WO2007107106A1 - Multipole linerar ion trap system and method of manufacturing the same with electrodes all-in-one - Google Patents

Multipole linerar ion trap system and method of manufacturing the same with electrodes all-in-one Download PDF

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Publication number
WO2007107106A1
WO2007107106A1 PCT/CN2007/000887 CN2007000887W WO2007107106A1 WO 2007107106 A1 WO2007107106 A1 WO 2007107106A1 CN 2007000887 W CN2007000887 W CN 2007000887W WO 2007107106 A1 WO2007107106 A1 WO 2007107106A1
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Prior art keywords
electrode
electrodes
pair
ion trap
trap system
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PCT/CN2007/000887
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French (fr)
Chinese (zh)
Inventor
Xiang Fang
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Xiang Fang
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/26Mass spectrometers or separator tubes
    • H01J49/34Dynamic spectrometers
    • H01J49/42Stability-of-path spectrometers, e.g. monopole, quadrupole, multipole, farvitrons
    • H01J49/4205Device types
    • H01J49/422Two-dimensional RF ion traps
    • H01J49/423Two-dimensional RF ion traps with radial ejection

Definitions

  • the invention relates to the technical field of mass spectrometry, in particular to a multi-stage linear ion trap system, the system and a processing method of the integrated electrode. Background technique
  • the quadrupole ion trap is a special device that can be used as an ion storage device to confine gaseous ions to the quadrupole field in the ion trap for a certain period of time, and as a mass analyzer for the shield instrument. Mass spectrometry is performed with a considerable mass range and variable mass resolution.
  • the quadrupole electrostatic field in the ion trap is generated by connecting an RF voltage, a DC voltage, or a combination of the two on each pole of the ion trap device.
  • a conventional ion trap consists of two partial electrodes, a ring electrode and an end cap electrode. In order to produce a remarkable quadrupole field, a typical electrode shape is a hyperbolic type.
  • the early ion trap is a three-dimensional ion trap whose quadrupole field is generated in the direction of r and z (in the polar coordinate system).
  • the ions are subjected to a linear force in the quadrupole field, so that a certain mass-to-charge ratio m/z range can be obtained.
  • the ions inside are captured and stored in the ion trap.
  • the most typical three-dimensional ion trap consists of three hyperbolic electrodes, a ring electrode and two end cap electrodes. Such devices are commonly referred to as Paul-type ion traps or quadrupole ion traps.
  • the cylindrical ion trap is a simpler three-dimensional ion trap consisting of a ring electrode with a cylindrical inner surface and two end plate electrodes with a flat structure.
  • the biggest drawback of the Paul-type ion trap and the cylindrical ion trap is that the number of ions trapped in the well is small, and the capture efficiency is low for incident ions ionized outside the well.
  • the linear ion trap consists of a plurality of poles that are extended and placed in parallel. This pole will determine the volume of the ion trap. By connecting the RF voltage and the DC voltage to the pole, it is perpendicular to the center of the ion trap. A two-dimensional quadrupole field is created on the plane of the axis. Since the intense focusing of the ions is achieved only in two dimensions, the trapped ions can be distributed near the central axis, greatly increasing the number of ion traps.
  • 5,420,425 describes a two-dimensional linear ion trap consisting of three sets of quadrupoles, with a set of quadrupoles in the middle as the main quadrupole, wherein a pair of main poles are designed with slits through which ions can pass.
  • the slit realizes injection and exit; the two sets of quadrupoles at both ends are both real
  • the axial trapping trap captures the movement of ions and improves the quadrupole field of the main quadrupole.
  • each pole is a hyperbolic pole, a nearly ideal quadrupole field is obtained.
  • MS n experiment can be performed using a single ion trap, with the development of ionization methods such as electrospray ionization (ESI) and matrix-assisted laser desorption ionization (MALDI), mass spectrometry has been extensively applied to the analysis of complex samples of macromolecules. This has placed new demands on ion trap mass analyzers, and the technology of combining ion traps using multiple ion traps has emerged.
  • ESI electrospray ionization
  • MALDI matrix-assisted laser desorption ionization
  • 6,481,109 B2 proposes a multi-stage mass spectrometer in which a plurality of ion traps are arranged in series in a spatially connected manner, i.e., end to end, forming a multi-stage ion trap space, separated by end electrodes. The ions are sequentially circulated between the stages to achieve the functions of storage, separation, dissociation or analysis.
  • U.S. Patent No. 6,838,666 B2 proposes a rectangular linear ion trap (RIT) surrounded by four rectangular plate electrodes, and proposes a RIT combined ion trap composed of three or more RITs, each of which contains four plate electrodes.
  • the combined ion trap provides a new powerful mass spectrometry tool for the study of complex samples, especially in the fields of ion chemistry, biomacromolecules and pharmaceuticals, using MS n to achieve molecular structure.
  • the existing combined ion trap structure is relatively complicated, especially the terminal electrode is designed at both ends of each well unit, and the transmission and transfer of ions between the well units are realized by controlling the DC voltage on the terminal electrode. There is only a DC signal on the electrode, and there will be a severe fringing field effect between the ion trap and the terminal electrode, resulting in a significant decrease in ion transport efficiency.
  • Ion ions often undergo significant ion loss as they pass through the terminal electrode region, with series series The increase will make the corresponding analysis process unable to carry out the corresponding analysis process due to the excessive ion loss.
  • One of the technical problems to be solved by the present invention is to provide a multi-stage linear ion trap system which is relatively simple in structure and can be used for various analysis purposes.
  • the second technical problem to be solved by the present invention is to provide a processing method for an integrated electrode which is easy to realize high precision and high precision processing and assembly.
  • the third technical problem to be solved by the present invention is to provide a processing method for a multi-stage linear ion trap system which is easy to realize high precision and high precision processing and assembly.
  • the present invention proposes a linear ion trap system, the system comprising:
  • Two or more electrode sets each of which includes an electrode pair and a y electrode pair to define an ion trapping region; the electrode sets are arranged along the central axis z-axis of the ion trap system; At least one of the electrodes of the set is provided with a slit that can be used to radially introduce the sample or ions into the ion trap system, or for the sample or ions to exit the ion trap system radially; and on each electrode set A combined signal of a radio frequency signal and a direct current signal is connected; The terminal electrodes are connected to a direct current signal, and the terminal electrodes are disposed to have only one pair and are respectively disposed at the two outermost ends of the electrode groups along the Z axis of the central axis of the ion trap system.
  • the X electrode pair and the y electrode pair in the present invention are parallel to the central axis z axis, and the electrodes are alternately spaced by 90 degrees in an xyxy manner to define an ion trapping region;
  • the RF power source is connected to the X and/or y electrode pair, thereby An RF ion trapping electric field is generated in the xy plane;
  • the pair of terminal electrodes at both ends are connected to a DC direct current source to provide a DC trapping potential well between the two terminal electrodes in the z-axis direction.
  • each sub-RF electrode can be provided to provide corresponding analysis functions, such as selective storage, separation, ion reaction or analysis, and at the same time, Item function.
  • the terminal electrode of the multi-purpose large-capacity multi-stage linear ion trap system may be a plate electrode placed along the xy plane, a multipole rod parallel to the z-axis, or a combination of a plate and a multipole.
  • the terminal electrode is a flat electrode
  • a small hole or a slit may be formed in one of the flat end electrodes, or a small hole or a slit may be formed in both of the flat end electrodes, and the small hole or slit is opened. It can be used for the introduction of samples or ions, and it can also be used for samples or ions to leave the ion trap.
  • slits of each electrode group there are various opening schemes for the slits of each electrode group, and slits may be formed on the X electrode pairs of each sub-RF electrode group, or slits may be formed on the y-electrode pairs of each sub-RF electrode group. Under the premise of ensuring at least one slit for each sub-RF electrode group, a combined slit is used between each sub-electrode group, either at the X electrode or at the y electrode, to achieve any combination as needed.
  • slits of two or more electrode sets may be placed on electrodes located in the same circumferential position. Further, the slits of the two or more electrode groups may be arranged in a line so as to integrally process the two or more slits.
  • the slits on each electrode group and the small holes or slits on the terminal electrodes can be used as inlets or outlets for samples or ions. By combining, it is possible to achieve along x, y. Or multi-inlet or multi-outlet analysis mode in the Z direction.
  • the versatile large-capacity multi-stage linear ionization 'sub-trap system of the present invention can use an ionization method of an external ion source, an ionization method using an internal ion source, or an ionization method combining an internal and external ion source.
  • the multiple inlet mode of the ion trap allows for connection to two or more ion sources.
  • the ion transport system of the ion source can introduce ions into the well through small holes/slits on the terminal electrodes, or ions can be introduced into the well through slits in the electrode set.
  • multiple detectors can be used for ion detection.
  • the present invention provides an integrated electrode processing method, the basic steps of the method comprising: firstly using a non-metallic material as a substrate, processing into an electrode substrate having a desired electrode shape, and then A metal conductor film is coated on the surface of the non-metal electrode substrate, and finally the metal film is ground or removed at a portion where insulation is required, thereby forming two or more sub-electrodes insulated from each other.
  • the integrated electrode processing method is especially suitable for the case where the electrode needs to be divided into a plurality of parts.
  • the RF electrode of the multi-purpose large-capacity linear ion trap proposed in the present application can be processed by this method. Therefore, in order to solve the aforementioned third technical problem, the present invention provides a processing method of a multi-stage linear ion trap system, the method comprising the following steps:
  • a pair of terminal electrodes are provided on both sides of the outermost ends of the pair of X electrodes and the pair of y electrodes.
  • the present invention also provides a method of processing a multi-stage linear ion trap system, the method comprising the steps of:
  • the pair of X electrodes and the sub-electrodes on both sides of the outermost end of the pair of y electrodes are provided as a pair of terminal electrodes.
  • the invention also provides a processing method of a multi-stage linear ion trap system, the method comprising the following Steps:
  • a pair of terminal electrodes are formed.
  • the non-metal material may be a ceramic material
  • the metal film may be a conductor material containing gold as a main component
  • the electrode of each part is usually directly processed by a metal material, and then the parts are assembled by using an insulating material, which requires precise assembly technology, and this technology has become the current ion trap.
  • the processing method using the integrated electrode and the processing method of the multi-stage linear ion trap system using the integrated electrode processing method can ensure the uniformity of the respective portions (sub-electrodes) on the same body electrode, thereby reducing the assembly technique Difficulty.
  • the multi-purpose large-capacity multi-stage linear ion trap system proposed in the present application can realize the ion trap analysis function by providing two or more electrode groups defining ion trapping regions in an ion trap having only one pair of terminal electrodes.
  • the extension according to the needs of the analysis, set up the analytical method to carry out the required analytical experiments.
  • the ion trap has wide adaptability. When only the ion trapping region defined by one of the electrode groups is used as the analysis region, or the same signal is connected to all the electrode groups, it is equivalent to the existing single ion trap shield.
  • a volume analyzer when multiple ion capture regions defined by multiple electrode sets work together, by defining the function of each ion capture region, such as selective storage, separation, ion reaction or analysis regions, or a combination thereof,
  • a variety of working modes are provided, including existing spatial sequential flow MS n analysis experiments, spatial series and time series combination MS n array analysis experiments.
  • the combined working mode not only implements the existing MS n analysis technology, but also provides a powerful tool for exploring MS n analysis methods to help scientists conduct material structure research.
  • the present application proposes The structure of the multi-purpose large-capacity multi-stage linear ion trap system is more simplified, and only the structural aspect is compared. It seems that the terminal electrodes are omitted and the plurality of electrode groups are directly connected in series. However, such an omission can be an ion trap. Control, commissioning and manufacturing bring great change. Connected to each electrode group
  • the combined signal of RF+DC has significant advantages in the control of ion motion.
  • the function of the terminal electrode as in the prior art can be realized by adjusting the DC component, and the electric field force focused on the central axis can be applied to the ion assist during the ion transport process by adjusting the RF component. , so that the ions are controlled both in the axial direction and in the radial direction during the transfer process.
  • only the DC signal is present on the terminal electrode, and there is a severe fringing field effect between the ion trap and the terminal electrode, resulting in a significant decrease in ion transport efficiency. As the number of series stages increases, ion loss will occur.
  • the ion transmission path can be shortened, the influence of the fringe field effect can be reduced, the ion can be controlled in three dimensions, and the ion transmission efficiency can be effectively improved, thereby improving the sensitivity of the instrument for performing multi-level ion analysis, which is carried out Combined process analysis is critical.
  • the DC or AC signal on the terminal electrode between adjacent electrode groups can be omitted, and when there are only two electrode groups, the signal of one terminal electrode can be omitted, and the superiority does not seem to be sufficient.
  • the multi-purpose large-capacity multi-stage linear ion trap system proposed in the present application can combine the functions of the existing single ion trap and the combined ion trap, has wide applicability, and can effectively improve ion transport efficiency. Improve the sensitivity of multi-level ion analysis, providing a powerful research tool for the development of biological, pharmaceutical, and ion chemistry.
  • the ion trap with combined function proposed by the present invention is not based on a design scheme of multiple ion traps in series. As a whole, it is only a linear ion trap itself, and the ion is realized by designing a plurality of ion trap capture regions. The combined analysis function of the well.
  • the solution makes the multi-stage linear ion trap structure relatively simple, reduces the work complexity of the quality control and debugging of the instrument, and extends the integrated electrode processing method proposed by the invention, thereby reducing the assembly difficulty of the ion trap.
  • the multi-stage linear ion trap system provides a practical and versatile solution for the development of ion trap mass analyzers and mass spectrometers, which is adaptable, versatile, easy to process and assemble, and relatively inexpensive. Development of analytical techniques in the fields of pharmaceuticals, ion chemistry, etc. DRAWINGS
  • Figure 1 Schematic diagram of a multi-stage linear ion trap system with two electrode sets
  • Figure 2 Schematic diagram of a multi-stage linear ion trap system with three electrode sets
  • Figure 3a - Figure 3d Schematic cross-section of a typical electrode
  • Figure 4 Schematic diagram of a multi-stage linear ion trap system with a quadrupole of f as the terminal electrode;
  • Figure 5 Schematic diagram of a multi-stage linear ion trap system with plate electrodes and quadrupole as the terminal electrode;
  • Figure 6 Schematic diagram of the dual ion source dual detector ion trap mass analysis system;
  • Figure 7 Schematic diagram of a multi-ion source multi-detector ion trap mass analysis system
  • Figure 8 Schematic diagram of a multi-stage linear ion trap system with integrated processing
  • Figure 9 A schematic cross-sectional view of an integrated electrode shown in Figure 8. detailed description
  • the present invention provides a multi-purpose large-capacity multi-stage linear ion trap system, the system comprising:
  • each electrode group 10 includes an X electrode pair and a y electrode pair to define an ion trapping region; the electrode groups 10 are arranged along the central axis z-axis of the ion trap system; Providing a slit on at least one electrode of each electrode group 10, the slit being used to introduce a sample or ions into the ion trap system in a radial direction, or to radially or away from the ion trap system; And a combined signal of a radio frequency signal and a direct current signal is connected to each of the electrode groups 10; the terminal electrodes 5, 6 are connected with a direct current signal, and the end electrodes 5, 6 are arranged to have only one pair and are respectively set At the two outermost ends of the electrode groups 10 along the z-axis of the central axis of the ion trap system.
