WO2007080770A1 - Image display - Google Patents

Image display Download PDF

Info

Publication number
WO2007080770A1
WO2007080770A1 PCT/JP2006/325640 JP2006325640W WO2007080770A1 WO 2007080770 A1 WO2007080770 A1 WO 2007080770A1 JP 2006325640 W JP2006325640 W JP 2006325640W WO 2007080770 A1 WO2007080770 A1 WO 2007080770A1
Authority
WO
WIPO (PCT)
Prior art keywords
evaporable getter
image display
display device
inorganic binder
phosphor
Prior art date
Application number
PCT/JP2006/325640
Other languages
French (fr)
Japanese (ja)
Inventor
Yuusuke Kasahara
Hiromitsu Takeda
Hiromichi Horie
Original Assignee
Kabushiki Kaisha Toshiba
Toshiba Materials Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kabushiki Kaisha Toshiba, Toshiba Materials Co., Ltd. filed Critical Kabushiki Kaisha Toshiba
Publication of WO2007080770A1 publication Critical patent/WO2007080770A1/en

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J7/00Details not provided for in the preceding groups and common to two or more basic types of discharge tubes or lamps
    • H01J7/14Means for obtaining or maintaining the desired pressure within the vessel
    • H01J7/18Means for absorbing or adsorbing gas, e.g. by gettering
    • H01J7/183Composition or manufacture of getters
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/94Selection of substances for gas fillings; Means for obtaining or maintaining the desired pressure within the tube, e.g. by gettering
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J31/00Cathode ray tubes; Electron beam tubes
    • H01J31/08Cathode ray tubes; Electron beam tubes having a screen on or from which an image or pattern is formed, picked up, converted, or stored
    • H01J31/10Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes
    • H01J31/12Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes with luminescent screen
    • H01J31/123Flat display tubes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2329/00Electron emission display panels, e.g. field emission display panels
    • H01J2329/94Means for exhausting the vessel or maintaining vacuum within the vessel
    • H01J2329/943Means for maintaining vacuum within the vessel
    • H01J2329/945Means for maintaining vacuum within the vessel by gettering
    • H01J2329/946Means for maintaining vacuum within the vessel by gettering characterised by the position or form of the getter
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2329/00Electron emission display panels, e.g. field emission display panels
    • H01J2329/94Means for exhausting the vessel or maintaining vacuum within the vessel
    • H01J2329/943Means for maintaining vacuum within the vessel
    • H01J2329/945Means for maintaining vacuum within the vessel by gettering
    • H01J2329/948Means for maintaining vacuum within the vessel by gettering characterised by the material of the getter

