WO2008059893A1 - Dispositif de soudage laser et procédé de soudage laser - Google Patents

Dispositif de soudage laser et procédé de soudage laser Download PDF

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Publication number
WO2008059893A1
WO2008059893A1 PCT/JP2007/072121 JP2007072121W WO2008059893A1 WO 2008059893 A1 WO2008059893 A1 WO 2008059893A1 JP 2007072121 W JP2007072121 W JP 2007072121W WO 2008059893 A1 WO2008059893 A1 WO 2008059893A1
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WO
WIPO (PCT)
Prior art keywords
work
welding
work area
laser
laser beam
Prior art date
Application number
PCT/JP2007/072121
Other languages
English (en)
Japanese (ja)
Inventor
Hiroyoshi Hirota
Yoshikazu Sakaguchi
Kazunari So
Original Assignee
Pioneer Corporation
Pioneer Fa Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pioneer Corporation, Pioneer Fa Corporation filed Critical Pioneer Corporation
Priority to JP2008544180A priority Critical patent/JP4914901B2/ja
Priority to CN2007800421615A priority patent/CN101563183B/zh
Publication of WO2008059893A1 publication Critical patent/WO2008059893A1/fr

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/0869—Devices involving movement of the laser head in at least one axial direction
    • B23K26/0876—Devices involving movement of the laser head in at least one axial direction in at least two axial directions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/12—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/12—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
    • B23K26/127—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure in an enclosure

Definitions

  • the present invention relates to a laser welding apparatus and a laser welding method for performing welding by irradiating a workpiece with a laser beam.
  • Patent Document 1 describes an apparatus for irradiating a workpiece with a laser beam from a scanner head to cut and remove a dam bar of an IC package.
  • Patent Document 1 Japanese Patent Laid-Open No. 10-216975
  • An object of the present invention is to provide a laser welding apparatus and a laser welding method capable of efficiently performing a welding operation.
  • a laser welding apparatus that performs welding so that the workpiece is sealed by irradiating the workpiece with a laser beam is placed on a tray.
  • a plurality of work areas, a plurality of work areas for performing work on the work, a laser beam emitting unit for emitting the laser beam, and the laser beam emission An irradiation position changing unit that receives a laser beam emitted from the irradiation unit and changes a position on the workpiece that is irradiated with the laser beam, and performs a welding operation on the workpiece in the work area; and Moving means for moving the irradiation position changing section to a place where the irradiation position changing section should be arranged in the plurality of work areas in order to perform the welding operation on the workpiece for each work area; Prepare.
  • the above laser welding apparatus is preferably used for performing welding so that the workpiece is sealed by irradiating the workpiece with a laser beam.
  • the laser welding apparatus accommodates a plurality of workpieces placed on a tray and has a plurality of work areas for performing work on the workpieces.
  • the irradiation position changing unit receives the laser beam emitted from the laser beam emitting unit, and changes the position on the workpiece that is irradiated with the laser beam, thereby performing welding work on the workpiece in the work area. Do.
  • the moving means moves the irradiation position changing unit to a place where the irradiation position changing unit should be arranged in the plurality of work areas in order to perform welding work on the workpiece for each of the plurality of work areas.
  • the laser beam emitting unit and the irradiation position changing unit can be moved by a single device. Therefore, according to the above laser welding apparatus, the welding operation can be performed efficiently.
  • the moving means includes a work area in which the welding work has been performed each time the welding work on the work in the work area by the irradiation position changing unit is completed. Can move the irradiation position changing unit to the place to be arranged in a different work area.
  • the plurality of work areas have a plurality of work areas in which evacuation is performed, and the irradiation position changing unit is configured to perform atmospheric pressure in the work area. While opening, replacing the tray, and evacuating, welding work is performed on a work in a work area that is different from the work area and evacuation is completed, and the welding work is completed. At this time, the moving means moves to the place to be arranged in the work area where the evacuation has been completed, and performs the welding work on the work in the work area.
