WO2008066569A3 - Hermetic chamber with electrical feedthroughs - Google Patents

Hermetic chamber with electrical feedthroughs Download PDF

Info

Publication number
WO2008066569A3
WO2008066569A3 PCT/US2007/011612 US2007011612W WO2008066569A3 WO 2008066569 A3 WO2008066569 A3 WO 2008066569A3 US 2007011612 W US2007011612 W US 2007011612W WO 2008066569 A3 WO2008066569 A3 WO 2008066569A3
Authority
WO
WIPO (PCT)
Prior art keywords
pressure cavity
sensor
sensors
hermetically
sealed
Prior art date
Application number
PCT/US2007/011612
Other languages
French (fr)
Other versions
WO2008066569A2 (en
Inventor
David O'brien
Christophe Courcimault
Liang You
Original Assignee
Cardiomems Inc
David O'brien
Christophe Courcimault
Liang You
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cardiomems Inc, David O'brien, Christophe Courcimault, Liang You filed Critical Cardiomems Inc
Priority to DE602007013745T priority Critical patent/DE602007013745D1/en
Priority to AT07867119T priority patent/ATE504818T1/en
Priority to CA002652060A priority patent/CA2652060A1/en
Priority to EP07867119A priority patent/EP2021757B1/en
Priority to AU2007326005A priority patent/AU2007326005A1/en
Publication of WO2008066569A2 publication Critical patent/WO2008066569A2/en
Publication of WO2008066569A3 publication Critical patent/WO2008066569A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Measuring Fluid Pressure (AREA)
  • Prostheses (AREA)
  • Measurement Of The Respiration, Hearing Ability, Form, And Blood Characteristics Of Living Organisms (AREA)
  • Measuring And Recording Apparatus For Diagnosis (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Discharge Heating (AREA)

Abstract

A pressure cavity is durable, stable, and biocompatible and configured in such a way that it constitutes pico to nanoliter-scale volume. The pressure cavity is hermetically sealed from the exterior environment while maintaining the ability to communicate with other devices. Micromachined, hermetically-sealed sensors are configured to receive power and return information through direct electrical contact with external electronics. The pressure cavity and sensor components disposed therein are hermetically sealed from the ambient in order to reduce drift and instability within the sensor. The sensor is designed for harsh and biological environments, e.g. intracorporeal implantation and in vivo use. Additionally, novel manufacturing methods are employed to construct the sensors.
PCT/US2007/011612 2006-05-17 2007-05-15 Hermetic chamber with electrical feedthroughs WO2008066569A2 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
DE602007013745T DE602007013745D1 (en) 2006-05-17 2007-05-15 HERMETIC CHAMBER WITH ELECTRIC IMPLEMENTS
AT07867119T ATE504818T1 (en) 2006-05-17 2007-05-15 HERMETIC CHAMBER WITH ELECTRICAL FEEDTHROUGHS
CA002652060A CA2652060A1 (en) 2006-05-17 2007-05-15 Hermetic chamber with electrical feedthroughs
EP07867119A EP2021757B1 (en) 2006-05-17 2007-05-15 Hermetic chamber with electrical feedthroughs
AU2007326005A AU2007326005A1 (en) 2006-05-17 2007-05-15 Hermetic chamber with electrical feedthroughs

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US80113406P 2006-05-17 2006-05-17
US60/801,134 2006-05-17

Publications (2)

Publication Number Publication Date
WO2008066569A2 WO2008066569A2 (en) 2008-06-05
WO2008066569A3 true WO2008066569A3 (en) 2008-10-02

Family

ID=39468402

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2007/011612 WO2008066569A2 (en) 2006-05-17 2007-05-15 Hermetic chamber with electrical feedthroughs

Country Status (6)

