WO2008089944A3 - Production method for semiconductor-based optical waveguide structures with special geometrical shapes - Google Patents

Production method for semiconductor-based optical waveguide structures with special geometrical shapes Download PDF

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Publication number
WO2008089944A3
WO2008089944A3 PCT/EP2008/000433 EP2008000433W WO2008089944A3 WO 2008089944 A3 WO2008089944 A3 WO 2008089944A3 EP 2008000433 W EP2008000433 W EP 2008000433W WO 2008089944 A3 WO2008089944 A3 WO 2008089944A3
Authority
WO
WIPO (PCT)
Prior art keywords
production method
etching
produced
semiconductor
methods
Prior art date
Application number
PCT/EP2008/000433
Other languages
German (de)
French (fr)
Other versions
WO2008089944A2 (en
Inventor
Wolfgang Freude
Christian Koos
Juergen Leuthold
Original Assignee
Univ Karlsruhe
Wolfgang Freude
Christian Koos
Juergen Leuthold
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Karlsruhe, Wolfgang Freude, Christian Koos, Juergen Leuthold filed Critical Univ Karlsruhe
Publication of WO2008089944A2 publication Critical patent/WO2008089944A2/en
Publication of WO2008089944A3 publication Critical patent/WO2008089944A3/en

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/136—Integrated optical circuits characterised by the manufacturing method by etching

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)

Abstract

The invention relates to a multi-step production method for waveguide structures. The waveguide structure is divided into sections, which are produced from a monocrystalline component layer using different etching methods (step 2, etching step between step 2 and step 3). At least one etching method is crystallographic anisotropic, i.e. wet-chemical. The method allows combining the high precision of crystallographic anisotropic etching methods with the geometrical variety exhibited by structures produced using other etching methods in regard to geometry. The edges of the waveguide structure are oriented in the crystal-oriented sections such that the subsequent side walls substantially agree with stable planes of the crystal lattice. Thus, the position of the side walls is exactly defined, and cross-sectional geometries that cannot be achieved with conventional, for example dry chemical, methods can be produced with high precision.
PCT/EP2008/000433 2007-01-22 2008-01-22 Production method for semiconductor-based optical waveguide structures with special geometrical shapes WO2008089944A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE200710004043 DE102007004043A1 (en) 2007-01-22 2007-01-22 Process for the production of semiconductor-based optical waveguide structures with special geometrical shapes
DE102007004043.3 2007-01-22

Publications (2)

Publication Number Publication Date
WO2008089944A2 WO2008089944A2 (en) 2008-07-31
WO2008089944A3 true WO2008089944A3 (en) 2008-09-12

Family

ID=39218035

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2008/000433 WO2008089944A2 (en) 2007-01-22 2008-01-22 Production method for semiconductor-based optical waveguide structures with special geometrical shapes

Country Status (2)

Country Link
DE (1) DE102007004043A1 (en)
WO (1) WO2008089944A2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9089319B2 (en) 2010-07-22 2015-07-28 Plasma Surgical Investments Limited Volumetrically oscillating plasma flows
EP3373052A1 (en) 2017-03-06 2018-09-12 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Semi-finished product, method for its preparation and the resulting component

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5539845A (en) * 1993-09-24 1996-07-23 Koninklijke Ptt Nederland N.V. Integrated optical polarization converter with enhanced periodic coupling and method of fabricating same
GB2407648A (en) * 2003-10-31 2005-05-04 Bookham Technology Plc Etching polarisation rotator in rib waveguide

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2781577B1 (en) * 1998-07-06 2000-09-08 Alsthom Cge Alcatel METHOD FOR MANUFACTURING AN INTEGRATED OPTICAL CIRCUIT
US6850683B2 (en) 2000-07-10 2005-02-01 Massachusetts Institute Of Technology Low-loss waveguide and method of making same
US6517734B1 (en) * 2000-07-13 2003-02-11 Network Photonics, Inc. Grating fabrication process using combined crystalline-dependent and crystalline-independent etching
US6907150B2 (en) * 2001-02-07 2005-06-14 Shipley Company, L.L.C. Etching process for micromachining crystalline materials and devices fabricated thereby
US7123805B2 (en) 2003-06-16 2006-10-17 Massachusetts Institute Of Technology Multiple oxidation smoothing method for reducing silicon waveguide roughness

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5539845A (en) * 1993-09-24 1996-07-23 Koninklijke Ptt Nederland N.V. Integrated optical polarization converter with enhanced periodic coupling and method of fabricating same
GB2407648A (en) * 2003-10-31 2005-05-04 Bookham Technology Plc Etching polarisation rotator in rib waveguide

Also Published As

Publication number Publication date
WO2008089944A2 (en) 2008-07-31
DE102007004043A1 (en) 2008-07-31

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