WO2007039053A1 - Process and device for controlling an optical scanner - Google Patents

Process and device for controlling an optical scanner Download PDF

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Publication number
WO2007039053A1
WO2007039053A1 PCT/EP2006/008944 EP2006008944W WO2007039053A1 WO 2007039053 A1 WO2007039053 A1 WO 2007039053A1 EP 2006008944 W EP2006008944 W EP 2006008944W WO 2007039053 A1 WO2007039053 A1 WO 2007039053A1
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WO
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Patent type
Prior art keywords
scanner
beam
signals
input
movement
Prior art date
Application number
PCT/EP2006/008944
Other languages
German (de)
French (fr)
Inventor
Ulrich Meisel
Original Assignee
Carl Zeiss Microimaging Gmbh
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/0004Microscopes specially adapted for specific applications
    • G02B21/002Scanning microscopes
    • G02B21/0024Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0036Scanning details, e.g. scanning stages
    • G02B21/0048Scanning details, e.g. scanning stages scanning mirrors, e.g. rotating or galvanomirrors, MEMS mirrors
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/0004Microscopes specially adapted for specific applications
    • G02B21/002Scanning microscopes

Abstract

In a process for driving an optical scanner (4) so as to deflect at least one beam (2, 7) of optical radiation, in particular for driving a scanner (4) of a laser scanning microscope or laser manipulator, input signals are acquired over an input interface; the input signals represent at least one set position or a sequence of such set positions of at least one coupling element of the scanner (4) or beam (2, 7), the coupling element being moved to deflect the beam. In order to move the beam (2, 7) driving signals for the scanner (4) are generated depending on the input signal, using at least one scanner parameter which reproduces at least one driving property of the scanner (4), and the driving signals are transmitted to the scanner (4).

Description

A method for controlling an optical scanner and controlling apparatus for an optical scanner

The present invention relates to a method for controlling an optical scanner and a control device for an optical scanner.

In the investigation and / or processing or manipulation of small objects such as microscopically examined samples an illumination beam or -Strahlenbündel is often performed on the object to examine specific portions of the object and / or edit or manipulate. In scanning microscope an image of a sample is generated, are deflected in the emanating from different portions of the sample observation beam or -Strahlenbündel a stationary detector which detects the intensity of the observation beam or -Strahlenbündel depending on the direction of the observation beam or -Strahlenbündel. Known and important examples include laser scanning microscopes or so-called laser manipulators, processed by means of which microscopic samples to be examined, for. As can be bleached.

For deflecting the beam to be steered or beam, that the illumination and / or observation beam or -Strahlenbündels, a drivable by drive signals deflector, which is also referred to as an optical scanner, is used. This deflection device has at least one drive unit, by means of which a beam-deflecting element, for example a mirror, can be moved in accordance with the supplied drive signals of the drive unit into various positions and thus the beam or the beam along predetermined paths. a control unit which is usually designed as a real-time computer is used for controlling the optical scanner.

In known laser-scanning microscopes, the sample to be examined is scanned line by line with a laser beam or scanned to obtain an image of the sample. The motion of the beam can usually be carried out with known scanners and control devices with good accuracy and acceptable speed.

However, for a number of study or adaptations of samples or objects, it is desirable to direct the beam or the beam to a desired predetermined range of the sample or pass the beam or the beam sequentially to different predetermined points or areas of the sample to can. Such a procedure, although with known laser-scanning microscopes conceivable, but can be carried out starting up of individual points or regions accuracy only at a low speed in the desired overall. Also, the beam is decelerated when reaching a point usually up to the stop. This reduces the operating speed, with which a user examine a sample, edit, or manipulate. A low response speed of the scanner to input from a user can be very uncomfortable especially for the user as a response to inputs is slower, the entries can be made as well.

The present invention therefore has for its object to provide a method for controlling an optical scanner for deflecting at least one beam of optical radiation, which allows a quick positioning of the beam, and to provide a corresponding control device.

The object is achieved by a method for controlling an optical scanner for deflecting at least one beam of optical radiation, in particular of an optical scanner for a laser scanning microscope or a laser-manipulator, in which beschnittstelle a Einga- input signals detected at least a target position reflect at least a moving for beam deflection coupling element of the scanner or the beam or a series of such desired positions, and for moving the beam in response to the input signals using generated at least one at least one drive feature of the scanner reproducing scanner parameter control signals for the scanner and delivered to the scanner.

The object is further achieved by a controller for an optical scanner for deflecting at least one beam of optical radiation, in particular a scanner for a laser scanning microscope or a laser-manipulator, comprising an input interface for acquiring input signals, the at least one predetermined position at least one moving for beam deflection coupling element of the scanner or the beam or a series of such reference positions to play, and control signal generating means, a check connected to the input interface, which includes a memory in which an at least one drive feature of the scanner reproducing scanner parameter is stored at least and the outputs of at least a scanner generates parameter control signals for the scanner and for moving the beam in response to sensed via the input interface input signals using.

