WO2008149707A1 - Dlc film and dlc coated mold - Google Patents

Dlc film and dlc coated mold Download PDF

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Publication number
WO2008149707A1
WO2008149707A1 PCT/JP2008/059640 JP2008059640W WO2008149707A1 WO 2008149707 A1 WO2008149707 A1 WO 2008149707A1 JP 2008059640 W JP2008059640 W JP 2008059640W WO 2008149707 A1 WO2008149707 A1 WO 2008149707A1
Authority
WO
WIPO (PCT)
Prior art keywords
film
dlc
mean roughness
base material
dlc film
Prior art date
Application number
PCT/JP2008/059640
Other languages
French (fr)
Japanese (ja)
Inventor
Hirofumi Takikawa
Hideto Tanoue
Masao Kamiya
Hirohisa Kato
Makoto Taki
Yushi Hasegawa
Original Assignee
Itoh Optical Industrial Co., Ltd.
National University Corporation Toyohashi University Of Technology
Onward Ceramic Coating Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Itoh Optical Industrial Co., Ltd., National University Corporation Toyohashi University Of Technology, Onward Ceramic Coating Co., Ltd. filed Critical Itoh Optical Industrial Co., Ltd.
Publication of WO2008149707A1 publication Critical patent/WO2008149707A1/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00—Moulds or cores; Details thereof or accessories therefor
    • B29C33/56—Coatings, e.g. enameled or galvanised; Releasing, lubricating or separating agents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D11/00—Producing optical elements, e.g. lenses or prisms
    • B29D11/00009—Production of simple or compound lenses
    • B29D11/0048—Moulds for lenses
    • B29D11/00548—Moulds for lenses with surfaces formed by films
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/25—Diamond
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2215/00—Press-moulding glass
    • C03B2215/02—Press-mould materials
    • C03B2215/08—Coated press-mould dies
    • C03B2215/14—Die top coat materials, e.g. materials for the glass-contacting layers
    • C03B2215/24—Carbon, e.g. diamond, graphite, amorphous carbon

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Geology (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • General Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Health & Medical Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Ophthalmology & Optometry (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Mounting, Exchange, And Manufacturing Of Dies (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

This invention provides a DLC film comprising ta-C, that is, DLC having an sp3/(sp2 + sp3) structural ratio of 0.5 to 0.9, a hydrogen content of 0 to 5 atomic%, a nanoindentation hardness of 40 to 100 GPa, and a density of 2.7 to 3.4 g/cm3. In surface scanning detection at a measuring feed of 0.01 mm with a tracer-type surface shape measuring device having a tracer tip radius of curvature of 2 μm on the surface of a film formed on a base material, the absolute value change level of arithmetical mean roughness between the arithmetic mean roughness Ra (S) of a film forming face before the formation of a film on the base material and the arithmetic mean roughness Ra (D) of the DLC film face, i.e., ΔRa (= |Ra(S) - Ra(D)|), is not more than 0.75 nm, and the number of concavoconvexes having a height or depth of not less than 20 nm on the DLC film face is not more than 0.01/unit scanning distance (mm)/unit film thickness (nm).
PCT/JP2008/059640 2007-06-01 2008-05-26 Dlc film and dlc coated mold WO2008149707A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007146539A JP5483384B2 (en) 2007-06-01 2007-06-01 DLC film and DLC coated mold
JP2007-146539 2007-06-01

Publications (1)

Publication Number Publication Date
WO2008149707A1 true WO2008149707A1 (en) 2008-12-11

Family

ID=40093529

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/059640 WO2008149707A1 (en) 2007-06-01 2008-05-26 Dlc film and dlc coated mold

Country Status (2)

Country Link
JP (1) JP5483384B2 (en)
WO (1) WO2008149707A1 (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013091586A (en) * 2011-10-27 2013-05-16 Tatsuhiko Aizawa Pattern forming mold, and method for manufacturing the same
WO2013099447A1 (en) * 2011-12-26 2013-07-04 ポリプラスチックス株式会社 Production method for pre-filled syringe outer tube and production method for injection molding mold
WO2013099446A1 (en) * 2011-12-26 2013-07-04 ポリプラスチックス株式会社 Production method for outer tube for pre-filled syringe
WO2013146393A1 (en) * 2012-03-30 2013-10-03 カヤバ工業株式会社 Sliding members and piston pump motor
WO2015011361A1 (en) * 2013-07-25 2015-01-29 H.E.F. Mechanical part coated with a layer of amorphous carbon for sliding in relation to a less hard component
CN109913798A (en) * 2017-12-13 2019-06-21 维达力实业(深圳)有限公司 Case-hardened graphite jig and its case-hardened method
JP2021172828A (en) * 2020-04-17 2021-11-01 日本アイ・ティ・エフ株式会社 Carbon film and slide member

