WO2008090725A1 - ダイヤフラムポンプ - Google Patents

ダイヤフラムポンプ Download PDF

Info

Publication number
WO2008090725A1
WO2008090725A1 PCT/JP2008/000022 JP2008000022W WO2008090725A1 WO 2008090725 A1 WO2008090725 A1 WO 2008090725A1 JP 2008000022 W JP2008000022 W JP 2008000022W WO 2008090725 A1 WO2008090725 A1 WO 2008090725A1
Authority
WO
WIPO (PCT)
Prior art keywords
valve
check valve
inflow
forming plate
diaphragm pump
Prior art date
Application number
PCT/JP2008/000022
Other languages
English (en)
French (fr)
Inventor
Mitsuru Yamamoto
Kazuhito Murata
Sakae Kitajo
Original Assignee
Nec Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nec Corporation filed Critical Nec Corporation
Priority to US12/448,694 priority Critical patent/US8308453B2/en
Priority to CN2008800027030A priority patent/CN101589233B/zh
Priority to JP2008554993A priority patent/JP5407333B2/ja
Publication of WO2008090725A1 publication Critical patent/WO2008090725A1/ja

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/028—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms with in- or outlet valve arranged in the plate-like flexible member
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)

Abstract

　ポンプ室１５は、圧電振動子７と弁構成プレート１０との間に構成される。弁構成プレート１０には、中央部に流入口１３が、その外周部には排出口１４が開設されており、流入口１３の穴径より排出口１４の穴径の方が大きくなされている。弁構成プレート１０には、流入逆止弁１１と流出逆止弁１２が設置されており、圧電振動子７の振動に連れて流入逆止弁１１と流出逆止弁１２とが開閉することにより、ポンプ室１５への液の流入、排出が行われる。
PCT/JP2008/000022 2007-01-23 2008-01-15 ダイヤフラムポンプ WO2008090725A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
US12/448,694 US8308453B2 (en) 2007-01-23 2008-01-15 Diaphragm pump
CN2008800027030A CN101589233B (zh) 2007-01-23 2008-01-15 隔膜泵
JP2008554993A JP5407333B2 (ja) 2007-01-23 2008-01-15 ダイヤフラムポンプ

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-012409 2007-01-23
JP2007012409 2007-01-23

Publications (1)

Publication Number Publication Date
WO2008090725A1 true WO2008090725A1 (ja) 2008-07-31

Family

ID=39644300

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/000022 WO2008090725A1 (ja) 2007-01-23 2008-01-15 ダイヤフラムポンプ

Country Status (4)

Country Link
US (1) US8308453B2 (ja)
JP (1) JP5407333B2 (ja)
CN (1) CN101589233B (ja)
WO (1) WO2008090725A1 (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2484906A4 (en) * 2009-10-01 2017-06-21 Murata Manufacturing Co., Ltd. Piezoelectric micro-blower
JP2019100329A (ja) * 2017-12-08 2019-06-24 日本電産株式会社 ポンプ
WO2019230160A1 (ja) * 2018-05-31 2019-12-05 株式会社村田製作所 流体制御装置
US10871156B2 (en) 2016-07-29 2020-12-22 Murata Manufacturing Co., Ltd. Valve and gas control device

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TWI503654B (zh) * 2009-12-29 2015-10-11 Foxconn Tech Co Ltd 電子裝置及其微型液體冷卻裝置
CN102748272A (zh) * 2011-04-18 2012-10-24 林淑媛 压电泵和其阀片
CN102338072B (zh) * 2011-08-31 2016-05-11 胡军 压电陶瓷驱动式超微型气泵
WO2013158659A1 (en) * 2012-04-19 2013-10-24 Kci Licensing, Inc. Disc pump with perimeter valve configuration
US9427505B2 (en) 2012-05-15 2016-08-30 Smith & Nephew Plc Negative pressure wound therapy apparatus
WO2013191011A1 (ja) * 2012-06-22 2013-12-27 株式会社村田製作所 送液装置
BR112015010640A2 (pt) * 2012-11-14 2017-07-11 Koninklijke Philips Nv bomba para fluidos; e gerador de vapor d'água
TWI552838B (zh) * 2013-06-24 2016-10-11 研能科技股份有限公司 微型氣壓動力裝置
JP6287089B2 (ja) * 2013-11-13 2018-03-07 村田機械株式会社 基板浮上装置、基板移載装置、および基板搬送装置
WO2016027817A1 (ja) * 2014-08-20 2016-02-25 株式会社村田製作所 ブロア
JP6725529B2 (ja) 2014-12-22 2020-07-22 スミス アンド ネフュー ピーエルシーＳｍｉｔｈ ＆ Ｎｅｐｈｅｗ Ｐｕｂｌｉｃ Ｌｉｍｉｔｅｄ Ｃｏｍｐａｎｙ 陰圧閉鎖療法の装置および方法
CN105201793B (zh) * 2015-10-19 2018-02-27 江苏大学 一种开槽式有阀压电泵
TWI618858B (zh) * 2017-02-24 2018-03-21 研能科技股份有限公司 流體輸送裝置
WO2018221286A1 (ja) * 2017-06-01 2018-12-06 株式会社村田製作所 圧力制御装置、および、圧力利用装置
CN109505765B (zh) * 2017-09-15 2020-09-01 研能科技股份有限公司 气体输送装置
CN109899327B (zh) * 2017-12-07 2021-09-21 昆山纬绩资通有限公司 气流产生装置
GB2582518B (en) * 2018-01-10 2022-12-21 Murata Manufacturing Co Pump and fluid control device
US11710678B2 (en) * 2018-08-10 2023-07-25 Frore Systems Inc. Combined architecture for cooling devices
US11351057B2 (en) * 2018-09-17 2022-06-07 Alcon Inc. Low friction trocar valve
JP7047937B2 (ja) * 2018-11-27 2022-04-05 株式会社村田製作所 ポンプ
GB2595078B (en) * 2019-03-27 2022-10-12 Murata Manufacturing Co Piezoelectric pump
GB2594826B (en) * 2019-03-27 2022-10-12 Murata Manufacturing Co Piezoelectric pump
US11802554B2 (en) 2019-10-30 2023-10-31 Frore Systems Inc. MEMS-based airflow system having a vibrating fan element arrangement
TWI747076B (zh) * 2019-11-08 2021-11-21 研能科技股份有限公司 行動裝置散熱組件
US11796262B2 (en) * 2019-12-06 2023-10-24 Frore Systems Inc. Top chamber cavities for center-pinned actuators
US11510341B2 (en) 2019-12-06 2022-11-22 Frore Systems Inc. Engineered actuators usable in MEMs active cooling devices
US11464140B2 (en) 2019-12-06 2022-10-04 Frore Systems Inc. Centrally anchored MEMS-based active cooling systems
US12033917B2 (en) 2019-12-17 2024-07-09 Frore Systems Inc. Airflow control in active cooling systems
JP7333417B2 (ja) 2019-12-17 2023-08-24 フロー・システムズ・インコーポレーテッド 閉じたデバイスおよび開いたデバイスのためのｍｅｍｓベース冷却システム
CN110966167B (zh) * 2019-12-25 2022-05-31 重庆大学 一种压电微泵
US11765863B2 (en) 2020-10-02 2023-09-19 Frore Systems Inc. Active heat sink
US11692776B2 (en) 2021-03-02 2023-07-04 Frore Systems Inc. Mounting and use of piezoelectric cooling systems in devices