  • the irradiation position changing unit is moved alternately between the two work areas. Therefore, the welding operation for the workpiece, the atmospheric pressure release, the tray replacement, and the vacuum drawing operation are repeated alternately in the two work areas. Therefore, according to the laser welding apparatus, it is possible to efficiently perform the welding work, and it is possible to improve the production amount of the entire apparatus.
  • the number of the workpieces placed on one tray is set so that the time required for pulling is approximately equal.
  • the time S at which the welding work is completed in one work area and the time at which the atmospheric pressure release, tray replacement, and evacuation work are finished in the other work area can be substantially matched. Therefore, since the welding work by the irradiation position changing unit can be continued in the two work areas almost without any gap, the operation efficiency of the entire apparatus can be further improved.
  • the plurality of work areas include a work area set to an inert gas atmosphere and a work area where vacuuming is performed.
  • the irradiation position changing unit may be welded to the work in the work area set to the inert gas atmosphere. Welding work is performed on parts other than the predetermined part above, and the work in the work area where the vacuuming is performed is welded by welding work in the work area set to the atmosphere of the inert gas. A welding operation can be performed with respect to the predetermined portion.
  • welding is performed on the workpiece in two stages using a plurality of work areas.
  • most of the welding is performed in the work area set to an inert gas atmosphere, and a small amount of welding is performed in the vacuumed work area. Therefore, it is possible to suppress the occurrence of welding debris resulting from the welding work in the vacuumed work area. As a result, it becomes possible to reduce the contamination of the transmission window in the work area due to welding residue.
  • the predetermined portion is a portion for extracting gas generated in the workpiece during the welding operation.
  • a vacuum is drawn in the vacuumed work area.
  • the force S is used to properly remove the gas generated in the workpiece during welding work from a specified location on the workpiece.
  • the time required for work in the work area set to the inert gas atmosphere and the release of atmospheric pressure and replacement of the tray in the work area where the evacuation is performed.
  • the number of the workpieces placed in one tray is set so that the time required for evacuation is substantially equal.
  • the laser beam emitting unit and the irradiation position changing unit are connected by an optical fiber, and the laser beam is transmitted by the optical fiber.
  • the tray is fixed in the work area when performing the welding work, and the moving means is arranged in two directions substantially perpendicular to each other.
  • the irradiation position changing unit is moved.
  • the tray is moved in one direction within the work area when performing the welding work, and the moving means moves the tray.
  • the irradiation position changing unit is moved in one direction different from the direction.
  • the irradiation position changing portion is moved greatly, and the tray is moved slightly during the welding operation.
  • the size of the work area can be reduced, and the configuration S can be simplified with the force S.
  • a plurality of works placed on a tray are accommodated, A plurality of work areas for performing work on the workpiece, a laser beam emitting unit for emitting a laser beam, a laser beam emitted from the laser beam emitting unit, and receiving the laser beam on the workpiece
  • the laser welding method for performing welding so that the workpiece is sealed is executed by an apparatus having an irradiation position changing section that performs a welding operation on the workpiece in the work area by changing the position of In order to perform the welding operation on the workpiece for each of a plurality of work areas, the movement for moving the irradiation position changing unit to a place where the irradiation position changing unit should be arranged in the plurality of work areas.
  • a process is provided. This also makes it possible to perform the welding work efficiently and to improve the production volume of the entire apparatus.
  • FIG. 1 is a diagram showing a schematic configuration of a laser welding apparatus according to a first embodiment of the present invention.
  • FIG. 3 is a diagram for specifically explaining a welding procedure according to the first embodiment.
  • FIG. 4 is a diagram showing a schematic configuration of a laser welding apparatus according to a second embodiment of the present invention.
  • FIG. 5 is a diagram for specifically explaining welding work on a workpiece in two work areas in the second embodiment.
