WO2007017625A1 - Thermal conductivity gauge - Google Patents
Thermal conductivity gauge Download PDFInfo
- Publication number
- WO2007017625A1 WO2007017625A1 PCT/GB2006/002796 GB2006002796W WO2007017625A1 WO 2007017625 A1 WO2007017625 A1 WO 2007017625A1 GB 2006002796 W GB2006002796 W GB 2006002796W WO 2007017625 A1 WO2007017625 A1 WO 2007017625A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- filament
- gauge
- bridge circuit
- arm
- temperature
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L21/00—Vacuum gauges
- G01L21/10—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured
- G01L21/12—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured measuring changes in electric resistance of measuring members, e.g. of filaments; Vacuum gauges of the Pirani type
Definitions
- This invention relates to a thermal conductivity gauge.
- the invention finds particular use as a pressure gauge for use in measuring a sub-atmospheric pressure.
- a Pirani gauge One well-known type of thermal conductivity pressure gauge is a Pirani gauge. Such gauges are used for measuring the pressure of a gas by means of a heated filament of which the temperature is measured in terms of its electrical resistance.
- the filament of a Pirani gauge typically comprises a wire carried on a suitable support to minimise loss of heat from the wire by conduction.
- the BOC Edwards APG-MP Pirani gauge contains a filament formed from a platinum/rhodium alloy. The use of materials such as platinum or Pt/Rh alloy for the wire enables the gauge to measure pressures down to 10 "3 mbar in corrosive environments typically encountered in semiconductor processing applications.
- the rate at which the filament loses heat to its surroundings is a function of the gas pressure, and hence may be used to permit the gauge to measure vacuum.
- the filament provides one arm of a Wheatstone bridge circuit.
- the gauge may be operated in either a constant temperature or a constant voltage mode.
- the power supplied to keep the filament at a constant temperature varies with changes in gas pressure, and hence this power acts as a measure of the degree of vacuum.
- the variation with gas pressure of the electrical imbalance of the bridge acts as a measure of the degree of vacuum.
- FIG. 1 A known Wheatstone bridge circuit of a Pirani gauge operated in a constant temperature mode is illustrated in Figure 1.
- This bridge circuit 100 has the usual four resistances R 1 , R 2 , R 3 and R 4 , each provided on a respective arm of the bridge circuit 100, and where R 1 , R3 and R 4 are fixed resistances and R 2 is the resistance of the filament of the Pirani gauge.
- the operational amplifier 102 applies a voltage V 0 to the top of the bridge circuit 100. Assuming that the bridge circuit 102 is initially balanced at a certain pressure, then a variation in the resistance of the filament, due to a variation in the rate at which the filament loses heat to its surroundings causing a reduction in the temperature, will cause the bridge circuit 100 to become unbalanced. This change in the resistance of the filament will introduce a positive error voltage at the input of the amplifier 102. After amplification of this voltage, the signal from the amplifier 102 adjusts the bridge voltage V 0 and hence also the current through the filament so that the temperature of the filament is adjusted and the bridge balance is restored. In this mode of operation, calibration of the gauge will allow conversion of the bridge voltage V 0 to pressure.
- the filament in a constant temperature mode, the filament is heated until its hot resistance achieves a balanced bridge.
- the variable resistance of the filaments can mean that the operating temperature can vary between filaments, typically by as much as 40 0 C. Variation in the operating temperature between filaments can result in a variation in the sensitivity of the filaments to pressure changes, which can result in a variation in the accuracy of the vacuum measurements between gauges.
- the filaments have to be manufactured to a very tight resistance tolerance, typically less than ⁇ 0.5%. This can make manufacture of the filaments particularly labour intensive, and can increase the overall cost of the gauge.
- the present invention provides a thermal conductivity gauge comprising a filament in one arm of a Wheatstone bridge circuit, and means, preferably a potentiometer, for varying the resistance of a diagonally opposite arm of the bridge circuit to set the bridge voltage to a predetermined value and thereby set the temperature of the filament to a predetermined value.