Definitions

  • the present invention relates to an image display device in which a non-evaporable getter member is disposed inside a vacuum envelope.
  • CTRs cathode ray tubes
  • PDP plasma display
  • FED field “emission” display
  • These image display devices include, as a basic configuration, a front substrate and a rear substrate that are arranged to face each other at a predetermined interval, and these substrates have an envelope by bonding their peripheral portions to each other. It is composed.
  • the FED enables good image display by maintaining a high degree of vacuum in the space between the front substrate and the back substrate, that is, the inside of the envelope.
  • the PDP makes it possible to display a good image by keeping the inert gas filling the inside of the envelope at a high purity.
  • a getter material for adsorbing the released gas is provided in the envelope.
  • the getter material is deposited on the inner surface of the front substrate or the rear substrate or other structure in a vacuum processing apparatus, and both the substrates are sealed in a vacuum and surrounded.
  • a method of forming a vessel has been proposed (see, for example, JP-A-2001-229824;).
  • a getter chamber is attached to the outer periphery of the envelope, and a non-evaporable getter is disposed inside the getter chamber.
  • a method of activating a getter material by arranging a getter or an evaporative getter has also been proposed, but this method limits the location of the getter material. For this reason, when this method is applied to a relatively large image display apparatus, pressure distribution is generated in the display screen, and good display characteristics cannot be obtained.
  • NEG non-evaporable getter
  • An object of the present invention is to provide an image display device that can effectively function a non-evaporable getter without using an expensive vacuum device and can maintain good display performance for a long period of time. It is in.
  • an image display device of the present invention includes a vacuum envelope in which peripheral portions are sealed with a front substrate and a rear substrate facing each other and the inside is evacuated, and the front substrate
  • a phosphor screen provided on the inside of the plate and having a large number of phosphor layers and a black light-shielding layer partitioning these phosphor layers, and provided on the inside of the back substrate, emits electrons toward the phosphor layer.
  • the non-evaporable getter member provided inside the vacuum envelope is dried and the inorganic binder is fixed, so that the inorganic binder has a porous network structure.
  • the exposed surface area where the type getter can be in direct contact with the atmosphere in the vacuum envelope is relatively large, and the non-evaporable getter can function effectively.
  • FIG. 1 is an external perspective view showing an FED vacuum envelope according to an embodiment of the present invention.
  • FIG. 2 is a partial cross-sectional view of the vacuum envelope of FIG. 1 taken along line II II.
  • FIG. 3 is a plan view showing a state in which a non-evaporable getter member is patterned on the FED phosphor screen of FIGS.
  • FIG. 4 is a partially enlarged cross-sectional view schematically showing a mesh structure of the non-evaporable getter member of FIG.
  • the FED includes a front substrate 11 and a rear substrate 12 each having a rectangular glass plate force as insulating substrates, and these substrates have a gap of 1 to 3 [mm]. They are placed opposite each other.
  • the front substrate 11 and the back substrate 12 constitute a flat rectangular vacuum envelope 10 whose peripheral portions are bonded to each other via a rectangular frame-shaped side wall 13 and the inside is maintained in a vacuum state. Speak.
  • a plurality of spacers 14 are provided inside the vacuum envelope 10 in order to support an atmospheric pressure load applied to the front substrate 11 and the rear substrate 12.
  • a plate-like or columnar spacer can be used as the spacer 14.
  • a phosphor screen 15 having 16 and a black light shielding layer 17 formed in a matrix is formed. These phosphor layers 16 may be formed in stripes or dots. On the phosphor screen 15, a metal back 20 having an aluminum film equal force is formed.
  • a non-evaporable getter member 22 in which a non-evaporable getter (hereinafter referred to as NEG) and an inorganic binder are mixed is put on the surface of the metal back 20.
  • NEG non-evaporable getter
  • the non-evaporable getter member 22 may be provided only in a region overlapping the black light shielding layer 17, but the corresponding electron-emitting device may be provided even in a region overlapping the phosphor layer 16. If the electron beam from 18 hits, it is okay if it is in the area.
  • the non-evaporable getter member 22 will be described in detail later.
  • a large number of surface-conduction electron-emitting devices 18 each emitting an electron beam are provided as electron sources for exciting the phosphor layer 16 of the phosphor screen 15. .
  • These electron-emitting devices 18 are arranged in a plurality of columns and a plurality of rows corresponding to each pixel.
  • Each electron-emitting device 18 includes an electron emitting portion (not shown) and a pair of device electrodes for applying a voltage to the electron emitting portion.
  • a large number of wirings 21 for driving the electron-emitting devices 18 are provided on the inner surface of the rear substrate 12 in a matrix shape, and the ends thereof are drawn out of the vacuum envelope 10.
  • the FED when an image is displayed, an anode voltage is applied to the phosphor screen 15 and the metal back 20, and the electron beam emitted from the electron-emitting device 18 is accelerated by the anode voltage to phosphor. Collide with the screen. As a result, the phosphor layer 16 of the phosphor screen 15 is excited to emit light and display a color image.
  • the non-evaporable getter member 22 of the present embodiment is formed by mixing NEG and an inorganic binder.
  • a mixture containing Zr, V, and Fe in a ratio of 7: 2: 1 is melted by arc melting to produce an ingot, and this ingot is pulverized by an average particle size of 10 [m
  • the NEG fine powder was manufactured by pulverizing to a degree.
  • colloidal silica containing about 15% by weight of silica particles having an average particle size of about 10 [nm] is prepared, and the NEG fine powder produced as described above and the colloidal silica in a weight ratio. 5: 2 was mixed to produce a non-evaporable getter member 22 paste.
  • the particle size of the above-mentioned NEG fine powder is desirably 200 [m] or less. That is, if the particle size is large, it is difficult to obtain an adhesive force, and the adsorption efficiency per unit weight is also deteriorated, resulting in poor efficiency.
  • the inorganic binder is not limited to the colloidal silica used in this embodiment as long as it is an aqueous inorganic binder, but is not limited to colloidal solution such as colloidal alumina using oxide fine particles, sodium-based water glass, potassium A system water glass or a mixture thereof can be used.