Country Link
EP (1) EP2021757B1 (en)
AT (1) ATE504818T1 (en)
AU (1) AU2007326005A1 (en)
CA (1) CA2652060A1 (en)
DE (1) DE602007013745D1 (en)
WO (1) WO2008066569A2 (en)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2947629B1 (en) * 2009-07-06 2012-03-30 Tronic S Microsystems PRESSURE MEASURING DEVICE AND METHOD FOR MANUFACTURING THE SAME
US20150250386A1 (en) 2012-09-28 2015-09-10 Csem Centre Suisse D'electronique Et De Microtechnique Sa -Recherche Et Developpement Implantable devices
US9464950B2 (en) * 2013-11-15 2016-10-11 Rosemount Aerospace Inc. Capacitive pressure sensors for high temperature applications
SG11201706394QA (en) 2015-02-12 2017-09-28 Foundry Innovation & Res 1 Ltd Implantable devices and related methods for heart failure monitoring
US11039813B2 (en) 2015-08-03 2021-06-22 Foundry Innovation & Research 1, Ltd. Devices and methods for measurement of Vena Cava dimensions, pressure and oxygen saturation
US11206992B2 (en) 2016-08-11 2021-12-28 Foundry Innovation & Research 1, Ltd. Wireless resonant circuit and variable inductance vascular monitoring implants and anchoring structures therefore
US11701018B2 (en) 2016-08-11 2023-07-18 Foundry Innovation & Research 1, Ltd. Wireless resonant circuit and variable inductance vascular monitoring implants and anchoring structures therefore
EP3496606A1 (en) 2016-08-11 2019-06-19 Foundry Innovation & Research 1, Ltd. Systems and methods for patient fluid management
EP3463082B1 (en) 2016-11-29 2020-07-29 Foundry Innovation & Research 1, Ltd. Wireless resonant circuit and variable inductance vascular implants for monitoring patient vasculature system
US11779238B2 (en) 2017-05-31 2023-10-10 Foundry Innovation & Research 1, Ltd. Implantable sensors for vascular monitoring
US11944495B2 (en) 2017-05-31 2024-04-02 Foundry Innovation & Research 1, Ltd. Implantable ultrasonic vascular sensor

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4617606A (en) * 1985-01-31 1986-10-14 Motorola, Inc. Capacitive pressure transducer
US4773972A (en) * 1986-10-30 1988-09-27 Ford Motor Company Method of making silicon capacitive pressure sensor with glass layer between silicon wafers
US5740594A (en) * 1996-07-22 1998-04-21 Texas Instruments Incorporated Method for making a fluid pressure transducer
US5974894A (en) * 1997-07-14 1999-11-02 Panex Incorporated Fused silica high pressure sensor
DE10052053A1 (en) * 2000-10-19 2002-04-25 Endress Hauser Gmbh Co Pressure measurement cell has contact pin fed through base body to electrode for capacitance measurement; contact pin, jointing solder and membrane bed form smooth surface
US6812404B1 (en) * 2003-10-14 2004-11-02 Medtronic, Inc. Feedthrough device having electrochemical corrosion protection
WO2005019785A2 (en) * 2003-08-11 2005-03-03 Analog Devices, Inc. Capacitive sensor
WO2006086113A2 (en) * 2005-02-10 2006-08-17 Cardiomems, Inc. Hermetic chamber with electrical feedthroughs
WO2007047571A2 (en) * 2005-10-14 2007-04-26 Cardiomems, Inc. Integrated cmos-mems technology for wired implantable sensors
WO2007047794A2 (en) * 2005-10-19 2007-04-26 Cardiomems, Inc. Hermetic chamber with electrical feedthroughs

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4617606A (en) * 1985-01-31 1986-10-14 Motorola, Inc. Capacitive pressure transducer
US4773972A (en) * 1986-10-30 1988-09-27 Ford Motor Company Method of making silicon capacitive pressure sensor with glass layer between silicon wafers
US5740594A (en) * 1996-07-22 1998-04-21 Texas Instruments Incorporated Method for making a fluid pressure transducer
US5974894A (en) * 1997-07-14 1999-11-02 Panex Incorporated Fused silica high pressure sensor
DE10052053A1 (en) * 2000-10-19 2002-04-25 Endress Hauser Gmbh Co Pressure measurement cell has contact pin fed through base body to electrode for capacitance measurement; contact pin, jointing solder and membrane bed form smooth surface
WO2005019785A2 (en) * 2003-08-11 2005-03-03 Analog Devices, Inc. Capacitive sensor
US6812404B1 (en) * 2003-10-14 2004-11-02 Medtronic, Inc. Feedthrough device having electrochemical corrosion protection
WO2006086113A2 (en) * 2005-02-10 2006-08-17 Cardiomems, Inc. Hermetic chamber with electrical feedthroughs
WO2007047571A2 (en) * 2005-10-14 2007-04-26 Cardiomems, Inc. Integrated cmos-mems technology for wired implantable sensors
WO2007047794A2 (en) * 2005-10-19 2007-04-26 Cardiomems, Inc. Hermetic chamber with electrical feedthroughs

Also Published As

Publication number Publication date
WO2008066569A2 (en) 2008-06-05
AU2007326005A1 (en) 2008-06-05
CA2652060A1 (en) 2008-06-05
EP2021757B1 (en) 2011-04-06
ATE504818T1 (en) 2011-04-15
EP2021757A2 (en) 2009-02-11
DE602007013745D1 (en) 2011-05-19

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