  • FIG. 6 is a diagram showing a schematic configuration of a laser welding apparatus according to a third embodiment of the present invention. Explanation of symbols
  • FIG. 1 shows a schematic configuration diagram of a laser welding apparatus 101 according to the first embodiment.
  • FIG. 1 (a) shows a view of the laser welding apparatus 101 observed from above
  • FIG. 1 (b) shows a partial cross section of the laser welding apparatus 101 along the cutting line B 1 B2 in FIG. 1 (a).
  • the figure (sectional view of work areas 4a and 4b) is shown.
  • the work 30 is omitted for convenience of explanation.
  • the laser welding apparatus 101 mainly includes a laser welding machine 1, an optical fiber 2, a scanner head 3, and work areas 4a and 4b.
  • the laser welding apparatus 101 is an apparatus that welds a plurality of workpieces 30 placed on the trays 6a and 6b. In the following, when the trays 6a and 6b are not distinguished, they are simply described as “tray 6”.
  • FIG. 2 shows a schematic view of the tray 6 and the workpiece 30! /.
  • FIG. 2 (a) shows a view of the tray 6 on which the work 30 is placed observed with an upward force
  • FIG. 2 (b) shows a perspective view of the work 30.
  • FIG. 2 (a) a plurality of workpieces 30 are arranged on the tray 6.
  • the workpiece 30 has a plate-like lid 30a and a box-like package 30b, and an electronic component (not shown) is accommodated therein.
  • the laser beam of the above-mentioned laser welding apparatus 101 is irradiated onto the lid 30a, and the workpiece 30 is sealed by welding the lid 30a to the package 30b.
  • the laser welder 1 is a device that emits a laser beam.
  • the laser welding machine 1 is configured to oscillate a laser beam such as a YAG laser or a fiber laser.
  • An optical fiber 2 is connected to the laser welding machine 1, and the emitted laser beam passes through the optical fiber 2. That is, the power of the laser beam is transmitted by the optical fiber 2.
  • the other end of the optical fiber 2 is connected to the scanner head 3.
  • the laser beam emitted from the laser welding machine 1 is transmitted to the scanner head 3.
  • the laser welding machine 1 is used as a laser beam emitting part in the present invention. Function.
  • the scanner head 3 is configured separately from the laser welding machine 1. In other words, the scanner head 3 is configured to be disposed at a position away from the laser welding machine 1.
  • the scanner head 3 has a galvanometer mirror and the like inside.
  • the laser beam is transmitted to the scanner head 3 through the optical fiber 2.
  • the scanner head 3 makes the transmitted laser beam incident on the galvanometer mirror and changes the position where the laser beam is irradiated by rotating the galvanometer mirror.
  • the scanner head 3 changes the position on the workpiece 30 to which the laser beam is irradiated (that is, scans the laser beam on the workpiece 30).
  • the scanner head 3 is provided with a camera (not shown) for measuring an image of the work 30 on the tray 6 on the same axis of the laser beam.
  • the image obtained by this camera is mainly used for appropriately irradiating the workpiece 30 with a laser beam.
  • the scanner head 3 operates as the irradiation position changing unit in the present invention. Note that control of the galvano mirror, image processing of the image obtained by the camera, control of laser beam irradiation based on the image processed image, and the like are executed by a controller (such as a PC) not shown.
  • the scanner 8 is moved in the directions indicated by arrows Al and A2 in FIG. 1 by a moving mechanism (not shown) (corresponding to “moving means” in the present invention).
  • the scanner head 3 is moved in two directions Al and A2 that are substantially orthogonal to each other in a plane parallel to the plane on which the laser welding machine 1 and the tray 6 are placed.
  • the direction indicated by the arrow A1 is referred to as “X-axis direction”
  • the direction indicated by the arrow A2 is referred to as “Y-axis direction”.
  • FIG. 1 (b) the axial direction ⁇ ⁇ 2 is shown obliquely for convenience of explanation.
  • the laser welding apparatus 101 has two work areas 4a and 4b.
