WO2009009780A3 - Method and apparatus for providing flat panel display environmental isolation - Google Patents

Method and apparatus for providing flat panel display environmental isolation Download PDF

Info

Publication number
WO2009009780A3
WO2009009780A3 PCT/US2008/069898 US2008069898W WO2009009780A3 WO 2009009780 A3 WO2009009780 A3 WO 2009009780A3 US 2008069898 W US2008069898 W US 2008069898W WO 2009009780 A3 WO2009009780 A3 WO 2009009780A3
Authority
WO
Grant status
Application
Patent type
Prior art keywords
container
support structure
apparatus
method
flat panel
Prior art date
Application number
PCT/US2008/069898
Other languages
French (fr)
Other versions
WO2009009780A2 (en )
Inventor
Richard H Gould
Anthony C Bonora
Michael Krolak
Original Assignee
Asyst Technologies
Richard H Gould
Anthony C Bonora
Michael Krolak
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date

Links

Classifications

    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735Closed carriers
    • H01L21/67363Closed carriers specially adapted for containing substrates other than wafers
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735Closed carriers
    • H01L21/67369Closed carriers characterised by shock absorbing elements, e.g. retainers or cushions
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735Closed carriers
    • H01L21/67383Closed carriers characterised by substrate supports
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735Closed carriers
    • H01L21/67389Closed carriers characterised by atmosphere control
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67766Mechanical parts of transfer devices
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67778Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of waers

Abstract

A container for supporting substrates for processing is provided. The container includes a base, a top, and side panels connecting the base and the top. A support structure is disposed in the container. The support structure is configured to support the substrates within the container. The support structure has rows of multiple tensile members extending across a width of the container. Each row of the multiple tensile members is configured to support a substrate, wherein one of the side panels includes a moveable flexible membrane enabling access into the container. A support structure for the flexible membrane includes a synchronization mechanism for synchronizing movement of the flexible membrane with a door of a receiving module of a processing tool or a door of the processing tool.
PCT/US2008/069898 2007-07-12 2008-07-12 Method and apparatus for providing flat panel display environmental isolation WO2009009780A3 (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
US94950307 true 2007-07-12 2007-07-12
US60/949,503 2007-07-12
US96957007 true 2007-08-31 2007-08-31
US60/969,570 2007-08-31
US12/172,084 2008-07-11
US12172084 US20090016862A1 (en) 2007-07-12 2008-07-11 Method and apparatus for providing flat panel display environmental isolation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN 200880024416 CN101743180A (en) 2007-07-12 2008-07-12 Method and apparatus for providing flat panel display environmental isolation

Publications (2)

Publication Number Publication Date
WO2009009780A2 true WO2009009780A2 (en) 2009-01-15
WO2009009780A3 true true WO2009009780A3 (en) 2009-03-05

Family

ID=40229510

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2008/069898 WO2009009780A3 (en) 2007-07-12 2008-07-12 Method and apparatus for providing flat panel display environmental isolation

Country Status (1)

Country Link
WO (1) WO2009009780A3 (en)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5183177A (en) * 1992-05-28 1993-02-02 Jackson Yu Storage box for assortment of articles
US5255970A (en) * 1992-05-26 1993-10-26 Theosabrata Yos S Storage cabinet
US5895191A (en) * 1995-08-23 1999-04-20 Asyst Technologies Sealable, transportable container adapted for horizontal loading and unloading
JP2001077188A (en) * 1999-07-06 2001-03-23 Ebara Corp Substrate conveying container
US20020015633A1 (en) * 1998-05-05 2002-02-07 William J. Fosnight Smif pod including independently supported wafer cassette

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5255970A (en) * 1992-05-26 1993-10-26 Theosabrata Yos S Storage cabinet
US5183177A (en) * 1992-05-28 1993-02-02 Jackson Yu Storage box for assortment of articles
US5895191A (en) * 1995-08-23 1999-04-20 Asyst Technologies Sealable, transportable container adapted for horizontal loading and unloading
US20020015633A1 (en) * 1998-05-05 2002-02-07 William J. Fosnight Smif pod including independently supported wafer cassette
JP2001077188A (en) * 1999-07-06 2001-03-23 Ebara Corp Substrate conveying container

Also Published As

Publication number Publication date Type
WO2009009780A2 (en) 2009-01-15 application

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