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JP5627214B2 (en) * 2009-11-04 2014-11-19 キヤノン株式会社 Mold and its manufacturing method
JP5868017B2 (en) * 2010-04-14 2016-02-24 キヤノン株式会社 Manufacturing method of optical element molding die and optical element molding die
JP5762101B2 (en) * 2010-04-14 2015-08-12 キヤノン株式会社 Manufacturing method of optical element molding die and optical element molding die
JP5580218B2 (en) * 2011-01-11 2014-08-27 株式会社豊田中央研究所 Manufacturing method of semiconductor device
JP5693340B2 (en) * 2011-04-11 2015-04-01 キヤノン株式会社 Manufacturing method of optical element molding die and optical element molding die
WO2013035634A1 (en) 2011-09-07 2013-03-14 ナノテック株式会社 Carbon film forming apparatus
JP2013087325A (en) * 2011-10-18 2013-05-13 Nippon Itf Kk Hard carbon film, and method for forming the same
JP6073624B2 (en) * 2012-09-28 2017-02-01 Hoya株式会社 Method for producing mold press mold, mold press mold, and method for producing glass optical element using the same
JP2014139112A (en) * 2013-01-21 2014-07-31 Chao-Wei Metal Industrial Co Ltd Method of producing plate-like workpiece provided with microstructure in surface
JP6051983B2 (en) * 2013-03-18 2016-12-27 株式会社島津製作所 Arc plasma deposition system
JP5669117B2 (en) * 2013-11-05 2015-02-12 国立大学法人豊橋技術科学大学 Method for manufacturing DLC film
JP6211987B2 (en) * 2014-04-22 2017-10-11 株式会社神戸製鋼所 Mold for hot forming of Zn-plated steel sheet
US9984915B2 (en) * 2014-05-30 2018-05-29 Infineon Technologies Ag Semiconductor wafer and method for processing a semiconductor wafer
KR102088090B1 (en) 2014-08-01 2020-03-11 히타치 긴조쿠 가부시키가이샤 Method for manufacturing a coated tool
JP6762887B2 (en) * 2016-10-31 2020-09-30 日本ピストンリング株式会社 piston ring
CN106637207B (en) * 2016-12-30 2019-08-23 纳峰真空镀膜（上海）有限公司 A kind of high temperature resistant diamond-like coating method in graphite substrate
JP6737191B2 (en) * 2017-01-20 2020-08-05 株式会社デンソー Fuel injection valve and manufacturing method thereof
CN108656757B (en) * 2017-03-28 2020-07-10 罗姆股份有限公司 Thermal print head
JP6964289B2 (en) * 2017-10-03 2021-11-10 オーエスジー株式会社 High hardness hard carbon composite film coating tool
JP7230399B2 (en) * 2018-09-27 2023-03-01 日産自動車株式会社 Sliding member and sliding device using the sliding member
CN111775381A (en) * 2019-04-04 2020-10-16 苏州卡利肯新光讯科技有限公司 Processing technology of mold for car lamp reflector
JP7486043B2 (en) * 2019-08-06 2024-05-17 三菱マテリアル株式会社 Hard-coated components
JP2021025101A (en) * 2019-08-06 2021-02-22 三菱マテリアル株式会社 Coating member clad with hard film
JP7268901B2 (en) * 2020-12-22 2023-05-08 日本アイ・ティ・エフ株式会社 SLIDING MEMBER AND METHOD FOR MANUFACTURING SLIDING MEMBER
JP7058781B1 (en) * 2021-03-30 2022-04-22 株式会社リケン Piston ring and its manufacturing method
US11867294B2 (en) 2021-09-30 2024-01-09 Tpr Co., Ltd. Sliding member

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0733451A (en) * 1993-07-23 1995-02-03 Minolta Co Ltd Production of metallic mold for glass forming
JPH1179759A (en) * 1997-09-04 1999-03-23 Canon Inc Production of mold for forming optical element
JPH11180723A (en) * 1997-12-22 1999-07-06 Canon Inc Production of optical glass molding
JP2002285328A (en) * 2001-03-23 2002-10-03 Fuji Electric Co Ltd Hard carbon coating film and member coated with the same film
JP2004300486A (en) * 2003-03-28 2004-10-28 Fujitsu Ltd Carbon protection film, method for depositing the same, magnetic recording medium having the carbon protection film, magnetic head, and magnetic storage device
JP2004315854A (en) * 2003-04-11 2004-11-11 National Institute For Materials Science Light transmitting carbon thin film, and method for manufacturing the same
JP2005018844A (en) * 2003-06-24 2005-01-20 Shimadzu Corp Composite film forming device, and method for forming protective film of magnetic head by using the device

