WO2007126716A3 - Multi-zone capacitive force sensing device and method - Google Patents

Multi-zone capacitive force sensing device and method Download PDF

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Publication number
WO2007126716A3
WO2007126716A3 PCT/US2007/007321 US2007007321W WO2007126716A3 WO 2007126716 A3 WO2007126716 A3 WO 2007126716A3 US 2007007321 W US2007007321 W US 2007007321W WO 2007126716 A3 WO2007126716 A3 WO 2007126716A3
Authority
WO
WIPO (PCT)
Prior art keywords
capacitors
conductive
plate
force sensing
capacitive force
Prior art date
Application number
PCT/US2007/007321
Other languages
French (fr)
Other versions
WO2007126716A2 (en
Inventor
Divyasimha Harish
William Dallenback
King Wong
John Schultz
Original Assignee
Loadstar Sensors Inc
Divyasimha Harish
William Dallenback
King Wong
John Schultz
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to US11/397,507 priority Critical patent/US7343814B2/en
Priority to US11/397,507 priority
Application filed by Loadstar Sensors Inc, Divyasimha Harish, William Dallenback, King Wong, John Schultz filed Critical Loadstar Sensors Inc
Publication of WO2007126716A2 publication Critical patent/WO2007126716A2/en
Publication of WO2007126716A3 publication Critical patent/WO2007126716A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01G—WEIGHING
    • G01G7/00—Weighing apparatus wherein the balancing is effected by magnetic, electromagnetic, or electrostatic action, or by means not provided for in the preceding groups
    • G01G7/06—Weighing apparatus wherein the balancing is effected by magnetic, electromagnetic, or electrostatic action, or by means not provided for in the preceding groups by electrostatic action
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/04—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring tension in flexible members, e.g. ropes, cables, wires, threads, belts or bands
    • G01L5/10—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring tension in flexible members, e.g. ropes, cables, wires, threads, belts or bands using electrical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic means
    • G01B7/16—Measuring arrangements characterised by the use of electric or magnetic means for measuring the deformation in a solid, e.g. by resistance strain gauge
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01G—WEIGHING
    • G01G23/00—Auxiliary devices for weighing apparatus
    • G01G23/18—Indicating devices, e.g. for remote indication; Recording devices; Scales, e.g. graduated
    • G01G23/36—Indicating the weight by electrical means, e.g. using photoelectric cells
    • G01G23/37—Indicating the weight by electrical means, e.g. using photoelectric cells involving digital counting
    • G01G23/3728—Indicating the weight by electrical means, e.g. using photoelectric cells involving digital counting with wireless means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01G—WEIGHING
    • G01G23/00—Auxiliary devices for weighing apparatus
    • G01G23/18—Indicating devices, e.g. for remote indication; Recording devices; Scales, e.g. graduated
    • G01G23/36—Indicating the weight by electrical means, e.g. using photoelectric cells
    • G01G23/37—Indicating the weight by electrical means, e.g. using photoelectric cells involving digital counting
    • G01G23/3728—Indicating the weight by electrical means, e.g. using photoelectric cells involving digital counting with wireless means
    • G01G23/3735—Indicating the weight by electrical means, e.g. using photoelectric cells involving digital counting with wireless means using a digital network
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
    • G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
    • G01L1/146—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors for measuring force distributions, e.g. using force arrays
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/0061—Force sensors associated with industrial machines or actuators
    • G01L5/0076—Force sensors associated with manufacturing machines

Abstract

A multi-zone capacitive force sensing apparatus/method is disclosed. In one embodiment, an apparatus includes one or more capacitors each having an upper conductive surface and a lower conductive surface substantially parallel to the upper conductive surface, a housing with a top plate and a bottom plate to encompass the capacitors, and a sensor in the housing to generate a measurement based on a change in a distance between the upper conductive surface and the lower conductive surface of each of the capacitors when a contact zone of the top plate associated with the each of the plurality of capacitors is deflected by a force applied on the contact zone. The apparatus may also include a comparison module associated with the sensor to generate a signal indicating unevenness of a force applied on the top plate when there is any significant difference between measurements of the capacitors.
PCT/US2007/007321 2006-04-03 2007-03-23 Multi-zone capacitive force sensing device and method WO2007126716A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US11/397,507 US7343814B2 (en) 2006-04-03 2006-04-03 Multi-zone capacitive force sensing device and methods
US11/397,507 2006-04-03

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
CA002648524A CA2648524A1 (en) 2006-04-03 2007-03-23 Multi-zone capacitive force sensing device and method
CN2007800117174A CN101416021B (en) 2006-04-03 2007-03-23 Multi-zone capacitive force sensing device and method
EP07753909A EP2002199A4 (en) 2006-04-03 2007-03-23 Multi-zone capacitive force sensing device and method
JP2009504201A JP2009532699A (en) 2006-04-03 2007-03-23 Multi-region capacitive force detection apparatus and method

Publications (2)

Publication Number Publication Date
WO2007126716A2 WO2007126716A2 (en) 2007-11-08
WO2007126716A3 true WO2007126716A3 (en) 2008-06-05

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2007/007321 WO2007126716A2 (en) 2006-04-03 2007-03-23 Multi-zone capacitive force sensing device and method

Country Status (7)

Country Link
US (1) US7343814B2 (en)
EP (1) EP2002199A4 (en)
JP (1) JP2009532699A (en)
KR (1) KR20090019779A (en)
CN (1) CN101416021B (en)
CA (1) CA2648524A1 (en)
WO (1) WO2007126716A2 (en)

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US7743667B2 (en) * 2007-02-12 2010-06-29 Loadstar Sensors, Inc. Capacitive device and method with an enhanced measurement error correction capability
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US20090158856A1 (en) * 2007-12-23 2009-06-25 Divyasimha Harish Capacitive strain gauge system and method
US9222845B2 (en) 2009-08-21 2015-12-29 Regents Of The University Of Minnesota Flexible sensors and related systems for determining forces applied to an object, such as a surgical instrument, and methods for manufacturing same
CN101957168A (en) * 2010-09-26 2011-01-26 苏州瀚瑞微电子有限公司 Method for detecting deformation quantity of object through capacitance
US20140054096A1 (en) * 2010-10-12 2014-02-27 David Carruthers Apparatus capable of measuring load and load movement
JP5149416B2 (en) * 2011-04-06 2013-02-20 ファナック株式会社 Robot system having robot abnormality detection function and control method thereof
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CN102967394A (en) * 2012-09-15 2013-03-13 华东光电集成器件研究所 Symmetrical capacitor pressure sensor and manufacture method thereof
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Also Published As

Publication number Publication date
WO2007126716A2 (en) 2007-11-08
CN101416021A (en) 2009-04-22
US7343814B2 (en) 2008-03-18
CA2648524A1 (en) 2007-11-08
EP2002199A4 (en) 2010-09-08
US20070227257A1 (en) 2007-10-04
EP2002199A2 (en) 2008-12-17
CN101416021B (en) 2011-06-15
JP2009532699A (en) 2009-09-10
KR20090019779A (en) 2009-02-25

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