An optical scanner which can be controlled by the method according to the invention and suitable for carrying out the process of the invention control means may, in particular via a drive unit for moving at least have a beam deflecting element such as a mirror or a prism, which itself at least one drive and optionally an electronic drive unit containing, for example, a driver electronics. For transmitting the movement of the drive to the beam-deflecting element serving for beam deflection moving the coupling element, which can be, for example, an output shaft. To be generated for driving control signals shall do so in their own way to the scanner, which is to be controlled. The scanner can deflect the beam in one or two dimensions. Particularly in the case of a deflection in two dimensions, the drive unit may comprise two actuators, each of which can move a beam-deflecting element for a deflection in one of the two dimensions. In this case, in particular, two coupling elements can then be provided.

In order to control the input signals are first acquired via the input interface, representing a desired position or a sequence of successively to moving target positions of the moving of the drive coupling element of the scanner or of the associated beam-deflecting element or of the deflected beam. The desired position of the beam can be indicated, for example, by angle by the mirror to be tilted as a beam-deflecting elements. In particular, the input signals may be a position, such as a by a pointer or pointing device selected point, play in an image of a sample. However, the desired position of the beam can be given a through the beam on a given surface, particularly a plane generated light spot on the surface by specifying the position.

then the control signals are generated for the scanner and discharged in response to these input signals, and optionally further parameters or signals. In order to allow a quick and accurate movement of the beam-deflecting element and the beam, while the at least one property of the at least one drive scanner How-dergebende scanner parameter is used. Under the scanner parameters of the present invention will be understood in particular, an arbitrary parameter in the framework that represents a physical or physical property of the scanner, particularly the drive unit of the scanner, in particular, be caused by the structure of the scanner - A -

can. Examples of such scanner parameters are maximum acceleration or maximum speeds at which the beam-deflecting element or the beam deflecting elements can be moved or can and are to a limited extent by the construction of the scanner.

By using this scanner parameter or plurality of such scanner parameters, it is possible to generate the drive signals so that the enabled by the structure of the scanner movement possibilities can be fully utilized even if the target position after installation of the scanner is input into a device only. This has the advantage, target positions can be approached quickly and accurately, which enables a fast and comfortable working.

The control basically need only movement in a direction to affect, but preferably is the controller for a scanner that allows a deflection of the beam in two dimensions, and movement of the deflected beam in two separate directions or in two dimensions possible.

The driving signal generating means, the control means may comprise a formed electronic circuit for implementing the method, which is not pro- grammable substantially. Preferably, however, the driving signal generating means has a memory connected to the processor for executing instructions of a computer program. a computer program in the memory then preferably stored, which comprises instructions that when executed the driving signal generating means and in particular the processor in performing the inventive method, and particularly detects input signals via an input interface of the control device, the at least one predetermined position of the scanner or of the beam or a series of such reference positions represent, for moving the beam from the input signals using at least one scanner parameter control signals for the scanner generates and outputs to the scanner. Next this case is preferably added at least one software part of the input interface by the driving signal generating means.

The invention therefore also provides a computer program for controlling an optical scanner for controlled deflection of at least one beam of optical radiation, in particular a scanner for a laser scanning microscope or a laser-manipulator, comprising instructions when executed a data processing device, in particular a processor is to execute the inventive method, and in particular via an input interface of the data processing device, for example the control device, input signals detected, the at least one predetermined position of a steering least to Strahlab- moving coupling element of the scanner or the beam or a series of such reference positions reflect, generates the movement of the beam from the input signals using at least one scanner parameter control signals for the scanner and outputs it to the scanner.

the invention further relates to a data storage medium that is computer readable and on which an inventive computer program is stored. As media are, in particular magnetic, magneto-optical or optical disk and non-volatile memory elements such as EEPROM or flash memory into consideration.

The control signals generated can preferably via a Ansteuersignalausgabeschnitt- put to the scanner be delivered, via the control device preferably has.

The drive signals need not only a function of the input signals and the at least one scanner to be generated parameters. Rather, the actual position of the coupling element or of the beam in the generation of the drive signals is preferably taken into account. The actual position can then be determined during the execution of the method, that is when entering the input signals. Preferably comprises the control means, in particular the driving signal generating means, for this purpose a Rückmeldesignalschnitt- spot, can be detected via the feedback signals of a position sensor which detects the position of the coupling element of the scanner.

The generation of the control signals from the input signals can be done in different ways.

In a preferred embodiment of the method, a target track is determined to generate the drive signals in dependence on at least the input signals and from the target path, the control signals are generated. Preferably, the control device and in particular the driving signal generating means for generating the Ansteuersigna- Ie as a function of at least the input signals, a target track and generated from the target path, the control signals determined. The computer program comprises instructions to, preferably, at the execution of the instructions executing processor for generating the control signals determines at least the input signals a target path in response and generates the drive signals from the target path. Under the target path is in this case the con- tinuous course of one or more understood the position of the at least one moving coupling element for beam deflection of the scanner or the beam-defining variables, which need not necessarily reflect the time course. If the setpoint position defined by specifying the position of a light spot generated by the beam in a plane, the target trajectory of the predetermined path of the light spot can accurately correspond.

