WO2007043236A1

WO2007043236A1 - Micro suction structure and method of forming the same

Info

Publication number: WO2007043236A1
Application number: PCT/JP2006/315120
Authority: WO
Inventors: Shin-Ichi Hinooda; Kazuya Ogino
Original assignee: Shin-Ichi Hinooda
Priority date: 2005-10-13
Filing date: 2006-07-31
Publication date: 2007-04-19
Also published as: JP2007107997A; JP3844305B1

Abstract

To provide a simple micro suction structure which is capable of transporting fluid without relying on the physical properties of a fluid in use and without a special external drive device such as an external pump, and which is singly usable and installable in an assembly; and a method of forming the micro suction structure. Internal spaces partitioned by a separating layer are formed on the upper side of a vacuum space depressurized to less than the atmospheric pressure and a covering layer is provided to cover the internal space. Cross-linking portions for transmitting an external force to the separating layer to destruct a part of the separating layer are formed in the internal space. Furthermore, a flow passage space communicating with the internal space and an external space is formed.

Description

Specification

Microsuction structure and method for forming the same

Technical field

[oooi] The present invention relates to a simple micro-suction structure that can transport gas, fluid such as Z or liquid, does not require an external driving force such as a pump, can be used alone, and can be incorporated. .

Background art

[0002] An integrated micro-analysis system has recently attracted attention as a chip for chemical analysis such as gene analysis, clinical diagnosis, drug screening, and environmental measurement. Microanalytical systems made from polymer cartridges such as glass, silicon, or acrylic have flow paths with tens / zm to hundreds / zm width through which fluids such as gases and / or liquids flow. It is a chip that enables one or more operations among unit operations of mixing, reaction, separation, extraction, and analysis.

[0003] As one type of chip, there is a type in which a sample such as a secretion from a human body, a reagent, and a control solution are transported to the same channel and reacted (for example, see Non-Patent Document 1). As another type of chip, there is a type in which a solution in which two kinds of substances are dissolved and a catalyst are transported from different places into the same channel, mixed and reacted (for example, see Non-Patent Document 2). ). Another type of chip is a composite type that includes an area where two types of solutions containing different substances are transported, mixed, and reacted in the same channel, and an area where only the reactants required for analysis are separated and extracted. (See Non-Patent Document 3, for example).

[0004] Non-Patent Document 1: B.H. Weigl et al., Advanced Drug Delivery Reveiew 55 (2003) 349-37 7

Non-Patent Document 2: M. Ueno et al., Chem. Commun., 2003, 936-937

Non-Patent Document 3: M. Tokeshi et al., Anal. Chem. 2002, 74, 1565-1571

[0005] These chips are manufactured by overlapping the same or different materials using conventional bonding techniques (see, for example, Non-Patent Document 4).

[0006] Non-Patent Document 4: D. C. Duffy et al., Anal. Chem. 1998, 70, 4974-4984

[0007] In these chips, a general method for transporting fluid is an external pump, electrophoresis ( For example, see Patent Document 1), a method using osmotic pressure and surface tension. As an external pump, a pump using a syringe (for example, see Patent Document 2), a pump using a piston (for example, see Patent Document 3), a pump using a screw, a pump using a piezoelectric element (for example, , See Patent Document 4).

Patent Document 1: Japanese Patent Laid-Open No. 10-10088

Patent Document 2: Japanese Patent Publication No. 11-502931

Patent Document 3: Japanese Patent Laid-Open No. 2002-21715

Patent Document 4: Japanese Patent Laid-Open No. 2000-249074

[0009] However, these methods depend on the physical properties of the fluid to be used and require an external driving force. Therefore, the analysis system becomes large and complicated, and it takes time to manufacture and operate, and it is difficult to handle. There's a problem. These methods are suitable for transporting simple fluids that do not require precise control over a long period of time, such as simple tips that are analyzed or inspected at the site of use and then disposable. .

Disclosure of the invention

Problems to be solved by the invention

[0010] Therefore, the object of the present invention does not depend on the physical properties of the fluid to be used, and can be transported without using a special external drive device such as an external pump. A suction structure and a method of forming the same are provided.