  • the mixing ratio of the inorganic binder to the fine powder of NEG is appropriately selected depending on, for example, the paste application method, which is desirably the minimum amount capable of obtaining sufficient adhesive strength.
  • the paste of the non-evaporable getter member 22 manufactured as described above is screen-printed by black printing as shown in FIG. I put it on 17 and put it on the surface of the metal back 20. Then, the patterned non-evaporable getter member 22 was heated at a temperature of about 100 [° C.] and dried to be fixed.
  • Fig. 4 shows an image of NEG22a and inorganic binder 22b at this time.
  • the film thickness of the non-evaporable getter member 22 is set to about 30 [m].
  • the inorganic binder 22b becomes a porous network structure, and the NEG fine powders 22a
  • the surface of the NEG fine powder 22a can be exposed with a relatively large surface area.
  • the network structure of such an inorganic binder allows the NEG fine powder 22a to be activated in the subsequent activation process, and then the area where the surface of the NEG is exposed can be made relatively large so that the NEG functions sufficiently. it can.
  • the force by which the non-evaporable getter member 22 is put on the surface of the metal back 20 by screen printing is not limited to this, but the ink jet system, the dispenser coating system, Other application methods such as spray coating and electrostatic coating may be used. Further, in the present embodiment, it is more preferable that the force film thickness when the film thickness of the non-evaporable getter member 22 is set to 30 [; zm] is set to about 1 to 500 [/ ⁇ ⁇ ]. It is desirable to set it to about 10 to 100 [ ⁇ m].
  • the film thickness of the non-evaporable getter member 22 is thinner than 1 [m]
  • the gas adsorbing ability after activating NEG becomes insufficient as described later, and the film thickness becomes 500 [; zm. ]
  • the non-evaporable getter member 22 is easily peeled off.
  • the film thickness force of the non-evaporable getter member 22 is OO [m] or less, there is almost no fear of peeling, and if it is 10 [ ⁇ m] or more, the gas adsorption capacity is sufficiently satisfactory.
  • This preferable numerical range of the film thickness is due to the porous structure when the non-evaporable getter member 22 of the present embodiment is dried and fixed.
  • the peripheral portions of the front substrate 11 and the rear substrate 12 are sealed. At this time, the best characteristics can be obtained by arranging the front substrate 11 and the rear substrate 12 in the vacuum chamber and sealing the peripheral edges. The power to be able to manufacture It is necessary to prepare a large vacuum chamber, which increases the manufacturing cost.
  • the front substrate 11 and the rear substrate 12 are placed in a baking furnace (not shown) with the front substrate 11 and the rear substrate 12 facing each other with a certain gap, and sealing is applied to the inner surface of the peripheral portion in advance. The material was melted to seal the peripheral portions of the substrates.
  • the side wall 13 is bonded in advance to the inner peripheral edge of the back substrate 12, and the sealing material is applied in advance to the end surface of the side wall 13 facing the front substrate 11.
  • a sealing material was applied in advance to a position where the inner peripheral edge of the front substrate 11 was opposed.
  • the sealing material it is desirable to use a low melting point glass having a softening temperature of about 350 to 500 [° C]. In other words, if the melting temperature (sealing temperature) of the sealing material is too high, the electron-emitting device 18 provided on the rear substrate 12 will be damaged, and if the sealing temperature is too low, baking after sealing will not be performed. The evaporative getter cannot be fully activated. In order to reduce damage to the electron-emitting device 18, it is desirable to perform sealing in an inert atmosphere or a reducing atmosphere, but it is also possible to select an atmosphere depending on time and temperature.
  • the inside of the vacuum envelope 10 is exhausted through an exhaust pipe (not shown).
  • the non-evaporable getter member 22 provided inside the front substrate 11 is activated.
  • the substrates 11 and 12 are heated to about 350 to 500 [° C.] to obtain a non-evaporated gate. Activate the data.
  • an FED capable of maintaining high display performance over a long period of time can be obtained without using an expensive vacuum apparatus.
  • the substrates 11 and 12 are heated to a high temperature in the activation process described above, there is no concern about the generation of organic gas as in the case of using an organic binder, and there is no concern about the generation of organic gas when using FED.
  • the vacuum degree of the vacuum envelope 10 can be maintained over a long period of time.
  • the present invention is not limited to the above-described embodiment, and can be embodied by modifying the constituent elements without departing from the scope in the implementation stage. Further, various inventions can be formed by appropriately combining a plurality of constituent elements disclosed in the embodiment. For example, some components may be deleted from all the components shown in the embodiment. Furthermore, the constituent elements over different embodiments may be appropriately combined. [0031] For example, the dimensions, materials, and the like of each component can be variously selected as needed without being limited to the numerical values and materials exemplified in the above-described embodiment.
  • the getter member is not limited to NEG such as Zr, V, and Fe used in the above-described embodiment, and other metal materials, organic materials, inorganic materials, and the like can be selected.
  • NEG such as Zr, V, and Fe used in the above-described embodiment, and other metal materials, organic materials, inorganic materials, and the like can be selected.
  • metals such as Ti, Zr, V, Fe, Al, Cr, Nb, Ta
  • the non-evaporable getter member 22 is provided on the surface of the metal back 20 .
  • the position where the getter member is provided is not limited to the front substrate 11 side, and the vacuum envelope is provided. You may form a getter member in the other structural member located in the inside.
  • the wiring 21 may be formed at a position that is not short-circuited at a position away from the electron-emitting device 18.
  • the present invention is not limited to the FED, and is applied to other image display devices such as a PDP. Monkey.
  • the image display device of the present invention has the configuration and operation as described above, a non-evaporable getter without using an expensive vacuum device can be effectively functioned, and a good display can be obtained. Performance can be maintained over a long period of time.