- the temperature of the filament can be maintained at or around a predetermined value irrespective of the filament resistance. Consequently, the manufacturing tolerances of the filaments can be relaxed, which can reduce the level of labour skills required to manufacture the filaments to the hitherto required tight tolerances, and thereby reduce the overall cost of the gauge.
- the potentiometer is a manually adjustable potentiometer, which may form part of an analogue circuit for providing a variable resistance of the bridge circuit.
- the potentiometer is a digital potentiometer, the gauge comprising a controller for adjusting the potentiometer to control the bridge voltage and thereby control the operating temperature of the filament. Therefore, the present invention also provides a thermal conductivity gauge comprising a filament in one arm of a Wheatstone bridge circuit, a digital potentiometer in a diagonally opposite arm of the bridge circuit, and a controller for adjusting the resistance of the potentiometer to set the bridge voltage to a predetermined value and thereby set the temperature of the filament to a predetermined value.
- the gauge preferably comprises a comparator, for example an operational amplifier, for balancing the bridge circuit.
- the gauge preferably comprises a temperature compensator in an arm of the circuit located adjacent the arm of the filament for adjusting the current passing through the filament with variation in ambient temperature.
- the gauge is arranged to produce an electrical output signal representative of gas pressure adjacent the filament.
- Figure 1 illustrates a known circuit of a thermal conductivity gauge
- Figure 2 illustrates a first embodiment of a circuit of a thermal conductivity gauge
- Figure 3 illustrates a second embodiment of a circuit of a thermal conductivity gauge
- Figure 4 illustrates the variation with manufacturing tolerance of the operating temperature of a filament of a thermal conductivity gauge at a constant pressure.
- a first embodiment of a thermal conductivity gauge comprises a Wheatstone bridge circuit 10 comprising fixed resistors R1 , R2 and R3, and a filament 12 each disposed in a respective arm 14, 16, 18, 20 of the bridge circuit 10.
- the filament 12 can be formed in a number of different configurations, for example a single or double length of a straight wire, a single or a double length of coiled wire and can be made from various materials such as tungsten, platinum and platinum alloys, nickel and nickel alloys.
- the bridge circuit 10 further includes a variable potentiometer 22 in arm 16 of the bridge circuit 10, where arm 16 is diagonally opposite the arm 20 in which the filament 12 is located.
- the potentiometer 22 is a manually adjustable potentiometer, which provides with resistor R2 an analogue circuit for providing a variable resistance of the bridge circuit.
- a temperature compensator 24 is located in arm 18 of the bridge circuit 10, arm 18 being located adjacent arms 16 and 20 of the bridge circuit 10.
- a comparator or operational amplifier 26 receives a supply voltage VSUPPLY and serves to keep the bridge balanced by adjusting the bridge voltage V 0 to maintain the filament 12 at a constant resistance.
- the bridge circuit 10 is calibrated by exposing the filament 12 to a known pressure.
- the potentiometer 22 is adjusted to set the bridge voltage V 0 to a predetermined value. Consequently, irrespective of the resistance of the filament 12, the temperature of the filament 12 is set to a predetermined operating temperature T op .
- the operational amplifier 26 adjusts the bridge voltage V 0 from the predetermined value in order to maintain the filament 12 at or around T op .
- the variation in V 0 can enable the pressure of the atmosphere to which the filament 12 is exposed to be monitored.
- the temperature compensator 24 serves to vary the resistance in the arm 18 of the bridge circuit 10 with ambient temperature, so that the operating temperature of the filament can be maintained at a fixed temperature above the ambient temperature.
- a second embodiment of a thermal conductivity gauge comprises a Wheatstone bridge circuit 10' illustrated in Figure 3.
- the second embodiment varies from the first embodiment in that the manually adjustable potentiometer 22 of the first embodiment has been replaced by a digital potentiometer 28 that is controlled by a controller 30.
- the controller 30 monitors the bridge voltage V 0 , and adjusts the digital potentiometer 28 to set the bridge voltage to the predetermined value.
- a digital potentiometer generally comprises an array of switches that can each engage a respective resistor. In response to a signal received from the controller 30, the digital potentiometer activates selected ones of the switches so that the digital potentiometer has the desired resistance.
- Figure 4 is a graph illustrating the variation with manufacturing deviation of the operating temperature of a filament of a thermal conductivity gauge at a constant pressure.