This embodiment has the advantage that the determination of the target web can initially be performed with or without regard to the scanner parameter.

The target path can be determined in at least two different ways.

According to a preferred embodiment, from the target path using the at least a scanner parameter, a desired movement and determined from the target movement, the drive signals. For this purpose the control device is so constructed and the computer program includes those instructions that the driving signal generating means or the instructions executing processor from the target path using the at least a scanner parameter, a desired movement and determined from the target movement, the drive signals.

Under a desired movement, not only the indication of the target path, but also an indication of the time course of the movement of the at least one coupling element or of the beam is understood in the context of the present invention thereby. In particular the time dependence of one or more variables is meant by target movement, which define the position of at least one moving coupling element for beam deflection of the scanner or the beam. This embodiment has the advantage that the target path can be specified first without taking into account the characteristics of the scanner or the scanner parameter, and need be only then determines the desired movement, in which case a scanner parameter is used the GR nigstens. In particular, typically by only a few predetermined target positions or the trajectory of the coupling element deflected by the beam deflecting element beam with respect to the positions between the desired positions can be completed simply and efficiently. Thus, the reference path may optionally by detecting a further input signal representing at least one shape specification in conjunction with the SoII- positions, be fully defined, and it can be determined as a function of said further input signal, the target path. Examples of such, more precisely defined by additional form data target tracks are for example a predefined by at least three points or one point and a radius of a predetermined circle, a given by at least three points of ellipse, the target positions interpolated spline curve, a likewise interpolative Bezier curve or the like. The actual movement of the scanner and the beam can then be determined by setting this target path. The actual target movement can be determined as a function of the scanner parameter, and optionally other specifications. According to another embodiment is already using a scanner parameter for determining the target path at least. The control device is preferably designed so and the computer program contains instructions to such that the Ansteuersi- gnalerzeugungseinrichtung or instructions executing processor to determine the target path using at least one scanner parameters. This embodiment has the advantage that the determination of the target path can be done using a scanner parameter is already at least and may therefore already optimized. This can be a significant advantage especially when only different target positions advertising hit the intended, the path between these, however, is irrelevant.

Thus, it is preferred in a further development that the target path and / or the desired movement of a scanner parameters with the aim of a shortest possible total duration of the movement of the beam is determined in dependence on the at least. The control device is formed to such off and the computer program has to such instructions on that the Ansteuersignaleinrichtung or instructions processor executing the target path and / or the desired movement in dependence on the at least one scanner parameters with the goal of a possible can detect short overall duration of the movement of the beam. This embodiment is particularly in the case that the beam is to be moved into predetermined positions, the movement between the positions, however, from the perspective of the user does not matter advantageous. The target path and / or the desired movement can be determined with regard to the shape of the trajectory as well as to use in the acceleration taking into account the at least one scanner parameter with the aim of a short overall duration of the movement. The movement can take place from the current actual position or the first target position out to the final desired position. For example, can be used for determining the target track and the target movement procedure of the theory of optimal control. Depending on the maximum possible amount of computation for determining the target track and / or movement of the motion detected does not necessarily need a minimum of the total duration of the movement display, however, the total duration of a motion from a start position to an end position over at least a central predetermined position lower than at a known movement in which the jet speeds for starting each position from the rest, then moved at constant speed, and finally decelerated to a stop.

Particularly preferably, then, an embodiment of the method, wherein in the case that the input signals represent at least two desired positions, the desired movement is so determined from the input signals, that the coupling element of the scanner or the beam through the first adjusted reference position is moved. the control means is preferably operable so formed and preferably contains to the computer program such instructions that the driving signal generating means or the instructions executing processor upon detection of input signals representing at least two desired positions, so determines the desired movement of the input signals, that the coupling element of the scan ners or the beam is moved through the first to be set target position. In other words the coupling element or the beam is not stopped at the first target position but moved through these, which has the advantage that a particularly short duration of the movement is obtained. In particular, the maximum possible acceleration or deceleration of the coupling element can be used as a scanner parameters.

Further wherein a predistortion is performed, it is preferred in the method to determine a desired movement of the beam in the generation of the drive signals from the input signals to reduce deviations between the actual motion and target motion. The control device is preferably designed so and the computer program preferably comprises thereto such instructions that the driving signal generating means or an instructions executive processor for generating the control signals calculated from the input signals a target movement of the beam, wherein a predistortion is performed to deviations between actual movement and target movement to reduce. This embodiment has the advantage that occurring in the implementation of the drive signals in the movement of the beam distortion of signals can be compensated by the pre-distortion by the pre-distortion so that the actual movement of the scanner or the beam as closely as possible the desired movement and thus corresponds to a precise movement of the beam is easily possible. More particularly, the predistortion may consist in a representation of the driving signals by Fourier components that testified ER from the input signals Fourier amplitudes or phases divided by corresponding amplitude components of a transfer function of the scanner or are subtracted from this corresponding phase components of the transfer function.