  • Figure 1 shows a specific example of a multi-purpose high-capacity multi-stage linear ion trap system with two electrode sets.
  • the DC, AC and RF voltages are connected to the electrode set 10 and the terminal electrodes 5, 6 respectively for capture. And analyzing ions.
  • the X electrodes 1, 2 and y electrodes 3, 4 are placed parallel to the z-axis, and are placed at intervals of 90 degrees in the xy plane in the 1-3-2-4 clockwise direction, and the electrode group 10 is arranged in two along the z-square, each
  • the X electrode pair 1, 2 and y electrodes 3, 4 of the electrode group 10 define an ion trapping region, and the two electrode groups 10 correspond to the ion trapping region I and the ion trapping region II, respectively.
  • Slits 7 and 8 are formed on the X electrode pairs of the two electrode sets.
  • the slits 7, 8 can be used to introduce the sample or ions into the ion trap in the radial direction, or to separate the sample or ions from the ion trap in the radial direction.
  • the RF RF voltage is connected to the y electrode pair 3, 4, respectively, and can also be connected to the X and y electrode pairs 1, 2, and the RF ion trapping electric field in the xy plane is generated in the ion trapping region corresponding to the electrode group.
  • DC DC signals are also connected to both electrode sets.
  • the terminal electrodes 5, 6 are respectively located at the two outer ends of the two ion trapping regions defined by the two electrode groups 10; the terminal electrodes 5, 6 are connected to the DC voltage of the DC. Adjusting the DC DC voltage values on the terminal electrodes 5, 6 and the electrode group, the DC trapping electric field in the z-axis direction of the region between the two terminal electrodes 5, 6 can be obtained, and the DC potentials of the two electrode groups can be the same, or Different, thereby generating a differential capture sub-region, it is possible to simultaneously capture ions of different polarities or ions from two samples simultaneously in the two ion capture regions.
  • the AC voltage is connected to the X electrode pair 1, 2 or y electrode 3, 4 pair, as an AC resonance excitation signal between the pair of x electrode pairs 1, 2 or y electrodes 3, 4, thereby implementing the well in the X direction or the y direction Internally excited ions.
  • the electrical parameters (such as RF/DC/AC parameters) of each electrode can be provided to provide corresponding analysis functions, such as selective storage, separation, ion reaction or analysis area, or an ion capture area.
  • the basic working process of mass analysis using a single capture region of a multi-purpose large-capacity multi-stage linear ion trap system is that the sample gas to be analyzed is ionized in the well to generate ions to be analyzed, or samples to be analyzed After the ionization outside the well, the ions to be analyzed are injected into the well, and the ions collide with the buffer gas to attenuate the kinetic energy, and are limited by the RF trapping electric field and the DC trapping electric field in the ion trapping region in the well, when the ions are captured, AC or The signals of other waveforms are connected to the electrodes of the electrode group 10 or to the terminal electrodes 5, 6 to achieve mass selective separation or excitation of the ions.
  • the excitation of the target ion can be selectively excited by AC excitation, and the kinetic energy is increased.
  • the collision-induced dissociation (CID) of the ion can be achieved after the target ion acquires kinetic energy and collides with the buffer gas.
  • the MS n experiment can be carried out by using CID.
  • the basic operating principle of a single capture region for a multi-purpose, high-capacity, multi-stage linear ion trap system is the same as for the existing linear ion trap theory.
  • the DC portion of the RF signal to which the electrode group 10 is connected is zero, the operating state corresponds to the q-axis in the stability map.
  • the initial RF amplitude will determine the lower limit of the stable ion mass-to-charge ratio. All ions with a mass-to-charge ratio greater than or equal to this lower limit can be captured by the ion trap and stored in the ion trap.
  • the lower limit of the mass of ions stored in this region can be adjusted by setting the initial RF amplitude on the electrode set.
  • the RF/DC separation is based on the ion motion stability map, and the unstable ions are emitted out of the ion trap by changing the state of the ions from stable to unstable at the boundary of the stability map.
  • the working process of RF/DC separation is to select the ions to be retained in the ion trap according to the separation needs, and calculate the state parameter ( a i 5 qi ) of the retained ions so that the state point ⁇ cii ) falls near the apex of the stable triangle.
  • the RF component on the y-pole is adjusted and the DC component is simultaneously input, so that the target ion state point becomes (aq, ), and at this time, other ions fall into the unstable region, thereby the target ion and other The ions are separated.
  • the AC waveform separation is based on the relationship between the fundamental frequency of the ion motion and the ion state.
  • the amplitude response in the z direction after excitation is proportional to the Fourier transform of the excitation waveform itself.
  • the ion response is independent of the ion axis oscillation frequency, and also with the ion.
  • the mass-to-charge ratio has nothing to do.
  • the excitation of ions with a mass-to-charge ratio of m/z is determined only by the magnitude of the excitation amplitude at the corresponding frequency of the shield-to-charge ratio.
  • Using the ion motion fundamental frequency as a link It is not necessary to accurately calculate the ion trajectory to determine the axial amplitude of the excited ions.
  • the AC waveform corresponding to the separation purpose is connected to the corresponding electrode pair, multiple target ions can be simultaneously realized. Selective excitation and eviction.
  • the mass analysis of the multi-purpose large-capacity multi-stage linear ion trap system is performed by selecting ions to make the target ions from stable to unstable, thereby driving them out of the ion trap for ion detection.
  • Selective instability detection can be divided into two ways: boundary emission and AC resonance eviction.
  • the boundary emission is based on the stable boundary point on the q-axis of the stability diagram as the operating point.
  • the DC voltage amplitude is zero. By scanning the RF voltage amplitude (rising scan), the ions enter the unstable state according to the mass-to-charge ratio from small to large.
  • the unstable ions will be ejected from the ion trap, reach the ion detection system outside the well, receive and amplify the corresponding electrical signal, and the corresponding mass spectrum can be obtained.
  • the AC resonance eviction utilizes the relationship between the fundamental frequency of the ion motion and the state of the ion. By scanning RF, the fundamental frequency of the ion is changed. When the fundamental frequency of the ion is equal to the frequency of the AC signal, the amplitude of the ion in the X direction. It will increase rapidly, leaving the ion trap from the slit in the center of the X-plate and entering the external detection circuit.
  • the MS n experiment is the basis of this analysis. In the MSn experiment, it is necessary to cleave the target ions into fragment ions, and determine the type of the fragment ions by performing a qualitative scan on the fragment ions to determine the composition structure of the target ions. There are many ways to achieve the cleavage of target ions. Commonly used are: CID generated by collision of ions with buffer gas, electron capture cleavage (ECD) and electron transfer cleavage (ETD) by ion-ion reaction. In a multi-purpose, large-capacity multi-stage linear ion trap system, each ion trapping region can be used as a separate reaction chamber. The design of multiple ion trapping regions provides sufficient conditions for MS n by assigning regions. The ability to perform MS n experiments on a variety of processes.
  • Each ion capture region of a multi-purpose, high-capacity, multi-stage linear ion trap system is self-contained
  • the function of selective ion storage, separation, reaction/cracking, and analysis, when multiple ion trapping regions work together, can combine a variety of analytical processes/methods, which also makes the multistage linear ion trap system widely available. Adaptable and versatile.
  • Figure 2 shows a multi-purpose, high-capacity multi-stage linear ion trap system with three electrode sets.
  • the structure and voltage signal connections are similar to those of Figure 1, except that an electrode group 10 is added to Figure 1, which is increased accordingly.
  • the structure of the multi-stage linear ion trap system having three or more electrode groups 10 is similar to that of the above-described FIGS. 1 and 2, except that the number of electrode groups 10 changes, and the number of electrode groups 10 increases. The more diverse the multi-purpose, high-capacity multi-stage ion trap system works, it is no longer detailed.
  • the electrode of the electrode group 10 of the multi-purpose large-capacity multi-stage linear ion trap system can adopt various electrode shapes capable of generating a quadrupole field, as shown in Figures 3a to 3d, a hyperbolic electrode, a cylindrical electrode, and a cross-sectional edge Graded shrinkage electrode, rectangular plate electrode, etc.
  • the terminal electrodes 5, 6 may be plate electrodes placed along the xy plane, as shown in Figures 1 and 2; or may be composed of four electrodes parallel to the z-axis.
  • the multipole rods, such as the terminal electrodes 5, 6 of Fig. 4, are quadrupole rods, and the electrodes are placed at intervals of 90 degrees in the xy plane; it may also be a combination of a plate electrode and a multipole rod, as shown in Fig. 5.
  • the DC voltage can be connected to the flat-end electrode, and the RF voltage or DC voltage or a combination of the two can be connected to the multi-pole rod electrode.
  • the main function of the terminal electrodes 5, 6 is to generate a potential well along the z-axis direction, confining the ions in the trapping region of the ion trap in the z-direction.
  • slits (7 and 8) parallel to the z-axis can be formed in at least one electrode of the electrode group 10 in the linear ion trap and connected to the sub-X or y electrode pairs. Injecting an AC signal to excite ions in the X or y direction or to eject ions out of the ion trap; or to create a small hole or slit in the end electrode of the plate to excite ions in the z direction or to eject ions out of the ion trap; Each of the above modes is arbitrarily combined to realize multi-directional excitation of ions or ejection of ions from the ion trap.
  • slits there are various openings for the slits on the electrode group 10, and slits may be formed on the X electrode pairs of each electrode group 10, or slits may be formed on the y electrode pairs of each electrode group 10. Under the premise of ensuring that at least one slit is formed in each electrode group 10, a combination slit is used between each of the sub-electrode groups 10, or is opened on the X electrode or on the y electrode, and is arbitrarily combined as needed.
  • the slits of two or more electrode sets 10 can be placed on electrodes located in the same circumferential position (as shown in Figures 1, 2). Further, as shown in FIG.
  • the slits of the two or more electrode groups 10 may be arranged in a line so as to integrally process the two or more slits.
  • the slits on the electrodes and the small holes or slits in the terminal electrodes 5, 6 can be used as inlets or outlets for the sample or ions, and a multi-inlet or multi-outlet analysis mode in the x, y or z direction can be achieved by combination.
  • the multi-purpose large-capacity linear ion trap can be ionized by an external ion source, or ionized by an internal ion source, or ionized by a combination of internal and external ion sources.
  • the multiple inlet mode of the ion trap allows for connection to two or more ion sources.
  • the ion transport system of the ion source can introduce ions into the well through small holes/slits in the end cap, or can introduce ions into the well through slits in the RF electrode.
  • Figure 6 shows a dual-ion source dual detector multi-purpose high-capacity linear ion trap.
  • FIG. 7 shows a combination of a multi-source multi-detector multi-purpose high-capacity multi-stage linear ion trap system.
  • the corresponding device can be connected to each ion source or detector position according to specific needs, and the combination can be realized in space three-dimensional. Multi-ion source multi-detection shield analysis program.
  • the ion trap analysis function can be expanded, and the analysis method can be set according to the needs of the analysis purpose.
  • the required analytical experiments can be carried out.
  • the ion trap has wide adaptability.
  • each ion-trapping area such as selective storage, separation,
  • the ion reaction or analysis region, or a combination thereof provides a variety of modes of operation, including existing spatial sequential flow MS n analysis experiments, spatial series and time series combination MS n array analysis experiments.
  • the combined working mode not only implements the existing MS n analysis technology, but also provides a powerful tool for exploring MS n analysis methods to help scientists verify or implement more possible technical routes for material structure research.
  • the invention also proposes an integrated electrode processing method.
  • the basic steps of the integrated electrode processing method include: firstly, using a non-metal material as a substrate, processing into an electrode substrate having a desired RF electrode shape, such as a hyperbolic electrode, a cylindrical electrode, a rectangular plate electrode, and being analyzable into a plurality of thin layers
  • the optimized field electrode of the unit is then coated with a metal conductor film on the surface of the non-metal electrode substrate, and finally the metal film is worn away or removed at the portion where insulation is required.
  • a non-metallic material may be selected from a ceramic material, and a metal film may be selected from a conductor material containing gold as a main component, such as high-purity gold.
  • the integrated electrode processing method is particularly suitable for the case where the electrode needs to be divided into a plurality of parts, and the electrode of the multi-purpose large-capacity linear ion trap proposed in the present application can be processed by the method.
  • the processing method of the multi-stage linear ion trap system of the present invention may include the following steps:
  • a pair of terminal electrodes are provided on both sides of the outermost ends of the pair of X electrodes and the pair of y electrodes.
  • the X electrode pair and the y electrode pair are integrated electrodes, and each X integrated electrode forms two or more X sub-electrodes by removing the metal film, and each y-body electrode is removed by removing the metal film.
  • Two or more y sub-electrodes are formed, and each of the corresponding X sub-electrode pairs and y sub-electrode pairs can define an ion trapping region, which constitutes an electrode group of the present invention, thereby forming a pair
  • the X electrode and the pair of y electrodes can form two or more electrode groups between the terminal electrodes of the present invention.
  • the processing method of the multi-stage linear ion trap system of the present invention may be Including the following steps:
  • the pair of X electrodes and the sub-electrodes on both sides of the outermost end of the pair of y electrodes are provided as a pair of terminal electrodes.
  • the terminal electrode and the electrode group of the multistage linear ion trap system of the present invention are formed by integrating electrodes, thereby omitting the assembly between the terminal electrode and the electrode group.
  • the processing method of the multi-stage linear ion trap system of the present invention may include the following steps:
  • a pair of plate electrodes are disposed on both sides of the outermost end of the pair of electrodes and the pair of y electrodes, and the pair of plate electrodes and the sub-electrodes adjacent thereto on the corresponding integrated electrodes are configured together A pair of terminal electrodes.
  • FIG 8 and Figure 9 show the multi-purpose large-capacity linear ion trap processed by the integrated method.
  • the shape of the electrode is hyperbolic.