  • work area 4 is a room configured to be hermetically sealed where work for welding work 30 (hereinafter referred to as “welding work”) is performed, and tray 6 on which a plurality of works 30 are placed is provided. Be contained.
  • transmission windows 5a and 5b made of glass or the like are provided. The laser beam emitted from the scanner head 3 described above enters the work area 4 through the transmission windows 5a and 5b.
  • the workpiece 30 is welded by irradiating the workpiece 30 with the incident laser beam.
  • the welding work is performed for each of the work areas 4a and 4b.
  • a pump or the like (not shown) is connected to the work area 4, and the inside is set to a vacuum by sucking the internal gas (that is, “evacuating”) by the pump.
  • the work areas 4a and 4b function as a vacuum chamber.
  • the above-described welding operation is performed while the work area 4 is maintained in a vacuum state.
  • the welding operation for the work 30 is performed for each work area 4 by alternately moving the scanner head 3 above the two work areas 4a and 4b. More specifically, in work area 4, welding work on work 30 is alternately performed in work area 4 for opening the atmosphere in work area 4 and replacing tray 6 on which work 30 on which welding work has been placed and vacuuming work are placed. Repeat what you do. Specifically, atmospheric pressure is released in the other work area 4 while welding is being performed on the work 30 in one work area 4 (this work area 4 is already evacuated). Also, replace tray 6 and perform vacuuming. When such a welding operation is completed, the scanner head 3 is moved above the work area 4 where the previous vacuuming or the like was performed, and the work 30 in the work area 4 is welded. At the same time, in the work area 4 where the previous welding work was performed, the atmospheric pressure release, the replacement of the train 6 and the vacuuming work are performed. Thereafter, such work is repeatedly performed.
  • FIG. 3 is a diagram for specifically explaining the welding procedure according to the first embodiment.
  • Fig. 3 (a) is a diagram schematically showing a series of operations performed for each work area 4, and is a cross-sectional view of the laser welding apparatus 101 along the cutting line Bl-B2 in Fig. 1 (a). Sectional views of areas 4a and 4b) are shown.
  • FIG. 3 (b) is a diagram showing a welding operation for one workpiece 30.
  • FIG. 3 (b) shows a diagram in which the upward force of the workpiece 30 is also observed!
  • a work area 4a to be welded 4a Move Nahead 3 (in this example, move from work area 4b to work area 4a in the opposite direction). Specifically, the scanner head 3 is moved above the work area 4a to be welded (specifically, above the transmission window 5a). When the scanner head 3 is moved above the transmission window 5a (that is, when the scanner head 3 is moved to a position where the welding head is to be arranged for welding), the welding work for the work 30 in the work area 4a is performed. Start. Specifically, the scanner head 3 irradiates the workpiece 30 to be welded with the laser beam LB.
  • the scanner head 3 performs a welding operation based on the image of the work 30 taken by the internal camera. For this reason, the operation positioning accuracy of the scanner head 3 is not a problem. Note that the welding work on the work 30 and the work such as photographing and image processing of the work 30 by the camera are performed in parallel (that is, proceed simultaneously).
  • FIG. 3 (b) the hatched area C indicates the area to be welded, that is, the area to be irradiated with the laser beam LB during welding, and the solid line arrow indicates the direction in which welding proceeds.
  • the work 30 is welded by irradiating the laser beam LB near the outer periphery of the lid 30a.
  • the scanner head 3 performs welding by moving the irradiation position of the laser beam LB so that the irradiation position of the laser beam LB goes around the outer periphery of the lid 30a.
  • FIG. 3B shows an example in which only the lid 30a is irradiated with the laser beam LB, but welding may be performed by irradiating both the lid 30a and the package 30b with the laser beam LB. good.
  • welding is performed by moving the scanner head 3 in the X-axis direction A1 and the Y-axis direction A2 as appropriate.
  • This is the area that can be irradiated with the laser beam LB when the scanner head 3 is fixed (this area is defined by a galvanometer mirror, etc. This is because welding is performed on all the cakes 30 placed on the tray 6a.