The invention can be used on the one hand, from a state in which the coupling element of the scanner or the beam rests to move the coupling elements of the scanner or the beam. However, it is in the process also possible to interrupt upon detection of the input signals a movement of the beam by the scanner to determine the actual position and to use for generating the drive signals and to output further control signals to output the drive signals generated so that the interrupted movement of the beam is continued. The control device is preferably designed so, or the computer program contains thereto such instructions that the control device or an instructions executive processor upon detection of the input signals interrupting a movement of the beam by the scanner, determines the actual position and for generating well as the control ersignale used, and after the delivery of the drive signals generated to write more drive signals so that the interrupted motion of the beam is continued. This embodiment has the advantage that a user, for example, interrupt during a corresponding to be obtained by scanning the image acquisition scanning with a solution given for the Bilderfas- image scanning movement and the movement can be allowed to continue the beam on his own terms the advantage. The broken picture scanning movement of the beam may be a predetermined by a predetermined mode of the control device movement in particular, for example, a line-shaped scanning of a sample. In order to enable the fastest possible start-up of the desired positions taking into account the scanner parameter, the desired movement of the scanner or beam is preferably determined such that, when the interruption of the predetermined image scanning motion of the beam, the beam without stopping in the direction of the next approaching target position is moved.

The input interface any interface can basically be considered. In particular, the input interface may include various types of interfaces. Thus, it is preferable in the method that the input interface comprises an interface for an input device for inputting device for inputting data by a user. In the control device, the input interface of a hardware interface comprises a input device. As hardware interfaces, for example, serial interfaces, RS232 interfaces, USB interfaces or wireless interfaces such as working IrDa, Bluetooth or WLAN interfaces are considered. The operable by a user input device can thereby be selected arbitrarily. For example, it may be a pointing device such as a mouse, trackball or joystick, or keyboard, the input interface then also may include a corresponding software module and a graphical user interface. This embodiment has the advantage that the user can directly enter the desired positions is very simple and the inputs and the corresponding input signals can be processed very quickly.

In particular, and analog signals can be used as input signals in addition to digital signals. In the control device, the input interface preferably an analog / digital converter then comprises. The use of analog input signals has the advantage that very simple input devices can be used.

In another embodiment, it is preferred in the method that the input interface is a software interface for at least one other program or other process. In the control device, the input interface comprises for this purpose a software interface for at least one other program or other process. The input signals are then preferably digital signals. The software interface needs while allowing only the transmission of data representative of the desired movement, but may still be in addition to recording additional control data trained. The program or process can thereby take place in the control device itself or on an output coupled to the control device operation calculator. Particularly when using a back sufficiently fast processor, the computer program for performing the process on the same processor are carried out as the process or program, which outputs the input signals. This makes it possible in an advantageous manner, stored or generated by the program to use the desired positions reproducing data as input signals, and thus to facilitate the operation.

The input signals need not only to refer to the desired positions. Thus, it is in the process preferred that more input signals are detected via the input interface, representing at least one desired property of the deflected beam or commands for an image capture and / or processing means, and Verwen- fertil of further input signals, lighting control signals for a lighting device are generated for discharging the deflected beam with the desired property or control signals for the capture and / or processing means and output to them. The control means preferably has for this purpose an output interface to output lighting control signals to a lighting device for delivering the abzulenken- the beam and / or supply control signals to an image capture and / or processing means and is further adapted, on the input interface further input signals to detect the at least one desired property of the deflected beam or instructions for the image capture and / or processing means to play, and lighting control signals to a connected to the output interface sawn illumination unit for discharging the deflected beam or control commands for the imaging and / or - produce processing device and deliver via the output interface to it. This embodiment allows in an advantageous manner to enter through a single interface, not only the desired positions of the beam, but also the lighting characteristics or instructions for registering and / or processing of images, which facilitates the operation. In particular, the intensity or fluence of the beam in dependence on the desired positions may preferably be specified, so that movement of the beam täts- respectively associated intensities in the desired positions with the desired positions or carried fluence values ​​may , In addition, can easily be changed by entering corresponding further input signals, for example, the display of captured images, which form the basis for the input of desired positions, so that thereby the operation is simplified. The control means may be realized in different ways. According to one embodiment, it is preferable that the control device comprises a real-time computer. This real-time computer may in particular serve to generate the control signals in real time from the input signals, and output the drive signals generated directly to the scanner, which has the advantage that no substantial time delays can be caused by slow interfaces.