Abstract

A field emission display comprises a front plate having many phosphor layers and a back plate having many electron emitters, and the peripheral portions of these plates are bonded together and the inside thereof is evacuated. A non-evaporable getter member (22) for adsorbing a gas is formed on the surface of a metal back (20) of a phosphor screen which is provided on the inner surface of the front plate. The non-evaporable getter member (22) is composed of a fine powder (22a) of a non-evaporable getter and an inorganic binder (22b), and has a network structure by drying and fixing the inorganic binder (22b).

Description

明 細 書  Specification
画像表示装置  Image display device
技術分野  Technical field
[0001] この発明は、真空外囲器の内部に非蒸発型ゲッタ部材を配置した画像表示装置に 関する。  [0001] The present invention relates to an image display device in which a non-evaporable getter member is disposed inside a vacuum envelope.
背景技術  Background art
[0002] 近年、陰極線管(以下、 CRTと称する)に代わる次世代の軽量、薄型の表示装置と して、様々な平面型の画像表示装置が注目されている。例えば、放電現象による蛍 光体の発光を利用したプラズマディスプレイ (PDP)や、主として電界による電子放出 を利用したフィールド'ェミッション 'ディスプレイ(以下、 FEDと称する)が知られてい る。  In recent years, various flat-type image display devices have attracted attention as next-generation lightweight and thin display devices that replace cathode ray tubes (hereinafter referred to as CRTs). For example, a plasma display (PDP) using phosphor emission due to a discharge phenomenon and a field “emission” display (hereinafter referred to as FED) mainly using electron emission by an electric field are known.
[0003] これらの画像表示装置は、基本構成として、一定の間隔をおいて対向配置された 前面基板および背面基板を備え、これらの基板は周辺部を互いに接合することによ り外囲器を構成している。特に、 FEDは、前面基板と背面基板との間の空間、すなわ ち外囲器内部を高い真空度に維持することで良好な画像表示を可能としている。ま た、 PDPでは、外囲器の内部を満たした不活性ガスを高純度に保つことで良好な画 像表示を可能としている。  [0003] These image display devices include, as a basic configuration, a front substrate and a rear substrate that are arranged to face each other at a predetermined interval, and these substrates have an envelope by bonding their peripheral portions to each other. It is composed. In particular, the FED enables good image display by maintaining a high degree of vacuum in the space between the front substrate and the back substrate, that is, the inside of the envelope. In addition, the PDP makes it possible to display a good image by keeping the inert gas filling the inside of the envelope at a high purity.
[0004] 例えば、 FEDでは、長期間に渡って外囲器内を高真空に維持するため、外囲器内 に放出ガスを吸着するためのゲッタ材を設けている。従来、ゲッタ材のガス吸着特性 を向上させるため、真空処理装置内でゲッタ材を前面基板または背面基板の内面、 あるいはその他の構造物に蒸着し、両基板を真空中で封着して外囲器を形成する方 法が提案されている(例えば、特開 2001— 229824号公報参照。;)。  [0004] For example, in the FED, in order to maintain a high vacuum in the envelope for a long period of time, a getter material for adsorbing the released gas is provided in the envelope. Conventionally, in order to improve the gas adsorption characteristics of the getter material, the getter material is deposited on the inner surface of the front substrate or the rear substrate or other structure in a vacuum processing apparatus, and both the substrates are sealed in a vacuum and surrounded. A method of forming a vessel has been proposed (see, for example, JP-A-2001-229824;).
[0005] しかし、このような方法では高真空に維持された真空チャンバが必要となりプロセス への負荷が大きい。また、前面基板の蛍光体スクリーンにゲッタ材を重ねてしまうと、 輝度が低下してしまう。或いは、背面基板の電子放出素子や配線にゲッタ材を重ね てしまうと、耐圧が劣化したり、配線が短絡したりする問題を生じる。  [0005] However, such a method requires a vacuum chamber maintained at a high vacuum, which places a heavy load on the process. In addition, if the getter material is overlaid on the phosphor screen of the front substrate, the brightness is lowered. Or, if a getter material is stacked on the electron-emitting devices and wirings on the back substrate, the breakdown voltage deteriorates and the wirings are short-circuited.
[0006] この他に、外囲器周辺部にゲッタ室を取り付けて、このゲッタ室内部に非蒸発型ゲ ッタもしくは蒸発型ゲッタを配置し、ゲッタ材を活性化させる方法も提案されているが 、この方法ではゲッタ材を配置する場所が限定されてしまう。このため、この方法を比 較的大型の画像表示装置に適用した場合、表示画面内に圧力分布を生じてしまい 良好な表示特性を得られなくなってしまう。 In addition to this, a getter chamber is attached to the outer periphery of the envelope, and a non-evaporable getter is disposed inside the getter chamber. A method of activating a getter material by arranging a getter or an evaporative getter has also been proposed, but this method limits the location of the getter material. For this reason, when this method is applied to a relatively large image display apparatus, pressure distribution is generated in the display screen, and good display characteristics cannot be obtained.
[0007] これらの欠点を補うため、近年、非蒸発型ゲッタ (NEG)をペーストイ匕して効果的な 箇所に塗布により形成する方法が考えられている。 NEGをペーストイ匕する場合、 PV Aなどの高分子量の有機バインダーおよび溶媒が必要となるが、塗膜形成後の 350 °C〜500°Cの加熱工程で NEGを活性ィ匕したとき、この有機バインダーの完全な分解 が困難で NEGの性能を大幅に低下させてしまう、とういう問題が生じる。このため、こ の方法は、有効な手段として利用できるには至って ヽな 、。 [0007] In order to compensate for these drawbacks, in recent years, a method has been considered in which a non-evaporable getter (NEG) is pasted and formed at an effective location by coating. When NEG is pasted, a high molecular weight organic binder such as PV A and a solvent are required, but when NEG is activated in the heating process at 350 ° C to 500 ° C after coating film formation, The problem is that complete decomposition of the binder is difficult and the performance of NEG is greatly reduced. For this reason, this method can be used as an effective means.
発明の開示  Disclosure of the invention
[0008] この発明の目的は、高価な真空装置を用いることなぐ非蒸発型ゲッタを効果的に 機能させることができ、良好な表示性能を長期間に亘つて維持できる画像表示装置 を提供することにある。  An object of the present invention is to provide an image display device that can effectively function a non-evaporable getter without using an expensive vacuum device and can maintain good display performance for a long period of time. It is in.
[0009] 上記目的を達成するため、この発明の画像表示装置は、前面基板と背面基板を対 向させて周縁部同士を封着し且つ内部を真空排気した真空外囲器と、上記前面基 板の内側に設けられ、多数の蛍光体層およびこれら蛍光体層を区画した黒色遮光 層を有する蛍光体スクリーンと、上記背面基板の内側に設けられ、上記蛍光体層に 向けて電子を放出する多数の電子放出素子と、上記真空外囲器の内部に配置され 、非蒸発型ゲッタの粉末と無機バインダーを有する非蒸発型ゲッタ部材と、を有する  In order to achieve the above object, an image display device of the present invention includes a vacuum envelope in which peripheral portions are sealed with a front substrate and a rear substrate facing each other and the inside is evacuated, and the front substrate A phosphor screen provided on the inside of the plate and having a large number of phosphor layers and a black light-shielding layer partitioning these phosphor layers, and provided on the inside of the back substrate, emits electrons toward the phosphor layer. A plurality of electron-emitting devices; and a non-evaporable getter member disposed inside the vacuum envelope and having a non-evaporable getter powder and an inorganic binder.