  • the scanner head 3 is moved in at least one of the X-axis direction A1 and the Y-axis direction A2.
  • the scanner head 3 is designed so that a plurality of workpieces 30 that have not yet been welded are properly placed in the irradiable area of the scanner head 3. Move head 3.
  • the scanner head 3 performs the work to be performed next. Moved above area 4b.
  • the welding operation can be performed by moving only the scanner head 3 as described above, it is not necessary to separately provide a mechanism for moving the tray 6 during the welding operation. Therefore, the size of the work area 4 that functions as a vacuum chamber can be reduced, and the configuration can be simplified. Therefore, the cost of the work area 4 can be reduced. In addition, the work time for evacuation to the work area 4 can be shortened, resulting in faster operation time.
  • the work in the work area 4b will be described. As described above, while welding is performed on the workpiece 30 in the work area 4a, the following work is performed in the work area 4b.
  • the work area 4b is released to atmospheric pressure, and as shown by the arrow 81 in FIG. 3 (a), the tray 6b on which the work 30 that has already been welded is placed is discharged from the work area 4b. Welding work is still in progress! /, NA! /, And the tray 6 on which the work 30 is placed is carried into the work area 4b. That is, the tray 6 is replaced.
  • the work area 4b is evacuated as indicated by an arrow 83 in FIG. 3 (a). Specifically, the inside of the work area 4b is set to a vacuum by sucking the internal gas with a pump (not shown). Thereafter, in the work area 4b, a welding operation for the workpiece 30 is performed by the scanner head 3.
  • the scanner head 3 is alternately moved above the two work areas 4 to perform welding work on the workpiece 30, release of atmospheric pressure, replacement of the tray 6, and vacuum. Repeat the pulling operation alternately in the two work areas 4a and 4b. Therefore, according to the laser welding apparatus 101, it is possible to efficiently perform the welding operation, and it is possible to improve the production amount of the entire apparatus.
  • the time required for welding work for all the workpieces 30 in the work area 4 is approximately equal to the time required for releasing the atmospheric pressure, replacing the tray 6 and evacuating in the work area 4.
  • the welding work according to 3 can be continued in the two work areas 4 almost without any gaps, it is possible to further improve the operating efficiency of the entire apparatus.
  • the number of workpieces 30 to be placed on one tray 6 is at least the time required for welding work of one workpiece 30, the time required to release atmospheric pressure in work area 4, and the replacement work of tray 6. And the time required to evacuate the work area 4 can be obtained.
  • the welding work can be performed using three or more work areas.
  • the welding work is performed using the two work areas 4a and 4b.
  • the first embodiment described above is performed in that the welding operation for the work 30 is performed for each work area by alternately moving the scanner head 3 above the two work areas. It is the same.
  • the second embodiment instead of evacuating both work areas, only one work area is evacuated and the other work area is set to an inert gas atmosphere. Different from one embodiment.
  • different welding operations are performed in the two work areas. Specifically, in the work area set to an inert gas atmosphere, welding work is performed on a part other than the predetermined part on the part to be welded in the work 30 (that is, welding is performed leaving the predetermined part).
  • welding work is performed on the work 30 after the work is performed in the work area set to an inert gas atmosphere.
  • welding is performed on a predetermined portion that has not been welded in the work area set to an inert gas atmosphere. That is, in the second embodiment, welding work is performed on the work 30 over two stages using two work areas.
  • the above-mentioned predetermined portion is a portion (hereinafter referred to as “vacuum exhaust portion”) for extracting the gas generated in the workpiece 30 during welding work when evacuating.
  • FIG. 4 shows a schematic configuration diagram of a laser welding apparatus 102 according to the second embodiment.
  • Figure 4 shows the top
  • the force also shows a view of the laser welding apparatus 102 observed.