  • Each integrated electrode is divided into three sub-electrodes, thus having three or More than three electrode groups 10, wherein the dark surface in Fig. 8 indicates that the gold film is covered, the white surface indicates the surface of the ceramic substrate from which the gold film is removed, and the slits of the X electrodes of the respective electrode groups are opened, the same X
  • the three slits on the electrode are connected in one piece, that is, a long slit is opened during the processing of the ceramic base electrode, and the slit is divided into three parts while dividing the electrode into three parts in the subsequent step.
  • This one-time slitting method greatly simplifies the machining process and ensures that the slits of each part are hooked and on the same line.
  • the electrode of each part is usually directly processed by a metal material, and then the parts are assembled by using an insulating material, which requires precise assembly technology, and this technology has become the current ion trap processing.
  • the present invention is not limited to the specific structure of the above embodiment, wherein the number of end portions divided by the electrode group, the size and proportion of each part, the connection position of the ion source and the detector, and the like can be adjusted as needed, and the same idea based on the present invention All are within the scope of the invention.
  • the structure of the multi-purpose large-capacity linear ion trap proposed by the present application is more simplified than that of the combined ion traps in which a plurality of ion traps are directly connected in series. It is only a structural comparison, and it seems that only the terminal electrodes are omitted. Multiple RF electrode sets are connected in series directly, but such omissions can bring about revolutionary changes in the control, commissioning and manufacturing of ion traps.
  • the combined signal of RF+DC is connected to each of the electrode groups defining the ion trapping region, which has significant advantages in the control of ion motion.
  • the function of the terminal electrode as in the prior art can be realized by adjusting the DC component, and the electric field force focused on the central axis can be applied to the ion assist during the ion transport process by adjusting the RF component. , so that the ions are controlled both in the axial direction and in the radial direction during the transfer process.
  • the DC signal is present on the terminal electrode, and there is a severe fringing field effect between the ion trap and the terminal electrode, resulting in a significant decrease in ion transport efficiency. As the number of series stages increases, ion loss will occur.
  • the ion transmission path can be shortened, the influence of the fringe field effect can be reduced, the ion can be controlled in three dimensions, and the ion transmission efficiency can be effectively improved, thereby improving the sensitivity of the instrument for performing multi-level ion analysis, which is carried out Combined process analysis is critical.
  • the DC or AC signal on the terminal electrode between adjacent wells can be omitted, and when there are two electrode groups, the signal of one terminal electrode can be omitted, and the superiority does not seem obvious enough, but This advantage is particularly significant as the number of electrode sets increases.
  • the loss of the ion trap is reduced by one less electrode, which reduces the influence on the performance of the instrument.
  • the integrated electrode can be processed to reduce the difficulty of assembly.
  • the multi-purpose large-capacity linear ion trap proposed in the present application can combine the functions of the existing single ion trap and the combined ion trap, has wide applicability, and can effectively improve ion transport efficiency and thereby improve multi-level. Sensitivity of ion analysis for bio, pharmaceutical, ion chemistry, etc.
  • the development of the domain provides a powerful research tool.
  • the ion trap with combined function proposed by the present invention is not based on a design scheme of multiple ion traps in series. As a whole, it is only a linear ion trap itself, and the ion trap is realized by designing a plurality of ion trapping regions. Combined analysis capabilities.
  • the ion trap structure is relatively simple, the work complexity of shield instrument control and debugging is reduced, and the integrated electrode processing proposed by the present invention is extended.
  • the method thus reduces the assembly difficulty of the ion trap.
  • the multi-stage linear ion trap system provides a practical and adaptable solution for the development of ion trap mass analyzers and mass spectrometers, which is adaptable, versatile, easy to process and assemble, and relatively low in cost. Development of analytical techniques in the fields of pharmaceuticals, ion chemistry, etc.

Abstract

A multipole linear ion trap system and method of manufacturing such system with electrodes all-in-one are provided. The system comprise two or more sets of electrode assembly, wherein each of the electrode assembly defines a portion of a ion trap and is connected to RF and DC source, and a pair of end electrodes (5,6). The method of manufacturing electrodes all-in-one comprise processing an non-metallic substrate, covering a metal film on the surface of substrate, and removing a part of metal film on the insulation area. A scheme to developing the mass analyzer and the mass spectrographs with wide applications, multifunction, making easily and low cost is provided.

Description

多级线 ¾离―子阱系统、 该系统及一体化电极的加工方法 技术领域  Multi-stage line 3⁄4 away from the sub-trap system, the system and the integrated electrode processing method
本发明涉及质谱分析技术领域, 具体来说涉及一种多级线性离子阱系统、 该系统及一体化电极的加工方法。 背景技术  The invention relates to the technical field of mass spectrometry, in particular to a multi-stage linear ion trap system, the system and a processing method of the integrated electrode. Background technique
四极离子阱是一种特别的装置, 它既可作为离子储存装置, 在一定的时 间周期内将气态离子限制在离子阱内的四极场区域中, 又可作为盾谱仪器的 质量分析器开展质谱分析, 并具有相当大的质量范围和可变的质量分辨率。 离子阱中的四极静电场通过在离子阱装置各极杆上接入 RF射频电压、 DC直流 电压或二者的组合信号而产生。 传统的离子阱由两部分电极组成, 即环电极 和端盖电极, 为了产生显著的四极场, 典型的电极形状为双曲型。  The quadrupole ion trap is a special device that can be used as an ion storage device to confine gaseous ions to the quadrupole field in the ion trap for a certain period of time, and as a mass analyzer for the shield instrument. Mass spectrometry is performed with a considerable mass range and variable mass resolution. The quadrupole electrostatic field in the ion trap is generated by connecting an RF voltage, a DC voltage, or a combination of the two on each pole of the ion trap device. A conventional ion trap consists of two partial electrodes, a ring electrode and an end cap electrode. In order to produce a remarkable quadrupole field, a typical electrode shape is a hyperbolic type.
早期的离子阱为三维离子阱,其四极场在 r和 z (极坐标系中)方向产生, 离子在该四极场中受到线性力的作用, 从而可将一定质荷比 m/z 范围内的离 子捕获并储存在该离子阱中。 最典型的三维离子阱由三个双曲电极组成, 即 一个环电极和两个端盖电极,此类装置通常称为 Paul型离子阱或四极离子阱。 圆柱形离子阱是一种更简单的三维离子阱, 由一个内表面为圆柱面的环电极 和两个平板结构的端盖电极组成。 Paul 型离子阱和圆柱形离子阱最大的缺陷 是阱中捕获的离子数少, 对于在阱外电离的入射离子其捕获效率较低。  The early ion trap is a three-dimensional ion trap whose quadrupole field is generated in the direction of r and z (in the polar coordinate system). The ions are subjected to a linear force in the quadrupole field, so that a certain mass-to-charge ratio m/z range can be obtained. The ions inside are captured and stored in the ion trap. The most typical three-dimensional ion trap consists of three hyperbolic electrodes, a ring electrode and two end cap electrodes. Such devices are commonly referred to as Paul-type ion traps or quadrupole ion traps. The cylindrical ion trap is a simpler three-dimensional ion trap consisting of a ring electrode with a cylindrical inner surface and two end plate electrodes with a flat structure. The biggest drawback of the Paul-type ion trap and the cylindrical ion trap is that the number of ions trapped in the well is small, and the capture efficiency is low for incident ions ionized outside the well.
近年来出现了另一类离子阱一一线性离子阱。 线性离子阱由延长的且平 行放置的多个极杆组成, 该极杆系将确定离子阱的容积, 通过在极杆上接入 RF射频电压和 DC直流电压,即可在垂直于离子阱中心轴的平面上产生二维的 四极场, 由于仅在二维实现离子的强聚焦, 所捕获的离子可在中心轴附近分 布, 大大提高了离子捕获数。 美国专利 5420425描述了一种由三組四极杆組 成的二维线性离子阱, 中间的一组四极杆作为主四极杆, 其中一对主极杆上 设计了狭缝, 离子可通过该狭缝实现注入与出射; 两端的两组四极杆既可实 现在轴向限制阱中捕获离子的运动, 又可改善主四极杆吶的四极场, 当各极 杆均采用双曲极杆, 可获得近乎理想的四极场。 Another type of ion trap-one linear ion trap has emerged in recent years. The linear ion trap consists of a plurality of poles that are extended and placed in parallel. This pole will determine the volume of the ion trap. By connecting the RF voltage and the DC voltage to the pole, it is perpendicular to the center of the ion trap. A two-dimensional quadrupole field is created on the plane of the axis. Since the intense focusing of the ions is achieved only in two dimensions, the trapped ions can be distributed near the central axis, greatly increasing the number of ion traps. U.S. Patent No. 5,420,425 describes a two-dimensional linear ion trap consisting of three sets of quadrupoles, with a set of quadrupoles in the middle as the main quadrupole, wherein a pair of main poles are designed with slits through which ions can pass. The slit realizes injection and exit; the two sets of quadrupoles at both ends are both real Now the axial trapping trap captures the movement of ions and improves the quadrupole field of the main quadrupole. When each pole is a hyperbolic pole, a nearly ideal quadrupole field is obtained.
上述各离子阱中, 除圓柱形离子阱外, 均需要准确的机械加工过程, 如 加工、 装配等, 而这样高精度机械加工是相当复杂的。 尤其是采用双曲面电 极的离子阱, 在保证加工精度的前提下, 装配技术就成为最终影响仪器分析 性能的一大瓶颈, 也因此成为限制个型离子阱质量分析器发展的主要因素之 离子阱兼具选择性储存、 分离和分析的功能, 使得离子阱质量分析器在 开展质 i普-质谱实验(MSn )方面具有得天独厚的优势。 尽管利用单个离子阱就 可开展 MSn实验,但随着电喷雾电离(ESI )和基质辅助激光解吸电离(MALDI ) 等电离方式的发展, 质谱分析已广泛深入到大分子复杂样品的分析中, 这就 对离子阱质量分析器提出了新的需求, 利用多个离子阱实现组合离子阱的技 术也应运而生。 美国专利 6483109 B2提出了一种多级质 i普仪器, 在该仪器中, 将多个离子阱按照空间串联, 即首尾相连的方式组成多级离子阱空间, 各级 之间采用端电极进行分隔, 离子在各级之间顺序流通, 分别实现存储、 分离、 解离或分析的功能。 美国专利 6838666 B2提出了一种利用四片矩形平板电极 围成的矩形线性离子阱(RIT ), 并提出了利用三个以上 RIT组成的 RIT组合 离子阱, 每个 RIT单元都包含四片平板电极和一对端电极, 离子在该组合离 子阱中流通及开展 MSn实验。 组合式的离子阱为研究复杂样品, 尤其是离子化 学、生物大分子和制药等领域中利用 MSn实现分子结构的定性研究提供了一种 新的功能强大的质谱分析工具。 但是, 已有的组合式离子阱结构相对复杂, 尤其是每个阱单元两端都设计了端电极, 通过控制端电极上的直流电压实现 离子在各阱单元之间的传输和转移, 由于端电极上只有 DC信号, 离子阱与端 电极之间会存在严重的边缘场效应, 从而导致离子传输效率显著下降, 离子 在通过端电极区域时常常会发生较显著的离子损失, 随着串联级数的增加, 将会使得由于离子损失过于严重而无法开展相应的分析过程, 成为限制离子 处理级数的主要因素之一; 同时在设计加工时还涉及到多级电极、 端盖之间 的高精密装配问题, 最终影响离子阱质量分析器的分辨率和灵敏度。 In each of the above ion traps, in addition to the cylindrical ion trap, accurate machining processes, such as machining, assembly, etc., are required, and such high-precision machining is quite complicated. Especially with the ion trap of the hyperboloid electrode, under the premise of ensuring the processing precision, the assembly technology becomes a major bottleneck that ultimately affects the analytical performance of the instrument, and thus becomes an ion trap that limits the development of the ion trap mass analyzer. The ability to selectively store, separate, and analyze the ion trap mass analyzer is uniquely positioned to perform mass-mass spectrometry (MS n ) experiments. Although the MS n experiment can be performed using a single ion trap, with the development of ionization methods such as electrospray ionization (ESI) and matrix-assisted laser desorption ionization (MALDI), mass spectrometry has been extensively applied to the analysis of complex samples of macromolecules. This has placed new demands on ion trap mass analyzers, and the technology of combining ion traps using multiple ion traps has emerged. U.S. Patent No. 6,481,109 B2 proposes a multi-stage mass spectrometer in which a plurality of ion traps are arranged in series in a spatially connected manner, i.e., end to end, forming a multi-stage ion trap space, separated by end electrodes. The ions are sequentially circulated between the stages to achieve the functions of storage, separation, dissociation or analysis. U.S. Patent No. 6,838,666 B2 proposes a rectangular linear ion trap (RIT) surrounded by four rectangular plate electrodes, and proposes a RIT combined ion trap composed of three or more RITs, each of which contains four plate electrodes. And a pair of terminal electrodes, ions are circulated in the combined ion trap and the MS n experiment is performed. The combined ion trap provides a new powerful mass spectrometry tool for the study of complex samples, especially in the fields of ion chemistry, biomacromolecules and pharmaceuticals, using MS n to achieve molecular structure. However, the existing combined ion trap structure is relatively complicated, especially the terminal electrode is designed at both ends of each well unit, and the transmission and transfer of ions between the well units are realized by controlling the DC voltage on the terminal electrode. There is only a DC signal on the electrode, and there will be a severe fringing field effect between the ion trap and the terminal electrode, resulting in a significant decrease in ion transport efficiency. Ion ions often undergo significant ion loss as they pass through the terminal electrode region, with series series The increase will make the corresponding analysis process unable to carry out the corresponding analysis process due to the excessive ion loss. One of the main factors in the processing of the series; at the same time, the design process involves high-precision assembly problems between the multi-stage electrodes and the end caps, which ultimately affects the resolution and sensitivity of the ion trap mass analyzer.