[0010] 上記発明によると、真空外囲器の内部に設けた非蒸発型ゲッタ部材を乾燥させて 無機バインダーを固着させた状態で、無機バインダーがポーラスな網目状の構造と なるため、非蒸発型ゲッタが真空外囲器内の雰囲気と直接接触できる露出した表面 積が比較的大きくなり、非蒸発型ゲッタを効果的に機能させることができる。 [0010] According to the above invention, the non-evaporable getter member provided inside the vacuum envelope is dried and the inorganic binder is fixed, so that the inorganic binder has a porous network structure. The exposed surface area where the type getter can be in direct contact with the atmosphere in the vacuum envelope is relatively large, and the non-evaporable getter can function effectively.
図面の簡単な説明  Brief Description of Drawings
[0011] [図 1]図 1は、この発明の実施の形態に係る FEDの真空外囲器を示す外観斜視図で ある。 [図 2]図 2は、図 1の真空外囲器を線 II IIに沿って切断した部分断面図である。 FIG. 1 is an external perspective view showing an FED vacuum envelope according to an embodiment of the present invention. [FIG. 2] FIG. 2 is a partial cross-sectional view of the vacuum envelope of FIG. 1 taken along line II II.
[図 3]図 3は、図 1、 2の FEDの蛍光体スクリーンに重ねて非蒸発型ゲッタ部材をパタ 一二ングした状態を示す平面図である。  FIG. 3 is a plan view showing a state in which a non-evaporable getter member is patterned on the FED phosphor screen of FIGS.
[図 4]図 4は、図 3の非蒸発型ゲッタ部材の網目構造を模式的に示す部分拡大断面 図である。  FIG. 4 is a partially enlarged cross-sectional view schematically showing a mesh structure of the non-evaporable getter member of FIG.
発明を実施するための最良の形態  BEST MODE FOR CARRYING OUT THE INVENTION
[0012] 以下、図面を参照しながら、この発明の実施の形態に係る画像表示装置について 詳細に説明する。ここでは、画像表示装置の一例として、表面伝導型の電子放出素 子を備えた FEDにつ 、て説明する。 Hereinafter, an image display apparatus according to an embodiment of the present invention will be described in detail with reference to the drawings. Here, as an example of an image display device, an FED equipped with a surface conduction electron-emitting device will be described.
[0013] 図 1および図 2に示すように、 FEDは、絶縁基板としてそれぞれ矩形状のガラス板 力もなる前面基板 11、および背面基板 12を備え、これらの基板は 1〜3 [mm]の隙 間を置いて対向配置されている。そして、前面基板 11および背面基板 12は、矩形枠 状の側壁 13を介して周縁部同士が接合され、内部が真空状態に維持された扁平な 矩形状の真空外囲器 10を構成して 1ヽる。 [0013] As shown in FIG. 1 and FIG. 2, the FED includes a front substrate 11 and a rear substrate 12 each having a rectangular glass plate force as insulating substrates, and these substrates have a gap of 1 to 3 [mm]. They are placed opposite each other. The front substrate 11 and the back substrate 12 constitute a flat rectangular vacuum envelope 10 whose peripheral portions are bonded to each other via a rectangular frame-shaped side wall 13 and the inside is maintained in a vacuum state. Speak.
[0014] 真空外囲器 10の内部には、前面基板 11および背面基板 12に加わる大気圧荷重 を支えるため、複数のスぺーサ 14が設けられている。スぺーサ 14としては、板状ある いは柱状のスぺーサ等を用いることができる。 A plurality of spacers 14 are provided inside the vacuum envelope 10 in order to support an atmospheric pressure load applied to the front substrate 11 and the rear substrate 12. As the spacer 14, a plate-like or columnar spacer can be used.
[0015] 前面基板 11の内面上には、図 3に示すように、赤 (R)、緑 (G)、青 (B)の蛍光体層[0015] On the inner surface of the front substrate 11, as shown in FIG. 3, phosphor layers of red (R), green (G), and blue (B)
16とマトリクス状に形成された黒色遮光層 17とを有した蛍光体スクリーン 15が形成さ れている。これらの蛍光体層 16はストライプ状あるいはドット状に形成してもよい。こ の蛍光体スクリーン 15上には、アルミニウム膜等力もなるメタルバック 20が形成され ている。 A phosphor screen 15 having 16 and a black light shielding layer 17 formed in a matrix is formed. These phosphor layers 16 may be formed in stripes or dots. On the phosphor screen 15, a metal back 20 having an aluminum film equal force is formed.
[0016] また、メタルバック 20の表面には、非蒸発型ゲッタ(以下、 NEGと称する)と無機バ インダーを混ぜた非蒸発型ゲッタ部材 22がパターユングされて 、る。この非蒸発型 ゲッタ部材 22は、図 3に示すように、黒色遮光層 17の上に重なる領域にだけ設けて も良いが、蛍光体層 16に重なる領域であっても、対応する電子放出素子 18からの電 子ビームが当たらな 、領域であれば良 、。この非蒸発型ゲッタ部材 22につ 、ては、 後に詳述する。 [0017] 背面基板 12の内面上には、蛍光体スクリーン 15の蛍光体層 16を励起する電子源 として、それぞれ電子ビームを放出する多数の表面伝導型の電子放出素子 18が設 けられている。これらの電子放出素子 18は、画素毎に対応して複数列および複数行 に配列されている。各電子放出素子 18は、図示しない電子放出部、この電子放出部 に電圧を印加する一対の素子電極等で構成されている。また、背面基板 12の内面 には、電子放出素子 18を駆動するための多数本の配線 21がマトリック状に設けられ 、その端部は真空外囲器 10の外部に引出されている。 In addition, a non-evaporable getter member 22 in which a non-evaporable getter (hereinafter referred to as NEG) and an inorganic binder are mixed is put on the surface of the metal back 20. As shown in FIG. 3, the non-evaporable getter member 22 may be provided only in a region overlapping the black light shielding layer 17, but the corresponding electron-emitting device may be provided even in a region overlapping the phosphor layer 16. If the electron beam from 18 hits, it is okay if it is in the area. The non-evaporable getter member 22 will be described in detail later. [0017] On the inner surface of the back substrate 12, a large number of surface-conduction electron-emitting devices 18 each emitting an electron beam are provided as electron sources for exciting the phosphor layer 16 of the phosphor screen 15. . These electron-emitting devices 18 are arranged in a plurality of columns and a plurality of rows corresponding to each pixel. Each electron-emitting device 18 includes an electron emitting portion (not shown) and a pair of device electrodes for applying a voltage to the electron emitting portion. Further, a large number of wirings 21 for driving the electron-emitting devices 18 are provided on the inner surface of the rear substrate 12 in a matrix shape, and the ends thereof are drawn out of the vacuum envelope 10.
[0018] 上記構造の FEDにおいて、画像を表示する場合、蛍光体スクリーン 15およびメタ ルバック 20にアノード電圧を印加して、電子放出素子 18から放出された電子ビーム をアノード電圧により加速して蛍光体スクリーンへ衝突させる。これにより、蛍光体スク リーン 15の蛍光体層 16が励起されて発光し、カラー画像を表示する。  In the FED having the above structure, when an image is displayed, an anode voltage is applied to the phosphor screen 15 and the metal back 20, and the electron beam emitted from the electron-emitting device 18 is accelerated by the anode voltage to phosphor. Collide with the screen. As a result, the phosphor layer 16 of the phosphor screen 15 is excited to emit light and display a color image.
[0019] 次に、上述した本実施の形態に係る非蒸発型ゲッタ部材 22の物性について詳細 に説明するとともに、上記構造の FEDの製造方法について簡単に説明する。  Next, the physical properties of the non-evaporable getter member 22 according to the present embodiment will be described in detail, and a method for manufacturing the FED having the above structure will be briefly described.
