WO2008152559A3 - Controller for tunable mems capacitor - Google Patents

Controller for tunable mems capacitor

Info

Publication number
WO2008152559A3
WO2008152559A3 PCT/IB2008/052253 IB2008052253W WO2008152559A3 WO 2008152559 A3 WO2008152559 A3 WO 2008152559A3 IB 2008052253 W IB2008052253 W IB 2008052253W WO 2008152559 A3 WO2008152559 A3 WO 2008152559A3
Authority
WO
Grant status
Application
Patent type
Prior art keywords
dielectric
capacitor
tunable
mems
material
Prior art date
Application number
PCT/IB2008/052253
Other languages
French (fr)
Other versions
WO2008152559A2 (en )
Inventor
Peter G Steeneken
Klaus Reimann
Original Assignee
Nxp Bv
Peter G Steeneken
Klaus Reimann
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date

Links

Classifications

    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
    • H01G5/00Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/16Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of distance between electrodes
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
    • H01G5/00Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/01Details
    • H01G5/013Dielectrics
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
    • H01G5/00Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/01Details
    • H01G5/013Dielectrics
    • H01G5/0134Solid dielectrics
    • H01G5/0136Solid dielectrics with movable electrodes
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
    • H01G7/00Capacitors in which the capacitance is varied by non-mechanical means; Processes of their manufacture
    • H01G7/06Capacitors in which the capacitance is varied by non-mechanical means; Processes of their manufacture having a dielectric selected for the variation of its permittivity with applied voltage, i.e. ferroelectric capacitors
    • HELECTRICITY
    • H03BASIC ELECTRONIC CIRCUITRY
    • H03JTUNING RESONANT CIRCUITS; SELECTING RESONANT CIRCUITS
    • H03J5/00Discontinuous tuning; Selecting predetermined frequencies; Selecting frequency bands with or without continuous tuning in one or more of the bands, e.g. push-button tuning, turret tuner
    • H03J5/24Discontinuous tuning; Selecting predetermined frequencies; Selecting frequency bands with or without continuous tuning in one or more of the bands, e.g. push-button tuning, turret tuner with a number of separate pretuned tuning circuits or separate tuning elements selectively brought into circuit, e.g. for waveband selection, for television channel selection
    • H03J5/248Discontinuous tuning; Selecting predetermined frequencies; Selecting frequency bands with or without continuous tuning in one or more of the bands, e.g. push-button tuning, turret tuner with a number of separate pretuned tuning circuits or separate tuning elements selectively brought into circuit, e.g. for waveband selection, for television channel selection using electromechanical means
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
    • H01G5/00Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G2005/02IPC5 having air, gas, or vacuum as the dielectric

Abstract

A MEMS tunable capacitor comprises first and second opposing capacitor electrodes (10,12), wherein the second capacitor electrode (12) is movable by a MEMS switch to vary the capacitor dielectric spacing, and thereby tune the capacitance. A tunable dielectric material (14) and a non- tunable dielectric material are in series between the first and second electrodes. The tunable dielectric material occupies a dimension gd of the electrode spacing, and the non-tunable dielectric material occupies a dimension g of the electrode spacing. A third electrode (20) faces the movable second electrode (12) for electrically controlling tunable dielectric material. A controller is adapted to vary the capacitor dielectric spacing for a first continuous range of adjustment of the capacitance of the MEMS capacitor, and to tune the dielectric material (14) for a second continuous range of adjustment of the capacitance of the MEMS capacitor, thereby to provide a continuous analogue range of adjustment including the first and second ranges. This arrangement provides independent control of the MEMS function and the dielectric tuning function, and enables a continuous adjustability.
PCT/IB2008/052253 2007-06-13 2008-06-09 Controller for tunable mems capacitor WO2008152559A3 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP07110209 2007-06-13
EP07110209.9 2007-06-13

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
EP20080763249 EP2168239A2 (en) 2007-06-13 2008-06-09 Tunable mems capacitor
CN 200880019916 CN101682315B (en) 2007-06-13 2008-06-09 Controller for tunable mems capacitor
US12663829 US8890543B2 (en) 2007-06-13 2008-06-09 Tunable MEMS capacitor
US14543146 US9576738B2 (en) 2007-06-13 2014-11-17 Tunable MEMS capacitor

Related Child Applications (3)

Application Number Title Priority Date Filing Date
US12663829 A-371-Of-International US8890543B2 (en) 2007-06-13 2008-06-09 Tunable MEMS capacitor
US66382909 A-371-Of-International 2009-12-09 2009-12-09
US14543146 Continuation US9576738B2 (en) 2007-06-13 2014-11-17 Tunable MEMS capacitor

Publications (2)

Publication Number Publication Date
WO2008152559A2 true WO2008152559A2 (en) 2008-12-18
WO2008152559A3 true true WO2008152559A3 (en) 2009-02-05

