WO2008087048A3 - Test device for micro-mechanical components - Google Patents
Test device for micro-mechanical components Download PDFInfo
- Publication number
- WO2008087048A3 WO2008087048A3 PCT/EP2008/000521 EP2008000521W WO2008087048A3 WO 2008087048 A3 WO2008087048 A3 WO 2008087048A3 EP 2008000521 W EP2008000521 W EP 2008000521W WO 2008087048 A3 WO2008087048 A3 WO 2008087048A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- micro
- test device
- mechanical components
- displaceable part
- provoking
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C99/00—Subject matter not provided for in other groups of this subclass
- B81C99/0035—Testing
- B81C99/005—Test apparatus
Abstract
The invention relates to a test device for micro-mechanical components in which at least one micro-mechanical component having a displaceable part is arranged on a support, and which comprises a device for provoking the displaceable part to deviate or vibrate, in addition to a device for detecting deviation or vibrations. Said device for provoking a deviation or vibrations comprises means for generating an electrostatic field, optionally, having alternating strengths, on which the displaceable part of the micromechanical component is placed.
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102007002373 | 2007-01-16 | ||
DE102007002373.3 | 2007-01-16 | ||
DE102007016735A DE102007016735B4 (en) | 2007-01-16 | 2007-04-03 | Test device for micromechanical components |
DE102007016735.2 | 2007-04-03 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2008087048A2 WO2008087048A2 (en) | 2008-07-24 |
WO2008087048A3 true WO2008087048A3 (en) | 2008-09-04 |
Family
ID=39509988
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP2008/000521 WO2008087048A2 (en) | 2007-01-16 | 2008-01-16 | Test device for micro-mechanical components |
Country Status (2)
Country | Link |
---|---|
DE (1) | DE102007016735B4 (en) |
WO (1) | WO2008087048A2 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2946971B1 (en) * | 2009-06-18 | 2011-07-15 | Commissariat Energie Atomique | METHOD FOR EXCITATION OF A MOBILE ELEMENT OF A MICROSTRUCTURE |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6424165B1 (en) * | 2000-09-20 | 2002-07-23 | Sandia Corporation | Electrostatic apparatus for measurement of microfracture strength |
US6567715B1 (en) * | 2000-04-19 | 2003-05-20 | Sandia Corporation | Method and system for automated on-chip material and structural certification of MEMS devices |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2844181B2 (en) | 1996-02-08 | 1999-01-06 | セイコーインスツルメンツ株式会社 | Material testing device, material testing apparatus and material testing method |
US5990473A (en) * | 1998-02-04 | 1999-11-23 | Sandia Corporation | Apparatus and method for sensing motion in a microelectro-mechanical system |
DE19909777C2 (en) | 1999-03-05 | 2002-09-05 | Infineon Technologies Ag | Arrangement and method for testing micromechanically producible component structures |
US6708132B1 (en) * | 2000-06-02 | 2004-03-16 | Interscience, Inc. | Microsystems integrated testing and characterization system and method |
US6633426B2 (en) * | 2001-05-10 | 2003-10-14 | Analog Devices, Inc. | Optical-electrical MEMS devices and method |
DE10139443A1 (en) * | 2001-08-10 | 2003-03-06 | Eads Deutschland Gmbh | Method and device for trimming sensors with vibrating structures |
US6940285B2 (en) * | 2003-06-19 | 2005-09-06 | International Business Machines Corporation | Method and apparatus for testing a micro electromechanical device |
-
2007
- 2007-04-03 DE DE102007016735A patent/DE102007016735B4/en not_active Expired - Fee Related
-
2008
- 2008-01-16 WO PCT/EP2008/000521 patent/WO2008087048A2/en active Application Filing
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6567715B1 (en) * | 2000-04-19 | 2003-05-20 | Sandia Corporation | Method and system for automated on-chip material and structural certification of MEMS devices |
US6424165B1 (en) * | 2000-09-20 | 2002-07-23 | Sandia Corporation | Electrostatic apparatus for measurement of microfracture strength |
Also Published As
Publication number | Publication date |
---|---|
DE102007016735B4 (en) | 2010-06-17 |
WO2008087048A2 (en) | 2008-07-24 |
DE102007016735A1 (en) | 2008-07-17 |
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