Means for solving the problem

[0011] As means for solving the above-mentioned problem, the invention according to claim 1 has an internal space separated from the vacuum space by a separating layer on the vacuum space reduced to a pressure lower than the atmospheric pressure, A covering layer is provided to cover the internal space, and a bridge portion is provided in the internal space to transmit external force to the separation layer and destroy a part of the isolation layer. A microstructure having a flow path space connected to an external space, and present in the flow path space or in a space connected to the flow path space due to the decompression of the internal space due to the destruction of the isolation layer A micro-suction structure characterized in that a fluid that is gas and Z or liquid is transported toward the internal space.

[0012] As means for solving the above-mentioned problem, the invention according to claim 2 is described in claim 1. In the invention, in order to maintain the vacuum degree in the vacuum space or to further increase the vacuum degree, the adsorbent may be a micro suction structure installed in the vacuum space.

[0013] As a means for solving the above-mentioned problem, the invention according to claim 3 is connected to the internal space for transporting a fluid in a plurality of different spaces in the invention according to claim 1 or 2. It may be a microsuction structure in which one or a plurality of the channel spaces and one or a plurality of different small spaces connected to the channel spaces are formed.

[0014] As a means for solving the above-mentioned problem, the invention according to claim 4 is the invention according to any one of claims 1 to 3, wherein the vacuum space, the isolation layer, and the internal The space, the channel space, the small space, and the coating layer are made of Pyrex (registered trademark) glass, silicon, PDMS, polyethylene, polypropylene, polyolefin, PET, chlorinated chloride, acrylic, fluorine resin, epoxy resin. It may be a micro-suction structure in which one or a plurality of types of material forces are also selected. These materials are materials that can be easily processed by conventional techniques related to processing that is not expensive but easy to handle.

[0015] As means for solving the above-mentioned problems, the invention according to claim 5 is characterized in that a vacuum space reduced to an atmospheric pressure or lower is formed in the base layer, and an internal space separated from the vacuum space by an isolation layer. Is formed in the flow path layer, the internal space is covered with a covering layer, an external force is transmitted to the isolation layer, and a bridge portion for breaking a part of the isolation layer is provided in the flow path layer. A method of forming a micro-suction structure that includes forming in the channel layer a channel space that is formed in a partial space and connected to the internal space and the external space, and a small space that is connected to the channel space. The base layer, the isolation layer, the flow path layer, and the coating layer are laminated and bonded by a technique related to bonding such as positive electrode bonding or thermal welding. A method of forming a bow I structure.

[0016] As a means for solving the above problem, the invention according to claim 6 is the invention according to claim 5, wherein the vacuum space is joined to the base layer and the isolation layer under a simple vacuum. Thus, a method of forming the micro suction structure to be formed may be used.

[0017] As a means for solving the above-mentioned problems, the invention according to claim 7 is the invention according to claim 5 or 6, wherein one or a plurality of the vacuum spaces are provided in one base layer. or Is related to wet or dry etching using optical lithography, machining, FIB, LIGA, hot embossing, and printing on one flow path layer that has a plurality of the internal spaces and the flow path space connected to each internal space. It may be a method of forming a micro-suction structure to be formed by selecting and using technical power. These processing techniques are suitable for forming a plurality of spaces on a plane simultaneously or sequentially. In order to form one micro suction structure or to form a plurality of micro suction structures simultaneously. Used in

[0018] As a means for solving the above-mentioned problem, the invention according to claim 8 is the invention according to any one of claims 5 to 7, wherein one or more of the flows connected to the internal space are provided. A path space and one or more small spaces connected to the flow path space form a micro-suction structure that is formed simultaneously when the internal space and the flow path space are formed in the flow path layer. Even the method.

The invention's effect

[0019] According to the invention of claim 1, when a force is directly or indirectly applied to one place on the minute suction structure from the outside, the force is transmitted to the isolation layer via the bridge portion. Therefore, a part of the isolation layer is destroyed, the internal space and the vacuum space are connected, fluid flows from the internal space to the vacuum space, the internal space is depressurized, and the flow path space and the flow are The fluid in the space connected to the road space is sucked toward the internal space. Therefore, an external driving force for transporting the fluid is not required, and the fluid existing in the flow path space or in the space connected to the flow path space can be transported.

[0020] According to the invention of claim 2, since the adsorbent is installed in the vacuum space, the degree of vacuum in the vacuum space is maintained or the degree of vacuum is further increased. It is possible to maintain the suction force for transporting the fluid in the interior or the space connected to the flow path space, or increase the suction force.