Family

ID=39951510

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/IB2008/052253 WO2008152559A3 (en) 2007-06-13 2008-06-09 Controller for tunable mems capacitor

Country Status (4)

Country Link
US (2) US8890543B2 (en)
EP (1) EP2168239A2 (en)
CN (1) CN101682315B (en)
WO (1) WO2008152559A3 (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2940503B1 (en) * 2008-12-23 2011-03-04 Thales Sa Compact capacitor switches mems
CN102341341B (en) * 2009-03-04 2014-04-30 Nxp股份有限公司 MEMS devices
WO2010103474A1 (en) * 2009-03-11 2010-09-16 Nxp B.V. Mems electrostatic actuator
CN102176376A (en) * 2010-12-31 2011-09-07 航天时代电子技术股份有限公司 Wide adjustable capacitor based on MEMS (micro electron mechanical systems) relay
WO2012170748A3 (en) * 2011-06-07 2013-05-02 Wispry, Inc. Systems and methods for current density optimization in cmos-integrated mems capacitive devices
CN103748646B (en) * 2011-08-19 2017-05-10 卡文迪什动力有限公司 Wiring applications for rf mems variable capacitor
WO2013033725A1 (en) 2011-09-02 2013-03-07 Cavendish Kinetics, Inc Mems variable capacitor with enhanced rf performance
US9048023B2 (en) 2013-03-21 2015-06-02 MCV Technologies, Inc. Tunable capacitor
CN104555882B (en) * 2013-10-10 2016-03-23 原相科技股份有限公司 MEMS element microelectromechanical compensation structure
US9659717B2 (en) * 2014-02-18 2017-05-23 Analog Devices Global MEMS device with constant capacitance

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0725408A2 (en) * 1995-02-01 1996-08-07 Murata Manufacturing Co., Ltd. Variable capacitor
US6307452B1 (en) * 1999-09-16 2001-10-23 Motorola, Inc. Folded spring based micro electromechanical (MEM) RF switch
EP1383234A1 (en) * 2002-07-16 2004-01-21 Lucent Technologies Inc. Varactor with extended tuning range
US20040124497A1 (en) * 2002-09-16 2004-07-01 Xavier Rottenberg Switchable capacitor and method of making the same
WO2006117709A2 (en) * 2005-05-02 2006-11-09 Nxp B.V. Capacitive rf-mems device with integrated decoupling capacitor

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4490772A (en) * 1983-06-13 1984-12-25 Blickstein Martin J Voltage and mechanically variable trimmer capacitor
US4977480A (en) * 1988-09-14 1990-12-11 Fuji Koki Mfg. Co., Ltd. Variable-capacitance type sensor and variable-capacitance type sensor system using the same
US5312790A (en) * 1993-06-09 1994-05-17 The United States Of America As Represented By The Secretary Of The Army Ceramic ferroelectric material
US6355534B1 (en) 2000-01-26 2002-03-12 Intel Corporation Variable tunable range MEMS capacitor
US6683513B2 (en) * 2000-10-26 2004-01-27 Paratek Microwave, Inc. Electronically tunable RF diplexers tuned by tunable capacitors
US6806553B2 (en) * 2001-03-30 2004-10-19 Kyocera Corporation Tunable thin film capacitor
FR2831705B1 (en) 2001-10-25 2004-08-27 Commissariat Energie Atomique variable micro-capacitor ratio and very low actuation voltage
JP3709847B2 (en) * 2002-01-23 2005-10-26 株式会社村田製作所 Electrostatic actuator
US6687112B2 (en) * 2002-03-21 2004-02-03 National Chiao Tung University Control system for an electrostatically-driven microelectromechanical device
US6829132B2 (en) 2003-04-30 2004-12-07 Hewlett-Packard Development Company, L.P. Charge control of micro-electromechanical device
US6853534B2 (en) * 2003-06-09 2005-02-08 Agilent Technologies, Inc. Tunable capacitor
US7030463B1 (en) * 2003-10-01 2006-04-18 University Of Dayton Tuneable electromagnetic bandgap structures based on high resistivity silicon substrates
US6962832B2 (en) * 2004-02-02 2005-11-08 Wireless Mems, Inc. Fabrication method for making a planar cantilever, low surface leakage, reproducible and reliable metal dimple contact micro-relay MEMS switch
KR100549003B1 (en) 2004-02-04 2006-02-02 삼성전자주식회사 MEMS tunable capacitor having wide tuning range and method of fabricating the same
WO2006046193A1 (en) 2004-10-27 2006-05-04 Koninklijke Philips Electronics N. V. Electronic device
US8098120B2 (en) 2004-10-27 2012-01-17 Epcos Ag Spring structure for MEMS device
US20060125746A1 (en) * 2004-12-13 2006-06-15 Jean-Michel Sallese Microelectrical device
KR100651724B1 (en) * 2004-12-13 2006-12-01 한국전자통신연구원 Lateral tunable capacitor and microwave tunable device having the same
CN1651876A (en) 2005-02-26 2005-08-10 重庆大学 Self-supplying energy micro-vibration sensor
US7345866B1 (en) * 2005-05-13 2008-03-18 Hrl Laboratories, Llc Continuously tunable RF MEMS capacitor with ultra-wide tuning range
US7489004B2 (en) * 2006-01-24 2009-02-10 Stmicroelectronics S.R.L. Micro-electro-mechanical variable capacitor for radio frequency applications with reduced influence of a surface roughness
US7141989B1 (en) 2006-04-10 2006-11-28 Freescale Semiconductor, Inc. Methods and apparatus for a MEMS varactor
KR100806872B1 (en) * 2006-10-12 2008-02-22 삼성전자주식회사 Tunable capacitor by using electrowetting phenomenon
US7936553B2 (en) * 2007-03-22 2011-05-03 Paratek Microwave, Inc. Capacitors adapted for acoustic resonance cancellation