综上所述, 已有的线性离子阱质量分析器, 无论是单离子阱或组合式离 子阱, 均需要高精度的机械加工与装配。 单离子阱的 MS^ 能相对单一, 在开 展复杂样品、 多样品的离子 /离子反应等应用时操作复杂甚至无法完成分析任 务。 组合式离子阱利用不同的组合方式可用于开展复杂样品、 多样品的多级 串联分析, 但其结构复杂, 离子传输效率亦受影响, 加工装配相对复杂。 随 着生物、 制药、 离子化学等学科的发展, 已有离子阱质量分析器都或多或少 都暴露出其局限性。 因此, 探索一种结构相对简化、 同时兼具多种分析功能 的线性离子阱及一种易于极杆装配的极杆加工方法, 将会有力推动小型离子 阱质量分析器的发展, 从而推动生物、 制药、 离子化学等学科的发展。 发明内容  In summary, existing linear ion trap mass analyzers, whether single ion traps or combined ion traps, require high precision machining and assembly. The MS^ energy of a single ion trap is relatively simple, and it is complicated or even impossible to perform analysis tasks in applications such as complex samples and ion/ion reactions of multiple samples. The combined ion trap can be used for multi-stage series analysis of complex samples and multiple samples by different combinations, but its structure is complex, ion transport efficiency is also affected, and processing assembly is relatively complicated. With the development of biology, pharmacy, ion chemistry and other disciplines, ion trap mass analyzers have more or less exposed their limitations. Therefore, exploring a linear ion trap with relatively simple structure and multiple analytical functions and a pole processing method that is easy to assemble with a pole will strongly promote the development of small ion trap mass analyzers, thus promoting biology, The development of pharmaceutical, ion chemistry and other disciplines. Summary of the invention
本发明要解决的技术问题之一在于提供一种结构相对简化, 可用于多种 分析目的的多级线性离子阱系统。  One of the technical problems to be solved by the present invention is to provide a multi-stage linear ion trap system which is relatively simple in structure and can be used for various analysis purposes.
本发明要解决的技术问题之二在于提供一种易于实现高准确度高精密度 加工与装配的一体化电极的加工方法。  The second technical problem to be solved by the present invention is to provide a processing method for an integrated electrode which is easy to realize high precision and high precision processing and assembly.
本发明要解决的技术问题之三在于提供一种易于实现高准确度高精密度 加工与装配的多级线性离子阱系统的加工方法。  The third technical problem to be solved by the present invention is to provide a processing method for a multi-stage linear ion trap system which is easy to realize high precision and high precision processing and assembly.
为解决上述的第一个技术问题, 本发明提出了一种线性离子阱系统, 该 系统包括:  In order to solve the above first technical problem, the present invention proposes a linear ion trap system, the system comprising:
两个或两个以上的电极组, 其中每个电极组包括 电极对和 y电极对, 以定义出一个离子捕获区域; 该些电极组沿离子阱系统的中心轴 z轴排列; 在每个电极组的至少一个电极上设有狭缝,该狭缝可用于沿径向将样品或离 子导入离子阱系统内, 也可用于样品或离子沿径向离开离子阱系统; 并且在 每个电极组上均连接有射频信号和直流信号的組合信号; 端电极, 其连接有直流信号, 并且该端电极设置成, 仅具有一对, 并分 别设置在该些电极组的沿所述离子阱系统的中心轴 Z轴的两个最外侧端。 Two or more electrode sets, each of which includes an electrode pair and a y electrode pair to define an ion trapping region; the electrode sets are arranged along the central axis z-axis of the ion trap system; At least one of the electrodes of the set is provided with a slit that can be used to radially introduce the sample or ions into the ion trap system, or for the sample or ions to exit the ion trap system radially; and on each electrode set A combined signal of a radio frequency signal and a direct current signal is connected; The terminal electrodes are connected to a direct current signal, and the terminal electrodes are disposed to have only one pair and are respectively disposed at the two outermost ends of the electrode groups along the Z axis of the central axis of the ion trap system.
本发明中的 X电极对和 y电极对平行于中心轴 z轴,各电极按照 x-y-x-y 方式交替间隔 90度放置, 从而定义一个离子捕获区域; RF射频电源连接到 X 和 /或 y电极对, 从而在 xy平面内产生 RF离子捕获电场; 位于两端的端电极 对连接 DC直流电源, 从而提供两个端电极间沿 z轴方向的 DC捕获电势阱。 对于两个或两个以上的电极组, 离子捕获区域也就相应具有两个或两个以上, 每个电极组都连接有 RF射频信号和 /或 DC直流信号。  The X electrode pair and the y electrode pair in the present invention are parallel to the central axis z axis, and the electrodes are alternately spaced by 90 degrees in an xyxy manner to define an ion trapping region; the RF power source is connected to the X and/or y electrode pair, thereby An RF ion trapping electric field is generated in the xy plane; the pair of terminal electrodes at both ends are connected to a DC direct current source to provide a DC trapping potential well between the two terminal electrodes in the z-axis direction. For two or more electrode sets, there are two or more ion trapping regions, each of which is connected to an RF signal and/or a DC DC signal.
在所述的 X极杆对上或 y极杆对上连接有 AC电压, 用于沿 X方向或 y方 向激发或逐出离子上, 或者在端电极上连接有 AC电压, 从而沿 z方向激发或 逐出离子。 可根据分析需要通过设置各子 RF电极的电参数(如 RF/DC/AC参 数)提供相应的分析功能, 如作为选择性储存、 分离、 离子反应或分析区域, 同时还可兼具其中的多项功能。  An AC voltage is connected to the pair of X poles or the pair of y poles for exciting or ejecting ions in the X direction or the y direction, or an AC voltage is connected to the terminal electrodes to be excited in the z direction. Or expel ions. According to the analysis needs, the electrical parameters (such as RF/DC/AC parameters) of each sub-RF electrode can be provided to provide corresponding analysis functions, such as selective storage, separation, ion reaction or analysis, and at the same time, Item function.
多用途大容量的多级线性离子阱系统的端电极可以是沿 xy平面放置的平 板电极, 也可以是平行于 z轴的多极杆, 还可以是极板与多极杆的组合。 在 端电极为平板电极的情况中, 可以在其中一个平板端电极上开设小孔或狭缝, 也可以在两个平板端电极上都开设小孔或狭缝, 所开的小孔或狭缝可用于样 品或离子的导入, 也可以用于样品或离子离开离子阱。  The terminal electrode of the multi-purpose large-capacity multi-stage linear ion trap system may be a plate electrode placed along the xy plane, a multipole rod parallel to the z-axis, or a combination of a plate and a multipole. In the case where the terminal electrode is a flat electrode, a small hole or a slit may be formed in one of the flat end electrodes, or a small hole or a slit may be formed in both of the flat end electrodes, and the small hole or slit is opened. It can be used for the introduction of samples or ions, and it can also be used for samples or ions to leave the ion trap.
每个电极组的狭缝有多种开设方案, 可以在每个子 RF电极组的 X电极对 上均开设狭缝, 也可以在每个子 RF电极组的 y电极对上均开设狭缝, 还可以 在保证每个子 RF电极组至少开一条狭缝的前提下, 各子电极組之间采用组合 式狭缝, 或者开在 X电极, 或者开在 y电极, 实现根据需要任意组合。 作为 一个可选的例子, 两个或两个以上电极组的狭缝可开设在位于同一周向位置 的电极上。 进一步, 所述两个或两个以上的电极组的狭缝可呈直线排列, 以 便于一体加工出该两个或两个以上的狭缝。 每个电极组上的狭缝和端电极上 的小孔或狹缝都可作为样品或离子的入口或出口, 通过組合可以实现沿 x、 y 或 Z方向的多入口或多出口分析模式。 There are various opening schemes for the slits of each electrode group, and slits may be formed on the X electrode pairs of each sub-RF electrode group, or slits may be formed on the y-electrode pairs of each sub-RF electrode group. Under the premise of ensuring at least one slit for each sub-RF electrode group, a combined slit is used between each sub-electrode group, either at the X electrode or at the y electrode, to achieve any combination as needed. As an alternative example, slits of two or more electrode sets may be placed on electrodes located in the same circumferential position. Further, the slits of the two or more electrode groups may be arranged in a line so as to integrally process the two or more slits. The slits on each electrode group and the small holes or slits on the terminal electrodes can be used as inlets or outlets for samples or ions. By combining, it is possible to achieve along x, y. Or multi-inlet or multi-outlet analysis mode in the Z direction.
本发明的多用途大容量多级线性离'子阱系统可以使用外离子源电离方 式, 也可以使用内离子源电离方式, 还可以使用内外离子源相结合的电离方 式。 离子阱的多入口模式使得可以与两个或两个以上的离子源相连。 在多个 外离子源的情况下, 离子源的离子传输系统可通过端电极上的小孔 /狭缝将离 子导入阱内, 也可以通过电极组上的狭缝将离子导入阱内。 离子阱进行质量 分析时, 可以采用多个检测器实现离子检测。  The versatile large-capacity multi-stage linear ionization 'sub-trap system of the present invention can use an ionization method of an external ion source, an ionization method using an internal ion source, or an ionization method combining an internal and external ion source. The multiple inlet mode of the ion trap allows for connection to two or more ion sources. In the case of multiple external ion sources, the ion transport system of the ion source can introduce ions into the well through small holes/slits on the terminal electrodes, or ions can be introduced into the well through slits in the electrode set. When the ion trap is used for mass analysis, multiple detectors can be used for ion detection.
为解决前述的第二个技术问题, 本发明提出了一种一体化电极加工方法, 该方法的基本步骤包括: 首先采用非金属材料为基体, 加工成具有所需的电 极形状的电极基体, 然后在非金属电极基体的表面覆上一层金属导体膜, 最 后在需要绝缘的部位磨掉或车掉金属膜, 从而形成两个或两个以上相互绝缘 的子电极。  In order to solve the foregoing second technical problem, the present invention provides an integrated electrode processing method, the basic steps of the method comprising: firstly using a non-metallic material as a substrate, processing into an electrode substrate having a desired electrode shape, and then A metal conductor film is coated on the surface of the non-metal electrode substrate, and finally the metal film is ground or removed at a portion where insulation is required, thereby forming two or more sub-electrodes insulated from each other.
一体化电极加工方法尤其适用于需要将电极分为多个部分的情况, 本申 请所提出的多用途大容量线性离子阱的 RF电极就可采用该方法加工而成。 因 而, 为解决前述的第三个技术问题, 本发明提供了一种多级线性离子阱系统 的加工方法, 该方法包括如下步骤:  The integrated electrode processing method is especially suitable for the case where the electrode needs to be divided into a plurality of parts. The RF electrode of the multi-purpose large-capacity linear ion trap proposed in the present application can be processed by this method. Therefore, in order to solve the aforementioned third technical problem, the present invention provides a processing method of a multi-stage linear ion trap system, the method comprising the following steps:
形成一对一体化电极作为一对 X 电极, 形成一对一体化电极作为一对 y 电极, 其中每个一体化电极均采用上述一体化电极的加工方法形成;  Forming a pair of integrated electrodes as a pair of X electrodes, forming a pair of integrated electrodes as a pair of y electrodes, wherein each integrated electrode is formed by the above-described integrated electrode processing method;
在所述的一对 X电极和一对 y电极的最外端两侧设置一对端电极。  A pair of terminal electrodes are provided on both sides of the outermost ends of the pair of X electrodes and the pair of y electrodes.
本发明还提供了一种多级线性离子阱系统的加工方法, 该方法包括如下 步骤:  The present invention also provides a method of processing a multi-stage linear ion trap system, the method comprising the steps of:
形成一对一体化电极作为一对 电极, 形成一对一体化电极作为一对 y 电极, 其中每个一体化电极均采用上述一体化电极的加工方法形成;  Forming a pair of integrated electrodes as a pair of electrodes, forming a pair of integrated electrodes as a pair of y electrodes, wherein each integrated electrode is formed by the above-described integrated electrode processing method;
将所述的一对 X电极和一对 y电极中的最外端两侧的子电极设置成一对 端电极。  The pair of X electrodes and the sub-electrodes on both sides of the outermost end of the pair of y electrodes are provided as a pair of terminal electrodes.
本发明还提供了一种多级线性离子阱系统的加工方法, 该方法包括如下 步骤: The invention also provides a processing method of a multi-stage linear ion trap system, the method comprising the following Steps:
形成一对一体化电极作为一对 X 电极, 形成一对一体化电极作为一对 y 电极, 其中每个一体化电极均上述一体化电极的加工方法形成;  Forming a pair of integrated electrodes as a pair of X electrodes, forming a pair of integrated electrodes as a pair of y electrodes, wherein each integrated electrode is formed by a method of processing the integrated electrodes;
在所述的一对 X电极和一对 y电极中的最外端两侧设置有一对平板电极, 将所述的一对平板电极和相应的一体化电极上的与之相邻的子电极共同构成 一对端电极。  Providing a pair of plate electrodes on both sides of the outermost end of the pair of X electrodes and the pair of y electrodes, the pair of plate electrodes and the adjacent sub-electrodes on the corresponding integrated electrodes A pair of terminal electrodes are formed.
在上述一体化电极的加工方法及多级线性离子阱系统的加工方法中, 非 金属材料可以是陶瓷材料, 金属膜可以采用以金为主要成分的导体材料。  In the above-described method for processing an integrated electrode and a method for processing a multi-stage linear ion trap system, the non-metal material may be a ceramic material, and the metal film may be a conductor material containing gold as a main component.
在已有的加工方法中, 通常采用金属材料直接加工出各个部分的电极, 然后采用绝缘材料将各部分组合装配起来, 这就要求必须具备精密的装配技 术, 而这一技术已成为目前离子阱加工制造的一大瓶颈。 采用一体化电极的 加工方法以及利用该一体化电极加工方法的多级线性离子阱系统的加工方 法, 可以保证同——体化电极上各个部分(子电极) 的均勾性, 从而降低装 配技术的难度。  In the existing processing method, the electrode of each part is usually directly processed by a metal material, and then the parts are assembled by using an insulating material, which requires precise assembly technology, and this technology has become the current ion trap. A major bottleneck in manufacturing. The processing method using the integrated electrode and the processing method of the multi-stage linear ion trap system using the integrated electrode processing method can ensure the uniformity of the respective portions (sub-electrodes) on the same body electrode, thereby reducing the assembly technique Difficulty.
本申请所提出的多用途大容量多级线性离子阱系统通过在仅具有一对端 电极的离子阱中设置两个或两个以上定义出离子捕获区域的电极组, 就可实 现离子阱分析功能的扩展, 根据分析目的的需要, 设置分析方法就可开展所 需的分析实验。 该离子阱具有广泛的适应性, 当只利用其中一个电极组定义 出的离子捕获区域作为分析区域时, 或所有电极组上都接入相同的信号, 就 等效于已有的单离子阱盾量分析器; 当利用多个电极组定义出的多个离子捕 获区域协同工作时, 通过定义各个离子捕获区域的功能, 如选择性储存、 分 离、 离子反应或分析区域, 或其组合, 就可提供多种工作模式, 包括已有的 空间顺序流通 MSn分析实验,空间串联与时间串联相组合 MSn阵列式分析实验。 组合式的工作模式不仅实现已有的 MSn分析技术, 更为探索中的 MSn分析方法 提供一个强有力的工具, 帮助科学家们开展物质结构研究。 The multi-purpose large-capacity multi-stage linear ion trap system proposed in the present application can realize the ion trap analysis function by providing two or more electrode groups defining ion trapping regions in an ion trap having only one pair of terminal electrodes. The extension, according to the needs of the analysis, set up the analytical method to carry out the required analytical experiments. The ion trap has wide adaptability. When only the ion trapping region defined by one of the electrode groups is used as the analysis region, or the same signal is connected to all the electrode groups, it is equivalent to the existing single ion trap shield. A volume analyzer; when multiple ion capture regions defined by multiple electrode sets work together, by defining the function of each ion capture region, such as selective storage, separation, ion reaction or analysis regions, or a combination thereof, A variety of working modes are provided, including existing spatial sequential flow MS n analysis experiments, spatial series and time series combination MS n array analysis experiments. The combined working mode not only implements the existing MS n analysis technology, but also provides a powerful tool for exploring MS n analysis methods to help scientists conduct material structure research.