However, according to another embodiment, it is also possible that the control device is given by an operating computer with a user interface. In particular, can be used as a user interface, a graphical user interface (GUI), which allows a particularly simple operation. The controller may then be passed through a corresponding software module that generates the driving signals with a corresponding performance of the processor, possibly in parallel with other processes, also in real time.

The invention is in principle applicable for any scanner, but in particular for scanner in laser scanning microscopes or laser manipulators. The present application therefore also provides a laser scanning microscope or a laser-manipulator with a scanner and a scanner connected to the control device according to the invention for controlling the scanner.

The invention is explained with reference to the drawings in more detail. Show it:

Fig. 1 is a schematic representation of a laser scanning microscope according to a first loading vorzugten embodiment of the invention,

Fig. 2 is a schematic representation of a scanner, a control and evaluation device and an image display device of the laser scanning microscope in Fig. 1, and

Fig. 3 is a simplified flow chart of a process performed by a driving signal generating means in FIG. 2, the method according to a first preferred embodiment of the invention.

The Fig. 1 comprises a laser scanning microscope according to a first preferred execution of the invention, a lighting module 1 with a laser for emitting a collimated light beam 2 with a small cross section, or a beam splitter 3, by which the illumination laser beam 2 passes a deflector . an optical scanner 4 for the controlled deflection of the illuminating laser beam 2 in two independent directions x and y and a microscope optical system 5 with a tube lens and an objective for focusing the illuminating laser beam 2 on a predetermined plane layer S in an object or a sample 6. From the sample 6 in the region of the focus F of the light beam 2 outgoing detection radiation 7 passes through the microscope optical system 5 to the scan ner 4, the detection radiation 7 descans. Under descanning is understood that the scanner deflects 4 emanating from the on or in the sample 6 wandering according to the deflection of the illuminating laser beam 2 area with the focus F of radiation in a fixed portion of the detection beam path, and in particular the beam splitter 3, so that the portion the movement of the portion of the illumination beam path between the scanner 4 and the sample 6 of the remaining part of the detection beam path is pivoted the detection beam path between the sample 6 and the scanner 4 accordingly, however, remains unchanged.

The scanned radiation detection is then deflected by the beam splitter 3, are arranged behind the the detection beam path in succession a detection optical system 8, a fine aperture or pinhole aperture 9 and a detector 10 degrees. The detection optical system 8 focuses case of the focus area in the sample 6 outgoing detection radiation on the pinhole diaphragm 9 and forms the focal region confocal the pinhole aperture 9, so that substantially only the detection radiation from the layer S of the sample 6, in which the focus F of the beam 2 is Beleuchtungslaser-, reaches the detector 10 degrees. For controlling of the scanner 4 and for receiving detection signals of the detector 10, the latter generates corresponding to the intensity of the received by him detection radiation 7 and outputs, a control and evaluation apparatus 11 is provided, to which an external input device 12, a display device 13 in the form are of a color monitor and at least one other input device 14, in the example in the form of a keyboard are connected. The control and analysis device 11 is also used to shift a sample table not shown in the Fig. 1, which carries the sample 6 along the dashed lines shown the optical axis of the microscope optics 5 and the z-axis, whereby the imaged layer S in the sample can be selected. 6 In addition, it is also connected to the lighting module 1 in order to control the laser therein.

The arrangement in FIG. 1 except for the formation of the control and analysis device 11 with the attached external input device 12 basically known.

The scanner 4 is used for deflecting the light beam 2 in the two look to the optical axis of the microscope optical system 5 and the z-axis orthogonal directions x and y and comprises for this purpose for each of the directions of a drive with a drive circuit 16, which via a coupling element 17 is coupled to a beam-deflecting element 18, such as a mirror, so that it can be provided by the respective drive by the movement of the coupling element 17 in different positions. In the example, the beam-deflecting element 18 is tilted in a predetermined by the respective deflection plane. For clarity, the scanner 4 in Fig. 2 is shown only very schematically simplified, whereby only the drive 15 to the drive circuit 16 and the coupling element 17 and the beam deflecting element 18 for deflecting in the x-direction are shown. Except for the orientation of the drive for the second mirror is constructed accordingly.

The driver circuit 16 includes a regulator which regulates the position of the actuator and the coupling element 17 in response to feedback signals of a Stellungssen- not shown in Fig. 2 sors of the scanner 4 for the respective coupling element 17, representing the position of the coupling element 17.

The control and evaluation device 11 comprises an operating computer 19 in the form of a personal computer and a control device 20 according to a first preferred execution of the invention.

only a few are relevant to the invention of the control computer 19, but not necessarily shown significant parts. The operation calculator 19 serves on the below-mentioned functions also for detecting and evaluating the information provided by the detector 10, image data and displaying the image data on the display device 13, for which purpose it may comprise other components than those shown constituents addition. In addition, the operator computer 19 used to operate the laser scanning microscope including the connected to the control computer 19 via an interface other input device 14 is used, by means of which via a graphical user interface and by means of the display device 13, an operator of the laser scanning microscope is made possible.

