WO2007092593A3 - Probe repair methods - Google Patents

Probe repair methods Download PDF

Info

Publication number
WO2007092593A3
WO2007092593A3 PCT/US2007/003475 US2007003475W WO2007092593A3 WO 2007092593 A3 WO2007092593 A3 WO 2007092593A3 US 2007003475 W US2007003475 W US 2007003475W WO 2007092593 A3 WO2007092593 A3 WO 2007092593A3
Authority
WO
Grant status
Application
Patent type
Prior art keywords
beam
probe card
panel
probe
affixed
Prior art date
Application number
PCT/US2007/003475
Other languages
French (fr)
Other versions
WO2007092593A2 (en )
Inventor
Bahadir Tunaboylu
John Mcglory
Horst Clauberg
Bruce Griffing
Robert E Werner
Edward T Laurent
Edward L Malantonio
Alan Slopey
Paul Bereznycky
Original Assignee
Sv Probe Pte Ltd
Bahadir Tunaboylu
John Mcglory
Horst Clauberg
Bruce Griffing
Robert E Werner
Edward T Laurent
Edward L Malantonio
Alan Slopey
Paul Bereznycky
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R3/00Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/073Multiple probes
    • G01R1/07307Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07342Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being at an angle other than perpendicular to test object, e.g. probe card

Abstract

A method for repairing a probe on a probe card is provided. A plurality of beams (222', 224' ) is formed on a beam panel (250'). The plurality of beams includes a replacement beam. After identifying a damaged beam on the probe card, the damaged beam is removed from the probe card. The beam panel is aligned with the probe card. After the beam panel is aligned, the aligned beam panel is temporarily affixed to the probe card. After the beam panel is temporarily affixed to the probe card, the replacement beam is affixed at a location previously occupied by the damaged beam. After the replacement beam is affixed at the location, the beam panel is removed from the probe card.
PCT/US2007/003475 2006-02-08 2007-02-08 Probe repair methods WO2007092593A3 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
US77155406 true 2006-02-08 2006-02-08
US60/771,554 2006-02-08
US11/704,016 2007-02-07
US11704016 US7437813B2 (en) 2006-02-08 2007-02-07 Probe repair methods

Publications (2)

Publication Number Publication Date
WO2007092593A2 true WO2007092593A2 (en) 2007-08-16
WO2007092593A3 true true WO2007092593A3 (en) 2007-11-29

Family

ID=38345820

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2007/003475 WO2007092593A3 (en) 2006-02-08 2007-02-08 Probe repair methods

Country Status (1)

Country Link
WO (1) WO2007092593A3 (en)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20010009376A1 (en) * 2000-01-24 2001-07-26 Kiyoshi Takekoshi Probe arrangement assembly, method of manufacturing probe arrangement assembly, probe mounting method using probe arrangement assembly, and probe mounting apparatus
US20020194730A1 (en) * 2001-06-21 2002-12-26 Da-Yuan Shih Process and structure to repair damaged probes mounted on a space transformer
US20030113990A1 (en) * 2001-12-19 2003-06-19 Formfactor, Inc. Microelectronic spring contact repair
US20050179456A1 (en) * 1996-03-12 2005-08-18 Beaman Brian S. High density cantilevered probe for electronic devices

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050179456A1 (en) * 1996-03-12 2005-08-18 Beaman Brian S. High density cantilevered probe for electronic devices
US20010009376A1 (en) * 2000-01-24 2001-07-26 Kiyoshi Takekoshi Probe arrangement assembly, method of manufacturing probe arrangement assembly, probe mounting method using probe arrangement assembly, and probe mounting apparatus
US20020194730A1 (en) * 2001-06-21 2002-12-26 Da-Yuan Shih Process and structure to repair damaged probes mounted on a space transformer
US20030113990A1 (en) * 2001-12-19 2003-06-19 Formfactor, Inc. Microelectronic spring contact repair

Also Published As

Publication number Publication date Type
WO2007092593A2 (en) 2007-08-16 application

Similar Documents

Publication Publication Date Title
WO2010033906A3 (en) Efficient induction of pluripotent stem cells using small molecule compounds
WO2003021352A1 (en) Reticle and optical characteristic measuring method
JP2008228947A (en) Plate structure of game board for pinball game machine
WO2002058599A3 (en) Annulus repair systems and methods
GB2469012A (en) Optical pulse propagation
JP2005298075A (en) Renewal method of passenger conveyor and guide rail supporting unit
WO2007011994A3 (en) Device and method for fibrous tissue repair
CN205074436U (en) Thin walled steel structure post roof beam and locking instrument for articulate
CA2742714A1 (en) Compensation distribution using quality score
WO2009050803A1 (en) Tft array inspection apparatus and method for synchronization
Mao et al. Study on the ambiguity and non-solution of 4-station TDOA space location systems.
US20080110362A1 (en) Magazine for printing units, particularly for printing machines
Boekel et al. Perforant pathway axons target parvalbumin-positive interneurons in the subiculum of the rat
WO2008146151A3 (en) Apparatus and method for monitoring a track
WO2007073482A3 (en) Method and apparatus for processing multiphoton curable photoreactive compositions
CN101861432A (en) Magnetic suspension railway structure and its manufacture method

Legal Events

Date Code Title Description
NENP Non-entry into the national phase in:

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 07763692

Country of ref document: EP

Kind code of ref document: A2