[0020] 本実施の形態の非蒸発型ゲッタ部材 22は、上述したように NEGと無機バインダー を混ぜて形成される。本実施の形態では、 Zr、 V、および Feを 7 : 2 : 1の比率で配合 した混合物をアークメルトにより溶解してインゴットを溶製し、このインゴットを粉砕機に より平均粒径 10 [ m]程度に粉砕して NEGの微粉を製造した。そして、無機バイン ダ一として、平均粒径 10 [nm]程度のシリカ粒子を 15重量 [%]程度含むコロイダル シリカを用意し、上記のように製造した NEGの微粉とコロイダルシリカとを重量比で 5: 2に混合して非蒸発型ゲッタ部材 22のペーストを製造した。  [0020] As described above, the non-evaporable getter member 22 of the present embodiment is formed by mixing NEG and an inorganic binder. In the present embodiment, a mixture containing Zr, V, and Fe in a ratio of 7: 2: 1 is melted by arc melting to produce an ingot, and this ingot is pulverized by an average particle size of 10 [m The NEG fine powder was manufactured by pulverizing to a degree. As an inorganic binder, colloidal silica containing about 15% by weight of silica particles having an average particle size of about 10 [nm] is prepared, and the NEG fine powder produced as described above and the colloidal silica in a weight ratio. 5: 2 was mixed to produce a non-evaporable getter member 22 paste.
[0021] 上述した NEGの微粉の粒径は、 200 [ m]以下が望ましい。つまり、粒径が大きい と接着力を得難ぐさらに単位重量あたりの吸着効率も悪くなり効率が悪い。また、無 機バインダーは、水性の無機バインダーであれば良ぐ本実施の形態で用いたコロイ ダルシリカに限らず、酸ィ匕物微粒子を用いたコロイダルアルミナなどのコロイド溶液、 ナトリウム系水ガラス、カリウム系水ガラス等、或いはそれらの混合物を用いることがで きる。さらに、 NEGの微粉に対する無機バインダーの混合比は、十分な接着強度を 得ることができる最小の量であることが望ましぐ例えばペーストの塗布方法に応じて 適当に選択される。 [0022] 本実施の形態では、前面基板 11と背面基板 12を接合する前に、上記のように製造 した非蒸発型ゲッタ部材 22のペーストをスクリーン印刷によって図 3に示すように黒 色遮光層 17に重ねてメタルバック 20の表面上にパターユングした。そして、パター- ングした非蒸発型ゲッタ部材 22を 100 [°C]程度の温度で加熱して乾燥させて固着さ せた。このときの NEG22aと無機バインダー 22bのイメージ図を図 4に示す。なお、本 実施の形態では、この非蒸発型ゲッタ部材 22の膜厚を 30 [ m]程度に設定した。 [0021] The particle size of the above-mentioned NEG fine powder is desirably 200 [m] or less. That is, if the particle size is large, it is difficult to obtain an adhesive force, and the adsorption efficiency per unit weight is also deteriorated, resulting in poor efficiency. The inorganic binder is not limited to the colloidal silica used in this embodiment as long as it is an aqueous inorganic binder, but is not limited to colloidal solution such as colloidal alumina using oxide fine particles, sodium-based water glass, potassium A system water glass or a mixture thereof can be used. Further, the mixing ratio of the inorganic binder to the fine powder of NEG is appropriately selected depending on, for example, the paste application method, which is desirably the minimum amount capable of obtaining sufficient adhesive strength. In the present embodiment, before the front substrate 11 and the rear substrate 12 are bonded, the paste of the non-evaporable getter member 22 manufactured as described above is screen-printed by black printing as shown in FIG. I put it on 17 and put it on the surface of the metal back 20. Then, the patterned non-evaporable getter member 22 was heated at a temperature of about 100 [° C.] and dried to be fixed. Fig. 4 shows an image of NEG22a and inorganic binder 22b at this time. In the present embodiment, the film thickness of the non-evaporable getter member 22 is set to about 30 [m].
[0023] 図 4に示すように、メタルバック 20の表面に非蒸発型ゲッタ部材 22を塗布した後、 無機バインダーを乾燥させると、無機バインダー 22bがポーラスな網目構造となり、 N EGの微粉 22a同士を強固に接着した上で、 NEG微粉 22aの表面を比較的大きな表 面積で露出させることができる。このような無機バインダーの網目構造によって、後の 活性ィ匕工程で NEG微粉 22aを活性ィ匕させた後、 NEGの表面が露出する面積を比 較的大きくでき、 NEGを十分に機能させることができる。  [0023] As shown in FIG. 4, after applying the non-evaporable getter member 22 to the surface of the metal back 20, when the inorganic binder is dried, the inorganic binder 22b becomes a porous network structure, and the NEG fine powders 22a The surface of the NEG fine powder 22a can be exposed with a relatively large surface area. The network structure of such an inorganic binder allows the NEG fine powder 22a to be activated in the subsequent activation process, and then the area where the surface of the NEG is exposed can be made relatively large so that the NEG functions sufficiently. it can.
[0024] なお、本実施の形態では、上述したように、スクリーン印刷によって非蒸発型ゲッタ 部材 22をメタルバック 20の表面上にパターユングした力 これに限らず、インクジエツ ト方式、ディスペンサー塗布方式、スプレー塗装、静電塗装などの他の塗布方法を 用いても良い。また、本実施の形態では、非蒸発型ゲッタ部材 22の膜厚を 30 [; z m] に設定した力 膜厚は、 1乃至 500 [ /ζ πι]程度に設定することが望ましぐより好まし くは 10乃至 100 [ μ m]程度の設定することが望まし 、。  [0024] In the present embodiment, as described above, the force by which the non-evaporable getter member 22 is put on the surface of the metal back 20 by screen printing is not limited to this, but the ink jet system, the dispenser coating system, Other application methods such as spray coating and electrostatic coating may be used. Further, in the present embodiment, it is more preferable that the force film thickness when the film thickness of the non-evaporable getter member 22 is set to 30 [; zm] is set to about 1 to 500 [/ ζ πι]. It is desirable to set it to about 10 to 100 [μm].
[0025] つまり、非蒸発型ゲッタ部材 22の膜厚が 1 [ m]より薄いと、後述するように NEG を活性化させた後のガス吸着能力が不十分となり、膜厚が 500 [; z m]を超えると非 蒸発型ゲッタ部材 22が剥れ易くなつてしまう。特に、非蒸発型ゲッタ部材 22の膜厚 力 OO [ m]以下であれば剥れる心配は殆どなぐ 10 [ μ m]以上であればガス吸着 能力も十分に満足のいくものとなる。この膜厚の好適な数値範囲は、本実施の形態 の非蒸発型ゲッタ部材 22を乾燥させて固着させたときのポーラスな構造に起因する ものである。  [0025] That is, if the film thickness of the non-evaporable getter member 22 is thinner than 1 [m], the gas adsorbing ability after activating NEG becomes insufficient as described later, and the film thickness becomes 500 [; zm. ], The non-evaporable getter member 22 is easily peeled off. In particular, if the film thickness force of the non-evaporable getter member 22 is OO [m] or less, there is almost no fear of peeling, and if it is 10 [μm] or more, the gas adsorption capacity is sufficiently satisfactory. This preferable numerical range of the film thickness is due to the porous structure when the non-evaporable getter member 22 of the present embodiment is dried and fixed.
[0026] 上記のようにメタルバック 20の表面上に非蒸発型ゲッタ部材 22を製膜した後、前面 基板 11と背面基板 12の周縁部同士を封着する。このとき、前面基板 11と背面基板 1 2を真空チャンバ内に配置して周縁部同士を封着することで最も良い特性を得ること ができる力 大型の真空チャンバを用意する必要があり製造コストが高くなつてしまう[0026] After the non-evaporable getter member 22 is formed on the surface of the metal back 20 as described above, the peripheral portions of the front substrate 11 and the rear substrate 12 are sealed. At this time, the best characteristics can be obtained by arranging the front substrate 11 and the rear substrate 12 in the vacuum chamber and sealing the peripheral edges. The power to be able to manufacture It is necessary to prepare a large vacuum chamber, which increases the manufacturing cost.