与已有的多个离子阱直接串联組成的组合式离子阱相比, 本申请提出的 多用途大容量多级线性离子阱系统的结构更为简化, 只从结构方面来比较, 看似只是省略了端电极而直接将多个电极组串联起来, 然而这样的省略却能 为离子阱的控制、 调试与制造带来卓越的变革。 在每一个电极组上都接入Compared with a combined ion trap composed of a plurality of ion traps that are directly connected in series, the present application proposes The structure of the multi-purpose large-capacity multi-stage linear ion trap system is more simplified, and only the structural aspect is compared. It seems that the terminal electrodes are omitted and the plurality of electrode groups are directly connected in series. However, such an omission can be an ion trap. Control, commissioning and manufacturing bring great change. Connected to each electrode group
RF+DC的组合信号,对于离子运动的控制方面有着显著的优越性。 当进行离子 传输转移过程的控制时,通过调整 DC分量可实现如已有技术中端电极的功能, 而通过调整 RF分量则可在离子传输的过程对离子辅助施加一个向中心轴聚焦 的电场力, 使得离子在转移过程中既在轴向受控, 又在径向受控。 而在已有 技术中,端电极上只有 DC信号, 离子阱与端电极之间存在严重的边缘场效应, 从而导致离子传输效率显著下降, 随着串联级数的增加, 将会使得由于离子 损失过于严重而无法开展相应的分析过程, 成为限制离子处理级数的主要因 素之一。 采用本发明所提出的方案, 在缩短离子传输路程的同时又可降低边 缘场效应的影响, 使离子三维受控, 有效改善离子传输效率, 从而提高仪器 开展多级离子分析的灵敏度, 这对于开展组合式过程分析来说是至关重要的。 另夕卜, 在控制电路方面, 可以省去相邻电极組之间的端电极上的 DC或 AC信 号, 在电极组只有两个时, 可省去一个端电极的信号, 其优越性似乎不够明 显, 但随着电极组数量的增多, 这一优势就尤为显著。 仪器调试方面, 少一 个端电极, 离子的阱内损失就会相应减少, 从而减少一个对仪器性能的影响 因素。 在制造方面, 没有端盖的分隔, 就可釆用一体化电极的加工方式, 降 低装配方面的难度。 The combined signal of RF+DC has significant advantages in the control of ion motion. When the control of the ion transport transfer process is performed, the function of the terminal electrode as in the prior art can be realized by adjusting the DC component, and the electric field force focused on the central axis can be applied to the ion assist during the ion transport process by adjusting the RF component. , so that the ions are controlled both in the axial direction and in the radial direction during the transfer process. In the prior art, only the DC signal is present on the terminal electrode, and there is a severe fringing field effect between the ion trap and the terminal electrode, resulting in a significant decrease in ion transport efficiency. As the number of series stages increases, ion loss will occur. Being too serious to carry out the corresponding analysis process has become one of the main factors limiting the number of ion treatment stages. By adopting the scheme proposed by the invention, the ion transmission path can be shortened, the influence of the fringe field effect can be reduced, the ion can be controlled in three dimensions, and the ion transmission efficiency can be effectively improved, thereby improving the sensitivity of the instrument for performing multi-level ion analysis, which is carried out Combined process analysis is critical. In addition, in the control circuit, the DC or AC signal on the terminal electrode between adjacent electrode groups can be omitted, and when there are only two electrode groups, the signal of one terminal electrode can be omitted, and the superiority does not seem to be sufficient. Obvious, but with the increase in the number of electrode groups, this advantage is particularly significant. In the debugging of the instrument, if there is one terminal electrode, the loss in the ion well will be reduced accordingly, thus reducing the influence factor on the performance of the instrument. In terms of manufacturing, without the separation of the end caps, the integrated electrode processing method can be used to reduce the difficulty of assembly.
总之, 本申请所提出的多用途大容量多级线性离子阱系统能够将已有的 单离子阱和组合式离子阱的功能集于一身, 具有广泛的适用性, 并且能够有 效提高离子传输效率从而提高多级离子分析的灵敏度, 为生物、 制药、 离子 化学等领域的发展提供了一种强有力的研究工具。 同时, 本发明所提出的具 有组合式功能的离子阱并不是基于多个离子阱串联的设计方案 , 从整体来说 它本身只是一个线性离子阱, 通过设计多个离子阱捕获区域, 实现该离子阱 的组合式分析功能。 基于这样的 "一个离子阱实现组合式功能" 的发明设计 方案, 使得该多级线性离子阱结构相对简单, 减轻了质傅仪器控制和调试的 工作复杂性, 并延伸出本发明所提出的一体化电极加工方法, 从而降低离子 阱的装配难度。 该多级线性离子阱系统为离子阱质量分析器和质傅仪器的发 展提供了一种适应性强、 功能多样、 易于加工装配、 成本相对低廉的切实可 行的实施方案, 也将会大力推动生物、 制药、 离子化学等领域的分析技术的 发展。 附图说明 In summary, the multi-purpose large-capacity multi-stage linear ion trap system proposed in the present application can combine the functions of the existing single ion trap and the combined ion trap, has wide applicability, and can effectively improve ion transport efficiency. Improve the sensitivity of multi-level ion analysis, providing a powerful research tool for the development of biological, pharmaceutical, and ion chemistry. At the same time, the ion trap with combined function proposed by the present invention is not based on a design scheme of multiple ion traps in series. As a whole, it is only a linear ion trap itself, and the ion is realized by designing a plurality of ion trap capture regions. The combined analysis function of the well. Invention design based on such "one ion trap realizes combined function" The solution makes the multi-stage linear ion trap structure relatively simple, reduces the work complexity of the quality control and debugging of the instrument, and extends the integrated electrode processing method proposed by the invention, thereby reducing the assembly difficulty of the ion trap. The multi-stage linear ion trap system provides a practical and versatile solution for the development of ion trap mass analyzers and mass spectrometers, which is adaptable, versatile, easy to process and assemble, and relatively inexpensive. Development of analytical techniques in the fields of pharmaceuticals, ion chemistry, etc. DRAWINGS
图 1 : 具有两个电极组的多级线性离子阱系统的示意图;  Figure 1: Schematic diagram of a multi-stage linear ion trap system with two electrode sets;
图 2: 具有三个电极组的多级线性离子阱系统的示意图;  Figure 2: Schematic diagram of a multi-stage linear ion trap system with three electrode sets;
图 3a-图 3d: 典型的电极横截面示意图;  Figure 3a - Figure 3d: Schematic cross-section of a typical electrode;
图 4: 以四极f干为端电极的多级线性离子阱系统的示意图;  Figure 4: Schematic diagram of a multi-stage linear ion trap system with a quadrupole of f as the terminal electrode;
图 5 : 以平板电极和四极杆为端电极的多级线性离子阱系统的示意图; 图 6: 双离子源双检测器离子阱质量分析系统示意图;  Figure 5: Schematic diagram of a multi-stage linear ion trap system with plate electrodes and quadrupole as the terminal electrode; Figure 6: Schematic diagram of the dual ion source dual detector ion trap mass analysis system;
图 7 : 多离子源多检测器离子阱质量分析系统示意图;  Figure 7: Schematic diagram of a multi-ion source multi-detector ion trap mass analysis system;
图 8: 采用一体化加工方式的多级线性离子阱系统的示意图;  Figure 8: Schematic diagram of a multi-stage linear ion trap system with integrated processing;
图 9: 图 8所示的一个一体化电极的截面示意图。 具体实施方式  Figure 9: A schematic cross-sectional view of an integrated electrode shown in Figure 8. detailed description
下面结合附图对本申请作进一步详细说明。 .  The present application will be further described in detail below with reference to the accompanying drawings. .
如图 1 - 9所示,本发明提出了一种多用途大容量的多级线性离子阱系统, 该系统包括:  As shown in FIG. 1-9, the present invention provides a multi-purpose large-capacity multi-stage linear ion trap system, the system comprising:
两个或两个以上的电极组 10,其中每个电极组 10包括 X电极对和 y电极 对, 以定义出一个离子捕获区域; 该些电极组 10沿离子阱系统的中心轴 z轴 排列; 在每个电极组 10 的至少一个电极上设有狭缝,该狭缝可用于沿径向将 样品或离子导入离子阱系统内, 也可用于样品或离子沿径向离开离子阱系统; 并且在每个电极组 10上均连接有射频信号和直流信号的组合信号; 端电极 5、 6, 其连接有直流信号, 并且该端电极 5、 6设置成, 仅具有一 对, 并分别设置在该些电极组 10的沿所述离子阱系统的中心轴 z轴的两个最 外侧端。 Two or more electrode groups 10, wherein each electrode group 10 includes an X electrode pair and a y electrode pair to define an ion trapping region; the electrode groups 10 are arranged along the central axis z-axis of the ion trap system; Providing a slit on at least one electrode of each electrode group 10, the slit being used to introduce a sample or ions into the ion trap system in a radial direction, or to radially or away from the ion trap system; And a combined signal of a radio frequency signal and a direct current signal is connected to each of the electrode groups 10; the terminal electrodes 5, 6 are connected with a direct current signal, and the end electrodes 5, 6 are arranged to have only one pair and are respectively set At the two outermost ends of the electrode groups 10 along the z-axis of the central axis of the ion trap system.
图 1 所示的是一个具有两个电极组的多用途大容量多级线性离子阱系统 的具体例子, DC、 AC和 RF电压分别连接到电极组 10和端电极 5、 6上, 用于 捕获和分析离子。 X电极 1、 2和 y电极 3、 4平行于 z轴放置, 在 xy平面内 按照 1-3-2-4顺时针方向各间隔 90度放置,电极组 10沿 z方排列有两个, 每 个电极组 10的 X电极对 1、 2和 y电极 3、 4定义一个离子捕获区域, 两个电 极组 10分别对应于离子捕获区域 I和离子捕获区于 I I。两个电极组的 X电极 对上都开设了狭缝 7和 8, 狭缝 7、 8可用于沿径向将样品或离子导入离子阱 内, 也可用于样品或离子沿径向离开离子阱。 RF射频电压分别连接到 y电极 对 3、 4 , 也可以同时连接到 X和 y电极对 1、 2 , 在该电极组所对应的离子捕 获区域内生成 xy平面内的 RF离子捕获电场。 两个电极组上也都接有 DC直流 信号。 端电极 5、 6分别位于两个电极组 10所定义的两个离子捕获区域的两 外侧端; 端电极 5、 6上接入 DC直流电压。 调整端电极 5、 6和电极组上的 DC 直流电压值, 可获得两个端电极 5、 6之间的区域沿 z轴方向的 DC捕获电场, 两个电极组的 DC电位可以相同, 也可以不相同, 由此产生差级捕获子区域, 可实现在两个离子捕获区于同时分别捕获不同极性的离子或来自两个样品的 离子。 AC电压连接到 X电极对 1、 2或 y电极 3、 4对上, 作为 x电极对 1、 2 或 y电极 3、 4对之间的 AC共振激发信号, 从而沿 X方向或 y方向实现阱内 激发离子。 可根据分析需要通过设置各电极的电参数(如 RF/DC/AC参数)提 供相应的分析功能, 如作为选择性储存、 分离、 离子反应或分析区域, 或者 一个离子捕获区域同时兼具其中的多项功能。  Figure 1 shows a specific example of a multi-purpose high-capacity multi-stage linear ion trap system with two electrode sets. The DC, AC and RF voltages are connected to the electrode set 10 and the terminal electrodes 5, 6 respectively for capture. And analyzing ions. The X electrodes 1, 2 and y electrodes 3, 4 are placed parallel to the z-axis, and are placed at intervals of 90 degrees in the xy plane in the 1-3-2-4 clockwise direction, and the electrode group 10 is arranged in two along the z-square, each The X electrode pair 1, 2 and y electrodes 3, 4 of the electrode group 10 define an ion trapping region, and the two electrode groups 10 correspond to the ion trapping region I and the ion trapping region II, respectively. Slits 7 and 8 are formed on the X electrode pairs of the two electrode sets. The slits 7, 8 can be used to introduce the sample or ions into the ion trap in the radial direction, or to separate the sample or ions from the ion trap in the radial direction. The RF RF voltage is connected to the y electrode pair 3, 4, respectively, and can also be connected to the X and y electrode pairs 1, 2, and the RF ion trapping electric field in the xy plane is generated in the ion trapping region corresponding to the electrode group. DC DC signals are also connected to both electrode sets. The terminal electrodes 5, 6 are respectively located at the two outer ends of the two ion trapping regions defined by the two electrode groups 10; the terminal electrodes 5, 6 are connected to the DC voltage of the DC. Adjusting the DC DC voltage values on the terminal electrodes 5, 6 and the electrode group, the DC trapping electric field in the z-axis direction of the region between the two terminal electrodes 5, 6 can be obtained, and the DC potentials of the two electrode groups can be the same, or Different, thereby generating a differential capture sub-region, it is possible to simultaneously capture ions of different polarities or ions from two samples simultaneously in the two ion capture regions. The AC voltage is connected to the X electrode pair 1, 2 or y electrode 3, 4 pair, as an AC resonance excitation signal between the pair of x electrode pairs 1, 2 or y electrodes 3, 4, thereby implementing the well in the X direction or the y direction Internally excited ions. According to the analysis needs, the electrical parameters (such as RF/DC/AC parameters) of each electrode can be provided to provide corresponding analysis functions, such as selective storage, separation, ion reaction or analysis area, or an ion capture area. Multiple features.