- Trace 32 illustrates the variation of the operating temperature of the filament with manufacturing deviation in the prior thermal conductivity gauge of Figure 1
- trace 34 illustrates the variation of the operating temperature of a filament in the gauge of Figure 2 or Figure 3.
- the first and second embodiments of the gauge can set the operating temperature of the filament to a predetermined value, in this example just below 100 0 C, irrespective of variation in the manufacture of the filament 12.
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
- Measuring Instrument Details And Bridges, And Automatic Balancing Devices (AREA)
- Measuring Temperature Or Quantity Of Heat (AREA)
Abstract
A thermal conductivity gauge comprises a filament (12) in one arm (20) of a Wheatstone bridge circuit, a variable digital potentiometer (28) in a diagonally opposite arm (16) of the bridge circuit, and a controller (30) for adjusting the resistance of the potentiometer to control the bridge voltage (Vo) so that, during use, the temperature of the filament (12) is maintained at or around a predetermined value.
Description
THERMAL CONDUCTIVITY GAUGE
This invention relates to a thermal conductivity gauge. The invention finds particular use as a pressure gauge for use in measuring a sub-atmospheric pressure.
One well-known type of thermal conductivity pressure gauge is a Pirani gauge. Such gauges are used for measuring the pressure of a gas by means of a heated filament of which the temperature is measured in terms of its electrical resistance. The filament of a Pirani gauge typically comprises a wire carried on a suitable support to minimise loss of heat from the wire by conduction. For example, the BOC Edwards APG-MP Pirani gauge contains a filament formed from a platinum/rhodium alloy. The use of materials such as platinum or Pt/Rh alloy for the wire enables the gauge to measure pressures down to 10"3 mbar in corrosive environments typically encountered in semiconductor processing applications.
The rate at which the filament loses heat to its surroundings is a function of the gas pressure, and hence may be used to permit the gauge to measure vacuum.
In the Pirani gauge, the filament provides one arm of a Wheatstone bridge circuit. The gauge may be operated in either a constant temperature or a constant voltage mode. In the former mode, the power supplied to keep the filament at a constant temperature varies with changes in gas pressure, and hence this power acts as a measure of the degree of vacuum. In the latter mode, the variation with gas pressure of the electrical imbalance of the bridge acts as a measure of the degree of vacuum.
A known Wheatstone bridge circuit of a Pirani gauge operated in a constant temperature mode is illustrated in Figure 1. This bridge circuit 100 has the usual four resistances R1, R2, R3 and R4, each provided on a respective arm of the bridge circuit 100, and where R1, R3 and R4 are fixed resistances and R2 is the
resistance of the filament of the Pirani gauge. The balanced condition of the bridge circuit 100 is given by the equation R2 = Ri .R4/ R3.
In use, the operational amplifier 102 applies a voltage V0 to the top of the bridge circuit 100. Assuming that the bridge circuit 102 is initially balanced at a certain pressure, then a variation in the resistance of the filament, due to a variation in the rate at which the filament loses heat to its surroundings causing a reduction in the temperature, will cause the bridge circuit 100 to become unbalanced. This change in the resistance of the filament will introduce a positive error voltage at the input of the amplifier 102. After amplification of this voltage, the signal from the amplifier 102 adjusts the bridge voltage V0 and hence also the current through the filament so that the temperature of the filament is adjusted and the bridge balance is restored. In this mode of operation, calibration of the gauge will allow conversion of the bridge voltage V0 to pressure.
Thus, in a constant temperature mode, the filament is heated until its hot resistance achieves a balanced bridge. If the manufacturing tolerances to which the filaments are made are relatively low, say around ±2%, the variable resistance of the filaments can mean that the operating temperature can vary between filaments, typically by as much as 400C. Variation in the operating temperature between filaments can result in a variation in the sensitivity of the filaments to pressure changes, which can result in a variation in the accuracy of the vacuum measurements between gauges.
To achieve a constant operating temperature across all manufactured gauges, the filaments have to be manufactured to a very tight resistance tolerance, typically less than ±0.5%. This can make manufacture of the filaments particularly labour intensive, and can increase the overall cost of the gauge.
