能以不同结构连接所述的真空仓， 可以构成含不同功能仓串 联、 并联和 /或混联及其不同流程的组合式连续镀膜生产线。
所述的自动真空闸门及其连接的多仓组合式连续镀膜生产线的真空系统， 可以通过工控机、 PLC(可编程序控制器)或工控机 +PLC, 实现节拍式或连续化 镀膜及其相关处理工艺过程的自动协调和可靠地控制。
附图说明 图 1是三仓 （A、 B、 C) 串联使用时的仓体和自动真空阀门布局示意图， 其中 A、 B、 C为 3个独立仓体， 在相邻的连用两仓 A与 B和 B与 C之间， 分 别通过真空通道中的自动真空阀门 a-b和 b-c连接。
图 2是本发明中导轨、 工件输送带及其驱动装置示意图， 其中图 2a是链轮 驱动工件输送带的总体示意图， 图 2b是链轮驱动工件输送带的详细结构图， 其 中： 1一电动机； 2—链轮； 3-输送带； 4一导轨。
图 3是摩擦轮多点驱动工件输送带示意图，其中图 3a是摩擦轮多点驱动工 件输送带的总体示意图。
说明： A—真空仓， B—真空仓， V—在连用的相邻 A和 B两仓之间真空通 道 a-b中的高真空阀门， Dl、 D2、 D3、 D4--A仓内工件输带的摩擦轮驱动组件, D5、 D6、 D7、 D8--B仓内工件输带的摩擦轮驱动组件；
图 3b是单一摩擦轮驱动组件示意图， 每一摩擦轮驱动组件 D相同， 其中 包括： 5—摩擦轮副 （5 _主动轮， 5b—从动轮）， 6—从动摩擦轮 5b的悬臂梁 式可转动支撑架， 7-从动摩擦轮 5b的弹性支撑， 3-工件输送带; 1-摩擦轮的驱动 电机和 4一导轨在图 3中未画出， 可参见图 2。
图 4为多仓连用时仓的串联、 并联和或混联布局示意图： 4a_N个独立仓 体串联， 4b— 4个独立仓体并联和 4c_5个个独立仓体混联 （即串联和并联共 存）。其中 1、 2、 3、 〜N分别为 N个独立仓体， 一表示待镀膜工件进入仓体， 表示镀膜产品输出仓体。
具体实施方式 下面结合附图， 对本发明的量产真空镀膜系统及工件的传输系统和连续镀 膜方法， 作进一歩详细说明， 但应当理解本发明的保护范围并不受具体实施方 式的限制。
本发明首先在总体上采用组合式多真空仓结构， 其中至少包括 2个或 2个 以上的真空仓， 各仓至少配置有镀膜装置或辅助处理装置中的一种， 从而至少 具有镀膜或辅助处理中的一种功能， 所述的各镀膜仓中至少有一个仓中能使工 件沿轨道连续运行多圈以便于镀厚膜， 该仓内布置有圆形、 环形等封闭形状的 导轨， 该封闭性在进出岔口处除外， 在进出岔口处设有可控导向装置， 可控制 输送带在岔口处选择不同的路径行进， 需要进行多圈运行镀膜时， 导向装置控 制在封闭位置， 输送带在本仓的封闭轨道内运行， 无法导出， 可连续行进多圈， 实现工件连续多圈镀膜； 当需要工件移出本仓时， 导向控制装置控制在开口位 置， 输送带端头行进至岔口位置时， 会进入到出口轨道内， 引导整条输送带进 入出口轨道， 带动工件移出。 各辅助处理仓可以实现镀膜之外的各种辅助处理； 相邻真空仓之间通过自动真空闸门连接实现仓间流程控制； 采用一种柔性输送 带在真空条件下沿导轨运行， 能自动交换或输送工件， 以保证实施连续化的大 批量镀膜生产线的需要。
在一个镀膜仓中， 以工件在圆筒形空间内运转， 柔性板形工件采用公转， 散装工件采用公转 +自传， 在其内、 外布置面对工件的两组靶群， 在柔性板形工 件的单面或双面、 分离工件的各表面均匀地沉积厚膜； 也可以使工件转一周以 上以增加沉积时间， 从而在工件的单面或双面获得均匀的厚膜。
