WO2008123092A1 - 可燃性ガスセンサ - Google Patents

可燃性ガスセンサ Download PDF

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Publication number
WO2008123092A1
WO2008123092A1 PCT/JP2008/055056 JP2008055056W WO2008123092A1 WO 2008123092 A1 WO2008123092 A1 WO 2008123092A1 JP 2008055056 W JP2008055056 W JP 2008055056W WO 2008123092 A1 WO2008123092 A1 WO 2008123092A1
Authority
WO
WIPO (PCT)
Prior art keywords
catalyst layer
chain
temperature measuring
oxidation
measuring element
Prior art date
Application number
PCT/JP2008/055056
Other languages
English (en)
French (fr)
Inventor
Tsutomu Oie
Kazutaka Okamoto
Yoshiaki Nakata
Yutaka Yamagishi
Shuji Takamatsu
Original Assignee
Horiba, Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2007084354A external-priority patent/JP2008241554A/ja
Priority claimed from JP2008041725A external-priority patent/JP2008275588A/ja
Application filed by Horiba, Ltd. filed Critical Horiba, Ltd.
Priority to DE112008000824T priority Critical patent/DE112008000824T5/de
Priority to US12/593,389 priority patent/US20100221148A1/en
Publication of WO2008123092A1 publication Critical patent/WO2008123092A1/ja

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/14—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature
    • G01N27/16—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature caused by burning or catalytic oxidation of surrounding material to be tested, e.g. of gas

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)

Abstract

　　この発明は、全体の小型化を図りつつ、測定対象ガスと酸化触媒粒子との接触面積を増大し、それに伴って酸化反応熱の発生量を増加するとともに、その酸化反応熱の伝達性を改善して測定感度及び測定精度の顕著な向上を実現できる可燃性ガスセンサを提供するものである。 　この発明は、Ｓｉ基板の上面に、異種金属を接合してなるサーモパイルなどの測温素子が形成され、この測温素子の感熱部上に、多孔材料層にＰｔなどの酸化触媒粒子を担持させてなる多孔触媒層または多数の酸化触媒粒子を鎖状に繋ぎ結合させてなる鎖状触媒層を設け、この孔触媒層または鎖状触媒層を測温素子の感熱部に一体結合している。
PCT/JP2008/055056 2007-03-28 2008-03-19 可燃性ガスセンサ WO2008123092A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE112008000824T DE112008000824T5 (de) 2007-03-28 2008-03-19 Sensor für brennbare Gase
US12/593,389 US20100221148A1 (en) 2007-03-28 2008-03-19 Combustible gas sensor

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP2007-084354 2007-03-28
JP2007084354A JP2008241554A (ja) 2007-03-28 2007-03-28 可燃性ガスセンサ
JP2007090981 2007-03-30
JP2007-090981 2007-03-30
JP2008-041725 2008-02-22
JP2008041725A JP2008275588A (ja) 2007-03-30 2008-02-22 可燃性ガスセンサ

Publications (1)

Publication Number Publication Date
WO2008123092A1 true WO2008123092A1 (ja) 2008-10-16

Family

ID=39830593

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/055056 WO2008123092A1 (ja) 2007-03-28 2008-03-19 可燃性ガスセンサ

Country Status (1)

Country Link
WO (1) WO2008123092A1 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016061592A (ja) * 2014-09-16 2016-04-25 ヤマハファインテック株式会社 接触燃焼式ガスセンサ
CN107402230A (zh) * 2017-08-01 2017-11-28 昆明理工大学 一种烟草制品烟雾浓度测量装置及方法
CN115876835A (zh) * 2022-12-08 2023-03-31 中国科学院上海微系统与信息技术研究所 一种差分量热式mems气体传感器及气体检测方法

Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08304320A (ja) * 1994-09-23 1996-11-22 Ford Motor Co 接触ガスセンサー
JPH1151893A (ja) * 1997-08-07 1999-02-26 Yazaki Corp 接触燃焼式ガスセンサ
JPH1172455A (ja) * 1997-06-11 1999-03-16 Cts Corp 方向決めに対して影響を受けないガスセンサ
JP2004241295A (ja) * 2003-02-07 2004-08-26 Hitachi Zosen Corp カーボンナノチューブを用いた電子放出素子用電極材料およびその製造方法
WO2004111628A1 (ja) * 2003-06-12 2004-12-23 Riken Keiki Co., Ltd. 接触燃焼式ガスセンサ、及びその製造方法
WO2005012171A2 (en) * 2003-07-28 2005-02-10 William Marsh Rice University Sidewall functionalization of carbon nanotubes with organosilanes for polymer composites
JP2005083950A (ja) * 2003-09-10 2005-03-31 Yazaki Corp Ｖｏｃセンサおよびｖｏｃ検知装置
JP2006071362A (ja) * 2004-08-31 2006-03-16 Horiba Ltd 可燃性ガスセンサ
JP2006515231A (ja) * 2003-02-07 2006-05-25 ウイスコンシン アラムニ リサーチ ファンデーション ナノシリンダー−修飾された表面
JP2006131428A (ja) * 2004-11-02 2006-05-25 National Institute Of Advanced Industrial & Technology カーボンナノチューブおよびその製造方法
JP2007064865A (ja) * 2005-09-01 2007-03-15 Toshitsugu Ueda ガスセンサ及びガスセンサの製造方法

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08304320A (ja) * 1994-09-23 1996-11-22 Ford Motor Co 接触ガスセンサー
JPH1172455A (ja) * 1997-06-11 1999-03-16 Cts Corp 方向決めに対して影響を受けないガスセンサ
JPH1151893A (ja) * 1997-08-07 1999-02-26 Yazaki Corp 接触燃焼式ガスセンサ
JP2004241295A (ja) * 2003-02-07 2004-08-26 Hitachi Zosen Corp カーボンナノチューブを用いた電子放出素子用電極材料およびその製造方法
JP2006515231A (ja) * 2003-02-07 2006-05-25 ウイスコンシン アラムニ リサーチ ファンデーション ナノシリンダー−修飾された表面
WO2004111628A1 (ja) * 2003-06-12 2004-12-23 Riken Keiki Co., Ltd. 接触燃焼式ガスセンサ、及びその製造方法
WO2005012171A2 (en) * 2003-07-28 2005-02-10 William Marsh Rice University Sidewall functionalization of carbon nanotubes with organosilanes for polymer composites
JP2005083950A (ja) * 2003-09-10 2005-03-31 Yazaki Corp Ｖｏｃセンサおよびｖｏｃ検知装置
JP2006071362A (ja) * 2004-08-31 2006-03-16 Horiba Ltd 可燃性ガスセンサ
JP2006131428A (ja) * 2004-11-02 2006-05-25 National Institute Of Advanced Industrial & Technology カーボンナノチューブおよびその製造方法
JP2007064865A (ja) * 2005-09-01 2007-03-15 Toshitsugu Ueda ガスセンサ及びガスセンサの製造方法

Non-Patent Citations (4)

* Cited by examiner, † Cited by third party
Title
CHOA W.-S. ET AL.: "Patterned multiwall carbon nanotube films as materials of NO2 gas sensors", SENSORS AND ACTUATORS B: CHEMICAL, vol. 119, no. 1, 24 November 2006 (2006-11-24), pages 180 - 185, XP005645449 *
NAKATA Y. ET AL.: "Thermopile to Pt Shokubai o Kumiawaseta Suiso Sensor", HEISEI 18 NEN THE INSTITUTE OF ELECTRICAL ENGINEERS OF JAPAN ZENKOKU TAIKAI KOEN RONBUNSHU, 15 March 2006 (2006-03-15), pages 260 *
STAR A. ET AL.: "Gas Sensor Array Based on Metal-Decorated Carbon Nanotubes", J. PHYS. CHEM. B, vol. 110, 2006, pages 21014 - 21020, XP002620383, DOI: doi:10.1021/jp064371z *
UEDA T. ET AL.: "NO Sensing Property of Carbon Nanotube Based Thin Film Gas Sensors Prepared by Chemical Vapor Deposition Techniques", JAPANESE JOURNAL OF APPLIED PHYSICS, vol. 45, no. 10B, 30 October 2006 (2006-10-30), pages 8393 - 8397 *

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016061592A (ja) * 2014-09-16 2016-04-25 ヤマハファインテック株式会社 接触燃焼式ガスセンサ
CN107402230A (zh) * 2017-08-01 2017-11-28 昆明理工大学 一种烟草制品烟雾浓度测量装置及方法
CN107402230B (zh) * 2017-08-01 2023-09-26 昆明理工大学 一种烟草制品烟雾浓度测量装置及方法
CN115876835A (zh) * 2022-12-08 2023-03-31 中国科学院上海微系统与信息技术研究所 一种差分量热式mems气体传感器及气体检测方法
CN115876835B (zh) * 2022-12-08 2023-09-08 中国科学院上海微系统与信息技术研究所 一种差分量热式mems气体传感器及气体检测方法

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