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0725408A2 (en) * 1995-02-01 1996-08-07 Murata Manufacturing Co., Ltd. Variable capacitor
US6307452B1 (en) * 1999-09-16 2001-10-23 Motorola, Inc. Folded spring based micro electromechanical (MEM) RF switch
EP1383234A1 (en) * 2002-07-16 2004-01-21 Lucent Technologies Inc. Varactor with extended tuning range
US20040124497A1 (en) * 2002-09-16 2004-07-01 Xavier Rottenberg Switchable capacitor and method of making the same
WO2006117709A2 (en) * 2005-05-02 2006-11-09 Nxp B.V. Capacitive rf-mems device with integrated decoupling capacitor

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
GUOAN WANG ET AL: "A high performance tunable RF Mems Switch Using Barium Strontium Titanate (BST) Dielectrics for reconfigurable Antennas and phase arrays", IEEE ANTENNAS AND WIRELESS PROPAGATION LETTERS, IEEE, PISCATAWAY, NJ, US, vol. 4, 1 January 2005 (2005-01-01), pages 217 - 220, XP001248617, ISSN: 1536-1225 *
PARK J Y ET AL: "Monolithically integrated micromachined RF MEMS capacitive switches", SENSORS AND ACTUATORS A, ELSEVIER SEQUOIA S.A., LAUSANNE, CH, vol. 89, no. 1-2, 20 March 2001 (2001-03-20), pages 88 - 94, XP004317250, ISSN: 0924-4247 *

Also Published As

Publication number Publication date Type
US8890543B2 (en) 2014-11-18 grant
WO2008152559A2 (en) 2008-12-18 application
US9576738B2 (en) 2017-02-21 grant
CN101682315A (en) 2010-03-24 application
EP2168239A2 (en) 2010-03-31 application
US20150092315A1 (en) 2015-04-02 application
CN101682315B (en) 2012-08-29 grant
US20100182731A1 (en) 2010-07-22 application

Similar Documents

Publication Publication Date Title
US6111467A (en) Circuit for time constant tuning of gm-C filters
US8803631B2 (en) Method and apparatus for adapting a variable impedance network
US4118611A (en) Buckling spring torsional snap actuator
WO2008126365A1 (en) Nonvolatile memory device, nonvolatile memory element, and nonvolatile memory element array
US20080042521A1 (en) Piezoelectric driven mems device
US20070109714A1 (en) Embossing chuck enabling wafer to be easily detached therefrom
EP1901005A2 (en) Operating device for an electric device and operating method
US20060226501A1 (en) Collapsing zipper varactor with inter-digit actuation electrodes for tunable filters
US20060208612A1 (en) Actuator, switch using the actuator, and method of controlling the actuator
JP2008091167A (en) Micromechanical device
US20040264107A1 (en) Tunable capacitors using fluid dielectrics
Irshad et al. A 12–18 GHz electrostatically tunable liquid metal RF MEMS resonator with quality factor of 1400–1840
JPS6052102A (en) Dielectric resonator and method for adjusting resonance frequency of dielectric resonator
US2838646A (en) Infinitely variable control switch
WO2008093682A1 (en) Capacitance type motion detecting apparatus and input apparatus using the same
JP2010186572A (en) Operation input device and cock device
US2717356A (en) Temperature and voltage control capacitors
US20080111176A1 (en) Tunable capacitor
WO2009011130A1 (en) Cooking device
JP2010287351A (en) Operation input device, and water cock device
US4649366A (en) Trimmer control mounted in potentiometer knob
JP2004048589A (en) Voltage controlled oscillator
CN102539853A (en) Adjustable and controllable electric arc generation device
US4282476A (en) Variable pressure control switch for battery charging circuit
Jeon et al. Multiple-input relay design for more compact implementation of digital logic circuits

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 08763249

Country of ref document: EP

Kind code of ref document: A2

WWE Wipo information: entry into national phase

Ref document number: 12663829

Country of ref document: US

NENP Non-entry into the national phase in:

Ref country code: DE