所述的多真空仓采用标准化的模块设计， 任一仓体可单独使用， 可作为真 空镀膜仓以实现不同的镀膜工艺制程； 也可用作辅助处理仓以分别实现镀膜之 外的各种辅助处理功能， 其中包括待镀膜工件进入仓、 镀膜前预抽真空和预热 等， 镀膜产品的真空钝化等后处理和产品出仓。
在所述的真空仓连用时， 可以在相邻的单元仓体之间设置真空通道， 其中 安装至少一个自动真空闸门， 如图 1所示， A、 B、 C三仓串联， 在相邻的连用 两仓 A与 B和 B与 C之间，分别通过真空通道及其中的自动真空阀门 a-b和 b-c 连接； 当一个闸门打开时， 工件架只能单向进入或者单向退出相关仓；当两个自 动闸门同时打开时， 容许不同的工件架同时分别进、 出相关仓； 工件在相邻的 真空仓之间切换时， 是在真空条件下 （10— 4Pa-1000 Pa) 完成的。
当多仓连用时， 可根据每仓制程的时间不同， 由自动闸门实时分配各单元 的工作时间和舱位。 例如用 A、 B、 C各单元连用镀多层膜， 其中 B的处理量大 于 A和 C的处理量， 在 A和 C分别完成第一制程后， 进入 B完成下一制程； 或者 A、 B、 C的处理量相当， 由 、 B、 C依序分别镀不同的膜层， 然后再进 行后续几轮循环， 从而得到所期望的多层薄膜； 还可用 B作为辅助仓， A和 C 分别作镀膜仓。
自动真空闸门关闭时， 真空通道封闭， 各真空仓独立工作， 分别完成不同 的镀膜制程或处理。
如图 2所示， 采用一种柔性传输工件系统， 其中包括动力驱动系统 （电动 机 1和链轮 2)、 导轨 4和输送带 3， 电动机 1驱动链轮 2， 链轮 2拨动固定在输 送带上的链条移动， 使输送带 3 带动工件沿轨道行进， 通过电动机正反转控制 工件前进或后退； 导轨在真空镀膜仓中是圆弧或环形， 在其它辅助仓中为环形 或与所在仓形状相匹配的曲率的曲线形状、 直线形状或者直线曲线组合形状等; 输送带在宽度方向上的一部分进入导轨内部， 输送带外露在开口下方的另一部 分用于携带工件， 输送带在宽度方向保持刚性， 在厚度方向上显示出柔性， 以 匹配组合式连续镀膜及其相关处理的生产线工艺流程。
如图 3所示摩擦轮多点驱动工件输送带的总体， 在连用的相邻两真空仓 A 和 B之间，通过真空通道 a-b中的高真空阀门 V连接，各仓均由一台驱动电机 1 同时带动一组相同的摩擦轮驱动组件： 仓 A和 B中的工件分别由 Dl、 D2、 D3、 D4和 D5、 D6、 D7、 D8驱动； 如图 3b所示， 单一摩擦轮驱动组件中包括一摩 擦轮副的主动轮 5a和被弹簧 7弹性支撑的从动轮 5b、 从动摩擦轮 5b的悬臂梁 式可转动支撑架 6; 两轮相接点位于轨道中线处， 工件输送带 3在宽度方向上的 一部分从该两轮之间通过， 从动轮在弹簧作用下将输送带压紧在主动轮上， 主 动轮在电机带动下转动， 通过摩擦输送带表面向输送带施加推动力， 使输送带 可以沿轨道行进， 输送带 3在宽度方向上的另一部分用于携带工件或工件组及 卡具， 电机 1正转时工件输送带 3前进， 而电机 1反转时工件输送带 3后退（摩 擦轮的驱动电机 1和导轨 4在图 3中未画出， 可参见图 2)。
如图 4所示， 自动真空闸门能以不同结构连接所述的多真空仓， 如图 4所 示： 4a_N个独立仓体串联、 4b— 4个独立仓体并联， 和 4c一 5个独立仓体混联
(即串联和并联共存）； 组合式连续镀膜生产线可以包含不同流程的镀膜仓和处 理仓。