The operating computer 19 also has a software interface 21 and a corresponding, in Fig. 2 are not explicitly marked hardware interface to the control device 20.

The control device 20 includes an input interface through which the external input device 12 is connected and which is shown in Fig. 2, only the hardware part 22, and a check-control signal generating means 23 in the form of a real-time computer with a processor 24 and a connected to the processor 24 memory 25. the Ansteuersignalerzeugungsein- direction 23 is for generating and delivering drive signals to the scanner 4 as well as to receive feedback signals representing the position of the scanner 4 or the drive is formed. In the memory 25 a computer program with instructions is stored to, when executed, the processor 24 performs the following process according to a first preferred embodiment of the invention. Furthermore, a driving signal output interface 26 for outputting drive signals to the scanner 4, a Rückmel- designalschnittstelle 27 for detecting return signals of the position sensors, not shown in Fig. 2, an output interface 28 for delivery of lighting control signals to the lighting module 1, and an input-output interface 29 is provided for receiving signals of the control computer 19 and for outputting command signals to the operating computer 19th The input-output interface 29 is also used for detection of input signals from on the processor of the control computer 19 processes running and is therefore to be considered in the context of the invention as part of an input interface.

The input interface 22 is in this example a USB interface for the external input device 12, such as a mouse, and further comprising a realized by the computer program in the real-time computer 23 software input interface.

In the memory 25. Scanner parameters remain stored for the two drives of the scanner 4, in the present embodiment, the maximum acceleration, the maximum deceleration, that is, representing the minimal relative acceleration, and a maximum speed.

In the memory 25 are stored in a further table, which serve to pre-distortion of the drive signals to be generated. In particular, the data may be the inverse of frequency components of a transfer function of the scanner 4, that is, a function that represents the position of the coupling elements 17 and of the beam in response to a signal output to the scanner drive signal 4 represent.

. The illustrated in Figure 3 The method is as follows:

First, the driving signal generating means 23 detects in step S10 via the input interface 22, input signals from the external input device 12, which on the one hand a mode of further processing and on the other hand, a target position or a sequence of desired positions of the coupling elements of the scanner 4, and thus the illumination beam 2 play. To input the graphical user interface of the control computer 19 and connected thereto the display device 13 are used, in particular an image of the sample 6 may already be shown on the display device 13, from which the user by moving a pointer by means of the input device 12 and clicking predetermined points and selects after conversion into suitable coordinate desired positions. In step S12, the driving signal generating means 23 then determines based on feedback signals from the position sensors of the scanner 4, which detects it via the interface Rückmeldesignal- 27, an actual position of the coupling elements and thus the illumination beam. 2

In step S14, the driving signal generating means 23 on the basis of the input signals determines which mode the process is to be continued, and then branches to appropriate software modules in Fig. 3 the branch with the steps S16 and S18 or S24, the branch.

In the first branch with the steps S16 and S18, a target track is used to generate the drive signals in dependence on the input signals and the determined at step S12 actual position determined, and from the target path, the control signals are generated by from the target path using the scanner parameter, a desired movement and from the SoII- movement of the drive signals are determined. The desired movement is determined as a function of the scanner parameters with the aim of a shortest possible total duration of the movement of the beam.

In the hereinafter to be described the second branch S24, however, is the SoII- movement in response to the input signals, that is, the target positions determined by the in step S12, actual position, and scanner parameters with the aim of a shortest possible total duration of detects motion of the beam. Insofar as the scanner parameters are already used for determining the target track, since the portions of the target path are not given between the desired positions by the user, but are determined as a function of the scanner parameters.

In step S16, the target positions are initially determined from the input signals. From the target positions are then determined depending on the input signals of target tracks.

According to a first variant, a target path is determined from the desired positions corresponding to a spline curve by a sequence of points in the image or on the sample. 6 The sequence of points is given by the series of desired positions.

According to a second variant, three target positions are read and ER- averages a target path corresponding to a circle by three given by the target positions of points on the sample 6 or in the image. In step S18, a target movement is then created using the scanner parameter from the target path. Here, in the case that the input signals represent at least two desired positions, so determines the desired movement, that the coupling elements and the beam moves through the first to be set desired position, ie is not stopped therein.

The desired movement is determined for this purpose, depending on the scanner parameters with the aim of a shortest possible total duration of the movement of the beam.

In the second branch on the other hand is directly the desired movement, ie, the time profile of the positions determined from the input signals or the target positions using the scanner parameters. For this purpose any adaptable by parameter functions can be used for example to interpolate the desired positions. The parameters are then adjusted so that under the secondary condition that the scanner parameter, that is, the maximum speeds and maximum accelerations or -abbremsungen, not by corresponding motion parameters are exceeded, the duration of the movement is minimized.

However, other methods from the theory of optimal control can be used.