。このため、本実施の形態では、前面基板 11と背面基板 12を一定の隙間を介して対 向せしめた状態で図示しないべーク炉内に投入し、その周縁部内面に予め塗布した 封着材を溶融させて基板の周縁部同士を封着するようにした。 . For this reason, in this embodiment, the front substrate 11 and the rear substrate 12 are placed in a baking furnace (not shown) with the front substrate 11 and the rear substrate 12 facing each other with a certain gap, and sealing is applied to the inner surface of the peripheral portion in advance. The material was melted to seal the peripheral portions of the substrates.
[0027] 本実施の形態では、背面基板 12の内面周縁部に側壁 13を予め接合し、この側壁 13の前面基板 11に対向する端面に封着材を予め塗布した。また、前面基板 11の内 面周縁部の対向する位置にも予め封着材を塗布した。封着材は、軟化温度が 350 乃至 500[°C]程度の低融点ガラスを用いるのが望ましい。つまり、封着材の溶融温 度 (封着温度)が高すぎると背面基板 12に設けた電子放出素子 18へダメージを与え てしまうし、封着温度が低過ぎると封着後のベーキング、非蒸発型ゲッタの活性化を 十分に行うことができなくなってしまう。電子放出素子 18へのダメージを軽減するた め、不活性雰囲気、還元雰囲気にて封着を行なうことが望ましいが、時間、温度によ り雰囲気を選択することも可能である。  In the present embodiment, the side wall 13 is bonded in advance to the inner peripheral edge of the back substrate 12, and the sealing material is applied in advance to the end surface of the side wall 13 facing the front substrate 11. In addition, a sealing material was applied in advance to a position where the inner peripheral edge of the front substrate 11 was opposed. As the sealing material, it is desirable to use a low melting point glass having a softening temperature of about 350 to 500 [° C]. In other words, if the melting temperature (sealing temperature) of the sealing material is too high, the electron-emitting device 18 provided on the rear substrate 12 will be damaged, and if the sealing temperature is too low, baking after sealing will not be performed. The evaporative getter cannot be fully activated. In order to reduce damage to the electron-emitting device 18, it is desirable to perform sealing in an inert atmosphere or a reducing atmosphere, but it is also possible to select an atmosphere depending on time and temperature.
[0028] そして、基板 11、 12の周縁部同士を封着した後、図示しない排気管を介して真空 外囲器 10の内部を排気する。また、同時に、前面基板 11の内側に設けた非蒸発型 ゲッタ部材 22を活性ィ匕する。この際、真空外囲器 10の内部の真空度が 1 X 10"3[P a]以下となったところで、基板 11、 12を 350乃至 500[°C]程度に加熱して非蒸発ゲ ッタを活性化する。 [0028] After sealing the peripheral portions of the substrates 11 and 12, the inside of the vacuum envelope 10 is exhausted through an exhaust pipe (not shown). At the same time, the non-evaporable getter member 22 provided inside the front substrate 11 is activated. At this time, when the degree of vacuum inside the vacuum envelope 10 becomes 1 × 10 ” 3 [Pa] or less, the substrates 11 and 12 are heated to about 350 to 500 [° C.] to obtain a non-evaporated gate. Activate the data.
[0029] 以上のように、本実施の形態によれば高価な真空装置を用いることなく長期間に亘 つて高い表示性能を維持可能な FEDを得ることができる。また、上述した活性化工 程において基板 11、 12を高温に加熱した際に、有機バインダーを用いた場合のよう に有機ガスが発生する心配がなぐさらに FEDの使用時に有機ガスが発生する心配 もなぐ真空外囲器 10の真空度を長期間に亘つて維持できる。  [0029] As described above, according to the present embodiment, an FED capable of maintaining high display performance over a long period of time can be obtained without using an expensive vacuum apparatus. In addition, when the substrates 11 and 12 are heated to a high temperature in the activation process described above, there is no concern about the generation of organic gas as in the case of using an organic binder, and there is no concern about the generation of organic gas when using FED. The vacuum degree of the vacuum envelope 10 can be maintained over a long period of time.
[0030] なお、本発明は上記実施の形態に限定されるものではなぐ実施段階ではその要 旨を逸脱しない範囲で構成要素を変形して具体ィ匕できる。また、上記実施形態に開 示されている複数の構成要素の適宜な組み合わせにより、種々の発明を形成できる 。例えば、実施の形態に示される全構成要素から幾つかの構成要素を削除してもよ い。さら〖こ、異なる実施形態にわたる構成要素を適宜組み合わせてもよい。 [0031] 例えば、各構成要素の寸法、材料等は、上述した実施の形態で例示した数値、材 料に限定されることなぐ必要に応じて種々選択可能である。ゲッタ部材としては、上 述した実施の形態で用いた Zr、 V、 Feなどの NEGに限らず、その他金属材料、有機 材料、無機材料などが選択可能である。例えば、 NEGとして、 Ti、 Zr、 V、 Fe、 Al、 C r、 Nb、 Ta、 W、 Mo、 Th、 Ni、 Mnなどの金属、あるいはこれらの合金を用いても良 い。 It should be noted that the present invention is not limited to the above-described embodiment, and can be embodied by modifying the constituent elements without departing from the scope in the implementation stage. Further, various inventions can be formed by appropriately combining a plurality of constituent elements disclosed in the embodiment. For example, some components may be deleted from all the components shown in the embodiment. Furthermore, the constituent elements over different embodiments may be appropriately combined. [0031] For example, the dimensions, materials, and the like of each component can be variously selected as needed without being limited to the numerical values and materials exemplified in the above-described embodiment. The getter member is not limited to NEG such as Zr, V, and Fe used in the above-described embodiment, and other metal materials, organic materials, inorganic materials, and the like can be selected. For example, as NEG, metals such as Ti, Zr, V, Fe, Al, Cr, Nb, Ta, W, Mo, Th, Ni, and Mn, or alloys thereof may be used.
[0032] また、上述した実施の形態では非蒸発型ゲッタ部材 22をメタルバック 20の表面に 設けた場合を説明したが、ゲッタ部材を設ける位置は前面基板 11側に限らず、真空 外囲器内に位置した他の構成部材にゲッタ部材を形成してもよい。例えば、背面基 板 12側の構造物に非蒸発型ゲッタ部材 22を設ける場合、電子放出素子 18から外 れた位置で配線 21を短絡することのな 、位置に形成すれば良!、。  In the above-described embodiment, the case where the non-evaporable getter member 22 is provided on the surface of the metal back 20 has been described. However, the position where the getter member is provided is not limited to the front substrate 11 side, and the vacuum envelope is provided. You may form a getter member in the other structural member located in the inside. For example, when the non-evaporable getter member 22 is provided on the structure on the back substrate 12 side, the wiring 21 may be formed at a position that is not short-circuited at a position away from the electron-emitting device 18.
[0033] また、上述した実施の形態では画像表示装置として FEDに本発明を適用した場合 について説明したが、本発明は、 FEDに限らず PDP等の他の画像表示装置に適用 することちでさる。  In the above-described embodiment, the case where the present invention is applied to the FED as the image display device has been described. However, the present invention is not limited to the FED, and is applied to other image display devices such as a PDP. Monkey.
産業上の利用可能性  Industrial applicability
[0034] この発明の画像表示装置は、上記のような構成および作用を有しているので、高価 な真空装置を用いることなぐ非蒸発型ゲッタを効果的に機能させることができ、良好 な表示性能を長期間に亘つて維持できる。 [0034] Since the image display device of the present invention has the configuration and operation as described above, a non-evaporable getter without using an expensive vacuum device can be effectively functioned, and a good display can be obtained. Performance can be maintained over a long period of time.