所述的自动真空闸门及其连接的多仓组合式连续镀膜生产线真空系统可以 通过工控机、 PLC(可编程序控制器：)或工控机 +PLC, 实现节拍式或连续化镀膜 及其相关处理工艺过程的自动协调和可靠地控制。
按照本发明的一种量产真空镀膜系统结构及其工件传输系统， 实现了批量 工件在各种功能的真空仓中的高效交替转换， 可靠而且自动地实现了节拍式或 连续式大批量真空镀膜生产及其相关处理， 生产效率提高、 成本降低。

Claims

权 利 要 求 书
1、 一种量产真空镀膜系统， 包括两个或两个以上的真空仓， 各真空仓至少具 有镀膜和辅助处理中的一种功能， 所述真空仓为组合式的， 至少一真空仓具有镀膜 功能， 至少一真空仓具有辅助处理功能， 相邻真空仓之间通过真空闸门连接。
2、 根据权利要求 1所述的量产真空镀膜系统， 其特征在于还包括在各真空仓 之间输送工件的工件传输系统。
3、 根据权利要求 2所述的量产真空镀膜系统， 其特征在于所述工件传输系统 包括动力驱动系统、 导轨和输送带， 导轨位于各真空仓内部， 当不同真空仓组合使 用时， 不同真空仓的导轨能配合连接， 输送带与导轨相结合并可在动力驱动系统驱 动下沿导轨运行输送工件。
4、 根据权利要求 3所述的量产真空镀膜系统， 其特征在于： 所述动力驱动系 统为电动机和一组摩擦轮驱动组件，各仓均由电机同时带动两套或多套相同而且沿 轨道分散布置的摩擦轮驱动组件，各组件中包括一对摩擦轮副的主动轮和被弹性支 撑可转动的从动轮， 工件输送带在宽度方向上的一部分从该两轮之间通过， 被摩擦 力拖动而沿导轨运行，工件输送带在宽度方向上的另一部分携带工件或工件组及卡 具， 电机正转时工件输送带前进， 而电机反转时工件输送带后退。
5、 根据权利要求 3或 4所述的量产真空镀膜系统， 其特征在于所述输送带在 宽度方向为刚性， 厚度方向上显示出柔性。
6、 根据权利要求 1-4中任一项所述的量产真空镀膜系统， 其特征在于至少有 一真空仓中设有带进出岔口的环形轨道，工件在输送带带动下能沿环形轨道连续运 行多圈， 进出岔口处装有可控导向装置， 可以控制行进到此处的输送带端头的行进 方向， 从而控制整条输送带选择性进入希望的轨道中。
7、 根据权利要求 6所述的量产真空镀膜系统， 其特征在于所述环形轨道内外 布置有两部分靶群。
8、 根据权利要求 1-4中任一项所述的量产真空镀膜系统， 其特征在于所述真 空仓采用标准化的模块设计， 任一真空仓可单独使用作镀膜机， 也可单独用作辅助 处理仓， 多个真空仓组合使用时， 可以利用带岔口的轨道组合形成串联、 并联或串 并联混合布局结构的系统。
9、 根据权利要求 8所述的量产真空镀膜系统， 其特征在于所述真空阀门为自 动真空阀门，能根据每真空仓制程的时间不同，实时分配各单元的工作时间和仓位。
10、 根据权利要求 9所述的量产真空镀膜系统， 其特征在于由真空仓、 自动真 空阀门以及工件传输系统所组成的组合式连续镀膜生产线通过工控机和 /或可编程 序控制器实现节拍式或连续化镀膜及其相关处理工艺过程的自动协调和可靠控制。
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CN115287621A (zh) * 2022-08-10 2022-11-04 圣思科技(廊坊)有限公司 应用于功能涂层真空镀膜设备的自动传输结构
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