Once in one of the branches, the desired movement has been determined, in step S20, a predistortion is performed. For this purpose, the target movement, represented by functions of time, represented by corresponding Fourier components. These are then by the corresponding Fourier components of the transfer function representing the response of the scanner 4 or the coupling elements on the drive signals divided.

S22 control signals are then in step from the results formed and delivered to the scanner. 4 By the predistortion is achieved in that the actual movement of the target motion is not or differs only very low.

Takes place at the detection of the input signals a movement of the illumination beam 2 through the scanner 4 instead of, for example, to detect an image, this motion is already interrupted in step S10. After delivery of the control signals, which are given by the input signals, the interrupted motion of the illumination beam 2 is then continued.

It thus results in each case, a fast and accurate implementation of the input signals into corresponding movements of the illuminating beam. Another preferred embodiment differs from the first embodiment in that the input interface comprises input and output interface 29 and a corresponding software interface for another program, or or which is carried out on the control computer 19 to another process. After detecting the input signals, which are generated by the program or process, and output the sequence of the method as in the first embodiment is carried out. The control device differs from that of the first embodiment in that a different computer program stored therein.

Still another preferred embodiment differs from the first embodiment in that is additionally controlled by the input signals, a control of the illumination module 1 and / or operation of the computer 19, that is, more precisely an image data acquisition and analysis.

In the method via the input interface 12, further input signals are detected, representing at least one desired property of the deflected illumination beam 2, for example its intensity, and / or instructions for the image capture and processing means or the operating computer 19th Using the further input signals lighting control signals for the lighting module or the lighting device for discharging the deflected illumination beam 2 having the desired property or control signals for the capture and / or processing means will then be generated and sent to it via the output interface 28 and the switch issued and output interface 29th

In particular, the lighting control signals in response can be generated from the reference positions to be used along the target path, if appropriate, different intensities.

In a further embodiment of the real-time computer is integrated in the service computer 19, wherein the control method for a corresponding process running on the processor of the control computer 19th The processor must then be correspondingly powerful.

Further preferred embodiments differ from the first embodiment in that a serial RS-232 interfaces or drahtlo- se interfaces such as IrDA or Bluetooth can be used instead of the USB interface.

In a further embodiment, the controller is used in a laser manipulator place in a laser scanning microscope. The manipulator can be constructed, such as laser scanning microscope, but with the devices for the detection and imaging are not required.