In order to address this problem, the present invention provides a thermal conductivity gauge comprising a filament in one arm of a Wheatstone bridge circuit, and means, preferably a potentiometer, for varying the resistance of a
diagonally opposite arm of the bridge circuit to set the bridge voltage to a predetermined value and thereby set the temperature of the filament to a predetermined value.
By controlling the bridge voltage in this manner, the temperature of the filament can be maintained at or around a predetermined value irrespective of the filament resistance. Consequently, the manufacturing tolerances of the filaments can be relaxed, which can reduce the level of labour skills required to manufacture the filaments to the hitherto required tight tolerances, and thereby reduce the overall cost of the gauge.
In one arrangement, the potentiometer is a manually adjustable potentiometer, which may form part of an analogue circuit for providing a variable resistance of the bridge circuit. In another arrangement, the potentiometer is a digital potentiometer, the gauge comprising a controller for adjusting the potentiometer to control the bridge voltage and thereby control the operating temperature of the filament. Therefore, the present invention also provides a thermal conductivity gauge comprising a filament in one arm of a Wheatstone bridge circuit, a digital potentiometer in a diagonally opposite arm of the bridge circuit, and a controller for adjusting the resistance of the potentiometer to set the bridge voltage to a predetermined value and thereby set the temperature of the filament to a predetermined value.
The gauge preferably comprises a comparator, for example an operational amplifier, for balancing the bridge circuit.
The gauge preferably comprises a temperature compensator in an arm of the circuit located adjacent the arm of the filament for adjusting the current passing through the filament with variation in ambient temperature.
The gauge is arranged to produce an electrical output signal representative of gas pressure adjacent the filament.
By way of example, preferred embodiments of the invention will now be further described with reference to the following figures in which:
Figure 1 illustrates a known circuit of a thermal conductivity gauge;
Figure 2 illustrates a first embodiment of a circuit of a thermal conductivity gauge;
Figure 3 illustrates a second embodiment of a circuit of a thermal conductivity gauge; and
Figure 4 illustrates the variation with manufacturing tolerance of the operating temperature of a filament of a thermal conductivity gauge at a constant pressure.
With reference first to Figure 2, a first embodiment of a thermal conductivity gauge comprises a Wheatstone bridge circuit 10 comprising fixed resistors R1 , R2 and R3, and a filament 12 each disposed in a respective arm 14, 16, 18, 20 of the bridge circuit 10. As is known, the filament 12 can be formed in a number of different configurations, for example a single or double length of a straight wire, a single or a double length of coiled wire and can be made from various materials such as tungsten, platinum and platinum alloys, nickel and nickel alloys. The bridge circuit 10 further includes a variable potentiometer 22 in arm 16 of the bridge circuit 10, where arm 16 is diagonally opposite the arm 20 in which the filament 12 is located. In this embodiment, the potentiometer 22 is a manually adjustable potentiometer, which provides with resistor R2 an analogue circuit for providing a variable resistance of the bridge circuit. A temperature compensator 24 is located in arm 18 of the bridge circuit 10, arm 18 being located adjacent arms 16 and 20 of the bridge circuit 10.
A comparator or operational amplifier 26 receives a supply voltage VSUPPLY and serves to keep the bridge balanced by adjusting the bridge voltage V0 to maintain the filament 12 at a constant resistance.
The bridge circuit 10 is calibrated by exposing the filament 12 to a known pressure. The potentiometer 22 is adjusted to set the bridge voltage V0 to a predetermined value. Consequently, irrespective of the resistance of the filament 12, the temperature of the filament 12 is set to a predetermined operating temperature Top. As the pressure to which the filament 12 is exposed varies, the operational amplifier 26 adjusts the bridge voltage V0 from the predetermined value in order to maintain the filament 12 at or around Top. The variation in V0 can enable the pressure of the atmosphere to which the filament 12 is exposed to be monitored. The temperature compensator 24 serves to vary the resistance in the arm 18 of the bridge circuit 10 with ambient temperature, so that the operating temperature of the filament can be maintained at a fixed temperature above the ambient temperature.
