WO2008070746A3 - System and method for shifting phase in a multi-wavelength interferometric imaging system - Google Patents

System and method for shifting phase in a multi-wavelength interferometric imaging system Download PDF

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Publication number
WO2008070746A3
WO2008070746A3 PCT/US2007/086556 US2007086556W WO2008070746A3 WO 2008070746 A3 WO2008070746 A3 WO 2008070746A3 US 2007086556 W US2007086556 W US 2007086556W WO 2008070746 A3 WO2008070746 A3 WO 2008070746A3
Authority
WO
WIPO (PCT)
Prior art keywords
phase
imaging system
interferometric imaging
shifting phase
wavelength interferometric
Prior art date
Application number
PCT/US2007/086556
Other languages
French (fr)
Other versions
WO2008070746A2 (en
Inventor
Alex Klooster
Original Assignee
Coherix Inc
Alex Klooster
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Coherix Inc, Alex Klooster filed Critical Coherix Inc
Publication of WO2008070746A2 publication Critical patent/WO2008070746A2/en
Publication of WO2008070746A3 publication Critical patent/WO2008070746A3/en

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/0201—Interferometers characterised by controlling or generating intrinsic radiation properties using temporal phase variation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02007—Two or more frequencies or sources used for interferometric measurement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02062—Active error reduction, i.e. varying with time
    • G01B9/02067—Active error reduction, i.e. varying with time by electronic control systems, i.e. using feedback acting on optics or light

Abstract

The optical subsystem of a first preferred embodiment may be used for a multi- wavelength interferometric imaging system outputting an object beam having a first phase and a reference beam having a second phase. The optical subsystem preferably includes an optical element; a sensor that measures movement of the optical element and relates the movement to a phase difference of the first phase of the object beam and the second phase of the reference beam; and a piezo that changes the position of the optical element to change the phase difference of the first phase of the object beam and the second phase of the reference beam.
PCT/US2007/086556 2006-12-05 2007-12-05 System and method for shifting phase in a multi-wavelength interferometric imaging system WO2008070746A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US86854706P 2006-12-05 2006-12-05
US60/868,547 2006-12-05

Publications (2)

Publication Number Publication Date
WO2008070746A2 WO2008070746A2 (en) 2008-06-12
WO2008070746A3 true WO2008070746A3 (en) 2008-10-30

Family

ID=39493059

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2007/086556 WO2008070746A2 (en) 2006-12-05 2007-12-05 System and method for shifting phase in a multi-wavelength interferometric imaging system

Country Status (1)

Country Link
WO (1) WO2008070746A2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102592284B (en) * 2012-02-27 2014-08-06 上海交通大学 Method for transforming part surface appearance three-dimensional high-density point cloud data into grayscale image

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5416616A (en) * 1990-04-06 1995-05-16 University Of Southern California Incoherent/coherent readout of double angularly multiplexed volume holographic optical elements
US7088488B2 (en) * 2004-07-13 2006-08-08 Imation Corp. Spatial light modulator device with diffusive element
US7095915B2 (en) * 2000-12-04 2006-08-22 Polatis Limited Beam steering arrangements and optical switches

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5416616A (en) * 1990-04-06 1995-05-16 University Of Southern California Incoherent/coherent readout of double angularly multiplexed volume holographic optical elements
US7095915B2 (en) * 2000-12-04 2006-08-22 Polatis Limited Beam steering arrangements and optical switches
US7088488B2 (en) * 2004-07-13 2006-08-08 Imation Corp. Spatial light modulator device with diffusive element

Also Published As

Publication number Publication date
WO2008070746A2 (en) 2008-06-12

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