[0021] According to the invention of claim 3, since one or a plurality of the flow passage spaces connected to the internal space are formed, when the internal space is decompressed due to partial destruction of the isolation layer, one or Fluid in a plurality of the flow path spaces and spaces connected to the flow path spaces can be transported. For example, combining a plurality of flow path spaces to branch or mix fluids You can also. Furthermore, since one or more of the small spaces connected to the flow path space are formed, the fluid to be transported can be manipulated. For example, a reactive substance can be installed in the small space, and a fluid transported in the small space can be reacted. Furthermore, the internal space and the vacuum space also serve as a space for retaining the used fluid that has been transported or reacted.

[0022] According to the invention of claim 4, the material for forming the micro-suction structure can be easily processed by a conventional technique related to easy-to-access processing, which is not expensive, and is inexpensive and can be discarded after use. A micro-suction structure that can be provided can be provided. Furthermore, as described above, a simple and inexpensive analysis or inspection chip including a micro suction structure is provided by forming the flow path space related to transportation and the small space related to operation in the material. You can also.

[0023] According to the invention of claim 5, since the micro suction structure is formed by laminating and joining the base layer, the isolation layer, the flow path layer, and the coating layer, many complicated formation elements are formed. A minute suction structure can be easily produced without requiring a process. This is a formation method suitable for mass production.

[0024] According to the invention of claim 6, the vacuum space is formed by joining the base layer and the isolation layer under a simple vacuum. It does not need a place.

[0025] According to the invention of claim 7, one or more of the vacuum spaces are connected to the base layer, and one or more of the internal spaces and the flow path space connected to each of the internal spaces are the flow path layers. In addition, it is formed with a processing technique suitable for mass production in which a plurality of spaces are formed simultaneously or sequentially on a flat surface. Thus, a plurality of minute suction structures can be formed simultaneously.

[0026] According to the invention of claim 8, the internal space, the one or more flow passage spaces connected to the internal space, and the one or more small spaces connected to the flow passage space are arranged in front of each other. Since the flow path layer is formed at the same time, the flow path layer used for the transportation and the small space related to the operation are reduced by the same number of lamination joining steps as the micro suction structure is formed. It is also possible to produce a simple analysis or inspection chip with a fine suction structure. wear. Further, a plurality of the vacuum spaces are formed in the base layer, the plurality of internal spaces, one or a plurality of the channel spaces connected to each of the internal spaces, and one channel connected to the channel space Alternatively, by simultaneously forming a plurality of the small spaces in the flow path layer, a plurality of micro suction structures can be attached with the same number of lamination joining steps as when one micro suction structure is formed using those layers. It is also possible to form a simple analysis or inspection chip.

Brief Description of Drawings

FIG. 1 is a schematic sectional view of a micro suction structure according to an embodiment of the present invention.

FIG. 2 is a schematic top view of one component part of the micro suction structure according to the embodiment of the present invention.

FIG. 3 is a schematic top view of a component part of a micro suction structure according to an embodiment of the present invention.

FIG. 4 is a schematic top view of one component part of the micro suction structure according to the embodiment of the present invention.

FIG. 5 is a schematic top view of a component part of a micro suction structure according to an embodiment of the present invention.

FIG. 6 is a process of forming a micro suction structure according to an embodiment of the present invention.

FIG. 7 is a step of forming a micro suction structure according to an embodiment of the present invention.

FIG. 8 is a step of forming a micro suction structure according to an embodiment of the present invention.

FIG. 9 is a step of forming a micro suction structure according to an embodiment of the present invention.

Explanation of symbols

[0028] 11 Coating layer

12 Channel layer

13 Isolation layer

14 Basal layer

15 Adsorbent

16 Bridge part

17 Small parts destroyed

21 Vacuum space

22 Internal space

23 Channel space

24 Channel end

25 small space 26 Damaged parts

31 External force

32 Fluid flow

BEST MODE FOR CARRYING OUT THE INVENTION

FIG. 1 is a cross-sectional view of a micro suction structure according to an embodiment of the present invention. FIG. 2 shows a top view of layer 12 in FIG. The micro-suction structure is separated by a separation layer 13 on a vacuum space 21 having a volume of 3 × 10 ³ mm ³ or less, which is decompressed to an atmospheric pressure in the range of vacuum degree 10 ^_6 to 10 ^_3 _TOT r or less. A covering layer 11 is provided to cover the inner space 22, and a bridge portion 16 that transmits a force 31 applied directly or indirectly from the outside to the separating layer 13 is provided in the inner space 22. This is a micro-suction structure provided with a flow path space 23 connected to the internal space 22 and the external space as shown in FIG.