利用多用途大容量多级线性离子阱系统的单个捕获区域进行质量分析的 基本工作过程是待分析样品气体在阱内电离生成待分析离子, 或待分析样品 在阱外电离后将待分析离子注入阱内, 离子与緩冲气体发生碰撞动能衰减, 并被 RF捕获电场和 DC捕获电场限制在阱内的离子捕获区域中, 当离子被捕 获后, AC或其他波形的信号接入到电极组 10的电极上或端电极 5、 6上, 即 可实现离子的质量选择性分离或激发。 利用 AC激发可选择性激发目标离子, 使其动能增加, 目标离子获得动能后于緩冲气发生碰撞可实现离子的碰撞诱 导解离 (CID ), 利用 CID可开展 MSn实验。 当 AC电压接到端电极 5、 6上时, 扫描 RF幅度可实现离子沿 z轴方向通过端电极 5、 6上的小孔或狭缝 9逐出 离子阱。 当 AC电压接到 X或 y电极对时, 扫描 RF幅度可实现离子沿 X或 y 方向通过 X电极或 y电极上的狭缝逐出离子阱。 阱外的离子检测器检测被逐 出的离子就可得到相应的质语图。 The basic working process of mass analysis using a single capture region of a multi-purpose large-capacity multi-stage linear ion trap system is that the sample gas to be analyzed is ionized in the well to generate ions to be analyzed, or samples to be analyzed After the ionization outside the well, the ions to be analyzed are injected into the well, and the ions collide with the buffer gas to attenuate the kinetic energy, and are limited by the RF trapping electric field and the DC trapping electric field in the ion trapping region in the well, when the ions are captured, AC or The signals of other waveforms are connected to the electrodes of the electrode group 10 or to the terminal electrodes 5, 6 to achieve mass selective separation or excitation of the ions. The excitation of the target ion can be selectively excited by AC excitation, and the kinetic energy is increased. The collision-induced dissociation (CID) of the ion can be achieved after the target ion acquires kinetic energy and collides with the buffer gas. The MS n experiment can be carried out by using CID. When the AC voltage is applied to the terminal electrodes 5, 6, the scanning RF amplitude allows ions to be ejected out of the ion trap through the apertures or slits 9 in the terminal electrodes 5, 6 along the z-axis. When the AC voltage is connected to the X or y electrode pair, scanning the RF amplitude allows ions to be ejected out of the ion trap through the slits on the X or y electrodes in the X or y direction. The ion detector outside the trap detects the ejected ions to obtain the corresponding grammar map.
多用途大容量多级线性离子阱系统的单个捕获区域的基本工作原理与已 有的线性离子阱理论相同。 当电极组 10所接入的 RF信号的直流部分为零时, 工作状态对应于稳定性图中的 q轴。 初始 RF幅度将决定稳定离子质荷比的下 限, 所有质荷比大于或等于该下限的离子均可被离子阱捕获, 储存在离子阱 中。通过设置电极组上的初始 RF幅度即可调整该区域所储存离子的质量下限。  The basic operating principle of a single capture region for a multi-purpose, high-capacity, multi-stage linear ion trap system is the same as for the existing linear ion trap theory. When the DC portion of the RF signal to which the electrode group 10 is connected is zero, the operating state corresponds to the q-axis in the stability map. The initial RF amplitude will determine the lower limit of the stable ion mass-to-charge ratio. All ions with a mass-to-charge ratio greater than or equal to this lower limit can be captured by the ion trap and stored in the ion trap. The lower limit of the mass of ions stored in this region can be adjusted by setting the initial RF amplitude on the electrode set.
实现离子分离有两种工作方式: RF/DC分离与 AC波形分离。 RF/DC分离 以离子运动稳定性图为基础, 通过使离子在稳定性图边界处运动状态由稳定 变为不稳定, 从而将不稳定离子发射出离子阱。 RF/DC分离的工作过程是根据 分离的需要选择要保留在离子阱中的离子, 计算所保留离子的状态参数 ( ai 5 qi ), 使其状态点 ^ cii ) 落在稳定三角形顶点附近, 然后根据计算结果 调整 y极杆上的 RF分量并同时接入 DC分量,使目标离子状态点变为( a q, ), 此时, 其他的离子就落入非稳定区域, 从而将目标离子与其他离子分离开来。 There are two ways to achieve ion separation: RF/DC separation and AC waveform separation. The RF/DC separation is based on the ion motion stability map, and the unstable ions are emitted out of the ion trap by changing the state of the ions from stable to unstable at the boundary of the stability map. The working process of RF/DC separation is to select the ions to be retained in the ion trap according to the separation needs, and calculate the state parameter ( a i 5 qi ) of the retained ions so that the state point ^ cii ) falls near the apex of the stable triangle. Then, according to the calculation result, the RF component on the y-pole is adjusted and the DC component is simultaneously input, so that the target ion state point becomes (aq, ), and at this time, other ions fall into the unstable region, thereby the target ion and other The ions are separated.
AC 波形分离是以离子运动基频与离子状态之间的关系为基础, 激发后 z 方向振幅响应正比于该激发波形本身的 Four ier 变换, 离子响应与离子轴向 振荡频率无关, 也与离子的质荷比无关。 质荷比为 m/z 的离子所受的激发仅 由在盾荷比所对应频率下的激发幅度大小所决定。 以离子运动基频作为纽带, 并不需要对离子轨迹进行精确的计算就可以确定受激后离子的轴向振幅, 只 要在相应的电极对上接入与分离目的相对应的 AC波形, 即可同时实现对多个 目标离子的选择性激发与逐出。 The AC waveform separation is based on the relationship between the fundamental frequency of the ion motion and the ion state. The amplitude response in the z direction after excitation is proportional to the Fourier transform of the excitation waveform itself. The ion response is independent of the ion axis oscillation frequency, and also with the ion. The mass-to-charge ratio has nothing to do. The excitation of ions with a mass-to-charge ratio of m/z is determined only by the magnitude of the excitation amplitude at the corresponding frequency of the shield-to-charge ratio. Using the ion motion fundamental frequency as a link, It is not necessary to accurately calculate the ion trajectory to determine the axial amplitude of the excited ions. As long as the AC waveform corresponding to the separation purpose is connected to the corresponding electrode pair, multiple target ions can be simultaneously realized. Selective excitation and eviction.
在多用途大容量线性离子阱中常常需要对单个目标离子进行选择性共振 激发与逐出, 即 AC共振激发与逐出, 其本盾上是 AC波形分离的一个特例, 即目标离子运动基频为某一频率值, 而非某一频带。 在如图 6 所示的线性离 子阱中, AC信号加在两个 X极上, 可实现离子沿 X方向的共振激发与逐出。  In a multi-purpose large-capacity linear ion trap, it is often necessary to perform selective resonance excitation and eviction of a single target ion, that is, AC resonance excitation and eviction. On the shield, a special case of AC waveform separation is the target ion motion fundamental frequency. Is a certain frequency value, not a certain frequency band. In the linear ion trap shown in Figure 6, the AC signal is applied to the two X poles to achieve resonant excitation and eviction of the ions along the X direction.
多用途大容量多级线性离子阱系统的质量分析是通过对离子进行选择, 使目标离子由稳定变为不稳定, 从而将其逐出离子阱, 实现离子检测。 选择 性不稳定检测可分为边界发射与 AC共振逐出两种方式。 边界发射, 是以稳定 性图 q轴上的稳定边界点作为工作点, DC电压幅度为零, 通过扫描 RF电压幅 度(上升扫描), 使离子按照质荷比从小到大的顺序进入不稳定状态, 不稳定 离子将被逐出离子阱, 到达阱外的离子检测系统 , 接收并放大相应的电信号, 就可得到相应的质谱图。 AC共振逐出利用了离子运动基频与离子所处状态之 间的关系, 通过扫描 RF, 改变离子的运动基频, 当离子的基频与 AC信号的频 率相等时, 离子在 X方向的振幅将迅速显箸增大, 从 X极板中央的狹缝处离 开离子阱, 进入外部检测电路。  The mass analysis of the multi-purpose large-capacity multi-stage linear ion trap system is performed by selecting ions to make the target ions from stable to unstable, thereby driving them out of the ion trap for ion detection. Selective instability detection can be divided into two ways: boundary emission and AC resonance eviction. The boundary emission is based on the stable boundary point on the q-axis of the stability diagram as the operating point. The DC voltage amplitude is zero. By scanning the RF voltage amplitude (rising scan), the ions enter the unstable state according to the mass-to-charge ratio from small to large. The unstable ions will be ejected from the ion trap, reach the ion detection system outside the well, receive and amplify the corresponding electrical signal, and the corresponding mass spectrum can be obtained. The AC resonance eviction utilizes the relationship between the fundamental frequency of the ion motion and the state of the ion. By scanning RF, the fundamental frequency of the ion is changed. When the fundamental frequency of the ion is equal to the frequency of the AC signal, the amplitude of the ion in the X direction. It will increase rapidly, leaving the ion trap from the slit in the center of the X-plate and entering the external detection circuit.
在进行质谱分析时常需要对物质的结构进行鉴定, MSn实验就是该项分析 的基础。 在 MSn 实验中, 需要使目标离子裂解为碎片离子, 通过对碎片离子 进行质语扫描确定碎片离子的种类, 从而确定目标离子的组成结构。 目标离 子的裂解有多种实现方式,常用的有:利用离子与緩冲气发生碰撞产生的 CID, 利用离子离子反应发生的电子俘获裂解(ECD )和电子转移裂解(ETD )等。 在多用途大容量多级线性离子阱系统中, 每个离子捕获区域都可作为一个独 立的反应室, 多个离子捕获区域的设计就为 MSn提供了充分的基^条件, 通过 分配各个区域的功能, 可开展多种过程的 MSn实验。 It is often necessary to identify the structure of a substance during mass spectrometry. The MS n experiment is the basis of this analysis. In the MSn experiment, it is necessary to cleave the target ions into fragment ions, and determine the type of the fragment ions by performing a qualitative scan on the fragment ions to determine the composition structure of the target ions. There are many ways to achieve the cleavage of target ions. Commonly used are: CID generated by collision of ions with buffer gas, electron capture cleavage (ECD) and electron transfer cleavage (ETD) by ion-ion reaction. In a multi-purpose, large-capacity multi-stage linear ion trap system, each ion trapping region can be used as a separate reaction chamber. The design of multiple ion trapping regions provides sufficient conditions for MS n by assigning regions. The ability to perform MS n experiments on a variety of processes.
多用途大容量多级线性离子阱系统的每一个离子捕获区域都具备独立实 现选择性离子存储、 分离、 反应 /裂解、 分析的功能, 当多个离子捕获区域协 同工作时, 就可组合出多种分析过程 /方法, 这也使得该多级线性离子阱系统 具有广泛的适应性, 并具备多样化的功能。 Each ion capture region of a multi-purpose, high-capacity, multi-stage linear ion trap system is self-contained The function of selective ion storage, separation, reaction/cracking, and analysis, when multiple ion trapping regions work together, can combine a variety of analytical processes/methods, which also makes the multistage linear ion trap system widely available. Adaptable and versatile.
图 2 所示的是具有三个电极组的多用途大容量多级线性离子阱系统, 其 结构和电压信号连接方式与图 1的类似, 只是比图 1增加了一个电极组 10 , 相应增加了一个离子捕获区域 I I I和一组连接到电极组 10上的电压信号。 由 于增加了一个离子捕获区域 111,该多用途大容量线多级性离子阱系统的工作 方式就更具多样化。 本发明中, 具有三个以上电极组 10的多级线性离子阱系 统的结构与上述图 1、 图 2的结构相类似, 只是电极组 10的数目发生变化, 电极组 10的数目越多, 该多用途大容量线多级性离子阱系统的工作方式就越 多样化, 在此不再——详述。  Figure 2 shows a multi-purpose, high-capacity multi-stage linear ion trap system with three electrode sets. The structure and voltage signal connections are similar to those of Figure 1, except that an electrode group 10 is added to Figure 1, which is increased accordingly. An ion trapping region III and a set of voltage signals connected to the electrode group 10. Due to the addition of an ion trapping region 111, the multi-purpose, high-capacity multi-level ion trap system works in a more diverse manner. In the present invention, the structure of the multi-stage linear ion trap system having three or more electrode groups 10 is similar to that of the above-described FIGS. 1 and 2, except that the number of electrode groups 10 changes, and the number of electrode groups 10 increases. The more diverse the multi-purpose, high-capacity multi-stage ion trap system works, it is no longer detailed.
多用途大容量多级线性离子阱系统的电极组 10的电极可以采用各种可产 生四极场的电极形状, 如图 3a-图 3d所示的双曲型电极, 圆柱电极, 横截面 边缘逐级收缩的电极, 矩形平板电极等。  The electrode of the electrode group 10 of the multi-purpose large-capacity multi-stage linear ion trap system can adopt various electrode shapes capable of generating a quadrupole field, as shown in Figures 3a to 3d, a hyperbolic electrode, a cylindrical electrode, and a cross-sectional edge Graded shrinkage electrode, rectangular plate electrode, etc.
在多用途大容量多级线性离子阱系统中, 端电极 5、 6可以是沿 xy平面 放置的平板电极, 如图 1和图 2所示; 也可以是平行于 z轴的四个电极组成 的多极杆, 如图 4的端电极 5、 6采用四极杆, 各电极在 xy平面内按照各间 隔 90度放置; 还可以是平板电极与多极杆的組合, 如图 5所示。 平板端电极 上可接入 DC电压, 多极杆端电极上可接入 RF电压或 DC电压或二者的组合。 端电极 5、 6的主要作用是产生沿 z轴方向的电势阱, 在 z方向上将离子限制 在离子阱的捕获区中。  In a multi-purpose large-capacity multi-stage linear ion trap system, the terminal electrodes 5, 6 may be plate electrodes placed along the xy plane, as shown in Figures 1 and 2; or may be composed of four electrodes parallel to the z-axis. The multipole rods, such as the terminal electrodes 5, 6 of Fig. 4, are quadrupole rods, and the electrodes are placed at intervals of 90 degrees in the xy plane; it may also be a combination of a plate electrode and a multipole rod, as shown in Fig. 5. The DC voltage can be connected to the flat-end electrode, and the RF voltage or DC voltage or a combination of the two can be connected to the multi-pole rod electrode. The main function of the terminal electrodes 5, 6 is to generate a potential well along the z-axis direction, confining the ions in the trapping region of the ion trap in the z-direction.