  • the laser welding apparatus 102 is different from the laser welding apparatus 101 according to the first embodiment described above in that it has work areas 14a and 14b instead of the work areas 4a and 4b. Note that the same components as those of the laser welding apparatus 101 are denoted by the same reference numerals and description thereof is omitted.
  • the work area 14a is set to a nitrogen atmosphere. That is, the work area 14a is set to an atmosphere of nitrogen gas, which is one of inert gases. The reason for setting the nitrogen atmosphere in this way is to prevent oxidation of the welded portion of the work 30 and to prevent deterioration of the electronic components in the work 30.
  • the inside of the work area 14b is set to a vacuum by evacuation. That is, only the work area 14b is used as a vacuum chamber.
  • the welding operation for the workpiece 30 is performed for each of the work areas 14a and 14b by alternately moving the scanner head 3 above the two work areas 14a and 14b. Specifically, in work area 14a, welding is performed on the work 30 at the place to be welded, leaving a predetermined location (evacuation part). On the other hand, in the work area 14b, the welding work is performed on the work 30 after the welding work in the work area 14a. Specifically, in the work area 14b, welding work is performed on the vacuum exhaust part that was not welded in the work area 14a. That is, in the second embodiment, the workpiece 30 is sealed by welding work in two stages in the work area 14a and the work area 14b.
  • the work area 14b is operated to release atmospheric pressure, replace the tray 6, and perform evacuation.
  • the tray 6 is replaced in the work area 14a.
  • FIG. 5 is a diagram for specifically explaining a welding operation for the workpiece 30 in the work areas 14a and 14b.
  • Fig. 5 (a) shows the welding work in work area 14a
  • Fig. 5 (b) shows the welding work in work area 14b.
  • FIGS. 5 (a) and 5 (b) are diagrams in which the workpiece 30 is also observed with an upward force.
  • the darkly hatched portions Dl and D4 indicate the portions to be welded in the work areas 14a and 14b, respectively.
  • the solid arrows indicate the direction in which the welding progresses!
  • Fig. 5 (a) in the work area 14a, welding work is performed on the knotted portion D1. I do. Specifically, the welding work is performed so as to make a round around the outer periphery of the lid 30a, leaving the portion D2 indicated by the broken line. A portion D2 indicated by a broken line corresponds to a vacuum exhaust portion for extracting gas generated in the workpiece 30 during welding work.
  • the welding work is performed on the work 30 that has been welded in the work area 14a. Specifically, as shown in FIG. 5 (b), the work 30 is welded in the work area 14a (the work 30 to which the portion D3 indicated by the oblique lines is welded).
  • the hatched portion D4 that was not welded in the work area 14a is welded.
  • welding to the vacuum exhaust part is performed.
  • the welding operation is performed on the workpiece 30 by alternately moving the scanner head 3 above the two operation areas 14a and 14b, the welding operation is efficiently performed. be able to.
  • most of the welding is performed in the work area 14a set in the nitrogen atmosphere, and a small amount of welding is performed in the vacuumed work area 14b. Therefore, it is possible to effectively suppress the generation of debris (hereinafter referred to as “weld debris”) from the work 30 due to welding work in the vacuumed work area 14b. Therefore, it is possible to reduce contamination of the transmission window 15b in the work area 14b due to welding residue.
  • the time required for the welding work in the work area 14a set to the atmosphere of the inert gas is equal to the time required for the work for the release of atmospheric pressure, replacement of the tray 6 and vacuuming in the work area 14b.
  • the tray 6 is moved in one direction within the work area, and the scanner head 3 is moved in the tray 6. It differs from the first and second embodiments described above in that it is moved in one direction substantially perpendicular to the direction.
  • FIG. 6 shows a schematic configuration diagram of a laser welding apparatus 103 according to the third embodiment.
  • FIG. 6 shows a view of the laser welding apparatus 103 as to the upward force. Note that the same components as those of the laser welding apparatus 101 are denoted by the same reference numerals, and description thereof is omitted.