A second embodiment of a thermal conductivity gauge comprises a Wheatstone bridge circuit 10' illustrated in Figure 3. The second embodiment varies from the first embodiment in that the manually adjustable potentiometer 22 of the first embodiment has been replaced by a digital potentiometer 28 that is controlled by a controller 30. During calibration, the controller 30 monitors the bridge voltage V0, and adjusts the digital potentiometer 28 to set the bridge voltage to the predetermined value. As is known, a digital potentiometer generally comprises an array of switches that can each engage a respective resistor. In response to a signal received from the controller 30, the digital potentiometer activates selected ones of the switches so that the digital potentiometer has the desired resistance.
Figure 4 is a graph illustrating the variation with manufacturing deviation of the operating temperature of a filament of a thermal conductivity gauge at a constant pressure. Trace 32 illustrates the variation of the operating temperature of the filament with manufacturing deviation in the prior thermal conductivity gauge of Figure 1 , whilst trace 34 illustrates the variation of the operating temperature of a filament in the gauge of Figure 2 or Figure 3. As illustrated by the graph, the first and second embodiments of the gauge can set the operating temperature of the
filament to a predetermined value, in this example just below 1000C, irrespective of variation in the manufacture of the filament 12.
Claims
1. A thermal conductivity gauge comprising a filament in one arm of a Wheatstone bridge circuit, a digital potentiometer in a diagonally opposite arm of the bridge circuit, and a controller for adjusting the resistance of the potentiometer to set the bridge voltage to a predetermined value and thereby set the temperature of the filament to a predetermined value.
2. A gauge according to Claim 1 , comprising a comparator for balancing the bridge circuit.
3. A gauge according to Claim 2, wherein the comparator comprises an operational amplifier.
4. A gauge according to any preceding claim, comprising a temperature compensator in an arm of the circuit located adjacent the arm of the filament for adjusting the current passing through the filament with variation in ambient temperature.
5. A gauge according to any preceding claim, arranged to produce an electrical output signal representative of gas pressure adjacent the filament.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP06779065A EP1913355A1 (en) | 2005-08-08 | 2006-07-26 | Thermal conductivity gauge |
JP2008525610A JP2009505052A (en) | 2005-08-08 | 2006-07-26 | Thermal conductivity gauge |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB0516274.8 | 2005-08-08 | ||
GB0516274A GB0516274D0 (en) | 2005-08-08 | 2005-08-08 | Thermal conductivity gauge |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2007017625A1 true WO2007017625A1 (en) | 2007-02-15 |
WO2007017625A8 WO2007017625A8 (en) | 2007-05-03 |
Family
ID=34984264
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/GB2006/002796 WO2007017625A1 (en) | 2005-08-08 | 2006-07-26 | Thermal conductivity gauge |
Country Status (5)
Country | Link |
---|---|
EP (1) | EP1913355A1 (en) |
JP (1) | JP2009505052A (en) |
GB (1) | GB0516274D0 (en) |
TW (1) | TW200714887A (en) |
WO (1) | WO2007017625A1 (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2008027226A2 (en) * | 2006-08-29 | 2008-03-06 | Eastman Kodak Company | Pressure gauge for organic materials |
EP2515087A4 (en) * | 2009-12-16 | 2017-06-14 | Beijing Sevenstar Electronics Co. Ltd. | Flow meter with digital temperature compensation |
CN111721469A (en) * | 2020-06-17 | 2020-09-29 | 中国计量大学 | High-sensitivity miniature Pirani gauge |
CN113238602A (en) * | 2021-05-11 | 2021-08-10 | 西南科技大学 | Unbalanced Wheatstone bridge device and determination method thereof |