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5175208A (ja) * 1974-12-25 1976-06-29 Hitachi Ltd Ofukushikiatsushukuki
JPS61116080A (ja) * 1984-11-11 1986-06-03 Kiyousan Denki Kk ダイヤフラム式燃料ポンプ
JP2001173569A (ja) * 1999-12-22 2001-06-26 Matsushita Electric Works Ltd 圧電ダイヤフラムポンプの密封方法
JP2001342963A (ja) * 2000-03-27 2001-12-14 Seiko Epson Corp ポンプ、ポンプ用逆止弁及びポンプ制御方法

Family Cites Families (12)

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DE3335427A1 (de) * 1982-10-09 1984-04-12 Mitsubishi Denki K.K., Tokyo Motor-vakuumpumpengruppe
JP2887677B2 (ja) * 1988-08-11 1999-04-26 株式会社日本計器製作所 圧電ポンプ
JPH10231783A (ja) * 1997-02-17 1998-09-02 Toyota Autom Loom Works Ltd 往復動型圧縮機
JPH10299656A (ja) * 1997-04-22 1998-11-10 Zexel Corp 往復式圧縮機
JP2001214818A (ja) * 2000-02-01 2001-08-10 Honda Motor Co Ltd ダイヤフラム式圧力制御弁
WO2001066947A1 (fr) 2000-03-06 2001-09-13 Hitachi, Ltd. Systeme de distribution de liquide et dispositif associe
JP2003035264A (ja) 2001-07-24 2003-02-07 Matsushita Electric Ind Co Ltd 小型ポンプ及びその駆動方法
CN1160514C (zh) * 2002-03-14 2004-08-04 胡军 超微型液压式电子泵
JP4678135B2 (ja) 2003-06-17 2011-04-27 セイコーエプソン株式会社 ポンプ
JP4215000B2 (ja) * 2005-01-19 2009-01-28 株式会社デンソー 高圧ポンプ
GB0508194D0 (en) * 2005-04-22 2005-06-01 The Technology Partnership Plc Pump
WO2008069264A1 (ja) * 2006-12-09 2008-06-12 Murata Manufacturing Co., Ltd. 圧電ポンプ

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5175208A (ja) * 1974-12-25 1976-06-29 Hitachi Ltd Ofukushikiatsushukuki
JPS61116080A (ja) * 1984-11-11 1986-06-03 Kiyousan Denki Kk ダイヤフラム式燃料ポンプ
JP2001173569A (ja) * 1999-12-22 2001-06-26 Matsushita Electric Works Ltd 圧電ダイヤフラムポンプの密封方法
JP2001342963A (ja) * 2000-03-27 2001-12-14 Seiko Epson Corp ポンプ、ポンプ用逆止弁及びポンプ制御方法

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2484906A4 (en) * 2009-10-01 2017-06-21 Murata Manufacturing Co., Ltd. Piezoelectric micro-blower
US10871156B2 (en) 2016-07-29 2020-12-22 Murata Manufacturing Co., Ltd. Valve and gas control device
JP2019100329A (ja) * 2017-12-08 2019-06-24 日本電産株式会社 ポンプ
WO2019230160A1 (ja) * 2018-05-31 2019-12-05 株式会社村田製作所 流体制御装置
JPWO2019230160A1 (ja) * 2018-05-31 2021-03-11 株式会社村田製作所 流体制御装置
US11795931B2 (en) 2018-05-31 2023-10-24 Murata Manufacturing Co., Ltd. Fluid control device

Also Published As

Publication number Publication date
US8308453B2 (en) 2012-11-13
CN101589233A (zh) 2009-11-25
JP5407333B2 (ja) 2014-02-05
US20100074775A1 (en) 2010-03-25
JPWO2008090725A1 (ja) 2010-05-13
CN101589233B (zh) 2012-02-08

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