Claims

claims
1. A method for controlling an optical scanner (4) for deflecting at least one beam (2, 7) of optical radiation, in particular a scanner (4) for a laser scanning
Microscope or a laser manipulator, in which via an input interface (22, 29) input signals are detected, the at least one predetermined position of at least one moving for beam deflection coupling element (17) of the scanner (4) or of the beam (2, 7) or a sequence of such desired positions reflect, and for moving the beam (2, 7) in dependence of at least one at least one drive feature of the scanner of the input signal using (4) reproducing scanner parameter control signals for the scanner (4) is generated and the scanners (4) may be discharged.
2. The method of claim 1, the input signals a target path in which to generate the drive signals in dependence on at least determined, and from the target track, the
Drive signals are generated.
3. The method according to claim 2, in which the actuation signals are determined from the target path using the at least a scanner parameter, a target motion and from the target movement.
4. The method of claim 2 or 3, which is used at least one parameter in the scanner for determining the target track.
5. The method according to any one of claims 2 to 4, wherein the target path and / or the desired movement of at least a scanner parameters with the aim of a shortest possible total duration of the movement of the beam (2, 7) is determined in dependence on the. -
6. The method according to any one of claims 2 to 5, wherein in the case that the input signals represent at least two desired positions, from the input signals, the
Desired movement is determined so that the coupling element (17) of the scanner (4) 2 or beam (, movement is determined so that the coupling element (17) of the scanner (4) or beam (2, 7) by the first be set desired position is moved.
7. The method according to any one of the preceding claims, wherein in the generation of the drive signals from the input signals, a desired movement of the beam (2, 7) is determined, wherein a predistortion is performed to deviations between the actual motion and the desired motion to to reduce.
8. The method according to any preceding claim, in which upon detection of the input reproduction signals movement of the beam (2, 7) by the scanner (4) is interrupted, the
Position is detected and is used to generate the drive signals, and wherein further control signals are delivered after delivery of the trigger signals generated so that the interrupted motion of the beam (2, 7) is continued.
9. The method according to any one of the preceding claims, wherein the input interface (22, 29) has an interface (22) for an input device (12) for inputting data by a user comprising.
10. The method according to any one of the preceding claims, in which the input interface (22, 29) has a software interface (29) for at least one other program or other process comprises.
1 1. A method according to any one of the preceding claims, in which via the input interface (22, 29) further input signals are detected, the at least one desired properties stem of the deflected beam (2, 7) or commands for an image capture and / or - processing means reflect (19), and using the further input signals lighting control signals for a lighting device (1) for delivery of the deflected beam (2, 7) desired property or control signals for the capture and / or processing means (19) generates and this be issued.
12. Control device for an optical scanner (4) for deflecting at least one beam (2, 7) of optical radiation, in particular a scanner (4) for a laser-scanning microscope or a laser-manipulator, comprising an input interface (22, 29) for the detection of input signals, the at least one predetermined position of at least one ner of the scan (4) moving to the beam deflection of the coupling element (17) of the scanner (4) or the beam (2, 7) or playing back a sequence of such desired positions, and with the input interface (22, 29) connected to the driving signal generating means (20) including a memory (25), in which at least one at least one drive feature of the scanner (4) re-imaging scanner parameters is stored, and (for movement of the beam generates 2, 7) in dependence on via the input interface (22, 29) detected input signals using the at least one scanner parameter control signals for the scanner (4) and delivering to the latter.
13. A control device according to claim 12, which is so formed that the Ansteuersignaler- generating means (20) for generating the drive signals in dependence on at least the detected input signals a target track, and generates the drive signals from the target path.
14. A control device according to claim 12 or 13 which is so formed that the Ansteuersi- gnalerzeugungseinrichtung (20) from the target path using the at least a scanner parameter, a desired movement and determined from the target movement, the drive signals.
15. A control device according to claim 13 or 14 which is so formed that the Ansteuersi- gnalerzeugungseinrichtung (20) the scanner uses a parameter for determining the target path at least.
16. Control device according to one of claims 13 to 15, which is formed so that the driving signal generating means (20) determine the set path and / or the desired movement in dependence on the at least one scanner parameters with the goal of the lowest possible total duration of the movement can.
17. Control device according to one of claims 13 to 16, which is formed so that the driving signal generating means (20) upon detection of input signals representing at least two desired positions, the desired movement as determined from the input signals, that the coupling element (17 ) of the scanner (4) or beam (2, 7) is moved through the first to be set target position.
18. Control device according to one of claims 12 to 17, which is so constructed that the driving signal generating means (20) for the production of the drive signals from the input signals, a desired movement of the beam (2, 7), whereby predistortion is performed to discrepancies between actual movement and target movement re- duce.
19. Control device according to one of claims 12 to 18, which is so constructed that the driving signal generating means (20) upon detection of the input signals a movement of the beam (2, 7) by the scanner (4) interrupts, determines the actual position and generating the drive signals used, and other drive signals are delivered after delivery of the trigger signals generated so that the interrupted motion of the beam (2, 7) is continued.
20. A control device according to any one of claims 12 to 19, wherein the input interface (22, 29) is a hardware interface (22) to an input device (12).
21. Control device according to one of claims 12 to 20, wherein the input interface (22, 29), a software interface (29) for at least one other program or other process comprises.
22. Control device according to one of claims 12 to 21, an output interface (28, 29) for outputting lighting control signals to a lighting device (1) for discharging the deflected beam (2, 7) and / or supply control signals to an image capture having and / or processing means (19) and is further adapted to, via the input interface (22, 29) to detect further input signals, the at least one desired property of the deflected beam (2, 7) or instructions for the image capture and / or play processing means (19), and lighting control signals for the output interface (28, 29) connected to the illumination device (1) for delivery of the deflected beam (2, 7) or control commands for the image capture and / or processing means (19) to generate and the output interface (28, 29) to deliver to it.
23. Control device according to one of claims 12 to 22, comprising a real time computer (23).
24. Control device according to one of claims 12 to 22, which is given by an operating computer (19) having a user interface.
25. Laser-scanning microscope or laser manipulator with an optical scanner (4) and one with the scanner (4) control means (20) connected to drive the scanner (4) according to any one of claims 12 to 24 hours.
26. A computer program for controlling an optical scanner (4) for controlled deflection of at least one beam (2, 7) of optical beams, in particular a scanner (4) for a laser-scanning microscope or a laser-manipulator, which comprises instructions for their embodiment, a data processing device (23) claims 1 to 1 1 carries out a method according to any one of the presence, and in particular via an input interface (22, 29) of the control means (20) detects input signals at least one predetermined position of at least one moving for beam deflection coupling element (17) of the scanner (4) or the beam (2, 7) or a series of such reference positions represent, for moving the beam (2, 7) from the input signals using at least one scanner parameter control signals for the scanner (4) generated and sent to the scanner (4) outputs.
27, data storage medium that is computer readable and on which a computer program according to claim 26 is stored.
PCT/EP2006/008944 2005-10-01 2006-09-14 Process and device for controlling an optical scanner WO2007039053A1 (en)

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DE200510047217 DE102005047217A1 (en) 2005-10-01 2005-10-01 Optical scanner driving method for e.g. laser scanning microscope, involves generating driving signals for optical scanner depending on input signal using scanner parameter for moving illuminating laser beam and detection radiations

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