CN114577392A (en) * | 2018-04-17 | 2022-06-03 | 万机仪器公司 | Heat conduction measuring instrument and method for measuring air pressure |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10704969B2 (en) * | 2017-11-21 | 2020-07-07 | The Boeing Company | Stress sensor |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2030956A (en) * | 1929-09-25 | 1936-02-18 | Western Electric Co | Measuring apparatus |
US3580081A (en) * | 1969-09-10 | 1971-05-25 | Veeco Instr Inc | Vacuum gauge |
DE4308433A1 (en) * | 1993-03-17 | 1994-09-22 | Leybold Ag | Thermal conduction vacuum meter with measuring cell, measuring device and connecting cable |
WO2001098735A2 (en) * | 2000-06-23 | 2001-12-27 | Instrumentarium Corporation | Hot wire gas flow sensor having improved operation |
US20020134170A1 (en) * | 2001-03-24 | 2002-09-26 | Seong Dae Jin | Apparatus for measuring distribution of flow rates of flowable medium |
US20040055374A1 (en) * | 2002-06-12 | 2004-03-25 | Cohen Adam J. | System and method for measuring the velocity of fluids |
-
2005
- 2005-08-08 GB GB0516274A patent/GB0516274D0/en not_active Ceased
-
2006
- 2006-07-26 EP EP06779065A patent/EP1913355A1/en not_active Withdrawn
- 2006-07-26 WO PCT/GB2006/002796 patent/WO2007017625A1/en active Application Filing
- 2006-07-26 JP JP2008525610A patent/JP2009505052A/en active Pending
- 2006-08-08 TW TW095128963A patent/TW200714887A/en unknown
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2030956A (en) * | 1929-09-25 | 1936-02-18 | Western Electric Co | Measuring apparatus |
US3580081A (en) * | 1969-09-10 | 1971-05-25 | Veeco Instr Inc | Vacuum gauge |
DE4308433A1 (en) * | 1993-03-17 | 1994-09-22 | Leybold Ag | Thermal conduction vacuum meter with measuring cell, measuring device and connecting cable |
WO2001098735A2 (en) * | 2000-06-23 | 2001-12-27 | Instrumentarium Corporation | Hot wire gas flow sensor having improved operation |
US20020134170A1 (en) * | 2001-03-24 | 2002-09-26 | Seong Dae Jin | Apparatus for measuring distribution of flow rates of flowable medium |
US20040055374A1 (en) * | 2002-06-12 | 2004-03-25 | Cohen Adam J. | System and method for measuring the velocity of fluids |
Non-Patent Citations (1)
Title |
---|
ENGLISH J ET AL: "A WIDE RANGE CONSTANT-RESISTANCE PIRANI GAUGE WITH AMBIENT TEMPERATURE COMPENSATION", JOURNAL OF SCIENTIFIC INSTRUMENTS, INSTITUTE OF PHYSICS. LONDON, GB, vol. 42, no. 2, 1 February 1965 (1965-02-01), pages 77 - 80, XP002034384 * |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2008027226A2 (en) * | 2006-08-29 | 2008-03-06 | Eastman Kodak Company | Pressure gauge for organic materials |
WO2008027226A3 (en) * | 2006-08-29 | 2008-04-24 | Eastman Kodak Co | Pressure gauge for organic materials |
EP2515087A4 (en) * | 2009-12-16 | 2017-06-14 | Beijing Sevenstar Electronics Co. Ltd. | Flow meter with digital temperature compensation |
CN114577392A (en) * | 2018-04-17 | 2022-06-03 | 万机仪器公司 | Heat conduction measuring instrument and method for measuring air pressure |
EP4016034A1 (en) * | 2018-04-17 | 2022-06-22 | MKS Instruments, Inc. | Thermal conductivity gauge |
US11656139B2 (en) | 2018-04-17 | 2023-05-23 | Mks Instruments, Inc. | Thermal conductivity gauge |
US11946823B2 (en) | 2018-04-17 | 2024-04-02 | Mks Instruments, Inc. | Thermal conductivity gauge |
CN111721469A (en) * | 2020-06-17 | 2020-09-29 | 中国计量大学 | High-sensitivity miniature Pirani gauge |
CN113238602A (en) * | 2021-05-11 | 2021-08-10 | 西南科技大学 | Unbalanced Wheatstone bridge device and determination method thereof |
Also Published As
Publication number | Publication date |
---|---|
EP1913355A1 (en) | 2008-04-23 |
JP2009505052A (en) | 2009-02-05 |
TW200714887A (en) | 2007-04-16 |
GB0516274D0 (en) | 2005-09-14 |
WO2007017625A8 (en) | 2007-05-03 |
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