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0733451A (en) * 1993-07-23 1995-02-03 Minolta Co Ltd Production of metallic mold for glass forming
JPH1179759A (en) * 1997-09-04 1999-03-23 Canon Inc Production of mold for forming optical element
JPH11180723A (en) * 1997-12-22 1999-07-06 Canon Inc Production of optical glass molding
JP2002285328A (en) * 2001-03-23 2002-10-03 Fuji Electric Co Ltd Hard carbon coating film and member coated with the same film
JP2004300486A (en) * 2003-03-28 2004-10-28 Fujitsu Ltd Carbon protection film, method for depositing the same, magnetic recording medium having the carbon protection film, magnetic head, and magnetic storage device
JP2004315854A (en) * 2003-04-11 2004-11-11 National Institute For Materials Science Light transmitting carbon thin film, and method for manufacturing the same
JP2005018844A (en) * 2003-06-24 2005-01-20 Shimadzu Corp Composite film forming device, and method for forming protective film of magnetic head by using the device

Cited By (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013091586A (en) * 2011-10-27 2013-05-16 Tatsuhiko Aizawa Pattern forming mold, and method for manufacturing the same
WO2013099447A1 (en) * 2011-12-26 2013-07-04 ポリプラスチックス株式会社 Production method for pre-filled syringe outer tube and production method for injection molding mold
WO2013099446A1 (en) * 2011-12-26 2013-07-04 ポリプラスチックス株式会社 Production method for outer tube for pre-filled syringe
JP2013132394A (en) * 2011-12-26 2013-07-08 Polyplastics Co Method for manufacturing outer cylinder for prefilled syringe, and method for manufacturing injection molding die
JP2013132393A (en) * 2011-12-26 2013-07-08 Polyplastics Co Method for manufacturing outer tube for prefilled syringe
CN104039294A (en) * 2011-12-26 2014-09-10 宝理塑料株式会社 Production method for outer tube for pre-filled syringe
JPWO2013146393A1 (en) * 2012-03-30 2015-12-10 カヤバ工業株式会社 Sliding member and piston pump / motor
WO2013146393A1 (en) * 2012-03-30 2013-10-03 カヤバ工業株式会社 Sliding members and piston pump motor
RU2597323C2 (en) * 2012-03-30 2016-09-10 КейУайБи Корпорейшн Sliding members and piston pump/motor
FR3008905A1 (en) * 2013-07-25 2015-01-30 Hydromecanique & Frottement MECHANICAL PIECE COATED WITH AN AMORPHOUS CARBON LAYER FOR ITS SLIPPING WITH ANOTHER LESS HARD COMPONENT
WO2015011361A1 (en) * 2013-07-25 2015-01-29 H.E.F. Mechanical part coated with a layer of amorphous carbon for sliding in relation to a less hard component
AU2014294910B2 (en) * 2013-07-25 2018-07-19 H.E.F. Mechanical part coated with a layer of amorphous carbon for sliding in relation to a less hard component
US10344242B2 (en) 2013-07-25 2019-07-09 H.E.F. Mechanical part coated with a layer of amorphous carbon for sliding in relation to a less hard component
KR20210047976A (en) * 2013-07-25 2021-04-30 이드러메까니끄 에 프러뜨망 Mechanical part coated with a layer of amorphous carbon for sliding in relation to a less hard component
KR102472526B1 (en) 2013-07-25 2022-11-29 이드러메까니끄 에 프러뜨망 Mechanical part coated with a layer of amorphous carbon for sliding in relation to a less hard component
CN109913798A (en) * 2017-12-13 2019-06-21 维达力实业(深圳)有限公司 Case-hardened graphite jig and its case-hardened method
JP2021172828A (en) * 2020-04-17 2021-11-01 日本アイ・ティ・エフ株式会社 Carbon film and slide member
JP7302878B2 (en) 2020-04-17 2023-07-04 日本アイ・ティ・エフ株式会社 Carbon film and sliding member

Also Published As

Publication number Publication date
JP5483384B2 (en) 2014-05-07
JP2008297171A (en) 2008-12-11

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