  • the laser welding apparatus 103 includes a moving mechanism (not shown) that moves the scanner head 3 only in one direction (corresponding to the X-axis direction) indicated by an arrow E1. This moving mechanism moves the scanner head 3 when changing the work area 4 where the welding work is performed or when moving the irradiation possible area during the welding work.
  • the laser welding apparatus 103 moves the tray 6a in the work area 4a in the direction indicated by the arrow E2, and the tray 6b in the work area 4b in the direction indicated by the arrow E3.
  • a moving mechanism (not shown) for moving is provided.
  • the trays 6a and 6b move in the Y-axis direction within the work areas 4a and 4b, respectively.
  • These moving mechanisms mainly move the trays 6a and 6b to move the irradiable area of the scanner head 3 during the welding operation.
  • the scanner head 3 is largely moved, and the tray 6 is slightly moved during the welding operation. Therefore, according to the configuration according to the third embodiment, the size of the work area 4 that functions as a vacuum chamber is compared with the configuration in which the scanner head 3 is fixed and only the tray 6 is moved in the X-axis direction and the Y-axis direction. As well as reducing the size of the work area, the configuration can be simplified and the cost of the work area 4 can be reduced.
  • trays 6a and 6b are not limited to moving in the Y-axis direction as described above.
  • trays 6a and 6b can be rotated about an axis that passes through the center of gravity of trays 6a and 6b. . This also makes it possible to reduce the size of the work area 4 functioning as a vacuum chamber and simplify the configuration.
  • the force shown in the embodiment for evacuating both of the two work areas 4 is not limited to this.
  • only one work area may be evacuated and the other work area may be set to an inert gas atmosphere. That is, the configuration according to the second embodiment described above may be combined with the configuration according to the third embodiment.
  • the welding work is not limited to using the two work areas 6a and 6b, and the welding work may be performed using three or more work areas.
  • the laser welding apparatus accommodates a plurality of works placed on a tray, a plurality of work areas for performing work on a workpiece, and a laser.
  • a laser welding machine that emits a beam
  • a scanner that receives the laser beam emitted from the laser welding machine and changes the position on the workpiece to which the laser beam is irradiated to perform welding work on the workpiece in the work area
  • a head and a moving mechanism for moving the scanner head to a position where the scanner head is to be placed in the plurality of work areas in order to perform welding work on the workpiece for each of the plurality of work areas.
  • the present invention can be used for an IJ in an apparatus for sealing a package such as an optical device element or a crystal resonator.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)

Abstract

L'invention concerne un dispositif de soudage laser capable de souder de façon efficace. Le dispositif de soudage laser scelle une pièce à travailler par l'application d'un faisceau laser à celle-ci. Le dispositif de soudage laser possède des zones de travail pour réaliser un travail sur les pièces à travailler. Une section de changement de position d'application reçoit un faisceau laser provenant d'une section d'émission de faisceau laser afin de changer la position sur une pièce à travailler à laquelle le faisceau laser est appliqué et réalise le soudage des pièces à travailler dans les zones de travail. En outre, afin que le soudage soit réalisé pour les pièces à travailler sur une base zone de travail par zone de travail, des moyens de déplacement déplacent la section de changement de position d'application jusqu'à la position dans chaque zone de travail où la section de changement de position d'application doit être placée. Autrement dit, la section d'émission de faisceau laser et la section de changement de position d'application sont déplacées pour un travail par un seul dispositif. A l'aide de cela, un soudage est efficacement réalisé afin d'augmenter la quantité de production par le dispositif entier.
PCT/JP2007/072121 2006-11-15 2007-11-14 Dispositif de soudage laser et procédé de soudage laser WO2008059893A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2008544180A JP4914901B2 (ja) 2006-11-15 2007-11-14 レーザ溶接装置、及びレーザ溶接方法
CN2007800421615A CN101563183B (zh) 2006-11-15 2007-11-14 激光焊接装置及激光焊接方法

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