[0030] The base layer 14 including the vacuum space 21, the isolation layer 13, the flow path layer 12 including the internal space 12 and the flow path space 23, and the covering layer 11 are made of, for example, Nylex (registered trademark) glass or silicon. Inorganic materials PDMS, polyethylene, polypropylene, polyolefin, PET, chlorinated chloride, acrylic, fluorine resin, epoxy resin, etc. .

[0031] The thickness of the base layer 14, the isolation layer 13, the flow path layer 12, and the covering layer 11 is in the range of 0.5 mm to 3. Omm.

In order to maintain the vacuum level in the vacuum space 21 or to further increase the vacuum level, the adsorbent 15 may be installed in the vacuum space 21. As an example of the adsorbent 15, a porous material that adsorbs gas, such as Stl22 sold by SAES Getter, is used.

[0033] When an external force 31 is applied to one place on the microsuction structure, the small portion 17 to be destroyed, which is a part of the flow path layer 12 including the internal space 22 shown in FIG. The external force 31 destroys a part of the isolation layer 13 through the bridge portion 16 of the flow path layer 12. At that time, the fluid force in the internal space 22 flows into the vacuum space 21 in the direction of the arrow 32, whereby the internal space 22 is depressurized, and the flow path space 23 has a flow path end 24 that is a part of the flow path space 23. The fluid in the connected space is sucked toward the internal space 22. Therefore, it is possible to transport the fluid present in the space connected to the channel space 23 in the channel space 23 without requiring external driving force. [0034] When an external force 31 is transmitted to a part of the isolation layer 13 via the bridge portion 16 to the isolation layer 13, the thickness of a part of the isolation layer 13 is smaller than that of the other part so that the part of the isolation layer 13 is easily broken. A thin, groove-like part to be destroyed 26 may be formed.

[0035] One or more channel spaces connected to the internal space 22 and one or more small spaces connected to the channel space 23 are related to, for example, fluid mixing, reaction, separation, extraction, analysis, etc. As an arbitrary unit operation part, it may be arbitrarily formed in the channel layer 12 shown in FIG. Fig. 3 shows an example of the channel layer 12 formed to sequentially react the fluid sucked from the channel end 24 using different reactants installed in two different small spaces 25. . Fig. 4 shows the flow path layer formed to branch the fluid sucked from the flow path end 24 and react in parallel using different kinds of reactants installed in two different small spaces 25. 12 examples. Fig. 5 shows an example of the channel layer 12 formed to mix different fluids sucked from the two channel ends 24 and react with each other using the reactants installed in the small space 25. is there.

FIG. 6 to FIG. 9 show a method of forming a micro suction structure as an example of the embodiment of the present invention.

[0037] As an example, the base layer 14 has a 3 mm thick Pyrex (registered trademark) glass, the isolation layer 13 has a 500 m thick silicon substrate, and the channel layer 12 has a 2 mm thick Pyrex (registered trademark) glass.

For the covering layer 11, PDMS having a thickness of 500 μm is used.

[0038] As a first step, as shown in FIG. 6, a microspace having a width of 10 mm, a depth of 1.5 mm, and a length of 20 mm, which forms a vacuum space 21, is formed of Pyrex (registered trademark) glass having a base layer of 14. In addition, etching was formed by means such as machining.

[0039] As the second step, the adsorbent 15 was placed in the minute space formed in the first step in order to maintain the vacuum degree of the vacuum space 21 or further increase the degree of vacuum. As an example of the adsorbent 15, a porous material that adsorbs gas, such as Stl 22 sold by SAES Getter, was used.

[0040] As the third step, as shown in FIG. 7, a to-be-destructed portion 26 having a width of 10 mm, a depth of 400 μm, and a length of 10 mm is formed on the silicon substrate of the isolation layer 13 by etching or machining. Formed by means.

[0041] As the fourth step, the vacuum space 21 is isolated from the Pyrex (registered trademark) glass of the base layer 14. It is formed by anodic bonding of the silicon substrate of layer 13 at a bonding temperature of 400 degrees Celsius under a vacuum of ^10_4 Torr. At the time of joining, the adsorbent 15 is heated for a certain period of time, so it is activated and adsorbs the gas remaining in the vacuum space to maintain the degree of vacuum.