如图 1、 2、 4和 5所示, 线性离子阱中可在电极组 10的至少一个电极上 开设平行于 z轴的狭缝(7和 8 ), 并在子 X或 y电极对上接入 AC信号, 实现 沿 X或 y方向激发离子或将离子逐出离子阱; 也可在平板端电极上开设小孔 或狭缝, 实现沿 z方向激发离子或将离子逐出离子阱; 还可将上述各方式任 意組合, 实现多方向激发离子或将离子逐出离子阱。 电极组 10上的狭缝有多种开设方案, 可以在每个电极组 10的 X电极对 上均开设狭缝, 也可以在每个电极组 10的 y电极对上均开设狭缝, 还可以在 保证每个电极組 10至少开一条狭缝的前提下, 各子电极组 10之间采用组合 式狭缝, 或者开在 X电极, 或者开在 y电极, 实现根据需要任意组合。 作为 一种可选的例子, 两个或两个以上电极组 10的狭缝可开设在位于同一周向位 置的电极上(如图 1、 图 2所示)。 进一步, 如图 8所示, 所述两个或两个以 上的电极组 10的狭缝可呈直线排列, 以便于一体加工出该两个或两个以上的 狭缝。 电极上的狭缝和端电极 5、 6上的小孔或狭缝都可作为样品或离子的入 口或出口, 通过组合可以实现沿 x、 y或 z方向的多入口或多出口分析模式。 As shown in Figures 1, 2, 4 and 5, slits (7 and 8) parallel to the z-axis can be formed in at least one electrode of the electrode group 10 in the linear ion trap and connected to the sub-X or y electrode pairs. Injecting an AC signal to excite ions in the X or y direction or to eject ions out of the ion trap; or to create a small hole or slit in the end electrode of the plate to excite ions in the z direction or to eject ions out of the ion trap; Each of the above modes is arbitrarily combined to realize multi-directional excitation of ions or ejection of ions from the ion trap. There are various openings for the slits on the electrode group 10, and slits may be formed on the X electrode pairs of each electrode group 10, or slits may be formed on the y electrode pairs of each electrode group 10. Under the premise of ensuring that at least one slit is formed in each electrode group 10, a combination slit is used between each of the sub-electrode groups 10, or is opened on the X electrode or on the y electrode, and is arbitrarily combined as needed. As an alternative example, the slits of two or more electrode sets 10 can be placed on electrodes located in the same circumferential position (as shown in Figures 1, 2). Further, as shown in FIG. 8, the slits of the two or more electrode groups 10 may be arranged in a line so as to integrally process the two or more slits. The slits on the electrodes and the small holes or slits in the terminal electrodes 5, 6 can be used as inlets or outlets for the sample or ions, and a multi-inlet or multi-outlet analysis mode in the x, y or z direction can be achieved by combination.
多用途大容量线性离子阱可以使用外离子源电离方式, 也可以使用内离 子源电离方式, 还可以使用内外离子源相结合的电离方式。 离子阱的多入口 模式使得可以与两个或两个以上的离子源相连。 在多个外离子源的情况下, 离子源的离子传输系统可通过端盖上的小孔 /狹缝将离子导入阱内, 也可以通 过 RF电极上得狹缝将离子导入阱内。 图 6所示的是一个双离子源双检测器多 用途大容量线性离子阱, 两个离子源产生的离子分别从两个平板端电极上的 小孔进入阱内, 对离子开展质量分析时采用径向离子逐出, 在两个狭缝外设 置了检测器, 分别检测从两个离子捕获区域中逐出的离子。 图 7 所示的是一 个多离子源多检测器多用途大容量多级线性离子阱系统的组合示意图, 可根 据具体需要在各离子源或检测器位置连接相应的装置, 在空间三维实现组合 式的多离子源多检测盾谱分析方案。  The multi-purpose large-capacity linear ion trap can be ionized by an external ion source, or ionized by an internal ion source, or ionized by a combination of internal and external ion sources. The multiple inlet mode of the ion trap allows for connection to two or more ion sources. In the case of multiple external ion sources, the ion transport system of the ion source can introduce ions into the well through small holes/slits in the end cap, or can introduce ions into the well through slits in the RF electrode. Figure 6 shows a dual-ion source dual detector multi-purpose high-capacity linear ion trap. The ions generated by the two ion sources enter the well from the small holes on the two flat-end electrodes, respectively. The radial ions are ejected, and detectors are disposed outside the two slits to detect ions ejected from the two ion trapping regions, respectively. Figure 7 shows a combination of a multi-source multi-detector multi-purpose high-capacity multi-stage linear ion trap system. The corresponding device can be connected to each ion source or detector position according to specific needs, and the combination can be realized in space three-dimensional. Multi-ion source multi-detection shield analysis program.
在上述结构的多用途大容量多级线性离子阱系统, 通过将电极组 10沿 z 方向设置两个或两个以上, 就可实现离子阱分析功能的扩展, 根据分析目的 的需要, 设置分析方法就可开展所需的分析实验。 该离子阱具有广泛的适应 性, 当只利用其中一个离子捕获区域作为分析区域时, 或所有离子阱单元上 都接入相同的信号, 就等效于已有的单离子阱质量分析器; 当利用多个子区 域协同工作时, 通过定义各个离子捕获区域的功能, 如选择性储存、 分离、 离子反应或分析区域, 或其组合, 就可提供多种工作模式, 包括已有的空间 顺序流通 MSn分析实验, 空间串联与时间串联相组合 MSn阵列式分析实验。 组 合式的工作模式不仅实现已有的 MSn分析技术, 更为探索中的 MSn分析方法提 供一个强有力的工具, 帮助科学家们验证或实现更多的物质结构研究的可能 技术路线。 In the multi-purpose large-capacity multi-stage linear ion trap system of the above structure, by providing two or more electrode groups 10 in the z direction, the ion trap analysis function can be expanded, and the analysis method can be set according to the needs of the analysis purpose. The required analytical experiments can be carried out. The ion trap has wide adaptability. When only one of the ion trapping regions is used as the analysis region, or all ion trap units are connected to the same signal, it is equivalent to the existing single ion trap mass analyzer; By working with multiple sub-areas, by defining the functions of each ion-trapping area, such as selective storage, separation, The ion reaction or analysis region, or a combination thereof, provides a variety of modes of operation, including existing spatial sequential flow MS n analysis experiments, spatial series and time series combination MS n array analysis experiments. The combined working mode not only implements the existing MS n analysis technology, but also provides a powerful tool for exploring MS n analysis methods to help scientists verify or implement more possible technical routes for material structure research.
本发明还提出了一种一体化电极加工方法。  The invention also proposes an integrated electrode processing method.
一体化电极加工方法的基本步驟包括: 首先采用非金属材料为基体, 加 工成具有所需的 RF电极形状的电极基体, 如双曲电极、 圆柱电极、 矩形平板 电极、 可解析为多个薄层单元的优化场型电极, 然后在该非金属电极基体的 表面覆上一层金属导体膜, 最后在需要绝缘的部位磨掉或车掉金属膜。 在这 一加工方法中, 非金属材料可以选用陶瓷材料, 金属膜可以选用以金为主要 成分的导体材料, 如高纯度的金。 该一体化电极加工方法尤其适用于需要将 电极分为多个部分的情况, 本申请所提出的多用途大容量线性离子阱的电极 就可采用该方法加工而成。  The basic steps of the integrated electrode processing method include: firstly, using a non-metal material as a substrate, processing into an electrode substrate having a desired RF electrode shape, such as a hyperbolic electrode, a cylindrical electrode, a rectangular plate electrode, and being analyzable into a plurality of thin layers The optimized field electrode of the unit is then coated with a metal conductor film on the surface of the non-metal electrode substrate, and finally the metal film is worn away or removed at the portion where insulation is required. In this processing method, a non-metallic material may be selected from a ceramic material, and a metal film may be selected from a conductor material containing gold as a main component, such as high-purity gold. The integrated electrode processing method is particularly suitable for the case where the electrode needs to be divided into a plurality of parts, and the electrode of the multi-purpose large-capacity linear ion trap proposed in the present application can be processed by the method.
例如, 作为一种可选的例子, 本发明的多级线性离子阱系统的加工方法 可包括如下步骤:  For example, as an alternative example, the processing method of the multi-stage linear ion trap system of the present invention may include the following steps:
形成一对一体化电极作为一对 X 电极, 形成一对一体化电极作为一对 y 电极, 其中每个一体化电极均采用上述一体化电极的加工方法形成;  Forming a pair of integrated electrodes as a pair of X electrodes, forming a pair of integrated electrodes as a pair of y electrodes, wherein each integrated electrode is formed by the above-described integrated electrode processing method;
在所述的一对 X电极和一对 y电极的最外端两侧设置一对端电极。  A pair of terminal electrodes are provided on both sides of the outermost ends of the pair of X electrodes and the pair of y electrodes.
这样, X电极对和 y电极对均是一体化电极,每个 X一体化电极通过去掉 金属膜而形成两个或两个以上的 X子电极, 每个 y—体化电极通过去掉金属 膜而形成两个或两个以上的 y子电极, 而每一组相对应的 X子电极对和 y子 电极对可以定义出一个离子捕获区域, 构成为本发明的一个电极组, 从而一 对该一体化 X电极和一对 y电极即可形成本发明的端电极之间的两个或两个 以上的电极组。  Thus, the X electrode pair and the y electrode pair are integrated electrodes, and each X integrated electrode forms two or more X sub-electrodes by removing the metal film, and each y-body electrode is removed by removing the metal film. Two or more y sub-electrodes are formed, and each of the corresponding X sub-electrode pairs and y sub-electrode pairs can define an ion trapping region, which constitutes an electrode group of the present invention, thereby forming a pair The X electrode and the pair of y electrodes can form two or more electrode groups between the terminal electrodes of the present invention.
作为另外一种可选的例子, 本发明的多级线性离子阱系统的加工方法可 包括如下步骤: As another optional example, the processing method of the multi-stage linear ion trap system of the present invention may be Including the following steps:
形成一对一体化电极作为一对 X 电极, 形成一对一体化电极作为一对 y 电极, 其中每个一体化电极均采用上述一体化电极的加工方法形成;  Forming a pair of integrated electrodes as a pair of X electrodes, forming a pair of integrated electrodes as a pair of y electrodes, wherein each integrated electrode is formed by the above-described integrated electrode processing method;
将所述的一对 X电极和一对 y电极中的最外端两侧的子电极设置成一对 端电极。  The pair of X electrodes and the sub-electrodes on both sides of the outermost end of the pair of y electrodes are provided as a pair of terminal electrodes.
这样, 本发明多级线性离子阱系统的端电极与电极组都通过一体化电极 来形成, 从而省略了端电极与电极组之间的装配。  Thus, the terminal electrode and the electrode group of the multistage linear ion trap system of the present invention are formed by integrating electrodes, thereby omitting the assembly between the terminal electrode and the electrode group.
作为再一种可选的例子, 本发明的多級线性离子阱系统的加工方法可包 括如下步骤:  As still another alternative example, the processing method of the multi-stage linear ion trap system of the present invention may include the following steps:
形成一对一体化电极作为一对 X 电极, 形成一对一体化电极作为一对 y 电极, 其中每个一体化电极均上述一体化电极的加工方法形成;  Forming a pair of integrated electrodes as a pair of X electrodes, forming a pair of integrated electrodes as a pair of y electrodes, wherein each integrated electrode is formed by a method of processing the integrated electrodes;
在所述的一对 电极和一对 y电极中的最外端两侧设置有一对平板电极, 将所述的一对平板电极和相应的一体化电极上的与之相邻的子电极共同构成 一对端电极。  A pair of plate electrodes are disposed on both sides of the outermost end of the pair of electrodes and the pair of y electrodes, and the pair of plate electrodes and the sub-electrodes adjacent thereto on the corresponding integrated electrodes are configured together A pair of terminal electrodes.
图 8、图 9所示的是电极采用一体化方法加工而成的多用途大容量线性离 子阱, 电极的形状为双曲形, 每个一体化电极分为三个子电极, 从而具有三 个或三个以上的电极组 10, 其中图 8中的深色的表面表示覆有金膜, 白色表 面表示去掉金膜的陶瓷基体表面, 各个电极组的 X 电极上都开设了狭缝, 同 一个 X 电极上的三条狭缝是连成一体的, 即在陶瓷基体电极的加工过程中开 设了一条长狭缝, 在后续步驟中把电极分成三个部分的同时也把狭缝分成了 三个部分。 这样的一次开缝加工方法大大简化了加工程序, 并保证了各部分 狭缝均勾且在同一直线上。  Figure 8 and Figure 9 show the multi-purpose large-capacity linear ion trap processed by the integrated method. The shape of the electrode is hyperbolic. Each integrated electrode is divided into three sub-electrodes, thus having three or More than three electrode groups 10, wherein the dark surface in Fig. 8 indicates that the gold film is covered, the white surface indicates the surface of the ceramic substrate from which the gold film is removed, and the slits of the X electrodes of the respective electrode groups are opened, the same X The three slits on the electrode are connected in one piece, that is, a long slit is opened during the processing of the ceramic base electrode, and the slit is divided into three parts while dividing the electrode into three parts in the subsequent step. This one-time slitting method greatly simplifies the machining process and ensures that the slits of each part are hooked and on the same line.
已有的加工方法中, 通常采用金属材料直接加工出各个部分的电极, 然 后采用绝缘材料将各部分组合装配起来, 这就要求必须具备精密的装配技术, 而这一技术已成为目前离子阱加工制造的一大瓶颈。 釆用一体化的加工方式, 可以保证同一电极上各个部分的均勾性, 从而降低装配技术的难度。 本发明不局限于上述实施例的具体结构, 其中, 可根据需要调整电极组 所分的端部分数及各部分尺寸、 比例, 离子源和检测器的连接位置等, 凡是 基于本发明的同一思路, 均属本发明的范围。 In the existing processing methods, the electrode of each part is usually directly processed by a metal material, and then the parts are assembled by using an insulating material, which requires precise assembly technology, and this technology has become the current ion trap processing. A big bottleneck in manufacturing.一体化Using an integrated processing method, the uniformity of each part on the same electrode can be ensured, thereby reducing the difficulty of assembly technology. The present invention is not limited to the specific structure of the above embodiment, wherein the number of end portions divided by the electrode group, the size and proportion of each part, the connection position of the ion source and the detector, and the like can be adjusted as needed, and the same idea based on the present invention All are within the scope of the invention.