Claims

請求の範囲 The scope of the claims
[1] 前面基板と背面基板を対向させて周縁部同士を封着し且つ内部を真空排気した 真空外囲器と、  [1] A vacuum envelope in which the front substrate and the rear substrate are opposed to each other, the peripheral portions are sealed together, and the inside is evacuated,
上記前面基板の内側に設けられ、多数の蛍光体層およびこれら蛍光体層を区画し た黒色遮光層を有する蛍光体スクリーンと、  A phosphor screen provided on the inner side of the front substrate and having a number of phosphor layers and a black light shielding layer partitioning these phosphor layers;
上記背面基板の内側に設けられ、上記蛍光体層に向けて電子を放出する多数の 電子放出素子と、  A plurality of electron-emitting devices that are provided inside the back substrate and emit electrons toward the phosphor layer;
上記真空外囲器の内部に配置され、非蒸発型ゲッタの粉末と無機バインダーを有 する非蒸発型ゲッタ部材と、  A non-evaporable getter member disposed inside the vacuum envelope and having a non-evaporable getter powder and an inorganic binder;
を有することを特徴とする画像表示装置。  An image display device comprising:
[2] 上記非蒸発型ゲッタ部材は、上記蛍光体スクリーンの上記電子が当たらない領域 に設けられて 、ることを特徴とする請求項 1に記載の画像表示装置。  [2] The image display device according to [1], wherein the non-evaporable getter member is provided in a region where the electrons do not hit the phosphor screen.
[3] 上記非蒸発型ゲッタの粉末は、 200 [; z m]以下の粒径を有することを特徴とする請 求項 1に記載の画像表示装置。 [3] The image display device according to claim 1, wherein the non-evaporable getter powder has a particle size of 200 [zm] or less.
[4] 上記無機バインダーは、コロイダルシリカ、コロイダルアルミナ、水ガラス、またはそ れらの混合物であることを特徴とする請求項 1に記載の画像表示装置。 [4] The image display device according to [1], wherein the inorganic binder is colloidal silica, colloidal alumina, water glass, or a mixture thereof.
[5] 上記被蒸発型ゲッタ部材は、 1乃至 500 [ m]の膜厚、好ましくは 10乃至 100 [ m]の膜厚を有することを特徴とする請求項 2または請求項 4に記載の画像表示装置 [5] The image according to claim 2 or 4, wherein the evaporable getter member has a film thickness of 1 to 500 [m], preferably 10 to 100 [m]. Display device
[6] 上記非蒸発型ゲッタ部材は、スクリーン印刷、インクジェット方式、ディスペンサー塗 布方式、スプレー塗装、または静電塗装により製膜されていることを特徴とする請求 項 5に記載の画像表示装置。 6. The image display device according to claim 5, wherein the non-evaporable getter member is formed by screen printing, an inkjet method, a dispenser coating method, spray coating, or electrostatic coating.
[7] 上記無機バインダーは、乾燥させて固着した状態で、上記非蒸発型ゲッタの粒子 の表面を露出させるポーラスな構造を有することを特徴とする請求項 1乃至請求項 6 の!、ずれか 1項に記載の画像表示装置。 [7] The structure according to any one of claims 1 to 6, wherein the inorganic binder has a porous structure that exposes the surfaces of the particles of the non-evaporable getter in a state of being dried and fixed. The image display device according to item 1.
[8] 上記非蒸発型ゲッタは、 Ti、 Zr、 V、 Fe、 Al、 Cr、 Nb、 Ta、 W、 Mo、 Th、 Ni、 Mn のうち 1種類以上の金属、または 2種類以上の合金を含むことを特徴とする請求項 1 乃至請求項 7のいずれか 1項に記載の画像表示装置。 [8] The non-evaporable getter is made of one or more metals of Ti, Zr, V, Fe, Al, Cr, Nb, Ta, W, Mo, Th, Ni, or Mn, or two or more alloys. The image display device according to claim 1, wherein the image display device includes the image display device.
PCT/JP2006/325640 2006-01-12 2006-12-22 Image display WO2007080770A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006-005123 2006-01-12
JP2006005123 2006-01-12

Publications (1)

Publication Number Publication Date
WO2007080770A1 true WO2007080770A1 (en) 2007-07-19

Family

ID=38256181

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2006/325640 WO2007080770A1 (en) 2006-01-12 2006-12-22 Image display

Country Status (1)

Country Link
WO (1) WO2007080770A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010212193A (en) * 2009-03-12 2010-09-24 Toshiba Hokuto Electronics Corp Methods of manufacturing electron tube component and magnetron tube end hat

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0982245A (en) * 1994-12-14 1997-03-28 Canon Inc Image forming device and activation method for getter material
JP2000231893A (en) * 1999-02-12 2000-08-22 Canon Inc Arrangement of nonevaporation type getter
JP2000251714A (en) * 1999-02-25 2000-09-14 Canon Inc Manufacture for image forming device
JP2000251787A (en) * 1999-02-24 2000-09-14 Canon Inc Image forming device and activation method of getter material
JP2000311588A (en) * 1999-02-26 2000-11-07 Canon Inc Getter, airtight container with getter, image forming device and manufacture of getter
JP2003022744A (en) * 2001-07-06 2003-01-24 Sony Corp Non-vaporizing type getter, display device and their manufacturing method
JP2003086122A (en) * 2001-09-14 2003-03-20 Canon Inc Image forming device
JP2003242914A (en) * 2002-01-30 2003-08-29 Samsung Sdi Co Ltd Field emission display device, and manufacturing method of the same

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0982245A (en) * 1994-12-14 1997-03-28 Canon Inc Image forming device and activation method for getter material
JP2000231893A (en) * 1999-02-12 2000-08-22 Canon Inc Arrangement of nonevaporation type getter
JP2000251787A (en) * 1999-02-24 2000-09-14 Canon Inc Image forming device and activation method of getter material
JP2000251714A (en) * 1999-02-25 2000-09-14 Canon Inc Manufacture for image forming device
JP2000311588A (en) * 1999-02-26 2000-11-07 Canon Inc Getter, airtight container with getter, image forming device and manufacture of getter
JP2003022744A (en) * 2001-07-06 2003-01-24 Sony Corp Non-vaporizing type getter, display device and their manufacturing method
JP2003086122A (en) * 2001-09-14 2003-03-20 Canon Inc Image forming device
JP2003242914A (en) * 2002-01-30 2003-08-29 Samsung Sdi Co Ltd Field emission display device, and manufacturing method of the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010212193A (en) * 2009-03-12 2010-09-24 Toshiba Hokuto Electronics Corp Methods of manufacturing electron tube component and magnetron tube end hat

Similar Documents

Publication Publication Date Title
KR100446623B1 (en) Field emission display and manufacturing method thereof
KR20070000348A (en) Method of manufacturing anode panel for flat-panel display device, method of manufacturing flat-panel display device, anode panel for flat-panel display device, and flat-panel display device
KR20060136318A (en) Method of manufacturing anode panel for flat-panel display device, method of manufacturing flat-panel display device, anode panel for flat-panel display device, and flat-panel display device
JP2006066272A (en) Image display device
JP2006066265A (en) Image display device
WO2005083739A1 (en) Image forming device
WO2007080770A1 (en) Image display
JP2007200649A (en) Manufacturing method of image display device
JPWO2007032308A1 (en) Getter member, getter film, method for forming getter film, display device provided with getter film, and method for manufacturing display device
JPWO2005124813A1 (en) Image display device and method of manufacturing image display device
JP2004335346A (en) Image display device
WO2005109463A1 (en) Method of producing image display device
JP2008091253A (en) Image display device and manufacturing method therefor
JP2003109524A (en) Image display device
JP2008084778A (en) Image display device
JP4678156B2 (en) Cathode panel conditioning method, cold cathode field emission display device conditioning method, and cold cathode field emission display device manufacturing method
JP2011228051A (en) Method of producing phosphor film, and method of manufacturing light emitting substrate provided with phosphor film and method of manufacturing display using the manufacturing method
WO2006035806A1 (en) Image display device and method for manufacturing the same
JP2003297265A (en) Image display device and method of manufacturing the same
JP2008084777A (en) Image display device
JP2008091088A (en) Method of manufacturing image display apparatus, and image display apparatus
JP2008091089A (en) Manufacturing method of image display apparatus
JP3984102B2 (en) Image display device and manufacturing method thereof
JP2007275703A (en) Getter member, image display device and method for manufacturing the device
JP2006066271A (en) Method for manufacturing image display device

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application
NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 06835118

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: JP