As a fifth step, as shown in FIG. 8, an internal space 22 including a bridge portion 16 and a small portion 17 to be destroyed as shown in FIG. 2, a flow path space 23 connected to the internal space 22, A small space 25 as shown in FIGS. 3 to 5 was formed in the Pyrex (registered trademark) glass of the channel layer 12 by means such as etching or machining.

[0043] As a sixth step, a glass (Norex) glass of the flow path layer 12 was anodically bonded onto the silicon substrate of the isolation layer 13. The Pyrex (registered trademark) glass of the flow path layer 12 and the silicon substrate of the isolation layer 13 may be bonded simultaneously with the bonding of the silicon substrate of the isolation layer 13 and the Nilex (registered trademark) glass of the base layer 14. But you can do it sequentially.

As the seventh step, as shown in FIG. 9, the internal space 22 is formed by oxidizing the surface of the PDMS of the coating layer 11 by means of oxygen plasma or the like, and then the Pyrex of the flow path layer 12. (Registered trademark) It is formed by sticking so as to cover the glass.

[0045] As an example of an embodiment of the present invention, only one micro-suction structure is shown in the figure, but a base layer 14 having a large area, an isolation layer 13, a flow path layer 12, When forming a plurality of internal spaces 22 in the flow path layer 12, which is one of the forming steps in which a plurality of micro suction structures can be formed simultaneously using the coating layer 11, Channel space 23 or small space for any unit operation part connected to internal space 22, for example, as shown in Figs. 3-5, involved in fluid mixing, reaction, separation, extraction, analysis, etc. 25 may be formed simultaneously.

Claims

The scope of the claims

[1] An internal space separated from the vacuum space by a separating layer is provided on a vacuum space whose pressure is reduced to below atmospheric pressure, and a covering layer is provided to cover the internal space. A microstructure that is provided with a bridge portion for transmitting the mosquito from the isolation layer to destroy a part of the isolation layer, and provided with a flow path space connected to the internal space and the external space; Due to the decompression of the internal space due to the destruction of the isolation layer, the gas and the fluid that is Z or liquid in the flow path space and the space connected to the flow path space are transported toward the internal space. Characteristic micro-suction structure.

[2] The microsuction structure according to claim 1, wherein an adsorbent is installed in the vacuum space in order to maintain the vacuum degree in the vacuum space or to further increase the vacuum degree. body.

[3] One or a plurality of the channel spaces connected to the internal space and one or a plurality of different small spaces connected to the channel space are formed for transporting the fluid in a plurality of different spaces. The microsuction structure according to claim 1 or 2, wherein

[4] The vacuum space, the isolation layer, the internal space, the flow path space, the small space, and the coating layer are made of Pyrex (registered trademark) glass, silicon, PDMS, polyethylene, polypropylene, Any one of claims 1 to 3, characterized in that one or more types of material forces are also formed, such as polyolefin, PET, butyl chloride, acrylic, fluorine resin, epoxy resin, etc. The micro suction structure according to Item.

[5] A vacuum space reduced to atmospheric pressure or lower is formed in the base layer, an internal space separated from the vacuum space by the isolation layer is formed in the flow path layer, the internal space is covered with a coating layer, and externally A flow path space connected to the internal space and the external space by forming a bridge portion in the internal flow space in the flow path layer to transmit a force of A method of forming a micro-suction structure comprising forming a small space connected to the flow path space in the flow path layer, the base layer, the isolation layer, the flow path layer, and the A method of forming a micro arch I structure characterized in that the coating layer is laminated and bonded by a technique related to bonding such as anodic bonding or thermal welding.

[6] The vacuum space is formed by joining the base layer and the isolation layer under a simple vacuum. 6. The method of forming a microsuction structure according to claim 5, wherein the microsuction structure is formed.

[7] One or a plurality of the vacuum spaces are formed in the base layer, and one or a plurality of the internal spaces and the flow path spaces connected to the internal spaces are formed in the flow path layer using a wet or The microabsorbent I structure according to claim 5 or 6, wherein the structure is formed by selecting and using a technical force related to dry etching, machining, FIB, LIGA, hot embossing, and printing. Method.

[8] One or more of the channel spaces connected to the internal space, and one or more of the small spaces connected to the channel space, the internal space and the channel space as the channel layer. The method for forming a micro arch I structure according to any one of claims 5 to 7, wherein the micro arch I structure is formed at the same time as forming.