与已有的多个离子阱直接串联组成的组合式离子阱相比, 本申请提出的 多用途大容量线性离子阱的结构更为简化, 只从结构方面来比较, 似乎只是 省略了端电极而直接将多个 RF电极组串联起来, 然而这样的省略却能为离子 阱的控制、 调试与制造带来卓越的变革。 在每一个限定出离子捕获区域的电 极组上都接入 RF+DC 的组合信号, 对于离子运动的控制方面有着显著的优越 性。 当进行离子传输转移过程的控制时, 通过调整 DC分量可实现如已有技术 中端电极的功能, 而通过调整 RF分量则可在离子传输的过程对离子辅助施加 一个向中心轴聚焦的电场力, 使得离子在转移过程中既在轴向受控, 又在径 向受控。 而在已有技术中, 端电极上只有 DC信号, 离子阱与端电极之间存在 严重的边缘场效应, 从而导致离子传输效率显著下降, 随着串联级数的增加, 将会使得由于离子损失过于严重而无法开展相应的分析过程, 成为限制离子 处理级数的主要因素之一。 采用本发明所提出的方案, 在缩短离子传输路程 的同时又可降低边缘场效应的影响, 使离子三维受控, 有效改善离子传输效 率, 从而提高仪器开展多级离子分析的灵敏度, 这对于开展组合式过程分析 来说是至关重要的。 另外, 在控制电路方面, 可以省去相邻阱之间的端电极 上的 DC或 AC信号, 在具有两个电极组时, 可省去一个端电极的信号, 其优 越性似乎不够明显, 但随着电极组数量增多, 这一优势就尤为显著。 仪器调 试方面, 少一个端电极, 离子的阱内损失就会相应减少, 从而减少一个对仪 器性能的影响因素。 在制造方面, 没有端盖的分隔, 就可采用一体化电极的 加工方式, 降低装配方面的难度。  The structure of the multi-purpose large-capacity linear ion trap proposed by the present application is more simplified than that of the combined ion traps in which a plurality of ion traps are directly connected in series. It is only a structural comparison, and it seems that only the terminal electrodes are omitted. Multiple RF electrode sets are connected in series directly, but such omissions can bring about revolutionary changes in the control, commissioning and manufacturing of ion traps. The combined signal of RF+DC is connected to each of the electrode groups defining the ion trapping region, which has significant advantages in the control of ion motion. When the control of the ion transport transfer process is performed, the function of the terminal electrode as in the prior art can be realized by adjusting the DC component, and the electric field force focused on the central axis can be applied to the ion assist during the ion transport process by adjusting the RF component. , so that the ions are controlled both in the axial direction and in the radial direction during the transfer process. In the prior art, only the DC signal is present on the terminal electrode, and there is a severe fringing field effect between the ion trap and the terminal electrode, resulting in a significant decrease in ion transport efficiency. As the number of series stages increases, ion loss will occur. Being too serious to carry out the corresponding analysis process has become one of the main factors limiting the number of ion treatment stages. By adopting the scheme proposed by the invention, the ion transmission path can be shortened, the influence of the fringe field effect can be reduced, the ion can be controlled in three dimensions, and the ion transmission efficiency can be effectively improved, thereby improving the sensitivity of the instrument for performing multi-level ion analysis, which is carried out Combined process analysis is critical. In addition, in the control circuit, the DC or AC signal on the terminal electrode between adjacent wells can be omitted, and when there are two electrode groups, the signal of one terminal electrode can be omitted, and the superiority does not seem obvious enough, but This advantage is particularly significant as the number of electrode sets increases. In the instrument debugging, the loss of the ion trap is reduced by one less electrode, which reduces the influence on the performance of the instrument. In terms of manufacturing, without the separation of the end caps, the integrated electrode can be processed to reduce the difficulty of assembly.
总之, 本申请所提出的多用途大容量线性离子阱能够将已有的单离子阱 和组合式离子阱的功能集于一身, 具有广泛的适用性, 并且能够有效提高离 子传输效率从而提高多級离子分析的灵敏度, 为生物、 制药、 离子化学等领 域的发展提供了一种强有力的研究工具。 同时, 本发明所提出的具有组合式 功能的离子阱并不是基于多个离子阱串联的设计方案, 从整体来说它本身只 是一个线性离子阱, 通过设计多个离子捕获区域, 实现该离子阱的组合式分 析功能。 基于这样的 "一个离子阱实现组合式功能" 的发明设计方案, 使得 该离子阱结构相对简单, 减轻了盾语仪器控制和调试的工作复杂性, 并延伸 出本发明所提出的一体化电极加工方法, 从而降低离子阱的装配难度。 该多 級线性离子阱系统为离子阱质量分析器和质谱仪器的发展提供了一种适应性 强、 功能多样、 易于加工装配、 成本相对低廉的切实可行的实施方案, 也将 会大力推动生物、 制药、 离子化学等领域的分析技术的发展。 In summary, the multi-purpose large-capacity linear ion trap proposed in the present application can combine the functions of the existing single ion trap and the combined ion trap, has wide applicability, and can effectively improve ion transport efficiency and thereby improve multi-level. Sensitivity of ion analysis for bio, pharmaceutical, ion chemistry, etc. The development of the domain provides a powerful research tool. At the same time, the ion trap with combined function proposed by the present invention is not based on a design scheme of multiple ion traps in series. As a whole, it is only a linear ion trap itself, and the ion trap is realized by designing a plurality of ion trapping regions. Combined analysis capabilities. Based on such an invention design scheme of "one ion trap realizes combined function", the ion trap structure is relatively simple, the work complexity of shield instrument control and debugging is reduced, and the integrated electrode processing proposed by the present invention is extended. The method thus reduces the assembly difficulty of the ion trap. The multi-stage linear ion trap system provides a practical and adaptable solution for the development of ion trap mass analyzers and mass spectrometers, which is adaptable, versatile, easy to process and assemble, and relatively low in cost. Development of analytical techniques in the fields of pharmaceuticals, ion chemistry, etc.

Claims

权利要求书 Claim
1、 一种多级线性离子阱系统, 该系统包括:  1. A multi-stage linear ion trap system, the system comprising:
两个或两个以上的电极组, 其中每个电极组包括 X电极对和 y电极对, 以定义出一个离子捕获区域; 该些电极組沿离子阱系统的中心轴 z轴排列; 在每个电极组的至少一个电极上设有狹缝; 并且在每个电极组上均连接有射 频信号和直流信号的组合信号;  Two or more electrode sets, wherein each electrode set includes an X electrode pair and a y electrode pair to define an ion trapping region; the electrode sets are arranged along the z axis of the central axis of the ion trap system; a slit is disposed on at least one electrode of the electrode group; and a combined signal of a radio frequency signal and a direct current signal is connected to each electrode group;
端电极, 其连接有直流信号, 并且该端电极设置成, 仅具有一对, 并分 别设置在该些电极组的沿所述离子阱系统的中心轴 z轴的两个最外侧端。  The terminal electrodes are connected to a direct current signal, and the terminal electrodes are disposed to have only one pair and are disposed at the two outermost ends of the electrode groups along the z-axis of the central axis of the ion trap system, respectively.
2、 如权利要求 1所述的多级线性离子阱系统, 其特征在于, 在电极组的 X极杆对或 Y极杆对上开均设有所述的狭缝。  2. The multi-stage linear ion trap system of claim 1 wherein said slit is provided in either the X pole pair or the Y pole pair of the electrode set.
3、 如权利要求 1所述的多级线性离子阱系统, 其特征在于, 该两个或两 个以上的电极组在位于同一周向位置的电极上开设所述的狭缝。  3. The multi-stage linear ion trap system of claim 1 wherein the two or more electrode sets open the slits in electrodes located at the same circumferential position.
4、 如权利要求 3所述的多级线性离子阱系统, 其特征在于, 所述两个或 者两个以上的电极组的电极上的狹缝可沿 Z轴方向呈直线排列。  The multi-stage linear ion trap system according to claim 3, wherein the slits on the electrodes of the two or more electrode groups are linearly arranged in the Z-axis direction.
5、 如权利要求 1所述的多级线性离子阱系统, 其特征在于, 在所述的 X 电极对上或 y电极对上连接有 AC电压, 用于沿 X方向或 y方向激发或逐出离 子上; 或者在一对端电极上连接有 AC电压, 从而沿 z方向激发或逐出离子。  5. The multi-stage linear ion trap system according to claim 1, wherein an AC voltage is connected to the X electrode pair or the y electrode pair for exciting or ejecting in the X direction or the y direction. On the ion; or an AC voltage is connected to the pair of terminal electrodes to excite or dislodge ions in the z direction.
6、 如权利要求 1所述的多级线性离子阱系统, 其特征在于, 所述的一对 端电极为沿 xy平面放置的平板电极, 或为平行于 z轴的多极杆, 或为平板电 极与多极杆的组合。  6. The multi-stage linear ion trap system according to claim 1, wherein said pair of terminal electrodes are plate electrodes placed along an xy plane, or a multipole rod parallel to the z-axis, or a flat plate The combination of an electrode and a multipole.
7、 如权利要求 6所述的多级线性离子阱系统, 其特征在于, 至少一个所 述平板端电极具有小孔或狹缝, 用于样品或离子的注入或出射。  7. The multi-stage linear ion trap system of claim 6 wherein at least one of said flat end electrodes has apertures or slits for injection or ejection of the sample or ions.
8、 如权利要求 1 所述的多级线性离子阱系统, 其特征在于, 所述线性 离子阱系统所使用的离子源为外离子源或内离子源, 或二者的組合。  8. The multi-stage linear ion trap system of claim 1 wherein the ion source used in the linear ion trap system is an external ion source or an internal ion source, or a combination of the two.
9、 如权利要求 1所述的多级线性离子阱系统, 其特征在于, 所述线性离 子阱系统至少使用两个离子源。 9. The multi-stage linear ion trap system of claim 1 wherein said linear ion trap system uses at least two ion sources.
10、 如权利要求 1 所述的多级线性离子阱系统, 其特征在于, 所述两个 或者两个以上的电极组这样形成, 以非金属材料为基体加工成具有所需的电 极形状的电极基体; 在上述电极基体表面覆金属膜; 在与每两相邻电极组之 间的位置相对应的部位去掉金属膜, 从而形成所述两个或者两个以上的电极 组。 10. The multi-stage linear ion trap system according to claim 1, wherein the two or more electrode groups are formed such that the non-metallic material is used as a substrate to form an electrode having a desired electrode shape. a substrate; a metal film is coated on the surface of the electrode substrate; and a metal film is removed at a portion corresponding to a position between each two adjacent electrode groups, thereby forming the two or more electrode groups.
11、 一种一体化电极的加工方法, 该方法包括如下步骤:  11. A method of processing an integrated electrode, the method comprising the steps of:
以 金属材料为基体加工成具有所需电极形状的电极基体;  Processing an electrode substrate having a desired electrode shape with a metal material as a base;
在电极基体表面覆金属膜;  Coating a metal film on the surface of the electrode substrate;
在需要绝缘的部位去掉金属膜, 从而形成两个或两个以上相互绝缘的子 电极。  The metal film is removed at a portion where insulation is required, thereby forming two or more sub-electrodes insulated from each other.
12、 如权利要求 11所述的一体化电极加工方法, 其特征在于, 所述非金 属材料为陶瓷。  The integrated electrode processing method according to claim 11, wherein the non-metallic material is ceramic.
13、 如权利要求 11所述的一体化电极加工方法, 其特征在于, 所述金属 膜釆用以金为主要成分的导体材料。  The integrated electrode processing method according to claim 11, wherein the metal film is made of a conductor material containing gold as a main component.
14、 一种多級线性离子阱系统的加工方法, 该方法包括如下步骤: 形成一对一体化电极作为一对 X 电极, 形成一对一体化电极作为一对 y 电极, 其中每个一体化电极均采用权利要求 11所述的方法形成;  14. A method of processing a multi-stage linear ion trap system, the method comprising the steps of: forming a pair of integrated electrodes as a pair of X electrodes, forming a pair of integrated electrodes as a pair of y electrodes, wherein each integrated electrode All formed by the method of claim 11;
在所述的一对 X电极和一对 y电极的最外端两侧设置一对端电极。  A pair of terminal electrodes are provided on both sides of the outermost ends of the pair of X electrodes and the pair of y electrodes.
15、如权利要求 14所述的多级线性离子阱系统的加工方法,其特征在于, 所述非金属材料为陶瓷。  The method of processing a multi-stage linear ion trap system according to claim 14, wherein the non-metallic material is ceramic.
16、如权利要求 14所述的多级线性离子阱系统的加工方法,其特征在于, 所述金属膜采用以金为主要成分的导体材料。  The method of processing a multi-stage linear ion trap system according to claim 14, wherein the metal film is made of a conductor material containing gold as a main component.
17、 一种多级线性离子阱系统的加工方法, 该方法包括如下步骤: 形成一对一体化电极作为一对 X 电极, 形成一对一体化电极作为一对 y 电极, 其中每个一体化电极均采用权利要求 11所述的方法形成;  17. A method of processing a multi-stage linear ion trap system, the method comprising the steps of: forming a pair of integrated electrodes as a pair of X electrodes, forming a pair of integrated electrodes as a pair of y electrodes, wherein each integrated electrode All formed by the method of claim 11;
将所述的一对 X电极和一对 y电极中的最外端两侧的子电极设置成一对 端电极。 Providing a pair of the pair of X electrodes and the pair of y electrodes on the outermost sides of the pair of y electrodes Terminal electrode.
18、如权利要求 17所述的多级线性离子阱系统的加工方法,其特征在于, 所述非金属材料为陶瓷。  18. A method of processing a multi-stage linear ion trap system according to claim 17, wherein said non-metallic material is ceramic.
19、如权利要求 17所述的多级线性离子阱系统的加工方法,其特征在于, 所述金属膜采用以金为主要成分的导体材料。  The method of processing a multi-stage linear ion trap system according to claim 17, wherein the metal film is made of a conductor material containing gold as a main component.
20、 一种多级线性离子阱系统的加工方法, 该方法包括如下步骤: 形成一对一体化电极作为一对 X 电极, 形成一对一体化电极作为一对 y 电极, 其中每个一体化电极均采用权利要求 11所述的方法形成;  20. A method of processing a multi-stage linear ion trap system, the method comprising the steps of: forming a pair of integrated electrodes as a pair of X electrodes, forming a pair of integrated electrodes as a pair of y electrodes, wherein each integrated electrode All formed by the method of claim 11;
在所述的一对 X电极和一对 y电极中的最外端两侧设置有一对平板电极, 将所述的一对平板电极和相应的一体化电极上的与之相邻的子电极共同构成 一对端电极。  Providing a pair of plate electrodes on both sides of the outermost end of the pair of X electrodes and the pair of y electrodes, the pair of plate electrodes and the adjacent sub-electrodes on the corresponding integrated electrodes A pair of terminal electrodes are formed.
21、如权利要求 20所述的多级线性离子阱系统的加工方法,其特征在于, 所述非金属材料为陶瓷。  A method of processing a multi-stage linear ion trap system according to claim 20, wherein said non-metallic material is ceramic.
22、如权利要求 20所述的多级线性离子阱系统的加工方法,其特征在于, 所述金属膜采用以金为主要成分的导体材料。  The method of processing a multi-stage linear ion trap system according to claim 20, wherein the metal film is made of a conductor material containing gold as a main component.
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CN105869986A (en) * 2016-05-04 2016-08-17 苏州大学 Mass spectrometry system capable of improving ion detection efficiency

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